Abstract: There is provided an exposure apparatus capable of accurately performing an exposure process and a measurement process based on a liquid immersion method. The exposure apparatus (EX), which forms a liquid immersion area (AR2) of a liquid (LQ) on an image surface side of a projection optical system (PL), and exposes a substrate (P) via the projection optical system (PL) and the liquid (LQ) of the immersion area (AR2), is provided with a measuring device (60) which measures at least one of a property and composition of the liquid (LQ) for forming the liquid immersion area (AR2).

Abstract: A device manufacturing method includes applying, in a lithographic apparatus, a prewetting liquid on top of a layer of radiation sensitive material of a substrate, on a substrate table, or on both; providing an immersion liquid for use in projecting a patterned beam of radiation on the prewet substrate and/or substrate table; and projecting a patterned beam of radiation, through the immersion liquid, onto the substrate and/or the substrate table.

Abstract: The present invention provides an exposure method which illuminates each of patterns, to be subjected to double exposure, on entire surfaces thereof in optimal illumination conditions respectively, and which performs the exposure with high throughput. Upon transferring a pattern of a reticle onto a wafer by the scanning exposure method, first and second pattern areas are formed in advance on the reticle to be adjacent in the scanning direction, and when the first and second pattern areas simultaneously pass across a field of a projection optical system, the first pattern area is illuminated in a first illumination condition by using a first illumination slit of which width in the scanning direction is gradually narrowed, and the second pattern area is illuminated in a second illumination condition by using a second illumination slit of which width in the scanning direction is gradually widened, to thereby expose the wafer.

Abstract: Objective, in particular a projection objective for a microlithography projection-exposure installation, with at least one fluoride crystal lens. A reduction in the detrimental influence of birefringence is achieved if this lens is a (100)-lens with a lens axis which is approximately perpendicular to the {100} crystallographic planes or to the crystallographic planes equivalent thereto of the fluoride crystal. In the case of objectives with at least two fluoride crystal lenses, it is favorable if the fluoride crystal lenses are arranged such that they are rotated with respect to one another. The lens axes of the fluoride crystal lenses may in this case point not only in the <100> crystallographic direction but also in the <111> crystallographic direction or in the <110> crystallographic direction.

Abstract: A method of transferring an image of a mask pattern onto a substrate with a lithographic apparatus is presented. The lithographic apparatus includes an illumination system configured to provide an illumination configuration and a projection system. In an embodiment of the invention, the method includes illuminating a mask pattern with an illumination configuration that includes a dark field component; and projecting an image of the illuminated pattern onto the substrate at a plurality of positions spaced apart from a reference plane that substantially coincides with or is substantially parallel to a surface of the substrate.

Abstract: A lithography method and system comprise an array of individually controllable elements, a first datapath section, a second datapath section, and a quantization device. The array of individually controllable elements modulates a beam of radiation.. The first datapath section converts data defining a requested dose pattern into a stream of setpoint data defining a desired sequence of setpoints for the array of individually controllable elements. The second datapath section stores and reproduces the stream of setpoint data for the array of individually controllable elements. The quantization device digitizes the stream of setpoint data before it is passed from the first datapath section to the second datapath section. The first datapath section further comprises a noise controller configured to incorporate noise of a predetermined magnitude into the stream of setpoint data before it is digitized by the quantization device.

Abstract: A system and method are used to form incoherent beams from at least a partially coherent beam, such that interference or speckle patterns are substantially eliminated. A rotating optical element directs the partially coherent beam to reflect from an angular distribution changing element to form an incoherent beam. The partially coherent beam can be directed at valying angles or positions onto the angular distribution changing element through rotation of the rotating optical element. The angles can vary as a function of time.

Abstract: An exposure apparatus that includes a first optical system having an optical element that separates incident exposure light into a first exposure light and a second exposure light and emits the first exposure light in a first direction and emits the second exposure light in a second direction that differs from the first direction; and a second optical system that irradiates the second exposure light that is emitted from the optical element in the second direction onto the substrate together with the first exposure light that is emitted in the first direction.

Abstract: An exposure apparatus includes a light source unit which emits an exposure light beam; and an illumination system which includes a splitting optical system splitting the exposure light beam emitted from the light source unit into a first exposure light beam and a second exposure light beam, and which illuminates a first pattern with the first exposure light beam and illuminates a second pattern with the second exposure light beam; wherein a predetermined area on a substrate is multiply exposed by radiating the first exposure light beam from the first pattern and the second exposure light beam from the second pattern onto the predetermined area on the substrate.

Abstract: Lithographic Apparatus, Lens Interferometer and Device Manufacturing Method A lithographic apparatus includes an illumination system that is configured to condition a radiation beam; a projection system that is configured to project at least a portion of the radiation beam as a projected radiation beam; and a lens interferometer for sensing a wavefront state of the projected radiation beam. The lens interferometer is provided with a polarizing element so as to be capable of sensing a polarisation state of the projected radiation beam.

Abstract: Reticle stages for lithography systems and lithography methods are disclosed. In a preferred embodiment, a lithography reticle stage includes a first region adapted to support a first reticle, and at least one second region adapted to support a second reticle.

Abstract: A device for measuring the distances (d) to far-off objects (8) and close objects by emitting modulated laser beams (1) that are reflected on the objects. The device includes an objective (2), structure(s) (12, 36, 38, 39, 40) for selecting beams, and a receiver (7). Beams are bundled by the objective, the beams not only containing the laser beams (3) reflected on the objects but also background beams (28). The beams in an associated cross-sectional region (34, 37) of the bundle are selected from a bundle of beams by the selection structure(s) (12, 36, 38, 39, 40). The cross-sectional region includes a first section (5) and at least one second section (6), laser beams (3) reflected by a far-off object being associated with the first section (5), and laser beams (3) reflected by a close object (8) being associated with the at least second section (6).

Abstract: A presentation character member is rotated on its axis of rotation while being illuminated with light. The presentation character member has a presentation character which is rotated on the axis of rotation of the presentation character member. The presentation character is symmetrical or asymmetrical with respect to a predetermined axis which may coincide with the axis of rotation of the presentation character member. According to the above, a three-dimensional pseudo-image of the presentation character is formed and presented.

Abstract: Microfabricated tools useful for manipulating small, delicate samples are formed from thin plastic films. The films have a small thickness (preferably 5 to 50 micrometers and typically 10 micrometers) and small lateral dimensions (preferably 2 mm or less and typically 0.1 to 1 mm) so that they are reasonably flexible, but are preferably curved by being wrapped around a cylindrical or flat post to give them some rigidity. The softness and thinness of the plastic reduce risk of sample damage during incidental contact with the tool. Its thinness makes it optically and X-ray transparent, so that the samples can be clearly visualized during manipulations and so that the tools can be used to collect X-ray data from samples. As an option, an X-ray sensitive phosphor is incorporated in the film at low concentration. This allows the X-ray beam to be visually located on the mount or tool.

Abstract: The present invention includes an apparatus for aerosol measurement having a high concentration of particles the apparatus comprising a diluter for diluting the concentration of particles in a sample aerosol stream to form a diluted aerosol stream, and a sensor for detecting the particles in the diluted aerosol stream by vapor condensation, droplet growth and optical detection. Such apparatus may be housed in a common housing along with the electronics for operating the apparatus and components such as pumps and filters that may be necessary. The diluter includes an input for an aerosol stream having an initial particle concentration, and a dilution stream. The aerosol stream and the dilution stream flow through a restriction which is sized such that turbulent flow is created so that the dilution stream and the aerosol stream are mixed to produce a diluted aerosol stream.

Abstract: A method and apparatus sense attributes of reflected signals in an optical sensing system. In one embodiment, a method for sensing in an optical sensing system comprising an interrogator coupled to a Bragg grating sensor by an optical cable includes the steps of producing a first optical signal, coupling the first optical signal to an optical cable, receiving a first reflected signal from a Bragg grating sensor within the optical cable, resolving a wavelength of first reflected signal, producing a second optical signal, coupling the second optical signal to the optical cable, receiving a second reflected signal caused by Brillouin backscattering within the optical cable, and resolving a difference in frequencies between the second optical signal and second reflected signal. Embodiments of the method and apparatus are particularly useful for sensing temperature and strain in hazardous locations such as down hole gas and oil field applications and the like.

Abstract: Methods and apparatus for measuring a critical dimension of an optically-anisotropic feature, including extracting a number of values each descriptive of the optically-anisotropic feature, including values corresponding to ordinary and extraordinary measurements of one or more optical characteristics of the optically-anisotropic feature. The optical characteristics can include the index of refraction and/or the extinction coefficient of the optically-anisotropic feature, among others. Additionally, the values can be input into an optical critical dimension (OCD) measurement model, such that the critical dimension can be verified via optical measurement based on the OCD measurement model. The optical measurement of the critical dimension can also be verified via scanning electron microscope (SEM) measurement.

Abstract: An optical measuring device according to the present invention includes: a plane mirror (3), which has a central opening that functions as either a light entering window or a light source fitting hole (5) and an observation window 6? that enables a photodetector (6) to take measurements; and an integrating hemisphere (2), which has its center of radius of curvature defined within the central opening of the plane mirror (3) and of which the inner wall surface functions as a light diffuse reflective surface (1). The plane mirror (3) and the integrating hemisphere (2) form an integrating space inside.

Abstract: Apparatus for imaging the wall of a borehole drilled through an underground formation, comprising: a light source; an optical detector device such as a CCD camera; a sensor head including a window for application against the wall of the borehole, the light source being connected to the sensor head so as to illuminate the region of the borehole wall when the sensor head is applied to the wall; and an optical fibre bundle connecting the window to the optical detector device so as to pass optical signals from the wall to the optical detector device; wherein the optical fibre bundle comprises a coherent bundle, each fibre of the coherent bundle providing one pixel of a two-dimensional, multi-pixel image of the borehole wall.

Abstract: A cavity ring-down spectrometer having a light-conveying structure, a mirror and an isolator. The structure may form a resonator cavity, and the resonator cavity may include a sample sub-cavity and a mirror sub-cavity. A preconcentrator medium may be within a sample sub-cavity, and the medium may adsorb a sample substance entering the sample sub-cavity. A heater may heat the medium to desorb the sample through which a light can propagate. The mirror may be within the mirror sub-cavity, and the mirror may direct light through the mirror sub-cavity and the sample sub-cavity. The isolator may reduce, inhibit or prevent the sample substance in the sample sub-cavity from entering the mirror sub-cavity and affecting the mirror in the mirror sub-cavity.

Abstract: The present invention discloses an optical measurement and/or inspection device that, in one application, may be used for inspection of semiconductor devices. It comprises a light source for providing light rays; a half-parabolic-shaped reflector having an inner reflecting surface, where the reflector having a focal point and an axis of summary, and a device-under-test is disposed thereabout the focal point. The light rays coming into the reflector that is in-parallel with the axis of summary would be directed to the focal point and reflect off said device-under-test and generate information indicative of said device-under-test, and then the reflected light rays exit said reflector. A detector receives the exited light rays and the light rays can be analyzed to determine the characteristics of the device-under-test.

Abstract: A spectral analytical unit for acting on a parallel light bundle having different wavelengths.

Abstract: An instrument for measuring the size distribution of a particle sample by counting and classifying particles into selected size ranges. The particle concentration is reduced to the level where the probability of measuring scattering from multiple particles at one time is reduced to an acceptable level. A light beam is focused or collimated through a sample cell, through which the particles flow. As each particle passes through the beam, it scatters, absorbs, and transmits different amounts of the light, depending upon the particle size. So both the decrease in the beam intensity, due to light removal by the particle, and increase of light, scattered by the particle, may be used to determine the particle size, to classify the particle and count it in a certain size range.

Abstract: For determining mode spectra of an optical property of a device under test (DUT) in dependence on a spectral parameter, with the mode spectra corresponding to the device's principal states of polarization (PSPs), minimum and maximum envelope values are determined for the optical property, or other measured values from which the envelope values can be determined with respect to possible state of polarization of light that is incident upon the DUT, whereby the minimum envelope values and the maximum envelope values are determined for a spectral range of interest of the spectral parameter. The mode spectra are derived for the optical property for at least one of the PSPs as a function of the spectral parameter for the spectral range of interest, whereby a partial correspondence of the mode spectra with the minimum and maximum envelope values is used for deriving the mode spectra.

Abstract: An interferometric-spatial-phase imaging (ISPI) system includes a substrate wafer. An alignment configuration is permanently embedded in the substrate wafer. The alignment configuration uses a global coordinate reference system by providing a plurality of global reference marks that encompass up to the entire substrate wafer. A plurality of alignment markings is provided on a surface in close proximity to the alignment configuration for obtaining continuous six-axis control of a scanning probe tip with respect to the global coordinate reference system.

Abstract: A pattern transfer method for transferring an imprinting pattern formed on a mold provided with an alignment mark onto a substrate provided with an alignment mark or a resin material interposed between the substrate and the mold includes a first step for obtaining a first image by disposing the alignment mark provided to the mold and an alignment mark provided to a reference substrate at a first object position and observing the alignment marks through a first image pickup portion, a second step for obtaining a second image by disposing the alignment mark provided to the reference substrate at a second object position spaced apart from the first object position and observing the alignment mark through a second image pickup portion, and a third step for obtaining information about a difference in image position between the alignment marks by using the first and second images.

Abstract: The invention proposes a spectroscopic device and a spectroscopic method, comprising a tubular measuring cell, in particular, for absorption spectroscopy of contaminated carbon dioxide, wherein the measuring cell is stabilized using at least one tube which is disposed parallel to the direction of extension of the measuring cell and is rigidly connected to the measuring cell.

Abstract: An apparatus for investigating a sample comprising: a source of beam radiation; a detector for detecting a beam of radiation reflected by the sample and an optical subsystem for manipulating the beam between source and detector wherein the optical subsystem comprises a first optical element arranged in use to angularly deflect the source beam within a given solid angle and a second optical element arranged to focus the beam from the first optical element onto a substantially flat image plane and wherein radiation reflected by the sample passes back through the first and second optical elements to the detector.

Abstract: A spectroscopic detection system is described for monitoring ambient air for toxic chemical substances. The system can be a compact, portable multiple gas analyzer capable of detecting and discriminating a broad range of chemical constituents including various nerve and blister agents as well as toxic industrial chemicals at low or sub part per billion (ppb) levels. The system minimizes false alarms (e.g., false positives or negatives), features high specificity, and can operate with response times on the order of a few seconds to a few minutes, depending on the application. The system can be an entirely self-contained analyzer, with a Fourier Transform Infrared (FTIR) spectrometer, a gas sample cell, a detector, an embedded processor, a display, power supplies, an air pump, heating elements, and other components onboard the unit with an air intake to collect a sample and an electronic communications port to interface with external devices.

Abstract: Methods and apparatus are provided for determining the rotational rate of an optical gyro. An optical gyro comprises at least one substrate, a multi-frequency light source (MFLS) mounted on the substrate, and a resonator coupled to the MFLS. The MFLS is configured to produce a first light beam having a first frequency and a second light beam having a second frequency and phase locked with the first light beam. The resonator comprises an optical fiber coil having a hollow core. The resonator is configured to circulate a portion of each of the first and second light beams through the hollow core. The portion of the first light beam propagates in a first counter-propagating direction, and the portion of the second light beam propagates in a second counter-propagating direction. A measured difference between the first and second frequencies indicates a frequency shift proportional to the rotation rate of the optical gyro.

Abstract: An optical navigation system includes an illumination system, an image sensor, and a processing system. The illumination system directs a beam of output light toward an object so that a first portion of the output light beam reflects off the object front surface to form a first reflected light beam and a second portion of the output light beam reflects off the object back surface to form a second reflected light beam, where the first and second reflected light beams overlap in a region of space to produce an interference pattern. The image sensor captures images of the interference pattern. The processing system produces motion signals indicative of movement of the image sensor in relation to the object from comparisons of ones of the images captured by the image sensor.

Abstract: A size difference measuring method comprising: an optical interference measuring step without wringing, of obtaining, through simultaneous measurement of interference fringes, size information relating to the end standards which are set between interferometers, by an optical interferometer without wringing that comprises: one light emitter that emits coherent light; a beam splitter; the interferometers which are arranged with predetermined separation interval between them and each of which has an optical axis in agreement with the length-measurement axes of the end standards having known preliminary values; and a first interference fringe observation device and a second interference fringe observation device; and a computing step of computing a difference of a size of the end standards, based on the interference fringe phase differences acquired as the size information of the end standards.

Abstract: A device and a method for the contactless measurement of at least one curved surface. The device comprises at least one light source for generating light with a continuous spectrum, and a light exit face assigned to the light source. It furthermore has at least one measurement head having an optical imaging system with chromatic aberration for imaging the light exit face into wavelength-dependent focal planes, and an optical spectral instrument by which it is possible to record the spectral intensity distribution of light which is directed through the optical system onto the surface to be measured and is reflected therefrom. The device is furthermore equipped with an evaluation unit by which a distance between the optical system and the surface can be assigned to each wavelength at which the intensity distribution recorded by the optical spectral instrument has a local maximum. The surface to be measured is plane in one space direction.

Abstract: A method of scanning an object includes the steps of: providing a digitizer adapter having at least three markers disposed along a target surface thereof, wherein the digitizer adapter includes a spherical member disposed a predetermined distance at its center point to each of the at least three markers; securing the adapter along an outer surface of the object; creating a plurality of digital images of the object; extracting the coordinates of the at least three markers from the image using photogrammetry; calculating the coordinates of the center point of the spherical member based on the coordinates of the at least three markers; generating surface data by scanning the outer surface of the object and the spherical member; calculating the coordinates of the center point of the spherical member based on at least three points from the surface data of the spherical member; and aligning the center point coordinates to facilitate combining the data from the photogrammetric and surface scan processes.

Abstract: An apparatus for detecting the presence of a substrate that is carried by an end effector of a substrate handling assembly positioned within a substrate processing system comprises a receiving member that is coupled to an end effector and a light sensor that is operatively coupled to the receiving member and is configured to detect an amount light transmitted by the receiving member. In a modified embodiment, the apparatus also includes a transmitting member that receives light from a light source and is also coupled to the end effector.

Abstract: An image forming apparatus is disclosed, in which the index data of a document data is detected, and based on the particular index data, the contents of each index are displayed. Based on this display, an index is selected and the portion of the document data corresponding to the selected index is printed.

Abstract: In a printing apparatus that stores a sheet conveying distance correction value every sheet kind, the sheet conveying distance correction correcting a sheet conveying distance of a sheet to be printed; detects the sheet kind to be printed; prints a test chart for measuring the sheet conveying distance; determines the sheet conveying distance correction value based on the printed result of the test chart so as to store the sheet conveying distance correction value in a sheet conveying distance correction value storing unit; and conveys a sheet during printing in accordance with the sheet kind detected by a sheet kind detecting unit on the basis of the sheet conveying distance correction value obtained from the correction value storing unit, when the sheet conveying distance correction value for the sheet kind to be printed is not determined, the printing is temporarily interrupted.

Abstract: A photo album is edited and printed distributed over a client server system. A server system stores low quality and high quality digital representations of photographs. The server system sends low quality digital representations to a client computer remote from the server system in association with respective identifiers of the photographs. A user edits an electronic representation of pages of the photo album at the client computer, using an interactive display with the low quality digital representations of interactively selected photographs. After editing the client computer sends an editing result to the server system, including identifiers of the selected photographs. The server system retrieves an prints the stored high quality digital representation of the selected photographs identified by the identifiers. The user also selects positions of the photographs on pages, preferably using positions from selectable templates.

Abstract: A method and system for printing full images using a device. The method includes determining print target information according to transmission conditions existing between the device and the image forming device in response to a request sent from the device to the image forming device; transmitting the determined print target information to the image forming device; and printing selected contents from among the data using the transmitted print target information.

Abstract: A method and system for printing personal management information is provided with creating extensible hyper text markup language (XHTML)-data of the personal management information using an XHTML-template defining a layout for printing the personal management information and transmitting the created XHTML-data to an image forming device, and analyzing the transmitted XHTML-data and printing the personal management information. As a result, a user can easily edit and print the personal management information using a markup language, such as XHTML-data, in order to designate a style.

Abstract: A multi-functional multi-engine print platform engines schedules and processes job in order to minimize visibility of image defects. The print platform includes at least two marking engines that process jobs, a marking engine analyzer that determines image quality defects of the at least two marking engines, and a scheduler that creates a plan to process a job with the at least two marking engines based at least on the image quality defects each of the at least two marking engines in order to minimize visibility of the defects in images reproduced by the at least two marking engine.

Abstract: A method and system is provided for processing scanned data representative of a document image for classifying portions of the data into contone, low frequency halftone or high frequency halftone regions. The method comprises identifying an image data value of an original pixel within a portion of a document image. Average pixel values are calculated for the plurality of image regions. First and second halftone noise energy values are computed relative to the original pixel value for the plurality of image regions. The noise values are compared against preselected standards and based upon the comparing, the region can be classified as high frequency halftone, low frequency halftone or contone. Portions of image of data which may introduce unwanted biases in the measurements such as edge portions, all black or all white portions are excluded from the energy level calculations.

Abstract: System and method for generating multiprimary signals for use in display devices. A preferred embodiment comprises converting a color signal into an intermediate color space representation of the color signal, converting one of a plurality of multiprimary signals that is a representation of the color signal into an intermediate color space representation of the multiprimary signal, computing a quality measure of the intermediate color space representations of the color signal and the multiprimary signal, repeating the converting of a multiprimary signal and the computing for the remainder of the plurality of multiprimary signals, and selecting a multiprimary signal that optimizes the quality measure. The quality measure can consider requirements such as those minimizing a distance between the color signal and the multiprimary signal, an energy change as well as a phase change between the multiprimary signal and its neighbors, all leading to improved image quality.

Abstract: An image processing apparatus includes an input section, and a screen processing section. The input section inputs image information. The screen processing section performs screen processing on the input image information with a threshold matrix. A plurality of threshold values are arranged in the threshold matrix so that if the threshold values are colored in an ascending order or descending order. The threshold matrix represents at least one selected from the group consisting of capital alphabets ‘A’ to ‘Z’, lower case alphabets ‘a’ to ‘z’ and numeric characters ‘0’ to ‘9.

Abstract: A color adjustment apparatus includes a pair generating section, a vector generating section, a weight calculating section, a synthesized-vector generating section and a color converting section. The pair generating section generates pairs of colors in a first color gamut and corresponding colors in a second color gamut. One of the pairs includes white in the first color gamut. The vector generating section generates plural vectors each connecting the color in the first color gamut and the color in the second color gamut, which belong to each generated pair. The weight calculating section calculates weights in accordance with distances between a color, which is to be processed and is in the first color gamut, and origins of the generated vectors. The synthesized-vector generating section applies each calculated weight to the corresponding vector to generate a synthesized vector. The color converting section converts the color to be processed using the synthesized vector.

Abstract: An image is generated by performing area coverage modulation to express a halftone color according to a gross area of dots displayed in a pixel of the image. The image is generated in such a manner that the halftone color is expressed with a selected one of dither patterns corresponding to respective predetermined densities, each of the densities being determined by the gross area of dots calculated in view of shapes of the dots.

Abstract: A printer is operated under a first set of conditions to create a first set of M number of samples and under a target set of conditions to create a second set of K samples. Each sample is produced using the same colorant(s). The actual spectral reflectance for each sample is measured. In accordance with the present invention the actual spectral reflectances for corresponding samples in the first and second sets are used to create a cross-validated, partial-least-squares transform that maps a reflectance from a sample produced under the first set of conditions to a reflectance from a sample produced under the target set of conditions.

Abstract: The present invention includes a plurality of color correction tables respectively corresponding to a plurality of groups into which a page-background color is sorted. It is determined which group a page-background color of image data in a block that belongs to a page-background region belongs to. Consequently, color correction processing is performed by using a color correction table corresponding to the group determined. This makes it possible to carry out appropriate color correction processing according to the page-background color of an original document.

Abstract: A transform useful for predicting a reflectance value producible by a printer while operating under a predetermined target set of operating conditions using reflectance values produced by the printer while operating under a predetermined reference set of operating conditions is generated using an efficient sample set that contains the minimal required number of samples.

Abstract: A printer is operated under a first set of conditions to create a first set of M number of samples and under a target set of conditions to create a second set of K samples. Each sample is produced using the same colorant(s). The actual spectral reflectance for each sample is measured. In accordance with the present invention the actual spectral reflectances for corresponding samples in the first and second sets are used to create a cross-validated, partial-least-squares transform that maps a reflectance from a sample produced under the first set of conditions to a reflectance from a sample produced under the target set of conditions. The transform and the actual spectral reflectance measured from the M number of samples in the first set are used to produce a set of M number of predicted reflectances, where each predicted reflectance represents a sample producible by the printer under the target set of operating conditions using one of the M colorant(s).