Abstract: An apparatus is provided to effectively reduce the non-active detection gap between sensor elements of an optical sensor. Reducing the non-active gap can subsequently reduce the time delay between sensor elements, mitigating the image degrading effects of a composite element time delay. While applicable to use with a wide range of optical sensors, the invention may be used for detecting aspects of a variable-rate dynamic colorful object using a matrix sensor or a tri-linear color CCD sensor. In one variation, optical fibers extend from a first fiber optic faceplate to a second fiber optic faceplate. The optical fibers can be oriented toward or directly mounted to the sensor elements. A spacer may be used to separate the optical fibers for alignment with the sensor elements and the other end of the optical fibers are attached to each other.

Abstract: An optoelectronic sensor for sensing wetting of a windshield includes a first circuit, and a radiation emitter and a radiation detector both arranged on the first circuit to emit radiation toward the windshield and to detect radiation reflected from the windshield. Beam shapers parallelize the emitted radiation toward the windshield and focus radiation reflected from the windshield toward the detector. A coupling element couples the emitted radiation into the windshield and couples the reflected radiation out of the windshield. A structural element is arranged between the lens holder and the coupling element. The structural element may have retaining elements for positioning a second circuit arranged between the lens holder and the structural element relative to the windshield. The structural element may have support elements for adjustably positioning the lens holder and thereby the beam shapers relative to the first circuit and the windshield.

Abstract: A probe which generates near-field light from an aperture at the tip is provided. The tip is covered with a lightproof member, at least the interior of the lightproof member is in the shape of a cone having a plane-shaped top, and the aperture is provided in the top plane.

Abstract: In preferred forms of the invention an array of MEMS mirrors or small mirrors inside an optical system operates closed-loop. These mirrors direct external source light, or internally generated light, onto an object—and detect light reflected from it onto a detector that senses the source. Local sensors measure mirror angles relative to the system. Sensor and detector outputs yield source location relative to the system. One preferred mode drives the MEMS mirrors, and field of view seen by the detector, in a raster, collecting a 2-D or 3-D image of the scanned region. Energy reaching the detector can be utilized to analyze object characteristics, or with an optional active distance-detecting module create 2- or 3-D images, based on the object's reflection of light back to the system. In some applications, a response can be generated. The invention can detect sources and locations for various applications.

Abstract: A position-measuring device includes: a measuring graduation provided on a measuring standard device arranged around in ring-like fashion; a scanning unit for optically scanning the measuring graduation using electromagnetic radiation; a scanning plate with a scanning graduation, formed by a scanning grating, extending along a detection axis, which is arranged in the beam path of the electromagnetic radiation used for scanning the measuring graduation, so that the radiation interacts both with the scanning graduation and with the measuring graduation; and a detector of the scanning unit, whose detector surface is used for detecting the electromagnetic radiation after interaction with the scanning graduation and the measuring graduation and which is present as a stripe pattern, in order to record motions of the measuring standard device relative to the scanning unit.

Abstract: It is an object of the present invention to provide an optical beam scanning device and an image forming apparatus which suppress displacement of plural images formed by a different photoconductor in a sub-scanning direction by means of a simple structure even if temperature changes. The optical beam scanning device of the present invention has a single light deflecting device, a pre-deflection optical system that allows light beams from a plurality of light sources to enter the light deflecting device, and a post-deflection optical system including a first optical element for imaging reflected light beams from the light deflecting device on surfaces to be scanned for respective light beams. A second optical element, which has a positive or negative power opposite to a power of the first optical element in a sub-scanning direction, is provided in a position of the pre-deflection optical system where the light beams passes commonly and the light beams enter with distance in the sub-scanning direction.

Abstract: A photoelectric detector includes an electronic card connected to an emit member and a receive member, the emit member emits at least a first light signal, and the receive member receives at least a second light signal reflected from the first light signal; a cap that includes an emit lens and a receive lens made of a translucent material and positioned in front of the emit member and the receive member, respectively; and a fixing support made of an opaque material to which the card and the cap are fixed. The support has a protruding central blade that is inserted into a separating slot in the cap, between the emit lens and the receive lens.

Abstract: A black body assembly is provided for use in the calibration of infrared cameras. The assembly includes, among other things, a housing within which calibration components may be situated, and a lens guide for accurately positioning the assembly over a lens of the infrared camera. A heat emitter may be positioned within the housing for emitting a necessary amount of heat for calibration purposes. A heating element may also be provided within the housing for controlling the heating and cooling of the heat emitter. The assembly may also include a heat sink to remove excessive heat generated from the thermoelectric cooler during temperature cycling. An arm may be employed to hingedly connect the assembly to the camera to provide reliable and repeatable way to position the black body assembly at the front of the infrared lens. A method for calibrating an infrared camera is also provided.

Abstract: A mass spectrometer includes an ion detector positioned upstream of a quadrupole mass filter/analyser. Ions are passed through the quadrupole mass filter/analyser, stored in an ion trap and then passed back through the same mass filter/analyser before being detected by the upstream ion detector. With this arrangement, MS/MS experiments can be performed using an apparatus having only a single mass filter/analyser.

Abstract: Apparatus, methods, and program products are disclosed that classify spectral peaks in dissociation spectrum data and thereby improves the efficiency of molecular sequencing.

Abstract: A method of analyzing data from a mass spectrometer for a data dependent acquisition is described. In an embodiment of this method, mass spectral scans are taken of a sample eluted from a liquid chromatography column. An extracted ion chromatogram (XIC) is then created for each m/z data point of the mass spectral scans and the XIC for each m/z data point are correlated to a model function, such as a monotonically increasing function, or the first half of a gaussian function, to obtain a XIC correlation value. A weighting function is then applied to the XIC correlation value to obtain a current weighted intensity. The current weighted intensity for each m/z point is used to reconstruct a weighted mass spectrum, which is then used to make a real-time decision for the data dependent acquisition. In an embodiment, the data dependent acquisition is the performance of tandem mass spectrometry.

Abstract: The invention relates to the cleaning of contaminated accelerating or guiding electrodes of ion sources used for ion generation by desorption. A cleaning plate is used that has an outer contour similar to that of a standard sample support plate, and may be equipped with cleaning scrubbers that can be moved out when necessary to contact the electrodes. The scrubbers may include soft covers, and can carry out the cleaning by dry rubbing or with the help of high-boiling solvents for the matrix substances. The moving out of the cleaning scrubbers can be controlled by external light pulses from a laser or video camera spot light. Alternatively, the cleaning plate may be equipped with spray nozzles connected to a reservoir of cleaning fluid which is sprayed onto the electrodes, and the evacuation of the ventilated ion source chamber may be used to initiate the spraying.

Abstract: A MEMS device with an overhanging ‘polymer’ capillary provides vital and significant improvements in interfacing a MEMS electrospray nozzle to an MS inlet or other macroscopic instrumentation. The fabrication methodology associated therewith is easily expanded to include built-in micro particle filters and centimeter long serpentine micro channels provided on-chip and fabricated using a low temperature process.

Abstract: An apparatus has a holder member (21) which holds a sample (3), and a removing beam source (13) which irradiates an inert ion beam onto a cross section (4) of the sample (3) held by a holder member (21) and removes a fracture layer on the cross section (4). Then, the removing beam source (13) is disposed on the holding end side of the sample (3) with respect to the normal L of the cross section (4) so that the irradiating direction of the inert ion beam is tilted at the tilt angle ? to the normal L with respect to the cross section (4).

Abstract: For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.

Abstract: An automated nanomanipulation system is provided for manufacturing a nanoscale structure. The system includes: a design model for the nanoscale structure; image data of a sample surface upon which the nanoscale structure is to be manufactured; a movable member configured to perform a nanomanipulation operation on the sample surface; and a path planning subsystem adapted to receive the design model and the image data. The path planning subsystem generates path data indicative of a path for traversing the movable member along the sample surface such that the movable member manipulates one or more randomly distributed nanoobjects in accordance with the design model.

Abstract: An apparatus for evaluating a cross section of a specimen in a specimen chamber, wherein the apparatus includes a specimen stage for placing the specimen, a temperature regulation unit for regulating the temperature of the specimen, an ion beam generation unit for irradiating the specimen with an ion beam thereby performing cross section processing and observation of the specimen, a detection unit for detecting emission signals emitted from the specimen in response to the irradiation of the ion beam for observing the specimen, and a marking unit for marking the specimen.

Abstract: The invention concerns a column for producing a focused particle beam comprising: a device (100) focusing particles including an output electrode (130) with an output hole (131) for allowing through a particle beam (A); an optical focusing device (200) for simultaneously focusing an optical beam (F) including an output aperture (230). The invention is characterized in that said output aperture (230) is transparent to the optical beam (F), while said output electrode (130) is formed by a metallic insert (130) maintained in said aperture (230) and bored with a central hole (131) forming said output orifice.

Abstract: An inspection apparatus and a semiconductor device manufacturing method using the same. The inspection apparatus is used for defect inspection, line width measurement, surface potential measurement or the like of a sample such as a wafer. In the inspection apparatus, a plurality of charged particles is delivered from a primary optical system to the sample, and secondary charged particles emitted from the sample are separated from the primary optical system and introduced through a secondary optical system to a detector. Irradiation of the charged particles is conducted while moving the sample. Irradiation spots of the charged particles are arranged by N rows along a moving direction of the sample and by M columns along a direction perpendicular thereto. Every row of the irradiation spots of the charged particles is shifted successively by a predetermined amount in a direction perpendicular to the moving direction of the sample.

Abstract: A transmission electron microscope (TEM) specimen and a method of manufacturing the specimen are provided. The specimen comprises an analysis point. The specimen is formed by forming a dimple at a surface portion of the preliminary specimen, and ion milling the preliminary specimen having the dimple.

Abstract: A sensor system senses a scene and includes a dual-band imaging infrared detector lying on a beam path, wherein the infrared detector detects infrared images in a first infrared wavelength band and in a second infrared wavelength band; and a two-color cold-shield filter lying on the beam path between the infrared detector and the scene. The cold-shield filter defines a first aperture size for infrared light of the first infrared wavelength band, and a second aperture size larger than the first aperture size for infrared light of the second infrared wavelength band. The first infrared wavelength band has wavelengths less than wavelengths of the second infrared wavelength band.

Abstract: A method of detecting defects in structures, comprising the steps of inducing mechanical energy in a structure via the emission of a broad-band acoustic signal, and capturing over a time interval a plurality of images of the structure each of the plurality of images comprised of a plurality of pixels arranged in a plurality of rows and columns each indicative of an intensity of infrared energy emitted by a portion of the structure.

Abstract: An infrared detecting apparatus includes at least one infrared-sensitive element. Focusing means focuses infrared energy from a first zone onto the at least one infrared-sensitive element. An opaque element including a throughhole is positioned such that infrared energy may pass through the throughhole from a second zone to the at least one infrared-sensitive element. The second zone is closer than the first zone to the at least one infrared-sensitive element.

Abstract: The inorganic scintillator of the invention has the chemical composition represented by CexLnySizOu (where Ln represents at least two elements selected from among Y, Gd and Lu. 0.001?x?0.1, 1.9?y?2.1, 0.9?z?1.1, 4.9?u?5.1) and emits fluorescence upon incidence of radiation, wherein the maximum peak wavelength in the intensity spectrum of the emitted fluorescence is a peak in the range between 450 nm and 600 nm.

Abstract: Each semiconductor radiation detector used for a nuclear medicine diagnostic apparatus (PET apparatus) is constructed with an anode electrode A facing a cathode electrode C sandwiching a CdTe semiconductor member S which generates charge through interaction with ?-rays. Then, a thickness t of the semiconductor member S sandwiched between these mutually facing anode electrode A and cathode electrode C is set to 0.2 to 2 mm. Furthermore, the devices are mounted (laid out) on substrates in such a way that the distance (distance of conductor) between the semiconductor radiation detector and an analog ASIC which processes the signal detected by this detector is shortened. Furthermore, the substrates on which the detectors are mounted are housed in a housing as a unit (detector unit).

Abstract: A method and system for imaging a patient is provided. The system includes an arcuate detector transport member that extends circumferentially about an examination axis, a base comprising an arcuate transport element configured to receive the detector transport member wherein the base is configured to translate the arcuate detector transport member in an arcuate path about the examination axis, and at least one gamma camera detector coupled to the detector transport member.

Abstract: A method and apparatus for calibrating the sensors of a radiation detector by collecting a radiation spectrum detected by the detector during an irradiation, calculating a peak energy location from the collected radiation spectrum, determining if the peak energy location is mislocated from a desired location; and adjusting the gain setting for the selected radiation sensor so that the peak energy location is no longer mislocated from the desired location.

Abstract: A radiological imaging apparatus of the present invention comprises an image pickup device and a medical examinee holding device that is provided with a bed. The image pickup device includes a large number of radiation detectors and radiation detector support plates. A large number of radiation detectors are mounted around the circumference of a through-hole and arranged in the axial direction of the through-hole. The radiation detectors are arranged in three layers formed radially with respect to the center of the through-hole and mounted on the lateral surfaces of the radiation detector support plates. Since the radiation detectors are not only arranged in the axial direction and circumferential direction of the through-hole but also arrayed in the radial direction, it is possible to obtain accurate information about a ?-ray arrival position in the radial direction of the through-hole (the positional information about a radiation detector from which a ?-ray image pickup signal is output).

Abstract: A scintillated CCD detector system for imaging x rays uses x-rays having a photon energy in the range of 1 to 20 keV. The detector differs from existing systems in that it provides extremely high resolution of better than a micrometer, and high detection quantum efficiency of up to 95%. The design of this detector also allows it to function as an energy filter to remove high-energy x-rays. This detector is useful in a wide range of applications including x-ray imaging, spectroscopy, and diffraction. The scintillator optical system has scintillator material with a lens system for collecting the light that is generated in the scintillator material. A substrate is used for spacing the scintillator material from the lens system.

Abstract: A mass filter is disclosed comprising an orthogonal acceleration electrode 9. Ions entering the mass filter are orthogonally accelerated by the orthogonal acceleration electrode 9 in a primary acceleration region 2 and enter a flight region 3. The ions 6,7,8 are then reflected by a reflectron 4 and are directed towards an exit region of the mass filter. Ions having a desired mass to charge ratio are arranged to arrive in the primary acceleration region 2 at a time when a voltage pulse applied to the orthogonal acceleration electrode 9 falls from a maximum to zero. Ions having a desired mass to charge ratio are orthogonally decelerated such that they have a zero component of velocity in the orthogonal direction. Accordingly, ions having a desired mass to charge ratio exit the mass filter in an axial direction.

Abstract: The present invention relates, in general, to a fluorescence microscope and method of observing samples using the microscope and, more particularly, to a fluorescence microscope and method of observing samples using the microscope, which can reduce optical noise and obtain images with higher sensitivity, thus obtaining precise information about the density, quantity, location, etc. of a fluorophore, and which can simultaneously process separate images even when a plurality of fluorophores having different excitation and fluorescent wavelength ranges is distributed, thus easily obtaining information about the fluorophores. The fluorescence microscope of the present invention includes an objective lens, and first and third medium units. The first medium unit has a refractive index of n1 to accommodate one or more micro-objects including fluorophores and provide a path of excitation light to excite the fluorophores.

Abstract: An optical imager, such as a microscope for performing multiple frequency fluorometric measurements comprising a light source, such as a laser source is disclosed. The system is used to excite a sample into the fluorescent state. Light from the excited sample is collected by a microscope. The microscope utilizes conventional confocal optics optimized to have a very narrow depth of field, thus limiting the information collected to a thin planar region. Measurements are taken over the fluorescence lifetime of the sample simultaneously from the excitation source and from the excited sample. Information is taken in a matrix and comparison of the image matrix and the standard during simultaneous measurements yields output information.

Abstract: A method of evaluating thermal stability of a fuel and an apparatus used therein. The method includes heating the fuel to a given temperature, directing light through the heated fuel a first time wherein the light is of an intensity and of a wavelength to induce fluorescence and obtaining a first fluorescence data, directing the light through the fuel at least a second time that is later in time and obtaining a second fluorescence data, and measuring any changes to fluorescence from the heated fuel over time.

Abstract: A photoluminescent wall marker includes an elongated base having an upper edge and a lower edge. The lower edge of the base is integral with an upper edge of a photoluminescent panel. The upper edge of the photoluminescent panel is integral with the base lower edge and defined by a fold line extending longitudinally between the base and the photoluminescent panel. The base and photoluminescent panel are flexible in a transverse direction allowing the wall marker to be stored in roll form in an unassembled configuration.

Abstract: Methods and apparatus are disclosed for forming a sample of an object, extracting the sample from the object, and subjecting this sample to microanalysis including surface analysis and electron transparency analysis in a vacuum chamber. In some embodiments, a method is provided for imaging an object cross section surface of an extracted sample. Optionally, the sample is iteratively thinned and imaged within the vacuum chamber. In some embodiments, the sample is situated on a sample support including an optional aperture. Optionally, the sample is situated on a surface of the sample support such that the object cross section surface is substantially parallel to the surface of the sample support. Once mounted on the sample support, the sample is either subjected to microanalysis in the vacuum chamber, or loaded onto a loading station. In some embodiments, the sample is imaged with an electron beam substantially normally incident to the object cross section surface.

Abstract: A method for monitoring the surface roughness of a metal, comprises impinging a laser beam onto the surface of a metal layer to induce the formation of a plasmon therein, and monitoring a current of decay electrons emitted by the plasmon.

Abstract: The present invention provides an increased degree of uniformity of radiation dose distribution for the interior of a diseased part. A particle beam therapy system includes a charged particle beam generation apparatus and an irradiation apparatus. An ion beam is generated by the charged particle beam generation apparatus. The irradiation apparatus exposes a diseased part to the generated ion beam. A scattering device, a range adjustment device, and a Bragg peak spreading device are installed upstream of a first scanning magnet and a second scanning magnet. The scattering device and the range adjustment device are combined together and moved along a beam axis, whereas the Bragg peak spreading device is moved independently along the beam axis. The scattering device moves to adjust the degree of ion beam scattering. The range adjustment device moves to adjust ion beam scatter changes caused by an absorber thickness adjustment.

Abstract: A debris collector for EUV light generators is disclosed which enables to improve durabilities of optical units in a chamber including a collector mirror, to keep the vacuum degree in the chamber, and to suppress decrease in EUV light output by efficiently collecting debris bumping into the collector mirror at high speed from a target transformed into a plasma or debris adhering the collector mirror. A laser light irradiator (10) is so arranged that the irradiation direction of a laser light (L) is opposite to the traveling direction of a target (1). A debris collector (30) for collecting debris (3) is arranged in the travel path of the target (1).

Abstract: A method and apparatus for use with a web of material having a web length dimension and a web surface, the method for placing mark sequences on the web surface every X distance along the web length dimension identifying location along the web length dimension, the method comprising the steps of monitoring web location, every X distance, placing a sequence of N marks on the web surface along the web length wherein each two adjacent marks define a space length dimension and wherein the pattern of space length dimensions formed by the N marks in the sequence together specify a specific web length location. The invention also includes a marking and defect locating system including a high speed printer and a high resolution, high speed camera to facilitate the methods.

Abstract: A flame detector having the following features is capable of simple and reliable determination of the occurrence or nonoccurrence of fire resulting from a flame based on waveforms detected from detection signals from infrared sensors. The flame detector includes an infrared sensor for detecting an infrared ray, a RAM serving as a waveform storing unit for storing a plurality of waveforms detected from an output signal from the infrared sensor, and a CPU serving as a wavelength determining unit for determining succession of waveforms when at least a first predetermined number of waveforms stored in the RAM are produced for a first predetermined time and at least a second predetermined number of waveforms different from the first predetermined number of waveforms are produced for a second predetermined time different from the first predetermined time.

Abstract: An alignment system for a lithographic apparatus has a source of alignment radiation; a detection system that has a first detector channel and a second detector channel; and a position determining unit in communication with the detection system. The position determining unit is constructed to process information from said first and second detector channels in a combination to determine a position of an alignment mark on a work piece, the combination taking into account a manufacturing process of the work piece. A lithographic apparatus has the above mentioned alignment system. Methods of alignment and manufacturing devices with a lithographic apparatus use the above alignment system and lithographic apparatus, respectively.

Abstract: Various methods and systems measure, determine, or align a position of a laser beam spot relative to a semiconductor substrate having structures on or within the semiconductor substrate to be selectively processed by delivering a processing laser beam to a processing laser beam spot. A metrology laser beam spot is directed to one or more of those structures to be selectively processed (e.g., laser-severable conductive links), and reflections of the metrology laser beam off of those structures to be selectively processed are detected to perform the measurement, determination, or alignment. The processing laser beam can then be accurately directed onto those structures to process them on a selective basis. The various methods and systems thus utilize those structures themselves—rather than relying exclusively on dedicated alignment markers—to perform the measurement, determination, or alignment.

Abstract: A breast image obtaining apparatus using a solid-sate detector, or stimulable phosphor panel capable of correctly obtaining image information up to the area closer to the chest wall of a subject. when picking up the image, the solid-state detector is moved to a place close to the side wall of the housing on the chest wall side by the moving means to pick up the image up to the area close to the chest wall, and when reading the image, it is moved to the opposite direction to secure the overrun zone between the side wall of the housing and end of the solid-state detector on the subject side. By completing acceleration or deceleration of the reading light exposure section within this zone, the scanning rate of the reading light exposure section is maintained constant across the entire region of the solid-state detector.

Abstract: Electric charges, which have been generated in a recording photo-conductor layer having been exposed to radiation, are accumulated at an accumulating section. The accumulated electric charges combine with electric charges, which are generated in a reading photo-conductor layer when the reading photo-conductor layer is exposed to reading light having passed through each of transparent linear electrodes, and an electric current in accordance with a radiation dose flows through each of the transparent linear electrodes. An opaque good electrically-conductive member extends at a middle region of each of the transparent linear electrodes, the middle region being other than an end region extending along a longitudinal direction of each of the transparent linear electrodes.

Abstract: Disclosed is a non-volatile memory cell including a first conductive electrode region, a second conductive electrode region and a memory region disposed therebetween. The memory region includes one or a plurality of metal oxide nanoparticles, which contact and electrically connect the first and the second electrode region via contact locations and which exhibit a bistable resistance properties when applying an external voltage.

Abstract: Provided are an optoelectronic (OE) transmitter integrated circuit (IC) and method of fabricating the same using a selective growth process. In the OE transmitter IC, a driving circuit, which includes a double heterojunction bipolar transistor (DHBT) and amplifies received electric signals to drive an electroabsorption (EA) modulator, and the EA modulator with a multi-quantum well (MQW) absorption layer are integrated as a single chip on a semi-insulating substrate. The MQW absorption layer of the EA modulator and an MQW insertion layer of the DHBT are formed to different thicknesses from each other using a selective MOCVD growth process.

Abstract: One exemplary embodiment includes a semiconductor device. The semiconductor device comprising a channel including one or more of a metal oxide including zinc-gallium, cadmium-gallium, cadmium-indium.

Abstract: After an amorphous semiconductor thin film is crystallized by utilizing a catalyst element, the catalyst element is removed by performing a heat treatment in an atmosphere containing a halogen element. A resulting crystalline semiconductor thin film exhibits {110} orientation. Since individual crystal grains have approximately equal orientation, the crystalline semiconductor thin film has substantially no grain boundaries and has such crystallinity as to be considered a single crystal or considered so substantially.

Abstract: A thin film transistor array panel comprising: an insulating substrate; gate lines formed on the insulating substrate; data lines defining a display region by intersecting the gate lines while being insulated; an electrostatic dispersion line intersecting the gate lines; diodes adhered to the gate lines and to the electrostatic dispersion line; and a repair line for repairing the data lines formed on the insulating substrate outside the display region and intersecting the electrostatic dispersion line while being insulated. According to the present invention, since static electricity flowing along the repair line is not transferred to the data lines, defects of a thin film transistor of the display region may be prevented.

Abstract: The present invention relates to a flat panel display device comprising a polycrystalline silicon thin film transistor and provides a flat panel display device having improved characteristics by having a different number of grain boundaries included in polycrystalline silicon thin film formed in active channel regions of a driving circuit portion and active channel regions of pixel portion. This may be achieved by having a different number of grain boundaries included in the polycrystalline silicon thin film formed in active channel regions of a switching thin film transistor and a driving thin film transistor formed in the pixel portion, and by having a different number of grain boundaries included in polycrystalline silicon thin film formed in active channel regions of a thin film transistor for driving the pixel portion for each red, green and blue of the pixel portion.