Patents Issued in February 19, 2008
  • Patent number: 7333175
    Abstract: According to one embodiment, a method for aligning a first alignment marker with respect to a second alignment marker, a lens being positioned in between the markers, includes providing an alignment beam and imaging the first alignment marker on the second alignment marker with the alignment beam through the lens. A lens interferometer is provided as a measurement device arranged to measure a relative position of at least one of the first and second alignment markers. The method further includes measuring the relative position and aligning the position of at least one of the first and second alignment markers based on the measured relative position.
    Type: Grant
    Filed: December 17, 2004
    Date of Patent: February 19, 2008
    Assignee: ASML Netherlands, B.V.
    Inventor: Johannes Jacobus Matheus Baselmans
  • Patent number: 7333176
    Abstract: A system and method for uniformity correction such that a defined uniformity specification is met while minimizing a set of selected constraints is provided. The system includes illumination optics, an opto-mechanical correction system, a contrast device, projection optics and a correction module coupled to the correction system. The correction system includes a plurality of adjustable components such as fingers. The correction module is configured to determine adjustments to the components to correct uniformity. A method for discretizing the continuous intensity integral is also provided. The illumination slot is divided into a grid having multiple grid points. “pupils” are then superimposed onto the grid. Multiple second grids are also defined. Each ““pupil”” is mapped to a second grid such that the center of the second grid is coincident with the ““pupil”” center. The continuous intensity integral is then discretized using the first grid, plurality of second grids, and ““pupil”” mappings.
    Type: Grant
    Filed: December 29, 2006
    Date of Patent: February 19, 2008
    Assignee: ASML Holding N.V.
    Inventors: Roberto B. Wiener, Alexander Kremer, Elizabeth Stone, Richard Zimmerman
  • Patent number: 7333177
    Abstract: A lithographic method and apparatus used to pattern an object. An illumination system supplies a beam of radiation. An array of individually controllable elements patterns the beam. The patterned beam is projected by a projection system on to a substrate supported on a substrate table. Individual elements of the array are periodically addressed to load an image frame on to the array appropriate to the pattern to be imparted to the beam at any given instant in time taking into account the image to be projected onto the substrate. In any given frame loading operation, only those individual controllable elements that must change state are addressed to reduce the amount of data required to be transferred during the frame loading operation.
    Type: Grant
    Filed: November 30, 2004
    Date of Patent: February 19, 2008
    Assignee: ASML Netherlands B.V.
    Inventor: Cheng-Qun Gui
  • Patent number: 7333178
    Abstract: A lithographic apparatus includes an illumination system including a field faceted mirror including a plurality of field facets and configured to receive radiation from a radiation source and form a plurality of images of the radiation source on corresponding pupil facets of a pupil faceted mirror. Each of the field facets is configured to provide an illumination slit at a level of a patterning device. The illumination slits are summed together at the level of the patterning device to illuminate the patterning device. First blades are configured to block radiation from a radiation source and each first blade is selectively actuable to cover a portion of a selectable number of field facets. The field faceted mirror further comprises partial field facets, the partial field facets being configured to produce a partial illumination slit at the level of the patterning device, and the pupil faceted mirror further includes pupil facets corresponding to the partial field facets.
    Type: Grant
    Filed: May 31, 2005
    Date of Patent: February 19, 2008
    Assignee: ASML Netherlands B.V.
    Inventors: Marcel Mathijs Theodore Marie Dierichs, Hako Botma, Markus Franciscus Antonius Eurlings
  • Patent number: 7333179
    Abstract: Methods and apparatus for providing a stage with a relatively high positioning bandwidth and low transmissibility are disclosed. According to one aspect of the present invention, a method for positioning a stage including providing a first force of a first magnitude to the stage using a primary actuator and providing a second force of a second magnitude to the stage using a secondary actuator. The first force is arranged to cause the stage to translate along a first axis. The secondary actuator is also arranged to cause the stage to translate along the first axis, and has a relatively high positioning bandwidth. The first force is arranged to enable the stage to be relatively coarsely positioned and the second force is arranged to enable the stage to be relatively finely positioned. In one embodiment, the secondary actuator is one of a voice coil motor and a piezoelectric motor.
    Type: Grant
    Filed: August 13, 2004
    Date of Patent: February 19, 2008
    Assignee: Nikon Corporation
    Inventors: Bausan Yuan, Martin E. Lee, W. Thomas Novak
  • Patent number: 7333180
    Abstract: A positioning apparatus including a coarse motion stage, a first moving mechanism to move the coarse motion stage with a large stroke, a fine motion stage, and a second moving mechanism to move the fine motion stage with a small stroke relative to the coarse motion stage. In addition, at least two couplings transmit forces from the coarse motion stage to the fine motion stage, and the couplings apply the forces in the same direction from at least two sides of the fine motion stage.
    Type: Grant
    Filed: February 14, 2005
    Date of Patent: February 19, 2008
    Assignee: Canon Kabushiki Kaisha
    Inventor: Hideo Tanaka
  • Patent number: 7333181
    Abstract: A Sensor Chip Assembly (SCA) contains a focal plane array constructed as a semiconductor chip sandwich. One slice contains an array of PSDs made from IR sensitive semiconductor material, and the other slice contains Trans Impedance Amplifiers (TIAs)—and associated on-chip signal processing elements from an electronic semiconductor material. The SCA resembles those made for pixelized imaging IR SCA focal planes, but the configuration and implementation of which is for a PSD focal plane array. The use of these techniques assures that the PSD focal plane array possesses the required attributes. Interconnect technology is widely available from most IR fabrication houses to connect the IR array with the TIA circuits.
    Type: Grant
    Filed: May 15, 2006
    Date of Patent: February 19, 2008
    Assignee: Oceanit Laboratories, Inc.
    Inventors: Basil H. Scott, Randy Wolfshagen, Jeff Buck
  • Patent number: 7333182
    Abstract: A range finder includes an optical sensor circuit including optical sensors and an integrator circuit disposed for the optical sensors. It further includes selection switches (MOSFETs), which selectively connect optical sensors to the integrator circuit, non-selection switches (MOSFETs), and a biasing voltage circuit or other photoelectron removing device. The non-selection switches (MOSFETS) are switched on to connect the unselected optical sensors to the biasing voltage circuit so that the photoelectron current (photoelectrons) generated in the unselected optical sensors can flow to the biasing voltage circuit but not to the integrator circuit. The range finder can reduce the noises in the unselected optical sensors and measure the object distance accurately.
    Type: Grant
    Filed: March 8, 2005
    Date of Patent: February 19, 2008
    Assignee: Fuji Electric Device Technology Co., Ltd.
    Inventors: Makoto Tanaka, Yoshinari Enomoto, Takashi Nishibe
  • Patent number: 7333183
    Abstract: A laser scanning device for measuring the distance to an object in a target area by projecting laser light scanningly is provided not only with a light receiving element for receiving reflected light from the target area to detect its intensity but also with an auxiliary light receiving element for receiving reflected light from a neighboring area which will be scanned next. The gain of amplifier for amplifying the intensity of light received by the light receiving element is adjusted based on the intensity of light received by the auxiliary light receiving element so as to avoid saturation. A one-dimensional or two-dimensional light receiving element for simultaneously receiving reflected light from a plurality of areas including the target area may be used instead.
    Type: Grant
    Filed: December 7, 2006
    Date of Patent: February 19, 2008
    Assignee: OMRON Corporation
    Inventors: Takashi Shoji, Ryoji Fujioka
  • Patent number: 7333184
    Abstract: A method for improving the accuracy of estimating concentration path length of a target molecule using a differential absorption LIDAR (DIAL) system. In particular, this method allows improved detection of plumes containing the target molecule against inhomogeneous background, such as uncovered ground or ground with various types of cover. In an embodiment of the present invention, spectral surface reflectivity variations are systematically corrected based on interpolation of surface reflectivity measurements of multiple offline beams of different wavelengths, which are relatively close to the online wavelength. In another embodiment, the signal to noise ratio of the received online pulse energy is improved by using multiple laser beams having the online wavelength and the signal to noise ratio of the received pulse energies at an offline wavelength is improved by using multiple laser beams having that offline wavelength.
    Type: Grant
    Filed: July 1, 2005
    Date of Patent: February 19, 2008
    Assignee: ITT Manufacturing Enterprises, Inc.
    Inventor: Hooshmand Mahmood Kalayeh
  • Patent number: 7333185
    Abstract: There is provided an optical velocimeter for achieving miniaturization and lower power consumption thereof and for accurately detecting two-dimensional travel velocity of a measured object. This optical velocimeter includes a light-emitting element, a diffraction grating, two light-receiving sections, and a signal processing circuit. Light emitted from the light-emitting element is branched by the diffraction grating into three light fluxes, and optical axes of the divided light fluxes are intersected one another on the measured object to form one detection point. Scattered light from the detection point frequency-shifted by travel of the measured object is then received by the two light-receiving sections, and a light-reception signals outputted from the light-receiving sections are processed in the signal processing circuit to detect travel velocities of two directions of the measured object.
    Type: Grant
    Filed: August 31, 2004
    Date of Patent: February 19, 2008
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Hideo Wada, Hisakazu Sugiyama, Takayuki Taminaga, Hajime Kashida
  • Patent number: 7333186
    Abstract: In order to precisely determine a stable measuring region appropriate for a measurement of biological information, and to measure a concentration of a specific component, i.e. biological information, without inconsistency, a biological information measuring device is provided with, a measuring region determining means for determining a measuring region in between an eponychium and a distal interphalangeal joint; an information detector for applying a light to measuring region; a light source for entering a light to information detector; a light detector for detecting a light which exits from the information detector; and a processor for measuring specific component based on information obtained from light detector.
    Type: Grant
    Filed: March 16, 2005
    Date of Patent: February 19, 2008
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Kiyoko Oshima, Shinji Uchida, Masahiko Shioi
  • Patent number: 7333187
    Abstract: Identifying live eggs includes: a) illuminating eggs with light; b) receiving light passing through each egg at a light detector; c) generating an output signal that corresponds to light received at a light detector for each respective egg; d) analyzing the output signals to identify an indication of an external disturbance; e) analyzing the output signal for each egg to identify the existence of an embryo heart rate and/or embryo movement; and f) designating an egg as a live egg in response to identifying embryo heart rate and/or embryo movement. Steps a) through d) are repeated if output signals from a predetermined number of eggs contain an indication of an external disturbance to the eggs. Steps a) through f) are repeated if the number of eggs designated as live exceeds an expected number, or if embryo movement occurs at about the same time in a predetermined number of eggs.
    Type: Grant
    Filed: September 1, 2005
    Date of Patent: February 19, 2008
    Assignee: Embrex, Inc.
    Inventor: John H. Hebrank
  • Patent number: 7333188
    Abstract: A system (and method) for real-time measurement of trace metal concentration in a chemical mechanical polishing (CMP) slurry, includes an electromagnetic radiation flow cell carrying a CMP slurry, a slurry pickup head coupled to the flow cell, and an analyzer for measuring properties of the slurry flowing through the flow cell.
    Type: Grant
    Filed: September 30, 2004
    Date of Patent: February 19, 2008
    Assignee: International Business Machines Corporation
    Inventor: Theodore G. van Kessel
  • Patent number: 7333189
    Abstract: The present invention provides systems and methods for the determination of the physical characteristics of a structured superficial layer of material using light scattering spectroscopy. The light scattering spectroscopy system comprises optical probes that can be used with existing endoscopes without modification to the endoscope itself. The system uses a combination of optical and computational methods to detect physical characteristics such as the size distribution of cell nuclei in epithelial layers of organs. The light scattering spectroscopy system can be used alone, or in conjunction with other techniques, such as fluorescence spectroscopy and reflected light spectroscopy.
    Type: Grant
    Filed: January 17, 2003
    Date of Patent: February 19, 2008
    Assignees: Pentax Corporation, Newton Laboratories, Inc.
    Inventors: Stephen F. Fulghum, Jr., Koichi Furusawa, Kohei Iketani
  • Patent number: 7333190
    Abstract: A system and method are provided for detecting non-fluorescing aerosol particles of biological origin within ambient background aerosol particles using Raman spectroscopy.
    Type: Grant
    Filed: October 26, 2006
    Date of Patent: February 19, 2008
    Assignee: ITT Manufacturing Enterprises, Inc.
    Inventors: James E. Pendell-Jones, Patrick Ponsardin, Robert Almassy
  • Patent number: 7333191
    Abstract: A scanning probe microscope has a cantilever with a probe facing a sample and a measurement section for measuring a physical quantity occurring between the probe and the sample when the probe scans a surface of the sample, holding the physical quantity constant to measure the surface of the sample. The above microscope further has a probe tilt mechanism, an optical microscope etc. for detecting a position of the probe when the probe is tilted, and a control section for setting the probe in a first tilt posture and second tilt posture, measuring a surface of the sample by the measurement section at each tilt posture, detecting the position of the probe at least at the second tilt posture by the optical microscope etc., and making a measurement location at the second tilt posture match with a measurement location at the first tilt posture for measurement.
    Type: Grant
    Filed: July 19, 2004
    Date of Patent: February 19, 2008
    Assignee: Hitachi Kenki Finetech Co., Ltd.
    Inventors: Ken Murayama, Yukio Kenbou, Yuuichi Kunitomo, Takenori Hiroki, Yoshiyuki Nagano, Takafumi Morimoto, Tooru Kurenuma, Hiroaki Yanagimoto, Hiroshi Kuroda, Shigeru Miwa
  • Patent number: 7333192
    Abstract: A defect inspection apparatus includes an irradiation optical system 20, a detection optical system 30, and an image processor 40. In the irradiation optical system, a mirror 2603 is disposed to reflect downward a beam flux that has been guided to a first or second optical path, and a cylindrical lens 251 and an inclined mirror 2604 are disposed to focus the beam flux that has been directed downward by the mirror, at an inclination angle from a required oblique direction extending horizontally, onto a substrate 1 to be inspected, as a slit-shaped beam 90.
    Type: Grant
    Filed: January 16, 2007
    Date of Patent: February 19, 2008
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Hiroyuki Nakano, Akira Hamamatsu, Sachio Uto, Yoshimasa Oshima, Hidetoshi Nishiyama, Yuta Urano, Shunji Maeda
  • Patent number: 7333193
    Abstract: An analysis apparatus capable of normally creating image data and an analysis disc used for this. Instead of using a signal which has been read in time series by pickup following a track so as to create an image by utilizing address information engraved on an optical disc, a mark (110) is recorded over the radius direction (A) of a read area (109) of the analysis disc (108) where an analysis object (B) is arranged, at least at a preceding position or a following position of the read area (109) in the rotation direction (C), so that video processing aligned according to this mark is executed, thereby executing video acquisition or a shape count with a high accuracy.
    Type: Grant
    Filed: March 10, 2003
    Date of Patent: February 19, 2008
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Tsugio Wakita, Mitsuteru Fujimoto, Satoshi Miyagawa
  • Patent number: 7333194
    Abstract: A beneficial photometric analytical method is described according to which an effective amount of at least one analytical agent for photometric analysis, is delivered from a support into a liquid sample, and advantageously a mixing action may be provided, by moving a portion of the support in the sample. The sample may be added to a photometric cell disposed in a photometric instrument, or may be added to a photometric instrument cell chamber (or well). In accordance with an advantageous feature of the method, the photometric instrument is beneficially waterproof. A photometric cell that provides more than one optical path length may beneficially be used, and a particular optical path length selected by rotation of the photometric cell in the cell chamber. Also described is a beneficial photometric apparatus.
    Type: Grant
    Filed: June 22, 2005
    Date of Patent: February 19, 2008
    Assignee: Industrial Test Systems, Inc.
    Inventors: Ivars Jaunakais, Sanjay Mohan Anand
  • Patent number: 7333195
    Abstract: This invention relates to a method for detecting the photosynthesis-inhibitory activity of substances by providing cells or cell parts with an intact photosystem, introducing the cells or cell parts into a planar layer, applying the test substance to the planar layer or into the planar layer, excitation of the luminescence of the cells or cell parts in the planar layer by an excitation light source, measuring the luminescence of the cells or the cell parts in the planar layer by means of a detector, and associating the detector signal with the degree of photosynthesis inhibition.
    Type: Grant
    Filed: June 26, 2002
    Date of Patent: February 19, 2008
    Assignee: Bayer Innovation GmbH
    Inventors: Wolfgang Kreiβ, Mark Wilhelm Drewes, Günther Eberz, Norbert Caspers
  • Patent number: 7333196
    Abstract: An evaluation apparatus which evaluates a sample having a porous layer. The apparatus includes a light source which irradiates the sample with light, an imaging spectrometer which spectroscopically measures light reflected by the sample and senses an image, a first calculator which obtains amplitude information on an amplitude of a spectral reflectance of the sample based on the image sensed by the imaging spectrometer, a memory which holds in advance relationship information representing a relationship between amplitude information of spectral reflectance of a member having a porous layer and an absorption coefficient of the porous layer of the member, and a second calculator which obtains an absorption coefficient of the sample based on the amplitude information obtained by the first calculator and the relationship information held in the memory.
    Type: Grant
    Filed: March 21, 2005
    Date of Patent: February 19, 2008
    Assignee: Canon Kabushiki Kaisha
    Inventors: Yuichi Masaki, Yutaka Akino
  • Patent number: 7333197
    Abstract: A method and apparatus for enabling chemical identification of individual particles, cells of molecules by obtaining a Raman spectrum of a particle, cell or molecule as it flows past a sensing point in a flow cytometer. The particles, which may be cells or molecules, are associated with a suitable noble metal colloid or colloidal aggregate. Cellular particles may be associated with gold or silver colloidal particles by ultra-sonic sonification while in a sample preparation reservoir containing the gold or silver colloidal suspension. The colloid associated particles are then hydrodynamically focused into a single file by a fluid control module. The surface-enhance Raman Spectrum of individual particles are obtained by illuminating the particle with a laser as the particle flows past a sensing point and gathering the light that is non-elastically scattered (Raman scattered) by the particle. The surface-enhanced Raman spectrum is then analyzed to identify the particle.
    Type: Grant
    Filed: November 17, 2004
    Date of Patent: February 19, 2008
    Assignee: Honeywell International Inc.
    Inventors: Bernard S. Fritz, Aravind Padmanabhan, Cleopatra Cabuz
  • Patent number: 7333198
    Abstract: Disclosed are systems and methodology for orienting the vertical position, and tilt, of samples, as applied in ellipsometer and the like systems.
    Type: Grant
    Filed: July 29, 2006
    Date of Patent: February 19, 2008
    Assignee: J.A. Woollam Co., Inc.
    Inventor: Martin M. Liphardt
  • Patent number: 7333199
    Abstract: The principles of the present invention relate to aligning optical components with three degrees of translational freedom. A lens pin, a lens base, and a molded package are aligned in a first direction, a second direction, and a third direction such that the signal strength of optical signals transferred between a lens included in the lens pin and the molded package is optimized. The lens pin is mechanically coupled to the lens base to fix the position of the lens relative to the molded package in the first direction. Subsequently, the lens base and the molded package are realigned in the second and third directions such that the signal strength is again optimized. The lens base is mechanically coupled to the molded package to fix the position of the lens base relative to the molded package in the second and third directions.
    Type: Grant
    Filed: May 10, 2005
    Date of Patent: February 19, 2008
    Assignee: Finisar Corporation
    Inventors: Chris Togami, Gary Sasser, Rudolf J. Hofmeister, Paul K. Rosenberg, Frank H. Levinson, Axel Mehnert
  • Patent number: 7333200
    Abstract: A method of controlling the lithography process used to fabricate patterns on layers of a semiconductor wafer is disclosed. The method includes providing at least two scatterometry targets, each target having a first pattern formed in an upper layer substantially aligned with a second pattern formed in a lower layer. The targets are optically inspected. A theoretical model of each target is created, with each model including a plurality of unknown parameters defining the target and wherein at least one of the parameters is common to each of the targets. A regression analysis is performed wherein the measured optical response of the targets is compared to calculated optical responses generated by varying the values of the parameters applied to the model. During the regression analysis, a common value for the common parameter is maintained. The results are used to control the lithography process.
    Type: Grant
    Filed: December 8, 2006
    Date of Patent: February 19, 2008
    Assignee: Tokyo Electron Limited
    Inventors: Abdurrahman Sezginer, Kenneth Johnson
  • Patent number: 7333201
    Abstract: Apparatus, methods, and textile materials created thereby or there from, in which the approximate location of a color shift along a run of textile material is determined. In one aspect, a plurality of color measure data points from the textile material is acquired and processed to determine color difference measures, which are compared to a predetermined threshold value in order to determine the approximate location of the color shift on the textile material.
    Type: Grant
    Filed: February 17, 2006
    Date of Patent: February 19, 2008
    Inventors: Conrad Layson Fernandez, Gary Lavere Munn, Thomas Jerry McClure, Jr.
  • Patent number: 7333202
    Abstract: A yarn sensor for optically scanning a yarn (3), traveling longitudinally through a measurement gap (19), includes a light source (20) projecting a beam of light into the measurement gap (19), at least one receiver (23) for directly transmitted light, and light transmitting elements (24, 25, 26, 27) transmitting the light between the light source (20), measurement gap (19), and receivers (21, 22, 23). The light source (20) is an emitter with Lambert's emission characteristics. The light-transmitting element (27) includes a diaphragm and a lens, and the diaphragm is projected approximately into infinity. A diffusor (39) located between the light source (20) and the diaphragm generates radiation that passes through the diaphragm and is symmetrical to the optical axis of the lens. The yarn sensor can be used in the textile industry in spinning or bobbin winding machines with improved quality of the measurement results.
    Type: Grant
    Filed: October 7, 2005
    Date of Patent: February 19, 2008
    Assignee: Oerlikon Textile GmbH & Co. KG
    Inventor: Olav Birlem
  • Patent number: 7333203
    Abstract: The invention relates to a device for scanning a thread, which is displaceable in the longitudinal direction thereof inside a measuring slot, by means of an optical beam emitted by a light source. The device includes a receiver of light reflected on the thread and a unit for processing electrical signals received by the receiver. The aim of the invention is to develop a small-sized device which is easy to operate and which makes it possible to detect foreign matter contained in the thread in a most selective manner at a high sensitivity. For this purpose, the light emission in at least two wavelength ranges is carried out by means of a light source, with these wavelength ranges being determined by two main wavelengths.
    Type: Grant
    Filed: November 6, 2003
    Date of Patent: February 19, 2008
    Assignee: Uster Technologies AG
    Inventor: Philipp Ott
  • Patent number: 7333204
    Abstract: The present method uses a spectrophotometric and/or ionisation detection device in which the gas to be analyzed and illuminated by a light source emitting in a range of wavelengths distinct from the one used for spectrophotometry so as to carry out a nephelometric and/or turbidimetric detection, the results of this detection being used to carry out an adjustment of the device for counting the particles and/or for determining the composition of these particles.
    Type: Grant
    Filed: April 8, 2002
    Date of Patent: February 19, 2008
    Assignee: Proengin SA
    Inventors: Henri Lancelin, Gilles Guene, Patrick Bleuse, Pierre Clausin
  • Patent number: 7333205
    Abstract: A system and method for generating and using broadband surface plasmons in a metal film for characterization of analyte on or near the metal film. The surface plasmons interact with the analyte and generate leakage radiation which has spectral features which can be used to inspect, identify and characterize the analyte. The broadband plasmon excitation enables high-bandwidth photonic applications.
    Type: Grant
    Filed: September 19, 2005
    Date of Patent: February 19, 2008
    Assignee: U Chicago Argonne LLC
    Inventors: Alexandre Bouhelier, Gary P. Wiederrecht
  • Patent number: 7333206
    Abstract: In accordance with an embodiment of the present invention, an apparatus for measuring light scatter loss from a test piece includes a light source, an optical cavity including the test piece and at least one mirror located along a path, and a light detector. The cavity receives an input beam from the light source, circulates a beam within the cavity as a circulating beam, and produces an output beam. Irregularities on the surface of the test piece result in a progressive diffusion of the circulating beam about the path. The light detector provides an output signal based on the intensity of the output beam. The output signal has an initial slope that determines a first saturation value. The output signal has a second saturation value. The difference between the first saturation value and the second saturation value provides a scatter loss measurement.
    Type: Grant
    Filed: April 7, 2005
    Date of Patent: February 19, 2008
    Assignee: The Bowing Company
    Inventor: Roy Clark
  • Patent number: 7333207
    Abstract: The invention relates to a confocal 4? microscopy method which is characterized by coherently illuminating a sample from two sides by one objective each with illumination light which has at least one illumination wavelength whereby a stationary illumination wave having a main illumination maximum and secondary illumination maxima is produced by interference of the illumination light in the sample. The detection light emitted by the sample has at least one detection wavelength and is detected through the two objectives. The detection light is made to interfere, thereby producing in the sample a detection pattern having a main detection maximum, secondary detection maxima and detection minima in such a manner that the secondary illumination maxima and the detection minima overlap at least partially.
    Type: Grant
    Filed: January 6, 2004
    Date of Patent: February 19, 2008
    Assignee: Leica Microsystems CMS GmbH
    Inventors: Jörg Bewersdorf, Hilmar Gugel
  • Patent number: 7333208
    Abstract: Apparatus and methods are provided for implementing a full width array material scanning spectrophotometer by integrating a Fabry-Perot cavity filter with a silicon photodetector and a light focusing device (an optical guide or a SELFOC® lens). The material to be scanned is illuminated by a broad band illumination source (white LEDs or a fluorescence light source). The Fabry-Perot cavity gap can be tuned electromechanically to get multiple measurements to resolve the spectral distribution of the transmitted light signal. The array spectrophotometric architecture facilitates an elongated, substantially linear band detection and the associated spectral reconstruction technique resolves spectral distribution in the presence of multiple resonant peaks.
    Type: Grant
    Filed: December 20, 2004
    Date of Patent: February 19, 2008
    Assignee: Xerox Corporation
    Inventors: Lalit Keshav Mestha, Yao Rong Wang, Joel A. Kubby
  • Patent number: 7333209
    Abstract: A clock system for a fiber optic gyroscope is provided that includes a highly-tunable clock for the bias modulation and a separate asynchronous high-speed clock for the photodetector sampling. By separating the two clocks rather than using two derivatives of the same clock, the clock system and method can provide both the tunability objective of the bias modulation clock and the high-speed objective of the sampling clock, while using readily available, lower performance, radiation-hardened electronics parts.
    Type: Grant
    Filed: November 9, 2005
    Date of Patent: February 19, 2008
    Assignee: Honeywell International, Inc.
    Inventors: Thomas C. Greening, Charles H. Lange, Chung-Jen Chen
  • Patent number: 7333210
    Abstract: A method and system for controlling the wavelength of light emitted by a tunable laser. The system includes a wavelength tuner that provides information of a desired wavelength; a coupler for tapping a portion of the light from the tunable laser; and an apparatus for measuring the actual wavelength of the light. The apparatus takes the portion of the light as an input signal and splits the input signal into two beams that are directed through two paths of different optical lengths. Then, the two beams are interfered with each other in order to form a fringe pattern at an observation plane, where the fringe pattern is detected and analyzed to determine the wavelength of the light. A processor compares the difference between the desired and determined wavelengths, and sends a tuning signal to the tunable laser forming a feedback control of the tunable laser.
    Type: Grant
    Filed: August 30, 2005
    Date of Patent: February 19, 2008
    Assignee: Fizeau Electro-Optic Systems, LLC
    Inventors: James J. Snyder, Stephen L. Kwiatowski
  • Patent number: 7333211
    Abstract: The present invention relates to a method for determining a qualitative characteristic of an interferometric component (eg a planar waveguide structure) or a process for determining a qualitative characteristic of a stimulus of interest to which the interferometric component (eg the planar waveguide structure) has been exposed by measuring a non-positional characteristic of the interference fringes.
    Type: Grant
    Filed: March 14, 2003
    Date of Patent: February 19, 2008
    Assignee: Farfield Sensors Limited
    Inventors: Neville John Freeman, Graham Cross, Gerard Anthony Ronan
  • Patent number: 7333212
    Abstract: In a method for measuring an absorption coefficient and a reduced scattering coefficient of a multiple scattering medium, a source light beam is outputted, and is transformed into a transformed light beam that includes a mutually parallel circularly polarized photon pair. The transformed light beam is split into a signal beam, which is focused and projected into the multiple scattering medium to produce a diffused polarized photon pair density wave, and a reference beam, which is converted into a reference heterodyne interference signal. The diffused polarized photon pair density wave is converted into a test heterodyne interference signal. Amplitude attenuation and phase delay of the signal beam that has propagated through the multiple scattering medium is obtained based on the reference and test heterodyne interference signals, from which the absorption coefficient and the reduced scattering coefficient of the multiple scattering medium are inferred.
    Type: Grant
    Filed: October 14, 2005
    Date of Patent: February 19, 2008
    Inventors: Chien Chou, Yi-Shin Chan, Jheng-Syong Wu, Li-Ping Yu
  • Patent number: 7333213
    Abstract: An improved confocal microscope system is provided which images sections of tissue utilizing heterodyne detection. The system has a synthesized light source for producing a single beam of light of multiple, different wavelengths using multiple laser sources. The beam from the synthesized light source is split into an imaging beam and a reference beam. The phase of the reference beam is then modulated, while confocal optics scan and focus the imaging beam below the surface of the tissue and collect from the tissue returned light of the imaging beam. The returned light of the imaging beam and the modulated reference beam are combined into a return beam, such that they spatially overlap and interact to produce heterodyne components. The return beam is detected by a photodetector which converts the amplitude of the return beam into electrical signals in accordance with the heterodyne components. The signals are demodulated and processed to produce an image of the tissue section on a display.
    Type: Grant
    Filed: March 22, 2002
    Date of Patent: February 19, 2008
    Assignee: The General Hospital Corporation
    Inventor: Michael Kempe
  • Patent number: 7333214
    Abstract: A detector for interferometric distance or displacement measurement. The detector may receive orthogonally polarized object and reference path output beams, which are directed to a polarization-sensitive beam deflecting element. The beam deflecting element deflects one or both orthogonally polarized beams to provide a desired divergence angle between the beams. The diverging beams are input to a mixing polarizer. The beams exiting the mixing polarizer are similarly polarized and therefore interfere. The interfering diverging beams form interference fringes. The spatial phase of the fringes relative to a photodetector array characterizes the phase difference between the object and reference beams of the interferometer.
    Type: Grant
    Filed: March 31, 2006
    Date of Patent: February 19, 2008
    Assignee: Mitutoyo Corporation
    Inventor: David William Sesko
  • Patent number: 7333215
    Abstract: An improved, adaptive optics control system is disclosed. The system comprises a wavefront corrector, a wavefront sensor, a wavefront reconstructor and a wavefront controller. The wavefront corrector has a surface controlled by a plurality of actuators. The wavefront slope sensor has a subaperture separation mechanism for defining a plurality of subapertures through which the distorted wavefront can pass, each subaperture corresponding to an actuator of the wavefront corrector. The wavefront slope sensor produces a wavefront sensor output signal for each subaperture indicative of the distortion of the wavefront. The wavefront reconstructor is adapted to receive the wavefront sensor output signals and calculate corresponding phase estimates based thereon, each phase estimate having a signal-to-noise ratio. The wavefront reconstructor generates a plurality of correction signals to be applied to each of the actuators of the wavefront corrector, each correction signal having a bandwidth.
    Type: Grant
    Filed: October 14, 2005
    Date of Patent: February 19, 2008
    Assignee: The Boeing Company
    Inventor: Carey A. Smith
  • Patent number: 7333216
    Abstract: An apparatus for wavefront detection includes a wavefront source for the production of a wavefront, an optical system transforming the wavefront, a diffraction grating through which the transformed wavefront passes, and a spatially resolving detector following the diffraction grating. The wavefront source has a two-dimensional structure.
    Type: Grant
    Filed: February 23, 2001
    Date of Patent: February 19, 2008
    Assignee: Carl Zeiss SMT AG
    Inventors: Ulrich Wegmann, Helmut Haidner, Martin Schriever
  • Patent number: 7333217
    Abstract: A position deviation system and method detects and corrects position deviations between the optical axis of an optical system, such as an exposure apparatus, and the center of a curved shaped object, such as a spherical shaped semiconductor. The system determines position deviations by illuminating the curved surface, passing light that is reflected off of the illuminated curved surface through a first lens having an optical axis and a first body. An image having a substantially central portion is formed on a surface using the reflected light. The position deviation is determined based on a position of the substantially central portion of the formed image relative to the optical axis.
    Type: Grant
    Filed: December 20, 2002
    Date of Patent: February 19, 2008
    Assignee: Yamatake Corporation
    Inventor: Ichitaroh Satoh
  • Patent number: 7333218
    Abstract: Provided are systems 10 and methods 100 for determining both the location and angular orientation of holes 12 with openings 14 on a surface 16 of an article 18 that are at least partially obstructed. In a method of the present invention, a scanning system 10 that includes a laser spot projector 40, a laser spot sensor 42, a memory device 48 and a processor 50 is provided. A laser beam 44 is projected onto the surface 16 of the article 18 in a region 24 containing at least one hole 12 and the spot sensor receives light reflections 46. A series of points 52 representing the scanned region is stored as a point cloud 54 in the memory device 48. The point cloud 54 is then manipulated to calculate the location and angular orientation of each hole in the region in relation to one or more pre-existing, article datums 22.
    Type: Grant
    Filed: June 28, 2005
    Date of Patent: February 19, 2008
    Assignee: United Technologies Corporation
    Inventor: Janakiraman Vaidyanathan
  • Patent number: 7333219
    Abstract: A handheld metrology imaging system and method. In one embodiment, the device may comprise an imaging portion, a display portion, a signal processing and control portion, an image capture activation element and a user interface. The user interface may comprise user adjustable video measurement tools configurable relative to an image on the display portion, and video tool adjusting elements. Measurement functions are provided that operate to provide a dimensional measurement result based on the configurations of the video measurement tools. The handheld device can be used to measure not only the normal parts which have traditionally been measured by conventional handheld tools such as a caliper or micrometer, but also very small or flat parts that are difficult to measure with conventional tools.
    Type: Grant
    Filed: March 29, 2005
    Date of Patent: February 19, 2008
    Assignee: Mitutoyo Corporation
    Inventors: Dahai Yu, Michael Nahum, Gary Olson, Kim W. Atherton
  • Patent number: 7333220
    Abstract: An image forming device providing a document image reading mode, image recording mode, copying mode, recording sheet feeding mode, and recording sheet discharge mode. When interruption of feeding of a document or a recording sheet is detected by a sensor, the current driving force transmission path is switched and set to another driving force transmission path corresponding to an operation mode different from the current operation mode at which the interruption occurs.
    Type: Grant
    Filed: November 12, 2003
    Date of Patent: February 19, 2008
    Assignee: Brother Kogyo Kabushiki Kaisha
    Inventors: Akihiro Ikeda, Atsushi Isozaki
  • Patent number: 7333221
    Abstract: A printer comprises a receiving section which receives printing jobs from a networked personal computers, a storage section which stores the received printing jobs, and a printing section which executes a printing job extracted from the storage section. A control section of the printer determines whether the printing jobs received by the receiving section include special printing, and causes a display section to display a list of the printing jobs including the special printing. The printing section executes the printing job selected from the displayed list by the user through an input section.
    Type: Grant
    Filed: February 16, 2007
    Date of Patent: February 19, 2008
    Assignees: Kabushiki Kaisha Toshiba, Toshiba Tec Kabushiki Kaisha
    Inventor: Aiko Okajima
  • Patent number: 7333222
    Abstract: A printer driver (31) divides printing data, which controls printing of a printer, into one or plural data to record the data, to each of which information for discriminating the data is added, as a sub-file (70), as well as creates a sub-file name data (61) for specifying the sub-file (70) and records it as a spooling file (60). The printer driver (31) also creates a file (71) for writing a print controlling command and records the file name thereof in the spooling file (60). When a print cancellation instruction is received during the printing performance, a print cancellation command is written in the file (71). The print processor (42) refers the print spooling file (60) to read the sub-file (70) in order, so that the printing data included in the file would be transferred to a printer (20). The completely transferred sub-file is deleted.
    Type: Grant
    Filed: April 5, 2001
    Date of Patent: February 19, 2008
    Assignee: Seiko Epson Corporation
    Inventors: Masahiro Someno, Hajime Nishizawa, Shoji Kojima
  • Patent number: 7333223
    Abstract: A system and method are provided for reliable and customer-friendly delivery of documents. One method of the present invention include the steps of: producing document data for printing documents; accepting requests to print selected documents; determining whether a selected document is accepted for electronic delivery or for non-electronic delivery; printing documents accepted for non-electronic delivery; and electronically delivering documents accepted for electronic delivery.
    Type: Grant
    Filed: December 6, 2001
    Date of Patent: February 19, 2008
    Assignee: Genworth Financial, Inc.
    Inventors: Junious Gupton, Todd Beck, Varun Tandon, Glen Young, Jeff Gainer, Scott Hamilton, Randy Harris
  • Patent number: 7333224
    Abstract: The present invention provides a system and method for managing printed documents. The method includes receiving a print request, assigning an identifier to a print job associated with the print request, and sending the print job to a printer for printing. Once the printer completes printing the print job, the identifier is added to an unretrieved print job queue. When a printed document associated with the print job is retrieved, the identifier associated with the printed document is scanned, such as with a bar code reader. Once the identifier is scanned, a retrieval confirmation is sent to indicate that the printed document has been retrieved. The identifier is then removed from the unretrieved print queue. Notification messages are sent to a notification recipient while the identifier is in the unretrieved print queue. The notification message includes an email message, a pop-up window, a pager message, and the like.
    Type: Grant
    Filed: June 5, 2002
    Date of Patent: February 19, 2008
    Assignee: Microsoft Corporation
    Inventor: Michael D. Gallacher