Abstract: A semiconductor device includes a lower electrode of a capacitor, a dielectric layer disposed on the lower electrode, and an upper electrode of the capacitor disposed on the dielectric layer. The upper electrode includes a doped poly-Si1-xGex layer. An interlayer insulating layer is disposed on the doped poly-Si1-xGex layer and has a contact hole partially exposing the doped poly-Si1-xGex layer. A metal contact plug is in the contact hole and an interconnection layer is disposed on the interlayer insulating layer and connected to the metal contact plug. Related interconnection structures and fabrication methods are also disclosed.

Abstract: In a BST thin film being a capacitor film in a capacitor element, the capacitor film is formed such that two kinds of chemical states of Sr(I) and Sr(II) exist at a portion of which depth is up to 2.5 nm from a surface thereof (surface layer portion of which thickness is 2.5 nm), an average concentration of Sr(I) is set as AC(I), an average concentration of Sr(II) is set as AC(II), and when “R=AC(II)/AC(I)”, a value of “R” is adjusted to be “0” (zero)<R?0.3, more preferably, “0” (zero)<R?0.1.

Abstract: A semiconductor device includes a lower electrode including a bottom wall portion and a sidewall portion extending upwardly from the bottom wall portion, and an insulating layer located over a top edge surface of the sidewall portion of the lower electrode. The insulating layer includes a contact window which partially exposes the top edge surface of the sidewall portion of the lower electrode. The device further includes a heated pattern which contacts the partially exposed top edge surface of the sidewall portion of the lower electrode through the contact window of the insulating layer.

Abstract: A semiconductor device includes a semiconductor substrate; a circuit; a guard ring; a power source line; and a contact. The semiconductor substrate has a first conductive type. The circuit is formed on the semiconductor substrate. The guard ring is formed on the semiconductor substrate such that the guard ring surrounds the circuit. The power source line supplies an electric power both the circuit and the guard ring. The contact is formed on the guard ring and connects the guard ring and the power source line. The guard ring is composed of a semiconductor having a second conductive type opposite to the first conductive type. The contact is placed in an opposite side of a noise source over the circuit.

Abstract: There is provided a structure wherein an emitter layer 3 is provided in the region A on the first major surface side of a semiconductor substrate 1, and emitter layer 3 is not provided in the region b. There is provided a structure wherein a collector P layer 5 is provided in the region A on the second major surface side of a semiconductor substrate 1, and a cathode N layer 4 is provided in the region B. Specifically, there is provided a structure wherein IGBTs are composed in the region A, and diodes are composed in the region B. By the above-described structure, ON characteristics when the gate is turned on can be improved while suppressing the elevation of the forward voltage Vf and the recovery current of the diodes.

Abstract: A vertical BJT which has a maximal current gain for a photodiode area. According to embodiments, since the BJT can be formed together with the photodiode, and collector current flows up and down based on the double base structure, the magnitude of the current may be increased.

Abstract: The present invention relates to a semiconductor device comprising first and second active device regions that are located in a semiconductor substrate and are isolated from each other by an isolation region therebetween, while the semiconductor device comprises a first conductive interconnect structure that is embedded in the isolation region and connects the first active device region with the second active device region. The semiconductor device preferably contains at least one static random access memory (SRAM) cell located in the semiconductor substrate, and the first conductive interconnect structure cross-connects a pull-down transistor of the SRAM cell with a pull-up transistor thereof. The conductive interconnect preferably comprises doped polysilicon and can be formed by processing steps including photolithographic patterning, etching, and polysilicon deposition.

Abstract: Embodiments disclosed herein include methods in which a pair of openings are formed into semiconductor material, with the openings being spaced from one another by a segment of the semiconductor material. Liners are formed along sidewalls of the openings, and then semiconductor material is isotropically etched from bottoms of the openings to merge the openings and thereby completely undercut the segment of semiconductor material. Embodiments disclosed herein may be utilized in forming SOI constructions, and in forming field effect transistors having transistor gates entirely surrounding channel regions. Embodiments disclosed herein also include semiconductor constructions having transistor gates surrounding channel regions, as well as constructions in which insulative material entirely separates an upper semiconductor material from a lower semiconductor material.

Abstract: An electronic component includes a semiconductor chip with an active front face and a passive rear face, with contact connections and contact surfaces respectively being provided on the active front face and/or on the passive rear face, and with conductive connections being provided in the form of structured conductive tracks for providing an electrical connection from the active front face to the passive rear face. An electronic assembly formed of stacked semiconductor chips, and a method for producing the electronic component and the electronic assembly are also provided.

Abstract: This method for manufacturing a silicon epitaxial wafer includes: a step of growing an epitaxial layer having silicon on a silicon wafer having a main surface of {110}; and a cooling step of cooling the silicon wafer after growing the epitaxial layer. In a first aspect, in the cooling step, a rapid cooling at a cooling rate of more than 500° C./minute is performed in a range of 750° C. to 650° C. In a second aspect, in the cooling step, a passivation film is grown on a main surface of the epitaxial layer at a temperature of 720° C. or more. In a third aspect, a single crystal silicon wafer in which a misorientation angle of a main surface of {110} surface is in a range from 3.0° to 6.2° inclined towards a <110> direction perpendicular to the main surface or a <111> direction is used as the silicon wafer.

Abstract: Pre-encapsulated lead frames suitable for use in microelectronic device packages are disclosed. Individual lead frames can include a set of multiple lead fingers arranged side by side with neighboring lead fingers spaced apart from each other by a corresponding gap. An encapsulating compound at least partially encapsulates the set of lead fingers without encapsulating a microelectronic device. The encapsulating compound can generally fill the plurality of gaps between two adjacent lead fingers.

Abstract: A semiconductor integrated circuit (IC) device is defined by a low-profile package without a die attach pad (DAP). In place of the DAP, an adhesive element is used to retain a die relative to a lead frame during processing. In one example, a method of manufacturing the device includes sealing the lead frame on one side using an adhesive tape and exposing a portion of the tape within a die attach region. The die is secured onto the tape adhesive and held in place during subsequent processing, such as a wire bonding procedure to couple the die to external portions of the frame.

Abstract: In one aspect, the invention provides a semiconductor device that comprises a semiconductor device packaging substrate core. A first interconnect structure is located within a mold region and on a die side of the substrate core and has a first conductive metal density associated therewith. A second interconnect structure is located within the mold region and on a solder joint side of the substrate core and has a second conductive metal density associated therewith, wherein the second conductive metal density within the mold region is about equal to or less than the first conductive metal density within the mold region.

Abstract: A heat slug is provided for a package structure, including a main body and a plurality of protrusions. The main body has a surface in which at least one ditch is defined. Each protrusion is connected to and extends from the main body and has a surface in which a plurality of dimples is defined.

Abstract: A Negative Thermal Expansion system (NTEs) device for TCE compensation or CTE compensation in elastomer composites and conductive elastomer interconnects in microelectronic packaging. One aspect of the present invention provides a method for fabricating micromachine devices that have negative thermal expansion coefficients that can be made into a composite for manipulation of the TCE of the material. These devices and composites made with these devices are in the categories of materials called “smart materials” or “responsive materials.” Another aspect of the present invention provides microdevices comprised of dual opposed bilayers of material where the two bilayers are attached to one another at the peripheral edges only, and where the bilayers themselves are at a minimum stress conditions at a reference temperature defined by the temperature at which the bilayers are formed.

Abstract: A processor for making porous silicon or processing other substrates has first and second chamber assemblies. The first and second chamber assemblies include first and second seals for sealing against a wafer, and first and second electrodes, respectively. The second seal is moveable towards and away from a wafer in the processor, to move between a wafer load/unload position, and a wafer process position. The second electrode may move with the second seal. A light source shines light onto the first side of the wafer. The processor may be pivotable from a substantially horizontal orientation, for loading and unloading a wafer, to a substantially vertical orientation, for processing a wafer.

Abstract: A module that can not only achieve the reduction in size and manufacturing cost but also be impervious to noise due to electromagnetic waves, and a mounted structure using the same are provided. A module (1) includes a substrate (12) and a plurality of semiconductor packages (11a, 11b), each including a semiconductor chip (10), mounted on the substrate (12). Each of the plurality of semiconductor packages (11a, 11b) includes a first radio communication element (16) for transmitting and receiving a signal between the semiconductor chips (10) in the plurality of semiconductor packages (11a, 11b) by radio communication, and the first radio communication element (16) is constituted independently of the semiconductor chip (10).

Abstract: An apparatus and a method for packaging semiconductor devices. The apparatus includes a substrate strip component of a leadless three-dimensional stackable semiconductor package having mounting contacts on, for example, four peripheral edges. The substrate strip may either be fabricated for mounting a single electrical component (e.g., an integrated circuit die) or a plurality of substrate strips may be laid out in an X-Y matrix pattern which may later be singulated into individual package strip for leadless packages. Three-dimensional stacking is achieved by a bonding area on an uppermost portion of the sidewall. The sidewall of the strip is high enough to enclose an encapsulant covering a later mounted integrated circuit die and associated bonding wires.

Abstract: Chip scale packages and assemblies thereof and methods of fabricating such packages including Chip-On-Board, Board-On-Chip, and vertically stacked Package-On-Package modules are disclosed. The chip scale package includes a core member of a metal or alloy having a recess for at least partially receiving a die therein and includes at least one flange member partially folded over another portion of the core member. Conductive traces extend from one side of the package over the at least one flange member to an opposing side of the package. Systems including the chip scale packages and assemblies are also disclosed.

Abstract: A carrier board structure with a semiconductor component embedded therein and a method for fabricating the same are proposed. The method provides at least one semiconductor component and a carrier having a first surface and a second surface opposed to the first surface and at least one through hole. The semiconductor component has an active surface having a plurality of electrode pads and an inactive surface, opposed to the active surface, having a plurality of recesses. An adhesive layer is formed on the second surface of the carrier for sealing an end of through hole of the carrier. Thus, the semiconductor component can be mounted in the through hole of the carrier, and the inactive surface can be mounted on the adhesive layer, as well as the adhesive layer fills in the recess of semiconductor component and the gap between the through hole of carrier board and semiconductor component.

Abstract: A substrate B for use in production of a semiconductor device is used, which substrate includes an adhesive sheet 50 having a base layer 51 and an adhesive layer 52, and a plurality of independently provided electrically conductive portions 20. A semiconductor element having electrodes 11 formed thereon is firmly fixed onto the substrate B, and upper portions of the plurality of electrically conductive portions 20 and the electrodes 11 of the semiconductor element 10 are electrically connected by using wires 30. The semiconductor element 10, wires 30 and electrically conductive portions 20 are sealed by using a sealing resin 40. Each of the electrically conductive portions 20 has overhanging portions 20a, and a side face 60a of the electrically conductive portion 20 is roughened, thus enhancing the joining strength between each electrically conductive portion 20 and the sealing resin 40.

Abstract: A semiconductor package comprises a chip, a plurality of pad extension traces, a plurality of via holes, a lid and a plurality of metal traces, wherein the chip has an active surface, a back surface opposite to the active surface, an optical component disposed on the active surface, and a plurality of pads disposed on the active surface and electrically connected to the optical component; the pad extension traces are electrically connected to the pads; the via holes are formed through the chip and electrically connected to the pad extension traces; the lid is attached on the active surface of the chip; and the plurality of metal traces are disposed on the back surface of the chip, electrically connected to the plurality of via holes, and defines a plurality of solder pads thereon.

Abstract: One embodiment of a micro-electronic device includes a substrate including micro-electronic components thereon, and a cover including a ring of sealing material secured to the substrate and a raised ring of material positioned opposite the cover from the ring of sealing material.

Abstract: A method and device for cooling an integrated circuit is provided. A method and device using a gas to cool circuit structures such as a number of air bridge structures is provided. A method and device using a boiling liquid to cool circuit structures is provided. Further provided is a method of controlling chip temperature. This allows circuit and device designers an opportunity to design more efficient structures. Some properties that exhibit less variation when temperature ranges are controlled include electromigration, conductivity, operating speed, and reliability.

Abstract: [PROBLEM ] To provide a laminate ceramic electronic device applicable to two types of design specifications by using a common package. [SOLUTION A laminate ceramic electronic device of the present invention has filter chips 2, 3 for transmission and reception mounted therein. A wiring pattern 7, which connects an input terminal A of the transmission filter chip 2 with a transmission side signal terminal Tx in a first arrangement, has two branch wiring portions 72, 73 extending from the transmission side signal terminal Tx toward the input terminal A of the transmission filter chip 2 in the first arrangement and toward an output terminal D of the reception filter chip 3 in a second arrangement.

Abstract: Microdevices and methods for packaging microdevices. One embodiment of a packaged microdevice includes a substrate having a mounting area, contacts in the mounting area, and external connectors electrically coupled to corresponding contacts. The microdevice also includes a die located across from the mounting area and spaced apart from the substrate by a gap. The die has an integrated circuit and pads electrically coupled to the integrated circuit. The microdevice further includes first and second conductive elements in the gap that form interconnects between the contacts of the substrate and corresponding pads of the die. The first conductive elements are electrically connected to contacts on the substrate, and the second conductive elements are electrically coupled to corresponding pads of the die.

Abstract: A component includes a carrier substrate having a coefficient of thermal expansion ?p and a chip mounted on the carrier substrate by a plurality of bumps. The chip has a first coefficient of thermal expansion ?1 in a first direction x1 and a first expansion difference, ??1 equal to the absolute value of ?p??1. The chip also has a second coefficient of thermal expansion ?2 in a second direction x2 and a second expansion difference ??2 is equal to the absolute value of ?p??2,. The bumps are arranged such that a first distance, ?x1, corresponding to a normal projection of a line between centers of terminally situated bumps in the first direction onto an axis running parallel to direction x1 is less than a second distance corresponding to a normal projection of a line between centers of terminally situated bumps in the second direction onto an axis parallel to direction x2.

Abstract: For delivering supply power evenly into chip, a semiconductor device includes plural power supply pads 17a and grounding pads 18a, arranged in alternation in X-direction. The device also includes first upper layer power supply wire 17b, extending in X-direction and connected to first ends of the power supply pads 17, a first upper layer grounding wire 18b, extending in X-direction and connected to second end, opposing first end, of the grounding pads 18a in X-direction. A second upper layer power supply wire 17c extending between first upper layer power supply wire 17b and first upper layer grounding wire 18b, from the power supply pad 17a nearly to neighboring grounding pad 18a, and second upper layer grounding wire 18c extending between first upper layer power supply wire 17b and first upper layer grounding wire 18b, from the grounding pad 18a nearly to neighboring power supply pad 17a. The pads or wires 17a, 17b, 17c, 18a, 18b and 18c are formed on the same pad layer.

Abstract: A semiconductor device having pads is provided. The semiconductor device includes first pads formed along a first row, and second pads formed along a second row. The first via contact portions extending from the first pads toward the second row, and second via contact portions extending from the second pads toward the first row. The first and second via contact portions are arranged along a third row between the first and second rows.

Abstract: A barrier layer is deposited over a layer of passivation including in an opening to a contact pad created in the layer of passivation. A column of three layers of metal is formed overlying the barrier layer and aligned with the contact pad and having a diameter that is about equal to the surface of the contact pad. The three metal layers of the column comprise, in succession when proceeding from the layer that is in contact with the barrier layer, a layer of pillar metal, a layer of under bump metal and a layer of solder metal. The layer of pillar metal is reduced in diameter, the barrier layer is selectively removed from the surface of the layer of passivation after which reflowing of the solder metal completes the solder bump of the invention.

Abstract: A method of manufacturing a semiconductor chip is disclosed. A die having a plurality of die-pads is attached to a substrate in a semiconductor package which includes a plurality of substrate-pads. The method involves forming conductive column bumps of differing volumes extending from the die-pads; attaching each of the column bumps to a corresponding substrate-pad to form a subassembly; and reflowing the subassembly so that the column bumps form robust electrical and mechanical connections between the die pads and the substrate pads.

Abstract: A semiconductor device package includes a substrate, first and second chip pads spaced apart over a surface of the substrate, and an insulating layer located over the surface of the substrate. The insulating layer includes a stepped upper surface defined by at least a lower reference potential line support surface portion, and an upper signal line support surface portion, where a thickness of the insulating layer at the lower reference potential line support surface portion is less than a thickness of the insulating layer at the upper signal line support surface portion.

Abstract: A stacked structure of chips including a first chip, a second chip, an insulation layer and a first conductive element is provided. The second chip is attached to the first chip, and the back surface of the second chip faces an active surface of the first chip. The second chip includes a first contact disposed on an active surface of the second chip. The insulation layer disposed on the active surface of the first chip encapsulates the second chip. The first conductive element is formed in the insulation layer for electrically connecting one end of the first conductive element to the first contact and the other end of the first conductive element exposed outside the insulation layer. A wafer structure for making the stacked structure of chips is also provided. The stacked structure of chips has no circuit carrier, hence reducing the thickness of the stacked structure.

Abstract: A method for fabricating a semiconductor device is provided. The method includes: etching an area where a plurality of modules are formed on a semiconductor substrate; forming a plurality of modules on the area; forming on insulation layer on the substrate; forming a plurality of contacts that contact a plurality of the modules by filling a selectively etched area of the isolation layer with conductive material; and forming a first conductive polymer wire for connecting contacts of the plurality of contacts.

Abstract: A method of effectively fabricating a semiconductor device involves separately fabricating a first substrate having a transistor layer and a second substrate having a metal wire layer, and stacking the first and second substrates. A transistor on the first substrate is electrically connected to a metal wire on the second substrate through a connection electrode.

Abstract: According to embodiments, a semiconductor device may include a PMD layer provided with a contact, and a wiring layer formed on the PMD layer and connected to the contact by stacking and forming a plurality of metal layers thereon. In embodiments, the plurality of metal layers may include a first metal layer and a second metal layer.

Abstract: Circuitry includes first and second circuits spaced apart by an interconnect region. The interconnect region includes a first interconnect and the second circuit includes a stack of semiconductor layers. The first interconnect extends between the first and second circuits to provide communication therebetween. The second circuit operates as a memory circuit.

Abstract: A chip structure comprises a substrate, a first built-up layer, a passivation layer and a second built-up layer. The substrate includes many electric devices placed on a surface of the substrate. The first built-up layer is located on the substrate. The first built-up layer is provided with a first dielectric body and a first interconnection scheme, wherein the first interconnection scheme interlaces inside the first dielectric body and is electrically connected to the electric devices. The first interconnection scheme is constructed from first metal layers and plugs, wherein the neighboring first metal layers are electrically connected through the plugs. The passivation layer is disposed on the first built-up layer and is provided with openings exposing the first interconnection scheme. The second built-up layer is formed on the passivation layer.

Abstract: A method of closely interconnecting integrated circuits contained within a semiconductor wafer to electrical circuits surrounding the semiconductor wafer. Electrical interconnects are held to a minimum in length by making efficient use of polyimide or polymer as an inter-metal dielectric thus enabling the integration of very small integrated circuits within a larger circuit environment at a minimum cost in electrical circuit performance.

Abstract: An implantable hermetically sealed microelectronic device and method of manufacture are disclosed. The microelectronic device of the present invention is hermetically encased in a insulator, such as alumina formed by ion bean assisted deposition (“IBAD”), with a stack of biocompatible conductive layers extending from a contact pad on the device to an aperture in the hermetic layer. In a preferred embodiment, one or more patterned titanium layers are formed over the device contact pad, and one or more platinum layers are formed over the titanium layers, such that the top surface of the upper platinum layer defines an external, biocompatible electrical contact for the device. Preferably, the bottom conductive layer is larger than the contact pad on the device, and a layer in the stack defines a shoulder.

Abstract: An arrangement scheme for a power/ground (P/G) network of an integrated circuit is provided. Rows of standard cells in the integrated circuit are horizontally arranged. The P/G network has horizontal and vertical metal lines arranged in different metal layers. The horizontal metal lines have horizontal power metal lines and horizontal ground lines. The vertical metal lines have vertical power metal lines and vertical ground lines. The power lines and the ground lines in the horizontal metal lines are respectively interconnected with the power lines and the ground lines of the vertical metal lines. The width of the horizontal metal wires in the P/G network is such that the horizontal power metal lines only cover the power lines in the rows of the standard cells, while the horizontal ground metal lines only cover the ground lines of the rows of the standard cells.

Abstract: A method for forming an intermetal dielectric in a semiconductor device includes the steps of: forming metal wiring patterns electrically connecting circuit devices on a silicon substrate provided with the predetermined semiconductor circuit devices; forming a first silicon oxide film electrically isolating the metal wiring patterns; forming a second silicon oxide film on the first silicon oxide film; and ion-implanting silicon or oxygen into the inside of the second silicon oxide film.

Abstract: A semiconductor device includes a semiconductor substrate having a cell region and a peripheral circuit region defined therein. A buried word line is disposed in the substrate in the cell region and has a top surface lower than top surfaces of cell active regions in the cell region. A gate line is disposed on the substrate in the peripheral circuit region. A word line interconnect is disposed in the substrate in the peripheral circuit region, the word line interconnect including a first portion contacting the buried word line and having a top surface lower than a top surfaces of the cell active regions and a second portion that is overlapped by and in contact with the gate line.

Abstract: Embodiments include a semiconductor device comprising: a pad formed on an insulating layer and having an electric connection region with external components; and a protective insulating layer which has an aperture for exposing the electric connection region. The protective insulating layer may include a first insulating layer and a second insulating layer, and side surfaces of these insulating layers are exposed to the aperture. At least part of the side surfaces surrounding the electric connection region have a tapered configuration at an acute angle to a top surface of the pad. This semiconductor device not only enables reduction of the fabrication steps, but also provides a reliable passivation structure for a pad with sufficient thickness and stress relaxation characteristics.

Abstract: A semiconductor device according to embodiments may include an interposer, a plurality of devices stacked and formed on the interposer, through electrodes each formed in the plurality of devices and formed by penetrating through the respective devices, and connecting electrodes formed between the respective devices and connecting a through electrode formed in a upper device to a through electrode formed in a lower device.

Abstract: A semiconductor device and method for manufacturing the same are provided, capable of narrowing feature size by utilizing the property of oxidation of a material. In one method, a polysilicon layer can be patterned into a fine pattern up to a critical dimension using a photolithography process. Then the patterned polysilicon layer can be oxidized, thereby narrowing the gap between adjacent polysilicon patterns and narrowing the polysilicon patterns through the oxidation process. The narrowed polysilicon patterns and/or the narrowed gap between adjacent polysilicon patterns can be used to form vias or trenches in the substrate (or layer) below the polysilicon layer having a width narrower than the critical dimension.

Abstract: The present invention provides a semiconductor device including at least one of an insulating layer and a semiconductor layer each including a hole formed therein, and a through electrode provided in the hole. In the semiconductor device, the side wall of the hole is constituted of a first region from the opening of the hole to a predetermined position between the opening of the hole and the bottom surface of the hole, and a second region from the predetermined position to the bottom surface of the hole. The through electrode includes a seed layer and a plating layer. The seed layer covers the second region and the bottom surface of the hole without covering the first region. In addition, the plating layer covers the seed layer and at least a part of the first region.

Abstract: A semiconductor device and a fabricating method thereof are provided. An insulating layer pattern has a via hole exposing a lower metal layer, and a copper via is provided inside the via hole. A TiSiN layer is disposed on the insulating layer pattern and the copper via, and an interconnection structure is disposed on the TiSiN layer.

Abstract: Example embodiments may provide metal line structures, and example methods may include forming the same. Example embodiment metal line structures may include a first metal line on a substrate, a first barrier metal layer on sidewalls and a lower surface of the first metal line, a first insulating layer covering the first metal line, a second metal line on the first insulating layer, a contact plug passing through the first insulating layer to electrically connect the first metal line and the second metal line, and a second barrier metal layer on sidewalls and a lower surface of the contact plug and the second metal line. The first barrier metal layer and the second barrier metal layer may contact each other.

Abstract: A semiconductor device and method are disclosed in which an interlayer insulating layer is patterned using multiple overlaying masks to define the geometry of contact plugs and corresponding wiring layers separated by fine pitches.