Abstract: An illumination optical system that is used for an exposure apparatus that includes a mirror and exposes an object, illuminates a surface to be illuminated using light from a light source, and includes a filter member arranged at a position that substantially has a Fourier transform relationship with the surface to be illuminated, the filter member including a transmittance distribution preset to correct a non-uniformity of a transmittance distribution of the illumination optical system caused by the mirror.

Abstract: A lithographic projection apparatus that is arranged to project a pattern from a patterning device onto a substrate using a projection system has a liquid supply system arranged to supply a liquid to a space between the projection system and the substrate. The apparatus also includes a liquid removal system having a conduit having an open end adjacent a volume in which liquid will be present, a porous member between the end of the conduit and the volume, and a suction device arranged to create a pressure differential across the porous member.

Abstract: A range and bearing-finding system is disclosed. A diverging encoded laser beam is transmitted to a target, and a return reflection of the encoded beam received. The transmitted beam is sampled, and a plurality of predetermined time delays are applied to the sampled laser beam. The sampled laser beam with each of the predetermined time delays is correlated with the return reflection until a sampled laser beam having a time delay providing the highest correlation is found, the time delay indicating laser travel time to and from the target. Range is determined from this time delay. Bearing of the target is found by using a quadrant protector to receive the return reflection. The process for finding bearing uses the correlation process used to find range.

Abstract: A ladar system with phase correction. The novel ladar system includes optics for receiving a first signal that is a reflected version of a transmitted laser signal, an optical delay line for providing a second signal that is a delayed version of the transmitted laser signal, and a mechanism for mixing the first signal with the second signal. The second signal is delayed by a time TD that reduces a relative time difference between the first and second signals such that phase errors caused by laser transmitter instabilities and nonlinear modulation are less than a predetermined level.

Abstract: An optical device for measuring the displacement velocity of a first movable element in relation to a second element which is fixed to one of said elements and comprises two lasers transmitting two incident beams towards the other elements. The device including photosensitive linear arrays for front and rear detection which are substantially perpendicular to each other. Additional front and rear photosensitive linear arrays are disposed at a distance from the photosensitive front and rear linear arrays. A processing circuit is connected to the photosensitive linear arrays and determines the longitudinal and/or transversal displacement velocity of the movable element. The circuit also determines the distance between the device and the other element by means of optical triangulation and corrects the longitudinal and/or transversal displacement velocity value according of the said distance.

Abstract: In-situ monitoring of a crystallization state is used for laser anneal processing for applying an energy line irradiation for at least one of crystallization of a thin film and promotion of the crystallization. A method is characterized by simultaneously irradiating at least a plurality of monitoring places in a region having a predetermined area of at least one of the surface and the underside of the thin film by a monitor light for monitoring a crystallization state of the thin film at least during or after of before, during and after the energy line irradiation directly or through a substrate, and measuring a temporal change of the intensity of at least one of a reflected light and a transmitted light, from the surface or the underside of the thin film, of the monitor light as a light intensity distribution related to the positions of the monitoring places. Apparatus according to the invention perform such methods.

Abstract: The invention is directed to an arrangement and a method for checking optical diffraction structures (e.g., kinegrams) on documents. The object of the invention, to find a novel possibility for checking optical diffraction structures on documents which permits detection of the presence and authenticity of optical diffraction structures quickly and economically with respect to apparatus, is met according to the invention in that the sensor unit is arranged orthogonally above the support surface of the document, and in that the illumination unit contains at least two monochromatic light sources which are arranged so as to emit light bundles at defined incident angles with respect to a surface normal of the document directed to the diffraction structure and which can be switched on sequentially.

Abstract: In a survey system in which guide light is emitted from the side of a target, and, on the side of a surveying instrument, a telescope is directed roughly toward the target by receiving the guide light so as to shorten the time required for automatic collimation, the automatic collimation of the surveying instrument can be reliably performed by removing guide light reflected by reflective objects such as windowpanes. The target has a guide light remitter that emits guide light The guide light transmitter includes a light source, a polarizing plate that changes light emitted from this light source into linearly polarized light, and a quarter-wave plate that changes this nearly polarized light into circularly polarized guide light The surveying instrument includes a direction detector and a collimation preparing means. The direction detector includes a quarter-wave plate and a polarizing plate.

Abstract: This apparatus specifies, based upon the front image that is photographed by a front camera 65f before the present time by a predetermined time, the position (point A) of the “object” in the front image by utilizing the difference in brightness, and specifies, based upon the rear image photographed by a rear camera 65r at the present time, the position (point C) of the object same as the aforesaid “object” in the rear image by utilizing the difference in brightness. This apparatus obtains the displacement amount m in the image lateral direction of the position (point C) of the specified “same object” in the rear image with respect to the position (point B) of the aforesaid “same object” in the rear image that is to be specified supposing that the vehicle body slip angle ? is “0”, and detects the vehicle body slip angle ? according to the equation of “?=tan?1(m/L)” (L: camera-to-camera distance).

Abstract: A method of selection of an illuminator for use in an accelerated light stability test device chamber is described that employs measuring and comparing the spectral irradiance of at least one light source for use in an illuminated device and at least one illuminator suitable for use in an accelerated weathering chamber and selecting an illuminator having certain irradiance criteria. Also described are methods of accelerated light stability testing of an illuminated display components and an accelerated light stability tcst device.

Abstract: A system and method for measuring defects, film thickness, contamination, particles and height of a thin film disk or a silicon wafer. The system includes a processor for determining height. In addition to measuring the height the system can measure film thickness and defects through the measurement of the phase shift of optical signals. An optical profilometer is described which can measure topography on thin film disks, optical substrates or silicon wafers and whose output is independent of the reflectivity of the substrate. This material independent optical profilometer uses a retro-reflector to achieve reflectivity independence and to increase the height sensitivity to 8 times the height of the surface. The reflectivity independent optical profilometer achieves perfect cancellation of the slope of the surface while measuring the topography of the substrate.

Abstract: Multi-spot illumination and collection optics for highly tilted wafer planes are provided. One system configured to collect and detect light scattered from a wafer includes a set of optical elements configured to collect light scattered from spatially separated spots formed on a wafer plane at an oblique angle of incidence and to focus the light to corresponding spatially separated positions in an image plane. This system also includes a detection subsystem configured to separately detect the light focused to the spatially separated positions in the image plane.

Abstract: Disclosed are methods and apparatus for facilitating procedures implemented on an analysis tool are provided herein. In one embodiment, an apparatus includes an analyzer module arranged for managing an analyzer tool and causing a high resolution image generated by the analyzer tool to be presented in a display. The apparatus also includes an inspector interface module arranged for simulating an inspector interface in the display. The inspector interface includes features that are available on a corresponding inspection tool, and the inspector interface is based at least in part on defect results from the inspection tool. In one embodiment, the analyzer module executes without knowledge of the inspector interface module and visa versa, and the apparatus includes a synchronization mechanism that knows about these two modules and also is capable of communicating with these two modules.

Abstract: Fourier filters and wafer inspection systems are provided. One embodiment relates to a one-dimensional Fourier filter configured to be included in a bright field inspection system such that the bright field inspection system can be used for broadband dark field inspection of a wafer. The Fourier filter includes an asymmetric illumination aperture configured to be positioned in an illumination path of the inspection system. The Fourier filter also includes an asymmetric imaging aperture complementary to the illumination aperture. The imaging aperture is configured to be positioned in a light collection path of the inspection system such that the imaging aperture blocks light reflected and diffracted from structures on the wafer and allows light scattered from defects on the wafer to pass through the imaging aperture.

Abstract: In a defect inspecting apparatus, an illumination optical system illuminate a mask having a patterned surface, the optical beam passing through the mask is split into two beam components which is guided in first and second image pickup sensors. The pickup sensors has first and second pickup fields on the patterned surface, which pick up first and second parts of the mask image. The first and second pickup fields are parallel to each other and displaced from each other by (2n+1)×d/2 in the longitudinal direction thereof, where d denotes a longitudinal dimension of each pixel image in the first and second pick up fields and n denotes an integer equal to or larger than 0. The first and second parts of the mask image are merged to form a pattern image, and a defect in the mask is detected on the basis of the pattern image.

Abstract: An image-based method and corresponding apparatus for measuring, in scientifically basic terms, the complete fiber length distribution from a tapered beard. The method may be referred to as length by image analysis (Li).

Abstract: An inspection system is provided that includes a camera and a laser distance measuring device. The camera has high magnification capabilities and can be panned and tilted as needed. The laser distance measuring device provides information regarding the distance from the camera to the object being imaged. The camera and laser distance measuring device are carried by a frame, which has an elongated member attached thereto for resting the frame on a surface. This configuration makes the inspection system well suited to inspect horizontal pipelines without feeding the camera along the length of the pipeline.

Abstract: The invention provides an apparatus including (a) a frame having a boundary plane; (b) a flow chamber supported by the frame, the flow chamber placed a distance from the boundary plane; (c) a radiation source, the radiation source directed away from the flow chamber and away from the exterior side of the boundary plane, and (d) a first reflective surface placed to direct a radiation beam in a path crossing the boundary plane to the flow chamber; (e) one or more reflective surfaces placed to direct a radiation beam from the radiation source to the first reflective surface, the path from the radiation source to the flow chamber being at least 1.5 times the distance from the flow chamber to the boundary plane.

Abstract: A device for the measurement of chemical and/or biological samples, in particular by means of luminescence spectroscopy, comprises an irradiation unit, a sample receiver, at least one optical unit and a detector unit. The color marker in the sample, which contains at least one color marker, is stimulated by irradiation into producing luminescence and gives off light. The light emitted by the color markers is detected by detectors in the detector unit. According to the invention, the measurement results may be improved by the irradiation unit generating pulsed irradiation. The irradiation unit is thus preferably controlled by a control unit in such a way that the irradiation pulses impinge on the sample in a temporal sequence.

Abstract: A monochromator for use in a spectrograph admits light from an aperture to a primary reflector (preferably an off-axis parabolic mirror) which collimates the input light with low aberration and directs it to a diffraction grating. The component wavelengths of the input light are then directed to first and second secondary reflectors (preferably spherical or toroidal mirrors), which are chosen to cooperatively focus the component wavelengths in ordered bands across an array detector while each at least substantially cancels the effects of any aberrations introduced by the other. By choosing optical elements which supply the grating with input light with low aberration, and then choosing optical elements which receive the component wavelengths from the grating and which offset any aberrations introduced by the other receiving optical elements, wavelength resolution at the detector can be enhanced.

Abstract: A method of determining actual properties of layered media. An incident beam of light is directed towards the layered media, such that the incident beam of light is reflected from the layered media as a reflected beam of light. The actual properties of the reflected beam of light are measured, and properties of the layered media are estimated. A mathematical model of the layered media is solved with the estimated properties of the layered media to yield theoretical properties of the reflected beam of light. The mathematical model is solved using at least one of a modified T matrix algorithm and a Z matrix algorithm. The theoretical properties of the reflected beam of light are compared to the actual properties of the reflected beam of light to yield a cost function. The estimated properties of the layered media are iteratively adjusted and the mathematical model is iteratively solved until the cost function is within a desired tolerance.

Abstract: Disclosed are system for and method of analyzing substantially the exact same spot size on a sample system with at least two wavelengths for which the focal lengths do not vary more than within an acceptable amount.

Abstract: A color measurement system includes a hand held color measurement instrument, which may be provided with a wireless interface to a computer. The color measurement system includes a scanning guide for holding the hand held color measurement instrument in proper alignment with a color target. The scanning guide includes a calibration reference to allow convenient calibration of the hand-held color measurement instrument. The hand-held color instrument includes an illumination ring to provide visual feedback to the user. The color of the illumination ring changes in order to display a color similar to that being read by the hand-held color measurement instrument. Color management profiling of the hand held color measurement instrument illumination ring improves the color rendition capability of the illumination ring.

Abstract: Disclosed is an apparatus and method for a compact, rugged, and inexpensive spectrometer that will make possible a range of new applications for optical spectroscopy including point-of-care medical devices, personal monitors, and ubiquitous environmental sensing. Embodiments of the disclosure include silicon photodetectors where incident light passes through a layer of an inexpensive, absorbing thin film. In one embodiment, one or more photodetectors may be used where a series of absorbing thin film layers are passed over the photodetectors. In another embodiment, an absorbing thin film layer is placed over one or more photodetectors where the absorptivity of the thin film layer is different for each photodetector.

Abstract: An optical monitoring system for monitoring thin film deposition on a substrate includes a support bridge that is attached on an inside of a deposition chamber. The system further includes a fiber optic collimator having an optical fiber for incoming light, and another fiber optic collimator having an optical fiber for transmitted or reflected light from the substrate. The system further includes a shutter that is closed when a desired thin film thickness is deposited on the substrate.

Abstract: A measuring chamber for photo-acoustical sensors for the continuous measurement of radiation-absorbing substances, in particular of radiation-absorbing particles, in gaseous samples includes at least one entry and at least one exit for the samples, a tube section with microphone that allows for the flow-through of the sample in longitudinal direction, and at least one entry and exit point for a laser beam that is aligned with the tube section, and whereby these entry and exit points are both arranged at a distance from the measuring tube by at least one chamber with a cross-sectional area that is expanded relative to the tube section.

Abstract: A provided optical-phase-distribution measuring method, by which optical phase distribution is identified at high speed and with high accuracy from information on light-intensity distribution without using a special measuring device, comprises steps: for inputting light to be measured to optical systems, respectively, modulating the intensity and the phase, detecting the output light to be measured with CCD, and measuring the intensity distribution of detected light to be measured as an image with an optical-phase-distribution measuring system provided with the two different optical systems; for setting an observation equation, based on the intensity distribution and on the optical characteristics of the optical systems; for setting a phase-distribution identification inverse-problem from the observation equation, and formulating the set phase-distribution identification inverse-problem as a first nonlinear optimization problem in which complex amplitude representing the light to be measured is assumed to be

Abstract: A method for measuring ultrashort light pulse which comprises a first step of linear optical filtering of the signal for which it is desired to measure the amplitude of the pulses by means of an acoustic interaction between the optical signal and a colinear or quasi-colinear acoustic beam, a second step of either mixing in a non-linear response electro-optical element of optical beams diffracted by the acoustic beam, followed by one detector for detecting the light intensity derived from the mixer, or effecting one integration detection of the square of the optical intensity diffracted by the acoustic beam.

Abstract: The present invention relates to an apparatus and to a method of load dependent analyzing an optical component (114), comprising the steps of: splitting an initial signal (115) into the reference signal (115b) into and into a measurement signal (115a), intermittently providing a load signal (108) to the component (114), providing the measurement signal (115a), to the component (114),so that the component (114) can influence the measurement signal (115a) to create a signal (120) influenced by and received from the component (114), superimposing the reference signal with the signal (120) received from the component (114), to provide a superimposed signal (118), detecting the superimposed signal (118) when the loading signal (108) is not present at the component (114) to provide an information containing signal (126), and processing the information containing signal (126) to determine an optical property of the component (114) dependent on a property of the load signal (118).

Abstract: An optical image measuring apparatus capable of speedily measuring a velocity distribution image of a moving matter.

Abstract: Methods and apparatus are disclosed for measurement of critical dimensions (CD) of features and detection of defects in reflecting UV, VUV, and EUV lithography masks and in transmitting UV and VUV lithography masks. The measured CD's may be used in the determination of optical proximity corrections (OPC) and/or in mask fabrication process control. The transmitting masks may comprise binary and various types of phase shift masks.

Abstract: Device and method of measuring a position of an irregular surface. The method includes projecting a spot along a first axis onto the irregular surface, focusing an image of the spot along a second axis onto a detector, wherein the second axis is non-coaxially arranged with respect to the first axis, processing signals from the detector, and calculating the position of the irregular surface based on at least one isolated desired frequency component of the signals.

Abstract: In a flatness measurement apparatus, a sensor unit having a flatness-detection sensor is slidable along the linear guide rail. A support system supports the linear guide rail such that the linear guide rail is rotatable in a horizontal plane, whereby a surface of a wafer stage to be measured is scanned all over with the sensor unit having the flatness-detection sensor so as to ensure a flatness measurement of the whole surface of the wafer stage.

Abstract: An apparatus and method for adapting a sensor aspect ratio to a print aspect ratio in a digital image capture device is disclosed In one embodiment, the invention is an apparatus for capturing digital images, comprising an image sensor including a plurality of image capture elements, each of the image capture elements configured to capture image data, an input element for communicating print size information to the apparatus, and logic for determining which of the plurality of image capture elements correspond to the print size.

Abstract: There is provided an image processing apparatus which can effectively use a memory provided in an image pickup apparatus such as a digital camera or a digital video camera, without causing a shortage of the working memory capacity during image processing of print data, to realize a printing system that has minimized costs and is very flexible. Image data stored in a recording medium is input to the image processing apparatus. An image data format for conversion of the image data is selected according to a size in which the input image data is to be printed out and the input image data is processed in the selected image data format.

Abstract: In an information processing apparatus when the body pages are set to start from the back side of the cover, the cover is printed on the first side of the first sheet, the first page of the body is printed on the second side of the first sheet, and the second and subsequent pages of the body are printed on both sides of the second and subsequent sheets. When the body pages are set to start from a sheet different from the cover, the cover is printed on the first side of the first sheet, only a background image of the cover is printed on the second side of the first sheet, which is the back side of the cover, and the body pages are printed on both sides of the second and subsequent sheets.

Abstract: When a print job is canceled, the printer saves the print job for potential subsequent retrieval. The printer implements a user interface that allows a user to select from previously cancelled print jobs, and to recall such print jobs for subsequent printing.

Abstract: If a determination result obtained using software in a scanner CPU is not identical to a determination result obtained using hardware in a determination section, error processing is performed to prevent image forming of a particular document.

Abstract: In a print system including a server holding an application program connected to a network. In a client computer, when a print request for data obtained by the application program is received, client information and a request to make print data for the data are requested to the server. In the server, print data are made according to print control information according to the received client information, the print data is sent.

Abstract: Disclosed herein is an image managing systems for cellular phone users, wherein user registration and management is simplified. When a request for access is received from a cellular phone at a first storage means, the first storage means decodes the phone number of the accessing cellular phone, and a memory portion saves uploaded image data, to which a unique image ID has been assigned by an image ID issuing portion, in a memory area that has been assigned to the phone number. An editing portion of a service implementing portion sends data indicating the storage location (a URL address) and the image ID of an image data specified by the user to be stored permanently to a second storage means. The second storage means downloads, based on the URL address and image ID, and manages the target image data from the first storage means.

Abstract: A preflight time estimator for a printing workflow is provided. An estimated preflight time is determined by analyzing a plurality of previously measured preflight times. The analysis may include tracking and analyzing at least one preflight attribute of a plurality of print jobs. The preflight time estimator may comprise a computer readable media including computer executable instructions for calculating the estimated preflight time. A printer configured to execute the instructions of the computer readable media is also provided.

Abstract: According to one aspect, a printer supports transparency operations by generating mask data at interpretation stage which indicates whether each bit of a page content would be determined by the result of a raster operation or a prior destination value. The mask data can be used to complete quickly rendering of a page image once the rendering starts. Another aspect enables color fills of objects to be performed efficiently. A raster operations engine may determine whether all the points (pixels) of the object would have the same value if the raster operation is performed. If all pixels would have the same value, the value for only one pixel is computed and used for multiple pixels of the object. According to another aspect, when a pattern is to be tiled on an entire image portion, the pattern data is stored in a memory and provided as an input to rendering operation multiple times.

Abstract: An image processing apparatus controls to print a plurality of sequential still images, which can be observed as a flip moving image, on the basis of moving image data. The image processing apparatus provides a window which has a start point button, end point button, seek bar, and the like. The user designates a desired still image extraction range from the moving image data by operating the start and end point buttons. This window also provides a preview button. When the user clicks the preview button, a predetermined number of sequential still images are generated from the designated still image extraction range in the moving image. These sequential still images are displayed while being sequentially switched in the order they appear in the moving image data.

Abstract: An image forming apparatus comprises: an image reading section for reading a plurality of document images of a document having a plurality of sheets page by page, the document being set on a reading position in a state that image directions of the document images are mixed; a designating section for designating each image direction of the document images of the document set on the reading position; a storing section for storing the document images read by the image reading section; an image forming section for recognizing each rotation angle for directing the stored document images to a reference direction which is previously set, in accordance with each designated image direction, and for forming a plurality of output images by rotating the document images by each recognized rotation angle; and an output section for outputting the formed output images.

Abstract: The present invention provides a system and method for digital image compensation wherein the image is divided into tiles, at least one of the tiles employing a rectfill. Compensation is provided by reducing the size of the rectfill at the edges by half a pixel all around. As a result, any minor overlaps of adjacent pixels are eliminated, resulting in only the correct pixels being filled.

Abstract: A method for color cast removal in a scanned image in L*a*b* space includes generating a first color cast correction curve for mapping L* to a first color correction, ?a*, (or ?b*) wherein the first correction curve provides a desired a* shift in midtone regions and is modulated as a function of L* such that black and white points are unaffected; for each pixel n in the scanned image, passing L*n through the first color cast correction curve for obtaining a value of ?a*n; and adding the value of ?a*n to the scanned image's original a*n component. To ensure that the color corrected a* remains within gamut, a second correction curve for applying a clipping factor to the mapped ?a* may be generated with the a*n passing through the second correction curve for obtaining a clipping factor Cn; and modifying the a*n value by Cn(?a*n).

Abstract: A method for determining lattice points to be referenced to prepare the correspondence defining data, said method including steps of prescribing a smoothness evaluation function which has a function form differing depending on each region in the color gamut to which the lattice point to be evaluated belongs and also contains a constraint condition that the closer the lattice point is to the boundary of the region of the color gamut, the more the evaluated value decreases as the result of its movement, optimizing the arrangement of lattice points in the device-independent color space by improving the rating of the smoothness evaluation function, with the lattice point position information in the low-dimensional color space varied, and determining lattice points to be referenced to prepare the correspondence defining data in the optimized state.

Abstract: When an output unit to produce output is specified through an instruction terminal 11 and original data is input to a color proof generation section 12, a color conversion section 13 acquires a color conversion parameter corresponding to the specified output unit from a color conversion information storage section 14 and performs color conversion processing for the original data so as to accomplish precise color reproduction in the specified output unit. A rasterizing section 15 expands the original data after undergoing the color conversion processing into raster data while using an enormous number of fonts in a font storage section 16. The raster data provided by the rasterizing section 15 is transmitted from a communication section 17 through a network 4 to the specified output unit. If a remote system 2 or 3, which receives the raster data, prints out on output unit 21 or 31, a color proof whose color is reproduced precisely can be provided.

Abstract: A RIP system (100) includes a multi-screening information generator (102) for generating a multi-screening information file (Dms) which is an XML-format file containing information such as screen ruling, dot shape and screen angle, necessary for assigning a multi-screening operation, and discloses the multi-screening information file (Dms) to outside of the RIP system by storing in a shared disk or a flexible disk. On an input data creation process side, a client machine makes reference to the multi-screening information file (Dms), and thereby assign the multi-screening operation.

Abstract: An image processing method and apparatus for enhancing the quality of a printed image without degrading overall printer performance or throughput by simulating 2 bit pel printing on a bi-level printer using intelligent double dotting. The present invention allows a bi-level printer to print an 2N dpi 1 bit-per-pel image through intelligent double dotting, thus enhancing the half resolution rendered image to approach the print quality as if the image were rendered at full resolution. In one embodiment, an enhanced resolution mode which uses a bi-level printer's 1200 dpi mode to print 600 dpi, 2 bit-per-pel images, results in an image having higher resolution quality than rendering the image using traditional halftone methods at either 600 dpi or 1200 dpi. Image enhancement through higher order resolution multiplication is also disclosed.