Abstract: In a lithographic apparatus, a corrective irradiation procedure is performed using an illumination mode arranged so as to heat a selected part of an element of the projection system near a pupil plane thereof that is relatively unheated during production exposure. The corrective irradiation procedure aims to improve uniformity of optical element heating of the projective system and/or to reduce a phase gradient.

Abstract: A method for configuring an illumination source of a lithographic apparatus is presented. The method includes dividing the illumination source into pixel groups, each pixel group including one or more illumination source points; selecting an illumination shape to expose a pattern, the illumination shape formed with at least one pixel group; iteratively calculating a lithographic metric as a result of a change of state of a pixel group in the illumination source, the change of the state of the pixel group creating a modified illumination shape; and adjusting the illumination shape based on the iterative results of calculations.

Abstract: An exposure apparatus including a projection optical system and configured to expose a substrate to light via the projection optical system includes a support configured to support the projection optical system, an object supported by the support and movable relative the support, an actuator configured to drive the object, a detector configured to detect a relative position between the object and the support, and a controller configured to perform a control of the actuator based on an output of the detector to cause the object to follow the support. The controller is configured to perform an estimation of a vibration of the support based on an output of the detector in parallel with the control to cause the object to follow the support.

Abstract: An exposure apparatus includes a first optical member via which an exposure beam exits; a first movable body which is movable on a light-exit side of the first optical member; a measuring member which is provided on the first movable body and which has an inclined surface to which a measuring beam for position measurement is irradiated; and a transmitting member which is provided on the first movable body, which has an end surface protruding more outwardly than the measuring member, and which has a transmitting area through which the measuring beam is transmissive. When the liquid immersion method is applied to the exposure apparatus, the substrate can be exposed efficiently and satisfactorily.

Abstract: In an image exposing apparatus that includes: a spatial optical modulation device having multitudes of pixel sections arranged two-dimensionally, each for modulating irradiated light; a light source for irradiating light on the spatial optical modulation device; and an image focusing optical system for focusing an image represented by the light modulated by the spatial optical modulation device on a photosensitive material, which includes image focusing lenses, and a microlens array disposed such that a plurality of microlenses are positioned at the image location of each of the pixel sections focused by the image focusing lenses, degradation in the image quality of an exposed image due to dust adhered to the microlens array is prevented by accommodating the microlens array in a housing having two transparent sections for transmitting the light to be passed through the microlens array and the light passed through the array.

Abstract: For an image-capturing unit having a light source and mirrors directing light reflected from a scanned document into a lens condensing the light onto a photoelectrically converting image sensor, a synthetic resin housing. The housing is composed of an open-ended upper frame having a top plate from which sidewalls extend, encompassing an internal space. A mounting surface for anchoring the light-source is formed on the upper side of the upper-frame top plate, and formed on the lower side of the upper-frame top plate is a pedestal on which the lens is supported. Mirror-support projections are formed on the lower side of the upper-frame top plate, or on the upper-frame sidewalls, to support the mirrors from below the lens. With this housing, the influence of heat from the light source on the optics is minimized, improving the mirrors' positional accuracy.

Abstract: An assembly includes a first element having a predetermined functionality that is to be positioned with respect to a second element. The elements are arranged in a spaced relationship on a support frame. The support frame is provided with an interface surface formed on or in the support frame for receiving the first element. The interface surface determines the position of the first element with respect to the second element, and is configured in accordance with the predetermined functionality so that the first element is positionable with respect to the second element with at least three degrees of freedom.

Abstract: Embodiments of a pellicle, methods of fabrication and methods of use in extreme ultraviolet (EUV) photolithography are disclosed. The pellicle may include a wire mesh with a square or hexagonal geometric configuration. A thin film of a material with a high Young's modulus may be coated on at least one surface of the wire mesh. A method of fabrication may include forming at least one sacrificial layer on a surface of the wire mesh, forming a thin film on another surface of the wire mesh, and removing the sacrificial layer to form a pellicle. A method of use may include positioning a pellicle relative to a photomask to protect the photomask from particulate accumulation during an EUV photolithography process.

Abstract: A maskless lithography system for transferring a pattern onto the surface of a target. At least one beam generator for generating a plurality of beamlets. A plurality of modulators modulate the magnitude of a beamlet, and a control unit controls of the modulators. The control unit generates and delivers pattern data to the modulators for controlling the magnitude of each individual beamlet. The control unit includes at least one data storage for storing the pattern data, at least one readout unit for reading out the data from the data storage, at least one data converter for converting the data that is read out from the data storage into at least one modulated light beam, and at least one optical transmitter for transmitting the at least one modulated light beam to the modulation modulators.

Abstract: A maskless lithography system for transferring a pattern onto the surface of a target. At least one beam generator for generating a plurality of beamlets. A plurality of modulators modulate the magnitude of a beamlet, and a control unit controls of the modulators. The control unit generates and delivers pattern data to the modulators for controlling the magnitude of each individual beamlet. The control unit includes at least one data storage for storing the pattern data, at least one readout unit for reading out the data from the data storage, at least one data converter for converting the data that is read out from the data storage into at least one modulated light beam, and at least one optical transmitter for transmitting the at least one modulated light beam to the modulation modulators.

Abstract: A lithographic apparatus includes an illumination system constructed and arranged to condition a radiation beam, and a support constructed and arranged to support a patterning device. The patterning device is capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam. The apparatus also includes a substrate table constructed and arranged to hold a substrate, and a projection system constructed and arranged to project the patterned radiation beam onto a target portion of the substrate. The substrate table includes a chuck having a plurality of protrusions constructed and arranged to support corresponding parts of a bottom surface of a wafer. The top surface of at least one of the protrusions includes a plurality of elements that define a reduced contact area between the substrate and the top surface of the protrusion.

Abstract: This invention relates to a stage apparatus including a first stage, a second stage mounted on the first stage, a first actuator which drives the first stage in a first direction, and a second actuator which drives the second stage such that the second stage moves relative to the first stage. The stage apparatus also includes a first unit including a first movable magnet arranged at an end of the first stage in the first direction, and a first stationary magnet which faces the first movable magnet and generates a repulsive force against the first movable magnet. The stage apparatus also includes a second unit including a second movable magnet arranged at the two ends of the second stage in the first direction, and a second stationary magnet which faces the second movable magnet and generates a repulsive force against the second movable magnet.

Abstract: A technique for adapting an optical navigation device for navigation on a transparent structure such as a glass plate involves establishing a navigation window for navigation tracking, detecting reflected light within the navigation window, generating an output signal in response to the detected light, and adjusting a characteristic of the navigation window in response to the output signal. An optical navigation device includes an illumination system configured to output light, an image sensor configured to generate an output signal related to a detected portion of the light, and a transparent structure adapter module configured to adjust a navigation window of the image sensor in response to the output signal to adapt the optical navigation device for use directly on an opaque surface or for use on a transparent structure that is located between the optical navigation device and the opaque surface.

Abstract: By performing optical measurements and evaluating the optical response of an appropriately prepared measurement site, stress-related characteristics, such as intrinsic stress of dielectric layers, may be evaluated due to the dependency of the optical response on stress-induced modifications of the charge carrier mobility of a conductive layer provided below the dielectric layer probed by an optical signal. Consequently, inline measurement results may be obtained in a highly efficient manner, thereby providing the potential for monitoring complex stress engineering strategies during a manufacturing sequence for forming microstructure devices.

Abstract: Stresses and strains on a solid surface subject to a fluid flow are dynamically measured based on a shift of optical resonances of a micro-resonator. The elastic deformation and refractive index change of a micro-resonator due to mechanical stress is exploited. With this approach, mechanical deformations in the order of a nanometer can be detected and related to shear stress.

Abstract: The invention encompasses analyzers and analyzer systems that include a single particle analyzer, methods of using the analyzers and analyzers systems to analyze samples, either for single particles or for multiple particles (multiplexing), methods of doing business based on the use of the analyzers or analyzer systems of the system, and electronic media for storing parameters useful in the analyzers and analyzer systems of the invention.

Abstract: Spectroscopic systems and methods are disclosed for determining levels of at least one analyte in blood undergoing hemodialysis. In one aspect, the invention employs Raman spectroscopy to monitor and/or control hemodialysis. In one embodiment, the system uses a laser light directed to circulating blood from a patient undergoing dialysis to make Raman spectral measurements. For example, the laser light can be directed into a segment of the dialysis tubing. The system can utilize unique Raman spectroscopic signature of one or more analytes, e.g., urea, to identify and quantify such analytes against a whole blood background. Based on the spectral response, the concentration of the analytes can be monitored and/or used to control hemodialysis.

Abstract: A method and device for the identification of documents and banknotes marked with Optical Variable Inks providing: generating a white light ray between 5,000° and 7,000° K; polarizing that white light ray through a first polarizing filter (3), and sending the polarized ray (4) onto an area (5) to be assessed; filtering the ray (6) reflected the area (5) to be assessed by a second polarizing filter (7), in phase consistency with the first polarizing filter (3) and getting a first signal (sa); filtering the ray (6) reflected by the area (5) to be assessed by a third polarizing filter (8), in anti-phase with the first polarizing filter (3), and getting a second signal (Sb); measuring the difference A between these two signals; comparing the calculated value ? to a reference value ?r previously measured on genuine documents and banknotes.

Abstract: A personal identification system, which uses a vein pattern of a finger, optimizes the amount of light of a light source based on a captured finger image and emphasizes the vein pattern during image processing for identification.

Abstract: A motion detecting device for sensing rotation and inclination variation information, includes a light-emitting unit, a sensor control unit, an image sensing unit, a rotation-sensing unit, an inclination-sensing unit, a data storing unit, and an operation unit. The image sensing unit is used to receive a light-reflecting signal. The rotation-sensing unit is used to sense a rotation variation signal of the motion detecting device. The inclination-sensing unit is used to sense an inclination variation signal of the motion detecting device. The operation unit is used to calculate a motion direction and a motion velocity of the motion detecting device relative to a motion surface according to the light-reflecting signal from the image-sensing unit, a rotation angle of the motion detecting device according to the rotation variation signal, and an inclination angle of the motion detecting device according to the inclination variation signal.

Abstract: A sensor for measuring the properties of light from a light source is disclosed. The sensor includes first and second photodetectors that are illuminated by the light. The first and second photodetectors generate first and second photodetector signals indicative of the first and second weighted averages of the intensity of light in a wavelength band between 400 nm and 700 nm. The first photodiode is more sensitive to light having wavelengths between 400 nm and 500 nm than the second photodetector. The sensor also includes a color temperature processing circuit that generates a first processed signal that is related to a ratio of the first and second signals. The color temperature processing circuit could include first and second logarithmic amplifiers that generate first and second logarithmic signals, respectively, from the first and second photodetector signals and a subtraction circuit that forms a signal indicative of the difference between the first and second logarithmic signals.

Abstract: An apparatus for detecting surface plasmon resonance (SPR) comprises a light source, a light-coupling unit, a phase-resolving module, and a data-processing unit. The light source provides a light beam emitting into a surface of a metal film to generate surface plasmon resonance. The phase-resolving module is configured to split the reflection light of the light beam on the surface of the metal film into a first light, a second light, a third light, and a fourth light, and to detect the intensities of the lights simultaneously. The phases of the first light and second light differentiate by 90 degrees, and the phases of the third light and fourth light differentiate by 90 degrees. The data-processing unit calculates the phase variation of the surface plasmon resonance on the metal film based on the intensities of the first light, second light, third light, and fourth light.

Abstract: There is provided a method for analyzing optical properties of an object, including utilizing a light illumination having a plurality of amplitudes, phases and polarizations of a plurality of wavelengths impinging from the object, obtaining modified illuminations corresponding to the light illumination, applying a modification to the light illumination thereby obtaining a modified light illumination, analyzing the modified light illumination, obtaining a plurality of amplitudes, phases and polarizations maps of the plurality of wavelengths, and employing the plurality of amplitudes, phases and polarizations maps for obtaining output representing the object's optical properties. An apparatus for analyzing optical properties of an object is also provided.

Abstract: In one embodiment, an apparatus comprises an optical system with multiple detectors and a processor. The optical system is configured to produce images of an optical source in a first dimension and a second dimension substantially orthogonal to the first dimension at each detector at a given time. Each image from the images is based on an interference of an emission from the optical source in a first direction and an emission from the optical source in a second direction different from the first direction. The processor is configured to calculate a position in a third dimension based on the images. The third dimension is substantially orthogonal to the first dimension and the second dimension.

Abstract: An analyzer is provided with a light irradiation device. The light irradiation device includes a light source, and a rotatable filter section, which has a plurality of optical filters having different light transmission characteristics, and irradiates an analyzing object with light that passed through the optical filters arranged in a path of the light from the light source while the filter section is rotating, by successively switching the optical filters by rotating the filter section. The analyzer is also provided with an analyzing means for analyzing characteristics of the analyzing object, based on optical information obtained from the analyzing object irradiated with the light by the light irradiation device while the filter section is rotating.

Abstract: A method and system are presented for use in measuring/inspecting a patterned article. Optical measurements are applied to a measurement site on the article by illuminating the measurement site with a plurality of wavelengths at substantially normal incidence of the illuminating light, detecting light returned from the illuminated site, and generating measured data indicative thereof. The measurements are applied to the measurement site through a polarizer rotatable between its different orientations selected from a number of pre-calibrated orientations.

Abstract: A system for inspecting container bottoms with an observation device, which observe the container bottoms, with a plurality of viewing windows, which are arranged underneath the container bottoms and which have viewing sections, through which the observation device observes the container bottoms, where the viewing windows are mounted in a carrier plate. According to the invention, holding devices are provided, which transport the containers a certain distance above the carrier plate, and the viewing sections are at least partially offset from a projection of the containers in a direction perpendicular to the carrier plate.

Abstract: There is provided an optical window contamination detecting device capable of detecting even microscopic contamination attached onto an optical window with a limited number of contamination detecting sensors. An optical window contamination detecting device for a scanning type distance measuring apparatus includes a casing 101 formed with an optical window 102, the casing accommodating therein a light transmitting unit 3, a scanning mechanism 4 for deflection scanning measurement light output from the light transmitting unit 3 into a measuring space through the optical window 102, and a light receiving unit 5 for detecting reflected light from an object through the optical window 102.

Abstract: A method for obtaining the area of a missing portion of an object under inspection with a borescope includes aligning the borescope with the object under inspection, extrapolating the missing edges of the missing portion and calculating the missing portion area using the extrapolated missing edges and a defined remaining edge of the missing portion.

Abstract: Methods for obtaining and analyzing data from a spectral source is provided. The method includes identifying an environment that is capable of generating spectral information, and obtaining the generated spectral information from the environment. The method further includes splitting the generated spectral information into a plurality of spectral data units. The spectral data units are further captured in separate storage entities and separately processed in parallel in order to produce a complete processing and quantification of the environment.

Abstract: Raman-active molecules having specific affinity for phosphorylated peptides and proteins are provided. The Raman-active affinity molecules contain a Raman active group capable of providing a detectable spectrum. The affinity molecules act as tags or reporter molecules and are useful, for example in detecting the presence of a phosphorylated residue in a peptide or protein through the use of SERS spectroscopy. The affinity molecules provide the ability to detect and quantify phosphatase and kinase activities.

Abstract: This invention relates to a fluorescence detection device comprising a support means (101) for supporting a sample (111), a sample excitation means so that a fluorescence is emitted by the sample (111) and a detection means for detecting said fluorescence, said support means (101) comprising a layer having a rough surface (115) for redirecting said fluorescence in a plurality of directions and said detection means covering an observation cone to collect the redirected fluorescence in a plurality of directions.

Abstract: The defect inspection apparatus and method for determining an acceptable condition of a reticle/mask member with a pattern area to be developed on a semiconductor device includes determining a non-pattern area and designating an inspection target area within a non-pattern area. Light is scanned across the inspection target area and detected to provide representative signals. The representative signals are processed to define the status of foreign matter including size and location and further compared with predetermined values to determine the acceptability of the mask for continued production purposes.

Abstract: A method for increasing the throughput, or the precision, or both the precision and the throughput, of a flow cytometer, or of a hematology analyzer employing a flow cytometer, by utilizing the technique of laser rastering. Laser rastering involves sweeping a laser beam across a flowing sample stream in a hematology analyzer. An apparatus suitable for carrying out the method of this invention comprises an optical module comprising a source of light, a scanning device, a lens or system of lenses, a flow cell, detectors, and filters; and an electronic module comprising preamplifiers, analog signal conditioning elements, analog-to-digital converters, field-programmable gate arrays, digital signal processing elements, and data storage elements.

Abstract: A process and device for dynamic measurement of the axial deformation of a rotating hollow shaft (10), a glass fiber segment (16) of a fiber optic sensor (18) being attached securely to a section of the inside wall of the hollow shaft (10) extending in axial alignment with the shaft. A light signal produced by a light source (24) is injected into the glass fiber segment (16), and the light signal being detected by a detector (28) after passing through the glass fiber segment (16). Axial deformation of the section of the inside wall of the hollow shaft (10) is ascertained by determining axial deformation of the glass fiber segment (16) from the change of at least one parameter of the light signal that occurs when the light signal passes through the glass fiber segment (16).

Abstract: A gas sensor for hydrogen or other gases, especially flammable or explosive gases, has a plasmon-polariton waveguide comprising a metal strip on a membrane supported by a substrate in an environment in which the gas is to be introduced, and coupling means for coupling optical radiation into and out of the plasmon-polariton waveguide such that the optical radiation propagates therealong as a plasmon-polariton wave. The metal strip comprises by a chemical transducer (e.g. Pd or PdNi), the arrangement being such that exposure of the metal strip or coating to the gas to be monitored causes a change in the propagation characteristics of the plasmon-polariton wave and hence the optical radiation coupled out of the plasmon-polariton waveguide.

Abstract: A method is provided for monitoring a photolithographic process in which a substrate is patterned to form (i) a scatterometry target having a plurality of parallel elongated features, and desirably, (ii) other features each having at least one of a microelectronic function or a micro-electromechanical function. Desirably, each elongated feature of the scatterometry target has a length in a lengthwise direction and a plurality of stress-relief features disposed at a plurality of positions along the length of each elongated feature. A return signal is detected in response to illumination of the scatterometry target. The return signal can be used to determine a result of the photolithographic process.

Abstract: A modulated reflectance measurement system includes lasers for generating an intensity modulated pump beam and a UV probe beam. The pump and probe beams are focused on a measurement site within a sample. The pump beam periodically excites the measurement site and the modulation is imparted to the probe beam. For one embodiment, the wavelength of the probe beam is selected to correspond to a local maxima of the temperature reflectance coefficient of the sample. For a second embodiment, the probe laser is tuned to either minimize the thermal wave contribution to the probe beam modulation or to equalize the thermal and plasma wave contributions to the probe beam modulation.

Abstract: In order to be able to take an image of a specimen emitting low light in a short exposure time by a cooled CCD at about 0° C., a low-light specimen image pickup unit has an imaging optical system forming a specimen image of a specimen having a point light source emitting a low light, and the low-light specimen image pickup unit further has an image pickup unit having a plurality of pixels receiving incident light, for taking an image corresponding to the specimen image. In the low-light specimen image pickup unit, the imaging optical system is telecentric to a side of the specimen image of the imaging optical system, and condenses the low light emitted from the point light source to form an Airy disk of a size which is substantially the same as a pixel of the pixels, or which is smaller than the pixel. Here, the pixel receives the low light emitted from the point light source.

Abstract: Through systematically varying whether the path of a photon emitted into an interferometer is or is not specified, one can create a binary message and send it from one location to another where this message cannot be known in the intervening space between where the message is constructed and where it is received. There are no relevant differences as regards the photons that bear the message in the intervening space between where the message is constructed and where it is received that allows the message to be known in this “middle” area. Nonetheless, because of systematically varying whether the path of a photon emitted into an interferometer is specified at the interferometer's entrance, the distributions of photons after they exit the interferometer differ depending on whether the particular path into which the photon is emitted is specified at the interferometer's entrance. Binary values are associated with the two distinct distributions.

Abstract: An interferometer includes a resonant cavity having a movable mirror and at least one fiber optic component acting as a fixed mirror. A surface of the fiber optic component is coated with a reflective film. An actuator is coupled to the movable mirror, such that when a scattered optical beam is coupled to the cavity, interference occurs between the surface of the fiber optic component coated with reflective film and a surface of the movable mirror facing the surface of the fiber optic component coated with reflective film. The reflective film on the surface of the fiber optic component causes closely spaced spectral lines within the scattered optical beam to be suitably resolved.

Abstract: A device for testing a test object in particular a tire (10) by means of a non-destructive measuring method is provided with at least one measuring head (20) by which the test object (10) can be scanned to produce a measurement result. The device is also provided with a positioning means (30) by which the measuring head (20) can be moved between a park position (I) and a measuring position (II). The device is also provided with a pressure chamber in which the test object (10) can be subjected to a prescribed pressure. The device is further provided with a sub-frame (60) on which the test object (10) can be mounted during the test. The sub-frame (60) is supported on a first bearing element (61) by means of which the transmission of vibrations from a base (70) to the sub-frame (60) can be reduced.

Abstract: A method for using a double resonance effect within a grating-coupled waveguide (GCW) sensor, as generated from a light beam with a given span of wavelengths or angles, is provided. The method can be used for label-independent detection of biological and chemical agents, to interrogate biological-binding events or chemical reactions within a sensing region at increased sensitivity, and with decreased sensitivity to environmental perturbations. Also described is an optical interrogation system incorporating the method.

Abstract: Disclosed is a light detecting apparatus using a differential astigmatic method to focus 0th order light on any information surfaces of a multilayer optical disc medium, the 0th order light being among 0th order light, positive higher-order diffracted light of 1st or higher order, and negative higher-order diffracted light of 1st or higher order, all of which are generated by diffracting a laser beam, the apparatus comprising: a first photodetector that includes a light-receiving area for receiving the reflected light of the 0th order light from an information surface where the 0th order light should be focused on; a second photodetector that is adjacent to the first photodetector leaving a predetermined space therebetween, the second photodetector including a light-receiving area for receiving the reflected light of the positive higher-order diffracted light from the information surface where the 0th order light should be focused on; and a third photodetector that is adjacent to the first photodetector leavi

Abstract: A measurement system that uses a laser triangulation device to measure the thickness of transparent and/or opaque layers of a multilayer film. The triangulation device has a laser device that projects a beam perpendicularly to a surface of the multilayer film and first and second detectors that image first and second reflected rays of the beam at first and second distances offset from first and second optical axes to produce first and second measurement signals. A controller processes the measurement signals using a triangulation procedure and a simultaneous equation procedure to provide a thickness of an outer transparent layer. For a multilayer film having an opaque layer sandwiched between outer transparent layers, first and second triangulation devices are disposed on opposed sides of the film to measure the thickness of each outer film. Knowing the distance between the two devices, the thickness of the opaque layer can be derived.

Abstract: A diameter measuring instrument that comprises a straight-edge and two legs or jaws, wherewith the distance between the legs can be read-off. The invention is characterized in that the straightedge (2) is provided with a leg (3) which is fixed in relation to the straightedge and a leg (4) which is movable rela-tive to the straightedge, or alternatively with two legs that are movable relative to the straightedge; in that each leg (3, 4) includes a laser (5, 6) which is designed to emit a visible laser beam (7, 8) in a direction that coincides with the length direction of respective legs (3, 4); and in that the laser beams (7, 8) are parallel to one another.

Abstract: An image processing apparatus is connected to a multiple number of external devices by way of a LAN and includes a main board for expanding the image data received as a print job from one of the external devices and a sub board serving as a connecting port with the LAN. In the power saving mode, the apparatus supplies power to the sub board only while cutting off power supply to the main board.

Abstract: There is provided a variable data image generating device including a plurality of first type image generating units that execute a first rendering instruction for a distributed record and generates a first type image corresponding to the record; a first type image memory that stores the first type image corresponding to each record generated by each of the first image generating units; a distributing unit that distributes a record in variable data to each of the first type image generating units; and a document image generating unit that executes a drawing program including one or more instructions for each record in the variable data, wherein the document image generating unit generates a document image for each record by obtaining the first type image corresponding to the record from the first type image memory and laying out the obtained image in response to the first rendering instruction in the rendering program.

Abstract: An image forming system includes: a resource information storage unit that previously stores resource information to be combined with input print information; a first setting unit that sets an image characteristic of the resource information stored in the resource information storage unit; a second setting unit that sets an image characteristic of the input print information; and a color conversion unit that, when the image characteristic set by the first setting unit and the image characteristic set by the second setting unit are different, performs color conversion on the resource information based on the image characteristic set by the first setting unit, and performs color conversion on the print information based on the image characteristic set by the second setting unit.

Abstract: An image forming system includes: plural printing units each provided for each of different basic printing colors; and plural image processing units each provided in association with each of the printing units, and that generate image data for a basic color of the image processing unit's part and image data for other basic colors than the image processing unit's part required for combining processing of the image data for the basic color of the image processing unit's part, based on input printing data, and output resultant image data to a corresponding one of the printing units.