Abstract: A liquid immersion photolithography system includes an exposure system that exposes a substrate with electromagnetic radiation and includes a projection optical system that focuses the electromagnetic radiation on the substrate. A liquid supply system provides liquid flow between the projection optical system and the substrate. An optional plurality of micronozzles are arranged around the periphery of one side of the projection optical system so as to provide a substantially uniform velocity distribution of the liquid flow in an area where the substrate is being exposed.

Abstract: The present invention relates to alignment of a writing system and a workpiece. In particular, it relates to alignment to write a second layer pattern on a workpiece that has a first layer pattern, using an SLM. It extends to producing a mask or reticle, and to producing a layer of a device using the mask or reticle. Particular aspects of the present invention are described in the claims, specification and drawings.

Abstract: One or more patterning arrays are mounted to a mounting plate via height adjustment structures that enable the flatness of the active surfaces of the patterning arrays to be controlled. The height adjustment structures may comprise an array of piezoelectric actuators or screws. Alternatively, the backside of the patterning means may be polished to optical flatness and bonded by crystal bonding to an optically flat surface of a rigid mounting body.

Abstract: Liquid is supplied to a space between the projection system and the substrate by an inlet. In an embodiment, an overflow region removes liquid above a given level. The overflow region may be arranged above the inlet and thus the liquid may be constantly refreshed and the pressure in the liquid may remain substantially constant.

Abstract: A liquid supply system for an immersion lithographic apparatus provides a laminar flow of immersion liquid between a final element of the projection system and a substrate. A control system minimizes the chances of overflowing and an extractor includes an array of outlets configured to minimize vibrations.

Abstract: A load-lock apparatus has a housing to enclose a first space and to accommodate a substrate, an exhaust pipe to exhaust a gas in the first space, a first gate valve provided in the housing to openably close to separate the first space and a second space, outside the housing, and a second gate valve provided in the housing to openably close to separate the first space and a third space, outside the housing. Pressure in the third space is lower than that in the second space. A capacity changing system moves a first portion of the housing to change capacity of the housing so that the capacity when gas in the first space is exhausted through the exhaust pipe is smaller than the capacity when the substrate is conveyed from the second space to the first space through the first gate valve.

Abstract: A retardation arrangement for converting an input radiation beam, incident from an input side of the retardation arrangement, into an output radiation beam which has over its cross section a spatial distribution of polarization states which can be influenced by the retardation arrangement and differs from the spatial distribution of polarization states of the input radiation, is designed as a reflective retardation arrangement. A useful cross section of the retardation arrangement has a multiplicity of retardation zones of different retardation effect. Such a mirror arrangement having a retardation effect varying as a function of location can be used to compensate undesired fluctuations in the polarization state over the cross section of an input radiation beam and/or to set specific output polarization states, for example in order to set radial or tangential polarization.

Abstract: A lithographic apparatus may include an optical element, such as an immersion fluid reservoir, which supported at least in part by a bearing, such as a gas bearing. To enable illumination by the lithographic apparatus of an edge of the substrate, a surrounding structure is provided that surrounds the substrate. A level parameter of the substrate, such as a thickness of the substrate, is measured by a sensor, such as a thickness sensor. By means of an actuator, the substrate table on which the substrate is or will be held is positioned with respect to the surrounding structure, such that a surface of the substrate would be on a substantially same level as a surface of the surrounding structure, thus enabling the optical element to transition from the surface of the substrate to the surface of the surrounding structure and vice versa.

Abstract: A protrusion is provided on a barrier member which at least partly confines a liquid between a projection system and a substrate. The protrusion is closer to the projection system than other parts of the barrier member to promote a meniscus of liquid to adhere between the protrusion and the projection system.

Abstract: A sheet includes a plurality of incisions that define a plurality of frames. The frames are arranged in a geometric pattern to facilitate selection of an appropriate frame for cropping an image displayed on photographic media. The frames are connected to each other by an adhesive layer and substrate. Alternatively, the frames are connected by tags or micro-perfs. A transparent crop selector is used to facilitate selection of an appropriately sized frame.

Abstract: A laser straight ruler having a main body and a beam scanner installed on the main body. A laser beam is scanned to form a beam spot on an object. A position sensing device receives a laser beam reflected by the object and senses a position of the beam spot. A signal processing unit drives the beam scanner and processes a signal of the position sensing device. A display displays a change in a distance between the main body and the object and data including a measured distance value from the signal processing unit. An input portion inputs data including adjustment of a scanning width of the beam spot and sets start and end positions of the measured distance. A straight distance of the object is measured or the beam spot having a scanning width corresponding to a measured distance or a predetermined distance is projected to the object.

Abstract: The present invention is related to a laser radar for a vehicle using a cylindrical reflector and a method for controlling the same, and more particularly, to a laser radar for a vehicle that comprises a reflector comprising a plurality of reflection mirrors preferably with reflection accuracy of 0.5° unit.

Abstract: A system and method for performing high-resolution imagery of a target are provided. One embodiment is a method of performing high-resolution imagery of a target comprising: generating a chirped waveform that modulates a light signal transmitted toward a target for performing active LADAR of the target; generating a low-frequency local oscillator waveform for performing active imaging; and simultaneously performing passive imaging and active LADAR.

Abstract: An apparatus configured to generate image data for use in determining a property of a gemstone is disclosed. The apparatus includes a support structure configured to support the gemstone at an observation position such that an axis of symmetry of the gemstone is substantially parallel to an axis of rotation of the apparatus, a light source, including a reflector having a concave surface arranged to reflect a spatially varied light pattern generally towards the observation position, the concave surface including at least one relatively reflective region and at least one relatively unreflective region and is configured to generate the light pattern, where the length of a boundary between the relatively reflective region and the relatively unreflective region is greater than the radial distance between the center and an edge of the concave surface, and a rotator configured to rotate the gemstone relative to the light pattern substantially about the axis of rotation.

Abstract: The present invention relates to the analysis of cytological material. Specifically, the invention relates to stains and methods of producing the stains, methods of staining cells for cytological or histological analysis to contrast the nuclear portion of the cell from the cytoplasmic portion, and systems and methods for illuminating a cytological sample. The analysis can be automated or manual.

Abstract: An optical measurement system having a spectrophotometer and a ellipsometer is calibrated, the spectrophotometer and the ellipsometer first being calibrated independently of one another. A spectrophotometer layer thickness (dphoto) of a specimen is then determined at an initial angle of incidence (?init) using the spectrophotometer. An ellipsometer layer thickness (delli) of the specimen is then determined using the layer thickness determined with the ellipsometer. The spectrophotometer and the ellipsometer are matched to one another by varying the initial angle of incidence (?init) until the absolute value of the difference between the spectrophotometer layer thickness (dphoto) and the ellipsometer layer thickness (delli) is less than a predefined absolute value.

Abstract: An optical time domain reflectometry system is used to determine a power response from a device under test -DUT-. For providing power information data, an optical transmitter launches a probe signal with a first wavelength into a DUT, an optical receiver determines optical power information of a first return signal returning from the DUT at a second wavelength, wherein the second wavelength is not equal to the first wavelength, and an analyzer analyzes the power information determined by the optical receiver, and generating data to be at least one of: visualized, stored, and further processed.

Abstract: The invention relates to a level sensor for determining a height of a substrate. The level sensor generates one or more measurement beam and directs the measurement beam to a measurement spot on the substrate and produces a reflected measurement beam. The level sensor also generates one or more reference beams. A detector detects both the reflected measurement beam and the reference beam, respectively, and produces a measurement signal and a reference signal, respectively, the measurement signal being indicative for the height at the measurement spot. A processor that receives these signals and corrects the measurement signal based on the reference signal. The level sensor has an optical arrangement in a predetermined area close to where the substrate is to be located. The measurement beam and the reference beam propagate along substantially equal optical paths of propagation in the predetermined area.

Abstract: A light returning target for a photometer. The light returning target comprises a ball lens, and a cradle. The cradle has a hemispherical receptacle in which the lens is intimately received. Preferably, the lens is formed of fused silica, the receptacle is polished sufficiently to reflect, more than it scatters, light, and at least the surface of the receptacle is formed of a material that absorbs, more than it reflects, light.

Abstract: In the present invention, data on a substrate image picked up by an image pickup unit is outputted to a difference calculation unit where a difference image from a normal substrate is calculated. A synthesis calculation unit calculates a synthesized image by rotating the difference image 360 degrees by every predetermined angle about the center of the substrate and synthesizing the images. A Zernike calculation unit digitizes the synthesized image by a Zernike polynomial and outputs a concentric circle component to a determination unit where the component is compared with a previously set threshold value, so that the presence or absence of a defect on the substrate is determined. The present invention can facilitate the determination of the presence or absence of a macro defect on the substrate and reduce the time required for the determination.

Abstract: A photonic crystal based collection probe is provided. The probe includes a photonic crystal configured to guide and condition a beam of Raman scattered photons. Further, the device includes a spectrograph in optical communication with the photonic crystal and configured to receive Raman scattering from the photonic crystal. The device may be employed in a Raman spectrometer system.

Abstract: A medium is analyzed for the search for an odorous biological molecule characteristic of a specific substance in an environment to be studied comprising the steps of: exposing a component containing at least one olfactory biological receptor, capable of selectively attaching the type of odorous molecule sought, to an atmosphere taken from the environment to be studied; irradiating that component by means of an incident laser radiation having a wavelength chosen in the ultraviolet close to the absorption wavelength for the olfactory receptor, to cause the excitation of a resonance Raman scattering in the irradiated component; and analyzing the Raman spectrum obtained to determine whether or not it corresponds to the Raman spectrum of the olfactory receptor having attached an odorous molecule of the type sought in the atmosphere sampled, so as to identify any presence of the specific substance mentioned in the environment to be studied.

Abstract: The disclosure generally relates to a system for detecting a change in an attribute of a substance. The system may include a photon source for producing a first of a plurality of photons which interact with the substance while an attribute of the substance changes to produce a second plurality of photons. The system may also include a filter for receiving the collected photons and providing filtered photons; a photon detector for receiving the filtered photons and obtaining therefrom a spectrum of the substance; and a processor for detecting an aspect of the filtered photons wherein the aspect of the filtered photons is the function of the attribute of the substance.

Abstract: A fluorescence spectrophotometer having an excitation double monochromator, a coaxial excitation/emission light transfer module, and an emission double monochromator. Each monochromator includes a pair of holographic concave gratings mounted to precisely select a desired band of wavelengths from incoming broadband light without using other optical elements, such as mirrors. Selected excitation light is directed into a sample well by a light transfer module that includes a coaxial excitation mirror positioned to direct excitation light directly to the bottom of a well of a multi-well plate. Fluorescence emission light that exits the well opening is collected by a relatively large coaxial emission mirror. The collected emission light is wavelength selected by the emission double monochromator. Selected emission light is detected by a photodetector module.

Abstract: A polarizing monochromator comprising a uniaxial birefringent crystal prism, the prism has the geometry of a triangular block having a triangular base, a face including a side of the hypotenuse is an input-output face, where light enters and exits, and a face including the longer side of the right angle is a reflection face, the optic axis of the prism is perpendicular to the base of the prism, the angle of the input-output face of the prism with respect to light coming from a collimator optical system is determined in such a manner that ordinary light and extraordinary light exit from the input-output face of the prism in opposite directions with respect to an optical axis connecting the collimator optical system and the prism, and a light-collecting optical system is disposed to collect either extraordinary light or ordinary light exiting from the input-output face of the prism.

Abstract: A linearly polarized light output unit (701) outputs a linearly polarized light. A first phase modulation unit (703) includes a first polarization axis and modulates a phase of the linearly polarized light. A second phase modulation unit (704) includes a second polarization axis orthogonal to the first polarization axis and modulates the phase of the linearly polarized light. A signal supply unit (705) supplies a modulation signal (vb) for modulating the phase of the linearly polarized light to one of the phase modulation units. A light intensity detection unit (707) detects an intensity of a light emitted from a phase modulation unit (702), to which the signal is supplied, to a sample (106) that contains an optically active material by causing a polarization plane of the light to be rotated and the light to be transmitted by the sample (106). An optical rotation angle calculation unit (708) calculates an optical rotation angle based on the modulation signal (Vb) and the detected light intensity.

Abstract: A method and apparatus for mitigating the effects of polarization on wavelength determinations is disclosed. An optical source produces light across an optical spectrum, while a polarization element changes the polarization of the light at a first rate. The resulting light is applied to an optical element that produces a spectral response with a feature of interest from the polarization changed light. The optical element and the polarization element are such that the bandwidth of the feature of interest of the optical element is significantly greater than the first rate. A receiver network produces received signals from the received spectrum; and a data processing unit calculates a wavelength that is insensitive to ripple in the received signal and/or the received signals are low-pass filtered to reduce the ripple resulting from the polarization change.

Abstract: A small and high-speed polarization analysis device and ellipsometer having no driving section are provided by overlapping one polarizer array rendered by arranging a plurality of polarizer regions of mutually different optical axis directions in the form of stripes and one wavelength plate array rendered by arranging a plurality of wavelength plate regions of fixed retardation and mutually different optical axis directions in the form of stripes so that the respective stripes of the plurality of polarizer regions and of the plurality of wavelength plate regions intersect one another and by disposing a light-receiving element array so that the intensities of light that has passed through the matrix-like intersection parts can be individually measured.

Abstract: An alignment apparatus which drives to a target position a stage capable of moving at least in a two-dimensional direction. A first measurement device and a second measurement device have a function of measuring positions of the stage in one direction from different positions, a switching device performs a switching operation for switching the first measurement device to the second measurement device, and a controller sets an initial value for the second position measurement device, which is used after the switching operation, based on the position of the stage finally measured by the first position measurement device before the switching operation.

Abstract: An optical filter including at least one substrate and first and second thin-film interference filters disposed directly on the substrate. The interference filters include a plurality of hard coating thin film layers of alternating high and low index of refraction. A filter set capable of providing low image shift is also provided.

Abstract: A device for counting micro particles is presented. The device comprises a light source; a chip containing micro particles; an object lens; a CCD camera; a counting part; and a shifter for shifting the position of the chip. It is easy to count the number of micro particles, such as red blood cells or somatic cells, by using the device. The shifter shifts the position of the chip by a predetermined distance at every predetermined time interval in order that a certain area adjacent to the area photographed just before is shifted to the point where the light is incident. Therefore, sub-areas on the chip are photographed successively. The counting part counts the number of micro particles in each sub-area, and adds them together to calculate the total number of micro particles in the samples.

Abstract: A system for the automated determination of retroreflectivity values for reflective surfaces disposed along a roadway repeatedly illuminates an area along the roadway that includes at least one reflective surface using a strobing light source. Multiple light intensity values are measured over a field of view which includes at least a portion of the area illuminated by the light source. A computer processing system is used to identifying a portion of the light intensity values associated with a reflective surface and analyze the portion of the light intensity values to determine at least one retroreflectivity value for that reflective surface.

Abstract: Real time high speed high resolution hyper-spectral imaging.

Abstract: Time magnification and heterodyning are combined to allow the single-shot characterization of the electric field of optical waveforms. The electric field of the source under test is obtained by Fourier processing of the magnified temporal intensity of the source heterodyned with a monochromatic source. An experimental implementation of this technique is characterized and used to measure various optical signals.

Abstract: A system including: a film thickness measuring apparatus for measuring a film thickness of a member to be processed, including: a differential waveform pattern data base for holding a standard pattern consisting of a time differential value of an interference light for each of multiple wavelengths with respect to a film thickness of a first member to be processed; a unit for measuring an intensity of an interference light for each of multiple wavelengths of a second member to be processed; a unit for obtaining a real pattern consisting of time differential values of measured interference light intensities; and a unit for determining a processed amount of the film by using a pattern of zero-cross points of the differential values of intensities of the received interference light for a second wavelength among the received interference lights of the multiple wavelengths.

Abstract: Providing a spectrometric measuring instrument suitable for in-line measurement for example in a semiconductor manufacturing process, an FPD manufacturing process, or the like, by realizing size reduction and imparting resistance to distance fluttering, angle fluttering in a horizontal direction, and angle fluttering in a perpendicular direction. A light interference type spectral element for gradually changing a wavelength of transmitted light by means of a transmitted position is provided immediately before the photoelectric transfer part array device, and based upon a light-receiving side optical system having the function of detecting a change in state of polarization of a reflected light from a sample, and a series of light-receiving amount data obtained from each of photoelectric transfer parts of the photoelectric transfer part array device, polarized light is analyzed. By fitting of a measured waveform to a theoretical waveform, a film thickness or film quality is obtained.

Abstract: A method and apparatus are disclosed for measuring a characteristic, e.g. spectral bandwidth, of a light beam. The apparatus may comprise an etalon for generating an interference pattern having at least one light cone, an arrangement of detector elements, the arrangement receiving a portion of the light cone and producing a signal indicative of the characteristic; and an auxiliary detector positioned to receive a portion of the light cone and produce a signal indicative of an alignment between the etalon and the linear arrangement.

Abstract: A wavefront measurement system has a source of electromagnetic radiation. An imaging system focuses the electromagnetic radiation at an object plane. A first grating is positioned in the object plane and has a plurality of rulings with randomized height. A stage moves the first grating parallel to the rulings. A projection optical system projects an image of the first grating onto an image plane. A second grating is at the image plane. A detector behind the second grating receives a fringe pattern produced by the second grating.

Abstract: According to an embodiment, a method and system for color calibration in a three-dimensional multi-color laser scanning system is disclosed. An object may be scanned with the scanning system, which scans the object with color laser heads. Laser intensities, corresponding to laser intensity values, may be received from the scanned object. Three different calibration targets are used to setup a field of view (FOV) calibration profile due to scanning position changes, a surface normal calibration profile due to surface normal direction changes, and a color reflectance calibration profile due to color reflectance changes. After compensating for laser power drift fluctuations, the laser intensity values may be further compensated for field of view scanning position changes and surface normal direction changes using the field of view calibration profile and surface normal calibration profile.

Abstract: This invention is composed as a printer which receives a print request from a computer, the print request including a request to a peripheral device to acquire print data, and sends the acquisition request to the peripheral device, and performs printing on the basis of the print data sent from the peripheral device in response to the acquisition request. Accordingly, the printer is capable of receiving the print data from the peripheral device instead of receiving the print data from the computer.

Abstract: A print system can be employed by a client without setting up, for each client, a print function for converting distributed data into a print format and without providing a server with individual printers. Print data generated by the server is directly transmitted from the server to a print server.

Abstract: This invention provides an image-forming system having automatic finish output chaining, where an imaging job can switch to an alternate destination when a default destination is no longer usable.

Abstract: The invention is directed to a method and apparatus for building a composite print job. According to a method, at least first and second files are received in respective printer independent file formats. The first and second files are printed to a logical printing device in a printer dependent file format appropriate for a physical printing device. The first and second files are thereafter combined as a composite print job, to prepare the first and second files for printing to the physical printing device.

Abstract: An image data dissemination system and method for anticipating user image requests from a user workstation and for locating, transforming and, as necessary, migrating anticipated representations of image data files to a local storage area for efficient access. An anticipated image request is determined based on a number of factors including the image retrieval historical information associated with a user and/or the user workstation. An anticipated representation of the image data file is also determined. An image data file that satisfies the anticipated image request and is in the anticipated representation is then identified, copied and stored in an optimal local storage area. When a user workstation generates the anticipated image request, the corresponding image data file stored on the optimal local storage area is provided the user workstation.

Abstract: The efficient use of memory devices is crucial in processing a large amount of data. In particular, the buffer memory is used in an efficient manner by the use of a buffer memory control unit. The efficient use of the buffer memory is implemented in a high-speed color data processing unit in a color image processing device such as copiers, facsimile devices and printers.

Abstract: The original cover of an image reading apparatus for covering an original stand which is provided on the image reading apparatus and on which an original is placed is provided with a cover member for covering the original placed on the original stand, and a hinge member having one end thereof pivotally supported by the cover member and having the other end thereof mounted on and pivotally supported by the original stand. The original cover is characterized in that the cover member is biased in a direction in which it is opened relative to the hinge member and is biased toward a rotary shaft, by biasing means.

Abstract: Systems and methods are disclosed of a smooth gray component replacement strategy which utilizes the full gamut of a printer device. A CMY to CMYK gray component replacement transform is disclosed which inherently exploits the full gamut of the printer, by transforming points in CMY cube to L*a*b* color space, scaling the obtained values so they fill the maximum gamut obtainable with the printer device and calculating the CMYK values needed to obtain the scaled L*a*b* values. The CMY to CMYK transform is then smoothed with an averaging filter that does not change CMYK values at the corners. The entire color gamut is adequately sampled and small changes in CMY do not produce large jumps in L*a*b*.

Abstract: During the device link processing, an original lookup table LUT0 is modified into a modified lookup table LUT1 so that achromatic color value sets B2a will be associated with all the achromatic color value sets B1a. Accordingly, during a color conversion processing, by using the modified lookup table LUT1, any input achromatic color value set B1 in (0, 0, 0, K1 in ) will be converted into an output achromatic color value set B2 out (0, 0, 0, K2 out). In this way, the black-print image part in the input image that is reproduced by black ink only by printer A1 will be maintained as a black-print image part and printed by a printer A2 by black ink only. Thus, the black-print information of the input image can be maintained through the color conversion processing.

Abstract: Given an image converted into a chromatic space (101), a method is used for identifying a color cast (i.e. a dominant color), through statistical analysis (105) of the distribution on an color plane of the chromatic space of the color histogram of a region of the image's near neutral objects, said region being defined in such a way as to include a significant percentage of the starting image.

Abstract: A digital image quality enhancing method that enhances a quality of a document image comprising pixels with a predetermined resolution and obtained by scanning a script comprising a combination of a background, a text, and an image. The method includes: updating history information regarding color data and a pixel type of a concerned pixel using previous history information of the concerned pixel; determining a block feature type of the concerned pixel using the pixel type and the updated history information of the concerned pixel; determining a type of an area to which the concerned pixel belongs based on a second type of a second area to which a first neighboring pixel in a left direction of the concerned pixel belongs, a third type of a third area to which a second neighboring pixel in a line above the concerned pixel belongs, the pixel type of the concerned pixel, and the determined block feature type; and performing different image quality enhancing processes based on the determined area type.