Abstract: An aircraft fuselage barrel (10) includes a skin (12) and a shear tie (18). The shear tie (18) resides within and is integrally formed with the skin (12). The shear tie (18) is separate from and configured for frame attachment thereon. A multi-ring system (79) for fuselage barrel formation includes a mold (68) with a ring (50). The ring (50) has width (W2) approximately equal to a separation distance (D) between two adjacent fuselage frames (22) and includes a module (52) that has a circumferential length (L1) that is greater than a circumferential distance between two fuselage longerons (14). A support structure (80) is coupled to and supports the mold (68). A method of forming the aircraft fuselage barrel (10) includes constructing the support structure (80). Rings (86) of the mold (68) are attached to and over the support structure (80). The mold (68) is constructed. Material is laid-up onto the mold (68) to integrally form the one-piece fuselage barrel (10) including a Hat-configured longeron (14).

Abstract: Microelectronic imagers with curved image sensors and methods for manufacturing curved image sensors. In one embodiment, a microelectronic imager device comprises an imager die having a substrate, a curved microelectronic image sensor having a face with a convex and/or concave portion at one side of the substrate, and integrated circuitry in the substrate operatively coupled to the image sensor. The imager die can further include external contacts electrically coupled to the integrated circuitry and a cover over the curved image sensor.

Abstract: A light detection device includes a lens array of a plurality of lenses arranged in the form of a honeycomb; and a photoelectric device array of a plurality of photoelectric devices for each of the plurality of lenses. The plurality of photoelectric devices is arranged under each of the plurality of lenses. Also disclosed are a focus detection device provided with the light detection device, and an imaging apparatus provided with the focus detection device as well as a method of producing such a light detection device and a method of detecting a focus.

Abstract: The disclosed subject matter relates to a method and distance measurement apparatus for measuring a distance to an object, which can include a light source, a solid state camera, a controller and a distance data generator. The light source can be configured to emit a modulated light towards an object, and the solid state camera can convert the light reflected from the object into charges. The distance data generator can be configured to calculate the distance based on the charges, and the controller can be configured to adjust the modulated light to be more favorable under various circumstances. Thus, the method of the disclosed subject matter can accurately measure distance under various circumstances and can result in providing a distance measurement apparatus with a simple configuration and at low cost, and can be used as a sensor for distance measurement of an obstacle and the like in a vehicle, security system, robot, etc.

Abstract: A solid-state image pickup device and method are provided. The device can not only operate with a wide dynamic range but it also allows the user to switch the dynamic range corresponding to the photographic scene, and its operating method. Plural pixels, each of which has a photodiode, a transfer transistor, a floating diffusion region, an additional capacitance element, a capacitance coupling transistor, and a reset transistor, are integrated in an array on a semiconductor substrate. The capacitance of such floating diffusion region is less than that of such photodiode. A first signal S1 obtained by transferring part or all of the photoelectric charge accumulated in such photodiode PD to such floating diffusion region FD or a second signal S1+S2 obtained by transferring all of the photoelectric charge accumulated in such photodiodes to the potential obtained by coupling such floating diffusion region and such additional capacitance element CS is output to all of the pixels.

Abstract: An optical sensor has at least one pixel that generates an output voltage that changes at a rate dependent on the light intensity incident on the pixel. The time for the pixel output voltage to change from a first predefined level to a second predefined level is measured, so as to produce an output indicative of the incident light intensity.

Abstract: An image sensor and a method for acquiring images by sampling of the level of a voltage representative of the charge of a photodiode, in which a first sample is taken during a reset of the charge level of the photodiode; and a second sample is taken provided that the decrease slope of the voltage after the reset is lower than a threshold, said second sample replacing the first one.

Abstract: An imager in which a column line bias current control signal is pulsed at some time during and/or after the pulsing of the reset control and the transfer control signals to increase a bias current in a pixel column line during reset and transfer operations. The bias current is then decreased by removing the pulse before the sampling and storing of reset and image signals. Pulsing the bias control voltage signal and thus, the bias current, decreases the settling time of the column line, while maintaining the required low current during sampling and storage of the reset and image signals.

Abstract: A design structure for a CMOS image sensor and active pixel cell design that provides an output signal representing an incident illumination light level that is adapted for time domain analysis. Thus, the noise sources associated with charge integration and the contribution of dark current to it, is avoided. The active pixel cell design implements only three FETs: a transfer device, a reset device and an output transistor device having one diffusion connected to a Row Select signal. In this mode of operation, use is made of the voltage decay at the photo diode to generate a pixel output at one diffusion of the output transistor device, which is a pulse with fixed amplitude independent of the incident illumination level. For use of an NFET output transistor device, the pulse width is an inverse function of the incident illumination level. For a PFET output transistor device, the output pulse has a time delay, from a reference signal, by an amount that is an inverse function of the incident illumination level.

Abstract: An exemplary image sensor comprises a photodetector proximate to a pixel site, and a light meter proximate to the pixel site configured to approximate an initial charge acquired by the photodetector at the end of a first integration period of a frame exposure period. A reset circuit resets the photodetector if the approximated initial charge acquired by the photodetector exceeds a threshold. A readout circuit detects a final charge acquired by the photodetector at the end of a second integration period of the frame exposure period. If the photodetector was reset, the readout circuit adjusts the final exposure to account for exposure prior to the photodetector having been reset.

Abstract: An optical semiconductor module that includes: a light emitting element; a light receiving element that has a light receiving face on an upper face and a side face thereof, with the light receiving face having an antireflection film formed thereon; and a mounting unit that has the light emitting element and the light receiving element mounted thereon with such a positional relationship that the light emitted from the light emitting element is optically connected at least on the light receiving face of the side face of the light receiving element.

Abstract: A light sensor that generates a first output signal indicative of an intensity of light received from a predetermined direction in a first band of wavelengths is disclosed. The light sensor includes a substrate having first and second photodetectors, a first filter layer, and a controller. The photodetectors are sensitive to light in the infrared portion of the optical spectrum as well as to light in the first band of wavelengths, and generate first and second photodetector signals. The first filter layer transmits light in the first band of wavelengths and light in the infrared portion of the optical spectrum while blocking light in a portion of the visible spectrum outside of the first band of wavelengths, without altering light received by the first photodetector. The controller processes the first and second photodetector signals to produce the first output signal that is corrected for infrared in the input light.

Abstract: A heliostat includes a pedestal, a transmission system, a frame assembly, and a mirror assembly. The frame assembly generally includes a first frame set and a second frame set mounted to the transmission system which is mounted upon the pedestal. Each frame set includes a stackable inner frame assembly and a stackable outer frame assembly. Each stackable inner frame assembly is identical and each stackable outer frame assembly is identical such that a multiple of inner frames and a multiple of outer frames are readily stackable in a nested arrangement for storage and transport.

Abstract: A light receiving apparatus includes a holder made of metal and a light receiving element that is attached to the holder, receives laser light reflected by an information medium, and outputs an electric signal. The light receiving element is constructed of a bare chip, is attached to the holder, and parts of the light receiving element aside from a part on which the laser light is incident are sealed using resin.

Abstract: A method and device for observing a specimen, in which a convergent electron beam is irradiated and scanned from a desired direction, on a surface of a calibration substrate on which a pattern with a known shape is formed, and a beam SEM image of the pattern formed on the calibration substrate is obtained. An actual direction of the electron beam irradiated on the surface of the calibration substrate is calculated by use of the information about an apparent geometric deformation of the known shape on the SEM image, and the actual direction of the electron beam to the desired is adjusted direction by using information of the calculated direction.

Abstract: The results of mass spectrometry are compared; correspondences are established between individual components contained in different samples; the results of establishment of correspondences are checked; and varying components are extracted. At least two samples are compared with respect to the ion intensity corresponding to retention times and mass-to-charge ratios obtained by chromatography-mass spectrometry on the samples having a plurality of components. In ion groups observed as mass spectra, a correspondence between the retention times at which the same component is supposed to be observed is established by determining coincidence between the mass-to-charge ratios and determining that the ion intensity fall within a designated variation.

Abstract: An automated or fully automated mass spectral system and a method of operating the system to identify a sample ion or compound. The system includes at least one computer addressable holder for at least one of standard and sample; at least one mass spectrometer configured to acquire one of continuum, profile, and raw mode mass spectral data; a computer system including a first software component to control introduction of at least one of the sample and the standard, data acquisition, and data analysis; a second software component for performing a mass spectral calibration involving at least m/z value, to report at least one of accurate mass, a list of possible elemental compositions, and a measurement statistic; and a third software component capable of acting on reported result or measurement statistic to change at least one of the introduction of at least one of the sample and the standard, data acquisition, data analysis, reported result, and measurement statistic.

Abstract: An ion source includes a body having a gas passage and an orifice. A capillary is inserted into the gas passage so that a tip portion of the capillary extends into the orifice. A gas supplier supplies a gas into the gas passage to form a gas flow through the gas passage along the capillary and through the orifice past a tip of the capillary so that the gas flow sprays a sample solution flowing through the capillary from the tip of the capillary. A flow controller regulates a pressure of the gas in the gas passage to adjust a characteristic value F/S to a predetermined value, where F is a flow rate of the gas flow at standard conditions (20.degree. C., 1 atmosphere), and S is a difference between a cross section of the orifice and a cross section of the tip portion of the capillary in the orifice.

Abstract: For maskless irradiating a target with a beam of energetic electrically charged particles using a pattern definition means with a plurality of apertures and imaging the apertures in the pattern definition means onto a target which moves (v) relative to the pattern definition means laterally to the axis, the location of the image is moved along with the target, for a pixel exposure period within which a distance of relative movement of the target is covered which is at least a multiple of the width (w) of the aperture images as measured on the target, and after said pixel exposure period the location of the beam image is changed, which change of location generally compensates the overall movement of the location of the beam image.

Abstract: In an autofocus method, an electron beam is scanned onto a subject through a condensing member. A setting condition of the condensing member is changed within a first range. An image evaluation value is measured using a secondary electron current from the subject according to the setting condition within the first range. A second range adjacent to the first range and including the setting condition corresponding to the first maximum is set when a first maximum of the image evaluation value is not a peak value. The setting condition is changed within the second range. An image evaluation value is measured using a secondary electron current according to the setting condition within the second range. The condensing member is set with the setting condition corresponding to a second maximum of the image evaluation value when the second maximum value is the peak value.

Abstract: A semiconductor testing method capable of quickly counting semiconductor cells with accuracy is achieved. Since an SEM is adjusted in a specific condition, the rotation axis of a stage and the axis of an optical system are deviated from each other in a different observation environment and a different adjustment environment. The deviation between the axes is easily adjusted in each observation environment, so that the deviation is reduced. A seemingly horizontal or vertical line is drawn with a mouse and raster rotation is performed in alignment with the closer axis. After that, the stage is horizontally moved, pattern matching is performed on an image on a position where the image should be disposed, and an angle is adjusted. The stage is moved evenly along the X-axis and the Y-axis, achieving a movement to a destination like a straight line.

Abstract: An invention providing a scanning electron microscope composed of a monochromator capable of high resolution, monochromatizing the energy and reducing chromatic aberrations without significantly lowering the electrical current strength of the primary electron beam. A scanning electron microscope is installed with a pair of sectorial magnetic and electrical fields having opposite deflection directions to focus the electron beam and then limit the energy width by means of slits, and another pair of sectorial magnetic and electrical fields of the same shape is installed at a position forming a symmetrical mirror versus the surface containing the slits. This structure acts to cancel out energy dispersion at the object point and symmetrical mirror positions, and by spatially contracting the point-converged spot beam with a converging lens system, improves the image resolution of the scanning electron microscope.

Abstract: A transmission electron microscope (TEM) micro-grid includes a metallic grid and a carbon nanotube film structure covered thereon. A method for making a TEM micro-grid includes the steps of: (a) providing an array of carbon nanotubes, quite suitably, providing a super-aligned array of carbon nanotubes; (b) drawing a carbon nanotube film from the array of carbon nanotubes; (c) covering the carbon nanotube film on a metallic grid, and treating the carbon nanotube film and the metallic grid with an organic solvent.

Abstract: A scanning electron microscope can discriminate secondary particles in a desired energy region by band-pass and detect the secondary particles with a high yield point. Even when a lens 23 is disposed on an electron source side of an objective lens 18, and a primary electron beam forms any optical system on the electron gun side of the lens, the lens operates the primary electron beam to be converged to a convergent point 24 that is a specific position. A detection ExB 16 that supplies a field that affects the locus of the secondary particles that are generated from a specimen 2 is disposed at the convergent point 24 of the primary electron beam so as to lead only the secondary particles in a specific energy range to a detection unit 13.

Abstract: An apparatus and method for characterizing gas flow through features fabricated in a hollow part. A pressure regulated cooled gas is applied to an interior of the part to the features fabricated in the part. At the same time, a pressure regulated heated gas is applied to an exterior part skin; and the heated gas has a controlled temperature differential from the pressure regulated cooled gas applied to the part interior. An infrared signature of escaping gas and the surrounding part skin is analyzed by a classification method to identify acceptable and unacceptable fabricated features.

Abstract: In a micro-bridge structure in which a temperature detecting portion (diaphragm) including a bolometer thin film is supported by a supporting portion in a state floated from a circuit substrate, a reflective film reflecting a THz wave is formed on the circuit substrate, an absorbing film absorbing the THz wave is formed on the temperature detecting portion, and an optical resonance structure is formed by the reflective film and temperature detecting portion. A gap between the reflective film and temperature detecting portion measures approximately ¼ infrared wavelength (e.g., 1.5 to 2.5 ?m). Sheet resistance of the temperature detecting portion is set in a range in which an absorptance of the THz wave becomes a predetermined value or above on the basis of the THz wave (approximately 10-100 ?/sq.). The absorptance of the THz wave is drastically improved while using the structure and manufacturing technique of a bolometer-type infrared detector.

Abstract: This disclosure concerns a solid-state imaging device including a pixel thermally separated from a substrate; a heat conduction switch having one end connected to the substrate and other end capable of contacting to the substrate or the pixel, the heat conduction switch changing over a state of the pixel to one of a first state and a second state, the first state being a state in which the pixel is thermally isolated from the substrate by causing the other end of the heat conduction switch to contact with the substrate, the second state being a state in which the pixel is thermally shorted to the substrate by causing the other end of the heat conduction switch to contact with the pixel; and a signal detector detecting a difference between the signal voltage of the pixel in the first state and the signal voltage of the pixel in the second state.

Abstract: In a bolometer-type THz-wave detector in a micro-bridge structure in which a temperature detecting portion (diaphragm) including a bolometer thin film is supported by a supporting portion in a state suspended from a circuit substrate, a member (dielectric cover) made of a dielectric material for efficiently collecting a THz wave is added to an upper part of the temperature detecting portion, and when a refractive index of the dielectric cover is n, thickness is t, and a wavelength of the THz wave is ?, a setting is made so as to have nt>?, and a gap between the dielectric cover and the temperature detecting portion is set at integral multiples of ?/2. By this arrangement, an absorption of the THz wave can be improved using a structure and manufacturing method of a bolometer-type infrared detector, and a high-performance bolometer-type THz-wave detector can be manufactured with a high yield.

Abstract: A scintillation detector comprising nano-scale particles of a scintillation compound embedded in a plastic matrix is provided. The nano-scale particles may be made from metal oxides, metal oxyhalides, metal oxysulfides, or metal halides. Methods are provided for preparing the nano-scale particles. The particles may be coated with organic compounds or polymers prior to incorporation in the plastic matrix. A technique for matching the refractive index of the plastic matrix with the nano-scale particles by incorporating nano-scale particles of titanium dioxide is also provided. The scintillator may be coupled with one or more photodetectors to form a scintillation detection system. The scintillation detection system may be adapted for use in X-ray and radiation imaging devices, such as digital X-ray imaging, mammography, CT, PET, or SPECT, or may be used in radiation security detectors or subterranean radiation detectors.

Abstract: A contactless and battery-less interface for component identification and remote sensing is disclosed. The interface includes a near-field electromagnetic coupling for electrical power transfer and a full duplex optical coupling for bi-directional serial communication interface. The interface provides a low-cost and low-power Reduced Instruction Set Computing (RISC) microcontroller with a minimum of components and a low production cost, wherein a communication and power interface can be provided between components such as a gamma camera head and a collimator, without requiring electrical contacts between interface circuit assemblies on the respective parts.

Abstract: Embodiments relate to collimator assemblies having one or more apertures therein. At least one of the one or more apertures has an aperture size that is configured for adjustment during an examination. The collimator assembly is configured so that gamma rays can pass through the one or more apertures, but the remainder of the collimator assembly is substantially gamma ray absorbent. Embodiments also related to imaging systems and methods of imaging.

Abstract: Embodiments relate to a slit collimator assembly including a first set of panels spaced at least partially around a longitudinal axis of the collimator assembly and extending generally parallel to the longitudinal axis. The slit collimator assembly further includes a second set of panels spaced at least partially around longitudinal axis of the collimator assembly and extending generally parallel to the longitudinal axis. The first set of panels and the second set of panels are arranged to define one or more slit apertures. The slit collimator assembly is configured so that movement of at least one of the first set of panels or the second set of panels adjusts an aperture size of at least one of the one or more slit apertures. The slit collimator assembly is configured so that gamma rays can pass through the one or more slit apertures, but the remainder of the collimator assembly is substantially gamma ray absorbent. Embodiments also relate to imaging systems and methods of changing collimator performance.

Abstract: A semiconductor photodiode includes: an insulative substrate; a first conductivity type semiconductor layer formed on the insulative substrate; an i-type semiconductor layer formed on the first conductivity type semiconductor layer; a second conductivity type semiconductor layer formed on the i-type semiconductor layer; and a metal electrode. The metal electrode is provided between the insulative substrate and the first conductivity type semiconductor layer so that a peripheral face of the metal electrode is located inside a peripheral face of the first conductivity type semiconductor layer.

Abstract: A digital method and system allowing crystal identification in radiation detector machines is described. The crystal identification is based on recognition of radiation detector signal shape through discrimination of detector signal's dynamic characteristics. The digital method is based on recursive and non-recursive algorithms, such as adaptive filtering combined or not with quantization methods. These digital algorithms, commonly used in other engineering applications, were modified and tailored for radiation detection. Although the method was specially designed for crystal identification measurement, which is exemplified here, it can effectively recognize the detector signal shape in any radiation detection context.

Abstract: Embodiments relate to pinhole collimator assemblies having one or more adjustable size pinhole apertures therein. The pinhole collimator assembly is configured so that gamma rays can pass through the collimator assembly, but the remainder of the collimator assembly is substantially gamma ray absorbent. Embodiments also relate to imaging systems and methods of adjusting pinhole collimator performance.

Abstract: A method of fabricating a detector includes providing a photodiode part, providing a scintillator part, at least one of the photodiode part and the scintillator part including a non-active portion and an active portion, placing a first adhesive such that the first adhesive contacts the active portion when the detector is assembled, placing a second adhesive such that the second adhesive contacts the non-active portion when the detector is assembled, the second adhesive having a faster cure time than the first adhesive, and biasing the photodiode part and the scintillator part toward each other until the second adhesive has cured.

Abstract: A direction determination processor outputs imaging direction information representing the direction of an electronic cassette with respect to a subject during imaging of the subject. An image direction judging unit generates image direction information representing the direction of image data with respect to a reading direction in which a radiation detector is read, based on the imaging direction information, or based on the imaging direction information, imaging order information and a template. An image displaying direction determining unit generates displaying direction information, which represents a displaying direction of the image data on a display screen or a display device.

Abstract: A radiation image detection method including the steps of: detecting from a radiation image detector including multitudes of pixels disposed two-dimensionally, each having a TFT switch, an analog image signal of each pixel flowing out through each data line by sequentially switching ON the TFT switches connected to each scanning line on a scanning line-by-scanning line basis; detecting an analog leak level flowing out through each data line with the TFT switches connected to each of the scanning lines being switched OFF each time before switching ON the TFT switches on a scanning line-by-scanning line basis when converting the detected analog image signal to a digital image signal and outputting; and correcting the analog image signal before being converted to the digital image signal based on the leak level.

Abstract: An apparatus and method for obtaining an image of an object. The apparatus comprises a radiation source and a series of two to five linear detectors spaced therefrom to define a scanning zone; means to cause an object to move relative to and through the scanning zone; a direct image generation apparatus to generate an image from the output of a linear detector; an intermediate image generation apparatus configured to generate at least one intermediate image from an adjacent pair of linear detectors, by processing the output of the pair of detectors and generating an image representative of an output intermediate between the two said detector outputs; the image apparatus adapted such that at least five and preferably at least six images are generated in total; an image display adapted successively to display such images and thus display the monocular movement parallax between the images.

Abstract: Improved corrosion resistance for direct X-ray imaging detectors is obtained by providing a pixelated, electrically conductive barrier layer between the X-ray sensitive material and the pixel electrodes. Each barrier layer can cover part or all of its corresponding pixel electrode. In cases where pixel electrodes makes contact to underlying circuitry through vertical vias, it is preferred for the barrier layers to cover the via sections of the pixel electrodes. The barrier layers for each pixel electrode can be spaced apart from each other, or they can all be included within a continuous film on top of the pixel electrodes. Such a continuous film can be pixelated by spatially modulating its properties (e.g., thickness, doping) to significantly reduce lateral conductivity from pixel to pixel.

Abstract: Apparatus for detecting radiation emitted from a number of volume elements of a body. The apparatus includes a first plurality of detector elements, each detector element being configured to output signals indicative of an intensity of radiation that is incident thereon. The apparatus also includes a first plurality of adjustable collimator channels, each adjustable collimator channel being associated with and being positioned between a respective detector element and the body, each adjustable collimator channel having a second plurality of dimensional configurations defining respective different sets of the volume elements from which emitted radiation impinges on the respective detector element. A processor computes a radiation intensity from at least a portion of the volume elements in response to the signals output by the detector elements in at least two of the dimensional configurations of the adjustable collimator channels.

Abstract: An electron gun, an electron source for an electron gun, an extractor for an electron gun, and a respective method for producing the electron gun, the electron source and the extractor are disclosed. Embodiments provide an electron source utilizing a carbon nanotube (CNT) bonded to a substrate for increased stability, reliability, and durability. An extractor with an aperture in a conductive material is used to extract electrons from the electron source, where the aperture may substantially align with the CNT of the electron source when the extractor and electron source are mated to form the electron gun. The electron source and extractor may have alignment features for aligning the electron source and the extractor, thereby bringing the aperture and CNT into substantial alignment when assembled. The alignment features may provide and maintain this alignment during operation to improve the field emission characteristics and overall system stability of the electron gun.

Abstract: A plasma source, particularly for disinfection of wounds, comprising: an ionization chamber having an inlet for introducing a gas into the ionization chamber and further having an outlet for dispensing the ionized gas onto an object; several ionization electrodes being disposed within the ionization chamber for ionizing the gas and a predetermined ratio of the electrode-electrode distance on the one hand and the electrode-wall distance on the other hand, wherein the ratio is in a range approximately between about 1.8 and about 2.2.

Abstract: A system and method for detecting radiation from a source in a container is disclosed. A continuous optical fiber path is disposed in a medium which is part of or associated with a container and which totally encapsulates the inside volumetric space of the container. The optical fiber path provides a volumetric mass of optical fiber which is reactive to radiation from a radiation source in the container to cause an irreversible change in the light carrying capacity or other characteristic of the optical fiber. A light source is coupled to one end of the optical fiber path for introducing light having a predetermined characteristic. A light detector is coupled to the other end of the optical path for receiving light from the optical path. A circuit is coupled to the light detector and is operative to detect a change in the predetermined characteristic of the light and to provide an indication thereof in a fail-safe manner.

Abstract: An electron beam lithography system includes a main chamber (4) and the exchange chamber (5) connected by a gate valve (7). A robot (15) is used to transfer a chuck (8) carrying a semiconductor wafer between a cassette (10) and laser interferometer mirror assembly (13). The robot includes a bar (17) and a side member (18) extending laterally from the bar for supporting the chuck.

Abstract: Disclosed is a method of inspecting a sample. The sample is scanned in a first direction with at least one particle beam. The sample is scanned in a second direction with at least one particle beam. The second direction is at an angle to the first direction. The number of defects per an area of the sample are found as a result of the first scan, and the position of one or more of the found defects is determined from the second scan. In a specific embodiment, the sample includes a test structure having a plurality of test elements thereon. A first portion of the test elements is exposed to the beam during the first scan to identify test elements having defects, and a second portion of the test elements is exposed during the second scan to isolate and characterize the defect.

Abstract: The present invention relates generally to a method for analyzing the surface and the near-surface layers of a solid and, more specifically, to a method that utilizes activating actions to analyze the physical and the chemical properties of the layers. The instant abstract is neither intended to define the invention disclosed in this specification nor intended to limit the scope of the invention in any way.

Abstract: A lighting optical apparatus using a deep ultraviolet light source that are easy to adjust due to a configuration with fewer components, has high illuminant and illuminant uniformity on an irradiated surface are provided. The apparatus has a deep ultraviolet light source from which deep ultraviolet rays are emitted, a first double-sided cylindrical lens which has a cylindrical lens array on both sides with a configuration of cylinder axes intersecting at right angles, a second double-sided cylindrical lens which has a cylindrical lens array on both sides with a configuration of cylinder axes intersecting at right angles, and a condenser lens.

Abstract: The present invention presents an exposure device, which includes an object stage on which the object is to be set, at least one aperture member for splitting a light beam from an optical source into first and second light beams, first and second spatial light modulators for spatially modulating the first and second light beams, respectively, first and second projection optical systems for irradiating the object with the first and second light beams, at least one first optical sensor for detecting intensity of the light beam from the optical source, one or more second optical sensors for detecting intensities of the first and second light beams from the first and second projection optical systems, respectively, and a decision section for diagnosing status of a route between the aperture member and the object, based on the results of the first and second sensors.

Abstract: Embodiments of an apparatus and methods for correcting systematic non-uniformities using a gas cluster ion beam are generally described herein. Other embodiments may be described and claimed.