Abstract: The invention, in one aspect, provides a method of manufacturing a semiconductor device. This aspect includes forming gate electrodes in a non-bipolar transistor region of a semiconductor substrate, placing a polysilicon layer over the gate electrodes in the non-bipolar transistor region and over the semiconductor substrate within a bipolar transistor region. A protective layer is formed over the polysilicon layer. The protective layer has a weight percent of hydrogen that is less than about 9% and is selective to silicon germanium (SiGe), such that SiGe does not form on the protective layer. This aspect further includes forming emitters for bipolar transistors in the bipolar transistor region, including forming a SiGe layer under a portion of the polysilicon layer.

Abstract: A heterojunction bipolar transistor comprising a substrate; a collector on the substrate; a base layer on the collector; an emitter layer on the base layer; the emitter layer comprising an upper emitter layer and a lower emitter layer between the upper emitter layer and base; the collector, base and emitter layers being npn or pnp doped respectively; characterised in that the lower emitter layer has a larger bandgap than the base layer and is AlxIn1-xP or GaxAl1-xP, x being in the range 0+ to 1.

Abstract: A design method for an integrated circuit adds spare cells in a System-on-Chip to allow for Engineering Change Orders (ECOs) to be performed at a later stage in the design. This method can be used to provide a second version of the chip having minimal alterations performed in a short cycle time. The spare cells can be divided into combinational and sequential cells. There is an optimum spread of combinational cells in the design for post placement repairs of the chip with just metal layer changes. The method takes into account the drive strength of the spare cells as the main factor in their placement on the chip.

Abstract: A semiconductor device of an aspect of the present invention comprises a package substrate, one first power supply terminal provided on the package substrate, one second power supply terminal provided on the package substrate, a semiconductor chip disposed on the package substrate, first and second internal power supply circuits provided in the semiconductor chip, one first ESD protection element which is provided in the first internal power supply circuit and which is connected to the first power supply terminal, and a plurality of second ESD protection elements, the second ESD protection elements being provided in the second internal power supply circuit, the size of one second ESD protection element being smaller than that of the first ESD protection element, the second ESD protection elements being connected to the common second power supply terminal.

Abstract: A semiconductor integrated circuit device has a plurality of CMOS-type base cells arranged on a semiconductor substrate and m wiring layers, and gate array type logic cells are composed of the base cells and the wiring layers. Wiring within and between the logic cells is constituted by using only upper n (n<m) wiring layers. It becomes possible to shorten a development period and reduce a development cost when a gate array type semiconductor integrated circuit device becomes large in scale.

Abstract: Methods and systems for optimal decoupling capacitance in a dual-voltage power-island architecture. In low-voltage areas of the chip, accumulation capacitors of two different types are used for decoupling, depending on whether the capacitor is located in an area which is always-on or an area which is conditionally powered.

Abstract: Multilevel metallization layouts for an integrated circuit chip including transistors having first, second and third elements to which metallization layouts connect. The layouts minimize current limiting mechanism including electromigration by positioning the connection for the second contact vertically from the chip, overlapping the planes and fingers of the metallization layouts to the first and second elements and forming a pyramid or staircase of multilevel metallization layers to smooth diagonal current flow.

Abstract: An integrated circuit includes N plane-like metal layers. A first plane-like metal layer includes M contact portions that communicate with the N plane-like metal layers, respectively. The first plane-like metal layer and the N plane-like metal layers are located separate planes. First and second drain regions have a symmetric shape across at least one of horizontal and vertical centerlines. First and second gate regions have a first shape that surrounds the first and second drain regions, respectively. First and second source regions are arranged adjacent to and on one side of the first gate region, the second gate region and the connecting region. The first source region, the second source region, the first drain region and the second drain region communicate with at least two of the N plane-like metal layers.

Abstract: A semiconductor device, including: a semiconductor material and an electrode structure electrically coupled to the semiconductor material. The electrode structure includes: a first portion formed of a first conductive material and a second portion formed of a second conductive material. Both the first portion and the second portion of the electrode structure are in direct contact with the semiconductor material. The first conductive material has a first work function and the second conductive material has a second work function that is different from the first work function, so that the second portion of the electrode structure forms a junction with the first portion. The first portion and the second portion of the electrode structure are arranged such that the fringe field from the edge of this junction between the first portion and the second portion extends into the semiconductor material.

Abstract: A charge transfer device 1 has an P-type region, an N-type well provided to the surficial portion of the P-type region, and transfer electrodes having P-type conductivity, provided over the N-type substrate while placing an insulating film in between.

Abstract: A method of manufacturing a solid image pick-up device comprising a photoelectronic conversion portion, a charge transfer portion and a peripheral circuit portion, the method comprising: forming a pattern comprising a first layer silicon conductive film to a surface of a semiconductor, the first layer silicon conductive film forming: a first electrode; and a first layer interconnection for the photoconductive conversion portion and the peripheral circuit portion; forming an insulative film at least to a side wall of the first electrode; forming a second silicon conductive film being to form a second electrode to the semiconductor substrate; coating a resist over the semiconductor substrate by a spin coating method; and planarizing the second layer silicon conductive film by a resist etching-back method, wherein the pattern further comprises at least one dummy pattern, and a surface level of the resist is not below a predetermined value over the semiconductor substrate.

Abstract: A CMOS image sensor includes a pinned photodiode and a transfer gate that are formed using a thick mask that is self-aligned to at least one edge of the polysilicon gate structure to facilitate both the formation of a deep implant and to provide proper alignment between the photodiode implant and the gate. In one embodiment a drain side implant is formed concurrently with the deep n-type implant of the photodiode. After the deep implant, the mask is removed and a shallow p+ implant is formed to complete the photodiode. In another embodiment, the polysilicon is etched to define only a drain side edge, a shallow drain side implant is performed, and then a thick mask is provided and used to complete the gate structure, and is retained during the subsequent high energy implant. Alternatively, the high energy implant is performed prior to the shallow drain side implant.

Abstract: A device for detecting a gas or gas mixture having at least one first gas sensor designed as an SGFET and at least—one second, additional gas sensor designed as a Lundström-FET. The gas sensors are connected to a processing device designed to analyze the measurement signals from both types of gas sensors in order to detect the gas or gas mixture.

Abstract: A semiconductor apparatus includes: a support substrate made of a semiconductor; an insulating layer provided on the support substrate and having a first and a second openings; a semiconductor fin having a channel section, a first and second buried regions, a source section and a drain section; a gate insulating film covering a side face of the channel section; and a gate electrode opposed to the side face of the channel section across the gate insulating film. The channel section is provided upright on the insulating layer between the first and the second openings. The first and the second buried regions are provided in the first and the second openings on both sides of the channel section. The source-drain sections are provided on the first and the second buried regions and connected to the channel section.

Abstract: An isolation structure for a semiconductor device comprises a floor isolation region, a dielectric filled trench above the floor isolation region and a sidewall isolation region extending downward from the bottom of the trench to the floor isolation region. This structure provides a relatively deep isolated pocket in a semiconductor substrate while limiting the depth of the trench that must be etched in the substrate. An isolated junction field-effect transistor is formed in the isolated pocket.

Abstract: An integrated circuit device can include at least one bipolar junction transistor (BJT) having a first base electrode comprising a semiconductor material doped to a first conductivity type formed on and in contact with a surface of the semiconductor substrate, and separated from an emitter electrode by a separation space. A first base region can be formed in the substrate below the emitter electrode and include a first portion of the substrate doped to the first conductivity type. A second base region can be formed in the substrate below the separation space and can include a second portion of the substrate doped to the first conductivity type.

Abstract: A method of fabricating a semiconductor device is provided. A MOS transistor is formed on a substrate, and then a contact etching stop layer (CESL) is formed over the substrate. A first UV-curing process is performed to increase the stress of the CESL. A dielectric layer is formed on the CESL, and then a second UV-curing process is performed to increase the stress of the dielectric layer. A CMP process is conducted, and then a cap layer is formed on the dielectric layer.

Abstract: A method of fabricating a semiconductor device is provided. Devices are formed on a core region and a non-core region in a substrate. A strain process is performed to the device on the core region but is not performed to the device on the non-core region.

Abstract: A semiconductor device and a method to fabricate a semiconductor device on a silicon substrate are illustrated. The semiconductor may comprise an amorphous silicon film, in the source/drain region of a semiconductor, having low amount of hydrogen and high concentration of carbon and phosphorous, which enhances performance of the semiconductor device.

Abstract: The present invention discloses a method including: providing a substrate; forming recessed regions adjacent to both sides of a gate on the substrate; performing an angled co-implant of a species in two steps with two different energies and two different doses into the recessed regions; forming Silicon-Germanium in the recessed regions; forming source/drain extensions adjacent to both sides of the gate with a dopant; and performing an anneal to activate the dopant.

Abstract: A method of fabricating a semiconductor device is provided. A MOS transistor is formed on a substrate, and then a contact etching stop layer (CESL) is formed over the substrate. A first UV-curing process is performed to increase the stress of the CESL. A dielectric layer is formed on the CESL, and then a second UV-curing process is performed to increase the stress of the dielectric layer. A CMP process is conducted, and then a cap layer is formed on the dielectric layer.

Abstract: A method for fabricating a gallium arsenide MOSFET device is presented. A dummy gate is formed over a gallium arsenide substrate. Source-drain extensions are implanted into the substrate adjacent the dummy gate. Dummy spacers are formed along dummy gate sidewalls and over a portion of the source-drain extensions. Source-drain regions are implanted. Insulating spacers are formed on dummy oxide spacer sidewalls. A conductive layer is formed over the source-drain regions. The conductive layer is annealed to form contacts to the source-drain regions. The dummy gate and the dummy oxide spacers are removed to form a gate opening. A passivation layer is in-situ deposited in the gate opening. The surface of the passivation layer is oxidized to create an oxide layer. A dielectric layer is ex-situ deposited over the oxide layer. A gate metal is deposited over the dielectric layer to form a gate stack in the gate opening.

Abstract: Provided are a semiconductor device and a method of driving the semiconductor device. The semiconductor device includes an optical reaction transistor. The optical reaction transistor includes a semiconductor substrate, a tunnel insulation layer formed on the semiconductor substrate, an optical reaction layer formed on the tunnel insulation layer, a blocking insulation layer formed on the optical reaction layer, and a gate electrode formed on the blocking insulation layer.

Abstract: The present invention relates to a semiconductor device which includes a photoelectric conversion layer; an amplifier circuit amplifying an output current of the photoelectric conversion layer and including two thin film transistors; a first terminal supplying a high-potential power supply voltage; a second terminal supplying a low-potential power supply voltage; an electrode electrically connecting the two thin film transistors and the photoelectric conversion layer; a first wiring electrically connecting the first terminal and a first thin film transistor which is one of the two thin film transistors; and a second wiring electrically connecting the second terminal and a second thin film transistor which is the other of the two thin film transistors. In the semiconductor device, the value of voltage drop of the first wiring and the second wiring are increased by bending the first wiring and the second wiring.

Abstract: There is provided a solid-state imaging element having a light receiving part generating charges by light irradiation, and a source/drain region of a transistor, both formed in a semiconductor layer. The solid-state imaging element includes a non-silicided region including the light receiving part, in which surfaces of the source/drain region and a gate electrode of the transistor are not silicided; and a silicided region in which the surfaces of the source/drain region and the gate electrode of the transistor are silicided. The non-silicided region has a sidewall formed on a side surface of the gate electrode of the transistor, a hydrogen supply film formed to cover the semiconductor layer, the gate electrode, and the sidewall, and a salicide block film formed on the hydrogen supply film to prevent silicidation. The silicided region has a sidewall formed on the side surface of the gate electrode of the transistor.

Abstract: A semiconductor device includes: an n-type MOS transistor and a p-type MOS transistor connected in series; and a first gate extending via an insulating film above a channel of the n-type MOS transistor and a channel of the p-type MOS transistor. By providing light to the first gate, electrons and holes are generated, at least one of either of the electrons and holes passes through above the channel of the n-type MOS transistor and at least one of the either of the electrons and holes passes through above the channel of the p-type MOS transistor, whereby the n-type MOS transistor and the p-type MOS transistor are switched.

Abstract: A method for fabricating a back-illuminated semiconductor imaging device on a semiconductor-on-insulator substrate, and resulting imaging device is disclosed.

Abstract: An output terminal of a photoelectric conversion element included in the photoelectric conversion device is connected to a drain terminal and a gate terminal of a MOS transistor which is diode-connected, and a voltage Vout generated at the gate terminal of the MOS transistor is detected in accordance with a current Ip which is generated at the photoelectric conversion element. The voltage Vout generated at the gate terminal of the MOS transistor can be directly detected, so that the range of output can be widened than a method in which an output voltage is converted into a current by connecting a load resistor, and so on.

Abstract: A structure is provided in a light receiving element having a plurality of light receiving regions, in which noise charges from other light receiving regions to the signal charges of each light receiving region are prevented from becoming superimposed, and each light receiving region can generate accurate electric current signals. The structure is provided with a first light receiving region and a second light receiving region, which are formed on a semiconductor substrate having a first conductivity, and a drain region, which is formed on the semiconductor substrate having a second conductivity. Each light receiving region has at least one light receiving unit that is divided into a plurality of segments and that outputs electric currents corresponding to incident light. The drain region is formed between the first light receiving region and the second light receiving region.

Abstract: A method of fabricating a CMOS image sensor is disclosed that enhances device robustness. The method includes the steps of forming a metal pad on a pad area of a substrate, forming a planarizing layer on the substrate including the metal pad, removing a portion of the planarizing layer to open a surface of the metal pad, forming a protective layer over the substrate including the metal pad, coating a color filter resist layer on the protective layer and selectively exposing the color filter resist layer, coating a microlens resist layer on the color filter resist layer and selectively exposing the microlens resist layer, developing the exposed color filter and microlens resist layers, forming a pad opening by selectively removing the protective layer to open a surface of the metal, and reflowing the microlens pattern.

Abstract: In one embodiment of the invention, a method of forming a semiconductor device includes forming a dynamic random access memory using spacer-defined lithography.

Abstract: A semiconductor device comprising: a first well region which is formed at a surface portion of a semiconductor substrate and to which a first voltage is applied; a gate insulating film which is formed on the first well region; a gate electrode which is formed on the gate insulating film and has a polarity different from a polarity of the first well region and to which a second voltage is applied; and an element isolating region which is formed at a surface portion of the first well region to surround a region within the first well region that is opposed to the gate insulating film, wherein a capacitance is formed between the region within the first well region surrounded by the element isolating region and the gate electrode.

Abstract: A semiconductor device includes a semiconductor substrate and a metal-oxide semiconductor transistor. A first dielectric layer of the metal oxide semiconductor transistor overlaps source and drain electrodes and a channel region of the transistor. A first drain region is away from the channel region and the first dielectric layer. A second drain region is between the first drain region and the channel region. A gate electrode is on the first dielectric layer and connected to a gate wire, and includes first and second gate layers and a dielectric layer therebetween. The first gate layer has one edge laterally spaced from the first drain region and resting over the second drain region, and is isolated from the gate wire. The second gate layer is over the first gate layer and is connected to the gate wire.

Abstract: A capacitor includes a substrate (110, 210), a first electrically insulating layer (120, 220) over the substrate, and a fin (130, 231) including a semiconducting material (135) over the first electrically insulating layer. A first electrically conducting layer (140, 810) is located over the first electrically insulating layer and adjacent to the fin. A second electrically insulating layer (150, 910) is located adjacent to the first electrically conducting layer, and a second electrically conducting layer (160, 1010) is located adjacent to the second electrically insulating layer. The first and second electrically conducting layers together with the second electrically insulating layer form a metal-insulator-metal stack that greatly increases the capacitance area of the capacitor. In one embodiment the capacitor is formed using what may be referred to as a removable metal gate (RMG) approach.

Abstract: Disclosed is a varactor and/or variable capacitor. The varactor/variable capacitor includes a plurality of first conductive-type wells vertically formed on a substrate, a plurality of second conductive-type ion implantation areas formed in the first conductive-type wells, at least one second conductive-type plug electrically connected to the second conductive-type ion implantation areas, an isolation layer formed at sides of an uppermost second conductive-type ion implantation area, and a first conductive-type ion implantation area in an uppermost first conductive-type well electrically disconnected from the uppermost second conductive-type ion implantation area by the isolation area.

Abstract: The semiconductor variable capacitor includes a capacitor including an n-well 16 formed in a first region of a semiconductor substrate 10, an insulating film 18 formed over the semiconductor substrate 10 and a gate electrode 20n formed above the n-well 16 with the insulating film 18 interposed therebetween; and a p-well 14 of a second conduction type formed in a second region adjacent to the first region of the semiconductor substrate 10. The gate electrode 20n has an end which is extended to the second region and formed above the p-well 14 with the insulating film 18 interposed therebetween.

Abstract: An on-chip memory cell comprises a tri-gate access transistor (145) and a tri-gate capacitor (155). The on-chip memory cell may be an embedded DRAM on a three-dimensional tri-gate transistor and capacitor structures which is fully compatible with existing tri-gate logic transistor fabrication process. Embodiments of the invention use the high fin aspect ratio and inherently superior surface area of the tri-gate transistors to replace the “trench” capacitor in a commodity DRAM with an inversion mode tri-gate capacitor. The tall sidewalls of the tri-gate transistor provide large enough surface area to provide storage capacitance in a small cell area.

Abstract: A gate pattern is disclosed that includes a semiconductor substrate, a lower conductive pattern, an upper conductive pattern and a sidewall conductive patter. The lower conductive pattern is on the substrate. The insulating pattern is on the lower conductive pattern. The upper conductive pattern is on the insulating pattern opposite to the lower conductive pattern. The sidewall conductive pattern is on at least a portion of sidewalls of the upper conductive pattern and the lower conductive pattern. The sidewall conductive pattern electrically connects the upper conductive pattern and the lower conductive pattern. An upper edge portion of the lower conductive pattern may be recessed relative to a lower edge portion of the lower conductive pattern to define a ledge thereon. The sidewall conductive pattern may be directly on the ledge and sidewall of the recessed upper edge portion of the lower conductive pattern.

Abstract: According to embodiments of the invention, an inverted “T” shaped gate can be formed for transistor flash memory cells to reduce feature sizes, to reduce pitch size, to increase gate coupling ratio and/or to reduce parasitic capacitive effects between adjacent flash cells or cell floating gates, such as with optimization of control gate distance between field gates. Such feature sizes include channel width; isolation region width; width of a portion of a gate electrode and/or half-pitch distance between adjacent cells or rows of transistors (e.g., cells).

Abstract: This disclosure concerns a semiconductor device comprising: a bulk substrate; an insulation layer provided on the bulk substrate; a semiconductor layer containing an active area on which a semiconductor element is formed, and a dummy active area isolated from the active area and not formed with a semiconductor element thereon, the semiconductor layer being provided on the insulation layer; and a supporting unit provided beneath the dummy active area to reach the bulk substrate piercing through the insulation layer, the supporting unit supporting the dummy active area.

Abstract: A non-volatile memory capable of storing binary information on a semiconductor substrate comprising: a dual gate structure formed over the semiconductor substrate, wherein the dual gate structure including a gate dielectric layer formed over the semiconductor substrate, and first and second gates formed over the gate dielectric layer, an isolation layer formed between the first and second gates; a conductive carbon material with nano-scale formed under the gate dielectric layer; and a doped regions formed adjacent to the conductive carbon material.

Abstract: Methods and structures are described for reducing a gate leakage current and increasing gate coupling ratio in a semiconductor device. In some embodiments, nitride layers are used to limit the oxidation of adjacent silicon gate regions due to oxygen in an intermediate insulator. In various embodiments, the intermediate insulator includes a high-? dielectric material. Apparatus according to embodiments of the invention are also disclosed.

Abstract: A method of manufacturing a nanowire transistor includes oxidizing at least a portion of a semiconductor carrier. The semiconductor carrier includes a first carrier portion and a second carrier portion above the first carrier portion. A portion of the oxidized portion is removed, thereby forming an oxide spacer between a portion of the second carrier portion and the first carrier portion. A gate region is formed above at least a portion of the second carrier portion, and a first source/drain region and a second source/drain region are formed.

Abstract: In one embodiment, the semiconductor memory device includes a semiconductor substrate having projecting portions, a tunnel insulation layer formed over at least one of the projecting semiconductor substrate portions, and a floating gate structure disposed over the tunnel insulation layer. An upper portion of the floating gate structure is wider than a lower portion of the floating gate structure, and the lower portion of the floating gate structure has a width less than a width of the tunnel insulating layer. First insulation layer portions are formed in the semiconductor substrate and project from the semiconductor substrate such that the floating gate structure is disposed between the projecting first insulation layer portions. A dielectric layer is formed over the first insulation layer portions and the floating gate structure, and a control gate is formed over the dielectric layer.

Abstract: A semiconductor device includes: a control gate electrode having a first layer of polycrystalline silicon. The first layer is formed by decreasing a thickness of a first film of doped polycrystalline silicon. The first layer retains a dopant activation ratio of the first film. A method for manufacturing a semiconductor device, includes: forming a first film of doped polycrystalline silicon; and decreasing a thickness of the first film. The first film is formed by heat treating an amorphous silicon film provided on an insulating film.

Abstract: Provided is a flash memory device including a gate structure on a substrate. The flash memory device includes a charge supply layer including a ZnO based material formed between a substrate and a gate structure or formed on the gate structure. Accordingly, the flash memory device can be formed to be of a bottom gate type or of a top gate type by including the charge supply layer. Also, the flash memory device may be realized to be any of a charge trap type and a floating gate type.

Abstract: A memory cell of a nonvolatile semiconductor memory includes a first insulating film whose principal constituent elements are Si, O and N, a charge storage layer whose principal constituent elements are Hf, O and N, formed on the first insulating film, a second insulating film having dielectric constant higher than that of the first insulating film and formed on the charge storage layer, and a control gate electrode formed on the second insulating film. Relation between a composition of the first insulating film and a composition of the charge storage layer is determined under the conditions that (A) a valence band offset of the first insulating film is larger than a valence band offset of the charge storage layer, and (B) a trap energy level of electrons due to oxygen vacancies in the charge storage layer exists within a band gap of the charge storage layer.

Abstract: A nonvolatile semiconductor memory device includes a first insulating film formed on a semiconductor substrate, a floating gate formed on the first insulating film, a second insulating film on the floating gate, a semiconductor layer formed on the second insulating film, a gate insulating film formed on the semiconductor layer, and a control gate formed on the gate insulating film. The semiconductor substrate is provided with a first source and a first drain both for writing of data, and the semiconductor layer below both sides of the control gate is provided with a second source and a second drain both for readout of the data.

Abstract: To provide a semiconductor device in which a high-performance and high-breakdown-voltage p-channel type MOS transistor having a surface channel structure and a memory cell are formed on the same substrate, and a method of manufacturing the semiconductor device. A method of manufacturing a semiconductor device including a stacked gate type nonvolatile memory cell and a p-channel type first transistor, includes: forming a gate insulating film of the first transistor on a semiconductor substrate; forming a tunnel insulating film of the stacked gate type nonvolatile memory cell on the semiconductor substrate; forming a first conductive layer containing an n-type impurity on the tunnel insulating film and the gate insulating film; and implanting p-type impurity ions to a region of the first conductive layer for forming the first transistor to turn the region of the first conductive layer into a p-type region.

Abstract: A discrete storage element film is disposed above a tunneling dielectric film against a shallow trench isolation structure and under conditions to resist formation of the discrete storage element film upon vertical exposures of the shallow trench isolation structure. A discrete storage element film is also disposed above a tunneling dielectric film against a recessed isolation structure. A microelectronic device incorporates the discrete storage element film. A computing system incorporates the microelectronic device.