Abstract: Disclosed is a measuring method which can measure the decentering of an axis by the measurement of a two-dimensional curved surface profile. This method has a first step of measuring a profile of a examined surface by a probe from a first reference position which is a position separate by a predetermined amount from a predetermined position on the examined surface of a subject lens, a second step of measuring the profile of the examined surface by scanning the examined surface by the probe from the second reference position which is a position separate by a predetermined amount from said predetermined position in a route opposite to the scanning direction of said first step after a rotation of the subject lens; and the step of obtaining the decentering amount of the examined surface by the use of the measurement results obtained at the first and second steps.

Abstract: A laser beam transmitter and a method of calibrating such a transmitter result in a beam of laser light that is projected in a desired direction with respect to a transmitter body. The transmitter and a beam target are positioned such that a properly calibrated beam will illuminate a desired point on the target, such as for example the target center. The transmitter is activated and the offset of the point illuminated on the target from the target center measured. A plurality of optical wedge correction elements having varying wedge angles is provided, and the appropriate one of these optical wedge correction elements that will correct for the measured offset is selected. The selected optical wedge correction element is positioned in the transmitter body in the path of the beam. The optical wedge correction element is rotated until the beam is substantially aligned to illuminate the target center. The optical wedge element is then affixed in place in the transmitter body.

Abstract: An apparatus and method incorporating at least two sensors that detect the presence of substrate defects, such as breakage or misalignment, along the lengths of at least two parallel edges of a moving substrate. In one embodiment, an apparatus for detecting substrate defects includes a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors. In another embodiment, an apparatus for detecting substrate defects includes a robot having a substrate support surface, and a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate during substrate transfer on the substrate support surface.

Abstract: A method and apparatus for detecting a defect in which image signals of a same area of a sample are obtained by imaging the sample under different optical conditions, and the obtained image signals are analyzed and optical conditions are selected which modify a contrast in the image signal. Image signals of the sample under the selected optical conditions are obtained by imaging the sample with an inspection system, and the images under the selected optical conditions are evaluated to adjust optical conditions for inspection including an inspection threshold, which is greater than a maximum contrast difference among false defects detected at the step of obtaining and with which a maximum number of actual defects can be detected. A defect of the sample is detected by processing the image signals of the sample obtained through the inspection system under the adjusted optical conditions.

Abstract: Disclosed are techniques and apparatus for accounting for differing levels of defect susceptibility in different pattern areas of a reticle in an inspection of such reticle or in inspection of a semiconductor device fabricated from such reticle. In general terms, two or more areas of a reticle are analyzed to quantify each area's susceptibility to defects on the final semiconductor product. That is, each reticle area is analyzed and given a quantified defect susceptibility value, such as a MEEF (mask error enhancement factor) value. Such analysis includes analysis of an image that is estimated to result from the lithography tool which is to be utilized to expose semiconductor devices with the reticle. The defect susceptibility value generally depends on the reticle area's density and whether the correspond area of the estimated lithography image has intensity values which are proximate to an exposure threshold for a particular resist material to be used on the final semiconductor device.

Abstract: Systems and techniques for characterizing samples using optical techniques. Coherent light may be incident on a sample, and a diffraction pattern detected. Information indicative of diffraction pattern intensity may be used to determine one or more sample characteristics and/or one or more pattern characteristics. For example, sample characteristics such as stress, warpage, curvature, and contamination may be determined. The coherent light may be light of a single wavelength, or may be light of multiple wavelengths.

Abstract: In a spectrometer, preferably in a spectrometric microscope, input light is provided from a light source to a specimen via a source objective element (e.g., a Schwarzchild objective), and the aperture of the light source is matched to the aperture of the source objective element to maximize light throughput to the specimen. The light from the specimen is then collected at a collector objective element and delivered to a camera element, which in turn provides the light to a photosensitive detector. The apertures of the camera element and the collector objective element are also matched to maximize light throughput from the specimen to the detector. As a result, light loss from vignetting effects is reduced, improving the intensity and uniformity of illumination and the sensitivity and accuracy of spectral measurements.

Abstract: The disclosure relates to a portable system having a fiber array spectral translator (“FAST”) for obtaining a spatially accurate wavelength-resolved image of a sample having a first and a second spatial dimension that can be used for the detection of hazardous agents by irradiating a sample with light, forming an image of all or part of the sample using Raman shifted light from the sample, and analyzing the Raman shifted light for patterns characteristic of one or more hazardous agents.

Abstract: An in-situ laser plasma spectroscopy (LPS) system for automated near real-time elemental depth profiling of a target including: an optical source configured to generate an optical beam, wherein the optical beam is pulsed; an optical probe system configured to deliver the optical beam from the optical source to a surface of a target to generate an ablation plasma; a time resolved spectral detection system configured to generate time resolved spectral data from emission signals from the ablation plasma; and a data acquisition and processing system configured to acquire the time resolved spectral data to determine, in combination with predetermined calibration data, an absolute elemental concentration as a function of depth in near real-time.

Abstract: A spectroscope designed to utilize an adaptive optical element such as a micro mirror array (MMA) and two distinct light channels and detectors. The devices can provide for real-time and near real-time scaling and normalization of signals.

Abstract: A droplets detecting system (100) includes a laser diode assembly (20), a photo diode (30), a light source (40), a charge coupled device camera (50), a signal processing and displaying device (32), and an image processing and displaying device (52). The laser diode assembly is configured for emitting a laser light (26) to pass through a droplet (204). The photo diode is configured for receiving the laser light passing through the droplet and for generating an electronic signal. The light source is configured for emitting an illuminating light (42) to illuminate the droplet. The charge coupled device camera is configured for receiving the illuminating light and photographing the illuminated droplet. The signal processing and displaying device is connected with the photo diode and is configured for displaying the electronic signal generated by the photo diode. The image processing and displaying device is connected with the charge coupled device camera.

Abstract: A method of evaluating a scattered light signal generated by a scattered light receiver when detecting especially fine particles in a carrier medium, wherein the scattered light signal runs through a filter algorithm operation to evaluate the scattered light signal subject to specific filter algorithms, the filter algorithm operation being based on a slope of the scattered light signal.

Abstract: A system for measuring the irradiance of a fluorescently labeled particle having a cytometric flow chamber; a plurality of excitation light sources; a plurality of scatter detectors, each configured to detect light from only one of the plurality of excitation light sources and arranged so as to detect scattered light from the particle; a trigger connected to the plurality of scatter detectors, the trigger emitting a signal when scattered light incident on one of the scatter detectors is exceeding a predetermined threshold value; collection optics; at least one fluorescence detector to receive emissions collected by the collection optics and generate an output, the at least one fluorescence detector being configured to respond only to a discrete number of wavelength bands; and an integrator for recording the output of the at least one fluorescence detector in response to a signal from the trigger.

Abstract: Systems for analyzing polarized light back-scattered from a sample are provided. An exemplary system comprises an optical beamsplitter, a polarization separator and an array of light detectors. The optical beamsplitter is operative to receive an incident ray of light, to direct at least a portion of the incident ray to a sample, to receive a back-scattered ray from the sample, and to reflect at least a portion of the back-scattered ray as a reflected back-scattered ray. The polarization separator is located to receive the reflected back-scattered ray and is operative to divide the reflected back-scattered ray into a transverse-electric (TE) component and a transverse-magnetic (TM) component. The array of light detectors is located to receive the TE component and the TM component and is operative to acquire information corresponding to the respective intensities of the TE component and the TM component simultaneously. Methods and other systems also are provided.

Abstract: A wiring pattern inspection apparatus comprises a light source, a parallel light guiding section which guides light from the light source substantially in parallel, and a light extraction section which extracts a transverse wave light component crossing the light guiding direction at right angles from the light guided by the parallel light guiding section and which converts the transverse wave light component into a specific polarized component and which irradiates a work with the specific polarized component and which extracts a vertical wave light component from reflected light obtained by reflecting the emitted specific polarized component by the work.

Abstract: An exposure system includes an exposure tool configured to project grating patterns oriented in different directions onto test areas by a linearly polarized light, respectively, each of the grating patterns having a space width preventing higher order diffracted lights from an image formation, a data collector configured to collect sets of test optical intensity data on the test areas, and a polarization direction monitor configured to monitor a polarization direction of the linearly polarized light by comparing the sets of the test optical intensity data.

Abstract: The present invention relates to overlay marks and methods for determining overlay error. One aspect of the present invention relates to a continuously varying offset mark. The continuously varying offset mark is a single mark that includes over laid periodic structures, which have offsets that vary as a function of position. By way of example, the periodic structures may correspond to gratings with different values of a grating characteristic such as pitch. Another aspect of the present invention relates to methods for determining overlay error from the continuously varying offset mark. The method generally includes determining the center of symmetry of the continuously varying offset mark and comparing it to the geometric center of the mark. If there is zero overlay, the center of symmetry tends to coincide with the geometric center of the mark. If overlay is non zero (e.g., misalignment between two layers), the center of symmetry is displaced from the geometric center of the mark.

Abstract: A detection apparatus in spinning preparation for detecting foreign objects of plastics material in or amongst fiber material. The apparatus includes a source of polarised light and a transport arrangement for transporting the fiber material such that the fiber material is irradiated by the polarized light source. An analyzer is arranged to render visible any change in a plane of polarization caused by the irradiation of the foreign objects of plastics material in or amongst the fiber material and a detector device is arranged to capture an image of contrast differences and/or color shifts in the fiber material rendered visible by the analyzer. The detection apparatus further includes an evaluating unit arranged to process the image to identify the foreign objects for removal.

Abstract: A sampling spectrophotometer comprising an interferometer is used for performing a spectral analysis of light produced by a source. The sampling is adapted for eliminating uncertainty in the frequencies that are associated with spectral components deduced from an interferogram. Preferably, the interferometer is of Michelson type, and is equipped with at least one staircase mirror in one of the two optical paths. Elementary reflecting strips of the staircase mirror can then be offset with respect to one another according to a variable step.

Abstract: The present invention relates to an imaging apparatus and comprises input and output polarisers, a first polarising beam splitter and at least one additional polarising beam splitter, a light sensitive detector and focussing means arranged on an axis. The input polariser resolves incident light into a single linear polarisation state. The first polarising beam splitter receives light from the input polarises, and resolves it into equal magnitude orthogonally polarised rays which are mutually spaced and have a path difference therebetween. The or each additional polarising beam splitter is arranged to receive light from the first polarising beam splitter. The transmission axis of the output polariser is parallel to or perpendicular to the transmission axis of the input polarises to resolve the orthogonally polarised light rays having past through the or each additional polarising beam splitter into the same or perpendicular polarisation state as light resolved by the, first polariser.

Abstract: A least-mean-squares based algorithm is used to adaptively update dither stripper gains, in a dither stripper of a ring laser gyro. The algorithm is used in conjunction with a dither estimator of the dither stripper. The dither stripper substantially reduces effects of dithering a ring laser gyro, during operation of the ring laser gyro.

Abstract: A chemical sensing probe comprises an optical fiber or may be mounted on an optical fiber. The probe has a chemically sensitive measuring material which exhibits a change in volume and/or a change in refractive index in the presence of a given chemical. The change in volume and/or refractive index gives a change in an optical path length through the probe which can be measured interferometrically.

Abstract: A confocal microscope apparatus capable of rapidly obtaining a tomographic image using OCT measuring. The confocal microscope apparatus for obtaining a tomographic image of a measuring object includes a light modulating section that modulates the frequency of the reference light. The light modulating section includes: a diffraction grating element for dispersing the reference light; a collimator lens for collimating the reference light dispersed by the diffraction grating element; and a reflection mirror for reflecting the reference light transmitted through the collimator lens back to the collimator lens and inputting to the diffraction grating element. The reflection mirror is pivoted on a position which is offset from the optical axis of the collimator lens.

Abstract: A method and an apparatus for shape measurement that is able to observe the deep portion under a skin with high spatial resolution by using a frequency COMB light generator is provided. A frequency COMB light generator for generating multiple frequency COMBs with variable frequency pitch at high operation stability is provided. This apparatus for shape measurement comprises a frequency COMB light generator and an optical interferometer for measuring the distance. The frequency COMB light generator includes a laser light source 11, an optical resonator 13, a COMB pitch regulator 14 and an output port OUT. The optical resonator 13 includes an optical modulator 131, a first mirror M11, an optical fiber F13 which is drawn out from alight waveguide of the optical modulator. The COMB pitch regulator 14 is a modulation signal generator for varying the modulation signal. The optical fiber F13 is equipped with an apparatus (Faraday rotation mirror) for compensating a change in the polarization condition.

Abstract: An apparatus and method for measuring displacement includes a light beam directed to an interferometer core that splits the light beam into first and second component beams. The first component beam is directed to a diffraction grating at approximately a Littrow angle. A diffraction is received by the interferometer core and is combined with the second component beam. The combination of the first and second component beams is measured to determine displacement of the diffraction grating.

Abstract: An off axis paraboloid mirror is used to provide object illumination in an interferometric imaging system. The light from an object illumination light source diverges from a point apart from the focus point of the paraboloid, proceeds to the parabolic mirror surface, and is reflected as a nearly parallel beam to illuminate the object.

Abstract: A method and apparatus for characterizing an object with a wavefront from the object is disclosed. In one embodiment, the apparatus includes: a reticle positioned in a path of the wavefront, the reticle comprising two superimposed linear grating patterns; at least one light detector positioned relative to the reticle to receive a self-image diffraction pattern of the reticle produced by the wavefront; and at least one processor receiving signals from the light detector representative of the self-image diffraction pattern and deriving derivatives associated therewith, the processor using the derivatives to characterize said object.

Abstract: A broad band surface profiling apparatus including a reference calibrator for calibrating the apparatus to compensate for surface features of the reference surface. A user is instructed to conduct calibration measurement operations using a calibration sample having a calibration surface to obtain calibration surface topography data for the calibration sample. At each calibration measurement operation, an image representing the calibration surface topography data is displayed to the user and the user has the option to accept or reject the calibration surface topography data represented by the displayed image. The reference calibrator has a surface topography data processor and a mean surface calculator for calculating mean surface topography data using the processed calibration surface topography data accepted by the user to provide reference surface features data.

Abstract: Micron-scale displacement measurement devices having enhanced performance characteristics are disclosed. One embodiment of a micron-scale displacement measurement device includes a phase-sensitive reflective diffraction grating for reflecting a first portion of an incident light and transmitting a second portion of the incident light such that the second portion of the incident light is diffracted. The device further includes a mechanical structure having a first region and a second region, the mechanical structure positioned a distance d above the diffraction grating, the second portion of the incident light is reflected off of the first region of the structure such that an interference pattern is formed by the reflected first portion and the reflected second portion of the incident light. The device can further include an electrode extending toward, but spaced a distance away from, the second region of the mechanical structure.

Abstract: The present invention provides an apparatus and method for detecting flatness and/or unevenness of a surface of an overcoat layer on a colored pixel layer of a color filter with a high degree of accuracy. The apparatus includes: a light source 34, placed almost directly above the surface of a plate 30, for emitting an emission-line spectrum corresponding to at least one color of coloring particles in a color filter 32; a photo-receiver 36, placed obliquely upward with respect to the surface of the plate 30 and having a spectral sensitivity corresponding to the emission-line spectrum of the light source, for receiving reflected light from the color filter 32 on the plate 30 during inspection; and a detection means 42 for creating a brightness distribution for a color using a color signal output from the photo-receiver 36 as corresponding to its spectral sensitivity to detect the flatness (unevenness) of the surface of an overcoat layer 16.

Abstract: There is provided a three-dimensional shape detecting device comprising: pattern beam projection means which projects a plurality of pattern beams including two pattern beams having different angular widths; image capturing means which captures an image of a subject onto which the pattern beams are projected, from a position a prescribed distance apart from the pattern beam projection means; and three-dimensional shape calculation means which calculates positions of the pattern beams projected on the subject based on the image captured by the image capturing means and thereby determines a three-dimensional shape of the subject.

Abstract: A measuring device for measuring internal or external dimensions of a manufactured or machined component is provided with a laser source, a beam redirection member, and a beam receptor. The beam redirection member is adapted to be positioned within an internal bore of a subject component. The laser source directs a beam downwardly to be intercepted by the beam redirection member. The beam exits the beam redirection member at approximately 90° from its original direction to strike a target area along the internal bore of the subject component. The beam is reflected back to the beam redirection member, which directs it at an upward angle to be received by the beam receptor. The beam receptor transmits the data to a control system, which calculates the dimension of the target area. Also provided are methods for optimizing the accuracy of measurements taken by the measuring device.

Abstract: A method of measuring the three-dimensional volume or perimeter shape of an interior cavity includes the steps of collecting a first optical slice of data that represents a partial volume or perimeter shape of the interior cavity, collecting additional optical slices of data that represents a partial volume or perimeter shape of the interior cavity, and combining the first optical slice of data and the additional optical slices of data to calculate of the three-dimensional volume or perimeter shape of the interior cavity.

Abstract: An image processing apparatus is provided. The image processing apparatus includes a holding unit means for holding setting information for every user, an input unit for inputting a print job, and an adjustment unit for specifying a user who instructs the print job according to print job information and adjusting a color image on the basis of the setting information of the specified user. Accordingly, a precise color adjustment fitting to each user can be realized by providing the profile for the color adjustment for every user.

Abstract: Methods and systems for printing an image on a receiver medium are provided. In accordance with the method, digital image data representing an image to be printed is received and, a print engine is used to print an image on the receiver medium based upon the digital image data and initial printing settings. A press sheet image is captured of the image printed on the receiver medium and, the press sheet image is automatically compared to the digital image data to detect differences. Selected types of differences can be identified or can be addressed by adapting the press sheet image or adjusting digital image data prior to comparison.

Abstract: An ink-jet printer system includes an ink-jet printer and a multiple number of host machines. The ink-jet printer has a storage portion for holding the completion time of the last printing operation while each host machine has a controller having an inactive time computing portion which computes the inactive time of printing operation of the ink-jet printer. This is done by comparing the completion time of the last printing operation held in the storage portion with the current time when a printing operation starts and a recovery treatment controller for controlling the execution of a recovery treatment of the ink-jet printer in accordance with the inactive time of ink-jet printer.

Abstract: When a setting relating to the print quality of a printer 3 is changed (T601), sending of ssdp:byebye to PCs 2 (T603) and time measurement by a timer 37 (T605) are executed. Then, after the elapse of 30seconds from the start of time measurement by the timer 37, ssdp:alive is sent to the PCs 2 (T615). Even if a paper size related setting change (T607) or multiple page printing (condensed printing) setting change (T609) is made during this 30-second interval, ssdp:alive is not sent to the PCs 2 for those changes executed during the 30-second interval.

Abstract: A system and method for a printer that can detect characteristics of a printed document and trigger an action in response, in addition to or instead of the action of printing the document.

Abstract: An apparatus for mutually converting signals between one or more modular printing devices and a document processing system, includes a device controller having a network interface for communicating with a system communications channel, memory for storing data and control code related to the operation of the modular printing devices, and a processor for running the control code, a digital input/output controller for receiving and sending document processing signals, a connector for receiving and sending modular printing device signals, and an optical input/output isolator for optically isolating the signals received via the connector.

Abstract: A print data method includes a slicing step, a compressing step and decompressing step. The slicing step divides a swatch of data to be printed and required by each motor movement into a plurality of slices, each having m bits to represent printed pixels and further divided into n segments, where m, n are integers. The compressing step uses an inter-slice compression to represent an (i+1)-th slice of data on a basis of an i-th slice of data for generating a compressed (i+1)-th slice of data and an (i+1)-th control character. The decompressing step uses an inter-slice decompression with respect to the inter-slice compression to restore the (i+1)-th slice of data from the compressed (i+1)-th slice of data for further printing.

Abstract: Disclosed is a printing system having a data processing apparatus on which printer driver software capable of setting various kinds of print conditions is installed, and a printer for performing a printing operation based on print job data transmitted from the data processing apparatus. The printer driver software provides a user with a setting screen on which various user-selectable setting options for printing are displayed and can visually disable at least one of the setting options from the setting screen based on information about the state of the printer acquired from the printer. The information on the state of the printer includes information on the remaining amount of a consumable item loaded in the printer or an optional device connected to the printer, information on the size of a recording medium loaded in the printer, or information as to whether the optional device is connected to the printer.

Abstract: Provided is a network board for generating print data in accordance with the information resources received from outside, and sending the print data to a printer, which can easily install or update a color conversion table or a printer driver, etc. necessary for generating the print data. Whereby, the network board for generating print data in accordance with the information resources received from outside, and sending the print data to a printer is configured to be able to, by itself, access a prescribed site on the network at the prescribed time, such as when the printer is tuned on, and appropriately download a color conversion table or a printer driver, etc. in order to utilize it.

Abstract: An Internet facsimile apparatus is configured to receive an e-mail and to print the e-mail. The Internet facsimile apparatus includes a controller that determines whether the received e-mail includes a text part when it is determined that the received e-mail comprises a multipart structure. The controller determines whether the text part includes only a predetermined code. The received e-mail is printed without printing a page including the text part when it is determined that the text part includes only the predetermined code.

Abstract: The described systems and methods are directed at converting a file with complex elements so that a legacy utilization device, such as a legacy printer, can properly process the file. The described systems may include a converter module with a modular filter pipeline. The converter module may identify elements with complex features in a file. Simpler features that approximate the complex features are determined. The identified elements in the file may be replaced with elements having the simpler features.

Abstract: A tandem-type color image forming apparatus forms an image in a monochrome mode or in a full color mode. The apparatus has a controller which delays an image forming operation for a predetermined period of time when a color mode is switched from the monochrome mode to the full color mode during different images are continuously formed.

Abstract: This invention is targeted to realize preview displaying by using a system spooler. In the print system according to this invention, when an application program designates printing of a document, document data is spooled into EMF spool file 4. At the same time, previewer 3 is started to transmit a printing image generation request to print processor 5. The print processor 5 reads the data subjected to preview displaying out of the EMF spool file 4, have printer graphic driver 6 generate image data that has an appropriate display size, and informs the name of the image data file to the previewer 8, which then displays the image data.

Abstract: It used to be difficult to determine representative colors which allow color conversion with accuracy throughout color spaces without occurrences of local tone jump. An ink quantity lattice point smoothness evaluation function for evaluating the smoothness of the disposition of ink quantity lattice points whose components are the ink quantities of inks in various colors and a CMY lattice point smoothness evaluation function for evaluating the smoothness of the disposition of CMY lattice points defined by CMY color components are defined. The CMY lattice points and the ink quantity lattice points wherein the ink quantity lattice point smoothness evaluation function and the CMY lattice point smoothness evaluation function are separately minimized are taken as lattice points for correspondence definition data creation.

Abstract: When tetrahedral interpolation is used in correction of color reproduction upon color adjustment, image disturbances such as pseudo edges and the like may occur since the surfaces of each tetrahedron satisfy the boundary condition. Hence, a pixel position of digital image data is calculated, RGB values at that pixel position are acquired, and the acquired RGB values are displayed on RGB value display area. L*a*b* values are calculated based on basis functions and coefficient values of a color calculation B-spline solid, and the calculated L*a*b* values are displayed on an L*a*b* value display area.

Abstract: An image-area separation apparatus includes a SIMD processor performing a SIMD process for performing an image-area separation process and an image-area separation mechanism for performing an image-separation operation according to the SIMD process performed by the SIMD processor. The image-area separating apparatus performs an image-area separation operation to separate character images from figure images by means of software while the SIMD-typed processor achieves a high-speed image data processing.

Abstract: A method of converting a digital color image to a digital gray value image and in so doing distinguishably reproducing colors present in the color image is provided. The digital color image is built up of pixels each having a color value, and the digital gray value image is built up of pixels each having a gray value. The color values of the pixels are converted to gray values by the use of a dynamically adapted conversion function which is optimized on the basis of a comparison of color differences in the digital color image and gray value differences corresponding to the color differences in the digital gray value image. In this way, the colors which in conventional conversion methods are imaged on identical or substantially identical gray values can effectively be distinguishably reproduced.