Abstract: The cell size is reduced and device reliability is improved for a semiconductor device including plural transistors making up a multi-channel output circuit. In a multi-channel circuit configuration, a group of transistors having a common function of plural channels are surrounded by a common trench for insulated isolation from another group of transistors having another function. The collectors of mutually adjacent transistors on the high side are commonly connected to a VH power supply, whereas the emitters of mutually adjacent transistors on the low side are commonly connected to a GND power supply.

Abstract: A semiconductor device comprises a semiconductor substrate having a first semiconductor region of a first semiconductor type, a second semiconductor region of a second conductivity type extended in the first semiconductor region, and a mesa area forming a slope along an outer circumference of the semiconductor substrate; a first electrode provided on a first principal surface of the semiconductor substrate; and a second electrode provided on a second principal surface of the semiconductor substrate that is opposed to the first principal surface; wherein the second semiconductor region comprises a main region provided in the semiconductor substrate while being brought into contact with the first electrode, the main region including an annular portion and diffused portions arranged in a spread manner in an area surrounded by the annular portion; and wherein a portion of the first semiconductor region is interposed between the diffused portions and between the diffused portions and the annular portion; and the d

Abstract: A semiconductor electronic device comprises a substrate; a buffer layer formed on said substrate, having two or more layers of composite layers in which a first semiconductor layer comprising nitride based compound semiconductor having smaller lattice constant and greater coefficient of thermal expansion than the substrate and a second semiconductor layer comprising nitride based compound semiconductor having smaller lattice constant and greater coefficient of thermal expansion than the first semiconductor layer are alternately laminated; a semiconductor operating layer comprising nitride based compound semiconductor formed on said buffer layer; a dislocation reducing layer comprising nitride based compound semiconductor, formed in a location between a location directly under said buffer layer and inner area of said semiconductor operating layer, and comprising a lower layer area and an upper layer area each having an uneven boundary surface, wherein threading dislocation extending from the lower layer area t

Abstract: Provided is a light-receiving device which has light-receiving sensitivity superior to that of a conventional Schottky diode type light-receiving device and also has sufficiently-strengthened junction of a Schottky electrode. A first contact layer formed of AlGaN and having conductivity, a light-receiving layer formed of AlGaN, and a second contact layer formed of AlN and having a thickness of 5 nm are epitaxially formed on a predetermined substrate in the stated order, and a second electrode is brought into Schottky junction with the second contact layer, to thereby form MIS junction. Further, after the Schottky junction, heat treatment is performed under a nitrogen gas atmosphere at 600° C. for 30 seconds.

Abstract: Non-silicon based semiconductor devices are integrated into silicon fabrication processes by using aspect-ratio-trapping materials. Non-silicon light-sensing devices in a least a portion of a crystalline material can output electrons generated by light absorption therein. Exemplary light-sensing devices can have relatively large micron dimensions. As an exemplary application, complementary-metal-oxide-semiconductor photodetectors are formed on a silicon substrate by incorporating an aspect-ratio-trapping technique.

Abstract: An integrated circuit including a hetero-interface and a manufacturing method thereof is disclosed. One embodiment includes forming a hetero-structure including a hetero-interface at a junction between a first region and a second region, and, thereafter introducing a material into the first region and at least up to the hetero-interface, wherein a diffusion constant of the material is higher in the first region than in the second region.

Abstract: A field effect transistor device having a strained semiconductor channel region overlying a heterostructure-semiconductor on a metal substrate includes a first semiconductor layer overlying a first metal layer. The first semiconductor layer has a first semiconductor material and a second semiconductor material in a relaxed heterostructure and is heavily doped. A second semiconductor layer overlies the first semiconductor layer and has a first semiconductor material and a second semiconductor material in a relaxed heterostructure. The second semiconductor layer is more lightly doped than the first semiconductor layer. A trench extends into the second semiconductor layer and a channel region has a strained layer of the first semiconductor material adjacent a trench sidewall. The strained channel region provides enhanced carrier mobility and improves performance of the field effect transistor.

Abstract: A semiconductor device include: a nitride group semiconductor functional layer including a second nitride group semiconductor region on a first nitride group semiconductor region where a two-dimensional carrier gas layer is made, the second nitride group semiconductor region functioning as a barrier layer; a first main electrode electrically connected to one end of the two-dimensional carrier gas layer; a second main electrode electrically connected to the other end of the two-dimensional carrier gas layer; and metal oxide films placed between the first and second main electrodes, electrically connected to the first main electrode, and reducing a carrier density of the two-dimensional carrier gas layer.

Abstract: Embodiments of the present invention describe a method of fabricating a III-V quantum well transistor with low current leakage and high on-to-off current ratio. A hydrophobic mask having an opening is formed on a semiconductor film. The opening exposes a portion on the semiconductor film where a dielectric layer is desired to be formed. A hydrophilic surface is formed on the exposed portion of the semiconductor film. A dielectric layer is then formed on the hydrophilic surface by using an atomic layer deposition process. A metal layer is deposited on the dielectric layer.

Abstract: There is provided a semiconductor memory device including: a first wiring layer; a second wiring layer; a third wiring layer; a memory array region; a first gate array region being formed at a region at which the first wiring layer, the second wiring layer and the third wiring layer can be used in wiring of the plural unit cells; and a second gate array region being formed at a region at which two wiring layers that are the first wiring layer and the second wiring layer can be used in wiring of the plural memory cells, and the plural unit cells are arrayed so as to be separated at an interval needed for placement, by using the first wiring layer, of wiring that should be placed by using the third wiring layer.

Abstract: An image sensor and manufacturing method thereof are provided. The image sensor can include a readout circuitry, an interconnection, a second interlayer dielectric, an image sensing device, a contact plug, and a sidewall dielectric. The contact plug can electrically connect the first conductive type layer to the interconnection through a via hole passing through the image sensing device. The sidewall dielectric can be disposed on a sidewall of the second conductive type layer within the via hole.

Abstract: A semiconductor process and apparatus includes forming <100> channel orientation CMOS transistors (24, 34) with enhanced hole mobility in the NMOS channel region and reduced channel defectivity in the PMOS region by depositing a first tensile etch stop layer (51) over the PMOS and NMOS gate structures, etching the tensile etch stop layer (51) to form tensile sidewall spacers (62) on the exposed gate sidewalls, and then depositing a second hydrogen rich compressive or neutral etch stop layer (72) over the NMOS and PMOS gate structures (26, 36) and the tensile sidewall spacers (62). In other embodiments, a first hydrogen-rich etch stop layer (81) is deposited and etched to form sidewall spacers (92) on the exposed gate sidewalls, and then a second tensile etch stop layer (94) is deposited over the NMOS and PMOS gate structures (26, 36) and the sidewall spacers (92).

Abstract: A nitride semiconductor device of the present invention includes: a nitride semiconductor laminated structure including an n-type first layer, a second layer that is laminated on the first layer and contains a p-type impurity, and an n-type third layer laminated on the second layer, each layer of the nitride semiconductor laminated structure being made of a Group III nitride semiconductor, and having a wall surface extending from the first, second, to third layers; a fourth layer that is formed on the wall surface in the second layer and that has a different conductive characteristic from that of the second layer; a gate insulating film formed to contact the fourth layer; and a gate electrode formed as facing the fourth layer with the gate insulating film being sandwiched between the gate electrode and the fourth layer.

Abstract: A strain-inducing semiconductor alloy may be formed on the basis of cavities which may have a non-rectangular shape, which may be maintained even during corresponding high temperature treatments by providing an appropriate protection layer, such as a silicon dioxide material. Consequently, a lateral offset of the strain-inducing semiconductor material may be reduced, while nevertheless providing a sufficient thickness of corresponding offset spacers during the cavity etch process, thereby preserving gate electrode integrity. For instance, P-channel transistors may have a silicon/germanium alloy with a hexagonal shape, thereby significantly enhancing the overall strain transfer efficiency.

Abstract: As a method for constituting a pre-metal interlayer insulating film, such method is considered as forming a CVD silicon oxide-based insulating film having good filling properties of a silicon oxide film by ozone TEOS, reflowing the film at high temperatures to planarize it, then stacking a silicon oxide film having good CMP scratch resistance by plasma TEOS, and, further, planarizing it by CMP. However, it was made clear that, in a process for forming a contact hole, crack in the pre-metal interlayer insulating film is exposed in the contact hole, into which barrier metal intrudes to cause short-circuit defects. In the present invention, in the pre-metal process, after forming the ozone TEOS film over an etch stop film, the ozone TEOS film is once etched back so as to expose the etch stop film over a gate structure, and, after that, a plasma TEOS film is formed over the remaining ozone TEOS film, and then the plasma TEOS film is planarized by CMP.

Abstract: In sophisticated semiconductor devices, a strain-inducing semiconductor alloy may be positioned close to the channel region by forming cavities on the basis of a wet chemical etch process, which may have an anisotropic etch behavior with respect to different crystallographic orientations. In one embodiment, TMAH may be used which exhibits, in addition to the anisotropic etch behavior, a high etch selectivity with respect to silicon dioxide, thereby enabling extremely thin etch stop layers which additionally provide the possibility of further reducing the offset from the channel region while not unduly contributing to overall process variability.

Abstract: Disclosed are an image sensor and a method for manufacturing the same. The image sensor includes a first pixel having a first photodiode and a first readout circuit and a second pixel having a second photodiode and a second readout circuit. The second pixel is aligned at one side of the first pixel, and a light receiving area of the first photodiode is different from a light receiving area of the second photodiode.

Abstract: The semiconductor device according to the present invention includes a ferroelectric film and an electrode stacked on the ferroelectric film. The electrode has a multilayer structure of an electrode lower layer in contact with the ferroelectric film and an electrode upper layer stacked on the electrode lower layer. The electrode upper layer is made of a conductive material having an etching selection ratio with respect to the materials for the ferroelectric film and the electrode lower layer. The upper surface of the electrode upper layer is planarized.

Abstract: A description is given of a normally on semiconductor component having a drift zone, a drift control zone and a drift control zone dielectric arranged between the drift zone and the drift control zone.

Abstract: An integrated circuit structure includes a semiconductor substrate including a first region and a second region; an insulation region in the second region of the semiconductor substrate; and an inter-layer dielectric (ILD) over the insulation region. A transistor is in the first region. The transistor includes a gate dielectric and a gate electrode over the gate dielectric. A first conductive line and a second conductive line are over the insulation region. The first conductive line and the second conductive line are substantially parallel to each other and extending in a first direction. A first metal line and a second metal line are in a bottom metal layer (M1) and extending in the first direction. The first metal line and the second metal line substantially vertically overlap the first conductive line and the second conductive line, respectively. The first metal line and the second metal line form two capacitor electrodes of a capacitor.

Abstract: Provided is a semiconductor memory device including a capacitor structure extending over core and peripheral areas of a substrate. Respective portions of the capacitor structure function as memory cell capacitors in the core area and as first and second capacitors in the peripheral area. A combination of the first and second capacitors functions as a first power decoupling capacitor, and a transistor disposed in the peripheral area functions as a second power decoupling capacitor.

Abstract: A semiconductor device according to the present invention uses a capacitor including a capacitive insulating film sandwiched between an upper electrode and a lower electrode. The lower electrode of the capacitor is constructed by overlappingly connecting a plurality of electrode portions together. A lower electrode portion (plug type electrode) of the adjacent electrode portions is made of columnar tungsten. The lower electrode portion further includes a conductive film (barrier film) that covers a side surface and a bottom surface of the tungsten. A top surface of the tungsten is covered with a bottom portion of an upper electrode portion (cylinder type electrode).

Abstract: A vertical semiconductor device, a DRAM device, and associated methods, the vertical semiconductor device including single crystalline active bodies vertically disposed on an upper surface of a single crystalline substrate, each of the single crystalline active bodies having a first active portion on the substrate and a second active portion on the first active portion, and the first active portion having a first width smaller than a second width of the second active portion, a gate insulating layer on a sidewall of the first active portion and the upper surface of the substrate, a gate electrode on the gate insulating layer, the gate electrode having a linear shape surrounding the active bodies, a first impurity region in the upper surface of the substrate under the active bodies, and a second impurity region in the second active portion.

Abstract: A silicide layer is formed at least in a part on an impurity diffusing layer to avoid a region on a gate electrode on a gate oxide film. Voltage is applied between the gate electrode and the impurity diffusing layer to destroy the gate oxide film.

Abstract: To realize a semiconductor memory device whose capacitance value per unit area in a memory cell is increased without increase in the area of the memory cell. The memory cell includes a transistor, a memory element, a first capacitor, and a second capacitor. The first capacitor includes a semiconductor film, a gate insulating film, and a gate electrode which are included in the transistor and is formed at the same time as the transistor. The second capacitor includes an electrode which is included in the memory element and an insulating film and an electrode which are formed over the electrode. Further, the second capacitor is formed over the first capacitor. In this manner, the first capacitor and the second capacitor which are connected in parallel with the memory element are formed.

Abstract: A vertical NAND flash memory device includes a substrate having a face and a string of serially connected flash memory cells on the substrate. A first flash memory cell is adjacent the face, and a last flash memory cell is remote from the face. The flash memory cells include repeating layer patterns that are stacked on the face, and a pillar that extends through the series of repeating layer patterns. The pillar includes at least one oblique wall. At least two of the series of repeating layer patterns in the string are of different thicknesses. Other vertical microelectronic devices and related fabrication methods are also described.

Abstract: A semiconductor storage device according to the present invention includes: a semiconductor substrate; an embedded insulator embedded in a trench formed in the semiconductor substrate and having an upper portion protruding above a top surface of the semiconductor substrate; a first insulating film formed on the top surface of the semiconductor substrate; a floating gate formed on the first insulating film at a side of the embedded insulator, having a side portion arching out above the embedded insulator, and having a side surface made of a flat surface and a curved surface continuing below the flat surface; a second insulating film contacting an upper surface, the flat surface and the curved surface of the floating gate; and a control gate opposing the upper surface, the flat surface and the curved surface of the floating gate across the second insulating film.

Abstract: A method is disclosed for making a non-volatile memory cell on a semiconductor substrate. A select gate structure is formed over the substrate. The control gate structure has a sidewall. An epitaxial layer is formed on the substrate in a region adjacent to the sidewall. A charge storage layer is formed over the epitaxial layer. A control gate is formed over the charge storage layer. This allows for in-situ doping of the epitaxial layer under the select gate without requiring counterdoping. It is beneficial to avoid counterdoping because counterdoping reduces charge mobility and increases the difficulty in controlling threshold voltage. Additionally there may be formed a recess in the substrate and the epitaxial layer is formed in the recess, and a halo implant can be performed, prior to forming the epitaxial layer, through the recess into the substrate in the area under the select gate.

Abstract: A semiconductor storage element includes: a source region and a drain region provided in a semiconductor substrate; a tunnel insulating film provided on the semiconductor substrate between the source region and the drain region; a charge storage film provided on the tunnel insulating film; a block insulating film provided on the charge storage film; a gate electrode provided on the block insulating film; and a region containing a gas molecule, the region provided in a neighborhood of an interface between the charge storage film and the block insulating film.

Abstract: A technique capable of improving the reliability of a non-volatile memory semiconductor device is provided and, in particular, a technique capable of supplying electricity without fail to a memory gate electrode of split gate transistor is provided. One end of an electricity supply line ESL is arranged over a terminal end TE1 and the other end thereof is arranged over a terminal end TE2, and further, the central portion of the electricity supply line ESL is arranged over a dummy part DMY. That is, the terminal end TE1, the terminal end TE2, and the dummy part DMY have substantially the same height, and therefore, most of the electricity supply line ESL arranged from over the terminal end TE1 to over the terminal end TE2 via the dummy part DMY is formed so as to have the same height.

Abstract: A nonvolatile semiconductor memory device (and method of forming same) includes a word gate provided above a channel region of a semiconductor substrate via an insulating layer, a control gate provided at a side of the word gate, and a charge storage layer provided by an ONO film between the channel region and the control gate, and between the word gate and the control gate. The control gate includes a silicide layer including silicide containing nickel, and a non-silicide layer provided between the silicide layer and the charge storage layer.

Abstract: A semiconductor device includes a source metallization, a source region of a first conductivity type in contact with the source metallization, a body region of a second conductivity type which is adjacent to the source region. The semiconductor device further includes a first field-effect structure including a first insulated gate electrode and a second field-effect structure including a second insulated gate electrode which is electrically connected to the source metallization. The capacitance per unit area between the second insulated gate electrode and the body region is larger than the capacitance per unit area between the first insulated gate electrode and the body region.

Abstract: A MOS transistor having an increased gate-drain capacitance is described. One embodiment provides a drift zone of a first conduction type. At least one transistor cell has a body zone, a source zone separated from the drift zone by the body zone, and a gate electrode, which is arranged adjacent to the body zone and which s dieletrically insulated from the body zone by a gate dielectric. At least one compensation zone of the first conduction type is arranged in the drift zone. At least one feedback electrode is arranged at a distance from the body zone, which is dielectrically insulated from the drift zone by a feedback dielectric and which is electrically conductively connected to the gate electrode.

Abstract: In a conventional semiconductor device, protection of a to-be-protected element from a surge voltage is difficult because the to-be-protected element is turned on before a protection element due to variations in manufacturing conditions. In a semiconductor device of the present invention, a protection element and a MOS transistor have part of their structures formed under common conditions. N type diffusion layers of the protection element and the MOS transistor are formed in the same process, while the N type diffusion layer of the protection element has a larger diffusion width than the N type diffusion layer of the MOS transistor. With this structure, when a surge voltage is applied to an output terminal, the protection element is turned on before the MOS transistor, and thereby the MOS transistor is protected from an avalanche current.

Abstract: A semiconductor component has a drift zone and a drift control zone, a drift control zone dielectric, which is arranged in sections between the drift zone and the drift control zone, and has a first and a second connection zone, which are doped complementarily with respect to one another and which form a pn junction between the drift control zone and a section of the drift zone.

Abstract: A method of manufacturing integrated circuits including a FET with a gate spacer. One embodiment provides forming a lamella of a semiconductor material and two insulator structures on opposing sides of the lamella. The lamella is recessed. A fin is formed from a central portion of the lamella. The fin is thinner than a first and a second portion of the lamella which face each other on opposing sides of the fin. A first spacer structure is formed which encompasses a first portion of the fin, the first portion adjoining to the first lamella portion. A gate electrode is disposed adjacent to the first spacer structure and encompasses a further portion of the fin on a top side and on two opposing lateral sides.

Abstract: A semiconductor device includes a first semiconductor pillar, a first gate insulating film, a gate electrode, and a first contact. The first semiconductor pillar extends upwardly from a semiconductor substrate. The first gate insulating film covers side surfaces of the first semiconductor pillar. The gate electrode covers the first gate insulating film. The first gate insulating film insulates the gate electrode from the first semiconductor pillar. The first contact partially overlaps, in plane view, the first semiconductor pillar and the gate electrode. The first contact includes a silicon layer having a top level which is higher than a top level of the gate electrode.

Abstract: A method for producing a semiconductor structure and a semiconductor component are described.

Abstract: A fabrication method of a trench metal oxide-semiconductor (MOS) transistor is provided. After the gate trenches are formed in the epitaxial layer, impurities of a first conductive type are implanted into the epitaxial layer by using a blanket implantation process. A polysilicon pattern filling the gate trenches and covering a predetermined range of epitaxial layer surrounding the gate trenches is formed on the epitaxial layer. Impurities of a second conductive type are implanted through the polysilicon pattern into the epitaxial layer to form a well. Impurities of the first conductive type are implanted to form a plurality of first doping regions. A portion of the polysilicon layer above the upper surface of the epitaxial layer is removed by etching to form a plurality of polysilicon gates. Impurities in the first doping regions are driven in to form a plurality of source regions adjacent to the gate trenches.

Abstract: A LDMOS transistor and a method for fabricating the same. A LDMOS transistor may include a P-type body region formed over a N-well. A LDMOS transistor may include a source region and a source contact region formed over a P-type body region. A LDMOS transistor may include a drain region spaced a distance from a P-type body region. A LOCOS may be formed over a surface of a N-well between a P-type body region and a drain region. A LDMOS transistor may include a main gate electrode formed over at least a portion of a LOCOS and a N-well. A LDMOS transistor may include a sub-gate electrode formed between a source region and a source contact region. A method for fabricating a LDMOS transistor is described herein.

Abstract: A semiconductor component comprises a semiconductor body with at least one protective trench in the semiconductor body. An insulation layer is situated at least at the bottom of the protective trench. An electrically conductive layer having a thickness D is formed on the insulation layer in the protective trench, wherein the electrically conductive layer only partly fills the protective trench.

Abstract: In one embodiment, a vertical MOS transistor is formed without a thick field oxide and particularly without a thick field oxide in the termination region of the transistor.

Abstract: A semiconductor device includes a semiconductor substrate, a trench, a buried insulated source electrode arranged in a bottom portion of the trench, a first gate electrode and a second gate electrode arranged in an upper portion of the trench and spaced apart from one another. A surface gate contact extends into the upper portion of the trench and is in physical and electrical contact with the first gate electrode and second gate electrode.

Abstract: A semiconductor device in which a desired device is formed, comprising a semiconductor substrate having a first impurity region of a first conductivity type provided around an edge of a region in which the desired device is formed, and a second impurity region of the first conductivity type provided in a scribe region of the semiconductor substrate; wherein a channel stopper is formed between the first impurity region and the second impurity region.

Abstract: There is provided a semiconductor device including a field effect transistor. The field effect transistor includes a p-type low concentration region formed over a surface of a substrate, an n-type drain-side diffusion region and an n-type source-side diffusion region formed over a surface of the p-type low concentration region, an element isolation insulating layer, and another element isolation insulating layer. A p-type high concentration region, which has an impurity concentration higher than the impurity concentration of the p-type low concentration region, is formed below the n-type source-side diffusion region in the p-type low concentration region over a range at least from one end, which is opposite to the other end facing to the channel region, of the source-side diffusion region to one end, which is facing to the channel region, of the second element isolation insulating layer, when seen in a plan view.

Abstract: A field-effect transistor (142) includes a lowly p-doped region 110 formed on a surface of a substrate (102), an n-doped drain region 112 and n-doped source region 114 arranged on a surface of the lowly p-doped region 110, and a device isolation insulating film 132 and device isolation insulating film 134. Here, the device isolation insulating film 132 is formed greater in film thickness than the device isolation insulating film 134; and in the n-doped source region 114, the peak concentration section having a highest dopant concentration is formed in a deeper position than in the n-doped drain region 112.

Abstract: This invention provides methods for fabricating high speed TFTs from silicon-on-insulator and bulk single crystal semiconductor substrates, such as Si(100) and Si(110) substrates. The TFTs may be designed to have a maximum frequency of oscillation of 3 GHz, or better.

Abstract: Field programmable device (FPD) chips with large logic capacity and field programmability that are in-circuit programmable are described. FPDs use small versatile nonvolatile nanotube switches that enable efficient architectures for dense low power and high performance chip implementations and are compatible with low cost CMOS technologies and simple to integrate.

Abstract: A transistor-type protection device includes: a semiconductor substrate; a well including a first-conductivity-type semiconductor formed in the semiconductor substrate; a source region including a second-conductivity-type semiconductor formed in the well; a gate electrode formed above the well via a gate insulating film at one side of the source region; a drain region including the second-conductivity-type semiconductor formed within the well apart at one side of the gate electrode; and a resistive breakdown region including a second-conductivity-type semiconductor region in contact with the drain region at a predetermined distance apart from the well part immediately below the gate electrode, wherein a metallurgical junction form and a impurity concentration profile of the resistive breakdown region are determined so that a region not depleted at application of a drain bias when junction breakdown occurs in the drain region or the resistive breakdown region may remain in the resistive breakdown region.

Abstract: An integrated circuit structure includes a semiconductor substrate; a first active region in the semiconductor substrate; and a second active region in the semiconductor substrate and of an opposite conductivity type than the first active region. A gate electrode strip is over the first and the second active regions and forms a first MOS device and a second MOS device with the first active region and the second active region, respectively. A first spacer bar is in the semiconductor substrate and connected to the first active region. At least a portion of the first spacer bar is adjacent to and spaced apart from a portion of the first active region. A second spacer bar is in the semiconductor substrate and connected to the second active region. At least a portion of the second spacer bar is adjacent to and spaced apart from a portion of the second active region.