Abstract: A keyless padlock system includes an electromagnetic switch system and a fingerprint process system. The electromagnetic switch system operates the padlock with a mechanical actuated mechanism. The system also secures the padlock against the force and vibration. The fingerprint process system provides the padlock device an easy operation as the key system. The buttons and LED's manage using both fingerprint and the combination code. A changeable battery system without losing the memory provides the padlock device a reliable and easy application.

Abstract: The invention relates to a magnetic lock for a window comprising a button having a locked position and an unlocked position, a spring clip in contact with the button for holding the button in the unlocked position, and a trigger wheel. The lock also has a trigger housing with an activated position and a deactivated position, and where the trigger wheel is attached to and rotatable on the trigger housing. Movement of the trigger housing causes the trigger wheel to move and contact the spring clip. Additionally, contact between the trigger wheel with the spring clip causes the spring clip to move and allow the button to move from the unlocked position to the locked position.

Abstract: A locking device for flaps, luggage compartment flaps, doors or lids comprising a housing, an actuating handle for unlocking a locking device pivotably arranged on the housing, an actuating lever, the actuating handle being supported on the housing as a rocker; a release wheel arranged pivotably on the housing and connected with the actuating lever to move unlocking rods; a locking bolt which is movable into a locking or a freewheeling position via an actuating element; a first, rotatably mounted driver disk which is rotatable by the release wheel; a second, rotatably mounted driver disk coupled to the first driver disk in order to be carried along by rotation of the first disk, for operating a locking handle connected thereto; freewheel for the actuating handle when the locking device is locked or unlocked, because a reversing lever, which can be actuated by the locking bolt, is arranged pivotably on the housing and is rotatable by the release wheel which forms a freewheel on both sides.

Abstract: An electric steering wheel lock device including a lock bar which moves between a lock position, at which the lock bar prohibits rotation of a steering shaft, and an unlock position, at which the lock bar permits rotation of the steering shaft. An electric motor generates drive force for moving the lock bar. A motor holding member for holding the electric motor includes a motor fastening portion having two contact portions, which face toward each other, to clamp a casing of the electric motor.

Abstract: A rotary control device includes a body, a knob rotatably provided on the body, a push button provided on a side portion of the knob so as to be depressed, a lock member that moves in response to a depressing operation of the push button, and a lock portion provided in the body. The lock member is retained to the lock portion of the body so as to restrain a rotary operation of the knob before the push button is depressed. When the push button is depressed, the lock member is moved to a space where the lock member is movable in conjunction with the rotary operation of the knob so that a restraint of the rotary operation of the knob is released.

Abstract: A cylinder lock is provided that key-change is possible without taking out auxiliary tumblers to the outside, the number of keys subjected to the key-change can be increased correspondingly to the number of auxiliary tumblers, and also, each key can be set, limitlessly in the number of times, as not-usable/usable so that even after use of a master key, other adaptable keys are usable.

Abstract: The invention is directed to a crumbly, water-absorbing, soil-like hydrogel. The hydrogel comprises finely comminuted mineral substances, such as igneous rock; water-soluble alkali-silicate; solid and liquid nutrient additives; and ballast, bound in a cross-linked polymer. The hydrogel is structured like a sponge and absorbs water and liquids when in contact with water or aqueous liquids. The mineral substances present in the hydrogel may be present in an amount of at least 30% by weight of the dried hydrogel. Also, the invention encompasses methods of producing acidic and neutral to weakly alkaline hydrogels.

Abstract: The invention relates to a method and a device for winding metal strips (13) onto a coiling mandrel (4) which is disposed in a coiler shaft (3) and to which the metal strip is fed by a driver (2) encompassing a bottom and a top drive roller (6, 7) in a driver frame (5). A bench (11) is provided below the metal strip (13) for guiding purposes while a strip switch (17) and a swiveling shaft flap (19) are arranged above the metal strip, the shaft flap (19) adjoining the strip switch (17) to the vicinity of the coiling mandrel.

Abstract: A decoiler for delivery of wire or rod feed stock to a downstream production machine from a pre-formed coil. The decoiler includes an extended length rotatable mandrel adapted to extend along the interior of the coil such that the mandrel supports loops of the coil in hanging and slidable relation along the mandrel. At least a first feed head is disposed adjacent to the proximal end of the mandrel. The first feed head is adapted to feed the wire or rod feed stock from a rear loop of the coil outwardly in a curved path to form a spiral feed loop having a diameter greater than the coil. A variable height guide element is disposed at a position below the first feed head. The variable height guide element engages and follows an interior of the spiral feed loop to change height with a change in diameter of the spiral feed loop and to provide an output signal for speed control of the first feed head to maintain the diameter of the spiral feed loop within predefined limits.

Abstract: The invention relates to a device for bending flat semi-finished products into a profile having a changeable cross-section along the length thereof˜comprising at least one roll stand having profiling units in form of rollers and/or matrices. The semi-finished product can be led lengthwise between the profiling units. The invention further comprises at least two linear actuators (10, 12, 14, 16), arranged transversely to the length (Z) of the semi-finished product in order to produce translatory movements of the roll stand and rotational movements of the roll stand about an axis (Y) thereof. According to the invention, each of the at least two linear actuators are connected to the roll stand at a point provided at a distance from the axis (Y) of the roll stand.

Abstract: A system for extruding teeth in a workpiece includes a first mandrel supported on a first press and including first die teeth that produce partially formed teeth on the workpiece as the first die teeth are extruded into the workpiece by the first press, a second mandrel supported on a second press and including second die teeth that produce fully formed teeth on the workpiece as the second die teeth are extruded into the workpiece by the second die station, and a transfer system for supporting and carrying the workpiece with the lower die assembly from the first press to the second press.

Abstract: An apparatus for extruding teeth in a blank includes a press that includes a lower die plate for supporting the blank thereon, and upper die plate that moves along an axis relative to the lower die plate. A mandrel, aligned with the axis, moves with the upper die plate along the axis, and includes die teeth which form gear teeth to net shape by back extrusion. An impingement ring, located between the upper die plate and the blank, has an opening that allows the die teeth of the mandrel to contact the blank, and includes a stinger that forces material of the blank toward the axis during the forming cycle.

Abstract: A method of producing a ring-shaped member is provided in which a material loss is eliminated, the process cost can be reduced, and a ring-shaped member can be easily obtained from a pipe member by a small number of steps. The method includes steps of: inwardly projectingly shaping a flange portion 1c on an end portion of a metal-made pipe member 1; and cutting off the flange portion 1c from the pipe member 1, thereby obtaining a ring-shaped member 10.

Abstract: An apparatus may have a cylinder including a piston rod and a chamber in which a working fluid is received to resist movement of the piston rod into the chamber, and an accumulator having a first chamber in communication with the cylinder chamber to receive fluid from the cylinder chamber upon movement of the piston rod into the cylinder chamber. The apparatus may also have a pressure controller having a fluid chamber where some of the working fluid may be received and an actuator operable to increase the volume of the fluid chamber when the piston rod is retracted into the cylinder chamber to increase the total volume in which the working fluid may be received, wherein the increased volume of the fluid chamber may accommodate fluid movement in the assembly not caused by movement of the piston rod.

Abstract: A yield which is a ratio of the weight of a ring-shaped member to that of a stock material, and a yield which is a ratio of the ring-shaped member to a blank are improved, and the cost is reduced. In a method of producing a ring-shaped member in which a ring-shaped member is obtained from a longitudinally elongated annular blank 3, a pair of linking portions 3b, 3c are outward expanded from the inner side of the blank 3, and a pair of arcuate portions 3d are pressed from the outer side toward the inner side to be pressingly expanded, thereby shaping into a ring-shaped member.

Abstract: A die for use in a sheet metal forming process includes a die material having a surface. A plurality of depressions is formed in a predetermined portion of the surface, where each of the plurality of depressions has a predetermined diameter and depth. Interaction of a surface of a sheet metal blank with i) the plurality of depressions, and ii) a solid forming lubricant, including particles of an average predetermined size and distribution, disposed on one of the die material surface or the sheet metal blank surface substantially reduces adhesion between the sheet metal blank surface and the die material surface during the sheet metal forming process.

Abstract: A system and method for testing a multimeter provides a mechanical arm to set a gear of the multimeter. Values displayed on the multimeter are captured by a camera. The computer obtains the displayed values from captured images using a difference image method. If a difference between each two obtained values is in an allowable error range of the multimeter, the computer displays that the gear is qualified. If the difference between each two obtained values is not in the allowable error range, the computer displays that the gear is out of tolerance.

Abstract: A multi-sensing device is provided which includes a first sensor for sensing a temperature of the fluid flowing through the filter element, a second sensor for sensing a pressure generated by the fluid flowing through the filter element; and an indicator for indicating a condition of the filter system, and a microcontroller operatively coupled to the first and second sensors.

Abstract: A process transmitter for measuring a process variable in an industrial process comprises a gauge pressure sensor, an excitation source and transmitter circuitry. The gauge pressure sensor measures a pressure difference between a process fluid and a reference volume, and generates a pressure sensor signal representing the pressure difference. The excitation source generates a pressure pulse within the reference volume to influence generation of the pressure sensor signal. The transmitter circuitry is connected to the gauge pressure sensor to provide an output related to a change in the pressure sensor signal due to the pressure pulse.

Abstract: A disk drive emulator for testing a test slot of a disk drive testing system includes an emulator body, an interface connecter disposed on the emulator body, and at least one vibration sensor disposed on the emulator body. The emulator body comprises a material having a tensile modulus of at least 40×10?6 Psi.

Abstract: An impact detection system provides a means of sensing, monitoring and recording impact events on an impact surface using at least one sensor that is incorporated into the impact surface. The sensor(s) can be integral with, attached to or located behind various types of impact surface including various types of garments that can be worn by an individual or on composite materials such as an aircraft fuselage for example. The impact detection system includes a portable impact detection device electrically connected to the sensor(s) and is used to detect ballistic or non-ballistic type impacts on the impact surface. The portable impact detection device processes the impact data detected by the sensor(s) and stores the data for analysis at a later time or outputs the data to a third party system for review and/or analysis.

Abstract: An apparatus provides a linearly decreasing force. The apparatus includes a plurality of links, which can be referred to as swing, seat, fixed, and input/output links. A spring is coupled to each of the seat links, and a rod is positioned in proximity to each spring and through each of the seat links. A load applied to the input/output link will experience a linearly decreasing resistance.

Abstract: The measuring device 1 includes a measurement vessel 13 contained a liquid 12 filled therein, and a sensor 11 provided in the measuring vessel 13 and for detecting components of a gaseous sample dissolved in the liquid 12. The measuring device 1 also includes a bubble-generating unit 14, which is supplied with a gaseous sample and has an aperture 141 for discharging the gaseous sample in form of bubbles into the liquid. The aperture 141 faces the sensor 11 and the bubble-generating unit 14 is disposed to have a predetermined clearance with the sensor 11. A relation of 1/2Y?X?3/2Y is satisfied, where X represents a distance of a clearance between the bubble-generating unit 14 and the sensor 11 and Y represents a diameter of the aperture 141 of the bubble-generating unit 14.

Abstract: A device having: one or more substrates in an enclosure having an inlet and an outlet; a template directed molecular imprinted material on the substrates; and a heater to heat the material. A method of: providing the above device including a sensor coupled to the outlet; flowing a gas though the device; heating the material; and flowing any vapor evolved from the material into the sensor.

Abstract: A device for measuring superfine particle masses including a quartz oscillator and an exposure system having at least two measuring chambers. Each of the at least two measuring chambers has a same geometry, a deposition surface for particles, and an aerosol feed directed at the respective disposition surface configured to feed an aerosol onto the respective deposition surface. At least one of the respective deposition surfaces is disposed on the quartz oscillator.

Abstract: A test plug assembly (10, 50, 90) includes a shaft (24, 56, 100) on which an annular elastic seal (22, 68, 94) and compression elements (32, 34, 62, 106, 110) are mounted. The compression elements (32, 34, 62, 106, 110) confront opposite axial sides of the annular seal (22, 68, 94) and are movable relative to one another for axially compressing and radially expanding the seal (22, 68, 94) into fluid-tight sealing engagement with an inner peripheral wall (38, 70, 96) of a pipe (16, 52, 92). A transducer (42, 80, 122) is mounted on the distal end of the shaft (24, 56, 100) and measures a condition within the pipe (16, 52, 92) at a location beyond the seal (22, 68, 94). As one example, the transducer (42, 80, 122) is a temperature compensation pressure transducer for obtaining pressure measurements within the downstream portion of the pipe (16, 52, 92) beyond the test plug (10, 50, 90).

Abstract: A liquid chromatograph includes a mobile phase supplying apparatus including a plurality of liquid-feeding pumps to feed mobile phases, a plurality of liquid-feeding flow paths, a mixer to mix the mobile phases by merging the liquid-feeding flow paths, at least one control device to control driving of each of the liquid-feeding pumps based on flow rates for the respective liquid-feeding flow paths, a plurality of flow rate measuring sections provided downstream of the liquid feeding pump in each liquid-feeding flow path, the plurality of actual flow rate measuring sections configured to measure an actual flow rate and to detect a back-flow in the corresponding liquid-feeding flow path, and a plurality of actual flow rate computing sections configured to compute an actual flow rate in the corresponding liquid feeding flow path.

Abstract: A compression sensor gasket and method of construction thereof is provided. The gasket has a body with opposite sealing surfaces and a through passage configured to align with a chamber to be sealed. A through opening extends between the sealing surfaces to the through passage and has an annular chamfered surface. A pressure sensor assembly having a housing and a pressure sensor extending at least partially through the housing is disposed in the through opening. The pressure sensor has a pressure sensor tip configured to sense pressure within the chamber to be sealed. The housing has an outer annular tapered surface configured to register in radial alignment with the chamfered surface to facilitate forming a hermetic seal between the pressure sensor assembly and the gasket body.

Abstract: A combustion chamber pressure sensor for an internal combustion engine, having a sensor body able to be inserted into a receiving bore of the internal combustion engine, which sensor body has on the side of the combustion chamber a sealing device for sealing the sensor body in the receiving bore, and which sensor body is provided with affixation means for fixing the combustion chamber pressure sensor in place inside the receiving bore. The sealing device includes at least one separately produced heat-resistant elastic sealing element, which is disposed around an outer jacket of the sensor body.

Abstract: In a method for testing the operation of a pressure sensing unit of an injection system of an internal combustion engine, the injection system has no high-pressure valve. An error is detected when a pressure gradient value falls below a pressure gradient limit while at the same time the most recently detected pressure is higher than a pressure limit.

Abstract: The invention relates to a procedure and a device for diagnosing the increasing speed and the dead time of an exhaust gas probe, which is arranged in the exhaust gas duct of a combustion engine, whereby the diagnosis is carried out due to a comparison of a modeled and a measured signal after a default change of a fuel air ratio of an air fuel mixture that is supplied to the combustion engine and whereby the signal is an output signal of the exhaust gas probe or a modeled or measured signal that is derived from the output signal.

Abstract: An inventive load apparatus for performance evaluation of a steering system has a simple construction and yet is capable of faithfully reproducing a tire load observed when the steering system is actually mounted on a motor vehicle. A compression load spring device (12) includes a piston (18) which is axially movable within a cylinder (17), and a pair of springs (20, 21) which resiliently urge the piston (18) to hold the piston (18) in a force balanced state at a neutral position in the cylinder. The piston (18) is connected to a rod (19) having one end (19a) serving as a load output portion. A load outputted from the load output portion (19a) is multiplied by a preset factor by means of a lever mechanism (13), and the resulting load is applied to the steering system (30).

Abstract: A test machine and method for dynamically testing a tire/wheel assembly. A first laser measurement gage is directed to an inboard rim flange of the wheel to measure radial deflection of the tire/wheel assembly. A second laser measurement gage is directed to the inboard rim flange to measure axial deflection of the tire/wheel assembly. Displacement data and loading data are correlated to provide values for lateral stiffness, radial stiffness and ride stiffness.

Abstract: A swinging apparatus comprising an energy provider and a swinging mechanism disposed thereon. By means of adjusting the size and shape of the swinging mechanism and adjusting a distance between the swinging mechanism and the energy provider so as to control the ratio of the distance between the swinging mechanism and the energy provider to a characteristic value corresponding to the swing mechanism in a range between 4 and 0.25, the swinging frequency of the swinging mechanism may be adjusted automatically to comply with the variation of the motion frequency of the energy provider. The present invention further provides an energy harvester to work with the swinging apparatus and a coil to generate an induced current for power generation during the swing of the swing mechanism. In the present invention, the natural frequency of the swing mechanism may be adjusted according to the rotational velocity of the energy provider.

Abstract: A method and a monitoring unit for monitoring a tire of a vehicle record a first measured value of revolutions of a tire with a first sensor. In addition, a second measured value of the revolutions of a tire is recorded with a second sensor. Alternatively, a second measured value of a second, different measured variable of a tire can also be recorded. In a further step, the directly measured or derived measured values of a measured variable are compared and an error signal is generated if a determined deviation is greater than a predefinable tolerance value.

Abstract: A formation testing probe assembly comprising an elongated packer having a surface configured to be urged by the probe assembly towards a wall of a wellbore extending through the formation. The formation testing probe assembly further comprises a plate embedded in the elongated packer and including a central structural portion extending along a centerline of a substantial length of the plate, wherein the central structural portion is substantially thicker than remaining portions of the plate.

Abstract: The invention relates to a probe intended to be fitted to a pressure meter and including a fluid dispenser (1), a central measuring cell (21) suitable for being inflated by a pressurized liquid, and two boundary cells (22, 23) arranged on either side of the measuring cell and suitable for being inflated by a pressurized gas. According to the invention, the cells (21-23) are made from a single resilient sleeve (2) sheathing a hollow cylindrical mandrel (3) removably and sealingly fitted onto the dispenser (1), which dispenser has to this end an external surface in the shape a cylinder.

Abstract: An apparatus for ascertaining and/or monitoring of a process variable of a medium. The apparatus includes: A mechanically oscillatable unit; an exciting/receiving unit, which excites the mechanically oscillatable unit to execute mechanical oscillations and which receives the mechanical oscillations; and an electronics unit, which supplies the exciting/receiving unit with an electrical, output signal, and which receives from the exciting/receiving unit an electrical, input signal. In the electronics unit there is provided an amplifier unit, which amplifies the electrical, input signal to an amplified signal (SA). An adjustable phase shifter is provided, which changes the phase of the amplified signal, and a control unit is also provided, which controls the phase shifter, wherein the control unit measures the frequency of the amplified signal and controls the phase shifter starting from stored data concerning the frequency-phase dependence of the amplifier unit.

Abstract: The invention relates to a process for measuring a fill level or limit state using an electromagnetic vibrating system, in which a transmission signal (s) is generated; a vibrating body (20) is excited into a state of vibration by the transmission signal (s); and by means of the reception signal (e) that is then produced by the vibrating body (2) the transmission signal (s) is modified for at least one subsequent excitation of the vibrating body (2), while a natural frequency (fe) of the vibrating body—or a magnitude (te) dependent on the natural frequency (fe)—is determined from the reception signal (e), and the transmission signal (s) is thereby modified. The subject matter of the invention also includes a circuit for implementing the process, as well as a corresponding measuring device.

Abstract: An apparatus for ascertaining and/or monitoring a process variable, especially density of a medium. The apparatus includes: an exciting/receiving unit, which excites a mechanically oscillatable unit to execute mechanical oscillations and which receives the mechanical oscillations; an electronics unit, which applies to the exciting/receiving unit an electrical, exciter signal, and which obtains from the exciting/receiving unit an electrical, received signal. The electronics unit produces the exciter signal in such a manner, that, between the received signal and the exciter signal, a phase difference equal to a desired value of phase difference results, at which effects of changes of viscosity on mechanical oscillations of the mechanically oscillatable unit are negligible, and that the desired value of phase difference is predetermined as a function of the ratio of impedance of the exciting/receiving unit to the input impedance of the electronics unit.

Abstract: The present invention relates to a method for estimating fluid volumes moved in compartmented areas of the subsoil, including steps which consist in effecting, in a survey field, a series of gradiometric measurement campaigns “for framing/calibrating the area” at pre-established time intervals, for each of which the relative variation ?Vi of the fluid volumes contained in a corresponding compartmented area of the subsoil is known; on the basis of the measurement effected, to calculate, for each measurement campaign “for framing/calibrating the area” subsequent to the former one, a parameter Pu correlated to the whole investigation area; on the basis of the known fluid volume variations ?Vi and the relative calculated parameter P1i, to determine by approximation a variability law which relates the parameter Pu with the volume variation of the fluids in the compartmented area, associated with any measurement campaign subsequent to those for framing/calibrating the area on the basis of the variability law determ

Abstract: Apparatus and methods are provided for multiplier circuits having reduced phase shift. A multiplier circuit comprises an input node for an input signal and an output node for an output signal. A first multiplier is coupled to the input node and has a first multiplier output, wherein the first multiplier multiplies the input signal by a first signal to produce a second signal at the first multiplier output. A second multiplier is coupled to the output node and is matched to the first multiplier. The second multiplier multiplies the output signal by a third signal to produce a fourth signal at a second multiplier output. An amplifier is coupled to the first multiplier output and the second multiplier output and produces the output signal at an amplifier output coupled to the output node based upon the second signal and the fourth signal.

Abstract: A mechanical quantity sensor includes: a first structure having a fixed portion with an opening, a displaceable portion disposed in the opening and displaceable relative to the fixed portion, and a connection portion connecting the fixed portion and the displaceable portion to each other; a second structure having a weight portion joined to the displaceable portion and a pedestal joined to the fixed portion, the second structure being stacked on the first structure; a first base having a first driving electrode which is disposed on a surface facing the displaceable portion and is made of a conductive material containing Al and Nd, the first base being stacked on the first structure while being connected to the fixed portion; and a second base having a second driving electrode which is disposed on a surface facing the weight portion and is made of the conductive material, the second base being stacked on the second structure while being connected to the pedestal.

Abstract: A rotation rate sensor for sensing a rotation ? by which the sensor is rotated has a substrate and a driving and sensing arrangement located substantially flat in an X-Y plane above a substrate surface of the substrate and having a center. The driving and sensing arrangement has a drive mass and a sense mass that are arranged at different spacings from the center of the driving and sensing arrangement symmetrically about the center. The oscillation modes of the drive mass and the sense mass are partially transmittable onto one another and are partially decoupled. The rotation ? is sensed in that a tilting of the sense mass out of a surface plane of the driving and sensing arrangement is sensed.

Abstract: A sensor device includes a time determining part that determines time point information, and adds the time point information to the output supplied from a part subjected to failure diagnosis and related to generation of a failure detection signal, and to the output related to generation of a sense signal. With this structure, the failure detection signal is correlated with the sense signal by the time point information. Alternatively, the sensor device includes an output circuit that correlates the failure detection signal with the sense signal supplied at the same time point as the failure detection signal, and outputs both signals using a time division method.

Abstract: A resonator for an angular parameter sensor, the resonator comprising a bell of electrically-insulating material provided with a central stem and an electrically-conductive layer, the conductive layer comprising branches extending from a central portion of the bell to a peripheral edge of the bell, the number of said branches being a prime number not less than seven.

Abstract: Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. A MEMS accelerometer includes a proof mass, a planar coil on the proof mass, a magnet, a first pole piece positioned proximate a first side of the proof mass, and a second pole piece positioned proximate a second side of the proof mass. A magnetic flux field passes from the magnet, through the first pole piece, through the planar coil at an angle between approximately 30 degrees and approximately 60 degrees relative to the coil plane, and into the second pole piece. The first pole piece may extend into a first recessed area of a first housing layer and the second pole piece may extend into a second recessed area of a second housing layer. A method includes sensing a capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil.

Abstract: Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. A MEMS accelerometer includes a proof mass suspended by at least one hinge type flexure, at least one planar coil located on the proof mass, and at least one magnet positioned such that a magnetic flux field passes through the at least one planar coil at an angle between approximately 30 degrees and approximately 60 degrees relative to the coil plane. In an example embodiment, the angle is approximately 45 degrees. The at least one magnet may include a first annular magnet positioned on a first side of the poof mass and a second annular magnet positioned on a second side of the proof mass. A method includes sensing a capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil.

Abstract: Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. A MEMS accelerometer includes a housing, a proof mass suspended within the housing by at least one torsional flexure, and a torsional magnetic rebalancing component. In an example embodiment, the torsional magnetic rebalancing component includes at least one planar coil on the proof mass that extends on both sides of an axis of rotation of the proof mass about the at least one torsional flexure and at least one magnet oriented such that a north-south axis of the at least one magnet is oriented approximately orthogonal to the rotational axis of the proof mass. A method includes sensing a change in capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil.

Abstract: A method of fabrication of submicron wide suspended structures. The method includes depositing a layer of glassy material under tensile stress on crystalline silicon, patterning the layer of glassy material with a masking layer having a pattern, the masking layer protecting the layer of glassy material along the pattern, selectively removing the layer of glassy material in areas of the layer of glassy material not protected by the masking layer; and anisotropically etching the crystalline silicon to create at least a pit extending into the crystalline silicon and at least partially under the layer of glassy material to release a suspended structure comprising glassy material.