Abstract: A heat collection receiver includes a heat absorption body and a support body. The heat absorption body includes at least one honeycomb unit in which a plurality of flow paths through which a heat medium passes are provided in parallel with each other. The at least one honeycomb unit includes porous silicon carbide and silicon that fills pores in the porous silicon carbide. A surface region of the at least one honeycomb unit includes a porous layer which includes pores in a predetermined depth from the surface. The surface region is irradiated with solar light. The pores of the porous layer are not filled with the silicon. The support body accommodates and supports the heat absorption body and the heat medium flows through the support body.

Abstract: A thermal receiver includes a heat absorption body and a support body. The heat absorption body includes at least one honeycomb unit having a plurality of flow paths arranged for circulation of a heat medium. The heat absorption body includes silicon carbide. A surface of the at least one honeycomb unit to which solar light is radiated is subjected to a roughening treatment or a coating treatment. The support body accommodates and supports the heat absorption body and allows circulation of the heat medium.

Abstract: A solar absorber for a concentrated solar power (CSP) dish system includes a cylindrically shaped blackbody cavity receiver fused to a cylindrically shaped heat exchanger shell covering the receiver to form a monolithic cavity receiver and heat exchanger. An exterior surface of the cavity receiver has grooves embedded to create a duct spiraling about the exterior of the cavity receiver so that the duct forms tubes of a tube-style heat exchanger when covered by the heat exchanger shell. An interior diameter of the cavity receiver is greater than or equal to a diameter of an aperture of the cavity receiver, and a longitudinal interior depth of the cavity is greater than or equal to twice the interior diameter of the cavity receiver. The monolithic solar absorber is preferably composed of a ceramic material such as silicon carbide having emissivity greater than 0.9.

Abstract: A method of tracking and collecting solar energy includes receiving solar energy on at least two solar energy receivers, measuring an energy output from each of the at least two solar energy receivers, comparing the energy output from one of the at least two solar energy receiver with the energy output from another of the at least two solar energy receivers, and shifting the at least two solar energy receivers until the energy output from the one of the at least two solar receivers is substantially equal to the another of the at least two solar receivers.

Abstract: A base is provided for installation of an HVAC system which allows for high efficiency air intake. The HVAC base and air return system provides for intake of air simultaneously through the bottom and side of a furnace unit. The HVAC base and air return system allow for installation and use of a wider filter box.

Abstract: The presently disclosed and/or claimed inventive concept(s) relates generally to processes for the non-aqueous hydrolysis of cellulose-containing material, and, more particularly but without limitation, to processes for the non-aqueous hydrolysis of cellulose-containing material into soluble sugars using a solid acid material as a catalyst. Further, the presently disclosed and/or claimed inventive concept(s) relates to non-aqueous and/or powdered soluble sugars and reaction products containing such non-aqueous and/or powdered soluble sugars produced according to a non-aqueous hydrolysis of cellulose-containing material using a solid acid material as a catalyst.

Abstract: Polymers useful as catalysts in non-enzymatic saccharification processes are provided. Provided are also methods for hydrolyzing cellulosic materials into monosaccharides and/or oligosaccharides using these polymeric acid catalysts.

Abstract: This invention relates to a new technology that enables administration of a vaporizable substance to patients for medical purposes. In one embodiment, this invention is a component of a system of technologies, processes and concepts that creates a new method of producing, delivering, administering and regulating the use of medical vaporizable substances.

Abstract: A bag-on-valve aerosol container includes a chamber, where a pressurized gas is contained, surrounding a flexible bag, and where a closable outlet is in fluid communication with the flexible bag. The flexible bag includes a leave-on dermatological composition having an oil-in-water emulsion, comprising one or more oils, the emulsion having an oil phase to water phase ratio of between 1:1 and 1:25; one or more oil-in-water emulsifiers; and one or more active dermatological ingredients. The leave-on dermatological composition has a viscosity at room temperature of between 1 and 20,000 mPa·s. The product compartment further includes one or more physical foaming agents having a standard boiling point of ?50 to 70° C.

Abstract: A method of using an airway assembly in an airway generally comprises providing an airway assembly having an outer tube, an inner tube disposed coaxially with the outer tube, and a seal disposed on the inner tube. The seal is inserted into the airway. The seal is moved from a collapsed position to an expanded position where the seal engages the airway. Fluid is moved through the inner tube and the seal. An additional embodiment provides the airway assembly placed in a first status. The airway assembly is inserted into an airway when the airway assembly is in the first status. The outer tube is moved with respect to the inner tube to place the airway assembly in a second status. The outer tube is moved with respect to the inner tube to place the airway assembly in a third status.

Abstract: A device for sublimating a chemical that has a boiling point that is lower than the combustion temperature of a substance containing the chemical comprising a vaporization tube, a mouthpiece stem, a holder and a heating device.

Abstract: A medicated module containing a second medicament is configured for removable attachment to the mouthpiece of an inhaler containing a first medicament such that a single inhalation by a user will deliver both medicaments to the user.

Abstract: This disclosure describes systems and methods for compensating for leakage when during delivery of gas from a medical ventilator in a proportional assist mode to a patient. The technology described herein includes systems and methods to compensate the delivery of PA ventilation for leakage in the patient circuit by using leak-compensated lung flows as well as leak-compensated respiratory mechanics parameters (lung compliance and lung resistance) estimated in a manner that compensates for elastic and inelastic leaks from the ventilation system.

Abstract: A strapless nasal interface device is disclosed. The device is used in conjunction with CPAP, BIPAP, ventilators, or any other suitable device. The device includes a body with a passageway to a ventilating tube, exhalation holes, and a passageway to nostril interface tubes. The nostril interface tubes include a nasal interface element which is an expandable, compressible material such that the user can compress the element, insert it into the end of the nostril and allow it to expand to hold the tube in place. Alternatively, the nasal interface elements are held against the outer edge of the nostrils. Optionally, a skirt is included at the outer side of the nostril to aid in sealing against air leaks. Optionally, flaps are included to assist in holding the device in place, such as side flaps, a front flap, or both. The front flap may be adherable to the exterior of the nose and optionally includes resilient strips to open the nasal passageway.

Abstract: A mask assembly adapted for use with a positive airway pressure device includes a mask frame, a cushion provided to the frame, a forehead support assembly, and a neck to connect the frame to the forehead support assembly. The neck includes at least one wall including a first edge and a second edge, wherein lower ends of the first edge and the second edge converge towards one another in an upward direction and upper ends of the first edge and second edge diverge from one another in an upward direction. The mask assembly is configured so that a relatively narrow portion of the neck overlies the bridge of the nose or is between the eyes of a user. The relatively narrow portion is a portion of the neck where a distance between the first edge and second edge is smallest.

Abstract: A respiratory mask assembly for delivering breathable gas to a patient includes a frame and an elbow assembly. The frame has a front surface and a rear surface adapted in use to face the patient. The frame includes a main body providing an aperture therethrough for the introduction of breathable gas into a nasal breathing cavity. The elbow assembly is swivelably coupled to the front surface of the frame. The elbow assembly includes a swivel elbow that defines an intake port and an exhaust port separated from the intake port using a baffle. The elbow assembly includes an end portion that interfaces with the aperture of the frame.

Abstract: This invention provides for a component forming a part of a breathing tube, or forming the breathing tube, for example as a part of a breathing circuit for respiratory therapy. The component comprising a tubular body having a foamed wall. The foamed wall can be formed from extrusion of a single extrudate. The foamed wall is of a sufficient minimum optical transparency such that, in use, there is enabled the visual detection of a liquid (or condensate that may have formed) within the tubular body.

Abstract: An exhalation valve assembly that controls the pressure of exhaled gas in a ventilation system is described. The exhalation valve assembly includes an actuator module that may be fixed to the ventilation system and a valve module, removable for cleaning or disposal, through which the exhaled gas flows and that controls the pressure and release of the exhaled as to the environment. Other components may also be incorporated into the assembly Including a filter module, a flow meter and a condensate trap.

Abstract: A respiratory mask assembly for delivering breathable gas to a patient includes a frame and a headgear assembly removably attachable to the frame. The headgear assembly includes a pair of side portions and a rear portion that interconnects the pair of side portions. The pair of side portions includes at least one strap. The rear portion has at least one strap constructed of at least two layers of material. One of the layers of material has a more rigid construction than the other of the layers of material to resist compression of the at least one strap of the rear portion in a first direction which resists movement of the at least one strap of the pair of side straps in the first direction.

Abstract: Intubation is a potentially dangerous invasive procedure with many plausible errors, such as over-inflation of a cuff and insertion of an intubation tube in the wrong lumen, potentially resulting in a patient's internal bleeding, suffocation, or even death. An intubation aide according to example embodiments of the present invention allows intubation of a patient, while eliminating potential injury to the patient, increasing accuracy and reliability of the placement of the intubation tube, and drastically decreasing procedural time. Within moments of insertion of the device into a patient, the medical caregiver knows, with complete certainty, the location of the intubation device without applying traditional time-consuming tasks. Embodiments also provide patient safety, if intubated for a prolonged periods, by regulating an inflation pressure of the cuff. The intubation aide can also be used for training purposes and is ideal for intubation in hospital and field settings.

Abstract: The present application discloses a collar for a trach tube, a method of securing a trach tube to the neck of a patient, and a medical device comprising a collar for the trach tube. In one exemplary embodiment, the collar comprises a securing portion, a protection portion, and an attachment portion. The securing portion secures the trach tube to the neck of the patient. The protection portion extends from the securing portion and covers a portion of a flange of the trach tube. The protection portion is also positioned between the trach tube flange and the neck skin of the patient when the securing portion is attached to the trach tube. The attachment portion attaches the securing portion to the trach tube.

Abstract: The invention relates to a patella gripper for a patella, comprising a retaining element (3; 53) and a contact finger apparatus (4; 54), wherein the contact finger apparatus (4; 54) is arranged on the lower face of the retaining element (3; 53), wherein the contact finger apparatus (4; 54) comprises at least two contact finger units (4.1, 4.2; 54.1), which are arranged on opposite sides of the retaining element (3; 53), and wherein the contact finger apparatus (4; 54) is designed in such a way that the patella can be moved in the cranial-caudal direction and in the medial-lateral direction by means of the contact finger units (4.1, 4.2; 54.1). The invention further relates to a device (20; 60) having such a patella gripper (1; 51).

Abstract: A glossoplasty implant tension relief system for treating an airway of a patient has a first portion configured to engage a mandible of the subject. The system also has a second portion configured to engage a tongue of the subject to retain at least a portion of the tongue. The system includes a connecting portion configured to connect the first portion and the second portion. The connecting portion is constructed and arranged to provide tension between the first portion and the second portion. The connecting portion includes an i) inelastic portion and ii) an elastic portion configured to provide elasticity between the first portion and the second portion.

Abstract: A facemask to be worn in an enclosed space by a subject having or suspected of having a disease transmitted in exhaled aerosol particles is provided. The facemask comprises an air-permeable body having an outer surface facing away from the face of the subject, an inner surface facing toward the face, an upper edge cephalad, a lower edge caudad, and lateral edges at each side of the face such that the inner surface covers the subject's nose and mouth and is spaced apart therefrom. Moreover, at least a portion of the upper and lower edges is spaced apart from the face, but the lateral edges are not spaced apart. The upward and downward deflection of aerosol plumes exiting the facemask cooperates with airflow in the enclosed space to reduce exposure of occupants of the space to the subject's exhaled aerosol particles.

Abstract: The present invention relates to a device comprising, a fixed surface having a means of adhering on a protective covering for shielding a body part or a fragile object, an at least one pad adapted to fit on the fixed surface and, an exterior cover substantially enclosing said pad, the exterior cover having a means of adhering on one surface, wherein the means of adhering of the fixed surface contacts the means of adhering of the exterior cover enclosing the pad and the exterior cover enclosing the pad can be detached, moved, and contacted on any location of the fixed surface.

Abstract: The invention relates to a device for hiccup relief. The present invention provides a hiccup relief device having a main body having a substantially uniform longitudinal shape and a tab disposed on the main body, wherein the tab extends away from the body. The present invention also provides a hiccup relief method including: obtaining a hiccup relief device having a disrupting portion; positioning the hiccup relief device in a mouth of a user; and, delivering a consumable liquid over the hiccup relief device, wherein the disrupting portion disrupts a flow of liquid over the hiccup relief device.

Abstract: A portable cigarette smoke combustor that can prevent spread of cigarette smoke to the air during smoking is disclosed. The portable cigarette smoke combustor includes: includes: a smoking portion including the first chamber for insertion of a cigarette and a lighter; a cigarette smoke injection portion disposed adjacent to the smoking portion and forming the second chamber for receiving mainstream smoke in the mouth of a smoker; a cigarette smoke combustion portion including a means for combusting cigarette smoke flown into the second chamber; and a sidestream smoke emitting means controlling sidestream smoke generated from the first chamber to flow to the second chamber. The second chamber is preferably formed as a venture pipe, and the first chamber and the second chamber are connected with each other through a neck portion of the venture pipe. As the means for combusting the cigarette smoke in the second chamber, a flame generator using a gas or liquid fuel may be used.

Abstract: A cigarette includes lighting and mouth ends. It may include a smokable segment disposed at the lighting end. It also includes a mouth-end segment; an aerosol-generation system disposed between the lighting and mouth ends, which includes (i) a heat-generation segment adjacent the smokable segment, including a heat source configured to be activated by combustion of a smokable material and an insulation layer of a non-glass material that is woven, knit, or both, and (ii) an aerosol-generating segment with aerosol-forming material disposed between, but physically separate from, each of the heat generation segment and the mouth end; a piece of outer wrapping material that provides an overwrap around at least a portion of the aerosol-generating segment, the heat-generation segment, and at least a portion of the smokable segment; those segments being connected together by the overwrap to provide a cigarette rod; that is connected to the cigarette rod using tipping material.

Abstract: A wig clip constituted by a plastic base frame and plastic comb body, wherein such wig clip is characterized in that: the base frame has pins or holes provided on/in the side elements of a rectangular frame member comprising front/rear elements and side elements; the comb body has multiple comb teeth provided at the front of the base, while a tab is provided at the rear of the base via a spring having a void, with holes or pins formed in/on the left side and right side of the base; and the comb body and base frame are axially joined in a rotatable manner and have such relationship that the tab can be engaged with the lock member, so that the positions of the two can be changed between an open state and clipping state.

Abstract: The present invention relates to a cosmetic composition comprising: —at least 0.1% by weight of one or more fatty-chain alkoxysilanes of formula (I): R1Si(OR2)3; in which R1 represents a linear or branched alkyl or alkenyl group, comprising from 7 to 18 carbon atoms, and R2 represents a linear or branched alkyl group comprising from 1 to 6 carbon atoms, and—one or more first surfactants chosen from anionic surfactants, and—one or more second surfactants chosen from nonionic surfactants, amphoteric surfactants and zwitterionic surfactants. The invention also relates to a cosmetic treatment process using the said composition. This composition can be used in particular for haircare and skincare.

Abstract: The present invention relates to a cosmetic composition comprising: at least 0.1% by weight of one or more fatty-chain alkoxysilanes of formula (I) below: R1Si(OR2)3 (I) in which R1 represents a linear or branched alkyl or alkenyl group, comprising from 7 to 18 carbon atoms, and R2 represents a linear or branched alkyl group comprising from 1 to 6 carbon atoms, and one or more surfactant(s) chosen from cationic surfactants and nonionic surfactants, and mixtures thereof. The invention also relates to a cosmetic treatment process using the said composition, and also to the use of the said composition for haircare and skincare.

Abstract: Process for treating keratin fibres using at least one sulfureous reducing agent, at least one cationic polymer and at least one mercaptosiloxane The present invention relates to a process for treating keratin fibres, in particular human keratin fibres such as the hair, comprising a step of applying to the keratin fibres a reducing composition (A) comprising one or more sulfureous reducing agents, optionally a step of applying to the keratin fibres an oxidizing composition (B), a step of applying a rinse-out or leave-in care composition (C), comprising one or more cationic polymers and optionally one or more amino silicones (i), it being understood that the reducing composition (A) and/or the oxidizing composition (B) and/or composition (C) comprise(s) one or more silicones (ii), other than the silicones (i), with a molecular weight of less than 10 000 and functionalized with one or more mercapto groups.

Abstract: A hair volumizing device is disclosed which creates a horizontal or vertical lift to the hair adding volume to any style. The device is positioned underneath the hair and features colors which camouflage with the hair so that the device cannot easily be seen by others. The device features a hook and loop fastener attachment mechanism on the top and bottom side of the device that grasp the hair and hold the device in its desired position. The hook and loop fastener mechanism allows the device to be inserted and removed without damaging and removing the hair.

Abstract: A hair treatment accessory for use with a hair styling apparatus includes a substrate base for mounting to a hair styling apparatus and a treatment agent disposed on the substrate base. The treatment agent is applied to one of the hair or skin of a subject during use of the hair styling apparatus. The treatment agent may include a conditioning, strengthening, repairing or revitalizing fluid. The treatment agent may include a conditioning oil. The conditioning oil may include ARGAN oil with or without silicon. The substrate base may include an irregular surface dimensioned to assist in retention of the treatment agent on the substrate base. The irregular surface may include open cells or channels. The irregular surface may be formed through a sintering process.

Abstract: A hair styling device dry and/or to form a hair strand into a curl by suctioning hair into a hair styling chamber is disclosed. The device has a main styling chamber and air flow channel parallel to the styling chamber. The device has a vacuum impeller mounted in a fan chamber. The fan chamber is aerodynamically connected to the main styling chamber and to the air flow channel. The styling chamber has a styling form, which in the depicted embodiment is a spiral for forming spiral curls. The styling form can be heated directly by a heater and the air flow channel can have heating elements to heat the air flowing through it. At the opposite end of the body from the impeller, there is a hair inlet with a mixing tip through which hair is drawn into the styling chamber around the styling form by suction of the air flow.

Abstract: A hair clip for styling hair comprising a pair of clipping elements with two to three clipping fingers having toothed ridges and/or an overlay of rubbery material, with or without holes in the center of the clipping fingers, to facilitate gripping and holding hair strands and segments of hair on the head while blow drying wet or semi-wet hair to create volume and height to the resulting hair style without the use of mousse or gels. The hair clip is configured with an elastic connecting arrangement comprised of the thumb and forefinger grips of the clipping elements held together by a torsion spring or other compatible spring at the base of the hair clip.

Abstract: A multi-color cosmetic packaging tin comprises a base, a bottom cover, a middle sleeve, a screw sleeve, a core post and an upper cover. The core post is a cylinder formed by a plurality of hollow bodies; the base is sleeved in the bottom cover; the screw sleeve is sleeved in the middle sleeve and a breach on the screw sleeve is matched with a button on the middle sleeve; the middle sleeve provided with the screw sleeve is sleeved on the base and lower clamping rings of the middle sleeve are clamped with grooves in the bottom cover; the core post is sleeved in the base and a plurality of slide blocks are formed in respective chutes in the base correspondingly; the upper cover is disposed on the middle sleeve; and grooves in the upper cover are clamped with upper clamping rings of the middle sleeve.

Abstract: A new combination lipstick, which accommodates a singular lipstick, with a concealed base. The lipstick base holds a solid wax perfume, with a unique novel airtight magnetic enclosure, when opened, to operate, twist base to reveal a mirror and perfume. To close, the cover clicks into place. Problem to be solved. To provide a solution to stop evaporation of perfume. To make a difference to lifespan of perfume. Remove the risk from old ideas of absorbent pads and cotton wool, liquid fragrance.

Abstract: A flavored toothpick and a method for preparing such, the product exhibiting improved capacity for delivering flavor and additives to the user, among other advantages. The toothpick may be prepared by pretreating the wooden substrate to increase porosity and decrease hardness. The toothpick is then immersed in a solution containing an additive, a masking agent, and a sweeting agent, where the toothpick absorbs the solution. Alternatively, the toothpick may be placed with the solution in a sealed chamber under vacuum pressure to infuse the toothpick with the additive solution and any desired flavoring.

Abstract: This invention discloses an image capturing device and a vibration dust removal method thereof. The image capturing device comprises a power supply component, an image sensor, a vibration dust removal component, a power detection module and a controller. The vibration dust removal component produces vibrations for dust removal. The power detection module detects a power value of the power supply component, and produces an electric power signal. The controller electrically connects the vibration dust removal component and the power detection module. The controller determines a maximum value of the amplitude of a vibration produced by the vibration dust removal component according to the electric power signal to control the vibration dust removal component to execute a vibration dust removal operation of the image sensor.

Abstract: A method for manufacturing integrated circuit devices. In one aspect, the invention may be a method of manufacturing integrated circuit devices comprising: supporting it semiconductor wafer in a substantially horizontal orientation; providing a transducer assembly comprising a probe having a forward portion, a rear portion and no more than one piezoelectric transducer element coupled to the rear portion; supporting the transducer assembly so that the forward portion is adjacent but spaced from a first surface of the semiconductor wafer; rotating the semiconductor wafer; applying a fluid to the first surface of the semiconductor wafer to form a film of the fluid between a portion of the forward portion and the first surface of the semiconductor wafer; and transmitting acoustical energy generated by the piezoelectric transducer element into the film of the fluid via the forward portion, the acoustical energy loosening particles from the first surface of the semiconductor wafer.

Abstract: Provided is a method for a resist removal system comprising a processing chamber and treatment liquid delivery system for single substrate processing. A primary stripping chemical is flowed in the treatment liquid delivery system at a primary temperature and flow rate; a secondary stripping chemical is injected at a first mixing point at a secondary temperature and flow rate. A tertiary stripping chemical is injected at a second mixing point at a tertiary temperature and a tertiary flow rate. The treatment liquid is dispensed onto a portion of the surface of the substrate wherein one or more of the primary temperature, secondary temperature, tertiary temperature, the primary flow rate, the secondary flow rate, and the tertiary flow rate are adjusted to meet a target strip rate and selectivity of strip over etch of silicon nitride and silicon oxide.

Abstract: The present invention is a method for cleaning a semiconductor wafer comprising the steps of cleaning the semiconductor wafer with an SC1 cleaning solution, cleaning the semiconductor wafer cleaned by the SC1 cleaning solution with hydrofluoric acid, and cleaning the semiconductor wafer cleaned by the hydrofluoric acid with ozonated water having an ozone concentration of 3 ppm or more, wherein an etching removal of the semiconductor wafer with the SC1 cleaning solution is made 0.1 to 2.0 nm, whereby a method for cleaning a semiconductor wafer in which worsening of the surface roughness of the wafer due to cleaning can be reduced and cleaning of the wafer can be carried out effectively can be provided.

Abstract: A scraper attachment for mounting onto sponges used in cleaning applications is described. The inventive attachment comprises a leading scraping edge, a serrated raised edge, a debris catch, finger grips and side flaps formed integrally as a single piece of material. A support rod integral a side flap of the inventive scraper attachment is pierced through the body of a sponge for securely mounting the inventive attachment on a sponge to by fastening to the opposite side flap. The inventive scraper attachment can be easily dismounted from the sponge for reuse and cleaning, and be used independently with any brand of sponge. The serrated raised edge serves to help break up stubborn deposits, while the debris catch collects the loosened material for convenient cleaning. Additionally, a liquid soap or detergent dispensing means is included to infuse liquid soap or detergent into the sponge.

Abstract: A a non-disinfectant formulated solution and a process for removal of soil and disease causing microorganisms from a surface/substrate. The process including contacting the surface/substrate with the formulated solution and applying a dry cloth to the surface/substrate thereafter. In one formulated cleaning solution there is at least two organic acids and sodium chloride mixed thereinto.

Abstract: A fryer cleaning tool with a sheetlike cleaning head configured to receive a sheetlike resilient fryer cleaning pad with an open-ended slitlike cavity therewithin, which pad can be slidably mounted onto the cleaning head.

Abstract: Carbon nanotube based cleaning material and associated methodology for cleaning surfaces by contacting the surface with the cleaning media. An assembly of carbon nanotubes attracts unwanted foreign matter that may be present on the surface by differential adhesion to the carbon nanotubes. Afterwards, separating the assembly of carbon nanotubes from the surface operates to carry away foreign matter with the carbon nanotubes.

Abstract: According to one embodiment, there is disclosed a method for cleaning deposits that have accumulated in a quaternary annulus chamber in a forward combustion can of a gas turbine. The method may include depositing a number of cleaning shot into the quaternary annulus chamber. The method may also include rotating the forward combustion can such that the cleaning shot tumbles within the quaternary annulus chamber.

Abstract: A method and system for removing hydrocarbon deposits from a heat exchanger tube bundle using an organic solvent. After contact with a heat exchanger tube bundle, the contaminated organic solvent may be treated to remove solids, base waters, and/or suspended hydrocarbons, and then again contacted with a heat exchanger tube bundle for the removal of hydrocarbon deposits. This allows for the removal of hydrocarbon deposits from a heat exchanger tube bundle in an efficient and environmentally friendly manner. The treatment of the heat exchanger tube bundle is also preferably performed using a method and system by which, through contact of the heat exchanger tube bundle with an organic solvent, a large percentage of hydrocarbon deposits are removed from the heat exchanger tube bundle in a short period of time.

Abstract: Provided is a method and system for stripping a resist film on a plurality of substrates in a resist removal system comprising a processing chamber coupled to a recirculation system comprising a recycle sub-system and a bypass sub-system. The recycle sub-system includes a recycle line, an inline heater, a ratio monitor and control system, and recirculation injection device. The bypass sub-system comprises a treatment liquid supply line, a first injection line, a mixing device, and a second injection line. The treatment liquid comprises a primary stripping chemical, secondary stripping chemical, tertiary stripping chemical, and one or more reactive products. One or more of the temperatures, concentrations, and/or flow rates of the recirculated treatment liquid and/or injected stripping chemicals are adjusted to meet a target strip rate and selectivity for strip over etch of silicon nitride or silicon oxide.