Abstract: A dye-sensitized solar cell including an inorganic dye containing all of Pb, Hg and S as a photo-sensitive dye and a manufacturing method of the same are provided.

Abstract: Providing a dye-sensitized solar cell having high durability and thermal resistance, and preventing elution of a platinum group catalyst from a catalytic electrode: by surface-treating the catalytic electrode with (a) a specific sulfur material having a molecular weight of 32 to 10,000 containing a sulfur atom having an oxidation number of ?2 to 0, (b) another specific sulfur material containing no sulfur atom having an oxidation number of ?2 to 0, but containing a sulfur atom having an oxidation number of +1 to +4 [with the proviso that the sulfur material (b) is such a material that a surface of the surface-treated catalyst electrode has a photoelectron peak within a binding energy range of 161 to 165 eV in an X-ray photoelectron spectrum], or (c) a mixture of the sulfur materials (a) and (b); and/or by adding the sulfur material into the electrolyte layer.

Abstract: A flexible photo-anode of dye-sensitized solar cell and a manufacturing method thereof are provided. The method includes steps of: coating zinc oxide nanoparticles on a flexible substrate to form a seed layer; immersing the flexible substrate into a first reaction solution; heating the seed layer to form a zinc oxide nanowire array; cooling the flexible substrate to the room temperature, immersing it into the second reaction solution, and stirring the second reaction solution, so that the zinc oxide nanowire array forms a cactus-like structure. Thus, the sintering and embossing processes can be prevented.

Abstract: An electrolytic capacitor includes a multilayered-capacitor-elements unit, a pair of positive electrode terminals, a negative electrode terminal, and an outer-package resin. The multilayered-capacitor-elements unit includes multiple capacitor elements of which positive electrodes are oriented oppositely to each other. The positive electrodes are connected to the positive electrode terminals, respectively, and negative electrodes of the capacitor elements are connected to the negative electrode terminal. Each of the positive electrode terminals includes a bottom section and a double-back section on which the positive electrodes of the capacitor element is disposed. The double-back section is formed by doubling over an end section extending toward the negative electrode.

Abstract: A touch panel having a shielding layer and a manufacturing method thereof is provided. A manufacturing method of the touch panel comprises the steps of forming a plurality of first conductive axes and a plurality of second conductive units on a substrate; covering the first conductive axes and the second conductive units with an insulating layer and exposing at least a partial set of second conductive units; and forming a plurality of bridging structures and a shielding layer on the insulating layer simultaneously, wherein the bridging structures electrically connect to the second conductive units. The proposed method allows the shielding layer to be formed during the formation of the bridging structures, thereby eliminating the step of forming the shielding layer separately through an independent process, which saves costs and time.

Abstract: Disclosed are a touch panel and a method of manufacturing the same. The touch panel includes a gas generation layer; a sensing electrode pattern on the gas generation layer; a gas blocking layer between the gas generation layer and the sensing electrode pattern to block a gas generated from the gas generation layer.

Abstract: A vacuum interrupter is disclosed with a fixed contact and a movable contact placed axially in a spaced apart relationship. The ceramic insulator cylinders each surround the fixed contact and the movable contact. A floating shield within the ceramic cylinders has a floating potential flange disposed between the two ceramic cylinders, and exposed to external ambient. Encapsulation for at least one contact terminal extends from a metallic end cap of the corresponding contacts to cover a respective ceramic cylinder by an overlapping distance.

Abstract: A key structure includes a base plate, a keycap, a scissors-type connecting member, and an elastic element. The scissors-type connecting member is connected with the base plate and the keycap. After the key structure is assembled and the keycap is not assembled, the elastic element provides an upward first elastic force, and the scissors-type connecting member is bent to provide a downward second elastic force. By exerting a small force on the keycap, the key structure can be triggered.

Abstract: A key switch device includes a key top; a link member that guides an elevating operation of the key top while being interlocking with the key top, the link member including a rotatable shaft and a sliding shaft that is connected to the key top; a membrane sheet that includes a contact that opens and closes in accordance with the elevating operation of the key top; a back plate; a housing that holds the rotatable shaft of the link member to the back plate; and a pushing unit that pushes the link member such that the sliding shaft moves away from the back plate.

Abstract: A key structure includes a base plate, a switch circuit board, a keycap, and an enclosure frame. The keycap includes a magnetic element. The magnetic element is disposed on an edge part of the keycap. The enclosure frame includes a magnetic coating layer. The magnetic coating layer is formed on an edge part of the enclosure frame and disposed over the magnetic element. When the keycap is depressed, the keycap is moved to trigger the switch circuit board, so that the switch circuit board generates a key signal. When the keycap is no longer depressed, the keycap is moved toward the magnetic coating layer in response to the magnetic force. The key structure can be normally operated without the need of installing an elastic rubbery element.

Abstract: An engine start switch includes a substrate on which electronic components are mounted, a case which is formed in a cylindrical shape by a peripheral wall portion surrounding the substrate and of which at least one end portion is opened, and a support member that supports the substrate in the case and extends toward the open end of the case from one end portion thereof supporting the substrate. The support member includes an outer surface that faces an inner surface of the peripheral wall portion with a gap interposed therebetween, and a gap at the one end portion of the support member is wider than a gap at other portions excluding at least the one end of the support member.

Abstract: The present disclosure provides a touch panel which at least comprises a sensing area, a conductive wire area, and earthing lines. The conductive wire area surrounds the sensing area and is electrically connected to the sensing area, and the conductive wire area comprises a first conductive wire area and a second conductive wire area. The earthing lines are set between the first conductive wire area and the second conductive wire area. The touch panel can efficiently shield signal crosstalk between the first conductive wire area and the second conductive wire area by setting the earthing lines between the first conductive wire area and the second conductive wire area, thereby reducing the influence of signal crosstalk on efficiency of the touch panel.

Abstract: A button structure is provided for installing to a casing of an electronic device having a button opening. The button structure is flexible and comprises an engaging portion, a button portion, a first alignment portion, a second alignment portion and a hollow sleeve. The engaging portion is disposed at a fixing end of the button structure. The button structure is connected to the inward side of the casing through the engaging portion. The button portion is disposed at a free end of the button structure for aligning with the button opening of the casing. The button portion has a light guiding portion for neighboring to a light emitting diode. The first alignment portion and the second alignment portion are mounted on a first protrusion portion and a second protrusion portion of the casing respectively. The hollow sleeve is disposed axially movably to the fixing sleeve of the casing.

Abstract: An operation command transmitting device includes a coupling portion coupling a bar portion to a housing so that the bar portion is movable relative to the housing along a central axis and the bar portion is allowed to be tilted around a supporting axis passing through the bar portion, and an abutment portion with which the bar portion comes into abutment when the bar portion is tilted from an untilted neutral condition. The operation command transmitting device includes an axis defining portion defining the supporting axis so that a position of the supporting axis relative to the housing does not change regardless of a tilting of the bar portion and a movement of the bar portion along the central axis.

Abstract: A keyboard device with a luminous key is provided. The keyboard device includes at least one luminous key, a light-emitting element, and a light shade, and a membrane switch circuit module. When the membrane switch circuit member is triggered by the at least one luminous key, the membrane switch circuit member generates at least one luminous key signal. The light-emitting element is used for emitting a light beam. The light shade is used for shading the light beam. Moreover, the light shade and the membrane switch circuit member are integrally formed with each other. Consequently, the light shade can be securely fixed on the membrane switch circuit module.

Abstract: A luminous keyboard device includes a keypad module, a supporting plate, a flexible circuit board, a light-emitting element, a reflective layer, and a light guide plate. The supporting plate includes plural receiving parts. The flexible circuit board is contacted with the plural receiving parts to form plural bent structures. The light-emitting element and the reflective layer are disposed on the flexible circuit board. When a light beam is emitted by the light-emitting element, the portion of the light beam that is not directed to the light guide plate is reflected back to the light guide plate by the reflective layer on the plural bent structures. Consequently, the amount of light introduced into the light guide plate increases.

Abstract: A rotary switch module includes a first stationary contact, a second stationary contact, and a movable contact for making an electrical connection between the first stationary contact and the second stationary contact. A rotary actuator is provided for rotating the movable contact, the rotary actuator having on its surface a first indication indicating an open position of the switch, and a second indication indicating a closed position of the switch. A first window indicates the first indication, and a second window separate from the first window indicates the second indication.

Abstract: A system includes a switch operation unit configured to be mechanically operated to be in on or off state; a detecting unit configured to detect whether the switch operation unit is in on or off state; a first mechanism configured to close electrical contacts of at least one circuit when the switch operation unit is operated to be in on state; a second mechanism configured to maintain the contacts in closed state and switch the contacts to open state in response to electrical signals of off, on, and, off while the switch operation unit is in off state when the switch operation unit is operated to be in off state; and a first unit configured to notify a user of an abnormal state when the contacts are in the closed state and the switch operation unit is in off state at start of control.

Abstract: A switch unit includes an operating component, and a base portion that supports the operating component capable of being pressed in criss-cross directions. The base portion is provided with a plurality of T-shaped regulating components that are formed in positions in directions sandwiched between the criss-cross directions. Each of the regulating components is provided with a leg portion that extends from the base portion towards the operating component, and an abutting portion that extends from an end portion of the leg portion along a line that connects together predetermined positions of the criss-cross directions that are located on both sides of each regulating component.

Abstract: A switch for multi-pole direct current service independent of polarity includes a plurality of switching chambers. Each chamber includes a double interrupter having two separate fixed contacts with a first contact area, a movable contact piece with two second contact areas, each for creating a connection between the contact areas in an ON state and for separating the contact areas in an OFF state, and at least two quenching devices for quenching arcs occurring when the OFF state is brought about. The switch also includes magnets for exerting a magnetic field in an area of the contact areas to exert a magnetic force on the arcs and drive the arcs, independent of their current direction, in the direction of one of the erasing devices. The contact pieces are disposed with the second contact areas essentially in a line perpendicular to a direction of motion of the arcs.

Abstract: A gas insulated switchgear includes a vacuum interrupter having a movable contact and a fixed contact in vacuum. The movable contact is on one side of a movable conductor that passes through a bellows. An insulating rod is coupled to the other side of the movable conductor that passes through the bellows. The insulating rod and the other side of the movable conductor are placed in an insulator. The vacuum interrupter, the insulating rod, and the insulator are disposed in a gas tank. An operating mechanism is disposed on a movable side end portion of the gas tank and connected to the insulating rod. An inner circumferential side space of the bellows, an internal space of the insulator, and an internal space of the operating box are in communication with each other; and pressure in these spaces is lower than pressure in the gas tank.

Abstract: In an operating element for a furniture control for controlling an electrically adjustable piece of furniture, the operating element includes a flat sensor module with a plurality of proximity-sensitive sensor surfaces arranged on the sensor module. An operating panel covers the plurality of sensor surfaces. A set of switching surfaces is marked on the operating panel. A control module is designed for detecting an actuation of one of the switching surfaces based on sensor signals delivered by the sensor surfaces and for generating an actuation signal for the furniture control based on a detected actuation. The sensor module and the control module are arranged in a housing of the operating element, wherein the operating panel forms a cover of the housing.

Abstract: The present invention provides a sealing type automotive relay with a safety device in the field of automotive relays, which addresses the problems of inconvenient fuse replacement and poor sealing property of the fuse in the existing relays. The sealing type automotive relay with a safety device comprises a relay main body and a safety device. The relay main body includes a base, a casing and a weak current system and a strong current system located on the base. The casing is fixedly connected with the base. The safety device includes two fuse sockets positioned on the base and a fuse inserted between the said two fuse sockets. The top of the casing is provided with a fuse inserting hole corresponding to the said two fuse sockets. The fuse is inserted into the inserting hole. A sealing cover is provided at the port of the fuse inserting hole.

Abstract: A two-pole circuit breaker has an internal rotating trip bar that causes a second pole to trip (i.e., interrupt power) in response to a first pole tripping. A first pole may trip when the two-pole circuit breaker senses an electrical fault in the first pole. The tripping of the second pole in response to the first pole tripping may be referred to as common tripping. The trip bar may be connected to a tripping mechanism in each pole and may have interface features that result in less force required to trip the second pole, greater trip bar design tolerances, and/or ultimately more reliable common tripping. Methods of assembling a two-pole circuit breaker are also provided, as are other aspects.

Abstract: A service disconnect assembly includes a receiver assembly having a fuse receptacle that is configured to receive a fuse therein. The service disconnect assembly includes a lockout device having a latch. The latch is actuatable between a latched position and an unlatched position. The latch cooperates with the receiver assembly in the latched position such that the lockout device cannot be removed from the receiver assembly. The latch is configured to be locked in the latched position.

Abstract: The present invention pertains to a method and apparatus for generating a beam of charged particles, accelerating the charged particles toward a first side of a layer of X-ray target material configured to emit Bremsstrahlung radiation through a second side, receiving the Bremsstrahlung radiation on a first face of an additional layer of a different X-ray target material configured to emit characteristic fluorescence X-rays with energy above 20 keV through a second face, wherein the additional layer of X-ray target material is located within 3 mm of the second side of the first layer of material. The first X-ray target material can have an atomic number greater than 21.

Abstract: An x-ray tube has a backscatter electron trap to prevent extra focal radiation caused by backscattered electrons from the focal spot from passing through the beam exit window to an exterior of the x-ray tube. The backscatter electron trap has a surface that faces the x-ray beam in the x-ray tube. No portion of that surface is visible both from an arbitrary point in the x-ray beam outside of the x-ray tube and from an arbitrary point at the focal spot.

Abstract: An ion source is disclosed which utilizes independently powered electrodes that are isolated with a series of insulators. The ion source comprises an anode electrode with a hollow interior, where the anode is disposed between a cathode and an anti-cathode. A magnet or electro-magnet imposes a magnetic field in an axial direction through the bore of the anode. Gas is introduced into the anode area at a controllable pressure. The ion source includes a first voltage differential between the anode and cathode for the production of plasma and a second voltage differential between the anode and the anti-cathode for extraction of ions from the plasma, forming an ion beam, which is preferably of a narrow diameter at low beam energy. In particular, the voltage differential between the anti-cathode and anode is adjusted to control the initial beam divergence of extracted ions. An optional focus electrode with an independent power supply further focuses the ion beam.

Abstract: An ion beam manipulator including a suppression electrode, a ground electrode connected to the suppression electrode in a parallel, spaced-apart relationship therewith by three electrically insulating connectors, the connectors being spaced 120 degrees apart from one another around a circumference of the suppression electrode and the ground electrode, a plurality of linkages extending from the electrically insulating connectors, at least one of the linkages including a pair of parallel support arms connected at a first end to a corresponding one of the electrically insulating connecters by a first pair of universal joints and connected at a second end to a bracket by a second pair of universal joints, and a drive shaft extending from the bracket, the drive shaft coupled to an actuator configured to extend and retract the drive shaft along a longitudinal axis of the drive shaft.

Abstract: Methods and systems for controlling temperatures in plasma processing chamber via pulsed application of heating power and pulsed application of cooling power. In an embodiment, temperature control is based at least in part on a feedforward control signal derived from a plasma power input into the processing chamber. In further embodiments, fluid levels in each of a hot and cold reservoir coupled to the temperature controlled component are maintained in part by a passive leveling pipe coupling the two reservoirs. In another embodiment, digital heat transfer fluid flow control valves are opened with pulse widths dependent on a heating/cooling duty cycle value and a proportioning cycle having a duration that has been found to provide good temperature control performance.

Abstract: A composite charged particle beam apparatus comprises an FIB column having an ion beam irradiation axis and an SEM column having an electron beam irradiation axis, the FIB and SEM columns being arranged relative to one another so that the beam irradition axes intersect with each other substantially at a right angle. A sample stage is provided for mounting a sample, and a detector detects secondary particles generated from the sample when irradiated with the ion beam or the electron beam. An observation image formation portion forms an FIB image and an SEM image based on a detection signal of the detector. A display portion displays the FIB image and the SEM image in which a horizontal direction of the sample in the FIB image and said horizontal direction of the sample in the SEM image are the same thereby making it possible for an operator to easily comprehend the positional relationship of the observation image of the sample.

Abstract: The present disclosure is directed to a method of performing SEM overlay metrology with scan direction substantially aligned with or parallel to feature placement or patterning of overlay target structures. By scanning target structures in the same or similar direction to the feature placement, blurring at the edges of interest is avoided and a line-to-line or edge-to-edge offset between pattern elements is less susceptible to error from blurring at scanned edges of interest. For example, at least two linear pattern elements corresponding to at least two sample layers may be scanned along or parallel to the direction of feature placement (i.e., along or parallel to long edges of the pattern elements).

Abstract: An electromagnetic electron reflector, an ion implanter having an electromagnetic reflector and a method of implantation using the ion implanter. The electromagnetic electron reflector includes a frame; permanent magnets within the frame; a center aperture within the frame and electrically isolated by first gaps from the frame and the permanent magnets and fixed in position by dielectric feed throughs, first cup shields integrally formed on the top and bottom edges of the center aperture, the dielectric feed throughs nested within the first cup shields; second cup shields integrally formed on inside surfaces of the top and bottom of the frame, the second cup shields nested within respective first cup shields; entrance and exit apertures attached to the frame and an electrical conductor passing through at least one of the dielectric feed throughs and electrically contacting the center aperture.

Abstract: A plasma reactor and method for improved gas injection for an inductive plasma source for dry strip plasma processing are disclosed. According to embodiments of the present disclosure, gas is fed into a plasma chamber through a gas injection channel located adjacent to the side wall of the plasma chamber, rather than from the center, so that the process gas enters the plasma chamber in a close proximity to the induction coil. In particular embodiments, the process gas that enters the chamber is forced to pass through a reactive volume or active region adjacent the induction coil where efficient heating of electrons occurs, providing increased efficiency of the reactor by improving process gas flow and confinement in the heating area.

Abstract: A method for processing substrate in a processing chamber, which has at least one plasma generating source and a gas source for providing process gas into the chamber, is provided. The method includes exciting the plasma generating source with an RF signal having RF frequency. The method further includes pulsing the gas source, using at least a first gas pulsing frequency, such that a first process gas is flowed into the chamber during a first portion of a gas pulsing period and a second process gas is flowed into the chamber during a second portion of the gas pulsing period, which is associated with the first gas pulsing frequency. The second process gas has a lower reactant-gas-to-inert-gas ratio relative to a reactant-gas-to-inert-gas ratio of the first process gas. The second process gas is formed by removing at least a portion of a reactant gas flow from the first process gas.

Abstract: A mass spectrometer for analyzing a sample utilizing an ion trap comprises an entrance end cap defining an entrance aperture configured to receive the sample entering the ion trap; a ring electrode defining a ring cavity configured to generate, based on a radio frequency (RF) voltage applied to the ring electrode, an electric field configured to trap the sample received through the entrance aperture; an exit end cap defining an exit aperture configured to receive sample ions exiting the ion trap; and an end cap controller configured to generate a bias control voltage for applying a DC bias potential to at least one of the entrance end or the exit end cap, wherein a value of the bias control voltage is based on an operational parameter of the mass spectrometer.

Abstract: A detection system and a method for detecting ions which have been separated in a time-of-flight (TOF) mass analyzer, comprising an amplifying arrangement for converting ions into packets of secondary particles and amplifying the packets of secondary particles, wherein the amplifying arrangement is arranged so that each packet of secondary particles produces at least a first output and a second output separated in time and so that during the delay between producing the first and second output the first output produced by a packet of secondary particles is used for modulating the second output produced by the same packet. An increased dynamic range of detection and protection of the detection system against intense ion pulses is thereby provided.

Abstract: A sample plate handling system for a time-of-flight mass spectrometer includes a sample plate for supporting samples for analysis. A first sample plate receiver is positioned in a first chamber. First and second sample plate receivers are positioned in a second chamber. A first gate valve isolates the first and second chambers when closed and allows transfer of sample plates between the first sample plate receiver in the first chamber and one of the first and second sample plate receivers in the second chamber when the first gate valve is open. A first linear extender pushes a sample plate from the first sample plate receiver in the first chamber to the first sample plate receiver positioned in the second chamber, and then retracts a second sample plate from the second sample plate receiver positioned in the second chamber and transports the second sample plate to the first sample plate receiver in the first chamber. A first sample plate receiver is positioned in a third chamber.

Abstract: Provided is a technique of analyzing particles in real time while collecting and condensing the particles continuously. Gas and/or particles as a detection target substance that are attached to an authentication target 2 are removed by air flow from a blowing region 5. The removed sample is sucked and is condensed and sampled at a sampling region 10, and ions of the sample are generated at an ion source 21 and are then subjected to mass analysis at a mass analysis region 23. Determination of the obtained mass spectrum is made as to the presence or not of a mass spectrum derived from the detection target substance, and a monitor 27 displays a result thereof. Thereby, the detection target substance attached to the authentication target 2 can be detected continuously in real time, promptly and with a less error rate.

Abstract: Apparatuses and methods for performing mass analysis are disclosed. One such apparatus may include an ion trap device. The ion trap device may comprise a first end cap having a first aperture and a second end cap having a second aperture, wherein the first aperture and the second aperture may define an ejection axis. The ion trap device may also comprise a ring electrode substantially coaxially aligned between the first and second end caps. The ring electrode may include an opening extending along a radial direction of the ring electrode, wherein the radial direction is substantially perpendicular to the ejection axis. One such method may include ionizing a sample in an ion trap through an opening separating at least part of first and second ring sections of the ion trap and detecting ions ejected though an aperture on an end cap of the ion trap.

Abstract: An ion source for chemical ionization of analytes at atmospheric pressure with a non-radioactive electron source in a vacuum chamber, includes, a reaction chamber at atmospheric pressure, and a window with an electron-permeable and essentially gas-impermeable membrane in between. The window may be a structured window membrane, i.e. a window membrane with a structured form comprising a multitude of structural elements, between the reaction chamber and the vacuum chamber.

Abstract: A vacuum analyzer including a vacuum reaction chamber; a gas source; a flow rate-restricting resistance tube connected to the reaction chamber; a pressure detection device disposed upstream from the flow rate-restricting resistance tube; a flow rate adjustment for adjusting the amount of gas exiting the flow rate-restricting resistance tube so that the detected value from the pressure detection device reaches a prescribed value; a split flow path that is provided with a splitter resistance tube and divides the gas at a location between the flow rate adjustment and the pressure detection device; a passage open to the atmosphere which divides the gas flowing from upstream at a location between the flow rate adjustment and the pressure detection device and releases the divided gas to the atmosphere; and a valve provided in the passage open to the atmosphere. Therein, the split flow path is connected immediately downstream from the valve.

Abstract: A Time of Flight mass spectrometer is disclosed wherein a fifth order spatial focusing device is provided. The device which may comprise an additional stage in the source region of the Time of Flight mass analyzer is arranged to introduce a non-zero fifth order spatial focusing term so that the combined effect of first, third and fifth order spatial focusing terms results in a reduction in the spread of ion arrival times ?T of ions arriving at the ion detector.

Abstract: A discharge lamp (20) for providing visible and/or infrared radiation comprising a stationary light transmitting bulb (21) filled with a composition that emits light when in plasma state, a radiofrequency source (41) having an output terminal (44) radiating a radiofrequency field for ionizing and heating the composition in the bulb to bring it in a plasma state (35), and a dielectric rod (22) aligned with the output terminal and positioned between the output terminal (44) and the bulb (21) acting as dielectric waveguide for the radiofrequency field.

Abstract: A light source device comprising a filament showing high electric power-to-visible light conversion efficiency is provided. The light source device of the present invention comprises a translucent gastight container, a filament disposed in the translucent gastight container, and a lead wire for supplying an electric current to the filament. The filament comprises a substrate formed from a metal material and a visible light-absorbing film covering the substrate. The visible light-absorbing film is transparent to lights of infrared region. The reflectance of the substrate for visible lights is thereby made low, and the reflectance of the substrate for infrared lights is thereby made high. Therefore, radiation of infrared lights is suppressed, and visible luminous efficiency can be enhanced.

Abstract: DIW in an excessively cooled state is supplied as a solidification liquid to a substrate W, and a solidified material of the DIW is formed by a landing impact on the substrate W. This makes the use of a gaseous refrigerant necessary to form a solidified material unnecessary, eliminates the need for a facility to generate the gaseous refrigerant, shortens a processing time and further enables running cost and the like to be suppressed.

Abstract: A low k dielectric material with enhanced electrical and mechanical properties is provided which, in some applications, can also reduce the capacitance of a semiconductor device. The low k dielectric material includes CNT nanotubes that are randomly dispersed within a low k dielectric material matrix. The low k dielectric material can be used in a variety of electronic devices including, for example, as an insulator layer within a back end of line interconnect structure.

Abstract: Disclosed herein are methods of depositing a SiN film having a reduced wet etch rate. The methods may include adsorbing a film precursor comprising Si onto a semiconductor substrate in a processing chamber to form an adsorption-limited layer of precursor, and then removing unadsorbed precursor from the volume surrounding the adsorbed precursor. The adsorbed precursor may then be reacted by exposing it to a plasma comprising N-containing ions and/or radicals to form a SiN film layer on the substrate, and the SiN film layer may then be densified by exposing it to a He plasma. The foregoing steps may then be repeated to form another densified SiN film layer on the substrate. Also disclosed herein are apparatuses for depositing SiN films having reduced wet etch rates on semiconductor substrates which employ the foregoing techniques.

Abstract: Methods of depositing conformal aluminum nitride films on semiconductor substrates are provided. Disclosed methods involve (a) exposing a substrate to an aluminum-containing precursor, (b) purging the aluminum-containing precursor for a duration insufficient to remove substantially all of the aluminum-containing precursor in gas phase, (c) exposing the substrate to a nitrogen-containing precursor to form aluminum nitride, (d) purging the nitrogen-containing precursor, and (e) repeating (a) through (d). Increased growth rate and 100% step coverage and conformality are attained.

Abstract: The present invention describes a process to modify a top portion of a porous ultra low-k (ULK) material in order to maximize porosity filling with a filling material that initially displayed low compatibility with the ULK material. Surface modification is achieved by a plasma treatment, enhancing the compatibility between the ULK surface and the filling material. The invention obtains high filling levels with minimum modification to the ULK material, as only a thin top portion is modified without significant pore sealing.