Patents Issued in June 13, 2017
  • Patent number: 9679709
    Abstract: A device is provided for use with a circuit breaker that includes an actuator adapted to move in a first direction in response to an over-current and/or a short circuit condition, and a circuit breaker accessory that includes an actuation mechanism. The device includes a linkage having a first end adapted to be coupled to the actuator and a second end adapted to be disposed adjacent the actuation mechanism. Movement of the actuator in the first direction allows the linkage to move in a second direction different from the first direction from a first position to a second position to activate the circuit breaker accessory. Numerous other aspects are provided.
    Type: Grant
    Filed: May 2, 2012
    Date of Patent: June 13, 2017
    Assignee: SIEMENS AKTIENGESELLSCHAFT
    Inventor: Jan Rojko
  • Patent number: 9679710
    Abstract: A voltage regulator comprising a tap selector switch, a switching module and a switching module controller. The tap selector can comprise stationary contacts and movable contacts which can be adjusted for regulating the voltage between a source and a load. The switching module can comprise first and second bypass switches controlled by a bypass actuator and a non-arcing switch, such as a vacuum interrupter, controlled by an interrupter actuator. The switching module controller can be configured to perform a tap change operation through a series of steps that involve actuating a bypass switch and the non-arcing switch. In one example, the switching module controller can wait a predetermined amount of time before proceeding with each step of the tap change operation. In other examples, the switching module controller can receive signals or measurements from the system before proceeding with each step of the tap change operation.
    Type: Grant
    Filed: May 4, 2016
    Date of Patent: June 13, 2017
    Assignee: COOPER TECHNOLOGIES COMPANY
    Inventor: Jonathan Michael Schaar
  • Patent number: 9679711
    Abstract: A portable programmable display and control module which serves as a basic light switch and a digital custom light switch display. The control module can be removed from the electrical box when power fails to provide for an emergency flashlight. The control module can be provided with a mini-hard drive and microprocessor in order to be able to download digital content and display it on a lighted touch screen. The control module can also be controlled and programmed wirelessly by a computer or smart phone to control light switches, outlets, and other devices. The control module can also include a built-in solar cell to charge the module for prolonged power failures. A battery back-up can also be provided.
    Type: Grant
    Filed: March 6, 2015
    Date of Patent: June 13, 2017
    Inventor: William J. Rintz
  • Patent number: 9679712
    Abstract: A switch assembly and method of using same comprises a switch assembly for operating a power take off unit on a lawn tractor, the switch assembly further includes a housing supporting a selectively locatable activation knob facilitated by an actuation assembly and an internal switch arrangement coupled to a printed circuit board within the housing. The internal switch arrangement comprises a microcontroller and switch for determining the relative position of the selectively locatable activation knob and provides a digital output signal for enabling or disabling a power take off unit based on the digital output signal.
    Type: Grant
    Filed: October 16, 2013
    Date of Patent: June 13, 2017
    Assignee: Delta Systems, Inc.
    Inventors: Tanios Elias Nohra, Isaac D. Kirbawy
  • Patent number: 9679713
    Abstract: A key switch is disclosed. The key switch includes an axis, a pressure sensor layer, an axis component, and a key cap. The axis support includes a first opening. The pressure sensor layer is made of a pressure-sensitive electronic material and disposed on an upper surface of the axis support. The axis component is disposed in the first opening and vertically movable with respect to the axis support and the pressure sensor layer. The keycap is mounted on the axis component and includes a lower surface facing the upper surface of the axis support. When the keycap is depressed, the lower surface of the keycap depresses the pressure sensor layer and an electronic property of the pressure sensor layer varies. An analog pressure detection system including the key switch is also disclosed.
    Type: Grant
    Filed: May 26, 2015
    Date of Patent: June 13, 2017
    Assignee: Uneo Incorporated
    Inventors: Chih-Sheng Hou, Cheng-Yen Tsai, Chia-Hung Chou
  • Patent number: 9679714
    Abstract: A multi-use switch for an electronic device includes a pressing piece configured to be pressed by an external force, a number of conducting elements located on the pressing piece and electrically coupled to a number of functional circuits of the electronic device one-to-one, and at least one coupling element configured to be electrically coupled to the conducting elements. The multi-use switch is partially received inside a housing. The coupling element is fixed to the housing. The pressing piece moves along an axis to move the conducting elements relative to the coupling element. The coupling element completes an electric circuit of one of the functional circuits when the corresponding conducting element is moved to electrically couple to the at least one coupling element. One electric circuit of the functional circuits is able to be completed at any one time.
    Type: Grant
    Filed: August 6, 2015
    Date of Patent: June 13, 2017
    Assignees: Fu Tai Hua Industry (Shenzhen) Co., Ltd., HON HAI PRECISION INDUSTRY CO., LTD.
    Inventor: Zhou Chen
  • Patent number: 9679715
    Abstract: A vehicle switch device has a selection switch having an operation part that, when operated, selects at least one of a plurality of driving target vehicle components mounted on a vehicle, and an operation switch that is separately operable from the selection switch, and drives the selected driving target vehicle component when operated. The operation switch has a single holding operation knob that swings so as to have a front portion thereof pushed down or pulled up. The single holding operation knob is structured to allow a palm of a hand to be placed on an upper face thereof, and fingers of the hand other than a thumb to be placed on the front portion. The operation part is disposed on a side face of the holding operation knob.
    Type: Grant
    Filed: July 28, 2015
    Date of Patent: June 13, 2017
    Assignee: OMRON AUTOMOTIVE ELECTRONICS CO., LTD.
    Inventors: Koji Mori, Mamoru Minamide
  • Patent number: 9679716
    Abstract: An electromechanical switching device for providing an electrical connection between terminals as a function of a switched state based on a manual activation, where the switching device has a rotatably mounted activation unit that can be activated manually and a switching unit which is connectable to the activation unit, the switching unit provides pat least two electrical terminals and electrically interconnects them as a function of the electrical switched state, for which purpose the switching unit has at least one switching element slideably mounted in a longitudinal direction of the switching device, the switching device has a coupling unit that mechanically interconnects the activation and switching units and that is configured to transmit the manual activation of the activation unit to the switching element of the switching unit, and where the electromechanical switching device is formed in a modular manner via at least the activation, coupling unit and switching units.
    Type: Grant
    Filed: December 11, 2015
    Date of Patent: June 13, 2017
    Assignee: Siemens Aktiengesellschaft
    Inventors: Jean Jacques Faurie, Khalil Hadir
  • Patent number: 9679717
    Abstract: A switch device includes a knob member rotatably fitted to and supported by a middle serving as a fixing portion, and a rotor member integrally mounted to the knob member and rotatably supported by the middle. A rotation regulating portion that regulates a rotatable range of the knob member with respect to the middle and rotation sliding surfaces in a rotational axis direction of the middle and the knob member are collectively formed.
    Type: Grant
    Filed: February 25, 2016
    Date of Patent: June 13, 2017
    Assignee: KABUSHIKI KAISHA TOKAI RIKA DENKI SEISAKUSHO
    Inventors: Nobuyuki Ishigure, Yoshio Chiba, Akio Nishiyama
  • Patent number: 9679718
    Abstract: A safety device is provided for use in conjunction with a knife switch disposed in a switch well. The safety device comprises an elongate base member having a head end and an insertion portion extending distally away therefrom. The insertion portion is configured for at least partial insertion into the switch well between the knife switch and an internal wall of the switch well when the knife switch is in its open configuration. The device further comprises a slot formed in at least a portion of the insertion portion of the base member. The slot is sized and positioned to receive at least a portion of the blade when the knife switch is in its open configuration and the insertion portion is inserted into the switch well between the knife switch and the internal wall.
    Type: Grant
    Filed: August 18, 2015
    Date of Patent: June 13, 2017
    Assignee: Huntington Ingalls Incorporated
    Inventor: Kelly R. Kubisiak
  • Patent number: 9679719
    Abstract: An arc extinguishing contact assembly for a circuit breaker assembly is provided. The arc extinguishing contact assembly includes a fixed contact assembly, a movable contact assembly and an arc extinguishing assembly. The fixed contact assembly includes a fixed arc contact assembly, a fixed main contact assembly, and a number of movable, intermediate arc contact assemblies. The movable contact assembly includes a movable arc contact assembly and a movable main contact assembly. The arc extinguishing assembly is structured to extinguish an arc generated as the movable contact assembly moves between an open, first position and a closed, second position.
    Type: Grant
    Filed: February 9, 2016
    Date of Patent: June 13, 2017
    Assignee: Eaton Corporation
    Inventors: Koustubh Dnyandeo Ashtekar, James Jeffery Benke
  • Patent number: 9679720
    Abstract: A circuit interrupter including an arc extinguisher which functions to arrest an arc that develops between electrical contacts. The circuit interrupter includes a permanent magnet coupled at opposite ends to two magnetically permeable pole pieces that are configured to drive or urge an arc into toward an arc extinguisher. The device allows for arc motivation due to the magnetic field without requiring the use of electrical power and allows for a rugged, light-weight design.
    Type: Grant
    Filed: May 6, 2016
    Date of Patent: June 13, 2017
    Assignee: Carling Technologies, Inc.
    Inventor: James Bugryn
  • Patent number: 9679721
    Abstract: A high voltage/high current air break switch, the switch including a support frame and a blade pivotally supported by the support frame, so as to be pivotable relative to the support frame. The blade includes a load interrupter between a blade support and the distal end of the blade. And a method of operating an air break electrical switch with a swinging blade mounted on a support and having blade contacts brought into and out of engagement with a terminal with terminal contacts, and a load interrupter with contacts in a vacuum bottle, the method steps comprising turning the support to move the blade relative to the terminal, then turning the support to move the vacuum bottle electrical contacts and to move the blade contacts relative to the terminal contacts.
    Type: Grant
    Filed: August 30, 2013
    Date of Patent: June 13, 2017
    Assignee: Hubbell Incorporated
    Inventors: David A. Rhein, Andrew Kellerman
  • Patent number: 9679722
    Abstract: There is provided an interlock apparatus of a vacuum circuit breaker for adjusting withdrawal of a circuit breaker main body, which is installed in a truck and moves to a connected position in which the circuit breaker main body is connected to a cradle and moves to a disconnected position in which the circuit breaker main body is separated from the cradle within the cradle, to outside of the cradle, includes: a lift including a rotation adjusting plate provided on an upper portion thereof, and moving forwardly and backwardly such that the rotation adjusting plate is inserted into the interior of the cradle or separated from the cradle; and an interlock plate provided within the cradle and rotating according to movement of the rotation adjusting plate so as to be tightly attached to the truck or released from the tightly attached state to thereby adjust withdrawal of the circuit breaker main body to the outside of the cradle.
    Type: Grant
    Filed: June 23, 2015
    Date of Patent: June 13, 2017
    Assignee: LSIS CO., LTD.
    Inventors: Seung Hwan Mun, Dae Soo Han, Kil Young Ahn, Seung Pil Yang
  • Patent number: 9679723
    Abstract: A contact assembly for a vacuum switching apparatus includes a contact member and a reinforcing member adapted to structurally reinforce the contact member. The contact member includes first and second opposing sides, and a contact thickness. The reinforcing member has a reinforcement thickness, which is less than the contact thickness. The contact member is made from a first material having a first coefficient of thermal expansion, and the reinforcing member is made from a second different material having a second coefficient of thermal expansion. The first coefficient of thermal expansion is substantially the same as the second coefficient of thermal expansion.
    Type: Grant
    Filed: May 6, 2016
    Date of Patent: June 13, 2017
    Assignee: EATON CORPORATION
    Inventors: Louis G. Campbell, Benjamin A. Rosenkrans, Stephen D. Mayo
  • Patent number: 9679724
    Abstract: A contact assembly for an electrical component includes: a bus member; and a switching assembly structured to move between first and second positions. The switching assembly includes: a stationary contact extending from the bus member, a movable contact engaging the stationary contact when the switching assembly is in the first position and disengaging the stationary contact when the switching assembly moves toward the second position, and a switching device coupled to the bus member. When the switching assembly is in the first position, the switching device and the stationary contact are electrically connected in parallel with the bus member and the movable contact. When the switching assembly moves from the first position toward the second position, the switching device disconnects power after the movable contact disengages the stationary contact in order that electrical disconnection between the bus member and the movable contact occurs within the switching device.
    Type: Grant
    Filed: July 13, 2015
    Date of Patent: June 13, 2017
    Assignee: EATON CORPORATION
    Inventors: Michael Howard Abrahamsen, Daniel Garett Sims, Matthew Stephen Weidemeier, Robert Kirkland Smith, Hongbin Wang
  • Patent number: 9679725
    Abstract: The present invention relates to a magnetic switch, and more particularly, a magnetic switch capable of preventing degradation of breaking efficiency by utilizing magnetic force to the utmost, in a manner of matching contact centers of fixed and movable cores. A magnetic switch according to one embodiment includes a bobbin provided with a cylindrical body and a plurality of flanges and having a coil wound on an outer circumferential surface thereof, a fixed core fixed to an inside of the cylindrical body with a predetermined spaced interval from the cylindrical body, and a movable core slidably installed in the cylindrical body and contactable with or separated from the fixed core, wherein a guide portion protrudes from a lower portion of the cylindrical body along an inner circumferential surface of the cylindrical body, such that the movable core can linearly move along a central axis of the fixed core.
    Type: Grant
    Filed: December 30, 2015
    Date of Patent: June 13, 2017
    Assignee: LSIS CO., LTD.
    Inventor: Jinhee Park
  • Patent number: 9679726
    Abstract: An anti-interference switch signal transmission circuit, in which a changeover switch is used at a signal terminal, is disclosed. A normally closed contact is connected to DC?, a normally open contact is connected to DC+, and a common contact is connected to a switch signal acquisition circuit. When no signal exists, DC? is provided to a positive input terminal of the switch signal acquisition circuit via the normally closed contact. Since a negative input terminal of the switch signal acquisition circuit is also connected to DC?, even if interference is caused, no false signal is generated. When a signal exists, the position of the changeover switch changes and DC+ is connected to DC? via the closed normally open contact through the switch signal acquisition circuit thus a loop is formed, so that the signal can be detected.
    Type: Grant
    Filed: August 23, 2013
    Date of Patent: June 13, 2017
    Assignee: Beijing Sifang Automation Co., Ltd
    Inventors: Gang Xu, Tao Zhang, An Liu, Qiurong Chen, Wenhao Shi
  • Patent number: 9679727
    Abstract: A switch assembly (1) for switching electric circuits comprises a contributory switch (3), a main switch (2), and a flexible element (4). The contributory switch (3) and the main switch (2) are connected electrically in series, the contributory switch (3) and the main switch (4) each comprise at least one movable contact and the flexible element is connected to one movable contact of the contributory switch, a first contact (5a), and one movable contact of the main switch, a second contact (6a).
    Type: Grant
    Filed: December 28, 2012
    Date of Patent: June 13, 2017
    Assignee: ABB OY
    Inventors: Marko Takala, Jari Elomaa, Matti Kähkipuro, Veikko Puumala, Lauri Kettunen, Tommi Forsberg, Pertti Arjanne, Mikko Helminen, Mikko Vehkaperä
  • Patent number: 9679728
    Abstract: Methods, apparatus, and articles of manufacture to regulate relay coil switching are disclosed. A disclosed example method of regulating switching times of a relay having a pair of contacts to selectively and electrically couple an analog alternating current (AC) power source and a load includes forming a digital pulse train representative of an AC signal at the load, determining a first value corresponding to a representative pulse width of the digital pulse train, providing a first relay switching signal to the relay at a first time relative to a zero crossing of the AC signal, selecting a second time for providing a second relay switching signal to the relay based the first value and a second value representative of the width of a first pulse of the digital pulse train associated with the first relay switching signal at the first time, and providing the second relay switching signal to the relay at the second time.
    Type: Grant
    Filed: August 6, 2014
    Date of Patent: June 13, 2017
    Assignee: Whirlpool Corporation
    Inventors: Erik Peter Oosterwal, Peter J. Richmond
  • Patent number: 9679729
    Abstract: A low-profile electrical contactor is provided comprising at least one electrical contact switch, an actuation means and a current determining device. The or each electrical contact switch has first and second electrical terminals, an electrically-conductive busbar in electrical communication with the first electrical terminal, the busbar having two end faces between which a current can flow in a flow direction and at least two flat sides in parallel with the flow direction, at least one fixed electrical contact which is attached to the busbar, an electrically-conductive moveable arm in electrical communication with the second electrical terminal, and at least one moveable electrical contact which is attached to the electrically-conductive moveable arm to form an electrical contact set with the fixed electrical contact. The actuation means can actuate the electrically-conductive moveable arm of the or each electrical contact switch between open and closed conditions.
    Type: Grant
    Filed: October 17, 2016
    Date of Patent: June 13, 2017
    Assignee: JOHNSON ELECTRIC S.A.
    Inventor: Richard Anthony Connell
  • Patent number: 9679730
    Abstract: A circuit interrupter includes a first terminal structured to electrically connect to a power source, a second terminal structured to electrically connect to a load, separable contacts electrically connected between the first terminal and the second terminal and being moveable between a closed position and an open position, an operating mechanism structured to trip open the separable contacts, an electronic trip unit structured to detect a fault condition based on power flowing between the first and second terminals and to retrieve diagnostic or setting information associated with the circuit interrupter, and a wireless unit structured to provide the setting or diagnostic information associated with the circuit interrupter to an external device via a wireless communication protocol.
    Type: Grant
    Filed: March 30, 2015
    Date of Patent: June 13, 2017
    Assignee: EATON CORPORATION
    Inventors: Patrick Thomas Walsh, Theodore James Miller
  • Patent number: 9679731
    Abstract: In one embodiment, there is a fault interrupter device comprising at least one sensor comprising at least one first transformer having at least one outer region forming an outer periphery and at least one inner hollow region. There is also at least one second transformer that is disposed in the inner hollow region of the at least one first transformer. The transformers can be substantially circular in configuration, and more particularly, ring shaped. In another embodiment there is a rotatable latch which is used to selectively connect and disconnect a set of separable contacts to selectively disconnect power from the line side to the load side. The rotatable latch is in one embodiment coupled to a reset button. In at least one embodiment there is a slider which is configured to selectively prevent the manual tripping of the device.
    Type: Grant
    Filed: March 24, 2015
    Date of Patent: June 13, 2017
    Assignee: LEVITON MANUFACTURING CO., INC.
    Inventors: Michael Kamor, James Porter, Kurt Dykema
  • Patent number: 9679732
    Abstract: A hinge assembly includes a first portion having first and second receptacles and a second portion having first and second cylindrical members extending in opposite directions along a hinge axis and a thickened portion having a contoured outer surface disposed adjacent the cylindrical members. The second portion is moveable from: a first state wherein the first and second cylindrical members are disposed in the first and second receptacles such that the second portion is coupled to the first portion and generally free to rotate about the hinge axis through at least a predetermined degree range, and a second state in which the second portion is decoupled from the first portion responsive to the second portion being rotated beyond the predetermined degree range and the contoured outer surface interacting with a portion of the first portion.
    Type: Grant
    Filed: December 19, 2014
    Date of Patent: June 13, 2017
    Assignee: EATON CORPORATION
    Inventors: Thomas Alan Whitaker, Jason Eric Basta, Doel Jafeth Collazo, Paul Richard Rakus
  • Patent number: 9679733
    Abstract: An actuation system for a switch assembly having at least one switch includes a linear actuator drivable for actuating the switch, and a handle configured for selectively driving the linear actuator. The handle is operable in a first state in which the handle is coupled to the linear actuator such that turning the handle does not drive the linear actuator, and a second state in which the handle is coupled to the linear actuator such that turning the handle drives the linear actuator.
    Type: Grant
    Filed: October 2, 2014
    Date of Patent: June 13, 2017
    Assignee: COOPER TECHNOLOGIES COMPANY
    Inventor: Jessica Ann Dunker
  • Patent number: 9679734
    Abstract: A fuse link used in alternate current medium- or high-voltage systems with a current frequency of 50 Hz includes a spring-type striker pin and is designed for the protection of electrical devices against consequences of short circuits and overloads. A porcelain housing with a star-core, external end caps closed by plugs, star-core end caps with a ring-shaped first tap designed to ensure electric contact between the star-core end cap and the external end cap of the fuse link is also included. A spring-type striker pin is positioned along the axis of the star-core. Each of the end caps of the star-core is provided with an additional second tap designed to centre the star-core relative to the axis of the fuse link. The spring-type striker pin is centred along the longitudinal axis of the fuse link.
    Type: Grant
    Filed: October 27, 2015
    Date of Patent: June 13, 2017
    Assignee: ABB TECHNOLOGY AG
    Inventor: Artur Cwalina
  • Patent number: 9679735
    Abstract: A vehicle system including a housing, an extendable/retractable member coupled to the housing, an electrically controlled actuator and a lockout system. The electrically controlled actuator is connected to the extendable/retractable member, and is configured to extend and retract the extendable/retractable member relative to the housing. The lockout system includes a detection sensor and a controller. The detection sensor generates a signal upon a detection of a motion of the vehicle system or an anticipated movement of the vehicle system. The controller is in commanding communication with the electrically controlled actuator, and the controller locks the electrically controlled actuator from functioning upon receipt of the signal.
    Type: Grant
    Filed: March 7, 2016
    Date of Patent: June 13, 2017
    Assignee: ASA Electronics, LLC
    Inventors: Vince Smith, Gerald J. Maffetone
  • Patent number: 9679736
    Abstract: An encapsulated structure of an X ray generator with a cold cathode and method of vacuuming the same are disclosed. The X ray generator has a glass ball-tube having a base, a tungsten filament, a cold cathode, a focus cap, and an anode target inside, associated with a first electrode pin, a second electrode pin, a single-used pin, and anode pin extended out. The tungsten filament located at the periphery of the base has a first wire end connected with the second electrode pin and a second wire end connected with the single-used pin. While vacuuming the glass ball-tube before melting an end to seal, a voltage is exerting on the single use pin to heat the tungsten, and a high voltage is exerting on the anode target to accelerate the hot electrons emitting from the filament to bombard the inside wall of the glass ball-tube and the anode target so as to shorten the vacuuming time and increase the vacuum level.
    Type: Grant
    Filed: November 20, 2015
    Date of Patent: June 13, 2017
    Assignee: Energy Resources International Co., Ltd.
    Inventors: Wen-How Lan, Yi-Teng Shiu, Hung-Chiang Huang
  • Patent number: 9679737
    Abstract: A spark gap comprising a cathode and an anode is provided. The spark gap is divided into two partial spark gaps by means of a central piece, namely a high-pressure spark gap and an effective spark gap. The effective spark gap can for example, be used to generate monochromatic x-rays. In order to guarantee a defined switching time, the high pressure spark gap which is initially switched to defined, is used. The switching initiates a potential so high on the centre piece that, when the high pressure spark gap is switched, the effective spark gap can also be switched in a defined manner without significant delays, to a visibly higher voltage.
    Type: Grant
    Filed: June 14, 2012
    Date of Patent: June 13, 2017
    Assignee: SIEMENS AKTIENGESELLSCHAFT
    Inventors: Oliver Heid, Timothy Hughes, Jennifer Sirtl
  • Patent number: 9679738
    Abstract: The present invention relates to a lens-less Foucault method wherein a transmission electron microscope objective lens (5) is turned off, an electron beam crossover (11, 13) is matched with a selected area aperture (65), and the focal distance of a first imaging lens (61) can be changed to enable switching between a sample image observation mode and a sample diffraction pattern observation mode, characterized in that a deflector (81) is disposed in a stage following the first imaging lens (61), and conditions for an irradiating optical system (4) can be fixed after conditions for the imaging optical system have been determined. This allows a lens-less Foucault method to be implemented in a common general-use transmission electron microscope with no magnetic shielding lens equipped, without burdening the operator.
    Type: Grant
    Filed: May 16, 2014
    Date of Patent: June 13, 2017
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Hiroaki Matsumoto, Takeshi Sato, Yoshifumi Taniguchi, Ken Harada
  • Patent number: 9679739
    Abstract: A system and method are provided for implanting ions at low energies into a workpiece. An ion source configured to generate an ion beam is provided, wherein a mass resolving magnet is configured to mass resolve the ion beam. The ion beam may be a ribbon beam or a scanned spot ion beam. A mass resolving aperture positioned downstream of the mass resolving magnet filters undesirable species from the ion beam. A combined electrostatic lens system is positioned downstream of the mass analyzer, wherein a path of the ion beam is deflected and contaminants are generally filtered out of the ion beam, while concurrently decelerating and parallelizing the ion beam. A workpiece scanning system is further positioned downstream of the combined electrostatic lens system, and is configured to selectively translate a workpiece in one or more directions through the ion beam, therein implanting ions into the workpiece.
    Type: Grant
    Filed: December 22, 2015
    Date of Patent: June 13, 2017
    Assignee: Axcelis Technologies, Inc.
    Inventors: Edward C. Eisner, Bo H. Vanderberg
  • Patent number: 9679740
    Abstract: A processing apparatus and a processing method are provided, which use a charged particle beam device that achieves defection of secondary electrons/reflected electrons at a large angle and cancels out noises of an electromagnetic deflector and an electrostatic deflector to suppress a position shift of a primary electron beam caused by circuit noises of a primary beam/secondary beam separation circuit.
    Type: Grant
    Filed: December 16, 2014
    Date of Patent: June 13, 2017
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Wen Li, Ryo Kadoi, Kazuki Ikeda, Hiroyuki Takahashi, Hajime Kawano
  • Patent number: 9679741
    Abstract: An environmental cell for a charged particle beam system allows relative motion between the cell mounted on an X-Y stage and the optical axis of the focusing column, thereby eliminating the need for a sub-stage within the cell. A flexible cell configuration, such as a retractable lid, permits a variety of processes, including beam-induced and thermally-induced processes. Photoelectron yield spectroscopy performed in a charged particle beam system and using gas cascade amplification of the photoelectrons allows analysis of material in the cell and monitoring of processing in the cell. Luminescence analysis can be also performed using a retractable mirror.
    Type: Grant
    Filed: November 9, 2010
    Date of Patent: June 13, 2017
    Assignee: FEI Company
    Inventors: Libor Novak, Marek Uncovsky, Milos Toth, Martin Cafourek, William Parker, Marcus Straw, Mark Emerson
  • Patent number: 9679742
    Abstract: The present invention provides a method for optimizing a shaped working beam having a sharp edge for making sufficiently precise cuts and a high beam current for faster processing. An ion beam is directed along an optical column through a reference aperture to form a reference beam that has a preferred shape and an associated reference current. The reference beam is optimized using selected parameters of the optical components within the optical column. The ion beam is then directed through a working aperture to form a working beam for use in a processing application. The working beam has a different shape from the reference beam and an associated working current that is higher than the reference current. The reference aperture and working aperture have at least one corresponding dimension. The working beam is then optimized using the selected optical component parameters used to align and focus the reference beam.
    Type: Grant
    Filed: December 28, 2015
    Date of Patent: June 13, 2017
    Assignee: FEI Company
    Inventors: Richard Swinford, Mostafa Maazouz, David William Tuggle, William M. Steinhardt
  • Patent number: 9679743
    Abstract: A sample processing evaluation apparatus includes a charged particle beam column that irradiates a sample with charged particle beam, a sample holder that holds both ends of the sample, and a sample stage on which the sample holder is placed, in which the sample holder is configured to rotate the sample about a rotation axis between the sample stage and the charged particle beam column.
    Type: Grant
    Filed: February 19, 2016
    Date of Patent: June 13, 2017
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Toshiaki Fujii, Hiroyuki Suzuki
  • Patent number: 9679744
    Abstract: A scanning electron microscope (SEM) is configured so that SEM images are acquired while scanning a pyramid pattern on a sample plane from four directions. Landing angle of the electron beam is calculated from these SEM images, which are then averaged, whereby inclination angle of the electron beam that is less influenced from scan distortion can be found.
    Type: Grant
    Filed: November 6, 2012
    Date of Patent: June 13, 2017
    Assignee: Hitachi High-Technologies Corporation
    Inventor: Masumi Shirai
  • Patent number: 9679745
    Abstract: Provided herein are approaches for controlling an ion beam within an accelerator/decelerator. In an exemplary approach, an ion implantation system includes an ion source for generating an ion beam, and a terminal suppression electrode coupled to a terminal, wherein the terminal suppression electrode is configured to conduct the ion beam through an aperture of the terminal suppression electrode and to apply a first potential to the ion beam from a first voltage supply. The system further includes a lens coupled to the terminal and disposed adjacent the terminal suppression electrode, wherein the lens is configured to conduct the ion beam through an aperture of the lens and to apply a second potential to the ion beam from a second voltage supply. In an exemplary approach, the lens is electrically insulated from the terminal suppression electrode and independently driven, thus allowing for an increased beam current operation range.
    Type: Grant
    Filed: October 14, 2015
    Date of Patent: June 13, 2017
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Shengwu Chang, Kristen Rounds, William Leavitt, Daniel Brosnan
  • Patent number: 9679746
    Abstract: An ion implantation tool includes a process chamber, a platen, an ion source, and a plurality of controlling units. The platen is present in the process chamber and configured to hold a wafer. The ion source is configured to provide an ion beam onto the wafer. The controlling units are present on the platen and configured to apply a plurality of physical fields that are able to affect motions of ions of the ion beam onto the wafer.
    Type: Grant
    Filed: October 28, 2015
    Date of Patent: June 13, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventor: Sheng-Wei Lee
  • Patent number: 9679747
    Abstract: The present disclosure provides a method for operating a dynamic pattern generator (DPG) having a mirror array. The method comprises receiving a clock signal, determining a time delay based on the period of the clock signal, determining a first clock signal for toggling a first group of mirror cells in the mirror array, determining a second clock signal, lagging behind the first clock signal by the time delay, for toggling a second group of mirror cells in the mirror array, toggling the first group of mirror cells in the mirror array in response to the first clock signal, and toggling the second group of the mirror cells in the mirror array in response to the second clock signal.
    Type: Grant
    Filed: February 5, 2015
    Date of Patent: June 13, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Shao-Yu Li, Tsung-Hsin Yu
  • Patent number: 9679748
    Abstract: A multi charged particle beam writing apparatus includes a dividing circuitry to divide first irradiation time data into k pieces of second irradiation time data, where each of the k pieces of second irradiation time data has a different number of bits and the total of different numbers of bits is n-bits, in multi-pass writing of k or more passes by using multi charged particle beams, a data transmission circuitry to transmit, for each of k passes, corresponding second irradiation time data, for a beam concerned in multi charged particle beams, a resolution information transmission circuitry to transmit, for each of k passes, corresponding resolution information, and an irradiation time calculation circuitry to calculate an irradiation time of a corresponding beam in the multi charged particle beams of a pass concerned by using input second irradiation time data and resolution information.
    Type: Grant
    Filed: March 17, 2016
    Date of Patent: June 13, 2017
    Assignee: NuFlare Technology, Inc.
    Inventor: Hideo Inoue
  • Patent number: 9679749
    Abstract: A grid assembly for a substrate processing system includes a first portion including a first body defining a central opening, an inlet, an outlet, and an upper manifold that is located in the first body and that is in fluid communication with the inlet or the outlet. A second portion is arranged adjacent to the first portion and includes a second body defining a central opening. A plurality of tubes is arranged in the central opening of the second body. First ones of the plurality of tubes are in fluid communication with the upper manifold. A lower manifold is located in the second body and is in fluid communication with the other one of the inlet or the outlet. Second ones of the plurality of tubes are in fluid communication with the lower manifold. The grid assembly is arranged between a remote plasma source and a substrate.
    Type: Grant
    Filed: September 26, 2014
    Date of Patent: June 13, 2017
    Assignee: LAM RESEARCH CORPORATION
    Inventors: Ivelin Angelov, Serge Kosche
  • Patent number: 9679750
    Abstract: A deposition apparatus according to an exemplary embodiment of the present invention includes: a reactor; a plasma chamber connected to the reactor; a plasma electrode mounted inside of the plasma chamber; and a gas supply plate coupled with the plasma chamber to supply gas into the plasma chamber, wherein a plurality of gas holes is formed at an inner wall of the gas supply plate, and the plurality of gas supply holes is spaced apart from each other by a predetermined interval.
    Type: Grant
    Filed: May 13, 2014
    Date of Patent: June 13, 2017
    Assignee: ASM IP HOLDING B.V.
    Inventors: Young Seok Choi, Dae Youn Kim
  • Patent number: 9679751
    Abstract: A chamber filler kit for an inductively coupled plasma processing chamber in which semiconductor substrates are processed by inductively coupling RF energy through a window facing a substrate supported on a cantilever chuck. The kit includes at least one chamber filler which reduces the lower chamber volume in the chamber below the chuck. The fillers of the kit can be mounted in a standard chamber having a chamber volume of over 60 liters and by using different sized chamber fillers it is possible to reduce the chamber volume to provide desired gas flow conductance and accommodate changes in vacuum pressure during processing of the substrate. The chamber filler kit can be used to modify a standard chamber to accommodate different processing regimes such as rapid alternating processes wherein wide pressure changes are needed without varying a gap between the substrate and the window.
    Type: Grant
    Filed: March 15, 2012
    Date of Patent: June 13, 2017
    Assignee: LAM RESEARCH CORPORATION
    Inventors: Jon McChesney, Theo Panagopoulos, Alex Paterson, Craig Blair
  • Patent number: 9679752
    Abstract: A mass spectrometer is disclosed comprising a mass selective ion trap (12) and a quadrupole rod set mass filter (14) arranged downstream of the mass selective ion trap (12). Ions are mass selectively ejected from the ion trap (12) in a substantially synchronized manner with the scanning of the mass filter (14) in order to increase the duty cycle of the mass filter (14).
    Type: Grant
    Filed: July 21, 2006
    Date of Patent: June 13, 2017
    Assignee: Micromass UK Limited
    Inventor: John Hoyes
  • Patent number: 9679753
    Abstract: Peltier-cooled cryogenic laser ablation cells for sample preparation.
    Type: Grant
    Filed: March 14, 2014
    Date of Patent: June 13, 2017
    Assignee: UNIVERSITY OF MASSACHUSETTS
    Inventors: Robyn Hannigan, Thomas Darrah, Francesco Peri
  • Patent number: 9679754
    Abstract: An interface configured to transfer ions produced at or near atmospheric pressure conditions into a mass spectrometer for mass analysis is provided. The interface includes a first conduit including an inlet configured to receive a fluid containing the ions and an outlet configured to direct the fluid containing the ions into the mass spectrometer. The first conduit defines a first flow path extending from the inlet to the outlet. The interface includes a pump. The interface includes a second conduit. The second conduit includes an inlet. The second conduit defines a second flow path extending from a location between the inlet and the outlet of the first conduit to an outlet of the second conduit. The pump is configured to divert a portion of the fluid including the ions moving in the first flow path to the second flow path.
    Type: Grant
    Filed: July 7, 2014
    Date of Patent: June 13, 2017
    Assignee: Smiths Detection Inc.
    Inventor: Vadym Berkout
  • Patent number: 9679755
    Abstract: In an ion source 3 in which a repeller electrode 32 for forming a repelling electric field that repels ions toward an ion emission port 311 is provided inside of an ionization chamber 31, ion focusing electrodes 36 and 37 are respectively arranged between an electron introduction port 312 and a filament 34 and between an electron discharge port 313 and a counter filament 35. An electric field formed by applying a predetermined voltage to each of the ion focusing electrodes 36 and 37 intrudes into the ionization chamber 31 through the electron introduction port 312 and the electron discharge port 313, and becomes a focusing electric field that pushes the ions in an ion optical axis C direction. Ions at positions off a central part of the ionization chamber 31 receive the combined force of the force of the repelling electric field and the force of the focusing electric field, and move toward the ion emission port 311 while approaching the ion optical axis C.
    Type: Grant
    Filed: February 22, 2016
    Date of Patent: June 13, 2017
    Assignee: SHIMADZU CORPORATION
    Inventors: Yusuke Tateishi, Kazuteru Takahashi, Hideki Sato
  • Patent number: 9679756
    Abstract: Provided is a projection-type charged particle optical system in which a projection magnification can be changed while a decrease in the accuracy in measuring a mass-to-charge ratio is being suppressed. A projection-type charged particle optical system according to the present invention includes a first electrode disposed so as to face a sample and having an opening formed therein for allowing a charged particle to pass, a second electrode disposed on a side of the first electrode opposite to where the sample is disposed and having an opening formed therein for allowing the charged particle to pass, and a flight-tube electrode disposed such that the charged particle that has been emitted from the sample and has passed through the second electrode enters the flight-tube electrode and being configured to form a substantially equipotential space thereinside. A principal plane is formed at at least two positions in a travel path of the charged particle.
    Type: Grant
    Filed: January 4, 2017
    Date of Patent: June 13, 2017
    Assignee: Canon Kabushiki Kaisha
    Inventor: Kota Iwasaki
  • Patent number: 9679757
    Abstract: One aspect of the invention provides a liquid chromatography system including: a first solvent manager configured to dispense various ratios of a first solvent and a second solvent; a first column in fluid communication with the first solvent manager; a mixer in fluid communication with the first column; a first valve in fluid communication with the mixer; a second column having a first end in fluid communication with a first port of the first valve and a second end in fluid communication with a second port of the first valve; a second solvent manager adapted and configured to dispense various ratios of a third solvent and a fourth solvent; and a second valve in fluid communication with the second solvent manager, the first valve, and the mixer. The first valve and the second valve are adapted and configured for actuation between and a second position.
    Type: Grant
    Filed: April 9, 2014
    Date of Patent: June 13, 2017
    Assignee: Waters Technologies Corporation
    Inventors: Jeremy D. Netto, Mark Ritchie
  • Patent number: 9679758
    Abstract: A multi-reflection mass spectrometer is provided comprising two ion-optical mirrors, each mirror elongated generally along a drift direction (Y), each mirror opposing the other in an X direction, the X direction being orthogonal to Y, characterized in that the mirrors are not a constant distance from each other in the X direction along at least a portion of their lengths in the drift direction. In use, ions are reflected from one opposing mirror to the other a plurality of times while drifting along the drift direction so as to follow a generally zigzag path within the mass spectrometer. The motion of ions along the drift direction is opposed by an electric field resulting from the non-constant distance of the mirrors from each other along at least a portion of their lengths in the drift direction that causes the ions to reverse their direction.
    Type: Grant
    Filed: September 11, 2015
    Date of Patent: June 13, 2017
    Assignee: Thermo Fisher Scientific (Bremen) GmbH
    Inventors: Dmitry Grinfeld, Alexander Makarov