Abstract: Methods and compositions involving molecular markers for the detection and characterization of cancer in a patient are provided.

Abstract: The present invention relates in general to the field of recombinant protein expression. In particular, the present invention relates to a method for selecting a suitable candidate cell clone for recombinant protein expression and to a host cell for recombinant protein expression, the host cell exhibiting artificially modified gene expression of at least one gene selected from the group consisting of: Hist1h2bc, Egrl, BX842664.2/Hist 1h3c, Dhfr, Fgfr2, AC115880.11, Mmp10, Vsnll (optional), CU459186.17, El 30203 B14Rik, Cspg4, C1qtnf1, Foxp2, and Ptpre.

Abstract: The present invention relates to methods and compositions for identifying, selecting and/or producing a soybean plant or germplasm having iron deficiency chlorosis tolerance. A soybean plant, part thereof and/or germplasm, including any progeny and/or seeds derived from a soybean plant or germplasm identified, selected and/or produced by any of the methods of the present invention is also provided.

Abstract: This invention relates to methods for identifying maize plants that having increased MRCV resistance. The methods use molecular markers to identify and to select plants with increased MRCV resistance. Maize plants generated by the methods of the invention are also a feature of the invention.

Abstract: A method of crystallizing ?-lactose monohydrate from an aqueous solution comprising dissolved ?-lactose and ?-lactose, said method comprising: circulating a first volume of said aqueous solution in a mutarotation loop in a mutarotation loop system (100); said mutarotation loop system comprising a crystallization tank (110) and a mutarotation tank (130).

Abstract: Provided is a cold work tool material capable of reducing dimensional changes which occur, due to heat treatment, in the longitudinal direction of the material during quenching and tempering. This cold work tool material is drawn through hot working, has an annealed structure including carbides, and is used after being quenched and tempered, wherein, in the annealed structure which is formed in a cross section parallel to a drawing direction due to the hot working of the cold work tool material, the standard deviation in the degree of orientation of carbides Oc, as determined by equation (1) below, is 6.0 or more for carbides having a circle equivalent diameter of 5.0 ?m or greater as observed in the annealed structure in the cross section at right angle to a direction perpendicular to the drawing direction. Oc=D×? . . .

Abstract: A method of production non grain-oriented Fe—Si steel sheet is provided. The method includes the steps of melting a steel composition that contains in weight percentage: C?0.006, 2.0?Si?5.0, 0.1?Al?3.0, 0.1?Mn?3.0, N?0.006, 0.04?Sn?0.2, S?0.005, P?0.2, Ti?0.01, the balance being Fe and other inevitable impurities, casting said melt into a slab, reheating said slab, hot rolling said slab, coiling said hot rolled steel, optionally annealing the hot rolled steel, cold rolling, annealing and cooling the cold rolled steel down to room temperature.

Abstract: Methods of selectively cooling and quenching surface regions of high-strength transformation induced plasticity (TRIP) steel are provided. The method may comprise selectively cooling at least one region of an exposed surface of a hot-formed press-hardened component comprising a high-strength steel. Prior to selective cooling, the component has a microstructure comprising?about 5% by volume retained austenite in a matrix of martensite. The selective cooling is conducted at a temperature of?about ?40° C. and forms at least one quenched region comprising?about 2% by volume austenite. The TRIP steel may be zinc-coated and having a surface coating comprising zinc and substantially free of liquid metal embrittlement (LME). Zinc-coated hot-formed press-hardened components, including automotive components, formed from such methods are also provided.

Abstract: Methods of strengthening surface regions of high-strength transformation induced plasticity (TRIP) steel are provided. The method may comprise shot peening at least one region of an exposed surface of a hot-formed press-hardened component comprising a high-strength steel. Prior to shot peening, the component has a microstructure comprising ?about 5% by volume retained austenite in a matrix of martensite. The shot peening is conducted at a temperature of <about 150° C. and forms at least one hardened surface region comprising ?about 2% by volume austenite. The TRIP steel may be zinc-coated and having a surface coating comprising zinc and substantially free of liquid metal embrittlement (LME). Zinc-coated hot-formed press-hardened components, including automotive components, formed from such methods are also provided.

Abstract: Disclosed is a non-oriented electrical steel sheet that is low in iron loss and exhibits excellent magnetic properties even when subjected to final annealing at high temperature. The non-oriented electrical steel sheet can be obtained from a steel (low-Al steel) having a chemical composition containing, in mass %, C: 0.005% or less, Si: 1.0% to 4.5%, Mn: 0.02% to 2.0%, Sol.Al: 0.001% or less, P: 0.2% or less, S+Se: 0.0010% or less, N: 0.005% or less, O: 0.005% or less, and Cu: 0.02% to 0.30%, and the balance consisting of Fe and incidental impurities.

Abstract: Disclosed is a steel sheet having a predetermined chemical composition and a steel microstructure that contains, in area ratio, 35% or more and 80% or less of polygonal ferrite and 5% or more and 25% or less of martensite, and that contains, in volume fraction, 8% or more of retained austenite, in which the polygonal ferrite, the martensite, and the retained austenite have a mean grain size of 6 ?m or less, 3 ?m or less, and 3 ?m or less, respectively, and each have a mean grain aspect ratio of 2.0 or less, and in which a value obtained by dividing an Mn content in the retained austenite in mass % by an Mn content in the polygonal ferrite in mass % equals 2.0 or more.

Abstract: A high-strength austenitic stainless steel, which has good hydrogen embrittlement resistance and hydrogen fatigue resistance, has a chemical composition including, in mass %, C: up to 0.10%; Si: up to 1.0%; Mn: not less than 3.0% and less than 7.0 %; Cr: 15 to 30%; Ni: not less than 12.0% and less than 17.0%; Al: up to 0.10%; N: 0.10 to 0.50%; P: up to 0.050%; S: up to 0.050%; at least one of V: 0.01 to 1.0% and Nb: 0.01 to 0.50%; and other elements, the balance being Fe and impurities, wherein the ratio of the minor axis to the major axis of the austenite crystal grains is greater than 0.1, the crystal grain size number of austenite crystal grains is not lower than 8.0, and the tensile strength is not less than 1000 MPa.

Abstract: A ferritic stainless steel sheet and a steel pipe as a material suitable for a heat-resistant component that is required to have especially excellent formability are provided. The ferritic stainless steel sheet contains 10 to 20 mass % of Cr and a predetermined amount of C, Si, Mn, P, S, Al and one or both of Ti and Nb, a {111}-orientation intensity being 5 or more and {411}-orientation intensity being less than 3 at a portion in the vicinity of a sheet-thickness central portion of the ferritic stainless steel sheet. Further, with similar composition and by setting {111}<110>-orientation intensity at 4.0 or more and {311}<136>-orientation intensity at less than 3.0, a relationship rm??1.0t+3.0 (t (mm): sheet thickness, rm: average r-value) is satisfied, thereby providing a ferritic stainless steel sheet and a steel pipe with excellent formability.

Abstract: A heating method, a heating apparatus and a method for fabricating a press-molded article using the heating method is provided. A plate workpiece has a main heating target region having a cross sectional area monotonically varying in a first direction and a sub heating target region provided adjacent to and integrally with the main heating target region. After heating the sub heating target region, the main heating target region is heated by a direct resistance heating to heat the main heating target region and the sub heating target region to be in a target temperature range. To heat the main heating target region, at least one of a pair of electrodes arranged to extend across the main heating target region in a second direction intersecting the first direction is moved in the first direction and at a constant speed, with electric current between the pair of electrodes being adjusted.

Abstract: A steel sheet for cans has a chemical composition containing, by mass %, C: 0.015% or more and 0.150% or less, Si: 0.04% or less, Mn: 1.0% or more and 2.0% or less, P: 0.025% or less, S: 0.015% or less, Al: 0.01% or more and 0.10% or less, N: 0.0005% or more and less than 0.0050%, Ti: 0.003% or more and 0.015% or less, B: 0.0010% or more and 0.0040% or less, and the balance being Fe and inevitable impurities. The steel sheet has a microstructure including a ferrite phase as a main phase and at least one of a martensite phase and a retained austenite phase as a second phase, the total area fraction of the second phase being 1.0% or more, and the sheet has a tensile strength of 480 MPa or more, a total elongation of 12% or more, and a yield elongation of 2.0% or less.

Abstract: The invention concerns a method for accentuating the orientation of the grains of a continuous steel sheet (1), in particular for producing electrical sheet steel, said method involving, during the movement of the steel sheet (1) in the longitudinal direction of same, a longitudinal stretching of the steel sheet (1) in a stretch region (1d) in which the steel sheet (1) moves at a temperature of between approximately 750° C. and approximately 900° C. The invention also concerns a device for implementing said method in which the stretching is carried out by two tensioning blocks (41, 42) comprising traction rollers arranged to move and guide the steel sheet (1). The invention further concerns a facility for producing electrical sheet steel comprising a line comprising a rolling mill and on which said method and said device are implemented downstream from the rolling mill.

Abstract: A high-strength and ultra heat-resistant high entropy alloy (HEA) matrix composite material and a method of preparing the HEA matrix composite material are provided. The HEA matrix composite material may include at least four matrix elements among Co, Cr, Fe, Ni, Mn, Cu, Mo, V, Nb, Ta, Ti, Zr, W, Si, Hf and Al, and a body-centered cubic (BCC) forming alloy element.

Abstract: There are provided a copper alloy for a bearing and a bearing in which a Mn—Si compound is prevented from being broken and becoming a foreign matter. The copper alloy for a bearing and the bearing according to the present invention contain 25 wt % or more and 48 wt % or less of Zn, 1 wt % or more and 7 wt % or less of Mn, 0.5 wt % or more and 3 wt % or less of Si and 1 wt % or more and 10 wt % or less of Bi, the balance consisting of inevitable impurities and Cu, and are characterized in that the average width value among Mn—Si primary crystal particles dispersed in a sliding surface on which a counter shaft slides is 3 ?m or more.

Abstract: The disclosure relates to a titanium alloy, in particular to be used for biocompatible implants, which contains no aluminum (Al), vanadium (V), cobalt (Co), chromium (Cr), nickel (Ni) and tin (Sn) and contains at least the following alloy components in wt % in addition to inevitable trace amounts of impurities contained in the alloy components or absorbed during the production: a) 0.2 to 1.5% oxygen (O), b) 0.1 to 1.5% iron (Fe), c) 0.01 to 2% carbon (C), d) the remainder being titanium (Ti).

Abstract: The present invention provides a superelastic alloy containing Au in an amount of 8.0% by mass or more and 20.0% by mass or less and at least one of Cr and Mo as essential additive elements, Ta as an optional additive element, and Ti and inevitable impurities as a balance, wherein the Cr equivalent calculated on the basis of the following formula for the relationship of the Cr content, the Mo content and the Ta content is within the range of more than 0.5 and less than 8.0. The alloy is a Ni-free superelastic alloy, and has favorable X-ray-imaging property. Accordingly, the alloy can be suitably used in medical fields. Cr equivalent=[Cr content (% by mass)]+([Mo content (% by mass)]/1.

Abstract: Provided are: an aluminum alloy for die casting, having castability and mechanical properties equivalent to those of ADC12 and corrosion resistance equivalent to that of ADC6; and an aluminum alloy die cast obtained through die-casting the alloy. Specifically, the present invention is directed to an aluminum alloy for die casting that contains: Cu by not more than 0.10 wt %; Si by 12.0 to 15.0 wt %; Mg by not more than 1.00 wt %; Fe by 0.05 to 1.00 wt %; Cr by 0.10 to 0.50 wt %; and a remaining portion thereof being Al and unavoidable impurities.

Abstract: A component can include a degradable portion that is degradable in an aqueous environment; and a non-degradable portion that is not degradable in the aqueous environment where the non-degradable portion can include polycrystalline diamond.

Abstract: An apparatus can include a degradable matrix that is degradable in an aqueous environment; and non-degradable particles disposed at least in part within the matrix where the non-degradable particles are not degradable in the aqueous environment where the non-degradable particles can include tungsten carbide.

Abstract: A ductile iron composition including, by weight: about 3.4% to about 4.0% Si; about 3.0% to about 3.5% C; about 0.5% to about 1.0% Cr; about 0.02% to about 0.05% Mo; up to about 0.01% S; up to about 0.5% Mn; and balance iron and incidental impurities. The composition has a a ferritic body center cubic microstructure and has a graphite nodule density of greater than 100 per mm2. A method for forming a ductile iron composition is also disclosed.

Abstract: A ductile iron composition including, by weight: about 3.1% to about 3.6% C; about 3.5% to about 4.0% Si; about 0.035% to about 0.050% Mg; about 0.001% to about 0.004% Ce; up to about 0.005% Sb; about 0.008% to about 0.016% S; up to about 0.04% P; up to about 0.3% Mn; and balance iron and incidental impurities; The ductile iron composition includes a ratio of Sb/Ce greater than or equal to about 1.25, has a ferritic microstructure and graphite nodules, and greater than about 65% of the graphite nodules having a highly spherical geometry. A method and apparatus for forming a ductile iron composition are also disclosed.

Abstract: The austenitic heat resistant steel of the embodiment contains: 24 to 50% by mass of Ni, 5 to 13% by mass of Cr, 0.1 to 12% by mass of Co, 0.1 to 5% by mass of Nb, 0.1 to 0.5% by mass of V, 1.90 to 2.35% by mass of Ti, 0.01 to 0.30% by mass of Al, 0.001 to 0.01% by mass of B, 0.001 to 0.1% by mass of C, and the balance being Fe and inevitable impurities.

Abstract: In a rolled steel bar or rolled wire rod for a cold-forged component having a predetermined chemical composition, Y1 represented by Y1=[Mn]×[Cr] and Y2 represented by Y2=0.134×(D/25.4?(0.50×?[C])/(0.50×?[C]) satisfy Y1>Y2, the tensile strength is 750 MPa or less, an internal structure is a ferrite-pearlite structure, and the ferrite fraction in the internal structure is 40% or greater.

Abstract: A method of manufacturing a high strength steel sheet includes subjecting a steel having a chemical composition including C: 0.08% to 0.20%, Si: 0.3% or less, Mn: 0.1% to 3.0%, P: 0.10% or less, S: 0.030% or less, Al: 0.10% or less, N: 0.010% or less, V: 0.20% to 0.80%, and the remainder composed of Fe and incidental impurities on a percent by mass basis to a hot rolling process composed of heating, rough rolling, finish rolling, cooling, and coiling into the shape of a coil at a predetermined coiling temperature, wherein the heating is performed at a temperature of 1,100° C. or higher for 10 min or more, the rough rolling is performed at a finish rough rolling temperature of 1,000° C. or higher, the finish rolling is performed at a finishing temperature of 850° C. or higher, in which a reduction ratio in a temperature range of 1,000° C. or lower is 96% or less, a reduction ratio in a temperature range of 950° C.

Abstract: A method for manufacturing a high-strength aluminum includes: receiving atomized aluminum powder having one or more of an approximate desired powder size and an approximate morphology; and sintering the powder. A method for manufacturing a high-strength aluminum includes: receiving atomized aluminum powder having one or more of an approximate desired powder size and an approximate morphology; sintering the powder, producing additively manufactured aluminum; solution heat treating the additively manufactured aluminum; quenching the additively manufactured aluminum; and aging the additively manufactured aluminum.

Abstract: A process for the manufacture of metal products includes the steps of providing a mold including a first portion made of an aggregate and a binder, delivering a molten metal into the mold, removing a first portion of the mold with a fluid and solidifying at least one targeted portion of the molten metal which will form the metal product with the fluid. A flow of fluid to the mold is stopped for a period of time. Subsequently, a remaining portion of the molten metal is solidified to form the metal product. The at least one targeted portion of the metal product has better mechanical properties than does a remaining portion of the metal product. A unitary, one-piece aluminum alloy component with differing mechanical properties is also disclosed.

Abstract: Disclosed are an aluminum alloy composition for die casting and a method of heat treating the same. The aluminum alloy composition contains precipitation of an Mg—Zn-based strengthening phase through heat treatment to thus enhance strength thereof.

Abstract: Disclosed is an aluminum alloy for aluminum bottle applications, including methods of producing highly shaped aluminum products, such as bottles or cans, formed of the aluminum alloy. In some cases, the aluminum alloy has improved high strain rate formability at elevated temperatures and improved earing, which results in reduced spoilage rates. In one non-limiting example, the disclosed alloys have ?stable values greater than or equal to 0.035, where ?stable=?F??S and ?S represents the strain at which work hardening stage IV starts and ?F represents the strain at which diffuse necking ends. In some cases, the disclosed alloys have an earing balance from about ?3.5% to about 2% and a mean earing of less than or equal to 5.5%.

Abstract: An aluminium alloy forged product obtained by casting a billet from a 6xxx aluminium alloy comprising: Si: 0.7-1.3 wt. %; Fe: <0.5 wt. %; Cu: 0.1-1.5 wt. %; Mn: 0.4-1.0 wt. %; Mg: 0.6-1.2 wt. %; Cr: 0.05-0.25 wt. %; Zr: 0.05-0.2 wt. %; Zn: <0.2 wt. %; Ti: <0.2 wt. %, the rest being aluminium and inevitable impurities. The product optionally has an ultimate tensile strength higher than 400 MPa.

Abstract: A process is disclosed comprising heating a powder mixture (212) with an energy beam (304) to melt only a portion of a first powder (202) of the mixture and to melt all or most of a second powder (204) of the mixture, wherein the second powder includes a gamma prime forming constituent and the first powder includes elements of a desired precipitation strengthened superalloy composition less the gamma prime forming constituent; allowing the melted portions to mix and to cool to form a deposit layer (208) including a beta phase alloy surrounding unmelted first powder of the mixture. The process may further include heat treating the deposit layer to transform it into a gamma plus gamma prime layer (210) of the desired precipitation strengthened superalloy composition.

Abstract: A hot-dip galvanized steel sheet includes a base steel sheet and a hot-dip galvanized layer formed on at least one surface of the base steel sheet, in which the hot-dip galvanized layer includes Fe in a content of more than 0% to 5% or less, Al in a content of more than 0% to 1.0% or less, and columnar grains formed by a ? phase on the surface of the steel sheet, further, 20% or more of the entire interface between the hot-dip galvanized layer and the base steel sheet is coated with the ? phase, and a ratio of an interface formed between ? grains in which coarse oxides are present among ? grains and the base steel sheet with respect to the entire interface between the ? phase and the base steel sheet in the hot-dip galvanized layer is 50% or less, the base steel sheet has predetermined chemical components and a refined layer in direct contact with the interface between the base steel sheet and the hot-dip galvanized layer, an average thickness of the refined layer is 0.1 to 5.

Abstract: A hot-dip galvanized steel sheet wherein the hot-dip galvanized steel sheet comprises a base steel sheet and a hot-dip galvanized layer, a ferrite phase is, by volume fraction, 50% or less in a range of ? thickness to ? thickness centered at a position of ¼ thickness from the surface of the base steel sheet, a hard structure is 50% or more, wherein the hot-dip galvanized steel sheet has the hot-dip galvanized layer in which Fe is 5.0% or less and Al is 1.0% or less, and columnar grains formed of a ? phase is 20% or more in an entire interface between the plated layer and the base steel sheet, on the surface of the base steel sheet in which a volume fraction of a residual austenite is 3% or less and a ratio of a volume fraction of the hard structure is 0.10 times or more to 0.

Abstract: A rolling-contact shaft member, which is made of high-carbon steel and whose outer peripheral surface serves as a rolling-contact surface that rolling-contacts a mating material, includes: a carbonitrided layer having a carbon concentration of 1.1 to 1.6 wt % and a nitrogen concentration of 0.05 to 0.6 wt % in the range from the surface to the depth of 10 ?m. The rolling-contact shaft member has a Vickers hardness of 700 to 840 HV at the outer peripheral surface and has a Vickers hardness of 600 HV or less in its central portion. A maximum value of an absolute value of a gradient of a change in the Vickers hardness from the outer peripheral surface to the central portion is 100 to 340 HV/mm.

Abstract: A method to increase the damping of a substrate using a face-centered cubic ferromagnetic damping material.

Abstract: Methods are provided for forming a thermal barrier coating system on a surface of a component. The method can include introducing the component into a coating chamber, where a first ceramic source material and a second ceramic source material are positioned within the coating chamber of a physical vapor deposition apparatus. An energy source is directed onto the first ceramic source material to vaporize the first ceramic source material to deposit a first layer on the component. The energy source is alternated between the first ceramic source material and the second ceramic source material to form a blended layer on the first layer.

Abstract: A material deposition arrangement for depositing evaporated material on a substrate in a vacuum chamber is described. The material deposition arrangement includes a crucible for providing material to be evaporated; a linear distribution pipe in fluid communication with the crucible; and a plurality of nozzles in the distribution pipe for guiding the evaporated material into the vacuum chamber. Each nozzle may have a nozzle inlet for receiving the evaporated material, a nozzle outlet for releasing the evaporated material to the vacuum chamber, and a nozzle passage between the nozzle inlet and the nozzle outlet. The nozzle passage of at least one of the plurality of nozzles includes a first section having a first length and a first size, and a second having a second length and a second size. The ratio of the second size to the first size is between 2 and 10.

Abstract: A thin film deposition system and method provide for multiple target assemblies that may be separately powered. Each target assembly includes a target and associated magnet or set of magnets. The disclosure provides a tunable film profile produced by multiple power sources that separately power the target arrangements. The relative amounts of power supplied to the target arrangements may be customized to provide a desired film and may be varied in time to produce a film with varied characteristics.

Abstract: A method is employed to separate a carbon structure, which is disposed on a seed structure, from the seed structure. In the method, a carbon structure is deposited on the seed structure in a process chamber of a CND reactor. The substrate comprising the seed structure (2) and the carbon structure (1) is heated to a process temperature. At least one etching gas is injected into the process chamber, the etching gas having the chemical formula AOmXn, AOmXnYp or AmXn, wherein A is selected from a group of elements that includes S, C and N, wherein O is oxygen, wherein X and Y are different halogens, and wherein m, n and p are natural numbers greater than zero. Through a chemical reaction with the etching gas, the seed structure is converted into a gaseous reaction product. A carrier gas flow is used to remove the gaseous reaction product from the process chamber.

Abstract: A method of filling a recess with a nitride film is performed by repeating a cycle. The cycle includes a film-forming raw material gas adsorption process of adsorbing a raw material gas containing an element forming the nitride film to be formed on a target substrate on which the recess is formed on its surface, and a nitriding process of nitriding the adsorbed raw material gas by nitriding species to fill the recess. At least a portion of a period for forming the nitride film is used as a bottom-up growth period, for which a polymer material adsorbable to the surface of the target substrate is supplied in a gaseous state and is adsorbed to an upper portion of the recess to inhibit adsorption of the film-forming raw material gas, and for which the nitride film is grown from a bottom portion of the recess.

Abstract: Implementations of the present disclosure include methods and apparatuses utilized to reduce particle generation within a processing chamber. In one implementation, a lid for a substrate processing chamber is provided. The lid includes a cover member having a first surface and a second surface opposite the first surface, a central opening through the cover member, wherein an inner profile of the central opening includes a first section having a first diameter, a second section having a second diameter, and a third section having a third diameter, wherein the second diameter is between the first diameter and the third diameter, and the first diameter increases from the second section toward the first surface of the cover member, and a trench formed along a closed path in the first surface and having a recess formed in an inner surface of the trench.

Abstract: A multi-component coating composition for a surface of a semiconductor process chamber component comprising at least one first film layer of a yttrium oxide or a yttrium fluoride coated onto the surface of the semiconductor process chamber component using an atomic layer deposition process and at least one second film layer of an additional oxide or an additional fluoride coated onto the surface of the semiconductor process chamber component using an atomic layer deposition process, wherein the multi-component coating composition is selected from the group consisting of YOxFy, YAlxOy, YZrxOy and YZrxAlyOz.

Abstract: Implementations of the present disclosure provide apparatus and method for improving gas distribution during thermal processing. One implementation of the present disclosure provides an apparatus for processing a substrate comprising a chamber body defining a processing volume, a substrate support disposed in the processing volume, wherein the substrate support has a substrate supporting surface, a gas source assembly coupled to an inlet of the chamber body, an exhaust assembly coupled to an outlet of the chamber body, and a side gas assembly coupled to a sidewall of the chamber body, wherein the side gas assembly comprises a gas inlet pointed in a direction that is tangential to the edge of the substrate supporting surface, and wherein the gas inlet, the inlet of the chamber body, and the outlet of the chamber body are angularly offset at about 90° with respect to each other, and the gas inlet, the inlet of the chamber body, and the outlet of the chamber body are intersected by a common plane.

Abstract: A susceptor is provided. The susceptor comprises: a base part; multiple holders distributed on the base part for accommodating wafers; an inner ring connected to the base part; and an outer ring detachably connected to the base part and separated from the inner ring, wherein the outer ring comprises multiple sub-elements separated from each other and detachably connected to the base part; wherein the inner ring and the outer ring separate the holders from one another, and the inner ring comprises multiple first extensions each protruding outwardly toward the outer ring, and each sub-element comprises a second extension extending inwardly toward the inner ring.

Abstract: Methods and apparatus disclosed herein relate to the formation and use of undercoats on the interior surfaces of reaction chambers used to deposit films on substrates. The undercoats are deposited through atomic layer deposition methods. The disclosed undercoats help prevent metal contamination, provide improved resistance to flaking, and are relatively thin. Because of the superior resistance to flaking, the disclosed undercoats allow more substrates to be processed between subsequent cleaning operations, thereby increasing throughput.

Abstract: Methods and apparatuses for depositing approximately equal thicknesses of a material on at least two substrates concurrently processed in separate stations of a multi-station deposition apparatus are provided.

Abstract: A film deposition device includes a reaction gas supply part which is in communication with a process space defined between a placement part and a ceiling part. An annular gap in a plan view exists between an outer peripheral portion of the placement part and an outer peripheral portion of the ceiling part in circumferential directions of the placement part and the ceiling part. A reaction gas supplied from the reaction gas supply part into the process space via the ceiling part flows outside of the process space via the annular gap. A plurality of gas flow channels, which is used for forming gas-flow walls, is formed in the outer peripheral portion of the ceiling part which provides the annular gap.