Patents Issued in November 9, 2017
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Publication number: 20170323727Abstract: Object: A layered ceramic capacitor having an increased breakdown voltage is provided. Resolution means: The layered ceramic capacitor includes an effective dielectric portion (9) and cover layers (11). The effective dielectric portion (9) includes dielectric ceramic layers (5) and internal electrode layers (7) that are alternately stacked. The cover layers (11) are made of ceramic material and disposed on top and bottom surfaces of the effective dielectric portion (9). The cover layers (11) include ceramic particles (13), which constitute the majority of the cover layers, and include glass particles (15). Some of the glass particles (15) are present in gaps (17), which are formed between the ceramic particles (13).Type: ApplicationFiled: November 26, 2015Publication date: November 9, 2017Inventor: Shota MUKOYAMA
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Publication number: 20170323728Abstract: A body of a multilayer ceramic capacitor includes an inner layer portion and first and second outer layer portions sandwiching the inner layer portion therebetween. The inner layer portion includes an area extending from a conductive layer positioned closest to a first main surface to a conductive layer positioned closest to a second main surface in the stacking direction. The height of the body is smaller than the width of the body. The height of the inner layer portion is smaller than the width of the inner layer portion. The first outer layer portion includes a dielectric layer positioned closest to the first main surface. The second outer layer portion includes a dielectric layer positioned closest to the second main surface, and is thicker than the first outer layer portion. The total height of the first and second outer layer portions is smaller than the height of the inner layer portion.Type: ApplicationFiled: July 21, 2017Publication date: November 9, 2017Inventors: Shota KITANO, Takanobu KATSUYAMA, Hiroaki SUGITA
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Publication number: 20170323729Abstract: There has been a problem of generating anti-resonance between a three-terminal capacitor and a capacitor when the three-terminal capacitor and the capacitor are mounted. In order to solve the problem, this electronic circuit includes: a capacitor and a three-terminal capacitor, which are connected to a power supply terminal of a circuit component, and a power supply, and which are connected in parallel to each other between the power supply and ground; and a resistor that is connected in series between the ground and a ground terminal of the three-terminal capacitor and/or the capacitor.Type: ApplicationFiled: December 8, 2015Publication date: November 9, 2017Applicant: NEC CorporationInventor: KAZUHIRO KASHIWAKURA
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Publication number: 20170323730Abstract: An energy storage capacitor having a composite electrode structure includes: a case; a rolled body arranged inside the case; and an electrolyte stored inside the case. The rolled body includes: a first anode foil having a first anode lead plate connected at one side of one surface, a first cathode foil arranged to face the other surface of the first cathode foil with the one surface of the first anode foil and a first cathode lead plate connected at the other side, a second cathode foil arranged to face the other surface of the second cathode foil with one surface of the first cathode foil and having a second cathode lead plate connected at one side of one surface, a second anode foil arranged to face the one surface of the second cathode foil and a second anode lead plate connected at the other side.Type: ApplicationFiled: April 21, 2017Publication date: November 9, 2017Inventors: Young Joo OH, Jung Rag YOON, Byung Gwan LEE
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Publication number: 20170323731Abstract: Provided are a photoelectric conversion element having a photosensitive layer including a light absorber, in which the light absorber includes a compound having a perovskite-type crystal structure including specific cations and anions, and at least some of the anions constituting the compound are organic anions represented by Formula (An) and a solar cell using this photoelectric conversion element. R1—C(?X1)—X2??Formula (An) R1 represents a hydrogen atom, an alkyl group, an alkenyl group, an alkynyl group, an aryl group, a heteroaryl group, an aliphatic heterocyclic group, —N(R2)2, —OR3, —SR4, or a halogen atom. X1 represents an O atom or a S atom. X2 represents O? or S?. R2 to R4 are specific groups. Here, in a case in which X1 is an O atom and X2 is O?, R1 is a specific group.Type: ApplicationFiled: July 25, 2017Publication date: November 9, 2017Applicant: FUJIFILM CorporationInventors: Hirotaka SATOU, Katsumi KOBAYASHI
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Publication number: 20170323732Abstract: The invention relates to the use of halogenated histidine derivatives as electrolyte salts in the preparation of an electrolyte composition in a photoelectrochemical cell based on the sensitization to light of photoactive molecules, and also to a photoelectrochemical cell based on the sensitization to light of photoactive molecules comprising an electrolyte composition comprising at least one halogenated histidine derivative as electrolyte salt.Type: ApplicationFiled: November 4, 2015Publication date: November 9, 2017Inventors: Iryna SAGAIDAK, Miguel FLASQUE, Frédéric SAUVAGE, Albert NGUYEN VAN NHIEN
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Publication number: 20170323733Abstract: Disclosed is a photoelectric conversion element including a cell. The cell includes a first electrode, a second electrode, an oxide semiconductor layer provided on the first electrode, and an electrolyte provided between the first and second electrodes. The second electrode includes an annular portion, an approaching portion approaching the oxide semiconductor layer closer than the annular portion and an annular connecting portion connecting the annular portion and the approaching portion, and the oxide semiconductor layer includes an inner part facing the approaching portion on the first electrode and an annular outer part provided around the inner part and facing the connecting portion. The outer part includes a plurality of linear portions separated from one another and a corner portion connecting two adjacent linear portions to each other, the corner portion is thicker than the linear portion, and the linear portion is thicker than the inner part.Type: ApplicationFiled: November 18, 2015Publication date: November 9, 2017Applicant: Fujikura Ltd.Inventors: Kenji KATSUMATA, Ko NISHIWAKI
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Publication number: 20170323734Abstract: Disclosed is a photoelectrochemical cell to convert solar energy into electrical energy and to a process for the realization of the photoelectrochemical cell. The photoelectrochemical cell includes: —a first conductive external membrane; —a nanomembrane fixed to the first membrane and including titanium dioxide; —a natural pigment absorbed in the nanomembrane; —a second conductive external membrane disposed in an opposite position to the first membrane; an electrolyte, disposed between the nanomembrane and the second membrane.Type: ApplicationFiled: October 21, 2015Publication date: November 9, 2017Inventor: Giampiero FRIZZI
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Publication number: 20170323735Abstract: The present invention relates to a lithium-sulfur ultracapacitor including a cathode containing a sulfur-porous carbon composite material; a separator; a lithium metal electrode disposed on an opposite side of the cathode with respect to the separator; a graphite-based electrode disposed adjacent to the lithium metal electrode; and an electrolyte impregnating the cathode, the lithium metal electrode, and the graphite-based electrode, wherein the lithium metal electrode and the graphite-based electrode together constitute an anode, and a method of preparing the lithium-sulfur ultracapacitor.Type: ApplicationFiled: November 23, 2016Publication date: November 9, 2017Applicant: KOREA INSTITUTE OF CERAMIC ENGINEERING AND TECHNOLOGYInventors: Kwang Chul Roh, Dae Soo Jung, Mok-Hwa Kim
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Publication number: 20170323736Abstract: Provided is an electricity storage module including an electricity storage element group composed of multiple electricity storage elements having exhaust ports that discharge gas produced therein, and a cover attached to the electricity storage element group, wherein the electricity storage element group has exhaust surfaces on which the exhaust ports are arranged, and the cover is attached so as to cover the exhaust surfaces, guide walls that surround the exhaust ports in the form of loops are formed in the respective electricity storage elements, guide ribs that come into close contact with the guide portions and fit therein are formed on an opposing surface of the cover that opposes the exhaust surfaces, and the cover is provided with a duct that communicates with the exhaust ports and through which gas discharged from the exhaust ports passes.Type: ApplicationFiled: November 25, 2015Publication date: November 9, 2017Inventors: Kyohei Morita, Tatsuya Sumida
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Publication number: 20170323737Abstract: The present invention provides an electrode material for an electrochemical capacitor having high surface utilization efficiency, composed of a porous carbon material capable of further contributing to higher electrostatic capacitance of the electrochemical capacitor and to development of high rate characteristics; the porous carbon material having a co-continuous structural portion in which a carbon skeleton and voids form respective continuous structures, the co-continuous structural portion having a structural period of 0.002 ?m to 20 ?m.Type: ApplicationFiled: September 14, 2015Publication date: November 9, 2017Applicant: TORAY INDUSTRIES, INC.Inventors: Kentaro Tanaka, Kosaku Takeuchi, Takaaki Mihara, Tomoyuki Horiguchi
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Publication number: 20170323738Abstract: The present patent application discloses a method of producing nano-porous carbon, comprising mixing furfuryl alcohol or its fast-polymerizing derivatives with an aluminum-based solid polymerization catalyst, heating the mixture until a solid catalyst-carbon matrix forms, heating again under inert atmosphere and etching the powder to remove the matrix to produce a network of pores in the nano-porous carbon. The application further provides a method for making of fabricating tailor-made nano-porous carbon electrodes.Type: ApplicationFiled: July 12, 2016Publication date: November 9, 2017Applicant: Farad Power, Inc.Inventor: Shantanu MITRA
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Publication number: 20170323739Abstract: A sealed electrical contact system includes at least one male electrical contact with at least one annular flange and a male conductive contact. At least one female electrical contact includes a receptacle and a female conductive contact disposed in the receptacle. The at least one annular flange is configured to contact an inner surface of the receptacle when the male conductive contact contacts the female conductive contact and closes a circuit.Type: ApplicationFiled: May 8, 2017Publication date: November 9, 2017Applicant: Overhead Door CorporationInventor: Federico Romero
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Publication number: 20170323740Abstract: A spring for an electrical switch comprises a contact arm and a base from which the contact arm extends. The contact arm has a contact member. The base has a terminal and an extension. The extension extends from the contact arm to the terminal and away from a remaining base.Type: ApplicationFiled: July 27, 2017Publication date: November 9, 2017Applicant: Tyco Electronics Austria GmbHInventors: Markus Gutmann, Rudolf Mikl
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Publication number: 20170323741Abstract: An electrical installation switching device has an insulating material housing; a switching knob protruding beyond the housing on a housing front face and able to pivot between a switched-on and switched-off position about a first pivot axis; a magnetic short circuit current and/or a thermal excess current trigger; a contact site formed from a fixed and a moveable contact piece, a switching lock having a latching site and being triggerable by an excess and/or short circuit current using the trigger when unlatching the latching site; an operator pivotable between a release and an operating position about a second pivot axis, aligned parallel to the first pivot axis, switching knob having an operating contour, the operator and operating contour cooperating by triggering the switching lock using the trigger when the operator pivots about the second pivot axis to hold the knob in an intermediate position between the on and off position.Type: ApplicationFiled: May 4, 2017Publication date: November 9, 2017Inventors: Ralf Weber, Erwin Muders, Klaus-Peter Eppe
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Publication number: 20170323742Abstract: An apparatus and method for a safety interlock door switch tool are disclosed. An example embodiment includes: support posts having a top end and a bottom end; base elements coupled to the bottom end of the support posts, an attachment mechanism being coupled to the base elements; a grip element coupled to the top end of the support posts; and a plurality of switch depression surfaces formed between the support posts, each of the plurality of switch depression surfaces being configured to engage and activate a particular type of safety interlock door switch.Type: ApplicationFiled: January 30, 2017Publication date: November 9, 2017Inventor: Glenn Michael Julian
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Publication number: 20170323743Abstract: An appliance includes a position switch retention device for use with an appliance including a body defining a generally cylindrical profile extending through a first portion thereof along an axis and having a first radius. The body further defines a pin-receiving channel open on at least a first end thereof and positioned within the generally cylindrical profile. The device further includes a first tab extending from a side of the body. The tab defines a ramp and an edge with the ramp extending away from the first end of the body to the edge. A cap extends outwardly from a second end of the body opposite the first end. The cap is spaced apart from the edge of the tab at a first distance and has a second radius greater than the first radius.Type: ApplicationFiled: July 27, 2017Publication date: November 9, 2017Applicant: WHIRLPOOL CORPORATIONInventors: James Charles Johncock, David Wayne Mundy
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Publication number: 20170323744Abstract: A surgical device comprising: (a) one or more functional elements, and (b) a selector assembly including: (i) one or more activation buttons, (ii) one or more circuit board switches, and (iii) a shuttle in communication with the circuit board switches or the one or more activation buttons to move the circuit board switches or the activation buttons between at least a first position and a second position so that the circuit board switches or the activation buttons are moveable relative to each other; wherein the one or more functional elements provide a first function when the circuit board switches or the one or more activation buttons are in the first position, and the one or more functional elements provide a second function when the circuit board switches or the one or more activation buttons are in the second position.Type: ApplicationFiled: July 24, 2017Publication date: November 9, 2017Inventors: Theodore Blus, Riyad Moe
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Publication number: 20170323745Abstract: The electrical cover comprises a press-fit or other type of fastener held electrical cover. Embodiments of the electrical cover described herein provide flexible finish material covers that guard light switches from paint, spackling, and other foreign materials. The covers utilize specifically shaped features on the surfaces that help minimize stress in the cover. The fasteners used to hold the light electrical covers are specifically designed to accommodate variations in manufacturers threaded hole positions and diameter tolerances. The electrical covers are shaped with an arched rear surface that assists in minimizing edge warping when the electrical cover is positioned against the wall surface. Features are also molded into the parts to assist and strengthen the cover flatness once installed, and thus protect against the intrusion of finish material behind the cover.Type: ApplicationFiled: May 4, 2017Publication date: November 9, 2017Inventors: Bradley Cohen, Brian Neece
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Publication number: 20170323746Abstract: A slider assembly is for an electrical switch having an upper housing. The slider assembly includes a slider mechanism structured to be disposed on an exterior surface of the upper housing and a shutter structured to be disposed in an interior of said upper housing and to be coupled to said slider mechanism. The shutter includes a number of biasing members structured to engage and apply a bias force against interior sidewalls of said upper housing, thereby creating a friction force associated with movement of said slider mechanism.Type: ApplicationFiled: May 3, 2016Publication date: November 9, 2017Applicant: EATON CORPORATIONInventors: NAVNEET RAMKRUSHNAJI DHOTE, NILESH KAMLAKAR SAWAI, PRAMOD KUMAR, OSCAR L. NEUNDORFER
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Publication number: 20170323747Abstract: A pyrotechnic safety element is particularly suited for use in motor vehicles. The safety element includes a conductor, a pyrotechnic unit with a pyrotechnic propellant charge, a severing member for severing the conductor, and a housing. The conductor is composed of two separate conductor parts which are joined at a joining point and are severed by the severing member when the device is triggered.Type: ApplicationFiled: July 27, 2017Publication date: November 9, 2017Inventors: MARTIN BURGER, PETER STEINER
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Publication number: 20170323748Abstract: A carrier body for a relay comprises a base body, a coil carrier, and a contact mount. The base body is monolithically formed with the coil carrier and the contact mount. The coil carrier and the contact mount extend from the base body.Type: ApplicationFiled: July 26, 2017Publication date: November 9, 2017Applicant: Tyco Electronics Austria GmbHInventors: Markus Gutmann, Rudolf Mikl, Paul Indrajit
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Publication number: 20170323749Abstract: A magnetic flux assembly for closing a magnetic circuit of a relay and a relay. The magnetic flux assembly has a yoke and a U-shaped armature that is movable relative to the yoke. The yoke has a coil part that is in a coil and a flux conduction part that conducts the magnetic flux generated by the coil.Type: ApplicationFiled: July 27, 2017Publication date: November 9, 2017Applicant: Tyco Electronics Austria GmbHInventors: Markus Gutmann, Rudolf Mikl, Paul Indrajit
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Publication number: 20170323750Abstract: A spring for an electric switch comprises a base portion, a contact section, and a return spring section. The base portion forms a proximal end of the spring. The contact section extends from the base portion to a distal end of the spring opposite the proximal end. The contact section has a contact member. The return spring section extends from the base portion alongside the contact section.Type: ApplicationFiled: July 27, 2017Publication date: November 9, 2017Applicant: Tyco Electronics Austria GmbHInventors: Markus Gutmann, Rudolf Mikl, Paul Indrajit
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Publication number: 20170323751Abstract: In present disclosure, a movable bar guide portion is formed to protrude toward a movable bar in a shaft having a movable bar, and when a fault current is applied and the movable bar is rotated due to electromagnetic repulsion force, the movable bar and the movable bar guide portion contact each other, and thus, when the movable bar is rotated through the movable guide portion, movement of a rotation center of the movable bar is minimized.Type: ApplicationFiled: January 14, 2017Publication date: November 9, 2017Applicant: LSIS CO., LTD.Inventor: Jongmahn SOHN
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Publication number: 20170323752Abstract: In one embodiment, there is a fault interrupter device comprising at least one sensor comprising at least one first transformer having at least one outer region forming an outer periphery and at least one inner hollow region. There is also at least one second transformer that is disposed in the inner hollow region of the at least one first transformer. The transformers can be substantially circular in configuration, and more particularly, ring shaped. In another embodiment there is a rotatable latch which is used to selectively connect and disconnect a set of separable contacts to selectively disconnect power from the line side to the load side. The rotatable latch is in one embodiment coupled to a reset button. In at least one embodiment there is a slider which is configured to selectively prevent the manual tripping of the device.Type: ApplicationFiled: June 9, 2017Publication date: November 9, 2017Applicant: Leviton Manufacturing Co., Inc.Inventors: Michael Kamor, James Porter, Kurt Dykema
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Publication number: 20170323753Abstract: An adjustable thermal trip mechanism for a circuit breaker is provided which can improve the reliability of over-current tripping by minimizing an influence upon thermal tripping even if an assembly error such as skewing or twisting occurs during assembly of bimetallic strips. The adjustable thermal trip mechanism for the circuit breaker comprises: a crossbar that is rotatable and has at least one power receiving portion for receiving rotary power; a bimetallic strip that can bend towards the power receiving portion when an over current occurs on the circuit; and an adjustment screw installed to face the power receiving portion, wherein the power receiving portion comprises a plurality of planar portions which are at different distances from the adjustment screw.Type: ApplicationFiled: May 2, 2017Publication date: November 9, 2017Applicant: LSIS CO., LTD.Inventor: Kwangwon LEE
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Publication number: 20170323754Abstract: In an embodiment, a method includes forming a first diamond layer on a substrate and inducing a layer of graphene from the first diamond layer by heating the substrate and the first diamond layer. The method includes forming a second diamond layer on top of the layer of graphene and applying a mask to the second diamond layer. The mask includes a shape of a cathode, an anode, and one or more grids. The method further includes forming a two-dimensional cold cathode, a two-dimensional anode, and one or more two-dimensional grids by reactive-ion electron-beam etching. Each of the two-dimensional cold cathode, the two-dimensional anode, and the one or more two-dimensional grids includes a portion of the first diamond layer, the graphene layer, and the second diamond layer such that the graphene layer is positioned between the first diamond layer and the second diamond layer.Type: ApplicationFiled: May 4, 2016Publication date: November 9, 2017Inventor: David Glen Findley
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Publication number: 20170323755Abstract: Graphene grids are configured for applications in vacuum electronic devices. A multilayer graphene grid is configured as a filter for electrons in a specific energy range, in a field emission device or other vacuum electronic device. A graphene grid can be deformable responsive to an input to vary electric fields proximate to the grid. A mesh can be configured to support a graphene grid.Type: ApplicationFiled: May 23, 2017Publication date: November 9, 2017Inventors: William David Duncan, Roderick A. Hyde, Jordin T. Kare, Max N. Mankin, Tony S. Pan, Lowell L. Wood
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Publication number: 20170323756Abstract: An apparatus includes an emitter electrode including a phosphorus doped diamond layer with low work function. The apparatus further includes a collector electrode and a vacuum gap disposed between the emitter and the collector. The collector has a work function of 0.84 eV or less.Type: ApplicationFiled: May 5, 2017Publication date: November 9, 2017Inventors: Franz A.M. Koeck, Robert J. Nemanich
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Publication number: 20170323757Abstract: A device for collimation or focusing of a relativistic electron packet, obtained in particular by laser-plasma acceleration, including a gas cloud and a laser capable of emitting a laser pulse focused in the gas cloud in order to create therein a wave of focusing electric and magnetic fields. The invention also relates to a device for emission of a collimated or focused relativistic electron packet. The invention further relates to a collimation or focusing method for a relativistic electron packet, and to methods for emission of a collimated or focused relativistic electron packet.Type: ApplicationFiled: November 4, 2015Publication date: November 9, 2017Applicants: ECOLE POLYTECHNIQUE, ECOLE NATIONALE SUPÉRIEURE DE TECHNIQUES AVANCÉESInventors: Cédric THAURY, Rémi LEHE, Victor MALKA, Emilien GUILLAUME
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Publication number: 20170323758Abstract: According to one embodiment, a rotating anode X-ray tube including a rotating cylinder, a rotating shaft fixed to the inside of the rotating cylinder, an anode fixing body arranged between the rotating cylinder and the rotating shaft, extending in the axial direction, and constituted of one of a magnetic substance member formed of a magnetic substance and a heat-transfer enhancing member heat conductivity of which is higher than surrounding members, ball bearings, and an inner member, connected to the anode fixing body by a connecting member, and constituted of one of the magnetic substance member and the heat-transfer enhancing member, one being different from the member constituting the anode fixing body.Type: ApplicationFiled: July 26, 2017Publication date: November 9, 2017Applicant: Toshiba Electron Tubes & Devices Co., Ltd.Inventors: Hidetaka Nakabayashi, Hiroyuki Kumadaki, Hidero Anno
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Publication number: 20170323759Abstract: An X-ray tube includes a cathode, which is configured to generate an electron beam, and a round anode, which is configured to rotate such that the electron beam impinges on a rotating surface of the anode so as to emit at least one X-ray beam. An array of gas pipes is configured to direct gas onto the surface so as to cool the anode.Type: ApplicationFiled: July 23, 2017Publication date: November 9, 2017Inventor: John Leonard Wall
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Publication number: 20170323760Abstract: A multicolumn charged particle beam exposure apparatus includes a plurality of column cells which generate charged particle beams, and the column cell includes a yoke which is made of a magnetic material and generates a magnetic field of a predetermined intensity distribution around an optical axis of the column, and a coil which is wound around the yoke. The coil includes a plurality of divided windings, which are driven by different power sources.Type: ApplicationFiled: March 17, 2017Publication date: November 9, 2017Inventors: Masaki Kurokawa, Takamasa Sato, Shinichi Kojima, Akio Yamada
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Publication number: 20170323761Abstract: A charged particle detector with high detection efficiency is presented in this patent. This charged particle detector contains a grid electrode used for attracting charged particles, a convertor with the shape of particle entrance area smaller than the particle exit area, which is used for converging charged particles and converting ions into electrons in the ion detection mode, an electron detection unit used for detecting secondary electrons and amplifying the signal detected, and a metal shielding. This optimized detector has a simple construction, is easy to assemble and has a low manufacturing cost.Type: ApplicationFiled: May 3, 2017Publication date: November 9, 2017Inventors: Hu Luo, Xu Zhang
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Publication number: 20170323762Abstract: An electron microscope includes: a sample holder; a first optical system irradiating and scanning the sample; an electron detection unit detecting secondary electrons discharged from the sample; a first vacuum chamber which holds the sample holder, the first optical system, and the electron detection unit in a vacuum atmosphere; a display unit displaying a microscopic image of the sample; and a control unit which controls the sample holder and the operation of the first optical system. The electron microscope includes a second vacuum chamber different from the first vacuum chamber, and a second optical system in the second vacuum chamber and is different from the first optical system. The second optical system and the control unit are capable of mutual communication, and the second vacuum chamber has a state changing means which changes the state of the sample.Type: ApplicationFiled: November 11, 2014Publication date: November 9, 2017Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Toshiyuki OOYAGI, Takafumi YOTSUJI, Isao NAGAOKI
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Publication number: 20170323763Abstract: The purpose of the present invention is to provide a charged particle beam device with which it is possible to minimize the beam irradiation amount while maintaining a high measurement success rate. The present invention is a charged particle beam device provided with a control device for controlling a scan deflector on the basis of selection of a predetermined number n of frames, wherein the control device controls the scan deflector so that a charged particle beam is selectively scanned on a portion on a sample corresponding to a pixel satisfying a predetermined condition or a region including the portion on the sample from an image obtained by scanning the charged particle beam for a number m of frames (m?1), the number m of frames being smaller than the number n of frames.Type: ApplicationFiled: July 27, 2015Publication date: November 9, 2017Inventors: Hideki ITAI, Kumiko SHIMIZU, Wataru MORI, Hajime KAWANO, Shahedul HOQUE
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Publication number: 20170323764Abstract: In this invention, vibrations generated by a freezer from a cooling mechanism for cooling an ion source emitter tip are prevented from being transmitted to the emitter tip as much as possible, while the cooling capability of the cooling mechanism is improved widely. The ion beam device (10) is equipped with: an ion source housing (22) provided with an emitter tip (45) and defining an ion source chamber (27) supplied with an ionization gas or gas molecules; a gas pot (51) provided in the ion source chamber (27) so as to be thermally connected to the emitter tip (45) and accommodated so as to have no direct physical contact with a cooling stage (57) of a freezer (52); and a spacer (59) provided on the peripheral surface of the cooling stage (57) housed by the gas pot (51) and maintaining a given interval or greater between the peripheral surface of the cooling stage (57) and the internal peripheral surface of the gas pot (52).Type: ApplicationFiled: November 26, 2014Publication date: November 9, 2017Inventors: Hiroyuki MUTO, Yoshimi KAWANAMI
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Publication number: 20170323765Abstract: A protein powder is exposed to plasma at a specified temperature and power for a specified time period wherein the plasma treated protein powder includes an increased fluorescence in a melt curve at room temperature in comparison to an untreated protein.Type: ApplicationFiled: June 20, 2017Publication date: November 9, 2017Inventor: Stephen James Motosko, III
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Publication number: 20170323766Abstract: An RF antenna structure of an inductively coupled plasma (ICP) processing apparatus that includes a main container 10 that houses a substrate to be processed S to perform plasma processing, a substrate mounting unit 20 on which the substrate to be processed S is mounted in the main container 10, an exhaust system 30 that discharges gas from inside of the main container 10, one or more dielectric windows 100 that form an upper window of the main container 10, a dielectric supporting unit 400 that is coupled to an upper end of the main container 10 and supports the dielectric window 100 to seal the inside of the main container 10, and one or more RF antennas 40 which are installed to correspond to the dielectric windows 100 outside the main container 10 and to which RF power is applied to form induced electric field in the main container 10, wherein the RF antenna 40 has a plate structure having width and thickness and is at least partly a combination of a horizontal antenna portion 41 and a vertical antenna poType: ApplicationFiled: May 11, 2016Publication date: November 9, 2017Applicant: VNI SOLUTION Co., LTD.Inventor: Saeng Hyun CHO
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Publication number: 20170323767Abstract: An Dielectric window of an inductively coupled plasma (ICP) processing apparatus that includes a main container 10 that houses a substrate to be processed S to perform plasma processing, a substrate mounting unit 20 on which the substrate to be processed S is mounted in the main container 10, an exhaust system 30 that discharges gas from inside of the main container 10, a dielectric window 100 that form an upper window of the main container 10, and one or more RF antennas 40 which are installed to correspond to the dielectric windows 100 outside the main container 10 and to which RF power is applied to form induced electric field in the main container 10, wherein the dielectric window 100 is integrated from a plurality of dielectric members 110 divided in a horizontal direction, is provided, so it is possible to minimize power loss by the replacement of a dielectric supporting structure at a region where an antenna is installed, with ceramic.Type: ApplicationFiled: May 11, 2016Publication date: November 9, 2017Applicant: VNI SOLUTION Co., LTD.Inventor: Saeng Hyun CHO
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Publication number: 20170323768Abstract: Embodiments of the disclosure include methods for in-situ chamber cleaning efficiency enhancement process for a plasma processing chamber utilized for a semiconductor substrate fabrication process. In one embodiment, a method for performing a plasma treatment process after cleaning a plasma process includes performing a cleaning process in a plasma processing chamber in absent of a substrate disposed thereon, subsequently supplying a plasma treatment gas mixture including at least a hydrogen containing gas and/or an oxygen containing gas into the plasma processing chamber, applying a RF source power to the processing chamber to form a plasma from the plasma treatment gas mixture, and plasma treating an interior surface of the processing chamber.Type: ApplicationFiled: May 3, 2016Publication date: November 9, 2017Inventors: Lin ZHANG, Xuesong LU, Andrew V. LE, Jang Seok OH, Xinhai HAN
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Publication number: 20170323769Abstract: A dielectric window supporting structure of inductively coupled plasma (ICP) processing apparatus that includes a main container that houses a substrate to perform plasma processing, a substrate mounting unit on which the substrate is mounted, an exhaust system, a plurality of dielectric windows that form an upper window of the main container, a dielectric supporting unit coupled to an upper end of the main container and supports the dielectric window to seal the inside of the main container, and one or more RF antennas installed to correspond to plurality of the dielectric windows outside the main container. The dielectric supporting unit includes a central frame which supports a bottom edge of the dielectric window and an outer frame which supports the central frame. The outer frame is supported by the upper end of the main container. The central frame includes ceramic material and the outer frame includes metallic material.Type: ApplicationFiled: May 11, 2016Publication date: November 9, 2017Applicant: VNI SOLUTION Co., LTD.Inventor: Saeng Hyun CHO
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Publication number: 20170323770Abstract: An Dielectric window of an inductively coupled plasma (ICP) processing apparatus that includes a main container 10 that houses a substrate to be processed S to perform plasma processing, a substrate mounting unit 20 on which the substrate to be processed S is mounted in the main container 10, an exhaust system 30 that discharges gas from inside of the main container 10, a dielectric window 100 that form an upper window of the main container 10, and one or more RF antennas 40 which are installed to correspond to the dielectric windows 100 outside the main container 10 and to which RF power is applied to form induced electric field in the main container 10, wherein the dielectric window 100 is formed as one body from one or more dielectric members, and bonded with a ceramic reinforcing member 120 to at least one surface of the upper surface and the lower surface of the dielectric window 100, including a dielectric window supporting unit 500 supporting at least one of the dielectric window 100 and the ceramic reType: ApplicationFiled: May 11, 2016Publication date: November 9, 2017Applicant: VNI SOLUTION Co., LTD.Inventor: Saeng Hyun CHO
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Publication number: 20170323771Abstract: A radio-frequency (RF) generator is provided that includes an exciter, a power amplifier, a filter, a sensor, and a frequency-tuning subsystem.Type: ApplicationFiled: July 24, 2017Publication date: November 9, 2017Inventors: Myeong Yeol Choi, Denis Shaw, Mike Mueller, Jeffrey Roberg, Steve Jordan
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Publication number: 20170323772Abstract: An article comprises a body having a protective coating. The protective coating is a thin film that comprises a metal oxy-fluoride. The metal oxy-fluoride has an empirical formula of MxOyFz, where M is a metal, y has a value of 0.1 to 1.9 times a value of x and z has a value of 0.1 to 3.9 times the value of x. The protective coating has a thickness of 1 to 30 microns and a porosity of less than 0.1%.Type: ApplicationFiled: April 26, 2017Publication date: November 9, 2017Inventors: David Fenwick, Chengtsin Lee, Jennifer Y. Sun, Yikai Chen
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Publication number: 20170323773Abstract: A high-voltage power source for applying high voltage to a nozzle of an ESI ion source includes a charge release assistant section (26) including switch circuits (62 and 65) and other elements for forcing electric charges accumulated at output terminals to be discharged in a polarity-switching operation, whereby the positive/negative switching of the polarity of the output voltage can be quickly performed. In the mass spectrometer according to the present invention, for example, when the voltage applied to the nozzle needs to be changed from Vi to V2 (where V1 and V2 are positive, and V1>V2), a voltage control section (20) under the command of a main controller (9) operates a positive voltage generation section (21) and negative voltage generation section (23) so as to temporarily provide a negative output voltage. After a predetermined period of time, the voltage control section operates the positive voltage generation section (21) and negative voltage generation section (23) so as to provide voltage V2.Type: ApplicationFiled: October 20, 2014Publication date: November 9, 2017Applicant: SHIMADZU CORPORATIONInventor: Shiro MIZUTANI
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Publication number: 20170323774Abstract: Disclosed herein is a laser processing apparatus including a condenser having a function of spherical aberration. Since the condenser has a function of spherical aberration, the focal point of a laser beam to be focused by the condenser and applied to a wafer can be continuously changed in position along the thickness of the wafer. Accordingly, a uniform shield tunnel composed of a fine hole and an amorphous region surrounding the fine hole can be formed so as to extend from, the front side of the wafer to the back side thereof, by one shot of the laser beam.Type: ApplicationFiled: May 2, 2017Publication date: November 9, 2017Inventor: Naotoshi Kirihara
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Publication number: 20170323775Abstract: Methods of forming SiCON films comprising sequential exposure to a silicon precursor and a mixture of alkanolamine and amine reactants and an optional plasma are described. Methods of forming a silicon-containing film comprising sequential exposure to a silicon precursor and an epoxide with an optional plasma exposure are also described.Type: ApplicationFiled: April 13, 2017Publication date: November 9, 2017Inventors: Mark Saly, David Thompson, Thomas Knisley, Bhaskar Jyoti Bhuyan
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Publication number: 20170323776Abstract: Vapor deposition processes are provided in which a material is selectively deposited on a first surface of a substrate relative to a second organic surface. In some embodiments a substrate comprising a first surface, such as a metal, semi-metal or oxidized metal or semi-metal is contacted with a first vapor phase hydrophobic reactant and a second vapor phase reactant such that the material is deposited selectively on the first surface relative to the second organic surface. The second organic surface may comprise, for example, a self-assembled monolayer, a directed self-assembled layer, or a polymer, such as a polyimide, polyamide, polyuria or polystyrene. The material that is deposited may be, for example, a metal or metallic material. In some embodiments the material is a metal oxide, such as ZrO2 or HfO2. In some embodiments the vapor deposition process is a cyclic chemical vapor deposition (CVD) process or an atomic layer deposition (ALD) process.Type: ApplicationFiled: April 28, 2017Publication date: November 9, 2017Inventors: Elina Färm, Hidemi Suemori, Raija Matero, Antti Niskanen, Suvi P. Haukka