Patents Issued in November 9, 2017
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Publication number: 20170323927Abstract: A magnetic cell includes magnetic, secondary oxide, and getter seed regions. During formation, a diffusive species is transferred from a precursor magnetic material to the getter seed region, due to a chemical affinity elicited by a getter species. The depletion of the magnetic material enables crystallization of the depleted magnetic material through crystal structure propagation from a neighboring crystalline material, without interference from the now-enriched getter seed region. This promotes high tunnel magnetoresistance and high magnetic anisotropy strength. Also during formation, another diffusive species is transferred from a precursor oxide material to the getter seed region, due to a chemical affinity elicited by another getter species. The depletion of the oxide material enables lower electrical resistance and low damping in the cell structure. Methods of fabrication and semiconductor devices are also disclosed.Type: ApplicationFiled: July 26, 2017Publication date: November 9, 2017Inventors: Gurtej S. Sandhu, Sumeet C. Pandey
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Publication number: 20170323928Abstract: The present disclosure relates to the fabrication of spin transfer torque memory elements for non-volatile microelectronic memory devices. The spin transfer torque memory element may include a magnetic tunneling junction connected with specifically sized and/or shaped fixed magnetic layer that can be positioned in a specific location adjacent a free magnetic layer. The shaped fixed magnetic layer may concentrate current in the free magnetic layer, which may result in a reduction in the critical current needed to switch a bit cell in the spin transfer torque memory element.Type: ApplicationFiled: July 24, 2017Publication date: November 9, 2017Applicant: INTEL CORPORATIONInventors: Brian S. Doyle, David L. Kencke, Charles C. Kuo, Dmitri E. Nikonov, Robert S. Chau
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Publication number: 20170323929Abstract: In accordance with an example embodiment of the present invention, an apparatus is disclosed. The apparatus includes a resistive memory component including an active material and two or more electrodes in electrical contact with the active material of the resistive memory component; and a selector component providing control over the resistive memory component, the selector component including an active material and two or more electrodes in electrical contact with the active material of the selector component. The resistive memory component and the selector component share one or more electrodes, and the resistive memory component and the selector component share at least part of the active material. A method and apparatus for producing the apparatus are also disclosed.Type: ApplicationFiled: October 31, 2014Publication date: November 9, 2017Inventors: Alexander Alexandrovich BESSONOV, Michael ASTLEY
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Publication number: 20170323930Abstract: A method for making a metal oxide semiconductor carbon nanotube thin film transistor circuit. A p-type carbon nanotube thin film transistor and a n-type carbon nanotube thin film transistor are formed on an insulating substrate and stacked with each other. The p-type carbon nanotube thin film transistor includes a first semiconductor carbon nanotube layer, a first drain electrode, a first source electrode, a functional dielectric layer, and a first gate electrode. The n-type carbon nanotube thin film transistor includes a second semiconductor carbon nanotube layer, a second drain electrode, a second source electrode, a first insulating layer, and a second gate electrode. The first drain electrode and the second drain electrode are electrically connected with each other. The first gate electrode and the second gate electrode are electrically connected with each other.Type: ApplicationFiled: May 3, 2016Publication date: November 9, 2017Inventors: YU-DAN ZHAO, QUN-QING LI, XIAO-YANG XIAO, GUAN-HONG LI, YUAN-HAO JIN, SHOU-SHAN FAN
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Publication number: 20170323931Abstract: A metal oxide semiconductor carbon nanotube thin film transistor circuit includes a p-type carbon nanotube thin film transistor and a n-type carbon nanotube thin film transistor stacked with each other. The p-type carbon nanotube thin film transistor includes a first semiconductor carbon nanotube layer, a first drain electrode, a first source electrode, a functional dielectric layer, and a first gate electrode. The n-type carbon nanotube thin film transistor includes a second semiconductor carbon nanotube layer, a second drain electrode, a second source electrode, a first insulating layer, and a second gate electrode. The first drain electrode and the second drain electrode are electrically connected with each other. The first gate electrode and the second gate electrode are electrically connected with each other.Type: ApplicationFiled: May 3, 2016Publication date: November 9, 2017Inventors: YU-DAN ZHAO, QUN-QING LI, XIAO-YANG XIAO, GUAN-HONG LI, YUAN-HAO JIN, SHOU-SHAN FAN
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Publication number: 20170323932Abstract: There is provided a solid-state image pickup device that includes a functional region provided with an organic film, and a guard ring surrounding the functional regionType: ApplicationFiled: July 26, 2017Publication date: November 9, 2017Inventors: Keisuke Hatano, Tetsuji Yamaguchi, Shintarou Hirata
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Publication number: 20170323933Abstract: A pixel circuit is provided comprising the following. The first transistor includes a gate electrode and a semiconductor layer comprising a channel region, a source region, a first drain region, and a second drain region. A first portion of the channel region is connected to the source region, a second portion of the channel region is connected to the first drain region, and a third portion of the channel region is connected to the second drain region. The channel width of the second portion is greater than that of the third portion. A capacitive device is connected to the gate of the first transistor. The second transistor includes a source region connected to the second drain region and a drain region connected to the light-emitting element. The third transistor includes a source region connected to the first drain region and a drain region connected to a capacitive device.Type: ApplicationFiled: July 28, 2017Publication date: November 9, 2017Inventors: Chi-Yu YEH, Chen-Ming HU, Yen-Shih HUANG
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Publication number: 20170323934Abstract: There is provided a flexible display having a plurality of innovations configured to allow bending of a portion or portions to reduce apparent border size and/or utilize the side surface of an assembled flexible display.Type: ApplicationFiled: July 24, 2017Publication date: November 9, 2017Inventors: Yunho KI, SieHyug CHOI, YoungMin YU, Sungwoo KIM, YoonDong CHO, SeYeoul KWON
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Publication number: 20170323935Abstract: A display device includes a first substrate arranged with a plurality of pixels on a first surface, the plurality of pixels having a display element including a transistor, and a first wiring connected to the transistor, a through electrode arranged in a first contact hole reaching the first wiring from a second surface facing the first surface of the first substrate, a second wiring connected with the through electrode, a first insulation film arranged covering the second wiring on the second surface of the first substrate, and a terminal connected with a second wiring via a second contact hole arranged in the first insulation film.Type: ApplicationFiled: July 25, 2017Publication date: November 9, 2017Inventors: Kazuto TSURUOKA, Norio OKU
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Publication number: 20170323936Abstract: A display apparatus includes a substrate including a display area displaying an image and a peripheral area outside the display area, a main wiring and an auxiliary wiring disposed in an identical layer in the peripheral area, the main wiring being disposed closer to the display area than the auxiliary wiring, a dam configured to cover at least a part of the main wiring, the auxiliary wiring being spaced apart from the dam, and a connecting wiring configured to connect the main wiring to the auxiliary wiring, and a thin-film encapsulation layer configured to seal the display area and the peripheral area.Type: ApplicationFiled: May 8, 2017Publication date: November 9, 2017Inventors: Jungkyu LEE, Donghwan SHIM, Taehyun KIM, Sangho PARK, Seungmin LEE, Seunghwan CHO
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Publication number: 20170323937Abstract: High density capacitor structures based on an array of semiconductor nanorods are provided. The high density capacitor structure can be a plurality of capacitors in which each of the semiconductor nanorods serves as a bottom electrode for one of the plurality of capacitors, or a large-area metal-insulator-metal (MIM) capacitor in which the semiconductor nanorods serve as a support structure for a bottom electrode of the MIM capacitor subsequently formed.Type: ApplicationFiled: July 27, 2017Publication date: November 9, 2017Applicant: GLOBALFOUNDRIES INC.Inventors: Wai-Kin Li, Chengwen Pei, Ping-Chuan Wang
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Publication number: 20170323938Abstract: A semiconductor device is provided. The semiconductor device includes a substrate; an epitaxial layer; a first conductive type first well region disposed in the substrate and the epitaxial layer; a second conductive type first buried layer and a second conductive type second buried layer disposed at opposite sides of the first conductive type first well region, respectively; a first conductive type second well region disposed in the epitaxial layer and being in direct contact with the first conductive type first well region; a second conductive type third buried layer disposed in the first conductive type first well region and/or the first conductive type second well region; a second conductive type doped region disposed in the first conductive type second well region; a gate structure; a drain contact plug; and a source contact plug.Type: ApplicationFiled: May 6, 2016Publication date: November 9, 2017Applicant: Vanguard International Semiconductor CorporationInventors: Chu-Feng CHEN, Wei-Chun CHOU, Chien-Wei CHIU
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Publication number: 20170323939Abstract: Presented herein is a device including an insulator layer disposed over a substrate. An adhesion layer is disposed over the insulator layer and includes a semiconductor oxide, the semiconductor oxide includes a compound of a semiconductor element and oxygen. A semiconductor film layer is over the adhesion layer, the semiconductor film layer being a material that includes the semiconductor element, the semiconductor film layer having a different composition than the adhesion layer. Bonds at an interface between the insulator layer and the adhesion layer comprise oxygen-hydrogen bonds and oxygen-semiconductor element bonds. An interface between a dummy gate and a gate dielectric layer of a gate-last transistor structure may be similarly formed.Type: ApplicationFiled: May 22, 2017Publication date: November 9, 2017Inventors: Chi-Ming Liao, Chun-Heng Chen, Sheng-Po Wu, Ming-Feng Hsieh, Hongfa Luan
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Publication number: 20170323940Abstract: A method includes method includes forming a dummy gate stack over a semiconductor substrate, wherein the semiconductor substrate is comprised in a wafer, removing the dummy gate stack to form a recess, forming a gate dielectric layer in the recess, and forming a metal layer in the recess and over the gate dielectric layer. The metal layer has an n-work function. A block layer is deposited over the metal layer using Atomic Layer Deposition (ALD). The remaining portion of the recess is filled with metallic materials, wherein the metallic materials are overlying the metal layer.Type: ApplicationFiled: July 21, 2017Publication date: November 9, 2017Inventors: Jung-Chih Tsao, Chi-Cheng Hung, Yu-Sheng Wang, Wen-Hsi Lee, Kei-Wei Chen, Ying-Lang Wang
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Publication number: 20170323941Abstract: A horizontal nanosheet field effect transistor (hNS FET) including source and drain electrodes, a gate electrode between the source and drain electrodes, a first spacer separating the source electrode from the gate electrode, a second spacer separating the drain electrode from the gate electrode, and a channel region under the gate electrode and extending between the source electrode and the drain electrode. The source electrode and the drain electrode each include an extension region. The extension region of the source electrode is under at least a portion of the first spacer and the extension region of the drain electrode is under at least a portion of the second spacer. The hNS FET also includes at least one layer of crystalline barrier material having a first thickness at the extension regions of the source and drain electrodes and a second thickness less than the first thickness at the channel region.Type: ApplicationFiled: November 1, 2016Publication date: November 9, 2017Inventors: Borna Obradovic, Titash Rakshit, Mark Rodder
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Publication number: 20170323942Abstract: A low electrical and thermal resistance FinFET device includes a semiconductor body, a fin body on the substrate wafer, an isolation structure forming a fin connecting region, a gate dielectric on the fin body extending above the isolation structure, a FinFET gate electrode on the gate dielectric, a heavily-doped buried layer in the semiconductor body extending under said fin, and a vertical conductive region extending from the semiconductor body surface to the heavily-doped buried layer. Additionally, a fin body-to-buried layer implanted region disposed in the fin connecting region provides a low electrical and thermal resistance shunt from the fin body to the heavily-doped buried layer.Type: ApplicationFiled: August 31, 2016Publication date: November 9, 2017Inventor: STEVEN HOWARD VOLDMAN
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Publication number: 20170323943Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes a fin active region formed on a semiconductor substrate and spanning between a first sidewall of a first shallow trench isolation (STI) feature and a second sidewall of a second STI feature; an anti-punch through (APT) feature of a first type conductivity; and a channel material layer of the first type conductivity, disposed on the APT feature and having a second doping concentration less than the first doping concentration.Type: ApplicationFiled: July 24, 2017Publication date: November 9, 2017Inventors: Cheng-Yi Peng, Ling-Yen Yeh, Chi-Wen Liu, Chih-Sheng Chang, Yee-Chia Yeo
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Publication number: 20170323944Abstract: A method of forming the semiconductor device that may include forming a trench in a substrate, and forming a metal nitride in the trench. The method may further include forming a split fin structure from the substrate. The metal nitride is positioned in the split portion of the fin structure. The method may continue with removing the metal nitride from a source region and drain region portion of the split fin structure, in which the metal nitride remains in a channel region portion of the split fin structure. A gate structure may then be formed on a channel region portion of the fin structure. A back bias is applied to the semiconductor device using the metal nitride in the split portion of the fin structure as an electrode.Type: ApplicationFiled: May 5, 2016Publication date: November 9, 2017Inventors: Veeraraghavan S. Basker, Zuoguang Liu, Xin Miao, Tenko Yamashita
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Publication number: 20170323945Abstract: A multilayer graphene composite comprising a plurality of stacked graphene layers separated from one another by an ion gel, wherein the ion gel is intercalated between adjacent graphene layers such that ions within the ion gel are able to arrange themselves at the surfaces of the graphene layers to cause a detectable change in one or more of an electrical and optical property of the graphene layers when a gate voltage is applied to a gate electrode in proximity to the ion gel.Type: ApplicationFiled: October 12, 2015Publication date: November 9, 2017Applicant: Nokia Technologies OyInventors: Samiul Md HAQUE, Alan COLLI
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Publication number: 20170323946Abstract: A III-N semiconductor channel is formed on a III-N transition layer formed on a (111) or (110) surface of a silicon template structure, such as a fin sidewall. In embodiments, the silicon fin has a width comparable to the III-N epitaxial film thicknesses for a more compliant seeding layer, permitting lower defect density and/or reduced epitaxial film thickness. In embodiments, a transition layer is GaN and the semiconductor channel comprises Indium (In) to increase a conduction band offset from the silicon fin. In other embodiments, the fin is sacrificial and either removed or oxidized, or otherwise converted into a dielectric structure during transistor fabrication. In certain embodiments employing a sacrificial fin, the III-N transition layer and semiconductor channel is substantially pure GaN, permitting a breakdown voltage higher than would be sustainable in the presence of the silicon fin.Type: ApplicationFiled: July 21, 2017Publication date: November 9, 2017Inventors: Han Wui THEN, Sansaptak DASGUPTA, Marko RADOSAVLJEVIC, Benjamin CHU-KUNG, Sanaz GARDNER, Seung Hoon SUNG, Robert S. Chau
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Publication number: 20170323947Abstract: A Schottky device includes a plurality of mesa structures where one or more of the mesa structures includes a doped region having a multi-concentration dopant profile. In accordance with an embodiment, the Schottky device is formed from a semiconductor material of a first conductivity type. Trenches having sidewalls and floors are formed in the semiconductor material to form a plurality of mesa structures. A doped region having a multi-concentration impurity profile is formed in at least one trench, where the impurity materials of the doped region having the multi-concentration impurity profile are of a second conductivity type. A Schottky contact is formed to at least one of the mesa structures having the dope region with the multi-concentration impurity profile.Type: ApplicationFiled: July 24, 2017Publication date: November 9, 2017Applicant: Semiconductor Components Industries, LLCInventors: Mohammed Tanvir Quddus, Mihir Mudholkar, Mingjiao Liu, Michael Thomason
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Publication number: 20170323948Abstract: A method of forming a substrate contact in a vertical transistor device includes patterning a sacrificial layer to form an opening in the sacrificial layer, the sacrificial layer disposed on hardmask arranged on a substrate, and the substrate including a bulk semiconductor layer, a buried oxide layer arranged on the bulk semiconductor layer, and a semiconductor layer arranged on the buried oxide layer; forming oxide spacers on sidewalls of the opening in the sacrificial layer; using the oxide spacers as a pattern to etch a trench through the substrate, the trench stopping at a region within the bulk semiconductor layer; and depositing a conductive material in the trench to form the substrate contact.Type: ApplicationFiled: April 10, 2017Publication date: November 9, 2017Inventors: Veeraraghavan S. Basker, Kangguo Cheng, Theodorus E. Standaert, Junli Wang
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Publication number: 20170323949Abstract: A starting structure for forming a gate-all-around field effect transistor (FET) and a method of fabricating the gate-all-around FET. The method includes forming a stack of silicon nanosheets above a substrateforming an interfacial layer over the nanosheets depositing a high-k dielectric layer conformally on the interfacial layer. The method also includes depositing a layer of silicon nitride (SiN) above the high-k dielectric layer and performing reliability anneal after depositing the layer of SiN to crystallize the high-k dielectric layer.Type: ApplicationFiled: May 4, 2016Publication date: November 9, 2017Inventors: Nicolas J. Loubet, Sanjay C. Mehta, Vijay Narayanan, Muthumanickam Sankarapandian
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Publication number: 20170323950Abstract: A semiconductor process is described. A silicon-phosphorus (SiP) epitaxial layer is formed serving as a source/drain (S/D) region. A crystalline metal silicide layer is formed directly on the SiP epitaxial layer and thus prevents oxidation of the SiP epitaxial layer. A contact plug is formed over the crystalline metal silicide layer.Type: ApplicationFiled: July 21, 2017Publication date: November 9, 2017Applicant: United Microelectronics Corp.Inventors: Pin-Hong Chen, Kuo-Chih Lai, Chia-Chang Hsu, Chun-Chieh Chiu, Li-Han Chen, Min-Chuan Tsai, Kuo-Chin Hung, Wei-Chuan Tsai, Hsin-Fu Huang, Chi-Mao Hsu
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Publication number: 20170323951Abstract: Forming a dummy gate on a semiconductor device is disclosed. A first sacrificial layer is formed on a fin, and a second sacrificial layer is formed on the first sacrificial layer. A first hardmask layer is formed on the second sacrificial layer, and a second hardmask layer is formed on the first hardmask layer and patterned. The first hardmask layer is laterally recessed in a lateral direction under the second hardmask layer. The first and second sacrificial layers are etched to a corresponding width of the first hardmask layer. A spacer layer is formed on the fin, the first sacrificial layer, second sacrificial layer, the first hardmask layer and the second hardmask layer. The spacer layer is etched until it remains on a sidewall of the first sacrificial layer, the second sacrificial layer and the first hardmask layer, wherein the first and second sacrificial layers form the dummy gate.Type: ApplicationFiled: June 6, 2017Publication date: November 9, 2017Inventors: Marc A. Bergendahl, Kangguo Cheng, Fee Li Lie, Eric R. Miller, John R. Sporre, Sean Teehan
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Publication number: 20170323952Abstract: Transistors include multiple stress liners. One or more channel structures are suspended at opposite ends from the plurality of stress liners. The stress liners provide a stress on the one or more channel structures. A gate is formed over and around the one or more channel structures, defining a channel region of the one or more channel structures that is covered by the gate. A source and drain region are formed on opposite sides of the gate.Type: ApplicationFiled: November 21, 2016Publication date: November 9, 2017Inventors: Kangguo Cheng, Ramachandra Divakaruni, Juntao LI, Xin Miao
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Publication number: 20170323953Abstract: Transistors and methods of forming the same include forming a fin of alternating layers of a channel material and a sacrificial material. Stress liners are formed in contact with both ends of the fin. The stress liners exert a stress on the fin. The sacrificial material is etched away from the fin, such that the layers of the channel material are suspended between the stress liners. A gate stack is formed over and around the suspended layers of channel material.Type: ApplicationFiled: March 31, 2017Publication date: November 9, 2017Inventors: Kangguo Cheng, Ramachandra Divakaruni, Juntao LI, Xin Miao
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Publication number: 20170323954Abstract: A fin-type field effect transistor including a substrate, insulators, a gate stack, a seal spacer, a first offset spacer, and a second offset spacer is described. The substrate has fins thereon. The insulators are located over the substrate and between the fins. The gate stack is located over the fins and over the insulators. The seal spacer is located over the sidewall of the gate stack. The first offset spacer is located over the seal spacer. The second offset spacer is located over the first offset spacer.Type: ApplicationFiled: May 4, 2016Publication date: November 9, 2017Inventors: Chun Hsiung Tsai, Kei-Wei Chen
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Publication number: 20170323955Abstract: An includes an epitaxial sub-fin structure disposed on a substrate, wherein a first portion of the sub-fin structure is disposed within a portion of the substrate, and a second portion of the sub-fin structure is disposed adjacent a dielectric material. A fin device structure is disposed on the sub-fin structure, wherein the fin device structure comprises the epitaxial material. A liner is disposed between the second portion of the sub-fin structure and the dielectric material. Other embodiments are described herein.Type: ApplicationFiled: December 23, 2014Publication date: November 9, 2017Applicant: Intel CorporationInventors: Willy Rachmady, Matthew V. Metz, Chandra S. Mohapatra, Gilbert Dewey, Jack T. Kavalieros, Anand S. Murthy, Nadia M. Rahhal-Orabi, Tahir Ghani, Glenn A. Glass
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Publication number: 20170323956Abstract: A method of forming a semiconductor device that includes forming a fin structure from a bulk semiconductor substrate and forming an isolation region contacting a lower portion of a sidewall of the fin structure, wherein an upper portion of the sidewall of the fin structure is exposed. A sacrificial spacer is formed on the upper portion of the sidewall of the fin structure. The isolation regions are recessed to provide an exposed section of the sidewall of the fin structure. A doped semiconductor material is formed on the exposed section of the lower portion of the sidewall of the fin structure. Dopant is diffused from the doped semiconductor material to a base portion of the fin structure.Type: ApplicationFiled: July 21, 2017Publication date: November 9, 2017Inventors: Veeraraghavan S. Basker, Zuoguang Liu, Tenko Yamashita, Chun-Chen Yeh
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Publication number: 20170323957Abstract: It is an object to provide a semiconductor device including a thin film transistor with favorable electric properties and high reliability, and a method for manufacturing the semiconductor device with high productivity. In an inverted staggered (bottom gate) thin film transistor, an oxide semiconductor film containing In, Ga, and Zn is used as a semiconductor layer, and a buffer layer formed using a metal oxide layer is provided between the semiconductor layer and a source and drain electrode layers. The metal oxide layer is intentionally provided as the buffer layer between the semiconductor layer and the source and drain electrode layers, whereby ohmic contact is obtained.Type: ApplicationFiled: July 21, 2017Publication date: November 9, 2017Inventors: Shunpei YAMAZAKI, Hidekazu MIYAIRI, Kengo AKIMOTO, Kojiro SHIRAISHI
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Publication number: 20170323958Abstract: In one embodiment, an IGBT is formed to include a region of semiconductor material. Insulated gate structures are disposed in region of semiconductor material extending from a first major surface. An n-type field stop region extends from a second major surface into the region of semiconductor material. A p+ type polycrystalline semiconductor layer is disposed adjacent to the field stop region and provides an emitter region for the IGBT. An embodiment may include a portion of the p+ type polycrystalline semiconductor being doped n-type.Type: ApplicationFiled: July 24, 2017Publication date: November 9, 2017Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCInventors: Marian KURUC, Juraj VAVRO
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Publication number: 20170323959Abstract: An insulated gate power semiconductor device has an (n?) doped drift layer between an emitter side and a collector side. A trench gate electrode has a trench bottom and trench lateral sides and extends to a trench depth. A p doped first protection pillow covers the trench bottom. An n doped second protection pillow encircles the trench gate electrode at its trench lateral sides. The second protection pillow has a maximum doping concentration in a first depth, which is at least half the trench depth, wherein a doping concentration of the second protection pillow decreases towards the emitter side from the maximum doping concentration to a value of not more than half the maximum doping concentration. An n doped enhancement layer has a maximum doping concentration in a second depth, which is lower than the first depth, wherein the doping concentration has a local doping concentration minimum between the second depth and the first depth.Type: ApplicationFiled: July 27, 2017Publication date: November 9, 2017Inventors: Luca De-Michielis, Chiara Corvasce
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Publication number: 20170323960Abstract: An epitaxial wafer including: a silicon-based substrate; a first buffer layer on the substrate and including a first multilayer structure buffer region composed of AlxGa1-xN layers and AlyGa1-yN layers (x>y) alternately disposed and a first insertion layer composed of an AlzGa1-zN layer (x>z) and is thicker than the AlyGa1-yN layer, the first regions and insertion layers alternately disposed; a second buffer layer on the first and including a second multilayer structure buffer region composed of Al?Ga1-?N layers and Al?Ga1-?N layers (?>?) alternately disposed and a second insertion layer composed of an Al?Ga1-?N layer (?>?) and is thicker than the Al?Ga1-?N layer, the second regions and insertion layers alternately disposed; and a channel layer on the second buffer layer and thicker than the second insertion layer. The average Al composition in the second buffer layer is higher than that in the first.Type: ApplicationFiled: November 6, 2015Publication date: November 9, 2017Applicants: SANKEN ELECTRIC CO., LTD., SHIN-ETSU HANDOTAI CO., LTD.Inventors: Ken SATO, Hiroshi SHIKAUCHI, Hirokazu GOTO, Masaru SHINOMIYA, Keitaro TSUCHIYA, Kazunori HAGIMOTO
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Publication number: 20170323961Abstract: In some examples, a semiconductor device includes a substrate, a first doped region formed in the substrate, a second doped region around and spaced apart from the first doped region, and a channel between the first and second doped regions and formed using a gate ring on the substrate as a mask. A gate is formed over only a portion of the channel, the gate being a portion of the gate ring.Type: ApplicationFiled: July 24, 2017Publication date: November 9, 2017Inventors: Ning GE, Leong Yap CHIA, Pin Chin LEE, Jose Jehrome RANDO
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Publication number: 20170323962Abstract: An embodiment includes a device comprising: a trench that includes a doped trench material having: (a)(i) a first bulk lattice constant and (a)(ii) at least one of a group III-V material and a group IV material; a fin structure, directly over the trench, including fin material having: (b) (ii) a second bulk lattice constant and (b)(ii) at least one of a group III-V material and a group IV material; a barrier layer, within the trench and directly contacting a bottom surface of the fin, including a barrier layer material having a third bulk lattice constant; wherein (a) the trench has an aspect ratio (depth to width) of at least 1.5:1, and (b) the barrier layer has a height not greater than a critical thickness for the barrier layer material. Other embodiments are described herein.Type: ApplicationFiled: December 17, 2014Publication date: November 9, 2017Inventors: GILBERT DEWEY, MATTHEW V. METZ, JACK T. KAVALIEROS, WILLY RACHMADY, TAHIR GHANI, ANAND S. MURTHY, CHANDRA S. MOHAPATRA, HAROLD W. KENNEL, GLENN A. GLASS
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Publication number: 20170323963Abstract: An embodiment includes a device comprising: a fin structure including an upper portion and a lower portion, the upper portion having a bottom surface directly contacting an upper surface of the lower portion; wherein (a) the lower portion is included in a trench having an aspect ratio (depth to width) of at least 2:1; (b) the bottom surface has a bottom maximum width and the upper surface has an upper maximum width that is greater the bottom maximum width; (c) the bottom surface covers a middle portion of the upper surface but does not cover lateral portions of the upper surface; and (d) the upper portion includes an upper III-V material and the lower portion includes a lower III-V material different from the upper III-V material. Other embodiments are described herein.Type: ApplicationFiled: December 23, 2014Publication date: November 9, 2017Inventors: Sanaz K. GARDNER, Willy RACHMADY, Matthew V. METZ, Gilbert DEWEY, Jack T. KAVALIEROS, Chandra S. MOHAPATRA, Anand S. MURTHY, Nadia RAHHAL-ORABI, Nancy M. ZELICK, Tahir GHANI
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Publication number: 20170323964Abstract: A method of forming the semiconductor device that may include forming a trench in a substrate, and forming a metal nitride in the trench. The method may further include forming a split fin structure from the substrate. The metal nitride is positioned in the split portion of the fin structure. The method may continue with removing the metal nitride from a source region and drain region portion of the split fin structure, in which the metal nitride remains in a channel region portion of the split fin structure. A gate structure may then be formed on a channel region portion of the fin structure. A back bias is applied to the semiconductor device using the metal nitride in the split portion of the fin structure as an electrode.Type: ApplicationFiled: May 11, 2017Publication date: November 9, 2017Inventors: Veeraraghavan S. Basker, Zuoguang Liu, Xin Miao, Tenko Yamashita
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Publication number: 20170323965Abstract: Techniques related to integrated circuits having MOSFETs with an unrecessed field insulator and thinner electrodes over the field insulator of ICs, systems incorporating such integrated circuits, and methods for forming them are discussed.Type: ApplicationFiled: July 19, 2017Publication date: November 9, 2017Inventors: Michael L. HATTENDORF, Pragyansri PATHI, Michael K. HARPER
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Publication number: 20170323966Abstract: The present description relates to the field of fabricating microelectronic devices having non-planar transistors. Embodiments of the present description relate to the formation of source/drain contacts within non-planar transistors, wherein a titanium-containing contact interface may be used in the formation of the source/drain contact with a discreet titanium silicide formed between the titanium-containing interface and a silicon-containing source/drain structure.Type: ApplicationFiled: July 21, 2017Publication date: November 9, 2017Applicant: Intel CorporationInventors: Sameer S. Pradhan, Subhash M. Joshi, Jin-Sung Chun
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Publication number: 20170323967Abstract: Transistor and methods of forming the same include forming a channel fin on a bottom source/drain region. A dielectric fill is formed around the channel fin with a gap in an area directly above the channel fin that has a width greater than a width of the channel fin. Spacers are formed in the gap. The dielectric fill is etched away. A gate stack is formed on sidewalls of the channel fin directly underneath the spacers.Type: ApplicationFiled: May 5, 2016Publication date: November 9, 2017Inventors: Veeraraghavan S. Basker, Kangguo Cheng, Theodorus E. Standaert, Junli Wang
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Publication number: 20170323968Abstract: A transistor includes a vertical channel fin directly on a bottom source/drain region. A gate stack is formed on sidewalls of the vertical channel fin. Spacers are formed directly above the gate stack, one above each sidewall of the vertical channel fin. A top source/drain region is formed directly on a top surface of the vertical channel fin, between the spacers.Type: ApplicationFiled: April 25, 2017Publication date: November 9, 2017Inventors: Veeraraghavan S. Basker, Kangguo Cheng, Theodorus E. Standaert, Junli Wang
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Publication number: 20170323969Abstract: A first contact hole is formed so as to extend to a NiSi layer as a lower wiring conductor layer connecting to an N+ layer of an SGT formed within a Si pillar, and so as to extend through a NiSi layer as an upper wiring conductor layer connecting to a gate TiN layer, and a NiSi layer as an intermediate wiring conductor layer connecting to an N+ layer. A second contact hole is formed so as to extend to the NiSi layer, and surround, in plan view, the first contact hole. An insulating SiO2 layer is formed on a side surface of the NiSi layer. A wiring metal layer in the contact holes connects the NiSi layer and the NiSi layer to each other.Type: ApplicationFiled: July 20, 2017Publication date: November 9, 2017Inventors: Fujio MASUOKA, Nozomu HARADA
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Publication number: 20170323970Abstract: Devices, structures, and methods thereof for providing a Schottky or Schottky-like contact as a source region and/or a drain region of a power transistor are disclosed. A power transistor structure comprises a substrate of a first dopant polarity, a drift region formed on or within the substrate, a body region formed on or within the drift region, a gate structure formed on or within the substrate, a source region adjacent to the gate structure, a drain region formed adjacent to the gate structure. At least one of the source region and the drain region is formed from a Schottky or Schottky-like contact substantially near a surface of the substrate, comprising a silicide layer and an interfacial dopant segregation layer. The Schottky or Schottky-like contact is formed by low-temperature annealing a dopant segregation implant in the source and/or drain region.Type: ApplicationFiled: April 28, 2017Publication date: November 9, 2017Applicant: Silicet, LLCInventors: Gary M. DOLNY, William R. RICHARDS, JR., Randall MILANOWSKI
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Publication number: 20170323971Abstract: A FinFET device and a method of forming the same are disclosed. In accordance with some embodiments, a FinFET device includes a substrate having at least one fin, a gate stack across the at least one fin, a strained layer aside the gate stack and a silicide layer over the strained layer. The strained layer has a boron surface concentration greater than about 2E20 atom/cm3 within a depth range of about 0-5 nm from a surface of the strained layer.Type: ApplicationFiled: July 18, 2017Publication date: November 9, 2017Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chun Hsiung Tsai, Chien-Tai Chan, Ziwei Fang, Kei-Wei Chen, Huai-Tei Yang
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Publication number: 20170323972Abstract: A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.Type: ApplicationFiled: July 26, 2017Publication date: November 9, 2017Inventors: Robert S. CHAU, Suman DATTA, Jack KAVALIEROS, Justin K. BRASK, Mark L. DOCZY, Matthew METZ
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Publication number: 20170323973Abstract: A semiconductor structure includes a layer arrangement consisting of, in sequence, a semiconductor-on-insulator layer (SOI) over a buried oxide (BOX) layer over a buried stressor (BS) layer with a silicon bonding layer (BL) intervening between the BOX and the BS layers. The semiconductor structure may be created by forming the BS layer on a substrate of a first wafer; growing the BL layer at the surface of the BS layer; wafer bonding the first wafer to a second wafer having a silicon oxide layer formed on a silicon substrate such that the silicon oxide layer of the second wafer is bonded to the BL layer of the first wafer, and thereafter removing a portion of the silicon substrate of the second wafer.Type: ApplicationFiled: July 20, 2017Publication date: November 9, 2017Inventors: Paul A. Clifton, Andreas Goebel
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Publication number: 20170323974Abstract: A transistor that is to be provided has such a structure that a source electrode layer and a drain electrode layer between which a channel formation region is sandwiched has regions projecting in a channel length direction at lower end portions, and an insulating layer is provided, in addition to a gate insulating layer, between the source and drain electrode layers and a gate electrode layer. In the transistor, the width of the source and drain electrode layers is smaller than that of an oxide semiconductor layer in the channel width direction, so that an area where the gate electrode layer overlaps with the source and drain electrode layers can be made small. Further, the source and drain electrode layers have regions projecting in the channel length direction at lower end portions.Type: ApplicationFiled: May 17, 2017Publication date: November 9, 2017Inventors: Shunpei YAMAZAKI, Hideomi SUZAWA
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Publication number: 20170323975Abstract: Oxide layers which contain at least one metal element that is the same as that contained in an oxide semiconductor layer including a channel are formed in contact with the top surface and the bottom surface of the oxide semiconductor layer, whereby an interface state is not likely to be generated at each of an upper interface and a lower interface of the oxide semiconductor layer. Further, it is preferable that an oxide layer, which is formed using a material and a method similar to those of the oxide layers be formed over the oxide layers Accordingly, the interface state hardly influences the movement of electrons.Type: ApplicationFiled: May 18, 2017Publication date: November 9, 2017Inventor: Shunpei YAMAZAKI
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Publication number: 20170323976Abstract: A transistor including an oxide semiconductor, which has good on-state characteristics, and a high-performance semiconductor device including a transistor capable of high-speed response and high-speed operation. In the transistor including an oxide semiconductor, oxygen-defect-inducing factors are introduced (added) into an oxide semiconductor layer, whereby the resistance of a source and drain regions are selectively reduced. Oxygen-defect-inducing factors are introduced into the oxide semiconductor layer, whereby oxygen defects serving as donors can be effectively formed in the oxide semiconductor layer. The introduced oxygen-defect-inducing factors are one or more selected from titanium, tungsten, and molybdenum, and are introduced by an ion implantation method.Type: ApplicationFiled: July 27, 2017Publication date: November 9, 2017Inventors: Shunpei YAMAZAKI, Junichi KOEZUKA