Abstract: A switch device includes a housing having a case and a holding member, a moving member, a biasing member, a movable contact, a common fixed contact, a first switching fixed contact, a second switching fixed contact, extending portions, at least two terminal members, and resistors for obtaining the resistance value between two terminal members, and fixing portions to which the resistors are soldered. The holding member includes a bottom wall portion that covers the bottom of the case, and a holding wall portion holding the fixing portions. The holding wall portion is formed of a first synthetic resin material having heat resistance, and the bottom wall portion is made of a second synthetic resin material having a heat distortion temperature lower than that of the first synthetic resin material. A method for manufacturing a switch device includes a first molding step, a resistor mounting step, and a second molding step.

Abstract: A keyswitch includes a cap, a support structure, a first magnet, and a baseplate having a bending arm protruding from the baseplate and a support rib extending horizontally to form a receiving space with the bending arm. The support structure includes a first support member pivoted to the baseplate and against the cap and a magnetic permeable plate extending from the first support member and being above the receiving space. The first magnet is inserted into the receiving space to be supported by the support rib and be pressed by the bending arm. When the cap is pressed to make the magnetic permeable plate away from the first magnet as the first support member rotates, the cap moves to a pressed position. When the cap is released, a magnetic attraction force between the magnetic permeable plate and the first magnet drives the magnetic permeable plate to approach the first magnet.

Abstract: A key assembly including a base plate, a keycap, and at least one balance link. The balance link is disposed between the base plate and the keycap, the balance link having a top lever and two side levers, wherein the two side levers being connected to the top lever at both ends thereof, two ends of the two side levers away from the top lever being connected to the base plate, the top lever being connected to the keycap. The top lever and/or the two side levers include a plastic portion, the parts of the top lever and the two side levers other that the plastic portion being made of metal such that the balance link is a composite structure. The balance link contacts at least one of the keycap and the base plate via the plastic portion.

Abstract: A light emitting keyswitch includes a board, a cap, a lifting mechanism disposed between the board and the cap, a membrane switch including first and second substrates, an LED, and a transparent hollow elastic body. The first substrate has a first outer surface and a first inner surface. The second substrate has a second outer surface and a second inner surface. A switch circuit is disposed between the first and second inner surfaces. A copper circuit is formed on the second inner surface. A hole is formed on the first substrate. The LED is disposed on the second substrate, passes through the hole and is coupled to the copper circuit. The transparent hollow elastic body is attached to the first outer surface for covering the LED and the hole and is located under the cap. When the cap is pressed, the lifting mechanism or the cap triggers the switch circuit.

Abstract: A keyboard device includes a base plate, plural keys and a membrane circuit board. The keys are connected with the base plate. The membrane circuit board is arranged between the keys and the base plate. At least one film layer of the membrane circuit board includes at least one elastic vibration absorber corresponding to a keycap, a stabilizer bar or a reinforcement element of the corresponding key. While the keycap is moved downwardly relative to the base plate, the sound resulted from the collision between the keycap, the stabilizer bar or the reinforcement element and the membrane circuit board. Consequently, the operating comfort to the user is enhanced.

Abstract: In a first aspect of the present disclosure, a push switch includes a resilient member that is made of metal, and the resilient member including a concave shape and an opening that is positioned at a center of the concave shape and at least two protrusions each protruding outward and downward with an oblique angle around the concave shape.

Abstract: A load detection sensor 5 of the invention includes: a first electrode sheet 50 which includes first electrode 52 and a first contact point 53; a second electrode sheet 60 which includes a second electrode 62 and a second contact point 63; a spacer 70 which is disposed between the first electrode sheet and the second electrode sheet; one terminal 5A which is electrically connected to the first electrode 52; and the other terminal 5B which is electrically connected to the first contact point 53. A connection maintaining portion AP in which an electrical connection is maintained even when an external pressure is not applied thereto is formed by the first contact point 53 and the second contact point 63, and odd series of the switches SW electrically connected in series between one terminal 5A and the other terminal 5B are set.

Abstract: A keyboard device includes a base plate, a key and a membrane circuit board. The key is connected with the base plate. The membrane circuit board is arranged between the key and the base plate. The base plate includes a connecting structure. The connecting structure is protruded upwardly and penetrated through the membrane circuit board. The key includes a keycap and a stabilizer bar. The stabilizer bar is pivotally coupled to the keycap. A hook part of the stabilizer bar is penetrated through a corresponding locking hole of the connecting structure. The membrane circuit board includes an extension part. The extension part is extended from a first side of the locking hole to a second side of the locking hole and penetrated through the locking hole. Consequently, the hook part of the stabilizer bar is movable on the extension part of the membrane circuit board.

Abstract: A keyswitch device includes a circuit board, a fixing bracket, a micro switch, a keycap, and a connecting assembly. The circuit board has a first surface and a second surface opposite to the first surface. The fixing bracket includes a main body and a first hook. The main body abuts against the first surface. The first hook is connected to the main body and fixed to the circuit board. The micro switch passes through the main body, and is disposed on the circuit board and configured to generate a pressing signal to the circuit board while being pressed. The keycap is supported on the micro switch and configured to press the micro switch toward the circuit board. The connecting assembly is connected between the fixing bracket and the keycap and configured to guide the keycap to move upward and downward relative to the circuit board.

Abstract: [Object] To enable to visually recognizing information displayed on an outer circumferential surface of a member from an axial direction of the member and capable of switching selection elements while viewing the device from the axial direction.

Abstract: A control handle with a mounting portion, having an upper mounting portion and a lower mounting portion. An upper removable portion forms a substantially spherical portion with the upper mounting portion. A control plate is disposed between the upper mounting portion and the lower mounting portion, and control buttons are disposed on the control plate. A lower removable portion forms a substantially cylindrical portion with the lower mounting portion.

Abstract: A toggle switch comprises a housing, a plurality of switches disposed within the housing, an actuating lever coupled to a pivot pin, and an actuator assembly coupled to the actuating lever. The actuating lever extends into the housing. The actuator assembly comprises an actuation pin coupled to the actuating lever, and a spring disposed about the actuating lever. The actuation pin is configured to actuate one or more of the plurality of switches, and the spring is configured to bias a cam follower into engagement with a cam profile on a bracket and bias the actuating lever into an actuation position.

Abstract: A switchgear driving device has a rod coupled to a movable electrode; an operation piston connected to the rod; and an operation cylinder in which an operation piston slides. A main control valve controls the pressure of the hydraulic oil in the operation cylinder. A turning-on pressure accumulation piston slides inside a turning-on pressure accumulation chamber; and a turning-on pressure accumulation spring imparts a driving force to the turning-on pressure accumulation piston to pressurize the hydraulic oil within the turning-on pressure accumulation chamber. A turning-off pressure accumulation piston slides inside a turning-off pressure accumulation chamber. A turning-off pressure accumulation spring imparts a driving force to the turning-off pressure accumulation piston to pressurize the hydraulic oil in the turning-off pressure accumulation chamber.

Abstract: A bidirectional driving mechanism 10 has a drive-side linkage rod 11, a driven-side linkage rod 13, two levers 12 that link the drive-side linkage rod with the driven-side linkage rod, and a guide 14 that regulates the operation of the drive-side linkage rod 11 and the driven-side linkage rod 13. A moveable pin 18 is passed through a first groove cam 16 of the drive-side linkage rod 11, a second groove cam 17 of the guide 14, and third groove cams 19 of the levers 12, and by operation of the drive-side rod 13, the moveable pin 18 moves within the respective groove cams 16, 17, 19, causing the levers 12 to rotate, the driven-side linkage rod 13 to be driven in a direction opposite to the drive-side linkage rod 11, and a driven-side arc electrode 5 to be driven in a direction opposite to a drive-side arc electrode 4.

Abstract: A vacuum interrupter assembly is provided. The vacuum interrupter assembly includes an operating mechanism, a vacuum chamber including a number of bellows assemblies, a conductor assembly including a first contact assembly and a second contact assembly, the first contact assembly including a stem and a contact member, the first contact assembly stem including an elongated body with a proximal first end, a medial portion, and a distal second end. The first contact assembly stem body has a reduced length. The first contact assembly stem body having a reduced length generates less heat and electrical resistance.

Abstract: A vacuum circuit breaker includes a tank containing an electrical device. An opening corresponds to a terminal of the electrical device. A porcelain tube protruding from the tank is fixed to an opening base, and has a terminal conductor. A first connection conductor in the porcelain tube is connected to the terminal conductor. A second connection conductor is arranged in the porcelain tube. A third connection conductor is arranged between the first and the second connection conductor, has a closed end concave section fitted onto the first connection conductor and is connected to the second connection conductor by a fastener. A contact is disposed between said first connection conductor and the third connection conductor. The third and second connection conductors are made of a solid conductor. A center of the third connection conductor and a center of the second connection conductor are formed with a threaded section.

Abstract: This electromagnetic contactor comprises a set of controlled switches (C1, C2, C3), at least one electromagnetic field generator (L; L1, L2), for example a coil, associated with an adjustable core (P) controlling the state of the controlled switches and a unit (UC) controlling the power supply of the electromagnetic field generator. It comprises means for detecting the position of the adjustable core to detect the state of the controlled switches.

Abstract: The present invention discloses a sealed HVDC relay, comprising an insulating hood and a yoke plate which is extended upward to form a cylindrical fixing portion; the insulating hood has an overturned cup structure; a chamber for accommodating moving contacts and stationary contacts is formed by the yoke plate and the insulating hood together; a lower end of the insulating hood and the fixing portion of the yoke plate are fitted with each other by threads; and the portion fitted by threads between the lower end of the insulating hood and the fixing portion is sealed by adhesive pouring. In the present invention, with the insulating hood made of ceramics, the stiffness of the relay structure of the present invention is promised. The absence of a brazing process makes the relay of the present invention short in manufacturing period and low in cost. With regard to the present invention, the sealing performance of the relay is promised by adhesive pouring, and a service voltage of the relay can be increased.

Abstract: The present invention discloses a moving iron core guide mechanism for an HVDC relay, comprising a pushrod, an upper section of the pushrod being located above a yoke plate and fixed with a moving contact assembly, a middle section and a lower section of the pushrod passing through the yoke plate downward, the middle section of the pushrod being fixed with a moving iron core; the moving iron core is located inside a magnetic conductive cylinder of a U-shaped yoke; a lower bushing is fixed inside the magnetic conductive cylinder, and the lower bushing is located below the moving iron core; a lower guide hole running from top to bottom is formed on the lower bushing; and the lower section of the pushrod is always fitted inside the lower guide hole of the lower bushing, and the pushrod is in smooth contact with an inner wall of the lower guide hole.

Abstract: The present invention discloses a horizontal-deflection prevention mechanism for an HVDC relay, comprising a moving contact assembly which comprises a moving reed and moving contacts arranged at left and right ends of the moving reed; an upper section of a pushrod is located above a yoke plate and fixed with the moving reed; a positioning plate is provided on the yoke plate; and a left return spring is connected between a left end of the moving reed and the positioning plate, and a right return spring is connected between a right end of the moving reed and the positioning plate.

Abstract: A switching device for opening and closing an electrical line, including: two fixed contact terminals separated from one another, an operating member, comprising a contact piece, at least one flexible strip comprising at least one end part attached to a fixed support, the flexible strip or strips being adapted to exert a return force on the contact piece to return it from its closed position to its open position in the absence of a motive force on the operating member, the operating member comprising two electrically insulating pusher arms, spaced apart from one another and each attached to an end part of the contact piece; each flexible strip comprising two other end parts, each attached to one of the two push arms or to a part of the operating member that is itself attached to, or forms an integral part of, one of the pusher arms.

Abstract: A mechanism coupling structure of a molded-case circuit breaker according to an embodiment of the present disclosure including a shaft to one side of which a movable contactor is coupled, and on a part of which a rotating pinhole is formed in a penetrating manner; a base assembly into which the shaft is rotatably accommodated and coupled, a switch mechanism coupled to an upper portion of the base assembly and exposed with a first lower link and a second lower link at a lower side thereof, and a rotating pin coupled in a penetrating manner to the first lower link, second lower link and rotating pinhole may be provided therein, wherein the rotating pin has a protruding portion for release prevention at one end thereof.

Abstract: A device for monitoring an interruption unit in an electrical energy supply network. In order to reduce the cost incurred by a network operator in detecting and localizing tripped interruption units, the device has a sensor interface for connecting a sensor unit that records a measured value specific to the interruption unit. An evaluation unit is connected to the sensor interface and configured to detect a current change in terms of the current flowing through the interruption unit on the basis of the measured value. A communication interface is connected to the evaluation unit. In the event of a detected current change, a status signal indicating a critical status of the interruption unit is transmittable to a communication unit. We also describe a method for monitoring an interruption device, and a distribution station with a device for monitoring an interruption device.

Abstract: An electronic switching device includes a housing with at least one housing door, a lockable rotary handle rotatable at least between an ON position and an OFF position, a handle locking device for locking the rotary handle at least in the OFF position when engaged, and a POFF device for preventing the rotary handle to be rotated and/or fixed in OFF position when activated. The electronic switching device further includes a locking coulisse, movably arranged at the electronic switching device and arrangeable in at least a first position, a second position and a third positions with respect to the housing of the electronic switching device. The locking coulisse is configured for allowing an engagement of the handle locking device and the POFF device in the first position, locking the housing door in the second position and blocking the activation of the handle locking device in the third position.

Abstract: Disclosed is a protection element having electrodes for electrically connecting an external circuit, and a fuse structure formed by stacking at least two metal layers of different melting points and installed between the at least two electrodes. The fusing temperature of the fuse structure can be adjusted by controlling the mass ratio of the two different metal layers, and such design not just offers more diversified product specifications to the protection element only, but also provides a broader range of selecting the metals to avoid metals that produce toxic substances, so as to help passing the RoHS standard of the protection element.

Abstract: Disclosed is a thin protection element having at least two electrodes provided installed on an insulating substrate and provide for electrically connecting an external circuit, a fuse structure electrically coupled between the at least two electrodes and provided for fusing at a predetermined temperature, and a shielding structure for at least shielding the fuse structure. The shielding structure is made of an insulating thermoplastic material and directly coated onto a surface of the fuse structure by a film formation technology, and deformable to cope with the protrusion of the melted fuse structure to prevent the fuse structure from being ruined or damaged by the protrusion of the fuse structure. The invention can reduce the total volume of the protection element and facilitate the development of thin products effectively.

Abstract: The present invention improves sensitivity of the ultraviolet band of a photoelectric surface. A photoelectric surface includes a window material that transmits ultraviolet rays, a conductive film that is formed on the window material and has conductivity, an intermediate film 4 that is formed on the conductive film and is formed of MgF2, and a photoelectric conversion film that is formed on the intermediate film 4 and is formed of CsTe. Since the photoelectric surface includes the intermediate film 4 formed of MgF2, the sensitivity of the ultraviolet band is improved.

Abstract: A connector device of the present disclosure includes two waveguides configured to transmit a radio-frequency signal, a state monitoring unit configured to monitor a connection state of the two waveguides, and a control unit that is provided on a side of the waveguide, which is on a transmission side to transmit a radio-frequency signal, between the two waveguides and that stops transmission of the radio-frequency signal according to the connection state of the two waveguides, the state being monitored by the state monitoring unit.

Abstract: An X-ray emitter includes an emitter housing in which an X-ray tube is disposed and held in the emitter housing by a fixing facility. The fixing facility includes a fixed bearing disposed on the cathode side and a floating bearing disposed on the anode side. At least the floating bearing has at least one damping element. In the X-ray emitter, the X-ray tube is aligned inside the emitter housing and fixed in a respectively low-vibration or vibration-damped manner, resulting in a more stable focus position relative to a beam exit and also a correspondingly improved image quality.

Abstract: The present invention provides apparatus for an imaging system comprising a multitude of chemical emitting elements upon a substrate. In some embodiments the substrate may be approximately round with a radius of approximately one inch. Various methods relating to using and producing an imaging system of chemical emitters are disclosed.

Abstract: This composite charged particle beam device comprises a first charged particle beam column (6), a second charged particle beam column (1) which is equipped with a deceleration system, and is equipped with a detector (3) inside the column, a test piece stage (10) on which a test piece (9) is placed, and an electric field correction electrode (13) which is provided around the tip of the first charged particle beam column, wherein the electric field correction electrode is an electrode that corrects the electric field distribution formed in the vicinity of the test piece, and the electric field correction electrode is positioned between the test piece and the first charged particle beam column, and on the opposite side from the second charged particle beam column with respect to the optical axis of the first charged particle beam column.

Abstract: An aberration corrector includes a mirror that corrects an aberration of a charged particle beam, a beam separator, and a bypass optical system in the beam separator. The beam separator includes an entrance of the charged particle beam and an exit from which the charged particle beam is emitted to an objective lens, and separates an incident trajectory from the entrance to the mirror and a reflection trajectory from the mirror to the exit from each other by deflecting the charged particle beam in an ON state. The bypass optical system is disposed at a position at which the trajectory of the charged particle beam bypasses when the beam separator is in the ON state, and the trajectory of the charged particle beam passes when the beam separator is in an OFF state, and controls the charged particle beam so that objective lens optical conditions in a trajectory via the mirror and a trajectory passing through the bypass optical system coincide with each other.

Abstract: Sparse sampling approaches and probe systems for analytical instruments are disclosed providing for effective sub-sampling of a specimen and inpainting to reconstruct representations of actual information. The sub-sampling involves serial acquisition of contiguous measured values lying at positions along a scan path extending in a line toward a first direction and having random perturbations in a second direction. The perturbations are limited within a predetermined distance from the line. Inpainting techniques are utilized among the measured values to reconstruct a representation of actual information regarding the specimen.

Abstract: To provide a device particularly including an imaging-type or a projection-type ion detection system, not a scanning type such as in a scanning ion microscope, and capable of performing observation or inspection at high speed with an ultrahigh resolution in a sample observation device using an ion beam. To further provide a device capable of performing observation after surface cleaning, which has been difficult in an electron beam device, or a device capable of observing structures and defects in a depth direction.

Abstract: An apparatus may include a nonthermal plasma reactor vessel, a gaseous core precursor inlet, a gaseous shell precursor inlet, and a plasma source. The reactor vessel may include a core formation region and a shell formation region downstream of the core formation region. The gaseous core precursor inlet may be upstream of the core formation region and configured to introduce gaseous core precursors to the reactor vessel. The gaseous shell precursor inlet may be downstream of the core formation region, upstream of the shell formation region, and configured to introduce gaseous shell precursors to the reactor vessel. The plasma source may be configured to produce a plasma in the core formation region and the shell formation region. The gaseous core precursors may form negatively-charged core nanoparticles in the core formation region. The gaseous shell precursors may form shells on the core nanoparticles in the shell formation region.

Abstract: Embodiments of a method of depositing a thin film on a substrate is provided that includes placing a substrate on a substrate support that is mounted in a processing region of a processing chamber, flowing a process fluid through a plurality of gas passages in a diffuser plate toward the substrate supported on the substrate support, wherein the diffuser plate has an upstream side and a downstream side and the downstream side has a substantially concave curvature, and each of the gas passages are formed between the upstream side and the downstream side, and creating a plasma between the downstream side of the diffuser plate and the substrate support.

Abstract: Systems and methods for achieving a pre-determined factor associated with the edge region within the plasma chamber is described. One of the methods includes providing an RF signal to a main electrode within the plasma chamber. The RF signal is generated based on a frequency of operation of a first RF generator. The method further includes providing another RF signal to an edge electrode within the plasma chamber. The other RF signal is generated based on the frequency of operation of the first RF generator. The method includes receiving a first measurement of a variable, receiving a second measurement of the variable, and modifying a phase of the other RF signal based on the first measurement and the second measurement. The method includes changing a magnitude of a variable associated with a second RF generator to achieve the pre-determined factor.

Abstract: The present invention relates to a hollow cathode plasma source and to methods for surface treating or coating using such a plasma source, comprising first and second electrodes (1, 2), each electrode comprising an elongated cavity (4), wherein dimensions for at least one of the following parameters is selected so as to ensure high electron density and/or low amount of sputtering of plasma source cavity surfaces, those parameters being cavity cross section shape, cavity cross section area cavity distance (11), and outlet nozzle width (12).

Abstract: Systems and methods for edge exclusion control are described. One of the systems includes a plasma chamber. The plasma processing chamber includes a lower electrode having a surface for supporting a substrate. The lower electrode is coupled with a radio frequency (RF) power supply. The plasma processing chamber further includes an upper electrode disposed over the lower electrode. The upper electrode is electrically grounded. The plasma processing chamber includes an upper dielectric ring surrounding the upper electrode. The upper dielectric ring is moved using a mechanism for setting a vertical position of the upper dielectric ring separate from a position of the upper electrode. The system further includes an upper electrode extension surrounding the upper dielectric ring. The upper electrode extension is electrically grounded. The system also includes a lower electrode extension surrounding the lower dielectric ring. The lower electrode extension is arranged opposite the upper electrode extension.

Abstract: According to the present invention, a plasma processing apparatus includes an analysis unit that obtains wavelengths of the light correlated with a plasma processing result, selects, from the obtained wavelengths, a wavelength having a first factor that represents a deviation in an intensity distribution of the light and is larger than a first predetermined value, and predicts the plasma processing result using the selected wavelength, or an analysis unit that obtains values computed using each of light intensities of a plurality of wavelengths and correlated with the plasma processing result, selects, from the obtained values, a value having a second factor that represents a deviation in a distribution of the obtained values and is larger than a second predetermined value, and predicts the plasma processing result using the selected value.

Abstract: A method, apparatus and system for controlling the processing of a substrate within a process chamber are described herein. In some embodiments, a method of controlling a substrate process within a process chamber includes determining a position of a moveable magnetron in the process chamber relative to a reference location on a surface of the substrate and modulating a power parameter of at least one power supply affecting substrate processing based on the determined position of the magnetron to control, for example, at least one of a deposition rate or an etching rate of the substrate processing. In one embodiment, the modulated power parameter is a power set point of at least one of a direct current (DC) source power, a radio frequency (RF) bias power, a DC shield bias voltage, or an electromagnetic coil current of the at least one power supply.

Abstract: A first rod electrode set has a first center axis, into which ions and air current are introduced. A second rod electrode set has a second center axis at a distance from the first center axis, from which the ions are discharged. A power supply applies voltages to the first rod electrode set and the second rod electrode set. The first rod electrode set and the second rod electrode set have a region where the sets overlap each other in the longitudinal direction, and form a single multipole ion guide by being combined to each other in the region. Different offset DC voltages are applied to the first rod electrode set and the second rod electrode set, respectively, and a DC potential for moving the ions to the second rod electrode set in the region is formed, the ions having been guided by the first rod electrode set.

Abstract: Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry (SIMS) are disclosed. In an example, a secondary ion mass spectrometry (SIMS) system includes a sample stage. A primary ion beam is directed to the sample stage. An extraction lens is directed at the sample stage. The extraction lens is configured to provide a low extraction field for secondary ions emitted from a sample on the sample stage. A magnetic sector spectrograph is coupled to the extraction lens along an optical path of the SIMS system. The magnetic sector spectrograph includes an electrostatic analyzer (ESA) coupled to a magnetic sector analyzer (MSA).

Abstract: Systems and methods are provided for time-of-flight analysis of a continuous beam of ions by a detector array. A sample is ionized using an ion source to produce a continuous beam of ions. An electric field is applied to the continuous beam of ions using an accelerator to produce an accelerated beam of ions. A rotating magnetic and/or electric field is applied to the accelerated beam to separate ions with different mass-to-charge ratios over an area of a two-dimensional detector using a deflector located between the accelerator and the two-dimensional detector. An arrival time and a two-dimensional arrival position of each ion of the accelerated beam are recorded using the two-dimensional detector. Alternatively, an electric field that is periodic with time is applied in order to sweep the accelerated beam over a periodically repeating path on the two-dimensional rectangular detector.

Abstract: A processing chamber system includes a substrate mounting module configured to secure a substrate within a first processing chamber. The system also includes a first deposition module configured to apply a light-sensitive film to a front side surface of the substrate, and a second deposition module configured to apply a film layer to a backside surface of the substrate. The front side surface is opposite to the backside surface of the substrate. A substrate has a bare backside surface with a first coefficient of friction. A film layer is formed onto the backside surface of the substrate. The film layer formed on the backside surface of the substrate has a second coefficient of friction. The second coefficient of friction is lower than the first coefficient of friction.

Abstract: Methods of removing contamination from the surface of a substrate are described. The etch selectively removes alkali metals and alkali earth metals from substrates. The alkali metals may include sodium, lithium, rubidium or potassium and the alkali earth metals may include calcium. For example, the etch may remove contaminants by generating and then desorbing volatile chemical species from the substrate. A hydrogen-and-oxygen-containing precursor or combination of precursors is flowed into a remote plasma to form plasma effluents. The plasma effluents are then flowed into the substrate processing region to react with the substrate and remove an alkali metal and/or an alkali earth metal from the surface of the substrate. No local plasma excites the plasma effluents in embodiments.

Abstract: A precleaning apparatus includes a chamber having an internal space in which a substrate is cleaned, a substrate support disposed in the chamber and configured to support the substrate, a plasma generation unit disposed in the chamber and configured to generate plasma gas, a heating unit configured to heat the substrate on the substrate support, a cleaning gas supply unit configured to supply gas for oxide etching to the internal space of the chamber, and a hydrogen gas supply unit configured to supply hydrogen gas to the internal space of the chamber.

Abstract: A reactor for growing or depositing semiconductor films or devices. The reactor may be designed for inline production of III-V materials grown by hydride vapor phase epitaxy (HVPE). The operating principles of the HVPE reactor can be used to provide a completely or partially inline reactor for many different materials. An exemplary design of the reactor is shown in the attached drawings. In some instances, all or many of the pieces of the reactor formed of quartz, such as welded quartz tubing, while other reactors are made from metal with appropriate corrosion resistant coatings such as quartz or other materials, e.g., corrosion resistant material, or stainless steel tubing or pipes may be used with a corrosion resistant material useful with HVPE-type reactants and gases. Using HVPE in the reactor allows use of lower-cost precursors at higher deposition rates such as in the range of 1 to 5?m/minute.

Abstract: The present disclosure advances the art by providing a method and system for forming electronic devices.

Abstract: Disclosed herein are systems and methods for treating the surface of a microelectronic substrate, and in particular, relate to an apparatus and method for scanning the microelectronic substrate through a cryogenic fluid mixture used to treat an exposed surface of the microelectronic substrate. The fluid mixture may be expanded through a nozzle to form an aerosol spray or gas cluster jet (GCJ) spray may impinge the microelectronic substrate and remove particles from the microelectronic substrate's surface. In one embodiment, the process conditions may be varied between subsequent treatments of a single substrate to target different types of particles with each treatment.