Abstract: An FFS (Fringe Field Switching) mode liquid crystal display (LCD) panel and a liquid crystal display device are provided. The ITS mode LCD panel includes a color film substrate including a first planar layer and an array substrate including a second planar layer. The inner surface of the first planar layer or the second planar layer, which is corresponding to non-overlapping regions, has a plurality of wedge structures thereon. The non-overlapping regions are regions located above the common electrode which is not overlapped with projective areas of the pixel electrode being projected on the common electrode.

Abstract: The present application provides a liquid crystal panel structure containing a functionalized graphene layer and a method of preparing a functionalized graphene layer. In the liquid crystal panel structure containing a functionalized graphene layer of the present application, the functionalized graphene layer thereof simultaneously plays effects of transparent conductivity and liquid crystal alignment, an alignment process that subsequently uses an alignment material is not necessary, the fabrication process and film structures of the liquid crystal panel are greatly simplified. The method of preparing the functionalized graphene layer of the present application sufficiently utilizes superiority of transparent conductivity of the graphene, and modifiability of the graphene surface, to endow the graphene with an effect of liquid crystal molecule alignment, the functionalized graphene layer prepared thereby has transparency, conductivity and alignment function.

Abstract: A mask including a plurality of baffles, a frame and a light transmission region, and a photo alignment method are provided. A support component and a movable component are disposed on the frame. The baffle is configured to block the light transmission region. The support component is configured to support the baffle which blocks the light transmission region. The movable component is configured to move the baffle to a position blocking the light transmission region.

Abstract: A display module and a display device are disclosed. The display module includes an organic light emitting diode substrate and a liquid crystal panel, wherein the organic light emitting diode substrate includes a base and a plurality of organic light emitting diodes disposed on a side of the base adjacent to the liquid crystal panel; the liquid crystal panel includes a plurality of sub-pixels configured to filter light; wherein the base is a silicon base, on which a first driving circuit and a second driving circuit are disposed, the first driving circuit configured to drive the respective organic light emitting diodes to emit light and the second driving circuit configured to the respective sub-pixels to filter light.

Abstract: Provided is an array substrate pixel connection structure, including data lines, being aligned side by side along a first direction; gate lines being aligned side by side along a second direction; the data lines and the gate lines crisscrossing to define sub pixels, and the sub pixels including a first row to a fourth row of sub pixels which are aligned in order along the second direction, the sub pixels in the first, the second row of sub pixels being coupled to the data line which is adjacent, and the sub pixels in the third, the fourth row of sub pixels being coupled to the data line which is adjacent, and the data line which the third, the fourth rows of sub pixels are coupled and the data line which the first, the second rows of sub pixels are coupled have two alignment directions which are opposite.

Abstract: A pixel structure, a display panel and a display device. The pixel structure includes a plurality of sub-pixel units arranged in an array, and first electrodes and second electrodes for forming liquid crystal electric fields in the plurality of sub-pixel units; the first electrodes and the second electrodes are capable of respectively forming first domain liquid crystal electric fields and second domain liquid crystal electric fields in every two adjacent sub-pixel units after energized; and the direction of the first domain liquid crystal electric field and the direction of the second domain liquid crystal electric field is different.

Abstract: A display device includes an electrode layer and a liquid crystal layer. The electrode layer has a first electrode and a second electrode. The second electrode is opposed to the first electrode and having a plurality of openings extending in a same extending direction. The liquid crystal layer is disposed on the electrode layer. The liquid crystal molecules of the liquid crystal layer in a region in proximity to one side of the opening and liquid crystal molecules of the liquid crystal layer in a region in proximity to another side of the opening, the sides of the opening being opposed to each other in a width direction of the opening, are rotated in opposite directions from each other and aligned.

Abstract: According to one embodiment, a display device includes an insulating substrate, a light-shielding member disposed above the insulating substrate, a first color filter disposed above the insulating substrate, a second color filter disposed alongside the first color filter, a partition disposed on the light-shielding member and between the first color filter and the second color filter and an insulating film disposed on the first color filter and the second color filter, and an upper surface of the partition and an upper surface of the insulating film are located on a same plane.

Abstract: The present disclosure relates to a display device, and the display device according to an exemplary embodiment includes: a substrate having a rounded edge; a light blocking member disposed around a display area of the substrate, wherein a corner of the light blocking member has a rounded edge; a plurality of pixels disposed on the substrate; and a pixel electrode disposed in each of the plurality of pixels, wherein the pixel electrode has a horizontal stem, a vertical stem, and a plurality of fine branches, wherein the plurality of pixels includes a first pixel at least partially overlapping the light blocking member and a second pixel adjacent to the first pixel and not overlapping the light blocking member, and wherein a shape of a fine branch disposed in the first pixel is different from a shape of a fine branch disposed in the second pixel.

Abstract: An array substrate, includes multiple pattern layers disposed in a display region and a test unit disposed in a non-display region, the test unit includes at least one of a test component and a test transistor. The test component includes a test block pattern and a test line pattern; the test block pattern is disposed in the same layer as one layer of the multiple pattern layers, the test line pattern is disposed in the same layer as one layer of the multiple pattern layers, and the test block pattern and the test line pattern are disposed in different layers; the orthographic projection of the test line pattern on the array substrate surrounds the periphery of the orthographic projection of the test block pattern on the array substrate; and the test block pattern or the test line pattern is connected to the test transistor.

Abstract: An array substrate, a display device and a driving method thereof. Gate-line extension lines, data-line extension lines and a control circuit are disposed in a peripheral area of the array substrate. The control circuit is configured to connect the gate lines to the gate-line extension lines and connect the data lines to the data-line extension lines in a time period of displaying an image, and configured to disconnect the gate lines from the gate-line extension lines, disconnect the data lines from the data-line extension lines, control at least part of the gate-line extension lines to have potential difference, and control at least part of the data-line extension lines to have potential difference in a time period between displaying two adjacent images.

Abstract: Provided is a component-mounting flexible board allowing mounted driver circuits to share the same display panel or circuit board regardless of the number of driver circuits. Of two source drivers 31 and 32 mounted in an SOF package 30, the source driver 31 has output wiring patterns respectively pressure-bonded to connection terminals S1 to S960 included in a first connection terminal group 11 of a liquid crystal panel 10. The source driver 32 has output wiring patterns respectively pressure-bonded to connection terminals S1 to S960 included in a second connection terminal group 12 of the liquid crystal panel 10. Dummy wiring patterns 36 are pressure-bonded to two dummy connection terminals 18 formed in a spared space between the first connection terminal group 11 and the second connection terminal group 12 of the liquid crystal panel 10.

Abstract: Active matrix array devices are constituted by devices that have a function such as those of a display/light emitting device, a sensor, a memory or an actuator, and are arranged in a matrix array shape, and the expansion of usage in various fields and applications is expected. However, there is little similarity and compatibility in the forming process and materials between a device such as a display/light emitting device, a sensor, a memory, or an actuator, and a circuit portion that controls such a device in the matrix element, and therefore the device and the circuit portion are mutually restricting factors. This results in an increase in the manufacturing cost and limitation of the function. A conventional active matrix array device is manufactured by performing various process steps on the same substrate. Control circuit portions each including a transistor are formed in some of the process steps.

Abstract: A liquid crystal display panel is provided with a TFT array substrate serving as a first substrate and a CF substrate serving as a second substrate, which are disposed to face each other, and liquid crystal sealed between the TFT array substrate and the CF substrate. The TFT array substrate includes an insulating substrate, a plurality of gate lines, a plurality of source lines, TFTs serving as switching elements, a non-rectangular display region having a non-rectangular shape formation part, and a common line. A plurality of pixels is arrayed in a stepped pattern at the non-rectangular shape formation part of the display region, and a portion of the common line corresponding to the non-rectangular shape formation part of the display region is formed into a shape following the plurality of pixels arrayed in a stepped pattern.

Abstract: An electro-chromic panel includes a first substrate and a second substrate. the first substrate includes a bottom portion, an upper portion disposed higher than the bottom portion, the upper portion being spaced apart from bottom portion and surrounding the bottom portion, and slope portions disposed between the bottom portion and the upper portion to connect a boundary of the bottom portion and an inner boundary of the upper portion. A first electrode is disposed on the bottom portion and a predetermined portion of a slope portion connected to one side of the bottom portion, a second electrode is disposed to overlap the bottom portion and a slope portion connected to other sides of the bottom portion, and an electro-chromic device is disposed between the first substrate and the second substrate in a first groove defined by the bottom portion and the slope portion.

Abstract: An electrophoretic display (EPD) and a driving method thereof. The electrophoretic display (EPD) includes: an upper substrate and a lower substrate arranged opposite to each other, and an electrophoretic medium disposed between the upper substrate and the lower substrate; the EPD is provided with a plurality of pixels; each pixel includes at least two sub-pixels; colored charged particles of different colors are disposed in different sub-pixels of each pixel; and a first wall electrode and a second wall electrode are respectively disposed on two opposite sides of each sub-pixel.

Abstract: A lens grating including a first substrate and a second substrate which are disposed oppositely; a first electrode layer disposed on the first substrate; a second electrode layer disposed on the second substrate; a liquid crystal layer clamped between the first electrode layer and the second electrode layer; wherein, the first electrode layer includes multiple annular electrodes, and projections of the multiple annular electrodes are not overlapped with each other. Adopting concentric annular pixel electrodes can generate an electric field having more directions between the common electrode and the pixel electrode such that liquid crystal molecules have multiple deflection angles. Because the deflection angles of the liquid crystal molecules are increased, beneficial for a multi-domains display and expanding the viewing angle of a 3D display, enhance the display effect of an image. The 3D display of the present invention has larger viewing angle, and enhance the display effect.

Abstract: The present disclosure provides a display panel, a driving method thereof and a display apparatus. The display panel includes display areas arranged in array, each display area including at least two pixels having different domain tilt directions and strip electrodes in the pixels having different tilt directions. The pixels having different domain tilt directions in each display area are electrically connected with different gate lines, and the pixels in each display area are electrically connected with a same data line. Each pixel is configured to drive, under a control of the gate line electrically connected with the pixel, liquid crystal molecules in the pixel to create a corresponding liquid crystal prism according to amplitude of data voltage input through the data line, so as to control light emergent direction at a position where the pixel is located. The display panel is capable of performing single or multiple view display.

Abstract: The present disclosure relates to a liquid crystal lens, a 3D display panel and methods for controlling the same. A liquid crystal lens for a 3D display panel, including a first substrate, a second substrate, a plurality of first electrodes arranged on the first substrate, a second electrode arranged on the second substrate, a liquid crystal layer arranged between the first substrate and the second substrate, and a control unit. The control unit is configured to control a voltage of the first electrode and of the second electrode so that liquid crystal molecules in the liquid crystal layer deflect to form a plurality of lens equivalent units, and the control unit is further configured to adjust the voltage of the first electrode to change a position of each of the lens equivalent units.

Abstract: A lens structure includes a transparent cell containing a liquid crystal material. The cell is thicker in a center region thereof than at peripheral regions. The structure further includes transparent electrically conductive electrodes coupled with opposing top and bottom surfaces of the cell and configured to establish an electric field through the cell that is strongest at the peripheral regions where the cell is thinner relative to the center region so that a value of the index of refraction of the liquid crystal material changes across the cell from the center region towards the peripheral regions to change an effective focal length of the lens structure. In some embodiments the top surface of the cell has a first curvature C1 and the bottom surface of the cell has a second curvature C2 that differs from the first curvature.

Abstract: Aspects of the present disclosure describe configurations of, and methods for operating a large-scale optical phased array for contemporary applications including LIDAR, optical communications, imaging, and displays—among others.

Abstract: A technique relates to a circuit for a sum frequency generator. A first resonator is connected to a Josephson ring modulator (JRM), and the first resonator is configured to receive a first photon at a first frequency. A second resonator is connected to the JRM, and the second resonator is configured to have a first harmonic and no second harmonic. The second resonator is configured to receive a second photon at a second frequency, and the first resonator is configured to output an up-converted photon. The up-converted photon has an up-converted frequency that is a sum of the first frequency and the second frequency.

Abstract: An interchangeable lens mount insert for lens adapters is positioned into a lens mount to prevent unwanted light from entering a camera lens and to allow for the attachment of nonstandard external lenses to the lens adapter. The interchangeable lens mount insert includes an aperture shroud, an aperture hole, a lens attachment mechanism, and a mount attachment mechanism. The aperture shroud obstructs the camera lens from unwanted light and debris, while the mount attachment mechanism provides a means for securing the aperture shroud to the lens mount. The aperture hole traverses the aperture shroud and allows a select amount of light to reach the camera lens. Meanwhile, the lens attachment mechanism provides a means for securing external lenses to the aperture shroud.

Abstract: A support pin is engaged with a collar, as affixed to a mount, by an engaging mechanism between the support pin and the collar, which engaging mechanism provides interchangeability, index-ability and positive locking between the support pin and the collar. Motion picture lighting and rigging equipment is secured to the support pin. The engaging mechanism includes a V-shaped or other configured reception on or in the collar with a cross-pin or similarly other configured portion on the support pin (e.g., non-circular cross-sectional configurations such as a hexagon). A linchpin is placed though mating openings in the collar and support pin to lock the two together when the mating openings are aligned. Two or more crossing V-shaped receptions or non-circular cross-sectional configurations provide a variety of angular orientations of the support pin, especially for bent support pins, with respect to the collar.

Abstract: A plurality of lighting elements is configured to selectively illuminate a scene during a plurality of time intervals. The plurality of lighting elements forms a different illumination pattern in each of the plurality of time intervals. One or more sensors are configured to measure a plurality of intensities of light received from the scene during the plurality of time intervals. A processor is configured to generate an image of the scene based on the plurality of intensities. In some cases, the plurality of lighting elements are switched on or off to produce different illumination patterns during a plurality of time intervals that too short to be perceptible to the human eye.

Abstract: A system for evenly-scattered adaptable subject lighting for mobile device photography, comprising a case configured to enclose and securely fasten a mobile device and an illuminating portion, the illuminating portion configured to produce light based on input received from a plurality of sensors. The system further comprising a plurality of programming instructions stored in a memory and operating on a processor of a network-connected computing device, and configured to direct the operation of the illuminating portion comprising at least a sensor processor and an image capture device, wherein the sensor processor adjusts the illuminating portion based on preconfigured thresholds to provide evenly-scatter lighting for capturing images of subjects via the image capture device.

Abstract: A system for evenly-scattered adaptable subject lighting for mobile device photography, comprising a case configured to enclose and securely fasten a mobile device and an illuminating portion, the illuminating portion configured to produce light based on input received from a plurality of sensors. The system further comprising a plurality of programming instructions stored in a memory and operating on a processor of a network-connected computing device, and configured to direct the operation of the illuminating portion comprising at least a sensor processor and an image capture device, wherein the sensor processor adjusts the illuminating portion based on preconfigured thresholds to provide evenly-scatter lighting for capturing images of subjects via the image capture device.

Abstract: A body of an imaging apparatus comprises a mount section on which an interchangeable lens and a mount adapter can be mounted. A contact unit is movable in the direction of the optical axis by a moving mechanical unit and has a first contact portion composed of a plurality of contact terminals. If the interchangeable lens is mounted on a body via a first mount adapter, the first contact portion is movable to a first position that contacts a second contact portion formed in the interchangeable lens. If the interchangeable lens is mounted on the body via a second mount adapter, the first contact portion is movable to a second position that contacts the second contact portion of the interchangeable lens.

Abstract: An electronic device includes: an electronic part; an external case that covers the electronic part and constitutes an exterior; and a heat dissipation frame that transmits heat generated from the electronic part to the external case. The external case includes a top case, a front case, and a rear case, while the heat dissipation frame includes a first heat dissipation frame, a second heat dissipation frame, and a third heat dissipation frame provided independently from each other. Mechanical fixation is made to combine the top case and the first heat dissipation frame into one body, to combine the front case and the second heat dissipation frame into one body, and to combine the rear case and the third heat dissipation frame into one body.

Abstract: Disclosed is a document holder assembly for attachment to a mobile device or its enclosure. The document holder assembly has an imaging position in which the document is positioned in the line of sight of the device camera, and a folded position in which the assembly is conveniently stored close to the attachment face. In some embodiments the distance between the document and the camera in the imaging position may be adjusted to achieve an optimum document image.

Abstract: Embodiments provide grade annunciator systems that allow a lumber workpiece traveling in a workflow path to be labeled with a projected image that conveys information about the grade, a cut line, and/or the location of a defect in the workpiece. In some embodiments, the system includes a conveyor configured to convey lumber workpieces in a workflow path, and a projector or series of projectors configured to project an image or symbol onto a surface of the workpiece, wherein the image or symbol indicates grade, a cut line, and/or the location of a defect in the workpiece. Other embodiments are methods of labeling a lumber workpiece in a workflow path, the methods includes conveying the lumber workpiece along the workflow path, and projecting an image or symbol onto a surface of the workpiece as it is conveyed along the workflow path.

Abstract: Systems, devices, and methods for focusing laser projectors are described. A laser projector includes N?1 laser diodes, each of which emits laser light having a divergence. Each laser diode is paired with a respective primary or collimation lens to at least reduce a divergence of the laser light that the laser diode produces. Downstream from the primary lens(es) in the optical path(s) of the laser light, a single dedicated secondary or convergence lens converges the laser light to a focus. By initiating the convergence of the laser light at the secondary or convergence lens as opposed to at the primary or collimation lens(es), numerous benefits that are particularly advantageous in laser projection-based wearable heads-up displays are realized.

Abstract: Systems, devices, and methods for focusing laser projectors are described. A laser projector includes N?1 laser diodes, each of which emits laser light having a divergence. Each laser diode is paired with a respective primary or collimation lens to at least reduce a divergence of the laser light that the laser diode produces. Downstream from the primary lens(es) in the optical path(s) of the laser light, a single dedicated secondary or convergence lens converges the laser light to a focus. By initiating the convergence of the laser light at the secondary or convergence lens as opposed to at the primary or collimation lens(es), numerous benefits that are particularly advantageous in laser projection-based wearable heads-up displays are realized.

Abstract: A multi-configuration simulator screen system and methods of use are described. Embodiments of the present invention include a multi-configuration screen assembly and a simulator system for running training scenarios on the multi-configuration screen assembly. The multi-configuration screen assembly can include a pair of screens rotatably coupled to a middle screen. The pair of screens can be rotated relative to the middle screen allowing for the simulator system to be implemented with a plurality of differently configured screens.

Abstract: A display apparatus is disclosed that includes a screen and a frame system positioned to support the screen. The frame system includes a plurality of frame members, a hinge that couples the frame members together, and a lock that blocks relative movement of the frame members.

Abstract: A transparent screen for 3D display having excellent transparency and an excellent viewing angle, and a 3D display system are provided. The transparent screen for 3D display has a plurality of dots, each of the dots having wavelength selectivity and being formed of a liquid crystal material having a cholesteric structure, in which the cholesteric structure gives a striped pattern of bright parts and dark parts in a cross-sectional view of the dot observed by a scanning electron microscope, the dot includes a portion having a height that increases continuously to the maximum height in a direction extending from the edge toward the center of the dot, in the portion, the angle formed by the normal line to a line that is formed by a first dark part as counted from the surface of the dot on the opposite side of the substrate and the surface of the dot is in the range of 70° to 90°, and right-handed circularly polarized light and left-handed circularly polarized light are reflected by the plurality of dots.

Abstract: A support apparatus for a lithographic apparatus has an object holder and an extraction body radially outward of the object holder, The object holder is configured to support an object. The extraction body includes an extraction opening configured to extract fluid from a top surface of the support apparatus. The extraction body is spaced from the object holder such that the extraction body is substantially decoupled from the object holder.

Abstract: A polarized image acquisition section 20 acquires a plurality of polarized images having different polarization directions. The polarized images show, for example, an input indicator for a user interface as a recognition target object. A normal line calculation section 30 calculates normal lines for individual pixels of the recognition target object in accordance with the polarized images acquired by the polarized image acquisition section 20. The normal lines represent information based on the three-dimensional shape of the recognition target object. A recognition section 40 recognizes the object by using the normal lines calculated by the normal line calculation section 30, determines, for example, the type, position, and posture of the input indicator, and outputs the result of determination as input information on the user interface. The object can be recognized easily and with high accuracy.

Abstract: A press roller for imprint method including: a roller body having a cylindrical shape extending in a first direction; an energy generating part disposed on a curved surface of the roller body, the energy generating part including a plurality of energy generating units configured to be individually controlled to emit energy; and a compensation layer disposed on the energy generating part, the compensation layer including a material that expands in volume when the energy is applied.

Abstract: Micro- and nano-patterns in imprint layers formed on a substrate and lithographic methods for forming such layers. The layers include a plurality of structures, and a residual layer having a residual layer thickness (RLT) that extends from the surface of the substrate to a base of the structures, where the RLT varies across the surface of the substrate according to a predefined pattern.

Abstract: A coating solution has a polymer having a formula (1) structural unit, a formula (2) primary, secondary, or tertiary amine, and a formula (3) ester capable of dissolving the polymer and amine: R1 is a hydrogen atom or methyl group. L is a divalent aromatic group optionally having at least one substituent, —C(?O)—O— group, or —C(?O)—NH— group. The —C(?O)—O— or —C(?O)—NH— group carbon atom is attached to a polymer main chain. X is a hydrogen atom or linear or branched alkyl or alkoxy group having a 1-10 carbon atom number. At least one alkyl group hydrogen atom is optionally substituted with a halogen atom or hydroxy group. R2, R3, and R4 are independently a hydrogen atom, hydroxy group, or linear, branched, or cyclic organic group having a 1-16 carbon atom number. R5 and R6 are each independently a linear or branched organic group having a 1-16 carbon atom number.

Abstract: A transfer type photosensitive refractive index adjustment film that comprising: a support film, a photosensitive resin layer provided on the support film and a high-refractive index layer provided on the photosensitive resin layer, the photosensitive resin layer comprises a photopolymerizable compound and a photopolymerization initiator, and the photopolymerization initiator comprises an oxime ester compound or a phosphine oxide compound.

Abstract: The present invention provides a resist base material containing a compound having a specific structure and/or a resin derived from the compound as a monomer.

Abstract: A photosensitive resin composition capable of forming a cured film with satisfactory adhesion to substrates and excellent transparency, a polyamide resin which is used in the photosensitive resin composition, a method for producing the polyamide resin, a compound which is used as a raw material of the polyamide resin, a method for producing the compound, a method for producing a cured film using the photosensitive resin composition, and a cured film which is obtained by curing the photosensitive resin composition. The photosensitive resin composition including a resin and a photopolymerization initiator. The resin is a polyamide resin including a structural unit, which includes a specific saturated alicyclic skeleton, and at least one carboxy group esterified by a unit containing a polymerizable group of a predetermined structure.

Abstract: A film material includes a support film having a transmittance of at least 60% with respect to light of wavelength 300-450 nm, and a resin layer containing 0.001-10 wt % of a basic compound with a molecular weight of up to 10,000, and having a thickness of 1-100 ?m. A pattern is formed by attaching the resin layer in the film material to a chemically amplified negative resist layer on a wafer, exposing, baking, and developing the resist layer. The profile of openings in the pattern is improved.

Abstract: To provide a laminate which enables pattern formation with excellent opening shape even in the case where a chemically amplified negative type resist material is used, and a pattern forming method in which the laminate is used. The laminate includes a chemically amplified negative type resist layer, and a basic resin coat layer thereon that contains 0.001 to 10% by weight of a basic compound having a molecular weight of up to 10,000.

Abstract: Methods disclosed herein provide apparatus and methods for applying an electric field and/or a magnetic field to a photoresist layer without air gap intervention during photolithography processes. In one embodiment, an apparatus includes a processing chamber configured to apply an electric field to a substrate via a non-gas phase intermediate medium. Methods described herein include dissociation of a photoacid generator to generate anions and cations. The anions may be moved within the photoresist layer by the electric field to more precisely control the speed and location of acid generation and regeneration processes.

Abstract: A pattern forming method includes at least (i) forming a film on a substrate, using an actinic ray-sensitive or radiation-sensitive resin composition, (ii) irradiating the film with actinic rays or radiation, and (iii) developing the film irradiated with actinic rays or radiation, using a developer containing an organic solvent, in which the actinic ray-sensitive or radiation-sensitive resin composition contains a resin P and a compound that generates an acid upon irradiation with actinic rays or radiation, the resin P has a specific repeating unit Q1 represented by General Formula (q1) and a specific repeating unit Q2 represented by General Formula (q2), and the content of the repeating unit Q2 with respect to all the repeating units of the resin P is 20% by mole or more.

Abstract: Embodiments described herein relate to methods and apparatus for performing immersion field guided post exposure bake processes. Embodiments of apparatus described herein include a chamber body defining a processing volume. Electrodes may be disposed adjacent the process volume and process fluid is provided to the process volume via a plurality of fluid conduits to facilitate immersion field guided post exposure bake processes. A post process chamber for rinsing, developing, and drying a substrate is also provided.

Abstract: A method of determining a configuration of a projection system for a lithographic apparatus, wherein manipulators of the projection system manipulate optical elements so as to adjust its optical properties, the method comprising: receiving dependencies of the optical properties of the projection system on a configuration of the manipulators, receiving a plurality of constraints of the manipulators, formulating a cost function, wherein the cost function represents a difference between the optical properties of the projection system for a given configuration of the manipulators and desired optical properties, wherein the cost function is formulated using the dependency of the optical properties on the configuration of the manipulators, scaling the cost function into a scaled variable space, wherein the scaling is performed by using the plurality of constraints and finding a solution configuration of the manipulators which substantially minimises the scaled cost function subject to satisfying the plurality of co