Patents Issued in April 24, 2018
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Patent number: 9953768Abstract: A photoelectric conversion element, a photoelectric conversion element, a dye-sensitized solar cell and a dye solution, having an electrically conductive support, a photoconductor layer containing an electrolyte, a charge transfer layer containing an electrolyte, and a counter electrode, wherein the photoconductor layer contains semiconductor fine particles carrying a metal complex dye; and wherein the metal complex dye has at least a carboxyl group and a salt of the carboxyl group, the salt being selected from the group consisting of a potassium salt, a lithium salt, and a cesium salt, and the ratio ? of the number of the salt of the carboxyl group divided by the total number of the carboxyl group and the salt of the carboxyl group to be found in one molecule of the metal complex dye, lying in the range of 0.1 to 0.9.Type: GrantFiled: September 21, 2015Date of Patent: April 24, 2018Assignee: FUJIFILM CorporationInventors: Yukio Tani, Katsumi Kobayashi
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Patent number: 9953769Abstract: A composite electronic component includes an insulation sheet, a tantalum capacitor including a body part containing a sintered tantalum powder and a tantalum wire, a portion of which is embedded in the body part, and disposed on the insulation sheet, a multilayer ceramic capacitor including a ceramic body including a plurality of dielectric layers, first and second internal electrodes, and first and second external electrodes, and disposed on the insulation sheet, and a molded portion enclosing the tantalum capacitor and the multilayer ceramic capacitor. The first internal electrode includes a first lead portion led out to upper and lower surfaces and a first end surface of the ceramic body in a length direction, and the second internal electrode includes a second lead portion led out to the upper and lower surfaces and a second end surface of the ceramic body in the length direction.Type: GrantFiled: July 28, 2015Date of Patent: April 24, 2018Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.Inventors: Young Ghyu Ahn, Sang Soo Park, Byoung Hwa Lee, Kyo Kwang Lee
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Patent number: 9953771Abstract: A heat dissipation apparatus, system and method for an air circuit breaker (ACB) switchgear has at least one pair of primary contact toes constructed and arranged to connect to a terminal of the circuit breaker. A bus bar joint is connected to the primary contact toes. The heat dissipation apparatus comprises an evaporator clamped to the primary contact toes. A condenser is located at a higher elevation than the evaporator and at least two electrically isolating pipes fluidly connect the evaporator with the condenser. A dielectric fluid in the evaporator can be heated to a vapor state, with one of the pipes transferring the vapor to the condenser and the second pipe returning the condensed dielectric fluid back to the evaporator for cooling the at least one pair of primary contact toes.Type: GrantFiled: October 21, 2016Date of Patent: April 24, 2018Assignee: Anord Control Systems LimitedInventor: Patrick Kennelly
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Patent number: 9953772Abstract: A visual status indicator for an electrical apparatus is disclosed. The status indicator can be mounted within a lower cover of the electrical apparatus such that various display faces of the indicator are visible through one or more viewing windows of the lower cover. The status indicator can comprise a mounting base with protrusions and at least one wing, wherein the wing comprises at least one display face. At least one swing arm can be attached to the mounting base via the protrusions and the at least one swing arm can comprise at least one display face. The swing arm can be actuated such that either the display face on the wing or the display face on the swing arm is visible through the viewing window to indicate the status of the electrical apparatus.Type: GrantFiled: April 3, 2017Date of Patent: April 24, 2018Assignee: COOPER TECHNOLOGIES COMPANYInventors: Brian Andrew Korves, William Robert Luoma
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Patent number: 9953773Abstract: An appliance includes a position switch retention device for use with an appliance including a body defining a generally cylindrical profile extending through a first portion thereof along an axis and having a first radius. The body further defines a pin-receiving channel open on at least a first end thereof and positioned within the generally cylindrical profile. The device further includes a first tab extending from a side of the body. The tab defines a ramp and an edge with the ramp extending away from the first end of the body to the edge. A cap extends outwardly from a second end of the body opposite the first end. The cap is spaced apart from the edge of the tab at a first distance and has a second radius greater than the first radius.Type: GrantFiled: July 27, 2017Date of Patent: April 24, 2018Assignee: Whirlpool CorporationInventors: James Charles Johncock, David Wayne Mundy
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Patent number: 9953774Abstract: An electronic device is disclosed for controlling a high-voltage power source with multiple low-voltage switches. The electronic device includes a low-voltage DC power supply that allows for low-voltage wiring and components to be used to control the high-voltage power source using multiple low-voltage switches. The electronic device includes a single pulse generator that generates a pulse signal upon activation of any one of the multiple switches. The pulse signal activates a bistable circuit controller that is coupled the a high-voltage electronic switch to control high-voltage power to the load.Type: GrantFiled: June 29, 2015Date of Patent: April 24, 2018Inventor: Tao Liu
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Patent number: 9953775Abstract: An electronic device, according to one embodiment of the present invention, can comprise: a housing which has an opening part penetrating through the inside and the outside of the electronic device and forms the outside of the electronic device; a key button inserted into the opening part so as to be movable; a sealing member which is disposed such that the sealing member slidably contacts the outer surface of the key button, and prevents communication between the inside and the outside of the electronic device through the inner surface of the opening part and the outer surface of the key button; and a push switch accommodated in the housing and pressed by an inward movement of the key button. Various other embodiments are possible.Type: GrantFiled: September 3, 2014Date of Patent: April 24, 2018Assignee: Samsung Electronics Co., Ltd.Inventors: Hoon-Jae Kim, Ki-Hwan Kwak, Kyung-Chul Seo
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Patent number: 9953776Abstract: A keyswitch includes a base plate, a cap having a longitudinal axis, a returning device, a support mechanism, and a lifting mechanism including first and second support plates. The first support plate has first and second edges parallel to the longitudinal axis for respectively abutting against the base plate and the cap. The second support plate has third and fourth edges parallel to the longitudinal axis for respectively abutting against the base plate and the cap. The base plate is disposed through openings of the first and second support plates to make the first and second support plates movably connected to the base plate. The returning device drives the cap to a non-pressed position with rotation of the first and second support plates. The support mechanism has first and second support members pivoted to each other to be movably connected to the cap and the base plate.Type: GrantFiled: April 12, 2017Date of Patent: April 24, 2018Assignee: DARFON ELECTRONICS CORP.Inventors: Pen-Hui Liao, Chin-Hung Lin
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Patent number: 9953777Abstract: A switching device has a housing-mounted contact and a movable contact. The movable contact is provided for making contact with the housing-mounted contact. The switching device has a switch lock with a latch and a latch support, wherein the latch support has a latching location for latching the latch to the latch support, wherein the switching device furthermore has a hand switching lever. A connecting rod is mounted movably on the latch support, the connecting rod bearing against a projection of the hand switching lever when the hand switching lever is arranged in the position in which the contacts are in contact. An actuation of the hand switching lever—for separating the movable contact from the housing-mounted contact—moves the connecting rod and thereby releases the latching of the latching support to the latch.Type: GrantFiled: July 16, 2015Date of Patent: April 24, 2018Assignee: EATON INDUSTRIES (AUSTRIA) GMBHInventor: Raffael Zimmel
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Patent number: 9953778Abstract: A gas circuit breaker includes a breaking unit tank incorporating a fixed electrode and a movable electrode, a spring operation device including a breaking spring and a closing spring and configured to move the movable electrode, and a mechanism unit configured to couple the movable electrode side and the spring operation device side and transmit power received from the spring operation device to the movable electrode. The spring operation device is supported by a frame. The frame is fixed to a rear plate provided in a mechanism unit frame of the mechanism unit. A breaking spring case and a closing spring case of the spring operation device are fixed to pedestals via a plate member 38 and a support section 7.Type: GrantFiled: April 21, 2017Date of Patent: April 24, 2018Assignee: HITACHI LTD.Inventors: Hiroaki Hashimoto, Takashi Iida, Shunta Mori, Kenichi Okubo
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Patent number: 9953779Abstract: A bypass switch includes: a casing; a vacuum interrupter disposed inside the casing, the vacuum interrupter being disposed such that a movable contact is movable to a fixed contact; a first fixing bus-bar fixed to the casing; a second fixing bus-bar fixed to the casing to be spaced apart from the first fixing bus-bar; a moving pusher connected to the movable contact; a drive source installed in the casing, the drive source pushing the moving pusher to a position at which the movable contact and the fixed contact are contacted with each other; and a multi-contactor disposed to be contacted with the moving pusher. Accordingly, the moving pusher can rapidly contact the movable contact with the fixed contact. Further, the moving pusher can be moved with a small external force. Thus, it is possible to minimize the size of the drive source and the power used in the drive source.Type: GrantFiled: August 18, 2016Date of Patent: April 24, 2018Assignee: LSIS CO., LTD.Inventor: Teag Sun Jung
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Patent number: 9953780Abstract: A “five-prevention” interlocking pole type high-voltage switchgear includes a pole bracket, embedded poles, and spring and earthing isolated switch operating mechanisms; every three poles are arranged in a row on the bracket, the spring operating mechanism is joined with the switch operating mechanism through the chamber door interlocking piece and mechanism interlocking piece; the chamber interlocking piece, mechanism interlocking piece and door lock plate are joined, the door lock plate is opposite the opening semi-axis pinch plate in the spring operating mechanism and the door lock plate is set with a door lock pin. Chamber interlocking piece movement is used to open or close the switch operating mechanism crank operation hole and corresponds to the start of close brake operation and limit brake of opening pinch plate in the spring operating mechanism and the limiting and opening of the opening semi-axis and cable chamber door in the spring operating mechanism.Type: GrantFiled: November 13, 2014Date of Patent: April 24, 2018Assignee: ZHEJIANG LIMITED CORPORATION OF DAODU INTELLIGENT SWITCHInventor: Guangfu Hu
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Patent number: 9953781Abstract: A resettable sensor assembly includes a housing having a longitudinal axis and defining a cavity therein. The assembly includes a divider disposed within the cavity and in contact with the housing, at least one electrical contact disposed within the cavity and extending through the divider, and a pin reversibly translatable within the cavity along the axis. The assembly includes at least one actuator element disposed within the cavity and abutting the housing. The element is configured for translating the pin along the axis between a first position wherein the pin contacts the electrical contact and a second position wherein the pin is spaced apart from the electrical contact. The actuator element is formed from a shape memory alloy that is transitionable between an austenite crystallographic phase and a martensite crystallographic phase in response to a thermal activation signal to thereby translate the pin between the first and second positions.Type: GrantFiled: April 21, 2016Date of Patent: April 24, 2018Assignee: GM Global Technology Operations LLCInventors: Richard J. Skurkis, Nancy L. Johnson, Paul W. Alexander, Dorel M. Sala, Nicholas W. Pinto, IV, Xiujie Gao
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Patent number: 9953782Abstract: An electric pulse generator configured to power at least one load and including an electric discharge switch including at least one piston and a chamber in which the piston can move, a propellant gas-generating trigger for moving the piston, at least one punch rigidly connected to an end of the piston, and at least one stack of layers formed from at least one pair of electrodes separated by a layer of dielectric material. The electric pulse generator further includes an energy storage device associated with the or each pair of electrodes of the electric discharge switch in at least one series connection, the load or each load being configured to be connected in parallel with the or each series connection.Type: GrantFiled: July 27, 2015Date of Patent: April 24, 2018Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE E AUX ENERGIES ALTERNATIVESInventor: Philippe Monjaux
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Patent number: 9953783Abstract: Embodiments disclose a fuse comprising a one power lead, an explosion chamber and an isolating chamber, wherein the fuse is designed such that a power lead can be broken into at least two parts by an explosion triggered in an explosion chamber. The two parts are separated from each other in an associated isolating chamber by a respective electrically insulating partition. Embodiments disclose a method comprising a power lead, an explosion chamber and an isolating chamber, wherein an explosion is triggered in the explosion chamber so that the power lead is broken into at least two parts and bent into the isolating chamber such that at least two parts are separated from one another by an electrically insulating partition. The present disclosure can be applied to pyrotechnic fuses for vehicles and to high-voltage fuses.Type: GrantFiled: May 13, 2016Date of Patent: April 24, 2018Assignee: Lisa Draexlmaier GmbHInventors: Marko Fellmer, Christian Gruber, Peter Faltermeier
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Patent number: 9953784Abstract: An information processing apparatus capable of communicating with an external apparatus includes: a network controller configured to communicate with the external apparatus; a mechanical switch configured to switch on or off according to a switch driving signal; a control unit configured to output the switch driving signal to the mechanical switch according to a signal from the network controller; and a power supplying unit configured to supply power to the network controller and the control unit in a case where the mechanical switch is off. In a case where the mechanical switch is off and the network controller receives an instruction to turn on power from the external apparatus, the control unit outputs the switch driving signal to turn on the mechanical switch.Type: GrantFiled: September 3, 2015Date of Patent: April 24, 2018Assignee: Canon Kabushiki KaishaInventors: Masakazu Kitora, Akitomo Fukui, Takehiro Ito
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Patent number: 9953785Abstract: The reliability of testing a normally closed contact in a relay unit may involve the following. While the load is de-energized, sending a test signal to a normally closed contact (b1, b2) and detecting the state of the returning test signal sent. Resending a test signal when a detection result does not satisfy a predetermined criteria, and re-detecting the state of the returning test signal resent. The state of the returning test signal resent may be assessed as normal when the re-detection result satisfies the predetermined criteria.Type: GrantFiled: October 13, 2015Date of Patent: April 24, 2018Assignee: OMRON CorporationInventors: Tetsuya Fukumoto, Toshiyuki Higuchi, Kohei Murakami, Keishi Yayama, Satoshi Fujii
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Patent number: 9953786Abstract: A self-holding magnet has a spring (accumulator spring) and a first armature. The self-holding magnet is capable of holding the first magnet armature against the spring force in a lift position which is determined by a stop. The stop determines a remaining air gap of a working air gap. The magnetic circuit of the self-holding magnet has a magnetic shunt with particularly low reluctance of the same order of magnitude as a series reluctance of the remaining working air gap(s). The working air gap(s) and the shunt are magnetically connected in parallel with the flow generated by a permanent magnet but in series with the flow generated by the trigger coil. The self-holding magnet additionally has at least one positive feedback device such as a compressible resilient stop or a shunt.Type: GrantFiled: June 20, 2014Date of Patent: April 24, 2018Assignee: Rhefor GbR (Vertreten Durch den Geschaeftsfuehrenden Gesellschafter Arno Mecklenburg)Inventor: Arno Mecklenburg
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Patent number: 9953787Abstract: Systems and methods for forming an electrostatic MEMS switch include forming a movable cantilevered beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate. The cantilevered beam may be formed by etching the perimeter shape in the device layer of an SOI substrate. An additional void may be formed in the movable beam such that it bends about an additional hinge line as a result of the additional void. This may give the beam and switch advantageous kinematic characteristics.Type: GrantFiled: March 4, 2016Date of Patent: April 24, 2018Assignee: Innovative Micro TechnologyInventors: Christopher S. Gudeman, Paul J. Rubel, Marin Sigurdson
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Patent number: 9953788Abstract: An electric circuit breaker including a spring energy store drive having a spring and a manual winding device for manually tensioning the spring. In accordance with an embodiment, the manual winding device includes a rotatable latching disk, a latching pawl arranged next to the disk, and a manual actuating device connected to the latching pawl. The latching pawl is guidable into a latching toothed portion of the disk. The pawl is also capable of moving, owing to an actuation of the actuating device. As a result, the disk is capable of rotating along a preset desired rotation direction for tensioning the spring. The latching toothed portion is asymmetrical and a force transmission from the pawl onto the disk is possible along the desired rotation direction. The disk slides along the pawl when the disk rotates along the desired rotation direction more quickly than the pawl.Type: GrantFiled: December 2, 2014Date of Patent: April 24, 2018Assignee: SIEMENS AKTIENGSELLSCHAFTInventors: Fabian Roehrig, Ralf Studt
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Patent number: 9953789Abstract: A single-pole breaking unit which includes a rotary contact bridge, a stationary contact operating with the contact bridge and connected to a current input, a rotary bar having radially extending axial end surfaces, and radial side surfaces with a transverse hole for the contact bridge which is salient through opposite radial side surfaces of the bar, an arc extinguishing chamber opening onto an opening volume for the contact bridge, two parallel side panels parallel to the axial end surfaces of the bar, with the rotary bar located between two sealing flanges between the axial end surfaces of the rotary bar and the side panels and movable axially toward the side panels to ensure tightness between the inside and the outside of the breaking unit, the sealing flanges each comprising a radially extending portion, and a cylindrical portion, both co-axial with the rotary bar, which cylindrical portion has an inside radius slightly less than the radial extent of the rotary bar, providing a space between the inside sType: GrantFiled: December 18, 2015Date of Patent: April 24, 2018Assignee: Schneider Electric Industries SASInventors: Hervé Anglade, Christophe Grumel, Marc Rival, Jean-Paul Gonnet
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Patent number: 9953790Abstract: A sensing assembly is for an electrical switching apparatus. The electrical switching apparatus includes a base having a pocket portion, and a bus bar coupled to the base. The sensing assembly includes a housing structured to be coupled to the pocket portion, a power harvester coupled to the housing, a current sensor coupled to the housing, and a voltage sensing circuit located internal with respect to the housing and being structured to be electrically connected to the bus bar.Type: GrantFiled: October 11, 2016Date of Patent: April 24, 2018Assignee: EATON INTELLIGENT POWER LIMITEDInventors: Theodore James Miller, James I Wise, Sunnybhai Patel
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Patent number: 9953791Abstract: A sealed fuse in accordance with the present disclosure may include a tubular fuse body, a trench formed in an exterior of the fuse body, and an electrically conductive endcap that fits over an end of the fuse body and is fastened to the fuse body by an electrically conductive material having a lip portion that extends into the trench to provide a barrier that extends between the fuse body and the endcap. In an embodiment, the trench may be formed in an end face of the fuse body and may extend entirely around an opening in the end of the fuse body. In another embodiment, the trench may be formed in an outwardly-facing surface of a sidewall of the fuse body and may extend entirely around the fuse body.Type: GrantFiled: October 12, 2016Date of Patent: April 24, 2018Assignee: Littelfuse, Inc.Inventors: Ped Peterson Bruan, Grace Miranda, Edwin Aberin
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Patent number: 9953792Abstract: A bypass avoiding only abnormal cells or abnormal electronic components in an electronic appliance having a plurality of battery cells or electronic components is formed to decrease resistance while keeping functionality.Type: GrantFiled: August 5, 2015Date of Patent: April 24, 2018Assignee: DEXERIALS CORPORATIONInventor: Yoshihiro Yoneda
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Patent number: 9953793Abstract: A bypass avoiding only abnormal cells or abnormal electronic components in an electronic appliance having a plurality of battery cells or electronic components is formed to decrease resistance while keeping functionality. An insulating substrate 2; a heat-generating resistor 3 arranged on the insulating substrate 2; a first and a second electrodes 4, 5 arranged adjacently to each other on the insulating substrate 2; a third electrode 6 arranged adjacently to the first electrode 4 and electrically connected to the heat-generating resistor; and a first meltable conductor 8 arranged between the first and third electrodes 4, 6 to constitute a current path capable of being blown by a heat generated by the heat-generating resistor 3 are provided. The first meltable conductor 8 melted by heat from the heat-generating resistor 3 gathers on the first and second electrodes 4, 5 to short-circuit them.Type: GrantFiled: August 5, 2015Date of Patent: April 24, 2018Assignee: DEXERIALS CORPORATIONInventor: Yoshihiro Yoneda
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Patent number: 9953794Abstract: An electric connection box includes a circuit protection component, a housing, and a metal heat conductive member. The circuit protection component is provided with a metal circuit protection member. The circuit protection member includes a power supply side connector that is electrically connected to power supply side electric wires connected to a power supply side, load side connectors that are electrically connected to load side electric wires connected to a load side, and fuse elements interposed between the power supply side connector and the load side connectors. The housing is formed of an insulating material, and includes a protection component holding unit that holds the circuit protection component. The heat conductive member includes a contacting portion that contacts the power supply side connector in a state where the protection component holding unit holds the circuit protection component, and a heat conducting portion connected to the contacting portion.Type: GrantFiled: May 12, 2016Date of Patent: April 24, 2018Assignee: YAZAKI CORPORATIONInventors: Tatsuhiko Ikeda, Takaaki Kakimi
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Patent number: 9953795Abstract: A fuse cutout insulator for use in power distribution systems includes three electrically conductive pieces spaced apart and encapsulated by a dielectric material. The conductive components include a top hood, bottom pin, and central pin. The central pin is generally tube shaped and includes an outwardly extending flange to facilitate attachment of the fuse cutout to a utility pole. The top hood and bottom hinge include the traditional components for operable holding of a fuse tube member. The top hood and bottom hinge are accepted in opposite ends of the central pins bore and sealed in spaced relationship during manufacturing by the dielectric material added for fabricating the weathersheds.Type: GrantFiled: July 14, 2014Date of Patent: April 24, 2018Assignee: Hubbell IncorporatedInventors: Jeffery Joseph Kester, Lloyd Ronald Beard, Sterlin Cochran, Bryant Haines, Charles Worthington
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Patent number: 9953796Abstract: A semiconductor power handling device, includes a cathode pillar, a gate surrounding the cathode pillar, and an anode spaced from the cathode by a nano-vacuum gap. An array of semiconductor power handling devices, each comprising a cathode pillar, a gate surrounding the cathode pillar, and an anode spaced from the cathode pillar by a nano-vacuum gap. The semiconductor power handling devices can be arranged as rows and columns and can be interconnected to meet the requirements of various applications. The array of power handling devices can be fabricated on a single substrate.Type: GrantFiled: April 13, 2016Date of Patent: April 24, 2018Assignee: HRL Laboratories, LLCInventors: Biqin Huang, Christopher S. Roper, Tahir Hussain
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Patent number: 9953797Abstract: A flat emitter configured for use in an X-ray tube is presented. The X-ray tube includes a first conductive section including a first terminal. Further, the X-ray tube includes a second conductive section including a second terminal. Also, the X-ray tube includes a third conductive section disposed between the first conductive section and the second conductive section, wherein the third conductive section is configured to emit electrons toward a determined focal spot, and wherein the third conductive section includes a plurality of slits subdividing the third conductive section into a winding track coupled to the first conductive section and the second conductive section, wherein at least two of the plurality of slits are interwound spirally to compose the winding track, and wherein the winding track is configured to expand and contract based on heat provided to the third conductive section.Type: GrantFiled: September 28, 2015Date of Patent: April 24, 2018Assignee: GENERAL ELECTRIC COMPANYInventors: Xi Zhang, Mark Alan Frontera, Sergio Lemaitre, John Scott Price, Uwe Wiedmann
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Patent number: 9953798Abstract: The present invention pertains to an apparatus for generating a charged particle beam comprising a magnetic element for controlling the profile of the beam in a predetermined plane. A cathode can be provided for emitting charged particles and an anode for accelerating the charged particles along an axis of travel. The present invention also pertains to a method for generating a particle beam that has a uniform profile in a predetermined plane comprising inducing emission of charged particles from an emitter, accelerating those particles along and toward an axis of beam travel, generating a magnetic field with a component aligned with the axis of beam travel but different in the predetermined plane than at the emitter, and modifying the beam profile.Type: GrantFiled: December 13, 2016Date of Patent: April 24, 2018Assignee: NOVARAY MEDICAL, INC.Inventors: Thomas A Case, Josh Star-Lack, Brian Patrick Wilfley
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Patent number: 9953799Abstract: Provided is an X-ray apparatus including: a target configured to generate an X-ray by collision of electrons or transmission of electrons; a filament configured to release the electrons to the target; a housing that has the filament therein; and a first holding member configured to hold a portion of the target disposed on an outer side of the housing on the outer side of the housing.Type: GrantFiled: March 25, 2015Date of Patent: April 24, 2018Assignees: NIKON CORPORATION, NIKON METROLOGY NVInventors: Fumihiko Hakoda, Satoshi Takahashi, Jim Smith
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Patent number: 9953800Abstract: According to one embodiment, in a multi-charged particle beam writing apparatus, a blanking plate includes a plurality of first buffers connected in series, second buffers in a plurality of stages connected in series between the first buffer and a blanker, and an error detection processing circuitry performing error detection on data stored in the first buffer and the second buffers. The blanking control data transfers to the corresponding blanker via the first buffer and the second buffers. In a case where the error detection processing circuitry detects an error, the control processing circuitry retransmits the blanking control data to the blanking plate with regard to a shot having the error detected therein and a shot which comes, in a shot order, after the shot having the error detected therein.Type: GrantFiled: April 25, 2016Date of Patent: April 24, 2018Assignee: NuFlare Technology, Inc.Inventors: Kei Hasegawa, Hayato Kimura, Hideo Inoue, Yoshiaki Onimaru
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Patent number: 9953801Abstract: A resolving aperture assembly for an ion implantation system has a first plate and a second plate, where the first plate and second plate generally define a resolving aperture therebetween. A position of the first plate with respect to the second plate generally defines a width of the resolving aperture. One or more actuators are operably coupled to one or more of the first plate and second plate and are configured to selectively vary the position the first plate and second plate with respect to one another, thus selectively varying the width of the resolving aperture. A servo motor precisely varies the resolving aperture width and a pneumatic cylinder independently selectively closes the resolving aperture. A downstream position actuator varies a position of the resolving aperture along a path of the ion beam, and a controller controls the one or more actuators based on desired properties of the ion beam.Type: GrantFiled: November 29, 2016Date of Patent: April 24, 2018Assignee: Axcelis Technologies, Inc.Inventors: Michael Paul Cristoforo, Justin White McCabe
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Patent number: 9953802Abstract: A method of manipulating an electron beam is disclosed. The method comprises transmitting the beam through a phase mask selected to spatially modulate a phase of the beam over a cross-section thereof.Type: GrantFiled: January 21, 2015Date of Patent: April 24, 2018Assignee: Ramot at Tel-Aviv University Ltd.Inventors: Roy Shiloh, Yossi Lereah, Ady Arie
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Patent number: 9953803Abstract: A calibration method for calibrating the position error in the point of interest induced from the stage of the defect inspection tool is achieved by controlling the deflectors directly. The position error in the point of interest is obtained from the design layout database.Type: GrantFiled: February 22, 2016Date of Patent: April 24, 2018Assignee: HERMES MICROVISION INC.Inventors: Wei Fang, Kevin Liu, Fei Wang, Jack Jau
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Patent number: 9953804Abstract: The system described herein relates to a high-voltage supply unit for providing an output voltage for a particle beam apparatus, wherein the particle beam apparatus is embodied as, for example, an electron beam apparatus and/or an ion beam apparatus. The system described herein is based on the fact that it was recognized that a bipolar voltage supply unit can be formed by means of a unipolar first current source and a unipolar second current source, said bipolar voltage supply unit enabling a load current in two directions. The high-voltage supply unit according to the system described herein can be operated in the 4-quadrant operation. In the 4-quadrant operation, a first voltage source for supplying the first current source and a second voltage source for supplying the second current source are embodied as different voltage sources.Type: GrantFiled: April 22, 2016Date of Patent: April 24, 2018Assignee: Carl Zeiss Microscopy GmbHInventors: Edgar Fichter, Joerg Fober, Dirk Preikszas, Christian Hendrich, Michael Schnell, Momme Mommsen
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System for imaging a secondary charged particle beam with adaptive secondary charged particle optics
Patent number: 9953805Abstract: A secondary charged particle imaging system for imaging a secondary charged particle beam emanating from a sample by impingement of a primary charged particle beam is provided. The system includes a detector arrangement, and an adaptive secondary charged particle optics. The detector arrangement comprises a first detection element for detecting a first secondary charged particle sub-beam of the secondary charged particle beam, and a second detection element for detecting a second secondary charged particle sub-beam of the secondary charged particle beam.Type: GrantFiled: November 29, 2016Date of Patent: April 24, 2018Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbHInventors: Matthias Firnkes, Stefan Lanio, Dieter Winkler -
Patent number: 9953806Abstract: Apparatus and method for aligning a rotatable substrate to a support mechanism such as a turntable. The substrate has a circumferentially extending timing pattern comprising at least spaced apart first and second timing marks disposed on opposing sides of a center point of the substrate. The substrate is configured to be mounted to and rotated by the support mechanism about a central axis. The center point of the substrate may be offset from the central axis by an offset distance due to mechanical tolerances associated with the substrate mounting operation. The offset distance may be determined through successive detection of the first and second timing marks by a detector over at least one rotation of the support mechanism and the substrate. A write beam may be adjusted using the determined offset distance to write a second feature to the substrate in alignment with a previously written first feature.Type: GrantFiled: March 27, 2017Date of Patent: April 24, 2018Assignee: Doug Carson & Associates, Inc.Inventors: Douglas M. Carson, Mike Chatterton, Stephen Houser, Bryan Whitfield
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Patent number: 9953807Abstract: A method for forming reliefs on the surface of a substrate, including a first implantation of ions in the substrate according to a first direction; a second implantation of ions in the substrate according to a second direction that is different from the first direction; at least one of the first and second implantations is carried out through at least one mask having at least one pattern; an etching of areas of the substrate having received by implantation a dose greater than or equal to a threshold, selectively to the areas of the substrate that have not received via implantation a dose greater than said threshold; the parameters of the first and second implantations being adjusted in such a way that only areas of the substrate that have been implanted both during the first implantation and during the second implantation receive a dose greater than or equal to said threshold.Type: GrantFiled: June 2, 2017Date of Patent: April 24, 2018Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Stefan Landis, Sebastien Barnola, Thibaut David, Lamia Nouri, Nicolas Posseme
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Patent number: 9953808Abstract: Provided is an arc evaporation source for melting and evaporating a cathode material by arc discharge for film formation on a surface of a substrate, and including a cathode formed in a substantially disc shape and a magnetic field generating apparatus, disposed at a back side of the cathode. The magnetic field generating apparatus generates a magnetic field which forms magnetic lines that form an acute angle with respect to a substrate direction at an outer circumferential surface of the cathode, magnetic lines that are substantially perpendicular to the discharge surface at an outermost circumference part of the discharge surface of the cathode, and magnetic lines that form an acute angle with respect to a center direction of the cathode at a region towards the outer circumferential surface of the discharge surface of the cathode, by at least one permanent magnet disposed at the back side of the cathode.Type: GrantFiled: April 30, 2013Date of Patent: April 24, 2018Assignee: NIPPON ITF, INC.Inventors: Naoto Okazaki, Ken Yoshihara, Hiroshi Ishizuka, Tomoyasu Matsuno, Shinji Narahara
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Patent number: 9953809Abstract: An apparatus for coating a film in a container and a method for coating a film are provided. The apparatus includes a cylindrical housing having a containing space penetrating through both ends thereof; a first arc-shaped electrode and a second arc-shaped electrode surrounding and covering an outer side of the cylindrical housing with a gap formed between the first and second arc-shaped electrodes such that the first arc-shaped electrode is free from electrically connected to the second arc-shaped electrode; a first conductive ring and a second conductive ring surrounding on the first and second arc-shaped electrodes, respectively; an upper supporting seat and a lower supporting seat disposed at the both ends of the cylindrical housing, respectively, to form a sealed environment for the containing space; and a valve component furnished at the upper supporting seat and inserted into the container for providing a processing gas in a film-coating process.Type: GrantFiled: December 17, 2015Date of Patent: April 24, 2018Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Chih-Chiang Weng, Chen-Der Tsai, Yu-Ming Wang
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Patent number: 9953811Abstract: A plasma processing method for performing a plasma process on a processing target substrate is provided. The plasma processing method includes: segmenting a RF antenna into an inner coil, an intermediate coil, and an outer coil with gaps therebetween in a radial direction, respectively, the inner coil, the intermediate coil and the outer coil being electrically connected to one another in parallel between a first node and a second node; providing a variable intermediate capacitor and a variable outer capacitor between the first node and the second node, the variable intermediate capacitor being electrically connected in series to the intermediate coil, the variable outer capacitor being electrically connected in series to the outer coil, no reactance device being connected to the inner coil; and controlling plasma density distribution on the processing target substrate by selecting or variably adjusting electrostatic capacitances of the intermediate capacitor and the outer capacitor.Type: GrantFiled: July 8, 2014Date of Patent: April 24, 2018Assignee: TOKYO ELECTRON LIMITEDInventor: Yohei Yamazawa
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Patent number: 9953812Abstract: Embodiments of process kits and process chambers incorporating same are provided herein. In some embodiments, a process kit includes: a one-piece process kit shield having a cylindrical body having an upper portion and a lower portion; an adapter section extending radially outward and having a resting surface to support the one-piece process kit shield on walls of a chamber and a sealing surface on which a chamber lid rests to seal off an inner volume of the chamber when the one-piece process kit shield is placed in the chamber; a heat transfer channel extending through the adapter section; and a protruding section extending radially inward from the lower portion; a resting bracket having an upper portion coupled to the adapter section and a lower portion extending radially inward; a cover ring disposed beneath the protruding section; and a deposition ring disposed beneath the cover ring.Type: GrantFiled: October 6, 2016Date of Patent: April 24, 2018Assignee: APPLIED MATERIALS, INC.Inventors: William Johanson, Kirankumar Savandaiah, Xin Wang, Prashant Prabhu
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Patent number: 9953813Abstract: Methods and apparatus for improved metal ion filtering are provided herein. In some embodiments, a substrate processing apparatus includes: a chamber body and a chamber lid disposed on the chamber body defining a processing region within the chamber body beneath the lid; a collimator disposed in the processing region; a power source coupled to the collimator; and a first set of magnets disposed around the chamber body above the collimator and a second set of magnets disposed around the chamber body and below the collimator that together create a guidance magnetic field that is substantially orthogonal to the collimator.Type: GrantFiled: May 8, 2015Date of Patent: April 24, 2018Assignee: APPLIED MATERIALS, INC.Inventors: Xianmin Tang, Joung Joo Lee, Guojun Liu
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Patent number: 9953814Abstract: A hardware module which operatively carries out a method of compressing mass spectral data, the method comprising: receiving a first signal output from an ion detector of a mass spectrometer; processing the first signal to a digital signal at an output being data frame types representative of the first signal output; temporarily storing the data frame types in a memory block and reading a data frame from the memory block and determining its data frame type and according to its data frame type compressing the data frame according to one or more compression algorithms to generate a compressed data output stream.Type: GrantFiled: August 8, 2016Date of Patent: April 24, 2018Assignee: MICROMASS UK LIMITEDInventors: Stephen John Platt, Keith George Richardson, David Darrell Williams, Richard Denny
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Patent number: 9953815Abstract: A high-voltage waveform generator comprising a power source, a transformer unit comprising a magnetic core, attached to the power source, a plurality of power switch cards, each having an aperture that allows said magnetic core to pass therethrough, one or more control switches located on each power card, and a control means for actuating the control switches, a power output; wherein the power switch cards are connected in series, wherein each of the apertures in the power switch cards is surrounded by conductive windings, whereby when the power source is activated, the magnetic core induces a current in each of the conductive windings, and wherein the control means activates the control switches simultaneously in under 100 nanoseconds to generate a pulse.Type: GrantFiled: June 13, 2017Date of Patent: April 24, 2018Inventor: Elmer Griebeler
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Patent number: 9953816Abstract: An ion detector for a Time of Flight mass spectrometer is disclosed comprising a single Microchannel Plate which is arranged to receive ions and output electrons. The electrons are directed onto an array of photodiodes which directly detects the electrons. The output from each photodiode is connected to a separate Time to Digital Converter provided on an ASIC.Type: GrantFiled: October 21, 2014Date of Patent: April 24, 2018Assignee: MICROMASS UK LIMITEDInventors: John Brian Hoyes, Anthony James Gilbert, Motohiro Suyama
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Patent number: 9953817Abstract: An ion transfer tube assembly, a mass spectrometry system, and a method for providing an ion stream to an ion detection device are described that include using an ion transfer tube that provides a coaxial sheath gas flow. In an implementation, an ion transfer tube assembly includes an ion transfer tube for delivering the ion stream, where a sheath gas flows through the ion transfer tube, and where the ion transfer tube receives the ion stream from a first conduit coupled to an ion source; a pump fluidly coupled to the ion transfer tube, where the pump causes the sheath gas to flow through the ion transfer tube, where the ion stream is separated from the ion transfer tube walls by the coaxial sheath gas flow, and where the ion stream is received by a second conduit coupled to the ion detection device.Type: GrantFiled: April 22, 2016Date of Patent: April 24, 2018Assignee: Smiths Detection Inc.Inventors: Vadym Berkout, Douglas J. Green
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Patent number: 9953818Abstract: An ion mobility gas detector apparatus including a detector core, an inlet gas path, an exhaust gas path, a source of diluent gas, and at least one or more sensors for measuring temperature, pressure and humidity of gas streams. Further included is a mixing mechanism adapted to mix at least first and second gas streams in response to one or more sensor measurements. A controller is provided for applying drive signals to the detector core.Type: GrantFiled: June 24, 2016Date of Patent: April 24, 2018Assignee: Owlstone Medical LimitedInventors: Mike Black, Matthew Hart, John Somerville, Alastair Taylor, Iva Manasi, Max Allsworth
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Patent number: 9953819Abstract: An ion source is provided comprising one or more nebulizers and one or more targets, wherein the one or more nebulizers are arranged and adapted to emit, in use, a stream predominantly of droplets which are caused to impact upon the one or more targets and to ionise the droplets to form a plurality of ions. The ion source further comprises one or more electrodes arranged adjacent to and/or attached to the one or more targets wherein the one or more electrodes comprise one or more apertures, notches or cut-outs wherein at least some of the plurality of ions pass, in use, through the one or more apertures, notches or cut-outs.Type: GrantFiled: February 26, 2015Date of Patent: April 24, 2018Assignee: Micromass UK LimitedInventor: Stevan Bajic