Abstract: A method of roll-forming with gap fillers for a solenoid used for a transmission includes the steps of providing a can of a solenoid, the can having a discontinuous surface with a gap, providing additional material in the gap, and roll-forming the additional material in the gap simultaneously with roll-forming the can to maintain a smooth path for rollers during roll-forming for the solenoid.

Abstract: A multilayer electronic component includes a multilayer body having a structure in which a plurality of insulation layers are stacked, and having first and second end surfaces opposing each other and first and second side surfaces connecting the first and second end surfaces to each other. An internal coil disposed in the multilayer body includes a plurality of internal coil patterns exposed to the first and second side surfaces of the multilayer body and vias penetrating through the insulation layers connecting the plurality of internal coil patterns to each other. First and second side parts cover at least portions of the first and second side surfaces of the multilayer body, respectively.

Abstract: A 3D nested transformer includes a substrate having a set of through substrate vias daisy chained together with a set of traces. At least some of the through substrate vias have first and second conductive regions. The set of traces also includes a first set of traces coupling together at least some of the first conductive regions of the through substrate vias, and a second set of traces coupling together at least some of the second conductive regions of the through substrate vias.

Abstract: According to an embodiment, a superconducting coil production device for producing a non-coplanar three-dimensional superconducting coil by winding a tape-like superconducting wire includes: a coil bobbin; a supply reel to supply the superconducting wire to the coil bobbin; and an adjustment driving unit to adjust a position of the supply reel relative to a wrapping point so that a position of the wrapping point of the coil bobbin around which the superconducting wire being supplied from the supply reel is wrapped becomes equal to a position of the supply reel in a rotational axis direction of the supply reel.

Abstract: The present disclosure provides advantageous composite films/coatings, and improved methods for fabricating such composite films/coatings. More particularly, the present disclosure provides improved methods for fabricating composite films by trapping at least a portion of a layered material (e.g., hexagonal boron nitride sheets/layers) at an interface of a phase separated system and then introducing the layered material to a polymer film. The present disclosure provides for the use of boron nitride layers to increase the properties (e.g., dielectric constant and breakdown voltage) of polymer films. The exemplary films can be produced by an advantageous climbing technique. Exemplary boron nitride films are composed of overlapping boron nitride sheets with a total thickness of about one nanometer, with the film then transferred onto a polymer film, thereby resulting in significant increases in both dielectric and breakdown properties of the polymer film.

Abstract: A capacitor support system includes a support structure configured to support at least one capacitor and a pressure generating module configured to generate a pressure on the at least one capacitor. The pressure generating module includes a bearing plate, a transmission plate, and at least one plate shaped leaf spring provided between the bearing plate and the pressure transmission plate. The pressure generating module is connected to the support structure by the bearing plate. The bearing plate is fixedly connected to the connecting structure in such a way that it provides a bearing surface for the at least one leaf spring and keeps the at least one leaf spring in a compressed state between the bearing plate and the at least one capacitor.

Abstract: Embodiments are directed to obtaining a specification of at least one operational requirement for at least one capacitor, generating a design of the at least one capacitor to satisfy the at least one operational requirement, the design of the at least one capacitor comprising a plurality of layers and a first integrated busbar coupled to at least a portion of the layers, and based on the design, manufacturing the at least one capacitor by utilizing an additive manufacturing technique.

Abstract: A multilayer electronic component includes a body, first and second external electrodes, and first and second side parts. The body includes a multilayer structure in which first and second internal electrode patterns are alternately stacked and contains a dielectric material. The first and second side parts are disposed on outer surfaces of the body to face each other. The first and second external electrodes are disposed on outer surfaces of the body to face each other. The first internal electrode patterns are exposed to a third surface and a fifth surface of the body on which the first external electrode and the first side part are disposed, respectively. Additionally, the second internal electrode patterns are exposed to a fourth surface and a sixth surface of the body on which the second external electrode and the second side part are disposed, respectively.

Abstract: A film capacitor according to the present disclosure includes: a film capacitor element; a bus bar connected to the film capacitor element; and an exterior member which covers the film capacitor element and the bus bar; wherein the exterior member is formed of a metal laminate film, the metal laminate film having a first resin layer on a surface facing the film capacitor element, a part of the bus bar is exposed to an outside of the exterior member, and a second resin layer containing an acid-modified resin is formed between the first resin layer and the bus bar at an exposing port of the exterior member through which the part of the bus bar is exposed from the exterior member.

Abstract: There is provided a monomer liquid for conductive polymer production, comprising: at least one monomer selected from the group consisting of thiophene or its derivatives, pyrrole or its derivative and aniline or its derivative; and at least one kind selected from the group consisting of a naphthalene sulfonic acid type heterocyclic compound and a benzene sulfonic acid type heterocyclic compound in which no hydroxyl group is directly connected to the benzene ring, wherein said at least one kind is dispersed in said at least one monomer. Also, there is provided a production of an electrolyte capacitor by using the monomer liquid for conductive polymer production is explained. In particular, imidazoles are favorable as the naphthalene sulfonic acid type heterocyclic compound and the benzene sulfonic acid type heterocyclic compound.

Abstract: A dye-sensitized solar cell comprises a pair of electrodes that face each other; an electrolyte that is disposed between the pair of electrodes; and a sealing section that connects the pair of electrodes and is provided around the electrolyte. In the dye-sensitized solar cell, the sealing section comprises at least one corner section when the sealing section is viewed in planar view from the electrode side, and a first contact surface at the corner section with at least one of the pair of electrodes comprises a first curve line-containing surface containing a curved curve line on the electrolyte side.

Abstract: An activated carbon for an electrode of a power storage device of the present invention has uniform consecutive macropores, and a pore size distribution centered within a range of 1.5 to 25 ?m, a specific surface area within a range of 1,500 to 2,300 m2/g, a micropore volume within a range of 0.4 to 1.0 mL/g, and an average micropore width within a range of 0.7 to 1.2 nm. Provided is an activated carbon for an electrode of a power storage device suitable for an electric double layer capacitor that has high capacitance during charging and discharging at high current density and excellent endurance against charging at a high voltage of 3 V or more and a lithium-ion capacitor having excellent endurance against charging at a high voltage of 4 V or more.

Abstract: To provide an ionic liquid which has at least one of properties such as high ionic conductivity, a small reduction in ionic conductivity at a low temperature, a low melting point, and a low viscosity. To provide a power storage device having higher initial charge and discharge efficiency than a power storage device containing a conventional ionic liquid. A cyclic quaternary ammonium salt is liquid at room temperature and contains a quaternary spiro ammonium cation having an asymmetrical structure including two aliphatic rings and one or more substituents bonded to one or both of the two aliphatic rings and an anion corresponding to the quaternary spiro ammonium cation. The power storage device includes a positive electrode, a negative electrode, and a nonaqueous electrolyte containing the cyclic quaternary ammonium salt as a nonaqueous solvent.

Abstract: Disclosed is a touch window, The touch window includes a cover window, a first sensing electrode layer formed on a view area (V/A) of the cover window and including a first electrode pattern including a first unit cell electrode pattern, and a second sensing electrode layer formed on the view area and including a second electrode pattern which crosses the first electrode pattern and includes a second unit cell electrode pattern. A ratio of an area of the space part between a first unit cell electrode pattern and a second unit cell electrode pattern adjacent to the first unit cell electrode pattern with respect to an area of the first unit cell electrode pattern of the first electrode pattern or the second unit cell electrode pattern of the second electrode pattern is in the range of 10% to 20%.

Abstract: A switching device has a switching chamber; a plate-like switching element, which can be moved in the switching chamber along a linear movement axis (Z) between an ON position in which the switching element connects fixed contacts to one another, and an OFF position in which the switching element is at a distance from the fixed contacts; an actuator for linear movement of the switching element inside the switching chamber; and spring(s) which prestress the switching element in the direction of the movement axis (Z). Guides are provided and configured so the switching element in the switching chamber is guided along the movement axis (Z) in a linearly movable manner and held so a main axis (N) of the switching element, which runs perpendicularly with respect to the two main extension directions (X, Y) of the switching element, is oriented at least substantially parallel to the movement axis (Z).

Abstract: A key switch includes a baseplate, a circuit layer, a keycap and a support rod. The baseplate has a hook and a first through hole neighboring to the hook. The circuit layer includes a first sublayer disposed above the baseplate and having a second through hole, and a second sublayer disposed above the first sublayer and having a third through hole; a portion of the second sublayer extends over the second through hole and forms a first resilient portion; the first resilient portion has four sides, two of which connect to the second sublayer; and the first resilient portion is neighboring to the hook. The keycap is disposed above the baseplate and can move upward and downward in respect to the baseplate. The support rod has a first portion and a second portion; the first portion movably connects to the keycap and the second portion engages the hook.

Abstract: A switch device includes a casing that includes a recessed bearing portion, a rotatable drive member that includes a shaft portion disposed in the bearing portion, a switch driven by the drive member, and a covering member that includes a pressing structure provided so as to press an upper portion of the shaft portion and that is secured to the casing. The covering member includes an operating portion that faces the drive member such that the operating portion is able to press the drive member and that is formed of an elastically deformable elastic material and a base portion that is secured to the casing, that is formed of a synthetic resin material, and that is integrated with the operating portion. The pressing structure is integrated with the base portion and formed of an elastically deformable elastic material.

Abstract: Automatic transfer switching apparatus and systems include a switching device including an input line, a sensor, and a parallel assembly of a solid-state relay and latching relay electrically connected with the input line. The solid-state relay is used to short the latching relay such that the latching relay can be opened and/or closed in an unloaded state while the input line is energized.

Abstract: A trigger assembly and scanner terminal are described. The trigger assembly includes two parts. A rigid first part stores a pressure sensitive switch and a printed circuit board. An elastic second part contacts the pressure sensitive switch in response to a level of pressure applied to the trigger assembly. The first part and second part are formed from a continuous piece.

Abstract: A displacement switch includes a main operation portion having a hollow shape. The main operation portion includes a top surface via which the displacement switch is operated, and a side surface connected to the top surface to define the hollow shape. The displacement switch also includes a support member connected to the main operation portion and swingable around a swing axis together with the main operation portion, and a base including a peripheral wall surrounding an insertion inlet into which the support member is inserted. The main operation portion covers the insertion inlet such that the side surface surrounds an outer peripheral surface of the peripheral wall.

Abstract: An input device includes an upper cover including a plurality of key openings and a keyboard including a base plate disposed on a back side of the upper cover, and a plurality of key tops provided in a front side of the base plate and inserted in the respective key openings. A plurality of hooks, each of which is disposed between the key tops adjacent to each other at a plurality of points and is provided upright on a back surface of the upper cover, fixes the keyboard to the upper cover.

Abstract: A keyboard includes a base board; transversely moveable boards, each moveably provided on the base board and including a film circuit board, a resilient dome on the film circuit board, a hole member on the film circuit board and adjacent to the resilient dome, openings on the film circuit board, a hollow structure in the film circuit board and directly under the resilient dome, a top contact in the hollow structure, and a bottom contact in the hollow structure and spaced from the top contact; key caps; and scissors-type bridge structures, each including a first frame member, a hollow, rectangular second frame member, and a peg extending out of the first frame member. Top of the scissors-type bridge structure is pivotably secured to the key cap. Bottom of the scissors-type bridge structure is pivotably secured to the base board by inserting through the holes onto the base board.

Abstract: The limit switch uses a rolling sprocket mounted on an offset pivot point mounted in a housing in combination with inserts into individual links of the chain. The sprocket engages the chain using spring tension on the pivot point and rolls along the chain as the chain moves with the teeth of the sprocket inserting into the chain link spaces. An insert is attached in a chain link and positioned such that when the curtain reaches the desired terminal position, the inserts are at the point where the sprocket contact the insert. The insert blocks the cog of the sprocket which pushes the sprocket away from the chain and inwardly into the interior of the housing. Inside the housing the limit switch that is activated—either by contact or other means. The activation of the kill switch stops the motor and thus the movement of the curtains.

Abstract: A transfer assembly is for a switching assembly mounted in an electrical enclosure. The switching assembly has an electrical switching apparatus, a shaft, and a handle member coupled to the shaft. The electrical switching apparatus is structured to move between an ON position and an OFF position. The transfer assembly includes a body structured to be coupled to the electrical switching apparatus, and a cam assembly structured to move between a FIRST position and a SECOND position. The cam assembly includes a rotary member coupled to the body and structured to be coupled to the shaft, and a driving member cooperable with the rotary member. When the cam assembly moves between the FIRST position and the SECOND position, the driving member drives the electrical switching apparatus between the ON position and the OFF position.

Abstract: An arc resistant system includes an enclosure that houses electrical equipment and includes an intake isolation assembly configured to deform in response to an arc fault pressure wave to substantially block an intake ventilation opening of the enclosure. The enclosure also includes a first pressure relief assembly configured to open in response to the arc fault pressure wave to allow arc products to exit the enclosure and to enter a ventilation box. The ventilation box is coupled to the enclosure and includes an exhaust isolation assembly configured to deform in response to the arc fault pressure wave to substantially block an exhaust ventilation opening of the ventilation box. The ventilation box also includes a second pressure relief assembly configured to open in response to the arc fault pressure wave to allow the arc products to exit the ventilation box.

Abstract: A power distribution switchgear including a housing to which a switch is mounted, housing has an opening, the first and second electric contact connected to a first and second conductors. A rotating operating shaft of inserted into the opening, and an actuator having a first end coupled to the shaft and a second end coupled to the second contact. The actuator and shaft made of an electrically insulating material. The shaft supported in the housing by the actuator member. The interface is located at a distance D from the longitudinal axis Y of the shaft that is longer than a distance d between axis Y and a circumferential edge that delimits the opening.

Abstract: A gas circuit breaker having a pair of contacts and a pair of exhaust conductors. An exhaust hole in the pair of exhaust conductors is provided with an insulation cover having an opening. The cover has a guide on an opening end on the side near the pair of contacts and an opening end on the side far from the pair of contacts respectively. The guide has an exhaust hole protective guide and a high-temperature gas passage dividing guide. A first gas flow passage is between an exhaust hole protective guide and a high-temperature gas passage dividing guide, and a second gas flow passage is between the high-temperature gas passage dividing guides. The first gas flow passage is narrower than the second gas flow passage. An end of the exhaust hole protective guide on the first gas flow passage side is projected toward the high-temperature gas passage dividing guide.

Abstract: A pole part for high pressure environment application, with a pressure resistant insulating housing in which a vacuum interrupter is installed, wherein the vacuum interrupter is provided with at least one moving contact and one fixed contact inside the vacuum interrupter. In order to create a pole part able to withstand high environmental pressure, a pressure resistant insulating body can be tubelike and at its ends provided with flanges formed at the insulating housing out of the same material, and that at least one of the flanges is closed with a metal cap, which is adapted to the aforesaid flange of the insulating housing by the same dimensions, and that with clamp the metal cap is pressed tightly on the flange of the insulating housing by the introduced clamping fixation force.

Abstract: Applicant has created systems, methods, and apparatuses for controlling the power supply of a vacuum cleaner motor. The systems and apparatuses include pressure taps to detect a pressure differential within a vacuum cleaner, a float that adjusts depending on an amount of liquid stored, and a power switch that toggles based on the pressure differential created by the position of the float. Alternatively, the float can be replaced by an air chamber so that the pressure differential is created by liquid rising above the volume of air trapped in the chamber. The method can include interrupting the current supplied to an electrical circuit of a power switch based upon a pressure differential created within the vacuum. By controlling the power supply to a vacuum cleaner motor based on a pressure differential created by the amount of liquid stored within the vacuum cleaner, the vacuum cleaner can automatically disable the vacuum cleaner's motor as the vacuum approaches its maximum liquid capacity.

Abstract: Provided is a relay unit that can sufficiently suppress defects that are caused by an insulation failure of insulating member that insulates and separates a load power supply from a device power supply, and a method for controlling a relay circuit. A control unit includes an insulating member diagnosis unit that performs diagnosis of an insulation failure of the capacitor.

Abstract: An electronic operated safety switch has a switching device which houses a switch. The switch is operatively connected to a control or service circuit. The electronic operated safety switch also has an operating device configured for engaging the switch. The switching device comprises a head housing a sensor, and a case housing a lock. The operating device is adapted to send a signal to the sensor, thereby controlling the switch. The switch comprises an actuator housed in the case, the actuator configured to operate on the lock upon the receiving by the sensor of the signal.

Abstract: An electrical disconnect device includes: a pair of stationary terminals; a movable bridge that is movable between a closed position for making electrical contact between the pair of stationary terminals and an open position for breaking electrical contact; an electromagnetic control system that is switched between an open state in which the movable bridge is positioned in its open position, and a closed state in which it is positioned in its closed position; and a manual drive unit that are drivable between an operational position in which the movable bridge is free to move between its open and closed positions, and a forced-open position in which the manual drive unit holds the movable bridge spaced apart from the pair of stationary terminals. The manual drive unit can be placed in a forced-closed position in which it blocks the movable bridge against the pair of stationary terminals.

Abstract: A circuit board enclosure comprises a circuit breaker, platform, base, cover, and circuit board. The circuit breaker includes two conductors and a plate, which is connected to the conductors. The platform receives the circuit breaker. The base has a bottom member and an opening arranged in the bottom member. The base receives the platform with the circuit breaker such that the plate of the circuit breaker is accommodated substantially within the opening of the bottom member. The cover is configured to cover the base and form an interior space. The interior space accommodates the platform, the circuit breaker, and the circuit board. The circuit board is connected to the circuit breaker. The circuit board enclosure can be adhered to a substantially planar surface. The plate is configured such that removal of the circuit board enclosure from the substantially planar surface will damage the connection of the plate to the conductors.

Abstract: A holder for receiving fuses is provided. The holder includes a housing and a fuse shuttle. The fuse shuttle is slidably cooperable with the housing in a first portion of the housing and pivotally cooperable with the housing in a second portion of the housing. The fuse shuttle and the housing define a fuse loading position and a fuse operational position.

Abstract: The present disclosure relates to a manufacturing method for an electron emitting device using a graphite adhesive material. A method of preparing paste for forming a cathode of an electron emitting device includes: mixing and dispersing a nanomaterial for electron emission and a graphite filler in a solvent; drying a mixed solution in which the nanomaterial and the graphite filler are mixed; and preparing paste by mixing a graphite binder with the dried mixture.

Abstract: Technologies are described for methods for fabricating a film component. The methods may comprise sputtering a first film onto a substrate. The first film may include a semiconductor compound material. The semiconductor compound material may include a semi-metal material and one or more alkali material. The methods may further comprise evaporating a second film onto the first film. The second film may include the one or more alkali materials. The one or more alkali materials may catalyze crystallization of the semiconductor compound material in the first film substantially throughout the first film to form the film component in the first layer.

Abstract: An x-ray emitter includes a housing. In an embodiment, the method for assembling the housing includes producing a housing of the x-ray emitter and assembling the housing. The producing includes providing a material including a plurality of ferromagnetic particles, aligning the ferromagnetic particles through a magnetic field, the material being in a flowable state, and solidifying the material and fixing the alignment of the ferromagnetic particles.

Abstract: An x-ray apparatus (1), has an electron beam source (2), a target (4), onto which the electron beam (3) is directed to form a focal spot (5; 5a, 5b) on the target (4), x-ray optics (6) for collecting x-rays emitted from the focal spot (5; 5a, 5b) to form an x-ray beam (8) and a sample position (9) at which the x-ray beam (8) is directed. The x-ray apparatus (1) further includes an electrostatic or electromagnetic electron beam deflection device (10) suitable for moving the focal spot (5; 5a, 5b) on the target (4). The extension of the focal spot (5; 5a, 5b) in any direction (x, y, z) is at least a factor of 1.5 smaller than the extension of the target (4). An x-ray apparatus is thereby provided with simplified alignment of the x-ray optics with respect to a microfocus x-ray source.

Abstract: A system includes a digital pattern generator (DPG) having a plurality of pixels that are dynamically and individually controllable; a switching device that is coupled to the DPG, the switching device configured to route a packet to the DPG so as to control at least one of the pixels, the switching device further comprising: a plurality of input buffers configured to receive and store the packet through a transmission line; a plurality of output buffers; a plurality of memory devices, wherein each of the plurality of memory devices is associated with one of the plurality of output buffers; and a scheduling engine that is coupled to the plurality of input buffers, the plurality of output buffers, and the plurality of memory devices and is configured to determine a routing path for the packet stored in one of the input buffers based on an availability of the output buffers and a vacancy level the memory devices.

Abstract: A high energy beam verification, calibration, and profiling system includes a conductive base plate, supports extending from the base plate, a plurality of conductors, a data logger electrically connected to the conductors, and a computer electrically connected to the data logger. Each conductor is supported by some of the supports such that each conductor is insulated from the conductive base plate. Each conductor has a profile intersecting with profiles of at least some of the other conductors to define a multidirectional and two-dimensional array of conductors. The data logger receives and records data associated with electrical charges flowing through the conductors. The computer is adapted to receive, manipulate, and display the data recorded by the data logger for comparison of beam characteristics at different locations across a high energy beam build area.

Abstract: The present invention provides apparatus for an imaging system comprising a multitude of chemical emitting elements upon a substrate. In some embodiments the substrate may be approximately round with a radius of approximately one inch. Various methods relating to using and producing an imaging system of chemical emitters are disclosed.

Abstract: Provided is a charged particle beam lens apparatus having a small size and high resolution, and a charged particle beam column and a charged particle beam exposure apparatus. A charged particle beam lens apparatus includes a lens unit positioned around a through hole through which a charged particle beam travels, where the lens unit is configured to converge or diffuse the charged particle beam, and a supporting unit surrounding the lens unit. Here, at least one of an outer peripheral portion of the lens unit that is in contact with the supporting unit and an inner peripheral portion of the supporting unit that is in contact with the lens unit includes a groove through which a coolant fluid flows along an outer periphery of the lens unit. In this way, the charged particle beam lens apparatus can achieve a small size and high resolution.

Abstract: The system described herein detects charged particles which, for example, are generated by interaction of a charged particle beam with an object to be analyzed using, for example, a particle beam device. Detection is carried out for imaging of the object. The system described herein allows detection of charged particles with the same detection principle when the ambient pressures in an object chamber are in a first pressure range being lower than or equal to 10?3 hPa or in a second pressure range being equal to or above 10?3 hPa. When operating with the object chamber in the second pressure range, the system described herein generates photons in a scintillator using cascade particles generated by using the charged particles and a gas, and detects the photons using a light detector.

Abstract: A method includes providing a semiconductor substrate, and performing an ion implantation process to a surface of the substrate. The ion implantation process includes intermittently applying an ion beam to the surface, and while applying the ion beam, applying a heating process with a heating temperature above a threshold level.

Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.

Abstract: Systems and methods for protecting vacuum seals in a plasma processing system are provided. The processing system can include a vacuum chamber defining a sidewall and an inductive coil wrapped around at least a portion of the sidewall. A vacuum seal can be positioned between the sidewall of the vacuum chamber and a heat sink. A thermally conductive bridge can be coupled between the sidewall and heat sink. Further, the thermally conductive bridge can be positioned relative to the vacuum seal such that the thermally conductive bridge redirects a conductive heat path from the sidewall or any heat source to the heat sink so that the heat path bypasses the vacuum seal.

Abstract: Apparatus and method for plasma-based processing well suited for deposition, etching, or treatment of semiconductor, conductor or insulating films. Plasma generating units include one or more elongated electrodes on the processing side of a substrate and a neutral electrode proximate the opposite side of the substrate. Gases may be injected proximate a powered electrode which break down electrically and produce activated species that flow toward the substrate area. This gas then flows into an extended process region between powered electrodes and substrate, providing controlled and continuous reactivity with the substrate at high rates with efficient utilization of reactant feedstock. Gases are exhausted via passages between powered electrodes or electrode and divider.

Abstract: An apparatus includes a row of substrate transfer devices 3 which can deliver a wafer W within a transfer chamber; and rows of process modules PM, arranged at right and left sides of the row of the substrate transfer devices along the row, configured to perform processes to the wafer W. The rows of the process modules PM are arranged such that each of the processes can be performed by at least two process modules PM. Thus, when a single process module PM cannot be used, the wafer W can be rapidly transferred to another process module PM which can perform the same process as performed in the corresponding process module. Therefore, even when the single process module PM cannot be used, the processes can be continued to the wafers W without stopping an operation of the apparatus, so that the number of wasted wafers W can be reduced.

Abstract: Disclosed is an inductively coupled RF plasma source that provides both magnetic confinement to reduce plasma losses and Faraday shielding to suppress parasitic capacitive components. The inductively coupled RF plasma system comprises an RF power source, plasma chamber, an array of permanent magnets, and an antenna array. The plasma chamber is comprised of walls and a dielectric window having an inner and outer surface wherein the inner surface seals the volume of the plasma chamber. The array of parallel conductive permanent magnets is electrically interconnected and embedded within the dielectric window walls proximate to the inner surface and coupled to ground on one end. The permanent magnet array elements are alternately magnetized toward and away from plasma in the plasma chamber to form a multi-cusp magnetic field. The antenna array may be comprised of parallel tubes through which an RF current is circulated. The antenna array is oriented perpendicular to the permanent magnet array.

Abstract: A plasma chamber is provided to increase conductance within the plasma chamber and to increase uniformity of the conductance. A radio frequency (RF) path for supplying power to the plasma chamber is symmetric with respect to a center axis of the plasma chamber. Moreover, pumps used to remove materials from the plasma chamber are located symmetric with respect to the center axis. The symmetric arrangements of the RF paths and the pumps facilitate an increase in conductance uniformity within the plasma chamber.