Abstract: A liquid crystal display device includes a liquid crystal panel that includes a liquid crystal cell including a pair of substrates and a liquid crystal layer sandwiched between the pair of substrates, and a pair of polarizers arranged on a light incident side and a light emission side of the liquid crystal layer; an illumination device that is arranged on the light incident side of the liquid crystal cell, and emits light toward the liquid crystal cell; and a light control member that is arranged on the light emission side of the liquid crystal panel, and controls an emission direction of light emitted from the liquid crystal panel by anisotropically diffusing the light in an azimuthal direction as viewed from a direction normal to the liquid crystal panel.

Abstract: A display apparatus includes a display panel curved along a first direction and a backlight unit. The backlight unit includes a bottom chassis, light emitting diodes, reflecting members, and a reflecting sheet. The light emitting diodes include a first light emitting diode and a second light emitting diode. The second light emitting diode is spaced apart from the first light emitting diode in the first direction. A first area that a first reflecting member disposed under the first light emitting diode among the reflecting members is exposed is different from a second area that a second reflecting member disposed under the second light emitting diode among the reflecting members is exposed.

Abstract: A light emitting module is disclosed. The light emitting module includes a board, a plurality of light emitting device packages mounted on the board while being spaced apart from each other, and a plurality of lenses located at upper surfaces of the light emitting device packages in a contact fashion, wherein each of the lenses includes a curved surface expressed by a start point (SP), an end point (EP), and two adjustment points (AP1 and AP2) of a Bezier curve represented as follows. SP=(x, z), EP=(x, Z_E), AP1=(X_01, Z_01), AP2=(X_02, Z_02) where x indicates positions in a direction intersecting a light axis, z indicates positions in a direction parallel to the light axis, SP is fixed, and 0.5 mm?Z_E?0.78 mm, 1.62 mm?X_01?1.8 mm, 1.44 mm?Z_01?1.5 mm, 0.19 mm?X_02?0.25 mm, and 1.06 mm?Z_02?1.26 mm, or X_01 is 1.0 mm, Z_01 is 0.9 mm, X_02 is 0.2 mm, Z_02 is 0.1 mm, and Z_E is 1.2 mm.

Abstract: The present disclosure provides a supporting member for diffusion plate and a backlight module, in which the supporting member for diffusion plate is mounted between a backplane and a diffusion plate, the supporting member for diffusion plate includes a fixing portion and a supporting portion; the fixing portion is secured to the backplane; the supporting portion connects the fixing portion and extends opposite from the fixing portion; the supporting portion contacts and elastically supports the diffusion plate, when the supporting portion is pressed by a force from the extending direction of the supporting portion, the supporting portion causes an elastic deformation and shortens along the extending direction. The disclosed supporting member for diffusion plate will not damage the diffusion plate.

Abstract: A light source module including a substrate, a plurality of light source, and a first three-dimensional optical control structure is provided. The substrate includes a periphery region and a middle region. The plurality of light sources is disposed on the substrate. The first three-dimensional optical control structure is located in the periphery region of the substrate and located above the plurality of light sources. The first three-dimensional optical control structure covers one of the plurality of light sources. The light generated by the light sources passes through the first three-dimensional optical control structure and is emitted out. The first three-dimensional optical control structure has an asymmetrical shape.

Abstract: A detection unit for lighting detection of an LCD, an array structure comprising the detection unit, a liquid crystal display comprising the the array structure, and a detection method for lighting detection of an LCD are provided. Processes of original RGB displays are improved, the shorting bars are reduced, and only one array mask is changed to implement the lighting detection of solid colors and mixed colors in semi-products of RGBW displays, and the production cost can be reduced.

Abstract: A display device having a structure capable of improving brightness “Mura” and color “Mura” that may be generated in a direct type backlight unit has a structure in which a plurality of light sources are arranged in a pattern similar to a square arrangement along the edges of the backlight unit, and in a pattern similar to a triangle arrangement within an intermediate region of the backlight unit, and a connector for connecting a cable disposed on a Printed Circuit Board (PCB) is disposed on the rear side of the PCB such that the connector does not influence “Mura” of the backlight unit.

Abstract: Disclosed herein are light-emitting devices comprising a glass substrate having a first surface, and a plurality of color-converting elements disposed on the first surface, wherein at least one of the plurality of color-converting elements comprises a convex surface. Also disclosed herein are display devices comprising such light-emitting devices and methods for making the light-emitting devices.

Abstract: An image display device including a polarizer and a first optical film, in which the first optical film is arranged on a visible side from the polarizer, the first optical film has Re(589) of 3,000 nm to 30,000 nm and Rth(589) of ?30,000 nm to ?3,000 nm, an angle ?1 between a slow axis of the first optical film and an absorption axis of the polarizer is 45°±30°, and the image display device is a liquid crystal display device including a blue or ultraviolet LED, a fluorescent body, and a liquid crystal cell, or an organic EL display device, is able to suppress the occurrence of rainbow unevenness without darkening brightness at the time of being observed by mounting polarized sunglasses, and is able to suppress the occurrence of the rainbow unevenness without darkening the brightness at the time of being observed by mounting the polarized sunglasses even in a case where a film which has great optical anisotropy and is stretched in at least a monoaxial direction is further provided on the visible side of the im

Abstract: A display device may include a substrate, a plurality of gate lines and a plurality of data lines, gate wirings and data wirings. The substrate may comprise a display area in which a plurality of pixels for displaying an image are arranged and a non-display area around the display area. The plurality of gate lines and the plurality of data lines in the display area on the substrate, the plurality of gate lines extending in one direction and the plurality of data lines extending in a direction intersecting said one direction. The gate wirings and data wirings in the non-display area on the substrate. At least one of the gate wirings and the data wirings has a hole having an edge in the form of numbers.

Abstract: A thin film transistor (TFT) array substrate includes a plurality of data lines, at least one first common electrode, and at least one resistance reduction structure. The resistance reduction structure is connected to the first common electrodes and located corresponding to one of the data lines.

Abstract: An LCD panel includes a first substrate, a second substrate, a liquid crystal layer between the first substrate and the second substrate, and a plurality of spacers extending from the first substrate to the second substrate. Each spacer is positioned in the liquid crystal layer and has a height less than a thickness of the liquid crystal layer. No electrode for sensing touches is formed on the first substrate. The second substrate has a plurality of first touch sensor electrodes and a plurality of second touch sensor electrodes corresponding to the plurality of spacers. The first touch sensor electrodes and the second touch sensor electrodes cooperatively form a capacitive touch sensing structure. The spacers move towards the second substrate when the LCD panel is being touched.

Abstract: A planar display panel having a displaying effect of a curved screen and a display device. The sub-pixel pitches are sequentially increased in a direction departing from a central axis of the active display region in the display panel, so that the curved displaying effect is achieved by the planar display panel.

Abstract: A display device according to one aspect of the present invention includes a first substrate including a thin film transistor, a second substrate including a common electrode, an organic insulating layer arranged on the first substrate so as to overlap with the thin film transistor, and projecting from the first substrate toward the second substrate, and a conductive light shielding layer covering an upper surface and a side surface of the organic insulating layer, and electrically coupled with the common electrode, wherein the organic insulating layer and the light shielding layer hold a gap between the first substrate and the second substrate.

Abstract: An exemplary embodiment of the present system and method provides a thin film display panel including: an insulation substrate configured to include a red area, a blue area, a green area, and a white area; a gate line and a data line disposed on the insulation substrate; a step compensating member disposed in the white area on the insulation substrate; a red color filter, a green color filter, and a blue color filter respectively disposed at the red area, the blue area, and the green area on the insulation substrate; a planarization layer configured to cover the red color filter, the green color filter, the blue color filter, and the step compensating member; and a plurality of pixel electrodes formed on the planarization layer.

Abstract: A display device is provided. The display device includes an array substrate including a substrate and a first electrode having an opening, wherein the opening has an edge. The array substrate further includes a second electrode disposed over the first electrode and including a first finger portion having a first side and a second side opposite to the first side. The second electrode further includes a connection portion connecting the first finger portion at the edge, wherein the connection portion has a first concavity at the first side and a second concavity at the second side, and a length of the first concavity is greater than a length of the second concavity. The display device further includes an opposite substrate and a display medium.

Abstract: A pixel array includes pixel unit sets each including a substrate having first and second pixel regions, a scan line, first and second data lines extending along a second direction, first and second active devices respectively in the first and second pixel regions, and first and second pixel electrodes respectively located in the first and second pixel regions and electrically connected to the first and second active devices, respectively. The scan line includes a main scan line and first and second branch scan lines (connected to the main scan line) extending along a first direction. The first active device is electrically connected to the first branch scan line and the first data line. The second active device is electrically connected to the second branch scan line and the second data line. At least one of the first and second data lines is overlapped with the first and second pixel electrodes.

Abstract: A liquid crystal display includes: a display panel including first and second substrates opposite to each other, and a liquid crystal layer disposed between the first and second substrates; a reflective polarizer disposed outside the first substrate; and a backlight unit disposed outside the first substrate to provide light to the display panel, where the liquid crystal layer includes liquid crystal molecules and dichroic dye molecules, and the liquid crystal layer has a first arrangement state in which the liquid crystal molecules and the dichroic dye molecules are arranged at random.

Abstract: A first substrate (10) in a liquid crystal display device (100) includes a first electrode (11) provided in each pixel and a second electrode (12) generating a lateral electric field in a liquid crystal layer (30) together with the first electrode. A second substrate (20) includes a third electrode (21) generating a vertical electric field in the liquid crystal layer together with the first electrode and the second electrode. Each pixel exhibits, in a switched manner, a black display state where black display is provided in a state where the vertical electric field is generated in the liquid crystal layer, a white display state where white display is provided in a state where the lateral electric field is generated in the liquid crystal layer, and a transparent display state where a rear side of a liquid crystal display panel (1) is seen through in a state where no voltage is applied to the liquid crystal layer.

Abstract: An electrophoretic light attenuator comprises a cell including a first substrate (90), a second substrate (90) spaced apart from the first substrate, a layer arranged between the substrates and containing an electrophoretic ink (30), and a monolayer of closely packed protrusions (2) projecting into the electrophoretic ink (30) and arranged adjacent a surface of the second substrate. The protrusions (2) have surfaces defining a plurality of depressions between adjacent protrusions. The ink (30) includes charged particles (11) of at least one type, the particles being responsive to an electric field applied to the cell to move between a first extreme light state, in which the particles (11) are maximally spread within the cell so as to lie in the path of light through the cell and thus strongly attenuate light transmitted from one substrate to the opposite substrate, and a second extreme light state, in which the particles (11) are maximally concentrated within the depressions so as to let light be transmitted.

Abstract: The present invention relates to a transmittance-variable film and a method for producing the same, the film comprising: a transparent substrate; a wire electrode formed on the top of the transparent substrate; an insulating layer formed on the top of the wire electrode; a plurality of partition walls positioned on both sides of the wire electrode; a transparent electrode formed on the top of the plurality of partition walls; a cell configured to be surrounded by the plurality of partition walls, the insulating layer and the transparent electrode; and a charged particle fluid contained inside the cell, wherein the insulating layer is formed with a thickness of 0.4 to 1 ?m.

Abstract: A system includes an objective lens, a viewing device, a control circuit, a first filter assembly, a light amplification assembly, and a second filter assembly. The control circuit is configured to transmit control signals for controlling a wavelength range of light filtered by a filter assembly. The first filter assembly is optically coupled to the objective lens, and is configured to receive light via the objective lens and filter the light into a first filtered light of a first wavelength range based on a first control signal received from the control circuit. The light amplification assembly is optically coupled to the first filter assembly, and is configured to receive the first filtered light and amplify the first filtered light into amplified light.

Abstract: A beam expander includes a first lens unit including one of an SLM or a VFL, a second lens unit being optically coupled to the first lens unit and including one of an SLM or a VFL, and a control unit controlling focal lengths of the first and second lens units. A distance between the first and second lens units is invariable. The control unit controls the focal lengths of the first and second lens units such that a light diameter D1 of light input to the first lens unit and a light diameter D2 of light output from the second lens unit are different from each other.

Abstract: A window system for a passenger compartment of a vehicle includes a transparent window having a window treatment, an incident light monitoring subsystem, an incident light management subsystem and a controller. The incident light monitoring subsystem monitors incident light transmitted into the passenger compartment, determines a field of view of a passenger and determines an intensity of the incident light relative to the field of view of the passenger. The incident light management subsystem individually controls a plurality of light projectors to project a light beam that interacts with a subsection of the window treatment to modulate light transparency of one of the subsections of the window based upon the intensity of the incident light in relation to a field of view of the passenger.

Abstract: Provided is an optical modulator including: a relay substrate; a first transmission line that is provided on a flat surface of the relay substrate, and transmits, along the flat surface of the relay substrate, an electrical signal that has been input from an outer side; a second transmission line that is provided in the relay substrate, and transmits the electrical signal in a direction that is not included in the flat surface; a modulation unit that modulates an optical signal by using the electrical signal that is transmitted by the first transmission line and the second transmission line; and a shield that shields a radiation component of the electrical signal that is radiated from a contact of the first transmission line and the second transmission line.

Abstract: Embodiments of a novel control device and associated techniques for controlling a light path length of a resonator to allow resonance in a mode of higher strength are described herein. The control device includes: a drive section that moves at least one reflecting unit in the resonator; and a control section that controls a light path length of the resonator, by causing the drive section to move the at least one reflecting unit so that the laser light that enters into the resonator changes from a state in which the laser light resonates in a first mode of the plurality of modes to a state in which the laser light resonates in a second mode different from the first mode, on the basis of a detection result of a reflected light from the resonator.

Abstract: An optoelectronic component for generating and radiating an electromagnetic signal exhibiting a frequency lying between 30 GHz and 10 THz referred to as a microwave frequency, comprises: a planar guide configured to confine and propagate freely in a plane XY a first and a second optical wave exhibiting an optical frequency difference, referred to as a heterodyne beat, equal to the microwave frequency, a system for injecting the optical waves into the planar guide, a photo-mixer coupled to the planar guide to generate, on the basis of the first optical wave and of the second optical wave, a signal exhibiting the microwave frequency, the photo-mixer having an elongated shape exhibiting along an axis Y a large dimension greater than or equal to half the wavelength of the signal, the injection system configured so that the optical waves overlap in the planar guide and are coupled with the photo-mixer over a length along the axis Y at least equal to half the wavelength of the signal, the photo-mixer thus being abl

Abstract: A light adjusting apparatus includes a substrate, a rotating shaft member made of an axial magnet, a light adjusting section rotatably integrated with the rotating shaft member and an electromagnetic drive source rotating the rotating shaft member using a coil core member made of a coil and a magnetic body, the light adjusting apparatus being configured to adjust light by displacing the light adjusting section to a retracted position and an inserted position, and a rotatable range ?a is set to have a portion overlapping at least one of a range ?n in which a direction of torque acting on the rotating shaft member when no current is flowing through the coil becomes a negative direction and a range ?p in which the direction of torque becomes a positive direction, and a range ?1 where ?a overlaps ?n and a range ?2 where ?a overlaps ?p have different widths.

Abstract: A method capable of performing an automatic focus function upon a specific movable object in a real-time manner, the method being applicable to a photographic apparatus with the automatic focus function, includes: capturing real-time image within a field of view (FOV) of a lens; comparing images of a plurality of image areas of the real-time image with a feature image of the specific movable object to identify an image area corresponding to the feature image of the specific movable object; and, performing automatic focus on the identified image area.

Abstract: An image capturing module including a casing, a camera unit disposed in the casing, a circuit board device connected to the camera unit and disposed in the casing, and a heat dissipation device. The circuit board device includes a circuit board unit disposed at a periphery of the camera unit and including a functional module. The heat dissipation device includes a heat sink attached on a surface of the functional module for dissipating heat from the functional module.

Abstract: A camera supporting base includes a mounting platform with a mounting surface, a lower surface, and a recess area. The mounting surface is raised above and non-coplanar with the lower surface of the mounting platform. The camera supporting base also includes a pliable mass surrounding the mounting platform. The mounting surface of the mounting platform is recessed below a highest contour of the pliable mass.

Abstract: In some implementations a mountable afocal adaptor for a camera includes an attachment plate affixed to the front of a camera housing of a camera and an afocal optical module. The afocal optical module is configured to convert a received optical image to a converted optical image for use by the camera. The afocal adaptor also includes a rotation mechanism with a rotation ring and a wave spring clamp, the rotation ring affixed to the attachment plate and the wave spring clamp affixed to the afocal optical module. The rotation ring and wave spring clamp are mounted relative to each other to rotate around a rotational axis aligned with an axis of an optical path formed between the afocal optical module and the attachment plate and aligned with a view axis of the camera. The rotation mechanism also permits rotation of the camera housing around the rotational axis relative to the afocal optical module.

Abstract: A driving apparatus which is capable of smoothly moving a follower by a cam portion, and realizes the stopper structure of the follower by a small number of components without the size increased. The driving apparatus comprises an up cam gear having an up radial cam and an up thrust cam, and a down cam gear unit having a down radial cam and a down thrust cam. The up cam gear and the down cam gear unit mesh with each other in a vicinity of a region in which a lift amount of the up radial cam with respect to the follower increases. In a vicinity of a position at which the up cam gear and the down cam gear unit mesh with each other, a lift amount of the up thrust cam is larger than a lift amount of the down thrust cam in the thrust direction.

Abstract: A device for projecting an image on a projector module screen, comprising an interchangeable disc including at least one image disposed thereon and a light source for illuminating the at least one image. The device further includes a lens for receiving the at least one image from the interchangeable disc and passing the image to the projector module screen, wherein the projector module screen displays the image and a projector module housing enclosing the interchangeable disc, the light source, and the lens.

Abstract: [Object] To obtain output light with higher quality. [Solution] Provided is a light source device including: at least one light source unit (110) that emits substantially parallel light in a predetermined wavelength band; and a light guide unit (120, 130) that guides the light from the light source unit (110) toward a light collection spot (143). The light from the light source unit (110) is sequentially reflected by a concave mirror (121) and a convex mirror (122) and is guided toward the light collection spot (143) in the light guide unit (120, 130).

Abstract: A wavelength conversion element according to an aspect of the invention includes a wavelength conversion layer having a light incident surface on which excitation light is incident and a light exiting surface that faces away from the light incident surface and a cooler including a support member that supports the wavelength conversion layer and a light transmissive member that has a curved surface that protrudes in the direction opposite the direction in which the excitation light travels, faces the light incident surface of the wavelength conversion layer, and is bonded to the support member via a bonding member. An air layer provided between the light incident surface of the wavelength conversion layer and the light transmissive member, and the air layer is thinner than the bonding member.

Abstract: A wearable electronic device is configured to project an image on a glass. The wearable electronic device include: a glass; a projector configured to output one or more images; a shutter unit positioned in front of the projector to output the images output from the projector toward the glass or in an outward direction; and a control unit configured to control the shutter unit.

Abstract: Lithographic apparatuses suitable for, and methodologies involving, complementary e-beam lithography (CEBL) are described. In an example, a blanker aperture array (BAA) for an e-beam tool is described. The BAA includes three distinct aperture arrays of different pitch.

Abstract: The present disclosure provides a mask plate, a mask exposure device and a mask exposure method, belongs to the field of display technology. The mask plate includes a tray with at least one mask locating slot, and a mask is arranged in each mask locating slot. By the mask plate, the mask exposure device and the mask exposure method provided by the present disclosure, an effective mask with a closed-loop shaped opening may be provided, thereby improving a quality of a film formed on a substrate.

Abstract: A method of removing particles from a surface of a reticle is disclosed. The reticle is placed in a carrier, a source gas is flowed into the carrier, and a plasma is generated within the carrier. Particles are then removed from a surface of the reticle using the generated plasma. A system of removing particles from a surface includes a carrier configured to house a reticle, a reticle stocker including the carrier, a power supply configured to apply a potential between an inner cover and an inner baseplate of the carrier, and a gas source configured to flow a gas into the carrier. A plasma may be generated within the carrier, and particles can be removed from a surface of the reticle using the generated plasma. An acoustic energy source configured to agitate at least one of the source gas and the generated plasma may be provided to facilitate particle removal using an agitated plasma.

Abstract: A method of manufacturing a reflective mask blank comprising a multilayer reflective film formed on a substrate so as to reflect EUV light; and a laminated film formed on the multilayer reflective film. The method includes the steps of depositing the multilayer reflective film on the substrate to form a multilayer reflective film formed substrate; carrying out defect inspection for the multilayer reflective film formed substrate; depositing the laminated film on the multilayer reflective film of the multilayer reflective film formed substrate; forming a fiducial mark for an upper portion of the laminated film to thereby form a reflective mask blank comprising the fiducial mark, the fiducial mark serving as a reference for a defect position in defect information; and carrying out defect inspection of the reflective mask blank by using the fiducial mark as a reference.

Abstract: The present invention provides an imprint apparatus which forms a pattern on a substrate, the apparatus including a supply unit including a discharge outlet which discharges the imprint material and configured to supply the imprint material onto the substrate via the discharge outlet, and a generation unit configured to generate ions by irradiating, with soft X-rays, a second space away from a first space between the mold and the substrate, wherein the discharge outlet and the generation unit are arranged to sandwich a side face of the mold, and a charge is removed in the first space by supplying the ions generated in the second space to the first space.

Abstract: A negative photosensitive resin composition comprising an alkali-soluble resin or alkali-soluble monomer which has a photo-curability, a photopolymerization initiator, and an ink repellent agent which has a fluorine atom content of from 1 to 45 mass % and which is a partially hydrolyzed condensate of a hydrolyzable silane compound mixture containing a hydrolyzable silane compound having a hydrolyzable group and an organic group having a polyfluoroalkyl group which has an etheric oxygen atom; a cured resin film and partition walls formed by using the negative photosensitive resin composition; and an optical element having the partition walls located between a plurality of dots and their adjacent dots on a substrate surface.

Abstract: A photosensitive resin composition for forming an interlayer insulating film, which contains an alkali-soluble resin (A), a photosensitizer (B), a thermal acid generator (T) which generates an acid when heated, and a silane coupling agent (C), and wherein the alkali-soluble resin (A) has a constituent unit (A1) represented by general formula (a-1) or an alicyclic epoxy group-containing unit (A3). In general formula (a-1), R represents a hydrogen atom or a methyl group; and Ra01 represents a hydrogen atom or an organic group having a hydroxyl group.

Abstract: An additive for a resist underlayer film-forming composition containing a copolymer having structural units of Formulae (1) to (4), and a resist underlayer film-forming composition containing the additive: (where each R1 is independently a hydrogen atom or methyl group, Ar is arylene group, Pr is a protecting group or a hydrogen atom, X is a direct bond or a —C(?O)O—R2— group, R2 constituting the —C(?O)O—R2— group is a C1-3 alkylene group, the alkylene group is bonded to a sulfur atom, R3 is a hydrogen atom, methyl group, methoxy group, or halogeno group, R4 is a C1-3 alkyl group in which at least one hydrogen atom is substituted with a fluoro group, and Z is an organic group having 4 to 7-membered ring lactone skeleton, adamantane skeleton, or norbornane skeleton).

Abstract: An illumination intensity correction device serves for predefining an illumination intensity over an illumination field of a lithographic projection exposure apparatus. The correction device has a plurality of bar-shaped individual stops arranged alongside one another and having bar axes arranged parallel to one another, which are arranged in a manner lined up alongside one another transversely with respect to the bar axes. The individual stops are displaceable into a predefined intensity correction displacement position at least along their respective bar axis with the aid of a displacement drive individually for the purpose of predefining an intensity correction of an illumination of the illumination field.

Abstract: Disclosed are techniques for correcting the EUV crosstalk effects. Isolated mask feature component diffraction signals associated with individual layout feature components are determined based on a component-based mask diffraction modeling method such as a domain decomposition method. Mask feature component diffraction signals are then determined based on the isolated mask feature component diffraction signals, layout data and predetermined crosstalk signals. Here, the predetermined crosstalk signals are derived based on mask feature component diffraction signals computed using an electromagnetic field solver and the component-based mask diffraction modeling method, respectively. The mask feature component diffraction signals are then used to process layout designs.

Abstract: Metrology apparatus and methods are disclosed. In one arrangement, a metrology apparatus comprises an optical system that illuminates a structure with measurement radiation and detects the measurement radiation scattered by the structure. The optical system comprises an array of lenses that focuses the scattered measurement radiation onto a sensor. A dispersive element directs scattered measurement radiation in each of a plurality of non-overlapping wavelength bands exclusively onto a different respective lens of the array of lenses.

Abstract: Provided is a holding device for vacuum-attracting and holding a substrate, the device comprising: an attracting unit configured to have attraction mechanisms; and a control unit configured to control the attracting unit, wherein the control unit is configured: to acquire a sequence for attracting the substrate and reference data for determining whether the substrate has been successfully attracted, from time-dependent variation in pressure in an attraction mechanism in a case where the substrate is held by the attraction mechanisms; to control the attracting unit to hold a first substrate based on the sequence and to acquire measurement data that indicates time-dependent variation in pressure in the attraction mechanism in a case where the first substrate is held; and to compare the reference data and the measurement data, and to control the attracting unit to hold a second substrate based on the sequence if a comparison result satisfies a predetermined condition.

Abstract: A device manufacturing method develops a substrate that has been exposed with illumination light via a projection optical system. The exposing includes holding the substrate with a stage below the projection optical system; in an encoder system in which one of a grating section and a head is provided at the stage and the other of the grating section and the head is provided at a frame member to be disposed above the stage, on a lower end side of the projection optical system, and which irradiates the grating section with a measurement beam via the head, measuring positional information of the stage with a plurality of the heads that face the grating section; moving the stage based on the positional information measured with the encoder system while compensating for a measurement error of the encoder system related to a measurement direction of the positional information by the heads.