Abstract: A method of providing a layout design of an SRAM cell includes: providing a substrate layout comprising a first oxide diffusion area, a second oxide diffusion area, a first polysilicon layout, and a second polysilicon layout, wherein the first polysilicon layout extends across the first oxide diffusion area and the second oxide diffusion area, and the second polysilicon layout extends across the first oxide diffusion area and the second oxide diffusion area; forming a first pull-up transistor on the first oxide diffusion area and the first polysilicon layout; forming a first pull-down transistor on the second oxide diffusion area and the first polysilicon layout; forming a second pull-up transistor on the first oxide diffusion area and the second polysilicon layout; and forming a second pull-down transistor on the second oxide diffusion area and second first polysilicon layout.

Abstract: A memory circuit includes a first memory cell and a second memory adjacent to the first memory cell. The first memory cell includes a first word line strapping line segment electrically coupled with a pass device of the first memory cell; and a second word line strapping line segment. The second memory cell includes a first word line strapping line segment; and a second word line strapping line segment electrically coupled with a pass device of the second memory cell. The first word line strapping line segment of the first memory cell and the first word line strapping line segment of the second memory cell are connected with each other at a first interconnection layer. The second word line strapping line segment of the first memory cell and the second word line strapping line segment of the second memory cell are connected with each other at the first interconnection layer.

Abstract: A semiconductor device includes a semiconductor die. A transient voltage suppression (TVS) structure is formed in the semiconductor die. A capacitor is formed over the semiconductor die. In one embodiment, the capacitor is formed by depositing a first conductive layer over the semiconductor die, depositing an insulating layer over the first conductive layer, and depositing a second conductive layer over the semiconductor die. In another embodiment, the capacitor is formed by forming a trench in the semiconductor die, depositing an insulating material in the trench, and depositing a conductive material in the trench.

Abstract: An IC structure includes a substrate, a deep n-well (DNW), a first device, a second device, a first electrical path and a second electrical path. The DNW is in the substrate. The first device is formed inside the DNW and connected to a first lower reference voltage and a first higher reference voltage. The second device is formed in the substrate and outside the DNW, and connected to a second lower reference voltage and a second higher reference voltage. The first electrical path is electrically connected between the first device and the second device. The second electrical path is electrically connected between the first lower reference voltage and the second lower reference voltage. A second metal layer that includes the second electrical path is located in an area outside of an area above a first metal layer in which the first electrical path is located.

Abstract: An Electro-Static-Discharge (ESD) protection device has a Fin Field-Effect Transistor (FinFET) with a silicon fin with a step separating a top fin and a bottom fin. The gate wraps around the top fin but not the bottom fin. Normal gate-controlled channel conduction occurs in the top fin between a source and a drain in the top fin. Underneath the conducting channel is a buried conducting region in the bottom fin that conducts after a breakdown voltage is reached during ESD. A ledge, abrupt slope change in the sidewalls of the fin, or a doping increase occurs at the step between the top fin and bottom fin. The bottom fin is 2-3 times wider than the top fin, causing the resistance of the buried conducting region to be 2-3 times less than the resistance of the conducting channel, steering breakdown current away from the channel, reducing failures during breakdown.

Abstract: An electrostatic discharge (ESD) protection circuit includes an input terminal, a transistor, and an output terminal. The input terminal is configured to receive an input signal. The transistor includes a first source/drain region, a second source/drain region, and a drift region that has a resistance in series between the first and second source/drain regions and that is configured to attenuate an ESD voltage in the input signal. The output terminal is connected to the second source/drain region.

Abstract: An array substrate and a display device are provided. The array substrate includes a display region and a peripheral region surrounding the display region. Gate lines and data lines crossing the gate lines are arranged at the display region. A static charge shielding unit is arranged at the peripheral region. The array substrate further includes a static charge releasing line connected to the static charge shielding unit, and the static charge shielding unit is configured to release static charges at the peripheral region through the static charge releasing line.

Abstract: A semiconductor device can include a front-end-of-line region at least a portion of which is disposed on a substrate, where the front-end-of-line region can include an electrostatic discharge protection circuit and an integrated circuit electrically connected to the electrostatic discharge protection circuit. A back-end-of-line region can be on the front-end-of-line region and an electrostatic discharge protection pattern can be on a scribe region of the substrate. The electrostatic discharge protection pattern can include a lower pattern extending horizontally and a side cross-sectional surface defined by a height and a width of the lower pattern, where the side cross-sectional surface can be exposed through a side surface of the back-end-of-line region. A via can be electrically connected to the lower pattern and extend perpendicularly to the substrate and an upper pattern can be electrically connected to the via.

Abstract: A BCD semiconductor device includes devices integrated on a single chip. The devices include a first high voltage nLIGBT device, a second high voltage nLIGBT device, a first high voltage nLDMOS device, a second high voltage nLDMOS device, a third high voltage nLDMOS device, a first high voltage pLDMOS device and low voltage NMOS, PMOS and PNP devices, and a diode device. A dielectric isolation is applied to the high voltage nLIGBT, nLDMOS and pLDMOS devices to realize a complete isolation between the high and low voltage devices. The nLIGBT, nLDMOS, NPN and low voltage NMOS and PMOS are integrated on the substrate of a single chip. The isolation region composed of the dielectric, the second conductivity type buried layer, the dielectric trench, and the first conductivity type implanted region realizes full dielectric isolation of high and low voltage devices. The six types of high voltage transistors have multiple channels.

Abstract: A transistor includes a first doping well, a second doping well, a first doping area, a second doping area, a gate layer, and at least one compensation capacitor. The first doping well and the second doping well are formed in a structure layer. The first doping area and the second doping area are formed in the first doping well and have a first conductivity type, the second doping well has a second conductivity type, and the first doping area is used for transmitting the signal. The at least one compensation capacitor is used for adjusting a voltage drop of a parasitic junction capacitor between the first doping area and the first doping well, a voltage drop of a parasitic junction capacitor between the first doping well and the second doping well, or a voltage drop of a parasitic junction capacitor between the second doping well and the structure layer.

Abstract: A resistor for an integrated circuit (IC), an IC and a related method are disclosed. The resistor may include a metal alloy resistor body positioned within a single diffusion break (SDB). The SDB provides an isolation region in a semiconductor fin between a pair of fin-type field effect transistors (finFETs). The resistor in the SDB allows for the resistor to be built at front-end-of-line (FEOL) layers, which saves on space and expense, and allows for precise dimensions for the resistor.

Abstract: The present disclosure relates to an integrated circuit (IC) and a method of formation. In some embodiments, a first transistor gate stack is disposed in a low voltage region defined on a substrate. The first transistor gate stack comprises a first gate electrode and a first gate dielectric separating the first gate electrode from the substrate. A third transistor gate stack is disposed in a high voltage region defined on the substrate. The third transistor gate stack comprises a third gate electrode and a third gate dielectric separating the third gate electrode from the substrate. The third gate dielectric comprises an oxide component and a first interlayer dielectric layer.

Abstract: Embodiments of the disclosure provide a semiconductor device including a substrate, an insulating layer formed over the substrate, a plurality of fins formed vertically from a surface of the substrate, the fins extending through the insulating layer and above a top surface of the insulating layer, a gate structure formed over a portion of fins and over the top surface of the insulating layer, a source/drain structure disposed adjacent to opposing sides of the gate structure, the source/drain structure contacting the fin, a dielectric layer formed over the insulating layer, a first contact trench extending a first depth through the dielectric layer to expose the source/drain structure, the first contact trench containing an electrical conductive material, and a second contact trench extending a second depth into the dielectric layer, the second contact trench containing the electrical conductive material, and the second depth is greater than the first depth.

Abstract: A semiconductor device includes at least one semiconductor fin, a gate electrode, at least one gate spacer, and a gate dielectric. The semiconductor fin includes at least one recessed portion and at least one channel portion. The gate electrode is present on at least the channel portion of the semiconductor fin. The gate spacer is present on at least one sidewall of the gate electrode. The gate dielectric is present at least between the channel portion of the semiconductor fin and the gate electrode. The gate dielectric extends farther than at least one end surface of the channel portion of the semiconductor fin.

Abstract: An integrated circuit includes first and second semiconductor fins, first and second epitaxy structures, and first and second dielectric fin sidewall structures. The first and second epitaxy structures are respectively on the first and second semiconductor fins. The first epitaxy structure and the second epitaxy structure are merged together. The first and second dielectric fin sidewall structures are respectively on opposite first and second sidewalls of the first epitaxy structure. The first sidewall of the first epitaxy structure faces the second epitaxy structure. The first dielectric fin sidewall structure is shorter than the second dielectric fin sidewall structure.

Abstract: An embodiment complimentary metal-oxide-semiconductor (CMOS) device and an embodiment method of forming the same are provided. The embodiment CMOS device includes an n-type metal-oxide-semiconductor (NMOS) having a titanium-containing layer interposed between a first metal contact and an NMOS source and a second metal contact and an NMOS drain and a p-type metal-oxide-semiconductor (PMOS) having a PMOS source and a PMOS drain, the PMOS source having a first titanium-containing region facing a third metal contact, the PMOS drain including a second titanium-containing region facing a fourth metal contact.

Abstract: A semiconductor device includes a semiconductor substrate and at least one gate stack. The gate stack is present on the semiconductor substrate, and the gate stack includes at least one work function conductor and a filling conductor. The work function conductor has a recess therein. The filling conductor includes a plug portion and a cap portion. The plug portion is present in the recess of the work function conductor. The cap portion caps the work function conductor.

Abstract: In an embodiment, a method includes: forming a gate dielectric layer on an interface layer; forming a doping layer on the gate dielectric layer, the doping layer including a dipole-inducing element; annealing the doping layer to drive the dipole-inducing element through the gate dielectric layer to a first side of the gate dielectric layer adjacent the interface layer; removing the doping layer; forming a sacrificial layer on the gate dielectric layer, a material of the sacrificial layer reacting with residual dipole-inducing elements at a second side of the gate dielectric layer adjacent the sacrificial layer; removing the sacrificial layer; forming a capping layer on the gate dielectric layer; and forming a gate electrode layer on the capping layer.

Abstract: An object is to provide a semiconductor device with a novel structure. The semiconductor device includes a first wiring; a second wiring; a third wiring; a fourth wiring; a first transistor having a first gate electrode, a first source electrode, and a first drain electrode; and a second transistor having a second gate electrode, a second source electrode, and a second drain electrode. The first transistor is provided in a substrate including a semiconductor material. The second transistor includes an oxide semiconductor layer.

Abstract: A manufacturing method of a semiconductor memory device includes the following steps. A gate structure is formed on a semiconductor substrate. The gate structure includes a floating gate electrode, a control gate electrode, a first oxide layer, and a second oxide layer. The control gate electrode is disposed on the floating gate electrode. The first oxide layer is disposed between the floating gate electrode and the semiconductor substrate. The second oxide layer is disposed between the floating gate electrode and the control gate electrode. An oxide spacer layer is conformally on the gate structure and the semiconductor substrate. A nitride spacer is formed on the oxide spacer layer and on a sidewall of the gate structure. An oxidation process is performed after the step of forming the nitride spacer. A thickness of an edge portion of the first oxide layer is increased by the oxidation process.

Abstract: A semiconductor memory device according to an example embodiment of the present inventive concept may include: a plurality of lower electrodes located on a substrate and spaced apart from one another; and an etch stop pattern located on the substrate and surrounding at least a part of each of the plurality of lower electrodes, in which the etch stop pattern includes: a first etch stop pattern including carbon; and a second etch stop pattern located on the first etch stop pattern and including a material different from a material of the first etch stop pattern.

Abstract: In a region just below an access gate electrode in an SRAM memory cell, a second halo region is formed adjacent to a source-drain region and a first halo region is formed adjacent to a first source-drain region. In a region just below a drive gate electrode, a third halo region is formed adjacent to the third source-drain region and a fourth halo region is formed adjacent to a fourth source-drain region. The second halo region is set to have an impurity concentration higher than the impurity concentration of the first halo region. The third halo region is set to have an impurity concentration higher than the impurity concentration of the fourth halo region. The impurity concentration of the first halo region and the impurity concentration of the fourth halo region are different from each other.

Abstract: Source and drain formation techniques are disclosed herein for fin-like field effect transistors (FinFETs). An exemplary method for forming epitaxial source/drain features for a FinFET includes epitaxially growing a semiconductor material on a plurality of fins using a silicon-containing precursor and a chlorine-containing precursor. The semiconductor material merges to form an epitaxial feature spanning the plurality of fins, where the plurality of fins has a fin spacing that is less than about 25 nm. A ratio of a flow rate of the silicon-containing precursor to a flow rate of the chlorine-containing precursor is less than about 5. The method further includes etching back the semiconductor material using the chlorine-containing precursor, thereby modifying a profile of the epitaxial feature. The epitaxially growing and the etching back may be performed only once. In some implementations, where the FinFET is an n-type FinFET, the epitaxially growing also uses a phosphorous-containing precursor.

Abstract: A nonvolatile memory embedded in an advanced logic circuit and a method forming the same are provided. In the nonvolatile memory, the word lines and erase gates have top surfaces lower than the top surfaces of the control gate. In addition, the word lines and the erase gates are surrounded by dielectric material before a self-aligned silicidation process is performed. Therefore, no metal silicide can be formed on the word lines and the erase gate to produce problems of short circuit and current leakage in a later chemical mechanical polishing process.

Abstract: According to one embodiment, a semiconductor device includes a stacked body, first, second, third, and fourth insulating bodies, first and second columnar portions. The stacked body includes a conductive layer and an insulating layer stacked alternately. The first, second, third and fourth insulating bodies, the first and second columnar portions are provided inside the stacked body. The second insulating body is at a position different from the first insulating body. The third insulating body is between the first and second insulating bodies. The fourth insulating body is between the first and second insulating bodies, and includes portions contacting the third insulating body and being separated from each other with the third insulating body interposed. The first columnar portion is between the first and fourth insulating bodies. The second columnar portion is between the second and fourth insulating bodies. The first and second columnar portions include a semiconductor layer.

Abstract: A memory device and a method for fabricating the same are provided. The memory device includes a semiconductor substrate, well regions, logic transistors, a high-voltage transistor, and a storage transistor. The well regions are disposed in the semiconductor substrate and include logic well regions, a high-voltage well region, and a memory well region. The logic transistors are disposed on the logic well regions. Each the logic transistors includes a high-k metal gate structure. The storage transistor is disposed on the memory well region, and includes a charge storage structure and a high-k metal gate structure. In the method for fabricating the memory device, a high-k first process or high-k last process is used for the formation of the high-k metal gate structures of the memory device. Because all the logic transistors and the storage transistor are formed with the high-k metal gate structure, a number of masks is decreased.

Abstract: A method for forming a semiconductor memory device structure includes forming a select gate structure and a dielectric layer, forming a charge trapping layer along a sidewall of a lower portion of the select gate structure and a sidewall of the dielectric layer, and forming a memory gate structure over the charge trapping layer. The select gate structure and the memory gate structure contact opposing sidewalls of the charge trapping layer. The dielectric layer is interposed between the charge trapping layer and the select gate structure.

Abstract: Various embodiments of the present application are directed to an integrated circuit (IC) comprising a memory cell with a large operation window and a high erase speed. In some embodiments, the IC comprises a semiconductor substrate and a memory cell. The memory cell comprises a control gate electrode, a select gate electrode, a charge trapping layer, and a common source/drain region. The common source/drain is defined by the semiconductor substrate and is n-type. The control gate electrode and the select gate electrode overlie the semiconductor substrate and are respectively on opposite sides of the common source/drain. Further, the control gate electrode overlies the charge trapping layer and comprises a metal with a p-type work function. In some embodiments, the select gate electrode comprises a metal with an n-type work function.

Abstract: A 3D memory device comprises: a substrate; a plurality of U-shaped memory cells strings each including a first, bit line-side string portion or pillar, a second, source line-side string portion or pillar and a buried string portion formed in the substrate and connected to a first end of the first string portion and to a first end of the second string portion, the U-shaped memory cells strings including stacks of memory cells along the first and second string portions. Bit line selectors are arranged at a second end of the first string portions opposed to the first end, for the selective connection to respective bit lines; source line selectors are arranged at a second end of the second string portions opposed to the first end, for the selective connection to respective source lines.

Abstract: Some embodiments include a memory device and methods of forming the memory device. One such memory device includes a first group of memory cells, each of the memory cells of the first group being formed in a cavity of a first control gate located in one device level of the memory device. The memory device also includes a second group of memory cells, each of the memory cells of the second group being formed in a cavity of a second control gate located in another device level of the memory device. Additional apparatus and methods are described.

Abstract: A semiconductor device includes a base body portion, a stacked body, a pedestal portion, a plate portion, and first and second columnar portions. The base body portion includes a doped semiconductor film and a semiconductor portion. The doped semiconductor film includes first and second portions. The semiconductor portion includes a first region overlapping the first portion, and a second region overlapping the second portion and being a body different from the first region. The pedestal portion is provided in the second region. The plate portion contacts the pedestal portion and the first region. The first columnar portion includes a semiconductor layer. The semiconductor layer is adjacent to the plate portion with the stacked body interposed, and contacts the first region. The second columnar portion is adjacent to the plate portion with the stacked body interposed, and is adjacent to the pedestal portion with the second region interposed.

Abstract: A three-dimensional (3D) memory device having a plurality of vertical channel structures includes a first memory block, a second memory block, and a bit line. The first memory block includes first vertical channel structures extending in a vertical direction with respect to a surface of a substrate. The second memory block includes second vertical channel structures on the first vertical channel structures in the vertical direction and first and second string selection lines extending in a first horizontal direction and offset in the vertical direction. The bit line extends in the first horizontal direction between the first and second memory blocks and is shared by the first and second memory blocks. The second memory block may include first and second string selection transistors which are each connected to the bit line and the first string selection line and have different threshold voltages from each other.

Abstract: In an embodiment, the semiconductor device may include interlayer insulating layers, conductive patterns, a channel layer, cell blocking insulating layers, dummy blocking insulating layers, and a data storage layer. The interlayer insulating layers and conductive patterns may be alternately stacked. The channel layer may pass through the interlayer insulating layers and the conductive patterns. The cell blocking insulating layers may be respectively arranged between the channel layer and the conductive patterns. The dummy blocking insulating layers may be respectively arranged between the channel layer and the interlayer insulating layers, and may protrude further toward a side wall of the channel layer than the cell blocking insulating layers. The data storage layer may surround the side wall of the channel layer, and may be formed on a concavo-convex structure defined by the cell blocking insulating layers and the dummy blocking insulating layers.

Abstract: An apparatus comprises field-effect transistor (FET) structures stacked horizontally and vertically in a three-dimensional memory array architecture, gates extending vertically and spaced horizontally between the plurality of FET structures, and a ferroelectric material separating the FET structures and the gates. Individual ferroelectric FETs (FeFETs) are formed at intersections of the FET structures, the gates, and the ferroelectric material. Another apparatus comprises a plurality of bit lines and word lines. Each bit line has at least two sides that are coupled with a ferroelectric material such that each bit line is shared by neighboring gates to form a plurality of FeFETs. A method of operating a memory array comprises applying a combination of voltages to a plurality of word lines and digit lines for a desired operation for a plurality of FeFET memory cells, at least one digit line having the plurality of FeFET memory cells accessible by neighboring gates.

Abstract: An integrated circuit (IC) power distribution network is disclosed. In one aspect, the IC includes a stack of layers formed on a substrate. The IC includes standard cells with parallel gate structures oriented in a direction y. Each cell includes an internal power pin for supplying a reference voltage to the cell. The stack includes metal layers in which lines are formed to route signals between cells. The lines in each metal layer have a preferred orientation that is orthogonal to that of the lines in an adjacent metal layer. A first layer is the lowest metal layer that has y as a preferred orientation while also providing routing resources for signal routing between the cells. A second layer is the nearest metal layer above this first layer. The IC includes a power distribution network for delivering the reference voltage to the power pin.

Abstract: On a semiconductor substrate having an SOI region and a bulk silicon region formed on its upper surface, epitaxial layers are formed in source and drain regions of a MOSFET formed in the SOI region, and no epitaxial layer is formed in source and drain regions of a MOSFET formed in the bulk silicon region. By covering the end portions of the epitaxial layers with silicon nitride films, even when diffusion layers are formed by implanting ions from above the epitaxial layers, it is possible to prevent the impurity ions from being implanted down to a lower surface of a silicon layer.

Abstract: A semiconductor device includes a substrate, a pair of transistor devices and an isolation region. The pair of transistor devices are disposed over the substrate. Each of the pair of the transistor devices includes a channel, a gate electrode over the channel, and a source/drain region alongside the gate electrode. The isolation region is disposed between the source/drain regions of the pair of the transistor devices. The isolation region has a first doping type opposite to a second doping type of the source/drain regions.

Abstract: An object is to provide a semiconductor device using an oxide semiconductor having stable electric characteristics and high reliability. A transistor including the oxide semiconductor film in which a top surface portion of the oxide semiconductor film is provided with a metal oxide film containing a constituent similar to that of the oxide semiconductor film and functioning as a channel protective film is provided. In addition, the oxide semiconductor film used for an active layer of the transistor is an oxide semiconductor film highly purified to be electrically i-type (intrinsic) by heat treatment in which impurities such as hydrogen, moisture, a hydroxyl group, or a hydride are removed from the oxide semiconductor and oxygen which is a major constituent of the oxide semiconductor and is reduced concurrently with a step of removing impurities is supplied.

Abstract: The present disclosure provides an array substrate, a display device and a wearable device. The array substrate includes a plurality of pixel units. Each of the pixel units includes a pixel electrode and a thin film transistor connected to the pixel electrodes, the plurality of pixel units forms a display region, and the thin film transistor of the pixel unit at an edge of the display region is closer to the edge of the display region than the pixel electrode thereof.

Abstract: The present disclose provides in some embodiments an array substrate and a method for fabricating the same, and a display device. The array substrate includes a source-drain metal layer formed on a base substrate and including copper, an alloy layer formed on the source-drain metal layer and including copper alloy, non-copper metal in the copper alloy being easier to be oxidized than copper in the copper alloy, a passivation layer formed on the alloy layer, and an oxide layer formed between the alloy layer and the passivation layer.

Abstract: An array substrate and a display are provided. The array substrate includes a plurality of sub-pixel regions arranged in rows and columns. The sub-pixel region includes a pixel aperture region. A conductive pattern is provided between two adjacent sub-pixel regions in a row direction, at least part of the conductive pattern being located between pixel aperture regions of the two adjacent sub-pixel regions in the row direction, and the conductive pattern being connected to a common voltage.

Abstract: A method of producing a semiconductor device according to an embodiment of the present invention includes: step (C) of forming an oxide semiconductor layer of a plurality of thin film transistors on a gate dielectric layer; step (F) of forming an aperture in an interlevel dielectric layer, the aperture being located between an active region and a plurality of terminal portions and extending through the interlevel dielectric layer; and step (G) of, after step (F), forming an upper conductive portion on the interlevel dielectric layer. In step (C), a protection layer made of the same oxide semiconductor film as the oxide semiconductor layer is formed above a region of the gate dielectric layer that is located between the active region and the plurality of terminal portions. In step (F), the aperture is formed so as to overlap the protection layer.

Abstract: An array substrate and a manufacturing method thereof and a display device are provided. The manufacturing method includes: forming a first signal line and a second signal line which have a same extension direction and are separated from each other on a base substrate; forming an initial pixel electrode on the base substrate, such that the initial pixel electrode includes a first extension portion, and the initial pixel electrode is connected to the first signal line by the first extension portion and the initial pixel electrode is separated from the second signal line; and removing at least part of the first extension portion of the initial pixel electrode to form the pixel electrode separated from the first signal line.

Abstract: A TFT array substrate, its manufacturing method and a corresponding display device are disclosed. The TFT array substrate, includes a bearing substrate, a gate line and a data line arranged across each other on the bearing substrate, a pixel region defined by the gate line and the data line, and a thin film transistor, a pixel electrode and an active layer disposed in the pixel region. Specifically, a gate of the thin film transistor is connected to the gate line, a source thereof is connected to the data line and a drain thereof is connected to the pixel electrode. Further, an insulating layer is also formed above the source of the thin film transistor, and a drain trench is formed in the insulating layer. In addition, the drain of the thin film transistor is in the drain trench and is connected to the source through the active layer.

Abstract: The present disclosure provides an array substrate and a method of manufacturing the same and a display apparatus in which the array substrate is applied. In one embodiment, the method of manufacturing an array substrate at least includes the steps of: forming a first electrode layer, a metal gate layer and a first layer of non-oxide insulation material, the first layer of non-oxide insulation material being formed on an upper surface of the metal gate layer; forming, by using one patterning process, a pattern including a first electrode and a gate such that, after completion of the patterning process, a first non-oxide insulation layer is further formed on the gate and a first sub-electrode belonging to the first electrode layer is further formed below the gate. This method of manufacturing the array substrate is simple, which facilitates mass production of the array substrate as well as the display apparatus.

Abstract: The present disclosure provides a method for manufacturing a TFT substrate and a method for manufacturing a TFT display apparatus, including the steps of: providing a base substrate; forming a source/drain metal layer on the base substrate; depositing a photoresist layer on the source/drain metal layer and patterning the photoresist layer to form a desired pattern of the photoresist layer; using a BCl3 gas to remove metal oxides generated on surface of the source/drain metal layer with air; and using a mixing gas including a Cl2 gas and the BCl3 gas to etch the source/drain metal layer.

Abstract: The present technology relates to a solid-state imaging device and a driving method thereof, and an electronic apparatus that make it possible to improve the precision of phase difference detection while suppressing deterioration of resolution in a solid-state imaging device having a global shutter function and a phase difference AF function. Provided is a solid-state imaging device including: a pixel array unit including, as pixels including an on-chip lens, a photoelectric conversion unit, and a charge accumulation unit, imaging pixels for generating a captured image and phase difference detection pixels for performing phase difference detection arrayed therein; and a driving control unit configured to control driving of the pixels. The imaging pixel is formed with the charge accumulation unit shielded from light.

Abstract: An image sensor may include an array of pixels having a color filter layer. The color filter layer may include colored elements and clear elements. The clear elements may be formed from transparent dielectric material. The color filter layer may include a grid of light-blocking material that forms color filter container structures having an array of openings in which the colored elements and the clear elements are formed. The color filter container structures may be formed from the same transparent dielectric material that forms the clear elements. The color filter container structures may be formed from opaque materials or transparent materials that form structures such as planarization layers, microlenses, or antireflection coatings for the array of pixels. The material used to form the color filter container structures may have a refractive index that is sufficiently high to prevent light from passing between adjacent elements in the color filter layer.

Abstract: A BSI image sensor includes a substrate including a front side and a back side opposite to the front side, a plurality of pixel sensors arranged in an array, an isolation grid disposed in the substrate and separating the plurality of pixel sensors from each other, and a reflective grid disposed over the isolation grid on the back side of the substrate. A depth of the reflective grid is less than a depth of the isolation grid.

Abstract: The present disclosure, in some embodiments, relates to a method of forming an image sensor. The method includes implanting a dopant into a substrate to form a doped region and implanting one or more additional dopants into the substrate to form an image sensing element between the doped region and a front-side of the substrate. The doped region directly contacts a boundary of the image sensing element that is furthest from the front-side of the substrate. The method further includes etching the substrate to form one or more trenches extending into a back-side of the substrate. The back-side of the substrate opposes the front-side of the substrate. The method further includes filling the one or more trenches with one or more dielectric materials to form isolation structures.