Abstract: Provided herein is technology relating to weather sensors and particularly, but not exclusively, to devices, methods, and systems related to collecting weather data by measuring bending and compression stresses in a weather sensor device.

Abstract: According to one aspect of the present invention, there is provided an oil pressure sensor attachment structure including: the oil path body; the sensor case; and a fixing member which fixes the sensor case to the oil path body. The sensor case has a columnar portion which is disposed along a central axis extending in an up and down direction, and a flange portion which protrudes from the columnar portion to an outside in a radial direction. The fixing member has a fixing portion which comes into contact with the oil path body and is fixed thereto, and a pressing portion which comes into contact with the upper surface of the flange portion and presses the flanges portion against the oil path body. The fixing portion and the pressing portion are disposed with an interval therebetween.

Abstract: Aspects of the disclosure provide a capacitive pressure sensor. The capacitive pressure sensor can include a first substrate having a first surface and a second surface, a movable plate at a bottom of a first cavity recessed into the substrate from the first surface, and a second substrate bonded to the first substrate over the first surface. A second cavity is formed between the movable plate and the second surface. The second substrate includes a fixed plate disposed over the movable plate to form a capacitor. The second substrate further includes a third cavity between a surface of the fixed plate opposite to the movable plate and a surface of the second substrate opposite to the first substrate.

Abstract: Provided are a pressure sensor device and a method of manufacturing the same. The pressure sensor device includes a housing including an air inlet and a fluid inlet provided in different directions, a substrate provided in an inner space of the housing and including a through-hole through which the air passes, and a pressure sensor chip mounted on the substrate to cover the through-hole in such a manner that a pressure of a fluid flowing in from the fluid inlet is applied to a top surface thereof and a bottom surface thereof is exposed to the air through the through-hole, in order to measure the pressure of the fluid relative to a pressure of the air, wherein the inner space is divided into an upper region and a lower region with respect to the substrate, and wherein the upper region is divided into a first inner region in which the pressure sensor chip is provided and a second inner region through which the air passes.

Abstract: The present disclosure is drawn to methods and systems for determining a seismic response of a man-made structure to a given input earthquake. Sensors are used to obtain vibration data for data collection locations from one or more floors of the man-made structure, which may be ambient vibration data or vibration data resulting from forced vibration or shock testing. The vibration data is used to determine modal characteristics for the man-made structure, including mode shapes, natural frequencies, and damping ratios. The mass, centre-of-mass, and moment of inertia is also determined for the floors of the man-made structure. The modal characteristics are then translated from the data collection locations to the centre-of-mass based on the structure of the floors. Then, a seismic response of the man-made structure to an input earthquake is determined using the translated modal characteristics and the mass and moment of inertia of the floors.

Abstract: A wake generator for placement in a wind tunnel between a wind source and a test object includes a first frame member having a first track formed thereon, where the first track has a shape including a first side that is substantially rounded and a second side that is substantially flat. The wake generator may include a mounting plate disposed within a perimeter of the first track, where the mounting plate is rotatable relative to the first frame member about a first axis. The wake generator may allow for better simulation of unsteady turbine wakes that influence cooling flow. The wake generator may also include a plurality of bars slidably engaged to the mounting plate and structurally configured to traverse along the first track when the mounting plate is rotated about the first axis.

Abstract: A method for developing a virtual testing model of a subject for use in simulated aerodynamic testing comprises providing a computer generated generic 3D mesh of the subject, identifying a dimension of the subject and at least one reference point on the subject, imaging the subject to develop point cloud data representing at least the subject's outer surface and adapting the generic 3D mesh to the subject. The generic 3D mesh is adapted by modifying it to have a corresponding dimension and at least one corresponding reference point, and applying at least a portion of the point cloud data from the imaged subject's outer surface at selected locations to scale the generic 3D mesh to correspond to the subject, thereby developing the virtual testing model specific to the subject.

Abstract: In adjustment processing executed at the same period as waveform analysis processing, a CPU of a microcomputer permits an execution of the waveform analysis processing on condition that the waveform analysis processing has been completed. Thus a period of non-execution of the waveform analysis processing is ensured between a completion of preceding waveform analysis processing to an execution of next waveform analysis processing. Since low priority processing, which has been disabled to be executed, is enabled to be executed, it is possible to stop continuation of disablement of execution of the low priority processing.

Abstract: A method for evaluating the lubrication of friction components of an apparatus which can be lubricated by means of a lubricant circuit. A lubricant pump of the lubricant circuit is drivable by a drive engine. A pressure ascertainment unit continuously ascertains the lubricant pressure at at least one defined region of the lubricant circuit during an engine start procedure. A travel ascertainment unit is provided, by means of which at multiple pressure points in time, at each of which the lubricant pressure ascertained exceeds a defined pressure limiting value (p1, p2, p3), the relative travel between the friction components since the beginning of the engine start procedure is ascertained or estimated, and an analysis unit, by means of which an evaluation value, is ascertained from the total of the relative travel values (?1, ?2, ?3) ascertained at the pressure points in time.

Abstract: Provided is a plant state monitoring method which monitors an operation state of a plant by using the Mahalanobis distance based on the plant state amount. The method creates a first unit space as a set of data used to be a reference when judging whether the plant operation state during a start operation period is normal according to the state amount in the plant start operation period. The method also creates a second unit space as a set of data used to be a reference when judging whether the plant operation state during a load operation period is normal according to the state amount in the plant load operation period.

Abstract: A method for detecting defeat devices in an engine control unit (ECU) includes storing with a key-data collection unit, a first key-data determined during an environmental test of a vehicle. The key-data collection unit stores a second key-data determined before the environmental test. Wherein, one of the first key-data is determined by the ECU modified by a characteristic only present before the environmental test and the second key-data is determined by the ECU modified by a characteristic only present during the environmental test. An environmental testing device compares the first key-data with the second key-data to detect an anomaly, wherein the anomaly indicates the presence of the defeat device in the ECU.

Abstract: A vehicle restraint apparatus is for restraining a vehicle 1 on one or more rollers 7 of a vehicle test system. The vehicle restraint apparatus 11 includes a vehicle restraining jig 12 to connect the vehicle 1 with a pole 10 on a floor 9, and a deflection absorbing mechanism 90 to absorb deflection of the vehicle restraining jig 12 produced at the time of vehicle test with the vehicle test system.

Abstract: Sales gas output from a glycol dehydration unit in a gas plant is flown into a sales gas pipeline. One or more operational parameters of the glycol dehydration unit are received. One or both of an amount of glycol carryover and an amount of water carryover in sales gas output from the glycol dehydration unit in the gas plant are determined based on the one or more operational parameters of the glycol dehydration unit. An amount of glycol and water co-condensation in the sales gas pipeline is determined based on one or more operational parameters of the sales gas pipeline and the one or both of the amount of glycol carryover and the amount of water carryover. An amount of black powder formation of the sales gas is determined based on the amount of glycol and water co-condensation.

Abstract: A smear staining machine and a smearing control method and device thereof. The viscosity of the test sample is used for guiding the configuration of at least on smearing parameter. Since the viscosity of the test sample presents multiple influences of many effecting parameters, it is more suitable for presenting the characteristics of the test sample. Therefore, better smearing effect could be acquired by referring the viscosity of the test sample to get the smearing parameter.

Abstract: The present invention is related to a method for obtaining dental pulp and root cement in the forensic dentistry field, wherein the method comprises the steps of: (a) obtaining a tooth; (b) taking a digital radiography to the tooth; (c) external rehydrating of the tooth; (d) perforating the rehydrated tooth; (e) internal rehydrating of dentin pulp complex (f) obtaining rehydrated root cement; (g) obtaining rehydrated dental pulp content with a low speed rotation tool; and (h) storing, preservation, processing and/or analyses of the rehydrated dental pulp content and rehydrated root cement, and the use of this method and kits thereof for forensic identification, estimation of post mortem interval (early and late) and determination of possible causes of death.

Abstract: A method for measuring the dynamic stress field evolution law of a complex heterogeneous structure, comprising: preparing a transparent photosensitive resin model of a complex heterogeneous structure by means of three-dimensional (3D) printing technology to serve as a test piece (S101); placing the test piece in a light path of a circularly polarized light dark field, performing continuous stress loading on the test piece, and recording images (S102); acquiring a plurality of continuously changing full-field stress fringe grayscale images according to videos generated by the image recording (S103); then acquiring grayscale value change sequences of pixel points at each position in the images (S104); and finally, calculating full-field fringe orders under continuous loading conditions according to the relation between the grayscale values and the fringe orders so as to calculate full-field stress values under the continuous loading conditions (S105).

Abstract: A device and a method for testing tablets are disclosed. The device for testing tablets includes a test chamber, which has a crusher jaw and, lying opposite the latter, a counter-jaw. The device has a movable sheet metal strip, which is designed to position a tablet for testing. The longitudinal axis of the movable sheet metal strip is at an angle of less than 90° to the longitudinal axis of the direction of movement of the crusher jaw, and the direction of movement of the sheet metal strip corresponds to the longitudinal axis of the sheet metal strip.

Abstract: An apparatus for assessment of a fluid system includes a scaffold housing with a plurality of internal cavities; a debris monitor module assembly to be selectively inserted into a first cavity of the plurality of internal cavities, the debris monitor module assembly to determine wear debris information in a lubricant; a lubricant condition monitor module assembly to be selectively inserted into a second cavity of the plurality of internal cavities, the lubricant condition monitor module assembly to determine lubricant condition information in the lubricant; and a processing module assembly that is configured to be selectively inserted into a third cavity of the plurality of internal cavities, the processing module assembly to provide communication to an external interface of at least one of the wear debris information and the lubricant condition information.

Abstract: The methods herein can allow for the optimised selection and isolation, within a respective population, of elements of interest and/or utility for a series of subsequent operations. A method can include the phases of: a) identifying, for each particle, at least one of a plurality of characteristic parameters; b) selecting the particles of interest, comparing for each of these the at least one parameter with a respective reference parameter. It can furthermore include the phases of c) storing, for each of the particles, the at least one parameter identified; d) processing the value of a function of the stored parameter, associating the function with a criterion for selection of the particles of interest chosen from a group of possible selection criteria; e) establishing for each particle a threshold criterion to be used as reference parameter. The threshold criterion is established on a time by time basis according to the result of the above processing.

Abstract: Flow cytometer systems are provided having intermediate angle scatter detection capability. In some aspects, systems are provided that include an intermediate angle scatter (IAS) light detector positioned to measure intermediate angle scatter emitted from a flow cytometer. The system further includes a mask disposed across a portion of the IAS light detector and positioned between the flow cell and the IAS light detector to cover at least a central portion of the IAS light detector so as to block a diffraction pattern observed at the detector. In some instances, the diffraction pattern is created by a flat beam profile irradiating the sample. Methods are also provided for configuring a flow cytometer to block a diffraction pattern created by (1) a flat laser beam profile irradiating a flow cytometer liquid sample, or (2) a mismatched index of refraction between a sheath fluid and a liquid sample in a flow cytometer.

Abstract: A method for sorting a particle of interest in a solution includes storing a sample solution in a sample solution reservoir and applying a constant pressure to the sample solution; illuminating the sample solution flowing in an illumination region of the sample solution flow path upstream of a branched flow path region, and detecting the particle of interest contained in the sample solution; and upon detecting the particle of interest, opening an electromagnetic valve or electromagnetic valves that are disposed between an air pressure pump and the branched flow path region of the sample solution flow path at a timing that the detected particle of interest reaches the branched flow path region such that a pulse pressure is applied to the branched flow path region to separate the detected particle of interest from the sample solution flow path.

Abstract: Aspects of the present disclosure include methods for processing a biological sample. Methods according to certain embodiments include contacting a biological sample having cells with an assay reagent that includes one or more analyte-specific binding members to produce a biological sample assay composition and introducing the biological assay composition into an inlet of a flow cytometer having an integrated acoustic separator. Systems, including a flow cytometer with integrated acoustic separator having one or more acoustic concentrator devices suitable for practicing the subject methods are also described.

Abstract: An off-gas analyzer for analyzing H2O vapor, CO, O2, CO2 and/or H2 in a furnace gas stream is fluidically coupled to a gas extraction probe. The analyzer includes an optical measurement cell having multiple sampling chambers, optically coupled to a laser. The analyzer measuring cell is housed within a heated cabinet having a heater operable to heat the interior thereof so as to maintain the extracted gas sample therein at a temperature about the condensation point of water. The analyzer allows for the analysis of the gas water vapour of wet off-gas samples.

Abstract: A spectrophotometer 1 comprises a control unit 45 with a warming-up determination unit 452 that determines the completion of a warming-up based on a variation amount of a detection signal in a predetermined duration when a light detector 7 detects a light from a sample chamber without loading the sample. Specifically, the warming-up determination unit 452 calculates a difference between a signal intensity of the detection signal detected by the light detector 7 at the time when the predetermined time passes and a signal intensity of the detection signal detected by the light detector 7 at a previous time and determines that a warming-up is complete when a value of the difference is less than a first threshold value. The warming-up determination unit 452 automatically determines the completion of warming-up independently from the determination by the user.

Abstract: A photothermal deflection measuring system includes a substrate, a detecting light source, a detecting unit, and a processor. The substrate includes a plurality of positioning structures, on each of which supports a cell emitting heat outside a surface thereof. The detecting light source is utilized to project a detecting light passing through a specific position outside the surface whereby the detecting light is deflected due to a thermal gradient caused by the emitted heat. The detecting unit is arranged at a side of the cell for receiving the deflected detecting light thereby generating an optical deflection signal corresponding to a deflection of the deflected detecting light. The processor is configured to receive the optical deflection signal, analyze the optical deflection signal and determine a heat value corresponding to the specific position out side the surface of the cell according to the optical deflection signal.

Abstract: Polarized light characteristics are detected and mapped to an application, such as product identification. A process of reflecting a directed light emission through a polarizing filter, and sensing the processed light emission having particular characteristics is provided. The characteristics of the sensed light emission is associated with a “color code” that is cross-referenced within a database of color codes.

Abstract: Systems, apparatus, and related methods for evaluating biological sample integrity are disclosed herein. An example method includes scanning a sample container having a sample disposed therein to generate signal data including a first signal portion and a second signal portion. The example method includes detecting if the sample container includes a label attached to a surface of the sample container based on the second signal portion. If the sample container includes a label, the example method includes applying an adjustment factor to the second signal portion to create adjusted signal data. The example method includes determining a property of the sample based on one or more of the first signal portion or the adjusted signal data.

Abstract: In an embodiment, an optical system comprises an optical cell having an interior fluid chamber defined by an interior surface of a housing, a process inlet disposed in the housing and in fluid communication with the interior fluid chamber, and a process outlet disposed in the housing and in fluid communication with the interior fluid chamber, wherein the process inlet and process outlet facilitate the flow of a fluid through the interior fluid chamber. A sampling outlet can be disposed in the housing and in fluid communication with the interior fluid chamber. A first bi-directional pump can be in fluid communication with the sampling outlet and a first storage vessel and can be configured to withdraw a first sample of the fluid via the sampling outlet and to cause the first sample to flow into the first storage vessel.

Abstract: An optical system and method for quantifying total protein in whole blood or other multi-phase liquids and colloidal suspensions uses refractometry without preliminary steps such as cell separation or centrifugation. A refractometer is integrated with a flow cell to enable the refractive index of a flowing sample to be measured based on a substantially cell free boundary layer of the sample that is present under certain flow conditions. Dimensions of the flow cell are selected to produce a cell-free layer in a flow of whole blood in which the cell free layer is thick enough to reduce scattering of light from the refractometer light source. A numerical method is used to compensate for scattering artifacts. The numerical compensation method is based on the slope and width of a peak in the derivative curve of an angular spectrum image of the flowing sample produced by refractometry.

Abstract: Various embodiments may provide an optical system for determining a refractive index of a sample. The optical system may include a laser source configured to emit a laser beam, and a non-linear crystal configured to generate, based on the laser beam, an infrared light beam which passes through the sample, and a visible signal light beam. The optical system may further include a first mirror configured to reflect the visible signal light beam, a second mirror configured to reflect the infrared light beam so that the reflected infrared light beam interacts with the reflected visible signal light beam in the non-linear crystal, and a photodetector configured to determine a property of the reflected visible signal light beam which has interacted with the reflected infrared light beam for determining the refractive index of the sample.

Abstract: Provided are methods of assessing the cleanliness of a flow cell of a flow cytometric system. The provided methods include computing a ratio of post-flow cell and pre-flow cell light beam intensities and using such a ratio to assess the cleanliness of the flow cell. Flow cytometric systems capable of monitoring the cleanliness of a flow cell contained within the system are also provided.

Abstract: A difference between a peak reflectance of a first wavelength component and a reflectance of a second wavelength component having a predetermined wavelength among reflectances of a plurality of wavelength components constituting reflected light in a highlight direction from a glitter material-containing coating film is set as a first difference value. Reflectance is measured of the first and second wavelength components of the reflected light in the highlight direction for the coating film corresponding to a measurement object. A first difference value is calculated by using the measurement result. A storage stores in advance correlation information indicating a correlation between the first difference value and an index value indicating predetermined physical characteristics of a glitter material contained in the coating film.

Abstract: A light emitting device includes a fluorescent material, a first laser element and a second laser element. The first laser element is configured to emit a first laser light to excite the fluorescent material. The first laser light having a first peak wavelength that is shorter than an excitation peak wavelength of the fluorescent material. The second laser element is configured to emit a second laser light to excite the fluorescent material. The second laser light has a second peak wavelength that is longer than the excitation peak wavelength of the fluorescent material.

Abstract: In one exemplary embodiment, a method for validating an instrument is provided. The method includes receiving amplification data from a validation plate to generate a plurality of amplification curves. The validation plate includes a sample of a first quantity and a second quantity, and each amplification curve includes an exponential region. The method further includes determining a set of fluorescence thresholds based on the exponential regions of the plurality of amplification curves and determining, for each fluorescence threshold of the set, a first set of cycle threshold (Ct) values of amplification curves generated from the samples of the first quantity and a second set of Ct values of amplification curves generated from the samples of the second quantity. The method includes calculating if the first and second quantities are sufficiently distinguishable based on Ct values at each of the plurality of fluorescence thresholds.

Abstract: A system for detecting signal components of light induced by multiple excitation sources, which includes a flow channel having two spatially separated optical interrogation zones; a light illumination subsystem that directs each of two light beams of different wavelengths to a different zone of the optical interrogation zones; a detector subsystem that converts detected light into a total electrical signal having both modulated and unmodulated electrical signals; and a processor that determines signal components from the light detected from each of the optical interrogation zones.

Abstract: An optical sample detection system includes: a sensor chip including a dielectric member, a metal film adjacent to an upper surface of the dielectric member, a reaction layer adjacent to an upper surface of the metal film, and a lid member disposed on an upper surface of the reaction layer; a chip holding unit for holding the sensor chip; and a light projecting unit that irradiates the metal film with excitation light through the dielectric member. A sample is detected by irradiating the metal film with excitation light through the dielectric member. The lid member is wider than the dielectric member in an optical path cross section of the excitation light.

Abstract: In an example implementation, a substance detection device includes a chamber with chamber walls, a chamber top, and a chamber bottom. A substrate comprises imprinted nanostructures positioned within the chamber, and the substrate is coupled to the chamber walls to form the chamber bottom. An inert gas is sealed within the chamber.

Abstract: A surface enhanced luminescence (SEL) sensor may include a substrate and nano fingers projecting from the substrate. The nano fingers may include a nano finger extending along an axis. The nano finger may include a plasmonically active cap and a pillar supporting the plasmonically active cap. The pillar may have an asymmetric material composition with respect to the axis.

Abstract: In one aspect, methods of sensing are described herein. In some embodiments, a method of sensing includes disposing a fluorophore in a biological environment, wherein the fluorophore includes a dioxo-pyridine ring (DPR) or a thiazolopyridine acid (TPA). The method further includes exposing the biological environment to electromagnetic radiation having a wavelength corresponding to an excitation wavelength of the fluorophore, detecting light emitted by the fluorophore, and correlating the light emitted by the fluorophore to a presence or absence of an analyte within the biological environment in an amount above a minimum detection threshold. The presence of the analyte can increase or decrease the amount of light emitted by the fluorophore. The presence of the analyte may also shift the peak emission wavelength or alter the fluorescence lifetime of the fluorophore. The analyte, in some embodiments, includes hydrogen ions, halide ions, and/or halogens.

Abstract: In one aspect, the invention relates to system comprising: a processor configured to receive a first optical coherence tomography (OCT) data set obtained during a pullback of a data collection probe along a first length of a first blood vessel; determine a minimum lumen area disposed along the first length using the first OCT data set; and determine a first FFR value along the first length based on the minimum lumen area. In one embodiment, the first FFR value is an estimated FFR. In another aspect, the invention relates to a method that includes measuring, using OCT, the area of a lumen of a vessel for which the vessel's FFR is to be determined; and calculating, using a computer, A2m/(A2m+k) or YA2min/(YA2min+k) as a FFR value. In one embodiment, k is about 0.7 mm2 and ? is patient-specific variable that depends on the coronary branch in which the images were obtained.

Abstract: A metrology apparatus (302) includes a higher harmonic generation (HHG) radiation source for generating (310) EUV radiation. Operation of the HHG source is monitored using a wavefront sensor (420) which comprises an aperture array (424, 702) and an image sensor (426). A grating (706) disperses the radiation passing through each aperture so that the image detector captures positions and intensities of higher diffraction orders for different spectral components and different locations across the beam. In this way, the wavefront sensor can be arranged to measure a wavefront tilt for multiple harmonics at each location in said array. In one embodiment, the apertures are divided into two subsets (A) and (B), the gratings (706) of each subset having a different direction of dispersion. The spectrally resolved wavefront information (430) is used in feedback control (432) to stabilize operation of the HGG source, and/or to improve accuracy of metrology results.

Abstract: A method for detecting a defect on a surface (12) by multidirectional lighting includes acquiring a plurality of images of the surface (12) using an optical device (14) having an optical axis, each image being acquired with a lighting of the surface along a lighting direction (E, E?) given for each point of the surface (12) and an optical direction (O), the images being acquired with different lighting directions (E, E?) or different combinations and/or with different optical directions (O); for each point, calculating a plurality of parameters, the parameters including coefficients of an equation characterizing the response of said point of the surface as a function of the lighting direction (E, E?) and an observation direction (B, B?); and deducing from the calculated parameters whether the surface (12) has a defect at said point.

Abstract: An image inspection apparatus includes: an imaging section for capturing an image of a workpiece from a certain direction; an illumination section for illuminating the workpiece from different directions at least three times; an illumination controlling section for sequentially turning on the illumination sections one by one; an imaging generating section for driving the imaging section to generate a plurality of images; a normal vector calculating section for calculating a normal vector with respect to the surface of the workpiece at each of pixels by use of a pixel value of each of pixels having a corresponding relation among the plurality of images; and a contour image generating section for performing differential processing in an X-direction and a Y-direction on the calculated normal vector at each of the pixels, to generate a contour image that shows a contour of inclination of the surface of the workpiece.

Abstract: A crack analysis device includes a captured image acquiring unit, a crack detecting unit, and a crack ratio calculator. The captured image acquiring unit acquires a captured image which is obtained by imaging a road surface. The crack detecting unit detects cracks in the imaged road surface on the basis of the captured image. The crack ratio calculator calculates a crack ratio indicating a ratio of an area of the cracks to a predetermined area on the basis of the detected cracks.

Abstract: A continuous quality control device for containers in a roto-revolutionary movement consists of making said containers pass in front of lighting means, capturing by at least one single sequential image capturing device each of said containers in rotation, obtaining an optical reconstruction of said containers and controlling their quality according to said optical reconstruction, characterised in that said lighting means is equipped with stroboscopic control means that allows the illumination of said containers in counterphase from at least two different angles of incidence and the capturing of at least two overlapping images in the same angular rotation position of said container in its own housing with respect to said image capturing device.

Abstract: Methods and systems for generating a high resolution image for a specimen from one or more low resolution images of the specimen are provided. One system includes one or more computer subsystems configured for acquiring one or more low resolution images of a specimen. The system also includes one or more components executed by the one or more computer subsystems. The one or more components include a model that includes one or more first layers configured for generating a representation of the one or more low resolution images. The model also includes one or more second layers configured for generating a high resolution image of the specimen from the representation of the one or more low resolution images.

Abstract: Defects from a hot scan can be saved, such as on persistent storage, random access memory, or a split database. The persistent storage can be patch-based virtual inspector virtual analyzer (VIVA) or local storage. Repeater defect detection jobs can determined and the wafer can be inspected based on the repeater defect detection jobs. Repeater defects can be analyzed and corresponding defect records to the repeater defects can be read from the persistent storage. These results may be returned to the high level defect detection controller.

Abstract: A method for detecting degree of particulate contamination on a flat panel mainly includes the following steps: illuminating a to-be-detected flat panel (40) by using a light source module (10), to form an illumination field; adjusting a half width of the illumination field; adjusting a luminous intensity at a center of the illumination field and a luminous intensity at an edge of the half width of the illumination field; adjusting a light intensity and a position of the light source, as well as a position of a detector (20); and acquiring signals from foreign objects on the flat panel by using the detector (20). This method greatly alleviates particle mirror crosstalk and crosstalk of patterns on the lower surface of the flat panel, and improves the SNR, thus enhancing the accuracy in detection of foreign objects on the flat panel.

Abstract: A semiconductor apparatus includes a transfer chamber, an annealing station, a robot arm, and an edge detector. The transfer chamber is configured to interface with an electroplating apparatus. The annealing station is arranged to anneal a wafer. The robot arm is arranged to transfer the wafer from the transfer chamber to the annealing station. The edge detector is disposed over the robot arm for the purpose of monitoring at least one portion of an edge bevel removal area of the wafer carried by the robot arm.

Abstract: An optical scanning system includes a radiating source capable of outputting a light beam, a time varying beam reflector that is configured to reflect the light beam through a scan lens towards a transparent sample at an incident angle that is not more than one degree greater or less than Brewster's angle of the transparent sample, and a focusing lens configured to be irradiated by light scattered from the transparent sample at an angle that is normal to the plane of incidence of the moving irradiated spot on the transparent sample. A first portion of the light beam is scattered from a first surface of the transparent sample and a second portion of the light beam is scattered from a second surface of the transparent sample. A spatial filter is configured to block the second portion of the light beam scattered from the second surface of the transparent sample.