Abstract: Clamping apparatus for a camera mount includes two clamping jaws slidably coupled to each other so they can move towards or away from each other along a common plane. A rotatable jaw movement controlling mechanism having an eccentric (elliptical or variable contour) shaped inner surface is coupled around a portion of the two clamping jaws for controlling the movement of the two clamping jaws towards or away from each other. A ratcheting mechanism is coupled to the jaw movement controlling mechanism for preventing slippage of the two clamping jaws when the two clamping jaws are moving towards each other. The ratcheting mechanism may include a release button for releasing the ratcheting function and enabling the jaws to move away from each other quickly and without much effort.

Abstract: The invention relates to an indoor intelligent home stereo projector with 360-degree rotation which includes a base. The upper end of the base is fixedly connected to a rotating device. The upper end of the rotating device is coupled with a projector body. The projector body is provided with a heat dissipating device. The projector body is screwed with a dustproof device. The outer surface of the projector body is fixedly connected with an illumination lamp. The rotating device includes a support column, a box body, a rotating shaft, a support plate, a magnet column, a through slot, a plug-in board, a motor, a first bevel gear, a second bevel gear, a limiting seat and a limiting strip. The indoor intelligent home stereo projector with 360-degree rotation can realize 360-degree rotation of the projector by using a rotating device. It can be adjusted as needed, which is convenient and quick.

Abstract: An image modulating system including layers such as a formatter plate (PCB), an electrical connector plate called an interposer, a back cooling block, a front cooling frame and a reflective spatial light modulator. A cooling heat transfer channel is provided to transfer heat between the front cooling frame of the light valve and the back cooling block of the reflective spatial light modulator so as to reduce the thermal gradient between the front and back of the reflective spatial light modulator. The cooling heat transfer channel passes through any intervening layers such as the formatter plate (PCB), and/or the electrical connector plate called the interposer. The cooling heat transfer channel is preferably formed of a heat pipe or a circulating cooling medium.

Abstract: A light projection system and method for generating an image with three primary colors having a module of first blue lasers, second lasers and a wavelength conversion element configured to emit light at a plurality of wavelengths after absorption of a light beam from the second lasers at an excitation wavelength, the output of the module being a combined light beam having a pre-defined chromaticity where the projector is calibrated so as to provide the pre-defined chromaticity of the combined beam over at least a range of laser drive current values to correct for non-linear performance of the wavelength conversion element.

Abstract: A reflective photomask blank (10) of a first aspect includes a substrate (1); a reflective layer (2) formed on the substrate (1); and a light absorbing layer (4) formed on the reflective layer (2) and including a tin oxide film with a film thickness of 17 nm or more and less than 25.0 nm. Consequently, the shadowing effect of a reflective photomask for pattern transfer using extreme ultraviolet light as a light source is suppressed or reduced to improve the performance of transfer to a semiconductor substrate, and further, pattern collapse due to cleaning of the reflective photomask is suppressed.

Abstract: A method of correcting a designed pattern of a photomask for fabricating a semiconductor device is provided. A substrate is provided. A first mask pattern of the photomask designed to form a first contact pattern on the substrate is conceived. The first mask pattern includes a plurality of mask holes each having a hole size. The first mask pattern is adjusted to expand the hole size along a horizontal direction and rotate the mask holes for conceiving a second mask pattern of the photomask designed to form a second contact pattern having a plurality of contact holes. A plurality of device gaps between the contact holes is verified, and an overlay margin between the second contact pattern and an adjacent pattern in the semiconductor device is verified for determining whether the second contact pattern is the designed pattern of the photomask.

Abstract: Extreme ultraviolet (EUV) mask blanks, methods for their manufacture and production systems therefor are disclosed. The EUV mask blanks comprise a multilayer stack of absorber layers on the capping layer, the multilayer stack of absorber layers including a plurality of absorber layer pairs.

Abstract: An integrated circuit includes a first region corresponding to a first circuit and including a first dummy pattern and a first signal pattern which are spaced apart from each other by a width of a spacer in a conductive layer to extend in parallel in a first horizontal direction and a second region corresponding to a second circuit which is the same as the first circuit and including a second dummy pattern and a second signal pattern which are spaced apart from each other by the width of the spacer in the conductive layer to extend in parallel in the first horizontal direction. The first signal pattern and the second signal pattern are configured so that a first signal and a second signal corresponding to each other in the first circuit and the second circuit are respectively applied to the first signal pattern and the second signal pattern.

Abstract: The present invention pertains to the field of nanoimprint lithography (NIL) processes and more specifically to a soft NIL process used for providing a sol-gel patterned layer on a substrate. Specifically, this process comprises a step of adjusting the solvent uptake of the sol-gel film to 10 to 50% vol., preferably between 15 and 40% vol., by varying the relative pressure of the solvent while a soft mould is applied onto the substrate coated with the sol-gel film.

Abstract: The present invention is to solve the problem of residues in nanoimprint lithography without losing the merits thereof, i.e., low cost and high productivity, and provides a metal film formation technique advantageous in pattern accuracy and product reliability over time. A metal film formation method according to the present invention comprises a first step where a nanoimprint lithography material is deposited on an insulating substrate to form an underlayer, a second step where the underlayer is pressed with a mold having protrusions to pattern by nanoimprint lithography, a third step where residues of the underlayer at regions pressed with the protrusions of the mold are evaporated by heating to be removed, and forming a metal film at least on the patterned underlayer. A nanoimprint lithography material according to the present invention contains a catalyst for a metal plating.

Abstract: A monomer having formula (I): wherein in formula (I), groups and variables are the same as described in the specification.

Abstract: Provided is a pattern-forming composition, including: an infrared absorbing colorant; and at least one compound selected from the group consisting of a resin having a glass transition temperature of 150° C. to 300° C. and a precursor of a resin having a glass transition temperature of 150° C. to 300° C.

Abstract: Provided is a method of manufacturing an optical filter in which a pixel having excellent rectangularity can be accurately formed in a region that is partitioned by a partition wall or at a position corresponding to the region partitioned by the partition wall.

Abstract: This disclosure relates to a dry film structure that includes a carrier substrate, and a polymeric layer supported by the carrier substrate. The polymeric layer includes at least one fully imidized polyimide polymer.

Abstract: The present invention relates to a chemically amplified photoresist composition including an alkali-soluble resin including a (meth)acrylate-based resin containing a (meth)acrylate-based repeating unit in which a heterocyclic compound is substituted via a divalent functional group containing an alkylene sulfide having 1 to 20 carbon atoms.

Abstract: The present invention is a resist composition comprises a polymer compound having one or two repeating units selected from repeating units represented by the following general formulae (p-1), (p-2) and (p-3), a repeating unit represented by the following formula (a-1) and the formula (a-2) polarities of which are changed by an action of an acid, and a repeating unit represented by the following formula (b-1); a salt represented by the following general formula (B); and a solvent, wherein a difference of a C log P of the repeating unit (a-1) before and after changing the polarity is 3.0 to 4.5, and a difference of a C log P of the repeating unit (a-2) before and after changing the polarity is 2.5 to 3.2. This provides a resist composition which has high sensitivity, wide DOF and high resolution, reduces LER, LWR and CDU, and has good pattern shape after exposure and excellent etching resistance.

Abstract: The present disclosure provides a photoresist dispensing module for dispensing a photoresist solution onto a wafer. The photoresist dispensing module includes a first nozzle, a second nozzle, and a photoresist pipeline assembly coupled to the first nozzle and the second nozzle. The first nozzle is configured to dispense the photoresist solution to a first portion of the wafer. The second nozzle is configured to dispense the photoresist solution to a second portion of the wafer. The photoresist pipeline assembly is configured to supply the photoresist solution to the first nozzle and the second nozzle.

Abstract: The instant disclosure includes an implanting apparatus and a method thereof. The implanting apparatus has a chuck configured to carry a substrate is rotated a number of times at an angle during ion implantation. In this way, masks used during semiconductor fabrication is reduced.

Abstract: A method for utilizing plasma processing for removing polymer residue during semiconductor manufacture is implemented in a plasma processing device. The plasma processing device includes a processing chamber and an electrostatic chuck therein. The electrostatic chuck includes a support surface and lift pin configured to be raised from a first position to a second position. Disposing the substrate on the supporting surface when the lift pin is at the first position. Generating a first plasma in the processing chamber, the first plasma formed from a first processing gas. The first processing gas includes a first mixing gas including hydrogen and nitrogen. Raising the lift pin to the second position to separate the substrate from the support surface. Generating a second plasma in the processing chamber, the second plasma formed from a second processing gas. The second processing gas includes a second mixing gas including hydrogen and nitrogen.

Abstract: Processes for removing a mask layer (e.g., doped amorphous carbon mask layer) from a substrate with high aspect ratio structures are provided. In one example implementation, a process can include depositing a polymer layer on at least a portion of a top end of a high aspect ratio structure on a substrate. The process can further include removing at least a portion of the polymer layer and the doped amorphous carbon film form the substrate using a plasma strip process. In example embodiments, depositing a polymer layer can include plugging one or more high aspect ratio structures with the polymer layer. In example embodiments, depositing a polymer layer can include forming a polymer layer on a sidewall of one or more high aspect ratio structures.

Abstract: The disclosure provides a method for determining at least one property of an EUV source in a projection exposure apparatus for semiconductor lithography, wherein the property is determined on the basis of the electromagnetic radiation emanating from the EUV source, and wherein a thermal load for a component of the projection exposure apparatus is determined and the property is deduced on the basis of the thermal load determined.

Abstract: In a method for characterizing at least one optical component of a projection exposure apparatus (1), an intensity distribution of the illumination radiation (2) is detected in a field plane of the projection exposure apparatus (1) with a measuring device (31) and predicted values of an optical parameter are spatially determined therefrom over at least one predefined surface.

Abstract: A resist pattern-forming method includes treating a surface layer of a substrate with an ultraviolet ray, plasma, water, an alkali, an acid, hydrogen peroxide, ozone, or a combination thereof. The surface layer includes at least one metal element. A resist composition is applied on a surface of the surface layer to provide a resist film directly or indirectly on the surface. The resist film is exposed to an extreme ultraviolet ray or an electron beam. The resist film exposed is developed. The at least one metal element preferably belongs to period 3 to period 7 of group 3 to group 15 in periodic table.

Abstract: An exposure apparatus includes a projection optical system configured to project a pattern of a mask onto a substrate, a substrate stage configured to hold and move the substrate, and a controller configured to control exposure of the substrate held by the substrate stage, wherein the controller obtains an amount of deviation of an image of the pattern projected onto the substrate with respect to the pattern of the mask based on telecentricity information, which is information on telecentricity for respective image heights of the projection optical system, and height information, which is information on the height of a surface of the substrate, and corrects deviation of the image based on the obtained amount of deviation to expose the substrate.

Abstract: AA wafer holding device (200, 415) is configured to hold a wafer (205, 416) during operation of a microlithographic projection exposure apparatus includes at least one sensor that is positionable in different rotational positions.

Abstract: An optical system for a microlithographic projection exposure apparatus for operation in the EUV includes a polarization-influencing arrangement having first and one second double reflection surface units, each having first and second reflection surfaces, in each case arranged directly adjacent at a distance d1 and at an angle of 0°±10° relative to one another. The first reflection surface of the first double reflection surface unit and the second reflection surface of the second double reflection surface unit are arranged directly adjacent at a distance d2 and at an angle of 0°±10° relative to one another, with d2>5*d1. Light incident on the first reflection surfaces forms an angle of 43°±10° with the first reflection surfaces. Light incident on the first reflection surface of the first double reflection surface unit is reflected toward the second reflection surface of the second double reflection surface unit.

Abstract: The present disclosure provides an exposure apparatus for transferring a pattern of a reticle onto a wafer. The reticle has a metallic layer forming the pattern at one side of the reticle. The pattern includes at least one circuit pattern and at least one alignment mark. The exposure apparatus includes an exposure light source, an alignment light source, a reticle stage, and an alignment sensor. The exposure light source is configured to provide a first light to expose the pattern of the reticle. The alignment light source is configured to provide a second light to expose the alignment mark of the reticle. The reticle stage is configured to position the reticle. The alignment sensor is configured to detect the second light penetrated through the alignment mark of the reticle for determining an alignment error of the reticle.

Abstract: A method including evaluating a plurality of substrate measurement recipes for measurement of a metrology target processed using a patterning process, against stack sensitivity and overlay sensitivity, and selecting one or more substrate measurement recipes from the plurality of substrate measurement recipes that have a value of the stack sensitivity that meets or crosses a threshold and that have a value of the overlay sensitivity within a certain finite range from a maximum or minimum value of the overlay sensitivity.

Abstract: A metrology apparatus for and a method of determining a characteristic of interest relating to at least one structure on a substrate. The metrology apparatus comprises a sensor and an optical system. The sensor is for detecting characteristics of radiation impinging on the sensor. The optical system comprises an illumination path and a detection path. The optical system is configured to illuminate the at least one structure with radiation received from a source via the illumination path. The optical system is configured to receive radiation scattered by the at least one structure and to transmit the received radiation to the sensor via the detection path.

Abstract: A focus compensation method and apparatus thereof are provided. The focusing compensation method includes steps of: (S11) providing an exposure lens set; (S12) providing an object, measuring line-widths of the object at points of line segments along an axial direction by different focusing conditions, to obtain measured values, and obtaining at least one line-width curve from the measured values; and (S13) calibrating a focusing operation of the exposure lens set according to the at least one line-width curve. Line-widths of a product are measured, and fed back to an exposure machine to calibrate the focusing operations of the exposure machine, thereby improving the focusing accuracy of the exposure machine.

Abstract: Methods and associated apparatus for reconstructing a free-form geometry of a substrate, the method including: positioning the substrate on a substrate holder configured to retain the substrate under a retaining force that deforms the substrate from its free-form geometry; measuring a height map of the deformed substrate; and reconstructing the free-form geometry of the deformed substrate based on an expected deformation of the substrate by the retaining force and the measured height map.

Abstract: A first substrate 2002 has a calibration pattern applied to a first plurality of fields 2004 by a lithographic apparatus. Further substrates 2006, 2010 have calibration patterns applied to further pluralities of fields 2008, 2012. The different pluralities of fields have different sizes and/or shapes and/or positions. Calibration measurements are performed on the patterned substrates 2002, 2006, 2010 and used to obtain corrections for use in controlling the apparatus when applying product patterns to subsequent substrates. Measurement data representing the performance of the apparatus on fields of two or more different dimensions (fields 2004, 2008, 2012 in this example) is gathered together in a database 2013 and used to synthesize the information needed to calibrate the apparatus for a new size. Calibration data is also obtained for different scan and step directions.

Abstract: Provided is an electrophotographic photosensitive member including a surface layer containing: a copolymerization product of a composition containing a hole-transportable compound having a chain-polymerizable functional group and a compound having a specific structure; and metal oxide particles.

Abstract: Provided is a magenta toner which exhibits high image density and chroma, has excellent low-temperature fixability, shelf stability and charging ability, is unlikely to fog, and can be produced at low cost. The magenta toner contains a binder resin and a magenta colorant, wherein the magenta toner contains C.I. Pigment Red 122, C.I. Pigment Violet 19 and a compound A represented by the following general formula (1) as the magenta colorant, and wherein, with respect to 100 parts by mass of the binder resin, a total of from 3 to 30 parts by mass of the C.I. Pigment Red 122, the C.I. Pigment Violet 19 and the compound A are contained, and a mass ratio of a total content of the C.I. Pigment Red 122 and the C.I.

Abstract: An image forming apparatus having a first mode and a second mode with respectively different rotational peripheral velocity ratios of a developer bearing member, stores a first lifetime threshold value of a developing apparatus corresponding to the first mode and a second lifetime threshold value of the developing apparatus corresponding to the second mode, updates a lifetime determination value of a developing apparatus on the basis of drive amount information when the developer bearing member operates in the first mode and second modes, performs a first determination related to a lifetime in the first mode on the basis of the first lifetime threshold value and the lifetime determination value, performs a second determination related to a lifetime in the second mode on the basis of the second lifetime threshold value and the lifetime determination value, and makes a notification on the basis of determination results.

Abstract: A toner container includes an encoded member that is encoded with identifying information of the toner container and that is operatively connected to an input gear of the toner container such that rotation of the input gear causes movement of the encoded member for communicating the identifying information to a sensor. A first alignment guide on the first side of the toner container includes a top surface that is unobstructed to contact a sensor housing from below when the toner container is installed in an image forming device. At least a portion of the top surface of the first alignment guide inclines upward and rearward for contacting and lifting the sensor housing upward during insertion of the toner container into the image forming device for aligning the sensor with an exposed portion of the encoded member.

Abstract: A replaceable unit is removably installable in an image forming device. The replaceable unit includes a rotatable input gear that is positioned to mate with an output gear of the image forming device. The replaceable unit includes an encoded member that is encoded with identifying information of the replaceable unit and that is operatively connected to the input gear such that rotation of the input gear causes movement of the encoded member. The replaceable unit includes an alignment guide on the exterior of the replaceable unit. The image forming device includes a sensor supported by a sensor housing. The alignment guide is positioned to contact and move the sensor housing during insertion of the replaceable unit into the image forming device to align the sensor with an exposed portion of the encoded member for reading the identifying information from the encoded member by the sensor.

Abstract: Disclosed is a development cartridge detachable from a main body of an image forming apparatus. The development cartridge includes a lateral waste toner sealing member contacting an end portion of a photosensitive drum in a lengthwise direction of the photosensitive drum to prevent a waste toner from leaking through the end portion of the photosensitive drum, and a photosensitive frame including a waste toner container to contain the waste toner, a first attachment surface, to which the lateral waste toner sealing member is attached, and a side wall to form a boundary at an upstream side of the first attachment surface with respect to a rotation direction of the photosensitive drum. The lateral waste toner sealing member includes an opposite surface facing the side wall, and a protrusion protruding towards the side wall is provided on the opposite surface.

Abstract: A belt drive device includes a first pulley, a second pulley, a first bulging portion, a belt, and a pressing portion. The first bulging portion is formed along an outer periphery of the second pulley to bulge outward in a radial direction of the second pulley at a center of the second pulley in an axial direction of the second pulley. The belt is stretched between the first pulley and the first bulging portion. The pressing portion presses an outer peripheral surface of the belt at a center of the belt in a width direction of the belt.

Abstract: A position of a stretch roller, where the stretch roller stretches an intermediate transfer belt upstream of and adjacently to a most upstream primary transfer roller in a rotational direction of the intermediate transfer belt, is apart from a photosensitive drum with respect to a primary transfer surface. Further, the most upstream primary transfer roller is larger in outside diameter than other primary transfer rollers, and the most upstream primary transfer roller has a transfer pressure larger than the transfer pressure of the other primary transfer rollers. This arrangement inhibits the most upstream primary transfer roller from deforming and a defective transfer due to waving of the intermediate transfer belt, while inhibiting an increase in size of an apparatus.

Abstract: An image forming apparatus includes a control unit configured to perform a rubbing mode in which a rubbing rotatable member moves from a separation position to an abutment position in a state where a fixing belt is in a stop state. The control unit is configured to control a contact-and-separation mechanism in the rubbing mode such that if a predetermined temperature to which the fixing belt is heated is a first temperature, the rubbing rotatable member moves from the abutment position to the separation position at a timing when a first time has elapsed since the rubbing rotatable member abutted against the surface of the fixing belt, and if the predetermined temperature is a second temperature higher than the first temperature, the rubbing rotatable member moves from the abutment position to the separation position at a timing when a second time shorter than the first time has elapsed.

Abstract: Disclosed is an image forming apparatus, including: a first guide guiding one surface of a sheet downstream of a fixing unit fixing a toner image on the sheet and upstream of discharging rollers discharging the sheet to a stacking portion in a sheet conveying direction; a second guide facing the first guide, the second guide guiding the other surface of the sheet; protrusions with openings provided on the second guide in a sheet width direction orthogonal to the sheet conveying direction; recesses provided on the first guide in the sheet width direction, the recesses facing the protrusions; and a blower unit blowing air toward the sheet via the openings provided on the second guide, wherein a corrugated shape is formed in the width direction on the sheet to which air is blown by the protrusions provided on the second guide and the recesses provided on the first guide.

Abstract: A cooling device includes a sheet conveying roller, and a duct. The sheet conveying roller is configured to convey a sheet in a sheet conveyance direction. The duct is configured to convey air to a sheet conveyance passage. The duct includes a first blowing port configured to blow air toward the sheet conveyance passage, and a second blowing port configured to blow air toward the sheet conveying roller.

Abstract: An image forming apparatus, including: a fixing device arranged downstream of a transfer portion and configured to fix a toner image on a sheet; a regulation member arranged upstream of the fixing device and configured to regulate the sheet; a rotary shaft configured to rotatably support the regulation member; an urging member configured to urge the regulation member so as to bring a tip end portion of the regulation member into contact with the transfer portion at a contact portion; and an openable and closable member provided to a main body to open an opening portion, wherein the tip end portion can be rotated from a side opposite to the rotary shaft to a side of the rotary shaft with respect to a straight line extending from the contact portion and contacting the fixing device.

Abstract: A fixing device includes: an endless fixing belt; a heat source that is disposed on an inner circumferential side of the fixing belt and is capable of adjusting an amount of heat generation with supplied electric power; a pressure receiver disposed on the inner circumferential side of the fixing belt; a pressure applier that presses the pressure receiver, to form a fixing nip with the fixing belt; a temperature detector that detects a temperature of an outer circumferential surface of the fixing belt in the heat source; a controller that controls power supply to the heat source, to adjust a detected temperature to be detected by the temperature detector to a target temperature; a temperature difference detector that detects a temperature difference between an inner circumferential surface and the outer circumferential surface of the fixing belt; and a corrector that corrects the target temperature of the controller.

Abstract: A belt-type transport device includes a belt, a pressure unit, a nip forming unit, a belt stretching roller, an inclination controller, a contact unit, and a support unit. The belt is an endless belt, has an outer circumferential surface and an inner circumferential surface, and is to be rotated. The pressure unit is in contact with the outer circumferential surface of the belt. The nip forming unit presses the belt against the pressure unit so as to form a nip through which a recording medium is to be transported. The belt stretching roller is disposed inside the belt and stretches the belt. The inclination controller controls inclination of the belt stretching roller. The contact unit is provided along a width direction of the belt and is in contact with the inner circumferential surface of the belt. The support unit supports the contact unit such that the contact unit is able to follow inclination of the belt which is changed due to the inclination of the belt stretching roller.

Abstract: An image forming apparatus includes a power supply board, a driver board, and an engine control board. The driver board includes a plurality of switching elements each configured to supply and shut off a power supply for each of a plurality of distributed power supply voltages supplied from the power supply board. The plurality of switching elements includes a first switching element, to which the power supply voltage is to be applied from the power supply board, and a second switching element, to which the power supply voltage output from the first switching element is to be applied in a distributed manner. The engine control board is configured to performs failure diagnosis of the first switching element when the image forming apparatus is activated, and performs failure diagnosis of the second switching element in a case where an abnormality has occurred in any one of a plurality of loads.

Abstract: An image forming apparatus includes an image forming unit, an input unit and a control unit. The image forming unit forms an image by using a plurality of consumables. The input unit receives an input of information designating the consumables to be used for forming the image. The control unit selectably displays other candidates of the consumables to be used for forming the image, based on the designated consumables.

Abstract: A measuring device a measurement unit configured to measure an image on a sheet, the measurement unit including a light emitting portion configured to illuminate the sheet with light, and a detecting portion configured to detect light reflected by the sheet; a supporting unit supporting the measurement unit; and a driving unit configured to move the measurement unit supported by the supporting unit in a scanning direction. A size, in the scanning direction, of a detectable range of the detecting portion in which the detecting portion is capable of detecting the reflected light from the sheet is larger than a size, in a sub-scanning direction perpendicular to the scanning direction and a normal direction of a surface of the sheet, of the detectable range of the detecting portion.

Abstract: A developing device develops an electrostatic latent image formed on a photosensitive drum. A bottle rotation sensor detects rotation of a toner bottle that stores toner. A bottle motor drives the toner bottle for rotation to thereby discharge toner from the toner bottle. A hopper-internal toner sensor detects presence/absence of toner stored in a hopper that stores toner discharged from the toner bottle. A replenishment unit replenishes toner stored in the hopper to the developing device. Which of failure of the bottle rotation sensor and rotation failure of the toner bottle has occurred is determined based on a detection result of the bottle rotation sensor and a detection result of the hopper-internal toner sensor.