Abstract: Various embodiments of the present disclosure are directed towards an integrated chip including a waveguide and a heater structure. The waveguide is disposed on a substrate and comprises an active region that extends continuously along a first distance. The heater structure overlies the waveguide. The heater structure comprises a conductive structure over the active region and a vertical structure disposed between the conductive structure and the substrate. The vertical structure comprises a conductive upper vertical segment and a lower vertical segment. The conductive structure and the conductive upper vertical segment continuously laterally extend across a second distance that is greater than or equal to the first distance. The first distance is greater than a width of the conductive structure.

Abstract: Disclosed is a thermochromic intelligent window with an adjustable emissivity. The thermochromic intelligent window includes a window frame. A glass assembly is assembled in the window frame and includes a glass substrate. One side of the glass substrate is deposited with a metal oxide coating for adjusting the glass substrate, the metal oxide coating has a low-emission function, and the metal oxide coating is a layer of transparent indium tin oxide film. A solar-adjusted high-emission portion is assembled on the other side of the glass substrate and includes a first polyethylene layer. A hydroxypropyl cellulose hydrogel layer is assembled on an upper portion of the first polyethylene layer. A second polyethylene layer is further assembled on the hydroxypropyl cellulose hydrogel layer. The hydroxypropyl cellulose hydrogel layer is wrapped between the first polyethylene layer and the second polyethylene layer.

Abstract: Provided is a light modulator including a substrate, and a resonator configured to modulate a phase of incident light by modulating a refractive index based on an external stimulus, the resonator comprising a first reflective structure provided on the substrate, a cavity layer provided on the first reflective structure, and a second reflective structure provided on the cavity layer, wherein at least one of the first reflective structure or the second reflective structure comprises first material layers, second material layers that are alternately stacked with the first material layers, and a third material layer, and wherein each of the first material layers has a first refractive index, each of the second material layers has a second refractive index that is different from the first refractive index, and the third material layer has a third refractive index that is different from the first refractive index.

Abstract: An object is to provide an optical element in which a wavelength dependence of refraction of transmitted light is small, and a light guide element including the optical element.

Abstract: A display device is disclosed, which includes a display screen and a dimming screen which are arranged in a stacked manner, a backlight module on a side of the dimming screen away from the display screen, and a circuit board module on a side of the backlight module away from the dimming screen. The circuit board module includes a first control circuit board on the side of the backlight module away from the dimming screen and a second control circuit board on a side of the first control circuit board away from the backlight module, the first control circuit board is electrically connected with the dimming screen through a first Chip On Film and the second control circuit board is electrically connected with the display screen through a second Chip On Film. The circuit board module further includes a first support frame and a second support frame.

Abstract: A helmet and a method and system for controlling a digital visor of a helmet are disclosed herein. The helmet includes a visor screen having a plurality of liquid crystal display (LCD) pixels, with each LCD pixel configured to alter in transparency. The helmet also includes a light sensor configured to detect incident light. The helmet also includes a controller coupled to the visor screen and the light sensor. The controller is configured to alter the transparency of the plurality of LCD pixels based on the incident light. In embodiments, the controller can alter the transparency of the LCD pixels based on the direction and/or intensity of the incident light.

Abstract: The present invention relates to a display apparatus. The display apparatus according to an embodiment of the present invention may comprise: at least one display unit provided with a magnet and having flexible material; and an installation frame to which the display unit is attached from the front by using magnetic force of the magnet. The installation frame may include: a base layer having a first density; a film adhered to the base layer; and a magnetic material layer adhered to the film and having a second density greater than the first density.

Abstract: A display device is disclosed. The display device includes a first substrate, a frame positioned in the rear of the first substrate, a second substrate opposite the first substrate and positioned between the first substrate and the frame, the second substrate having an area less than an area of the first substrate, and a member layer electrically connected to the first substrate and extended toward the frame.

Abstract: A display device includes a backlight module; a display module located on a light exiting side of the backlight module; and a housing accommodating the backlight module and the display module. The display module includes a display panel including an array substrate and a color film substrate arranged opposite to each other. The color film substrate is located between the array substrate and the backlight module. A first polarizer located on one side of the array substrate away from the color film substrate. A manufacturing method of a display device is also provided.

Abstract: A portable radio includes a housing having a front display. The front display includes a liquid crystal display structure, a first layer of touch panel rear glass disposed exterior to the liquid crystal display structure, and a second layer of touch panel front glass disposed exterior to the first layer of touch panel rear glass. The second layer of touch panel front glass provides a viewable surface and user interface. The front display also includes a vacuum layer disposed between the first layer of touch panel rear glass and the second layer of touch panel front glass, and a plurality of spacers disposed in the vacuum layer that maintain a gap. The front display also includes a seal that at least partially seals and maintains a vacuum within the vacuum layer.

Abstract: Disclosed is an LCD device which realizes decreased thickness, simplified process, and decreased cost by using a common electrode for formation of electric field to drive liquid crystal as a sensing electrode, and removing a touch screen from an upper surface of the liquid crystal panel, the LCD device comprising gate and data lines crossing each other to define plural pixels on a lower substrate; a pixel electrode in each of the plural pixels; plural common electrode blocks patterned at the different layer from the pixel electrode, wherein the common electrode blocks, together with the pixel electrode, forms an electric field, and senses a user's touch; and plural sensing lines electrically connected with the common electrode blocks, wherein, if the sensing line is electrically connected with one of the common electrode blocks, the sensing line is insulated from the remaining common electrode blocks.

Abstract: A display device is provided. The display device includes a backlight module with a reverse prism structure disposed on top, and a display module disposed above the backlight module. The display module includes a display panel and a sensor component. The sensor component is embedded in the display panel. The sensor component includes a plurality of sensors. A plurality of diffraction gratings are disposed on surfaces of the plurality of sensors. A grating direction of the plurality of diffraction gratings is perpendicular to a grating direction of the reverse prism structure.

Abstract: According to one embodiment, a display device includes a display panel including a first substrate including a first transparent substrate having a first main surface, a first opposite and a side surface, a second substrate including a second transparent substrate having a second main surface and a second opposite surface, and a liquid crystal layer located between the first substrate and the second substrate, a light emitting element opposed to the side surface, a third transparent substrate, and a transparent layer located between the display panel and the third transparent substrate and having a second refractive index that is lower than a first refractive index.

Abstract: According to one embodiment, a display device includes a first substrate, a second substrate, a through hole, and a facing area. The facing area includes a display area and a frame area. The second substrate includes a light-shielding layer and a colored layer. The light-shielding layer includes a first groove formed in a closed annular shape along the through hole and penetrating from the first substrate toward the second substrate. The colored layer is located in the first groove and is provided in an entire area of the first groove in a planar view.

Abstract: A display device and an electronic apparatus are disclosed. The display device includes a display panel and two polarizers. At least one polarizer includes: a body defining an opening corresponding to a camera; and a magnetic orientation unit that is arranged corresponding to the opening and that includes magnetic bars and an orientation control unit used to generate a magnetic field after being energized to control rotation of the magnetic bars. When the orientation control unit is energized, the magnetic bars are rotated and arranged regularly forming an oriented slit perpendicular to the oriented slit of the opposite polarizer, so that the region corresponding to the camera is in an opaque state. When the orientation control unit is not energized, the magnetic bars are arranged disorderly and not perpendicular to the oriented slit of the opposite polarizer, so that the region corresponding to the camera is in a light-transmitting state.

Abstract: According to one embodiment, an illumination device includes a wiring substrate, light emitting elements, a projection, and a protective layer. The main surface of the wiring substrate is divided into segment regions. Each of the segment regions is provided with n of the light emitting elements. N is greater than 1. The light emitting elements are independently driven in units of the segment regions. The protective layer is configured to protect the light emitting elements. The upper surface of the protective layer is located on the main surface side from the highest part of the projection.

Abstract: A backlight assembly and its formation method, and a display apparatus are provided in the present disclosure. The formation method includes a circuit board; a plurality of light-emitting elements, disposed at a side of the circuit board; and a light guide element, configured to transmit light emitted from the plurality of light-emitting elements to a display element according to a preset light-guiding path. The backlight assembly transmits the light emitted from the light-emitting elements to the display element according to the preset light-guiding path through the light guide element, which improves the utilization rate of the light emitted from the light-emitting elements and emits higher brightness backlight through relatively low energy consumption.

Abstract: A reflective display tile can be used in connection with a static or video display. The tile includes a transparent substrate having a front surface, a rear surface, and a peripheral edge surrounding the front and rear surfaces, an electrostatic shutter array disposed at the front surface of said substrate, a reflective medium disposed at the rear surface of the substrate, and drive electronics disposed rearward of the reflective medium. The shutter array and drive electronics are configured so that the tile is tileable and can be abutted at any of its peripheral edges against identical tiles to form a display with substantially no perceived optical interface between adjacent tiles. Another embodiment includes an opaque substrate such as a circuit board. A further embodiment has a polymeric film coated on one side with a metal film and on another side with ink or blackening material.

Abstract: A display apparatus is provided, including at least one viewing angle limiting device, a display panel, and a light polarization converter disposed between the at least one viewing angle limiting device and the display panel. The light polarization converter includes first regions and second regions alternately arranged. Light beams passing through the first regions and the second regions respectively have a first light polarization direction and a second light polarization direction. The light polarization converter is overlapped with the at least one viewing angle limiting device and the display panel. The viewing angle limiting device includes light-absorbing molecules. The light-absorbing molecules have a first absorption coefficient in a thickness direction of the viewing angle limiting device and a second absorption coefficient in a direction perpendicular to the thickness direction. A ratio of the first absorption coefficient to the second absorption coefficient is greater than 1.

Abstract: A display apparatus includes a substrate, an insulating layer, an alignment film, and a sealant. The insulating layer is disposed on the substrate and with a plurality of grooves. The alignment film is disposed on the insulating layer. The sealant is disposed on the alignment film. Wherein, the sealant overlaps at least a portion of the plurality of grooves. In a predetermined unit region, the side length of the predetermined unit region is a maximum width X of the sealant, and a total side length of the portions of the plurality of grooves located in the predetermined unit region is greater than 8 times of the maximum width X.

Abstract: The disclosure provides a display device and a method for manufacturing the same. The display device includes: an array substrate, an opposite substrate and a liquid crystal layer between the array substrate and the opposite substrate. The array substrate includes a first base, and a first electrode and a second electrode of each of the plurality of sub-pixels, the first electrode and the second electrode being located on a side of the first base proximal to the liquid crystal layer; and the opposite substrate includes: a second base and an interference electrode of each of the sub-pixels, the interference electrode is located on a side of the second base proximal to the liquid crystal layer, orthographic projections of the interference electrode of each sub-pixel and the second electrode of said each sub-pixel on the first base at least partially overlaps.

Abstract: A waveplate is provided. The waveplate includes a first liquid crystal (“LC”) layer including LC molecules that are in-plane switchable by an external field to switch the waveplate between states of different phase retardances. The waveplate includes a second LC layer and a third LC layer sandwiching the first LC layer. Azimuthal angles of effective refractive index ellipsoids of the second LC layer and the third LC layer are different.

Abstract: An electro-optical device includes: a liquid crystal panel; a particle aligned type anisotropic conductive film having a plurality of electrically conductive particles that are arranged in a state of being aligned along a first direction and a second direction intersecting with the first direction; and a printed circuit board coupled to a connection terminal portion of the liquid crystal panel via the particle aligned type anisotropic conductive film, wherein the connection terminal portion includes a plurality of connection terminals, a plurality of recessed portions that are arranged in a state of being aligned along a third direction and a fourth direction intersecting with the third direction are formed on a surface of the connection terminal, and at least one of the first direction and the second direction along which the electrically conductive particles are arranged is different in arrangement direction from both the third direction and the fourth direction.

Abstract: The present invention provides a display panel and a manufacturing method Thereof. The display panel includes a plurality of sub-pixel regions distributed in an array. Each of the sub-pixel regions includes a primary pixel region and a secondary pixel region arranged adjacently. Each of the sub-pixel regions is provided with a color resist. The color resist disposed in the secondary pixel region is provided with a first hollowed-out portion, so that a thickness of the color resist disposed in the secondary pixel region is less than a thickness of the color resist disposed in the corresponding primary pixel region, and brightness of the secondary pixel region is less than brightness of the corresponding primary pixel region.

Abstract: A display device includes a display area, a frame area surrounding the display area, a plurality of pixel circuit in the display area, a peripheral circuit in the frame area, and wirings connecting the pixel circuit and the peripheral circuit, wherein the peripheral circuit incudes a plurality of switch circuits along a direction away from the display area, a plurality of relay electrodes between the display area and the plurality of switch circuits, and a plurality of connecting wirings connecting each of the plurality of relay electrodes and each of the plurality of switch circuits, and the plurality of relay electrodes is connected to the wirings, and one of the plurality of connecting wirings connecting one of the plurality of switch circuits and one of the plurality of relay electrodes intersects at least one of the other plurality of switch circuits in a plan view.

Abstract: A display panel includes a first substrate; a scan line and a data line disposed on the first substrate and extending in a first direction and a second direction, respectively, wherein the data line intersects the scan line; a polysilicon layer disposed on the first substrate. In a top view, the polysilicon layer includes: a first channel region overlapping a portion of the scan line; a second channel region overlapping another portion of the scan line; a non-channel region not overlapping the scan line and connected between the first channel region and the second channel region; a long region extended in the second direction; wherein a portion of the non-channel region extends in the first direction, the portion has a first width in the second direction, the long region has a second width in the first direction, and the first width is greater than the second width.

Abstract: Provided is a display device. The display device comprises: a substrate including a display area having a plurality of pixels and a non-display area, a plurality of data lines connected to each of the plurality of pixels and extending in a first direction, a plurality of first gate lines connected to each of the plurality of pixels and extending in a second direction crossing the first direction, a plurality of second gate lines extending along the first direction from one end of the display area to a line contact portion contacting each of the plurality of first gate lines, and a plurality of off voltage lines extending in a direction opposite to the first direction from the other end of the display area opposite to one end of the display area to a periphery of the line contact portion and insulated from the plurality of second gate lines.

Abstract: Example display devices include a waveguide configured to propagate visible light under total internal reflection in a direction parallel to a major surface of the waveguide. The waveguide has formed thereon an outcoupling element configured to outcouple a portion of the visible light in a direction normal to the major surface of the waveguide. The example display devices additionally include a polarization-selective notch reflector disposed on a first side of the waveguide and configured to reflect visible light having a first polarization while transmitting the portion of the visible light having a second polarization. The example display devices further include a polarization-independent notch reflector disposed on a second side of the waveguide and configured to reflect visible light having the first polarization and the second polarization, where the polarization-independent notch reflector is configured to convert a polarization of visible light reflecting therefrom.

Abstract: A non-light-emitting variable transmission device can include an active stack; a transparent conductive layer overlying the active stack; an antireflective layer overlying the transparent conductive layer and defining a hole; and a bus bar comprising a conductive tape that extends into the hole and contacts the transparent conductive layer. Proper selection of materials and design of a bus bar can allow an electrical connection to be made to the transparent conductive layer without the need to cut an underlying transparent conductive layer. A method of forming the non-light-emitting variable transmission device can include patterning the antireflective layer to define the hole that extends to the transparent conductive layer. Improved control in patterning allows the antireflective layer to be relatively thin and not remove too much of the underlying transparent conductive layer.

Abstract: Disclosed is a terminal, including: a display screen including a sensor area, the sensor area being a transparent display area on the display screen; a sensor disposed below the display screen, the sensor having a photosensitive portion; and a color-changing layer above the display screen, where the photosensitive portion of the sensor is within a first orthographic projection range of the sensor area, and the sensor area is within a second orthographic projection range of the color-changing layer; the transparent display area is transparent when the sensor is in operation; and the color-changing layer is configured to switch between a colorless state and a colored state.

Abstract: An optical coupler includes a first waveguide including a first multi-mode waveguide section having a cross-section characterized by a first height and a first width that is greater than the first height and a second waveguide including a second multi-mode waveguide section having a cross-section characterized by a second height and a second width that is greater than the second height. The first multi-mode waveguide section is positioned adjacent to the second multi-mode waveguide section at least partially above or below the second multi-mode waveguide so that light entering the first multi-mode waveguide section is coupled from the first multi-mode waveguide section to the second multi-mode waveguide section. Methods for coupling light between waveguides with the optical coupler and optical devices that include the optical coupler are also described.

Abstract: Integrated Optical Phased Array device is a good potential solution for the solid-state LIDAR technology in the application of autonomous driving technique. However, some difficulties still limit the development of OPA devices, one of them is the conflict between the requirement of fewer units in the phase-tuning system and more elements in the emitting system. The present disclosure provides an approach of a Phase-Combining Waveguide Doubler (PCWD) to address this issue. This device can double the waveguide number without any phase mismatch. It enables the capability to control 2N?1 emitting elements with N phase shifters. The device is competitive to any grating coupler array based or end-fire based emitting method, which can potentially satisfy the requirement of a sub-wavelength pitch.

Abstract: A camera assembly can include a housing that includes a front side that includes a front side perimeter, a back side that includes a back side perimeter, and a surface that extends between the front side and the back side; a camera that includes a front side aperture; a front side illumination light; and a status light.

Abstract: A driving mechanism for an optical element is provided, including a fixed portion, a movable portion, a first driving assembly, and a positioning assembly. The movable portion is movably disposed on the fixed portion, and includes an optical element. The first driving assembly is at least partially disposed on the fixed portion, and drives the optical element to move in a first direction. The positioning assembly is disposed on the fixed portion or the movable portion, wherein the positioning assembly limits the movable part to a first terminal position or a second terminal position relative to the fixed portion.

Abstract: An optical imaging apparatus capable of focusing is provided. The apparatus includes a lens assembly and an imaging sensing component. The lens group includes a stabilization component and a focusing component. The stabilization component has an optical axis and includes a first optical lens group and a driving element. The driving element is configured to drive the first optical lens group to move on a plane perpendicular to the optical axis or to rotate around the optical axis. The focusing component is fixed to the stabilization component and includes a second optical lens group. The second optical lens group is aligned with the optical axis. The image sensing component is fixed to one end of the lens group and is aligned with the optical axis.

Abstract: An automatic focus apparatus for a camera module includes a voice coil motor and a driving unit. The voice coil motor includes a frame, a moving member with a lens, and a magnetic member. The magnetic member is positioned at a side wall of the moving member, the driving unit is positioned at a side plate of the frame. A magnetic field is generated by the driving unit and the magnetic member, the magnetic field drives the moving member with the lens to move, to achieve automatic focus.

Abstract: An electronic device includes a body frame formed by mating first to third members. The first and second members each include first to third mating surfaces. The first and second mating surfaces face corresponding surfaces in a first direction and the third mating surfaces face each other in a second direction orthogonal to the first direction. The first to third members each include fourth to sixth mating surfaces. Between the first and second members and the third member, the fourth and fifth mating surfaces face corresponding surfaces in a third direction orthogonal to the first and second directions, and the sixth mating surfaces face each other in the second direction. Microstructures for a liquid repellency are provided on at least one of the first to third mating surfaces and at least one of the fourth to sixth mating surfaces.

Abstract: A camera module includes a first lens barrel configured to receive one or more lens groups, a second lens barrel coupled to the first lens barrel and configured to support a front lens disposed on an object side of the one or more lens groups, an energy generating unit configured to contact the second lens barrel and configured to supply thermal energy to the second lens barrel, and a barrel holder coupled to the first lens barrel and configured to accommodate the energy generating unit.

Abstract: A trigger weight camera device that is retrofittable to existing equipment to image underwater objects and underwater processes, and method of using the device to image the underwater objects and the underwater processes, and operate as a trigger weight for the existing equipment.

Abstract: A camera housing having a first housing portion that forms a first portion of a cavity to receive a camera and a second housing portion. The second housing portion that forms a second portion of the cavity to receive the camera. A hinge movably connecting the first housing portion to the second housing portion so that the second housing portion is movable relative to the first housing portion to expose the cavity. Fastening structures configured to connect the first housing portion to the second housing portion when the camera housing is in a closed position, wherein one of the fastening structures include a first latch component and a second latch component. The first latch component connected to the first housing portion.

Abstract: An image reading apparatus includes a placement board, a camera that captures an image of a subject placed on the placement board, a first holding member to which the camera is fixed, a second holding member that is fixed to the placement board, and a fixing portion that fixes the first holding member to the second holding member, wherein a sliding surface along a spherical surface is formed on one of the first holding member and the second holding member, three contact points disposed at three different positions respectively are formed on the other one of the first holding member and the second holding member, the first holding member is rotatably supported about three axes by the second holding member as a result of the three contact points coming into contact with the sliding surface, and the camera is disposed inside the spherical surface.

Abstract: A camera assembly is configured to be worn on clothing. The camera assembly has a camera body further comprising at least one camera lens arranged against a front plate. At least one front plate magnet cavity and at least one front plate pin cavity are arranged on the front plate. At least one front plate magnet is arranged into the at least one front plate magnet cavity. At least one pin is arranged into the at least one front plate pin cavity. A rear body is configured to be arranged inside of the clothing. A rear plate is joined to the rear body. At least one rear plate magnet cavity and at least one rear plate pin cavity are arranged on the rear plate. The pin is inserted into the at least one rear plate pin cavity joining the camera body to the clothing.

Abstract: A projection device includes at least one heat source and a heat dissipation module. The heat dissipation module is connected to the heat source and is configured to dissipate heat energy generated by the heat source. The heat dissipation module includes a tank, at least one radiator, at least one cold plate, a cooling fluid, and a connection pipe. The connection pipe connects the tank, the radiator, and the cold plate, so that the cooling fluid flows in the heat dissipation module. The tank includes a pressure sensing device configured to measure a liquid level of the cooling fluid in the tank. Also, a tank is provided. The projection device provided in the disclosure can learn the liquid level of the tank in real-time, and the design cost is low.

Abstract: A projector includes a first cooling target and a cooling device. The cooling device includes a first compressor configured to compress working fluid in a gas phase, a condenser configured to condense the working fluid in the gas phase into the working fluid in a liquid phase, a first expander configured to decompress the working fluid in the liquid phase, a first evaporator configured to change the working fluid flowed from the first expander to the working fluid in the gas phase with heat of a first cooling target and discharge the changed gas-phase working fluid to the first compressor, a first pipe connecting the first compressor and the condenser, a second pipe connecting the condenser and the first expander, and a base to which the first compressor, the condenser, and the first expander are fixed. The first pipe and the second pipe are provided in the base.

Abstract: An illumination system includes first laser light sources, second laser light sources, an optical module, and a light homogenizing element. The first and second laser light sources respectively provide first and second beams. A light spot area formed when the second beams are emitted is different from that formed when the first beams are emitted. The optical module converts the first beams into spot-expanding beams which form a light spot area different from that of the first beams. The light homogenizing element includes a light incident face disposed on transmission paths of the second beams and the spot-expanding beams. A difference between light spot areas formed by the second beams and the spot-expanding beams on the light incident face is less than a difference between light spot areas formed when the second beams and the first beams are emitted. A projection apparatus having the illumination system is further disclosed.

Abstract: A wavelength conversion module includes a ceramic substrate, a wavelength conversion layer, and a plurality of colloidal bosses. The ceramic substrate has a first surface. The wavelength conversion layer is disposed on the first surface of the ceramic substrate. The colloidal bosses are separately from each other disposed on the ceramic substrate and at least located on the first surface. The colloidal bosses and the wavelength conversion layer are separated from each other, and a heat resistant temperature of the colloidal bosses is higher than 500 degrees. The above wavelength conversion module has favorable heat dissipation effect.

Abstract: A light source unit includes a first light emitting device configured to emit light in a first wavelength range, a luminescent wheel comprising a luminescent light emitting area configured to emit luminescent light that is excited by the light in the first wavelength range as light in a second wavelength range, and a color wheel onto which the light in the first wavelength range and the light in the second wavelength range are shined. A filter selects a part of the wavelength from the shined light in the first wavelength range and the light in the second wavelength range. A wheel surface of the color wheel is inclined with respect to axes of the light in the first wavelength range and the light in the second wavelength range.

Abstract: An illumination system and a projection apparatus are provided. The illumination system includes an excitation light source, a light guiding element, a filter module, an optical wavelength conversion module, and a homogenizing element. The light guiding element reflects an excitation beam coming from the excitation light source. The filter module includes a filtering region and receives the excitation beam reflected by the light guiding element. The optical wavelength conversion module includes a wavelength conversion region, receives the excitation beam reflected by the filtering region and reflects a conversion beam converted from the excitation beam. The conversion beam forms at least one color beam after passing through the filtering region of the filter module. The homogenizing element receives the excitation beam coming from the filter module and the at least one color beam. An incident angle of the excitation beam on the light guiding element is ?1, and ?1>0°.

Abstract: A process proximity correction method is performed by a process proximity correction computing device which performs a process proximity correction (PPC) through at least one of a plurality of processors. The process proximity correction method includes: converting a target layout including a plurality of patterns into an image, zooming-in or zooming-out the image at a plurality of magnifications to generate a plurality of input channels, receiving the plurality of input channels and performing machine learning to predict an after-cleaning image (ACI), comparing the predicted after-cleaning image with a target value to generate an after-cleaning image error, and adjusting the target layout on the basis of the after-cleaning image error.

Abstract: An apparatus for removing a pellicle frame from a photomask includes a heater configured to soften an adhesive between the pellicle frame and the photomask; a shower head including a plate, a central region of the plate is configured to overlap with a pattern area of the photomask, and a periphery region of the plate is configured to provide a flow from the periphery region of the plate toward the pellicle frame and the adhesive; and a gripper configured to secure the pellicle frame against the flow and remove the adhesive and the pellicle frame from the photomask. A method of removing a pellicle frame, includes providing a plate overlapped with a pattern area of the photomask; providing a flow from the plate toward the pellicle frame and an adhesive; securing the pellicle frame; soften the adhesive; and leveraging the pellicle frame to remove the adhesive and the pellicle frame.