Shape Defined By A Solid Member Other Than Seed Or Product (e.g., Bridgman-stockbarger) Patents (Class 117/223)
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Publication number: 20080075941Abstract: A method and apparatus for the production of C-plane single crystal sapphire is disclosed. The method and apparatus may use edge defined film-fed growth techniques for the production of single crystal material exhibiting low polycrystallinity and/or low dislocation density.Type: ApplicationFiled: September 21, 2007Publication date: March 27, 2008Inventors: Vitali Tatartchenko, Christopher D. Jones, Steven Anthony Zanella, John W. Locher, Fery Pranadi
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Patent number: 7344596Abstract: To reduce the heat input to the bottom of the crucible and to control heat extraction independently of heat input, a shield can be raised between a heating element and a crucible at a controlled speed as the crystal grows. Other steps could include moving the crucible, but this process can avoid having to move the crucible. A temperature gradient is produced by shielding only a portion of the heating element; for example, the bottom portion of a cylindrical element can be shielded to cause heat transfer to be less in the bottom of the crucible than at the top, thereby causing a stabilizing temperature gradient in the crucible.Type: GrantFiled: August 25, 2005Date of Patent: March 18, 2008Assignee: Crystal Systems, Inc.Inventors: Frederick Schmid, Chandra P. Khattak, David B. Joyce
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Patent number: 7220311Abstract: A crystal growth method of a group III nitride includes the steps of forming a melt mixture of an alkali metal and a group III element in a reaction vessel, and growing a crystal of a group III nitride formed of the group III element and nitrogen from the melt mixture in the reaction vessel, wherein the step of growing the crystal of the group III nitride is conducted while controlling an increase rate of degree of supersaturation of a group III nitride component in the melt mixture in a surface region of the melt mixture.Type: GrantFiled: November 7, 2003Date of Patent: May 22, 2007Assignee: Ricoh Company, Ltd.Inventors: Hirokazu Iwata, Seiji Sarayama
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Patent number: 7214271Abstract: A silicon single crystal wafer process apparatus (10) having: a process chamber (11); a susceptor (12) which is disposed in the process chamber (11), and on an upper surface of which the silicon single crystal wafer (19) is placed; and a lift pin (14) which is provided to be capable of a going up and down operation with respect to the susceptor (12), for attaching or detaching the silicon single crystal wafer (19) to or from the susceptor (12) with the going up and down operation, in a state to support the silicon single crystal wafer (19) from a lower surface side, wherein the lift pin (14) is subjected to polishing on a contact end surface (14d) which contacts with a rear surface of the silicon single crystal wafer (19).Type: GrantFiled: September 25, 2002Date of Patent: May 8, 2007Assignee: Shin-Etsu Handotai Co., Ltd.Inventors: Ryuji Kono, Shoichi Takamizawa
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Patent number: 7125453Abstract: A capsule for containing at least one reactant and a supercritical fluid in a substantially air-free environment under high pressure, high temperature processing conditions. The capsule includes a closed end, at least one wall adjoining the closed end and extending from the closed end; and a sealed end adjoining the at least one wall opposite the closed end. The at least one wall, closed end, and sealed end define a chamber therein for containing the reactant and a solvent that becomes a supercritical fluid at high temperatures and high pressures. The capsule is formed from a deformable material and is fluid impermeable and chemically inert with respect to the reactant and the supercritical fluid under processing conditions, which are generally above 5 kbar and 550° C. and, preferably, at pressures between 5 kbar and 80 kbar and temperatures between 550° C. and about 1500° C.Type: GrantFiled: January 31, 2002Date of Patent: October 24, 2006Assignee: General Electric CompanyInventors: Mark Philip D'Evelyn, Kristi Jean Narang, Robert Arthur Giddings, Steven Alfred Tysoe, John William Lucek, Suresh Shankarappa Vagarali, Robert Vincent Leonelli, Jr., Joel Rice Dysart
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Patent number: 7048799Abstract: The device according to the present invention comprises a furnace (10) provided with heating means allowing said material to be crystallised to be rendered liquid, then to be cooled until it progressively solidifies. The device also comprises reception means (20) of the material (21) disposed in the furnace, fixed relative to the furnace and situated such that the material is in the intermediary zone. The heating means (11, 12, 13) supply three heating zones: a hot zone (16), an intermediary zone (15) and a cold zone (14). Thermally conductive means (17) are disposed between the reception means (20) and the heating means (11, 12, 13) and extend from the cold zone as far as the hot zone.Type: GrantFiled: June 25, 2002Date of Patent: May 23, 2006Assignee: Commissariat a l'Energie AtomiqueInventor: Gérard Petroz
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Patent number: 7001462Abstract: A method of making an oriented fluoride crystal blank for transmitting below 250 nm ultraviolet light includes irradiating a fluoride crystal blank with an x-ray beam, detecting the x-ray beams diffracted from the fluoride crystal blank, generating a diffraction pattern from the x-ray beam diffracted from the fluoride crystal blank, determining an angular deviation of an optical axis of the fluoride crystal blank from a specific crystallographic direction, and, if the angular deviation is not within a predefined range, modifying the fluoride crystal blank in a manner such that that the resultant angular deviation between the optical axis of the fluoride crystal blank from the specific crystallographic direction after modifying falls within the predefined range.Type: GrantFiled: March 5, 2003Date of Patent: February 21, 2006Assignee: Corning IncorporatedInventors: Michael L. Genier, Richard S. Priestley, Rebecca S. Retherford
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Patent number: 6949140Abstract: A group-III nitride crystal growth method, comprising the steps of: a) preparing a mixed molten liquid of an alkaline metal and a material at least comprising a group-III metal; b) growing a group-III nitride crystal of the group-III metal and nitrogen from the mixed molten liquid and a material at least comprising nitrogen; and c) setting a predetermined crystal growth condition according to a zone defined by a pressure and a temperature in said step b).Type: GrantFiled: December 3, 2002Date of Patent: September 27, 2005Assignee: Ricoh Company, Ltd.Inventors: Seiji Sarayama, Hirokazu Iwata, Masahiko Shimada, Hisanori Yamane, Masato Aoki
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Patent number: 6942730Abstract: This invention provides a hybrid Stockbarger zone-leveling melting method for seeded crystallization and the manufacture of homogenous large-sized crystals of lead magnesium niobate-lead titanate (PMN-PT) based solid solutions and related piezocrystals. The invention provides three temperature zones resulting in increased compositional homogeneity and speed of crystal growth, in a cost effective multi-crucible configuration.Type: GrantFiled: November 4, 2002Date of Patent: September 13, 2005Assignee: H. C. Materials CorporationInventor: Pengdi Han
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Patent number: 6896729Abstract: Group III-V, II-VI and related monocrystalline compounds are grown with a rigid support of a sealed ampoule, carbon doping and resistivity control, and thermal gradient control in a crystal growth furnace. A support cylinder provides structural support for the combined sealed ampoule crucible assembly, while low-density insulating material inside the support cylinder deters convection and conduction heating. Radiation channels penetrating the low-density material provide pathways for radiation heating into and out of the seed well and transition regions of the crystal growth crucible. A hollow core in the insulation material directly beneath the seed well provides cooling in the center of the growing crystal, which enables uniform, level growth of the crystal ingot and a flat crystal-melt interface which results in crystal wafers with uniform electrical properties.Type: GrantFiled: July 3, 2002Date of Patent: May 24, 2005Assignee: AXT, Inc.Inventors: Xiao Gordon Liu, Wei Guo Liu
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Patent number: 6875275Abstract: A production apparatus for producing a crystal includes a crucible divided into a plurality of stages, each stage containing a crystal precursor material, and a heater arranged to heat the crucible. The crucible has formed therein a degassing hole in a side wall portion thereof for discharging an impurity gas produced when refining the crystal precursor material by adding a scavenger thereto, and a lower portion of a first stage of the plurality of stages is positioned to cover an upper edge of a wall portion of a second stage of the plurality of stages. The overall height of the plurality of stages is 10 mm to 50 mm, the degassing hole has a diameter of 1 mm to 5 mm, and a fluoride crystal is formed from the crystal precursor material.Type: GrantFiled: March 27, 1998Date of Patent: April 5, 2005Assignee: Canon Kabushiki KaishaInventor: Toshio Ichizaki
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Patent number: 6800137Abstract: Reactive gas is released through a crystal source material or melt to react with impurities and carry the impurities away as gaseous products or as precipitates or in light or heavy form. The gaseous products are removed by vacuum and the heavy products fall to the bottom of the melt. Light products rise to the top of the melt. After purifying, dopants are added to the melt. The melt moves away from the heater and the crystal is formed. Subsequent heating zones re-melt and refine the crystal, and a dopant is added in a final heating zone. The crystal is divided, and divided portions of the crystal are re-heated for heat treating and annealing.Type: GrantFiled: March 4, 2002Date of Patent: October 5, 2004Assignee: Phoenix Scientific CorporationInventor: Kiril A. Pandelisev
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Patent number: 6673150Abstract: The invention provides a method of making UV<200 nm transmitting optical fluoride crystals for excimer laser lithography optics and a multicompartment container for growing optical fluoride crystals, comprising a number of graphite bowls that are placed on top of one another to form a stack and which have a central conical orifice in the bottom of each of them, and also comprising a seeding unit that has a central cylindrical orifice and is arranged under the lowermost bowl, characterized in the each bowl is fitted with a heat-removing device that is made in the form of a graphite cylinder with a central conical orifice, is mounted under the bottom of each bowl, and adjoins, with its other surface, the cover of the next bowl down, in which design the cover of each bowl, apart from the uppermost one, has a central conical orifice.Type: GrantFiled: April 16, 2002Date of Patent: January 6, 2004Assignee: Corning IncorporatedInventors: Evgeny A. Garibin, Aleksey A. Demidenko, Boris I. Kvashnin, Igor A. Mironov, Gury T. Petrovsky, Vladimir M. Reyterov, Aleksandr N. Sinev
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Patent number: 6592663Abstract: A method of making a bulk crystal substrate of a GaN single crystal includes the steps of forming a molten flux of an alkali metal in a reaction vessel and causing a growth of a GaN single crystal from the molten flux, wherein the growth is continued while replenishing a compound containing N from a source outside the reaction vessel.Type: GrantFiled: June 8, 2000Date of Patent: July 15, 2003Assignee: Ricoh Company Ltd.Inventors: Seiji Sarayama, Masahiko Shimada, Hisanori Yamane, Hirokazu Iwata
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Patent number: 6562133Abstract: A crucible having an inner surface is not wetted by a melt which shrinks when it solidifies is provided with indentations in the walls of the crucible to support an ingot grown in it. Supporting the crystal provides a gap between the bottom of the ingot and the inner surface of the bottom of the crucible. The gap allows more uniform heat transfer from the bottom of the crucible than is provided when there is no gap; the gap provides a controllable temperature gradient between the interior and exterior of the crucible. To direct propagation of the growth of a macrocrystal the bottom of the crucible is provided with at least one set of multiple grooves in parallel relationship with each other. Preferably a second set of multiple grooves in parallel relationship with each other intersect the grooves of the first set at an angle chosen depending upon the lattice structure of the macrocrystal to be grown. A macrocrystal grown in a crucible with twin sets of angulated grooves produces single crystals.Type: GrantFiled: July 12, 2001Date of Patent: May 13, 2003Inventor: Carl Francis Swinehart
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Patent number: 6423136Abstract: A crucible having an inner surface which is not wetted by a melt which shrinks when it solidifies, is provided with indentations in its walls, the indentatons located remote from its rim. The indentations are located beneath a lateral plane through the walls of the crucible, at about two-thirds (66.6%) of the vertical height of the walls, measured from the floor of the crucible, support an ingot grown in it. Supporting the crystal provides a gap between the bottom of the ingot and the inner surface of the bottom of the crucible. The gap allows more uniform heat transfer from the bottom of the crucible than is provided when there is no gap; the gap provides a controllable temperature gradient between the interior and exterior of the crucible. To direct propagation of the growth of a macrocrystal, the bottom of the crucible is provided with at least one set of multiple grooves in parallel relationship with each other.Type: GrantFiled: January 30, 2001Date of Patent: July 23, 2002Inventor: Carl Francis Swinehart
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Patent number: 6402840Abstract: Crystal grower and purification stations immersed within crystal growing furnaces have preparation chambers with circular, elliptical, rectangular or polygonal cross-sections. A lateral heater and a base heater are connected for immersion mounting within the preparation chamber. A porous distributor is mounted above the base heater for immersion within the chamber. An opening or openings in a bottom of the chamber releases crystal material to a crucible or crucibles. A lid mounted on the chamber closes the chamber and forms an enclosed chamber with a closed environment. A crystal material supply, a dopant supply and a reduced pressure exhaust line are connected to the chamber. A purification substance supply is connected to the chamber with fluid purification substances supplied to the porous distributor. An external heater surrounds the chamber for heating the chamber and its contents. Insulation surrounds the external heater. An enclosure surrounds the insulation.Type: GrantFiled: September 9, 1999Date of Patent: June 11, 2002Assignee: Optoscint, Inc.Inventor: Kiril A. Pandelisev
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Patent number: 6352588Abstract: For producing ultra pure materials a first station has a porous gas distributor. A material supply supplies material to the porous gas distributor. A gas source supplies gas to the distributor and through the distributor to the material in contact with the distributor. A heater adjacent the porous gas distributor heats and melts the material as gas is passed through the material. Dopant and a treatment liquid is or solid supplied to the material. Treated material is discharged from the first station into a second station. A second porous gas distributor in the second station distributes gas through the material in the second station. A crucible receives molten material from the second station for casting, crystal growing in the crucible or for refilling other casting or crystal growth crucibles. The material and the porous gas distributor move with respect to each other. One porous gas distributor is cylindrical and is tipped.Type: GrantFiled: February 16, 2000Date of Patent: March 5, 2002Assignee: Optoscint, Inc.Inventor: Kiril A. Pandelisev
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Patent number: 6344085Abstract: A device for producing a silicon carbide (SiC) single crystal contains a crucible having a storage region for holding a stock of solid SiC and having a crystal region for holding a SiC seed crystal. An insert made from glassy carbon is disposed in the crucible. In the method, solid SiC is sublimed as a result of the stock being heated and SiC in the gas phase is generated, which is conveyed to the SiC seed crystal, on which it grows as an SiC single crystal. A heat flux is controlled by an insert made from glassy carbon.Type: GrantFiled: January 16, 2001Date of Patent: February 5, 2002Assignee: Siemens AktiengesellschaftInventors: Harald Kuhn, Roland Rupp, Rene Stein, Johannes Völkl
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Patent number: 6334899Abstract: Reactive gas is released through a crystal source material or melt to react with impurities and carry the impurities away as gaseous products or as precipitates or in light or heavy form. The gaseous products are removed by vacuum and the heavy products fall to the bottom of the melt. Light products rise to the top of the melt. After purifying, dopants are added to the melt. The melt moves away from the heater and the crystal is formed. Subsequent heating zones re-melt and refine the crystal, and a dopant is added in a final heating zone. The crystal is divided, and divided portions of the crystal are re-heated for heat treating and annealing.Type: GrantFiled: August 18, 2000Date of Patent: January 1, 2002Assignee: Optoscint, Inc.Inventor: Kiril A. Pandelisev
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Patent number: 6200385Abstract: A crucible 40 having an inner surface 42 not wetted by a melt which shrinks when it solidifies is provided with indentations 41 in the walls of the crucible to support an ingot grown in it. Supporting the crystal provides a gap between the bottom of the ingot 44 and the inner surface of the bottom of the crucible. The gap allows more uniform heat transfer from the bottom of the crucible than is provided when there is no gap; the gap provides a controllable temperature gradient between the interior and exterior of the crucible. To direct propagation of the growth of a macrocrystal, the bottom of the crucible is provided with at least one set of multiple grooves in parallel relationship with each other. Preferably a second set of multiple grooves in parallel relationship with each other intersect the grooves of the first set at an angle chosen depending upon the lattice structure of the macrocrystal to be grown. A macrocrystal grown in a crucible with twin sets of angulated grooves produces single crystals.Type: GrantFiled: March 20, 2000Date of Patent: March 13, 2001Inventor: Carl Francis Swinehart
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Patent number: 6153011Abstract: Reactive gas is released through a crystal source material or melt to react with impurities and carry the impurities away as gaseous products or as precipitates or in light or heavy form. The gaseous products are removed by vacuum and the heavy products fall to the bottom of the melt. Light products rise to the top of the melt. After purifying, dopants are added to the melt. The melt moves away from the heater and the crystal is formed. Subsequent heating zones re-melt and refine the crystal, and a dopant is added in a final heating zone. The crystal is divided, and divided portions of the crystal are re-heated for heat treating and annealing.Type: GrantFiled: February 16, 2000Date of Patent: November 28, 2000Assignee: Optoscint, Inc.Inventor: Kiril A. Pandelisev
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Patent number: 6120602Abstract: An apparatus and a method for producing single crystal semiconductor particulate in near spherical shape and the particulate product so formed is accomplished by producing uniform, monosized, near spherical droplets; identifying the position of an undercooled droplet in a nucleation zone; and seeding the identified droplet in the nucleation zone to initiate single crystal growth in the droplet.Type: GrantFiled: December 28, 1999Date of Patent: September 19, 2000Assignee: Starmet CorporationInventors: Matthew D. Stephens, Steven A. Miller, Jessica Belcher
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Patent number: 6114052Abstract: An ingot plate (10) of cleaveable thermoelectric material has a layered structure having substantially parallel cleavage planes. Substantially all of the cleavage planes are disposed at a less cleavage angle with respect to the upper and lower faces (11, 12) of the plate. The ingot plate can be successfully cut into bars (20) along cutting planes generally perpendicular to the cleavage planes without causing substantial interlayer fracture. Electrodes (25) are formed on the opposite sides of the bar which are defined by the cutting planes. The bar is in use to be cut into a number of discrete chips (30) with one of the electrodes fixed on a substrate. Since the cutting is made along planes again generally perpendicular to the cleavage planes of the bar, the bar can be successfully cut into the corresponding chips without causing any substantial fracture.Type: GrantFiled: August 12, 1998Date of Patent: September 5, 2000Assignees: Matshsuhita Electric Works, Ltd., Crystal Ltd.Inventors: Nobuteru Maekawa, Belov Iouri Maksimovich
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Patent number: 6090202Abstract: A method and apparatus for hydrothermally growing crystals in a pressure vessel containing feed crystals immersed in a mineralizing solution. The apparatus is disposed in the pressure vessel, above the mineralizing solution. The apparatus includes an enclosure having opposing major walls with passages extending therethrough. The enclosure completely surrounds a seed plate having opposing major faces. A restraining structure holds the seed plate within the enclosure such that the major faces of the seed plate are spaced inwardly from the major walls.Type: GrantFiled: April 29, 1998Date of Patent: July 18, 2000Assignee: Sawyer Research Products, Inc.Inventor: Vladimir A. Klipov
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Patent number: 6071339Abstract: A crystal plate 1 is grown in a continuous process by first purifying a crystal source material, a crystal melt or powder, in a purification station 3. Valves 7 control the flow of purified crystal melt or source powder 9 to a first hot zone 11, whose temperature is above the melt temperature of the crystal. A dopant source 17 with controller 19 provides dopant to the liquefied crystal 15. The first heater zone 21 surrounding the first hot zone 11 heats the crystal above its melting temperature. The second heater zone 27 produces a temperature in the second zone which is below the melt temperature of the crystal. The liquefied crystal, the liquid solid interface and the first portion of the crystal are supported in a boat-shaped crucible container with a bottom 31 and side walls. As the crystal leaves the support plate 31 it passes on to a conveyor 33. The crystal moves within an enclosure 43, which has a noble gas or noble gas and reactant gas atmosphere 45.Type: GrantFiled: January 21, 1999Date of Patent: June 6, 2000Assignee: Optoscint, Inc.Inventor: Kiril A. Pandelisev
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Patent number: 5932005Abstract: The material of the crystal (2) formed by solidification is deposited in a crucible (1), whose wall is perforated by two ducts for the injection of pressure at different heights (6, 7). A differential pressure is created between the two ducts, the pressure of the lower duct (7) being higher by a value roughly equal to the hydrostatic pressure of the remaining liquid (3), so that a clearance (5) is spontaneously formed between the crystal (2) and the crucible (1) and problems caused by differential thermal contractions on cooling are avoided.Type: GrantFiled: December 11, 1997Date of Patent: August 3, 1999Assignees: Commissariat A L'Energie Atomique, Centre National D'Etudes SpatialesInventors: Thierry Duffar, Jacques Abadie, Pierre Dusserre
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Patent number: 5900060Abstract: The invention is directed to an apparatus, system and methods for growing high-purity crystals of substances that are peritectic at atmospheric pressure. The apparatus includes a pressure vessel that contains a pressurized gas. The apparatus also includes a cooling unit that is situated in the pressure vessel. The cooling unit receives a coolant flow from outside of the vessel, and has cooled surfaces that define an enclosure that receives the charge material. The apparatus further includes an inductive heating element situated in the vessel, that is coupled to receive electric power externally to the vessel. The element heats the interior portion of the charge material to form a molten interior portion contained by a relatively cool, exterior solid-phase portion of the charge material that is closer relative to the molten interior, to the cooled surfaces of the cooling unit.Type: GrantFiled: July 3, 1996Date of Patent: May 4, 1999Assignee: Cermet, Inc.Inventors: Jeffrey E. Nause, D. Norman Hill, Stephen G. Pope
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Patent number: 5863326Abstract: The invention is directed to an apparatus, system and methods for growing high-purity crystals of substances that are peritectic at atmospheric pressure using the Czochralski technique. The apparatus includes a pressure vessel that contains a pressurized gas. The apparatus also includes a cooling unit that is situated in the pressure vessel. The cooling unit receives a coolant flow from outside of the vessel, and has cooled surfaces that define an enclosure that receives the charge material. The apparatus further includes an inductive heating element situated in the vessel, that is coupled to receive electric power externally to the vessel. The element heats the interior portion of the charge material to form a molten interior portion contained by a relatively cool, exterior solid-phase portion of the charge material that is closer relative to the molten interior, to the cooled surfaces of the cooling unit.Type: GrantFiled: March 14, 1997Date of Patent: January 26, 1999Assignee: Cermet, Inc.Inventors: Jeffrey E. Nause, D. Norman Hill, Stephen G. Pope
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Patent number: 5769944Abstract: An improved vertical gradient freeze and vertical Bridgman compound semiconductor crystal growth apparatus capable of applying an axial magnetic field of about 1600G in the crystal growth axis direction using an electrical resistance type electromagnet which has a simple structure and can be installed easily, which includes a high temperature electric furnace arranged at an upper portion of the apparatus, a crystal growth reaction tube disposed within a low temperature electric furnace arranged below the high temperature electric furnace and having a reaction container disposed therein, and an electromagnet surrounding the intermediate portion of the high temperature electric furnace.Type: GrantFiled: August 29, 1996Date of Patent: June 23, 1998Assignee: Korea Institute of Science and TechnologyInventors: Young Ju Park, Suk-Ki Min
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Patent number: 5656079Abstract: The present invention is an apparatus for the synthesis and growth of single crystals of phosphorus compounds starting with the elemental materials in a single furnace without external exposure. The apparatus of the present invention is a crystal growth furnace heated by RF coils. Inside the furnace is a susceptor heated by a lower coil device for holding a crucible. Above the crucible is selectively positioned a phosphorus improved injector. The improved injector is further surrounded by a susceptor which is heated by an upper coil device. The non-phosphorus materials are placed in the crucible and melted to a desired temperature. The phosphorus material previously placed within the injector is heated by the radiant heat from both crucible and the upper susceptor to drive the phosphorus vapor into the melt through a tube. This is closely controlled by noting the temperature within the injector and adjusting the height of the injector above the melt to control the temperature within the phosphorus material.Type: GrantFiled: March 13, 1995Date of Patent: August 12, 1997Assignee: The United States of America as represented by the Air ForceInventors: David Bliss, George Bryant, David Gabbe
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Patent number: 5643857Abstract: A ceramic superconductive material (1) including a compound containing oxygen and at least two types of metal elements and having layer structure is molten in a vessel (2), at least an inner surface (3) of which is formed of a solid solution alloy having a base of gold or silver. Preferably the alloy is prepared from Au--5 to 40 wt. % Pd or Ag--5 to 40 wt. % Pd.Type: GrantFiled: May 8, 1991Date of Patent: July 1, 1997Assignee: Sumitomo Electric Industries, Ltd.Inventor: Kazuhiko Hayashi
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Patent number: 5529015Abstract: An ampoule failure system for use in material processing furnaces comprising a containment cartridge and an ampoule failure sensor. The containment cartridge contains an ampoule of toxic material therein and is positioned within a furnace for processing. An ampoule failure probe is positioned in the containment cartridge adjacent the ampoule for detecting a potential harmful release of toxic material therefrom during processing. The failure probe is spaced a predetermined distance from the ampoule and is chemically chosen so as to undergo a timely chemical reaction with the toxic material upon the harmful release thereof.The ampoule failure system further comprises a data acquisition system which is positioned externally of the furnace and is electrically connected to the ampoule failure probe so as to form a communicating electrical circuit. The data acquisition system includes an automatic shutdown device for shutting down the furnace upon the harmful release of toxic material.Type: GrantFiled: February 13, 1995Date of Patent: June 25, 1996Assignee: The United States of America as represented by the Administrator of the National Aeronautics and Space AdministrationInventors: Dale A. Watring, Martin L. Johnson
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Patent number: 5454346Abstract: A process for growing a multielement compound single crystal, includes the steps of placing a crucible holding a raw multielement compound of a predetermined set of composition ratios Y in a vertical crystal growing furnace having a heater, melting the raw multielement compound held in the crucible with the heater to produce a melt of the raw multielement compound in the crucible, controlling the output of the heater to grow a multielement compound single crystal of a predetermined set of composition ratios X from the melt so that the melt is solidified successively upwards from part of the melt in contact with the bottom of the crucible, and feeding to the melt as a solute at least one element of the raw multielement compound from above the level of the melt in the crucible so as to maintain the predetermined set of composition ratios X of the solute during growth of the multielement compound single crystal. The process can keep constant the composition of the grown multielement compound single crystal.Type: GrantFiled: February 10, 1994Date of Patent: October 3, 1995Assignee: Japan Energy CorporationInventors: Masayuki Uchida, Kenji Kohiro, Osamu Oda
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Patent number: 5438953Abstract: A crystal growth apparatus is herein disclosed, which comprises a vertical magnetic field-generating apparatus for establishing a cylindrical, vertical magnetic field space; a vertical Bridgman furnace arranged within the space; a base plate positioned above the magnetic field-generating apparatus; a heat-generating furnace comprising a water jacket, a quartz tube and a heating element; a combustion tube for accommodating a crucible at a predetermined position; a means for vertically suspending and supporting the combustion tube; a means for guiding the suspending means to move it up and down; and a means for driving the suspending means in the upward and downward directions such that the combustion tube is lowered and risen in the heat-generating furnace; the guide means and the driving means being fitted to the base plate; the heat-generating furnace being arranged at a predetermined position within the space and fitted to the base plate through a supporting member; and a motor of the driving means being plType: GrantFiled: March 19, 1993Date of Patent: August 8, 1995Assignee: Mitsui Mining & Smelting Co., Ltd.Inventors: Yoshihira Aoki, Hisashi Yamaguchi, Giyuu Kido
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Patent number: 5400742Abstract: A method of manufacturing a semiconductor boule, the method comprises providing a chamber having a crucible, introducing a material for forming the boule and a liquid encapsulant having a softening point into the crucible, heating the crucible to melt the material, cooling the material to grow a boule, and separating the grown boule from the crucible at a temperature higher than the softening point of the encapsulant.An apparatus for manufacturing a semiconductor boule which comprises a chamber; a crucible for containing a seed crystal, a starting material, and a liquid encapsulant; a crucible shaft for holding the crucible; and a seed crystal shaft for holding the seed crystal and the boule formed by the seed crystal and starting material, the seed crystal shaft being elevated and rotated independently of the crucible shaft.Type: GrantFiled: September 8, 1992Date of Patent: March 28, 1995Assignee: Kabushiki Kaisha ToshibaInventors: Johji Nishio, Takashi Fujii
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Patent number: 5312506Abstract: There is here provided a method for growing single crystals from a melt which comprises the steps of preparing a double structure crucible constituted of an inner tube and an outer tube; placing a raw material in the inner tube; hermetically sealing the outer tube; and heating/melting the raw material to perform crystal growth.According to the present invention, it is possible to hermetically confine and to crystallize the raw material even at a high temperature.Type: GrantFiled: September 21, 1992Date of Patent: May 17, 1994Assignee: Mitsui Mining Company, LimitedInventor: Akira Omino