Liquid Zone Contacts Only Precursor And Product Solids (e.g., Crucibleless, Liquid Encapsulant, Float Zone) Patents (Class 117/49)
  • Patent number: 11254579
    Abstract: Efficiency of producing polycrystalline silicon is improved. A silicon filament (11) is constituted by a rod-shaped member made of polycrystalline silicon. The polycrystalline silicon has an interstitial oxygen concentration of not less than 10 ppma and not more than 40 ppma. On a side surface, in a lengthwise direction, of the rod-shaped member, crystal grains each having a crystal grain size of not less than 1 mm are observed.
    Type: Grant
    Filed: February 14, 2018
    Date of Patent: February 22, 2022
    Assignee: TOKUYAMA CORPORATION
    Inventors: Masayoshi Nishikawa, Yuji Inoue
  • Patent number: 10583632
    Abstract: Coatings and materials that are atomic oxygen resistant and have an atomically smooth surface that can reduce drag are disclosed. The coatings and materials can be used on at least a portion of a spacecraft intended to operate in harsh environments, such as stable Earth orbits at about 100 km to about 350 km.
    Type: Grant
    Filed: January 26, 2018
    Date of Patent: March 10, 2020
    Assignee: Skeyeon, Inc.
    Inventors: Timothy K. Minton, Thomas E. Schwartzentruber
  • Patent number: 9828692
    Abstract: An apparatus for producing a single crystal of silicon comprises a plate with a top side, an outer edge, and an inner edge, a central opening adjoining the inner edge, and a tube extending from the central opening to beneath the bottom side of the plate; a device for metering granular silicon onto the plate; a first induction heating coil above the plate, provided for melting of the granular silicon deposited; a second induction heating coil positioned beneath the plate, provided for stabilization of a melt of silicon, the melt being present upon a growing single crystal of silicon. The top side of the plate consists of ceramic material and has elevations, the distance between the elevations in a radial direction being not less than 2 mm and not more than 15 mm.
    Type: Grant
    Filed: March 27, 2015
    Date of Patent: November 28, 2017
    Assignee: SILTRONIC AG
    Inventors: Georg Brenninger, Waldemar Stein, Maik Haeberlen
  • Patent number: 9222198
    Abstract: A SiC single crystal wafer on which a good quality epitaxial film by suppressing defects derived from the wafer can be grown has an affected surface layer with a thickness of at most 50 nm and a SiC single crystal portion with an oxygen content of at most 1.0×1017 atoms/cm3. This SiC single crystal wafer is manufactured from a high purity SiC bulk single crystal obtained by the solution growth method using raw materials with an oxygen content of at most 100 ppm and a non-oxidizing atmosphere having an oxygen concentration of at most 100 ppm.
    Type: Grant
    Filed: February 27, 2012
    Date of Patent: December 29, 2015
    Assignee: NIPPON STEEL & SUMITOMO METAL CORPORATION
    Inventors: Kazuhiko Kusunoki, Kazuhito Kamei, Nobuyoshi Yashiro, Junichi Koike
  • Patent number: 9102035
    Abstract: A method for machining a profile into a silicon seed rod using a machine. The silicon seed rod is capable of being used in a chemical vapor deposition polysilicon reactor. The machine includes a plurality of grinding wheels. The method includes grinding a v-shaped profile into a first end of the silicon seed rod with one of the plurality of grinding wheels and grinding a conical profile in a second end of the silicon seed rod with another of the plurality of grinding wheels.
    Type: Grant
    Filed: March 12, 2012
    Date of Patent: August 11, 2015
    Assignee: MEMC Electronics Materials S.p.A.
    Inventors: Rodolfo Bovo, Paolo Molino
  • Patent number: 8940095
    Abstract: An apparatus for growth of uniform multi-component single crystals is provided. The single crystal material has at least three elements and has a diameter of at least 50 mm, a dislocation density of less than 100 cm?2 and a radial compositional variation of less than 1%.
    Type: Grant
    Filed: November 4, 2011
    Date of Patent: January 27, 2015
    Assignee: Rensselaer Polytechnic Institute
    Inventor: Partha Dutta
  • Publication number: 20130186325
    Abstract: The invention provides a process for determining surface contamination of polycrystalline silicon, including the steps of: a) providing two polycrystalline silicon rods by deposition in a Siemens reactor; b) determining contaminants in the first of the two rods immediately after the deposition; c) conducting the second rod through one or more systems in which polycrystalline silicon rods are processed further to give rod pieces or polysilicon fragments, optionally cleaned, stored or packed; d) then determining contaminants in the second rod; wherein the difference in the contaminants determined in the first and second rods gives surface contamination of polycrystalline silicon resulting from systems and the system environment.
    Type: Application
    Filed: January 10, 2013
    Publication date: July 25, 2013
    Applicant: WACKER CHEMIE AG
    Inventors: Hanns WOCHNER, Robert BAUMANN
  • Patent number: 8409348
    Abstract: A production method of a zinc oxide single crystal, comprising depositing a crystal of zinc oxide on a seed crystal from a mixed melt of zinc oxide and a solvent capable of melting zinc oxide and having a higher average density than zinc oxide in the melt. Preferably, a zinc oxide single crystal is continuously pulled while supplying the same amount of a zinc oxide raw material as that of the pulled zinc oxide. A single crystal excellent in the crystal quality and long in the pulling direction can be continuously produced.
    Type: Grant
    Filed: March 14, 2008
    Date of Patent: April 2, 2013
    Assignee: Ube Industries, Ltd.
    Inventors: Yoshizumi Tanaka, Itsuhiro Fujii
  • Patent number: 8216373
    Abstract: A temperature gradient is established in a crystallization crucible by means of a heat source and a cooling system. The cooling system comprises a heat exchanger and an adjustable additional heat source. The cooling system is preferably formed by an induction coil cooled by a coolant liquid circulating in the induction coil and by an electrically conductive induction susceptor positioned between the crucible and induction coil. The fabrication process comprises heating the crucible via the top and controlling heat extraction from the crucible downwards by means of the heat exchanger and by means of regulation of the adjustable additional heat source.
    Type: Grant
    Filed: December 6, 2006
    Date of Patent: July 10, 2012
    Assignees: Apollon Solar, Cyberstar, EFD Induction SA
    Inventors: Roland Einhaus, Francois Claude Lissalde, Pascal Rivat
  • Patent number: 8197595
    Abstract: A method for producing thin silicon rods using a floating zone crystallization process includes supplying high frequency (HF) current to a flat induction coil having a central opening, a plurality of draw openings and a plate with a slot as a current supply of the HF current so as to provide a circumfluent current to the central opening. An upper end of a raw silicon rod is heated by induction using the flat induction coil so as to form a melt pool. A thin silicon rod is drawn upwards through each of the plurality of draw openings in the flat induction coil from the melt pool without drawing a thin silicon rod through the central opening having the circumfluent current.
    Type: Grant
    Filed: January 19, 2010
    Date of Patent: June 12, 2012
    Assignee: PV Silicon Forschungs und Produktions GmbH
    Inventors: Helge Riemann, Friedrich-Wilhelm Schulze, Joerg Fischer, Matthias Renner
  • Publication number: 20110128610
    Abstract: The invention concerns Phenolic Configurationally Locked Polyene Single Crystals, which are especially suited as highly efficient nonlinear optical organic material. The invention also concerns methods for growth of crystalline thin films or bulk crystals from melt and/or solution. The compounds are suited and the methods may be used for manufacturing optical elements for several bulk and integrated applications, e.g. electro-Optics and THz-Wave applications.
    Type: Application
    Filed: May 5, 2009
    Publication date: June 2, 2011
    Inventors: Peter Gunter, Mojca Jazbinsek, O-Pil Kwon, Seong-Ji Kwon, Christoph Hunziker, Harry Figi
  • Publication number: 20110126758
    Abstract: Techniques for the formation of silicon ingots and crystals using silicon feedstock of various grades are described. A common feature is adding a predetermined amount of germanium to the melt and performing a crystallization to incorporate germanium into the silicon lattice of respective crystalline silicon materials. Such incorporated germanium results in improvements of respective silicon material characteristics, including increased material strength and improved electrical properties. This leads to positive effects at applying such materials in solar cell manufacturing and at making modules from those solar cells.
    Type: Application
    Filed: November 24, 2010
    Publication date: June 2, 2011
    Applicant: Calisolar, Inc.
    Inventors: Fritz G. Kirscht, Matthias Heuer, Martin Kaes, Kamel Ounadjela
  • Patent number: 7799131
    Abstract: The present invention provides a method for the continuous production of semiconductor ribbons by growth from a linear molten zone. The creation of the molten zone is achieved by application of an electric current, direct or alternating, parallel to the surface of the ribbon and perpendicular to the direction of growth, and intense enough to melt the said material, preferably using electrodes of the said material. The molten zone is fed by transference of the material, in the liquid state, from one or more reservoirs, where melting of the feedstock occurs. Preferably, the said electrodes and the said reservoir(s) are only constituted by the said material, thus avoiding contamination by foreign materials. The present invention is applicable, for example, in the industry of silicon ribbons production for photovoltaic application.
    Type: Grant
    Filed: April 15, 2004
    Date of Patent: September 21, 2010
    Assignee: Faculdade de Ciencias Da Universidade de Lisboa
    Inventors: António Vallêra, João Serra, Jorge Maia Alves, Miguel Brito, Roberto Gamboa, João Henriques
  • Publication number: 20090309069
    Abstract: A method of manufacturing a silicon monocrystal by FZ method, wherein a P-type or N-type silicon crystal having been pulled up by CZ method is used as a raw material. While impurities whose conductivity type is the same as that of the raw material are supplied by a gas doping method, the raw material is recrystallized by an induction-heating coil for obtaining a product-monocrystal.
    Type: Application
    Filed: September 27, 2007
    Publication date: December 17, 2009
    Inventors: Shinji Togawa, Toshiyuki Sato
  • Patent number: 7520932
    Abstract: A method of analyzing carbon concentration in crystalline silicon includes providing a section from a zoned and annealed silicon core. The zoned and annealed core is extracted from a polycrystalline silicon composition and has a columnar shape. The zoned and annealed core includes a single crystalline silicon region and a freeze-out melt region. The freeze-out melt region is disposed adjacent to the single crystalline silicon region, and the regions are spaced along a length of the columnar shape. Specifically, the section is provided from the freeze-out melt region, with the entire freeze-out melt region in the section. A carbon concentration of the section is determined. By providing the section from the freeze-out melt region, as opposed to the polycrystalline silicon composition, determination of carbon concentration in the crystalline silicon is enabled with a sensitivity at less than or equal to 10 parts per billion atomic.
    Type: Grant
    Filed: March 29, 2007
    Date of Patent: April 21, 2009
    Assignee: Dow Corning Corporation
    Inventor: Doug Kreszowski
  • Publication number: 20090048090
    Abstract: The invention intends to provide a single crystal material that can be used as a dielectric material for use in electronic devices, which has a high Qf value; and a process for producing the same. According to the invention, a single crystal of a composite oxide is obtained from a composition in which a slight amount of SrTiO3 is added to LaAlO3, and the (1-X)LaAlO3—XSrTiO3 single crystal material having the specific composition has such dielectric characteristics for electronic devices that the dielectric constant is 24 or more and the Qf value is 300,000 GHz or more, is considerably improved in the Qf value as a dielectric material, and can be applied to a high-temperature superconducting filter.
    Type: Application
    Filed: August 11, 2005
    Publication date: February 19, 2009
    Inventor: Takeshi Shimada
  • Patent number: 7399360
    Abstract: Provided are a crucible which prevents polycrystal formation to easily allow growth of optical part material single crystals, and a single crystal growth method employing the crucible. The crucible has a smooth surface of about Rmax 3.2s as the surface roughness of the wall surface 1H, concave curved plane 1J, cone surface 1F and convex curved plane 1L of the starting material carrying section 1D and the wall surface 1K of the seed carrying section 1E, which constitute the inner surface of the crucible of a crucible body 1A.
    Type: Grant
    Filed: June 18, 2004
    Date of Patent: July 15, 2008
    Assignee: Hitachi Chemical Company, Ltd.
    Inventors: Keiji Sumiya, Nachimuthu Senguttuvan, Hiroyuki Ishibashi
  • Patent number: 7361219
    Abstract: The present invention are a method for producing a silicon wafer having a crystal orientation <110> from a silicon single crystal ingot grown by a Floating Zone method (FZ method), wherein, at least, an FZ silicon single crystal ingot is grown by being made to be dislocation-free by Dash Necking method using a seed crystal having its crystal axis inclined at a specified angle from a crystal orientation <110>, and the grown FZ silicon single crystal ingot is sliced at the just angle of a crystal orientation <110> to produce a silicon wafer having a crystal orientation <110>, and a silicon wafer produced by the method. Thereby, there are provided a method for producing a silicon wafer having a crystal orientation <110> from a silicon single crystal ingot made to be dislocation-free at a high success rate by using Dash Necking method by FZ method, and a silicon wafer having an crystal orientation <110>.
    Type: Grant
    Filed: July 12, 2004
    Date of Patent: April 22, 2008
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventor: Ken Yoshizawa
  • Patent number: 7351283
    Abstract: A crystalline thin structure (104, 204, 404) is grown on a surface (108, 228) of a substrate (112, 208, 400) by depositing molecules (136, 220) from a molecular precursor to a lateral growth front (144, 224) of the structure using a crystal grower (116, 200). In one embodiment, the crystal grower comprises a solution (124) containing the molecular precursor in a solvent (140). Molecules are added to the lateral growth front by moving one or both of the free surface (120, 120?) of the solution and deposition surface relative to the other at a predetermined rate. In another embodiment, the crystal grower comprises a mask (212) that includes at least one opening (216). Precursor molecules are vacuum deposited via a molecular beam (236) at the growth front (228) of the crystalline thin structure (204) as one or both of the opening and surface are moved relative to the other at a predetermined rate.
    Type: Grant
    Filed: March 11, 2005
    Date of Patent: April 1, 2008
    Assignee: The University of Vermont and State Agricultural College
    Inventor: Randall L. Headrick
  • Patent number: 7335257
    Abstract: An apparatus is provided for manufacturing a single crystal rod from a poly crystal feed rod including a closed chamber at which chamber the feed rod is located. The chamber has an annular energy supply arranged around the feed rod for melting off the one end of the rod for providing single crystals. Actuators are provided, for axial movement of the feed rod and for a rotating relative movement between the feed rod and the annular energy supply The apparatus further includes components for recording and regulating the distance between the surface of the feed rod and an annular inwardly radially facing reference face associated with the energy supply The resulting apparatus and method that enable use of irregular feed rods that assume other shapes than the optimal cylindrical shape and also enable use of curved cylindrical and elliptical rods with irregular surfaces.
    Type: Grant
    Filed: February 6, 2004
    Date of Patent: February 26, 2008
    Assignee: Topsil Semiconductor Materials A/S
    Inventors: Leif Jensen, Jan Eyving Petersen, Per Vabengard
  • Patent number: 7326297
    Abstract: The invention relates to a device for the production of crystal rods having a defined cross-section and a column-shaped polycrystalline structure by means of floating-zone continuous crystallization, comprising at least one crucible filled with crystalline material, provided with a central deviation for transporting the contents of the crucible to a growing crystal rod arranged below the crucible, whereby the central deviation plunges into the melt meniscus, also comprising means for continuously adjustable provision of crystalline material to the crucible, and means for simultaneously feeding the melt energy and adjusting the crystallization front.
    Type: Grant
    Filed: May 6, 2003
    Date of Patent: February 5, 2008
    Assignee: PV Silicon Forschungs- und Produktions AG.
    Inventors: Nikolai V. Abrosimov, Helge Riemann
  • Patent number: 7258740
    Abstract: The present invention relates to an apparatus for making a source material into a crystal fiber having different regions of polarization inversion. The apparatus of the present invention is similar to a laser-heated pedestal growth (LHPG) apparatus, characterized in that a first electric field generating device and a second electric field generating device are included. The first electric field generating device is used for providing a first external electric field which is used for poling the crystal fiber and inducing micro-swing of the crystal fiber. The second electric field generating device is disposed on a predetermined position above the first electric field generating device for providing a second external electric field to control and maintain the amplitude of the micro-swing. Whereby, the growth condition of the crystal fiber can be controlled precisely, and a uniformly and regularly periodic polarization inversion structure is fabricated.
    Type: Grant
    Filed: April 14, 2005
    Date of Patent: August 21, 2007
    Assignee: National Sun Yat-Sen University
    Inventors: Sheng-Lung Huang, Hsiao-Wen Lee, Chia-Chang Kuo, Sheng Bang Huang, Tsai-Shuan Chou, Li-Min Lee
  • Patent number: 7226571
    Abstract: A high resistivity p type silicon wafer with a resistivity of 100 ?cm or more, in the vicinity of the surface being formed denuded zone, wherein when a heat treatment in the device fabrication process is performed, a p/n type conversion layer due to thermal donor generation is located at a depth to be brought into contact with neither any device active region nor depletion layer region formed in contact therewith or at a depth more than 8 ?m from the surface, and a method for fabricating the same. The high resistivity silicon wafer can cause the influence of thermal donors to disappear without reducing the soluble oxygen concentration in the wafer, whereby even if various heat treatments are performed in the device fabrication process, devices such as CMOS that offer superior characteristics can be fabricated. The wafer has wide application as a substrate for a high-frequency integrated circuit device.
    Type: Grant
    Filed: October 15, 2004
    Date of Patent: June 5, 2007
    Assignee: Sumitomo Mitsubishi Silicon Corporation
    Inventors: Nobumitsu Takase, Shinsuke Sadamitsu, Takayuki Kihara, Masataka Hourai
  • Patent number: 6966946
    Abstract: A manufacturing method of a Ga2-xFexO3 crystal is provided which can form a superior, uniform, and large crystal. By a floating zone melting method in which ends of material bars (3, 5), which are disposed at an upper and a lower position and which are composed of Ga2-xFexO3, are heated in a gas atmosphere with halogen lamps (6, 7) disposed at confocal areas so as to form a floating melting zone between the ends of the material bars (3, 5) which are disposed at the upper and the lower position and which are composed of Ga2-xFexO3, Ga2-xFexO3 a single crystal having an orthorhombic crystal structure is formed.
    Type: Grant
    Filed: October 11, 2002
    Date of Patent: November 22, 2005
    Assignee: Japan Science and Technology Agency
    Inventors: Yoshio Kaneko, Yoshinori Tokura, Shigeki Miyasaka
  • Patent number: 6712902
    Abstract: A feed rod for growing a magnetic single crystal having a composition represented by the formula (Y3-aAa)(Fe5-b-cBb)O12-&agr;, wherein A is at least one element selected from the lanthanoide series, B is at least one element selected from the group consisting of Ga, Al, In, and Sc, c is a value for decreasing the Fe content from the stoichiometric amount, &agr; is a value for decreasing the oxygen content to satisfy the chemically neutral condition, and the relationships 0≦a≧0.5; 0≦b≧1.0; 0<c≧0.15 and 0<&agr; are satisfied.
    Type: Grant
    Filed: August 15, 2002
    Date of Patent: March 30, 2004
    Assignee: Murata Manufacturing Co., Ltd.
    Inventor: Mikio Geho
  • Publication number: 20040016392
    Abstract: The invention relates to a method and a device for producing globular grains of high-purity silicon by atomising a silicon melt (6) in an ultrasonic field (10). Globular grains having a grain size of 50 &mgr;m can be produced by means of said method and device and can be used to separate high-purity silicon from silane in the fluid bed. The silicon melt (6) is fed into the ultrasonic field (10) at a distance of <50 mm in relation to a field node, and the atomised silicon leaves the ultrasonic field (10) at a temperature close to the liquidus point. The invention also relates to a use of the product produced according to the inventive method or using the inventive device, as particles for producing high-purity silicon from silane in a fluid bed.
    Type: Application
    Filed: May 29, 2003
    Publication date: January 29, 2004
    Inventors: Hans-Dieter Block, Udo Krauter, Peter Schreckenberg
  • Patent number: 6663711
    Abstract: A process produces a crystal of a material with non-congruent melting using at least one first element and a second element. The process includes (a) placing, in a vertical alignment and maintaining under a controlled atmosphere, a bar of the first element gripped between a lower bar and an upper bar made out of the material, (b) transforming the bar of the first element into a floating zone by heating to a temperature that avoids the evaporation of the first element, the heating being obtained by heating means that provides a temperature gradient in the floating zone so that the lower face of the upper bar appears as a cold face, and (c) contra-rotating the lower and upper bars around the alignment axis and moving the whole bar assembly upwards in relation to the heating means in order to obtain the crystal on the cold face by growth in solution.
    Type: Grant
    Filed: February 20, 2002
    Date of Patent: December 16, 2003
    Assignee: Commissarat a l′Energie Atomique
    Inventors: Jürgen Wollweber, Thierry Duffar, Jean-Louis Santailler, Véronique Chevrier
  • Publication number: 20030192470
    Abstract: A doped semiconductor wafer of float zone-pulled semiconductor material contains a dopant added to a molten material and has a radial macroscopic resistance distribution of less than 12% and striations of −10% to +10%. There is also a process for producing a doped semiconductor wafer by float zone pulling of a single crystal and dividing up the single crystal, in which process, during the float zone pulling, a molten material which is produced using an induction coil is doped with a dopant. It is exposed to at least one rotating magnetic field and is solidified. The single crystal which is formed during the solidification of the molten material is rotated. The single crystal and the magnetic field are rotated with opposite directions of rotation and the magnetic field has a frequency of 400 to 700 Hz.
    Type: Application
    Filed: April 10, 2003
    Publication date: October 16, 2003
    Applicant: Wacker Siltronic AG
    Inventors: Rolf Knobel, Wilfried Von Ammon, Janis Virbulis, Manfred Grundner
  • Publication number: 20030145781
    Abstract: A process for producing a single crystal of semiconductor material, in which fractions of a melt, are kept in liquid form by a pulling coil, solidify on a seed crystal to form the growing single crystal, and granules are melted in order to maintain the growth of the single crystal. The melting granules are passed to the melt after a delay. There is also an apparatus which is suitable for carrying out the process and has a device which delays mixing of the molten granules and of the melt.
    Type: Application
    Filed: January 24, 2003
    Publication date: August 7, 2003
    Applicant: WACKER SILTRONIC AG
    Inventor: Wilfried Von Ammon
  • Publication number: 20030041797
    Abstract: A feed rod for growing a magnetic single crystal having a composition represented by the formula (Y3-aAa)(Fe5-b-cBb)O12-&agr;, wherein A is at least one element selected from the lanthanoide series, B is at least one element selected from the group consisting of Ga, Al, In, and Sc, c is a value for decreasing the Fe content from the stoichiometric amount, &agr; is a value for decreasing the oxygen content to satisfy the chemically neutral condition, and the relationships 0≦a≧0.5; 0≦b≧1.0; 0<c≧0.15 and 0<&agr; are satisfied.
    Type: Application
    Filed: August 15, 2002
    Publication date: March 6, 2003
    Inventor: Mikio Geho
  • Publication number: 20030024469
    Abstract: A silicon single crystal is produced by crucible-free float zone pulling, has a diameter of at least 200 mm over a length of at least 200 mm and is free of dislocations in the region of this length. A silicon wafer is separated from the silicon single crystal by a process for producing the silicon single crystal. The silicon single crystal is produced by crucible-free float zone pulling in a receptacle, in which an atmosphere of inert gas and nitrogen exerts a pressure of 1.5-2.2 bar, the atmosphere being continuously exchanged, with the volume of the receptacle being exchanged at least twice per hour. A flat coil with an external diameter of at least 220 mm is inserted in order to melt a stock ingot. The single crystal is pulled at a rate in a range from 1.4-2.2 mm/min and is periodically rotated through a sequence of rotation angles.
    Type: Application
    Filed: July 23, 2002
    Publication date: February 6, 2003
    Applicant: Wacker Siltronic Gesellschaft Fur Halbleitermaterialien AG
    Inventors: Ludwig Altmannshofer, Manfred Grundner, Janis Virbulis
  • Patent number: 6251182
    Abstract: The present invention is an improved susceptor for a float-zone apparatus for the float-zone processing of silicon elements. The susceptor is of a cylindrical design which allows the susceptor to be positioned around a free end of a silicon element to heat the free end of the silicon element to facilitate inductive coupling of the free end of the silicon element with an RF induction coil heater. In a preferred embodiment of the present invention, the susceptor is formed from tantalum.
    Type: Grant
    Filed: May 11, 1993
    Date of Patent: June 26, 2001
    Assignee: Hemlock Semiconductor Corporation
    Inventors: Joaquin Enrique Luna, Scott Allen Wheelock
  • Patent number: 6165263
    Abstract: A method for growing a single crystal by allowing a seed crystal to contact a molten zone formed by melting a polycrystalline material, followed by moving the molten zone away from the seed, wherein the oxygen concentration in the atmosphere during growth of the single crystal is lower than about 10% by volume.
    Type: Grant
    Filed: March 5, 1999
    Date of Patent: December 26, 2000
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Takenori Sekijima, Takashi Fujii, Kikuo Wakino, Masakatsu Okada
  • Patent number: 6143070
    Abstract: The present invention describes the growth of single crystals of non-congruently melting alloys, in particular, silicon-germanium of constant composition in a quartz ampoule by the use of CaCl.sub.2 as an encapsulant for the liquid encapsulated zone melting (LEZM) technique. The zone melting process was modified with the addition of calcium chloride which acts as a liquid encapsulant at temperatures above 660.degree. C. so that the crystal can grow without sticking to the container. The calcium chloride encapsulant creates a non-wetting buffer layer between the quartz container and the SiGe charge material allowing single crystal growth of mixed alloys. The crystal growth system consists of a vertical tube RF furnace with a water cooled split-ring concentrator. The concentrator is 5 mm. Thick by 25 mm diameter and provides a high temperature melt zone with a "spike" profile.
    Type: Grant
    Filed: May 15, 1998
    Date of Patent: November 7, 2000
    Assignee: The United States of America as represented by the Secretary of the Air Force
    Inventors: David F. Bliss, Brian G. Demczyk, John Bailey
  • Patent number: 6039802
    Abstract: There is provided a single crystal growth method which allows single crystal of an incongruent melting compound to be grown stable while controlling its growth orientation. The single crystal growth method comprises the steps of: holding polycrystal and seed crystal within a heating furnace; joining the polycrystal with the seed crystal; heating the polycrystal on the side opposite from the side where the polycrystal is joined with the seed crystal to form a melt zone; moving the melt zone to the side where the polycrystal is joined with the seed crystal so that the melt zone is in contact with the seed crystal to allow seeding; and growing single crystal by moving the melt zone which has been in contact with the seed crystal and been seeded to the opposite side from the side where the polycrystal is joined with the seed crystal.
    Type: Grant
    Filed: March 5, 1998
    Date of Patent: March 21, 2000
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Takenori Sekijima, Takashi Fujii, Kikuo Wakino, Masakatsu Okada
  • Patent number: 5900060
    Abstract: The invention is directed to an apparatus, system and methods for growing high-purity crystals of substances that are peritectic at atmospheric pressure. The apparatus includes a pressure vessel that contains a pressurized gas. The apparatus also includes a cooling unit that is situated in the pressure vessel. The cooling unit receives a coolant flow from outside of the vessel, and has cooled surfaces that define an enclosure that receives the charge material. The apparatus further includes an inductive heating element situated in the vessel, that is coupled to receive electric power externally to the vessel. The element heats the interior portion of the charge material to form a molten interior portion contained by a relatively cool, exterior solid-phase portion of the charge material that is closer relative to the molten interior, to the cooled surfaces of the cooling unit.
    Type: Grant
    Filed: July 3, 1996
    Date of Patent: May 4, 1999
    Assignee: Cermet, Inc.
    Inventors: Jeffrey E. Nause, D. Norman Hill, Stephen G. Pope
  • Patent number: 5897705
    Abstract: A process for the production of an epitaxially coated semiconductor wafer, composed of a substrate wafer of monocrystalline silicon having a front side and a rear side, has at least one layer of semiconductor material which is epitaxially deposited on the front side of the substrate wafer and which is obtained by production of a heavily doped silicon monocrystal by crucible-free zone pulling, production of a substrate wafer having polished front side from the monocrystal and deposition of at least one epitaxial layer of semiconductor material on the front side of the substrate wafer.
    Type: Grant
    Filed: April 2, 1996
    Date of Patent: April 27, 1999
    Assignee: Wacker Siltronic Gesellschaft fur Halbeitermaterialien mbH
    Inventors: Wolfgang Siebert, Erwin-Peter Mayer
  • Patent number: 5891828
    Abstract: PrBa.sub.2 Cu.sub.3 O.sub.Y exhibiting superconductivity is provided by a method including the steps of preparing a solvent consisting of a mixture of praseodymium oxide, at least one of barium oxide and barium carbonate, and copper oxide at a mixing ratio of between 1:3:5 and 1:8:20, disposing the solvent between a feed rod of PrBa.sub.2 Cu.sub.3 O.sub.7 formed to a high density and a seed crystal, heating the solvent to a temperature of 880.degree.-980.degree. C. in an atmosphere of an inert gas of at least one of argon and nitrogen mixed with 0.01-2% oxygen to form a floating solvent zone, moving the floating solvent zone toward the feed rod at 0.1-1.0 mm/hr under a temperature gradient at the solid-liquid interface of 25.degree.-35.degree. C./mm to precipitate single crystal on the seed crystal, and heat-treating the single crystal obtained in an atmosphere containing not less than 15% oxygen. Another aspect of the invention provides a superconducting device including the superconducting PrBa.sub.2 Cu.
    Type: Grant
    Filed: March 26, 1997
    Date of Patent: April 6, 1999
    Assignee: Agency of Industrial Science & Technology, Ministry of International Trade & Industry
    Inventors: Kunihiko Oka, Zhigang Zou, Toshimitsu Ito, Hiroshi Akoh
  • Patent number: 5863326
    Abstract: The invention is directed to an apparatus, system and methods for growing high-purity crystals of substances that are peritectic at atmospheric pressure using the Czochralski technique. The apparatus includes a pressure vessel that contains a pressurized gas. The apparatus also includes a cooling unit that is situated in the pressure vessel. The cooling unit receives a coolant flow from outside of the vessel, and has cooled surfaces that define an enclosure that receives the charge material. The apparatus further includes an inductive heating element situated in the vessel, that is coupled to receive electric power externally to the vessel. The element heats the interior portion of the charge material to form a molten interior portion contained by a relatively cool, exterior solid-phase portion of the charge material that is closer relative to the molten interior, to the cooled surfaces of the cooling unit.
    Type: Grant
    Filed: March 14, 1997
    Date of Patent: January 26, 1999
    Assignee: Cermet, Inc.
    Inventors: Jeffrey E. Nause, D. Norman Hill, Stephen G. Pope
  • Patent number: 5833748
    Abstract: A process and an apparatus for obtaining unfissured crystals of GaAs after the crystal has been formed by direction solidification from a melt in a quartz crucible. The quartz crucible is immersed in molten potassium hydroxide or sodium hydroxide at a temperature of 450.degree. to 600.degree. C.
    Type: Grant
    Filed: October 29, 1996
    Date of Patent: November 10, 1998
    Assignee: Forschungszentrum Julich GmbH
    Inventors: Martin Althaus, Eckhard Kussel, Klaus Sonnenberg
  • Patent number: 5792258
    Abstract: A high-frequency induction heater for use in the growth of a semiconductor single crystal by the FZ method, including a plurality of high-frequency induction heating coils disposed in concentric juxtaposed relation to each other and each having a pair of power supply terminals provided for supplying a high-frequency current to the associated heating coil, with the power supply terminals of one of the heating coils being disposed in a space defined between opposite ends of an adjacent heating coil disposed outside the one heating coil, wherein a pair of electrically conductive members is attached to the pair of power supply terminals, respectively, of at least an innermost one of the heating coils so as to cover a space defined between the power supply terminals of the innermost heating coil. With the induction heater thus constructed, the so-called "pulsation", i.e.
    Type: Grant
    Filed: January 29, 1996
    Date of Patent: August 11, 1998
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventors: Masanori Kimura, Ken Yoshizawa, Teruaki Fukami, Hirotoshi Yamagishi
  • Patent number: 5744380
    Abstract: There is provided a high quality epitaxial water on which the density of microscopic defects in the epitaxial layer is reduced to keep the GOI thereof sufficiently high and to reduce a leakage current at the P-N junction thereof when devices are incorporated, to thereby improve the yield of such devices. In an epitaxial wafer obtained by forming an epitaxial layer on a substrate, the density of IR laser scatterers is 5.times.10.sup.5 pieces/cm.sup.3 or less throughout the epitaxial layer.
    Type: Grant
    Filed: February 26, 1997
    Date of Patent: April 28, 1998
    Assignee: Komatsu Electronic Metals Co., Ltd.
    Inventors: Noriyuki Uemura, Hisami Motoura, Masashi Nishimura, Mitsuo Kohno
  • Patent number: 5688321
    Abstract: A method of producing a silicon single crystal by the floating-zone method, comprising the steps of: providing a polysilicon rod having an average grain length of 10 to 1000 .mu.m; heating a portion of the polysilicon rod to form a molten zone while applying a magnetic field of 300 to 1000 gauss to the molten zone; and passing the molten zone through the length of the polysilicon rod thereby the polysilicon rod is converted into a silicon single crystal ingot through a one-pass zoning of the floating zone method. An apparatus for reducing the method into practice is also described. The growing single crystal ingot is post-heated by a heat reflector near the molten zone.
    Type: Grant
    Filed: April 23, 1996
    Date of Patent: November 18, 1997
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventors: Masanori Kimura, Hirotoshi Yamagishi
  • Patent number: 5667585
    Abstract: Proposed is a low-cost method for the preparation of a wire-formed crystal of silicon having a diameter of 1 mm or smaller, in which a vertically held starting rod of silicon is melted at one end portion by high-frequency induction heating, a seed crystal is brought into contact with the molten portion and then the seed crystal and the starting silicon rod are pulled apart in the vertical direction at a controlled velocity with a controlled high-frequency power input so that the melt of silicon drawn by the seed crystal is solidified and crystallized into the form of a wire.
    Type: Grant
    Filed: December 27, 1995
    Date of Patent: September 16, 1997
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Tsuguo Fukuda, Susumu Sakaguchi, Tadashi Kamioka, Toru Yamada, Teruhiko Hirasawa
  • Patent number: 5665664
    Abstract: Proposed is a grain boundary-free crystalline body of a perovskite structure having a chemical composition of the formula Pr.sub.1-x M.sub.x MnO.sub.3, in which M is calcium or strontium and the subscript x is a number of 0.3 to 0.5, which exhibits a magnetoresistance behavior with a phase transition between an insulator phase and a ferromagnetic metallic phase accompanied by the phenomenon of hysteresis. This grain boundary-free crystalline body can be obtained by subjecting a sintered body of a powder blend consisting of the oxides of praseodymium, manganese and calcium or strontium to a crystal growing treatment by the floating zone-melting method in an atmosphere of oxygen.
    Type: Grant
    Filed: November 3, 1995
    Date of Patent: September 9, 1997
    Assignees: Japan as represented by Director General of Agency of Industrial Science and Technology, Angstrom Technology Partnership
    Inventors: Yasuhide Tomioka, Yoshinori Tokura
  • Patent number: 5556461
    Abstract: A method of producing a silicon single crystal by the floating-zone method, comprising the steps of: providing a polysilicon rod having an average grain length of 10 to 1000 .mu.m; heating a portion of the polysilicon rod to form a molten zone while applying a magnetic field of 300 to 1000 gauss to the molten zone; and passing the molten zone through the length of the polysilicon rod thereby the polysilicon rod is converted into a silicon single crystal ingot through a one-pass zoning of the floating zone method. An apparatus for reducing the method into practice is also described.
    Type: Grant
    Filed: June 15, 1994
    Date of Patent: September 17, 1996
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventors: Masanori Kimura, Hirotoshi Yamagishi
  • Patent number: 5499598
    Abstract: Silicon granules filled in a nonconductive cylinder are locally heated from outside of the cylinder using a local heating means, for example, a radio-frequency induction heating coil etc. to form a silicon granule sintering portion and a silicon melting portion, with gradually moving the local heating means in such a manner that the positions of the sintering portion and of the melting portion can be moved gradually. Concomitantly with the movement of the positions of the sintering portion and the melting portion, the melting portion in the original position is solidified to produce a silicon rod. According to this method, molten silicon is formed without contacting the inner wall surface of the cylinder and then solidified so that there can be obtained a silicon rod containing no impurities derived from the material of the cylinder.
    Type: Grant
    Filed: March 11, 1994
    Date of Patent: March 19, 1996
    Assignee: Tokuyama Corporation
    Inventor: Hiroyuki Oda
  • Patent number: 5476063
    Abstract: A seed crystal is connected with a polycrystal at one end of the polycrystal, the connected crystal material is melted under a zero-gravity or microgravity environment without any container, and a single crystal is grown.
    Type: Grant
    Filed: August 4, 1994
    Date of Patent: December 19, 1995
    Assignees: National Research Institute for Metals, National Space Development Agency of Japan
    Inventors: Isao Nakatani, Satoshi Takahashi, Isao Nishida, Kiyoshi Ozawa
  • Patent number: 5444040
    Abstract: A method of manufacturing a single crystal of a superconductive oxide by a travelling solvent floating zone method (TSFZ Method). In this manufacturing method, a sintered feed rod of an oxide belonging to a tetragonal system, exhibiting anisotropic properties and superconductive properties and having a stoichiometric composition of the superconductive oxide is melted into a layer of a solvent mainly consisting of a oxidized copper and arranged in an infrared heating furnace under an oxygen pressure thereby growing a large single crystal of the superconductive oxide which is 5 mm or over in diameter and 40 mm or over in length.The superconductive oxide is one selected from the group consisting of La.sub.2-x A.sub.x CuO.sub.4 (A:Sr,Ba), Nd.sub.2-x Ce.sub.x CuO.sub.4, YBa.sub.2 Cu.sub.3 O.sub.7-x, BiSrCaCu.sub.2 O.sub.x, Tl.sub.2 Ba.sub.2 Ca.sub.2 Cu.sub.3 O.sub.
    Type: Grant
    Filed: November 6, 1992
    Date of Patent: August 22, 1995
    Assignee: Seiko Epson Corporation
    Inventors: Hironao Kojima, Isao Tanaka
  • Patent number: 5437243
    Abstract: Human-made diamond, as well as naturally found diamond, is a transparent, superhard, crystalline, and electrically nonconductive form of carbon. In this invention, an electrical current of supercritical density alone produces the transformation of graphite to diamond. The entire graphite-to-diamond transformation requires only a few millionths of a second. Using the principles of the invention, diamond can be produced in a variety of shapes, such as loose debris, rods, fibers, bars, dust, etc. In addition to diamond, Buckminster Fuller Balls, known also as C-60 carbon fullerines, are produced using the process and apparatus of the invention.
    Type: Grant
    Filed: July 1, 1992
    Date of Patent: August 1, 1995
    Inventor: Maciej J. Pike-Biegunski