Liquid Zone Contacts Only Precursor And Product Solids (e.g., Crucibleless, Liquid Encapsulant, Float Zone) Patents (Class 117/49)
-
Patent number: 11254579Abstract: Efficiency of producing polycrystalline silicon is improved. A silicon filament (11) is constituted by a rod-shaped member made of polycrystalline silicon. The polycrystalline silicon has an interstitial oxygen concentration of not less than 10 ppma and not more than 40 ppma. On a side surface, in a lengthwise direction, of the rod-shaped member, crystal grains each having a crystal grain size of not less than 1 mm are observed.Type: GrantFiled: February 14, 2018Date of Patent: February 22, 2022Assignee: TOKUYAMA CORPORATIONInventors: Masayoshi Nishikawa, Yuji Inoue
-
Patent number: 10583632Abstract: Coatings and materials that are atomic oxygen resistant and have an atomically smooth surface that can reduce drag are disclosed. The coatings and materials can be used on at least a portion of a spacecraft intended to operate in harsh environments, such as stable Earth orbits at about 100 km to about 350 km.Type: GrantFiled: January 26, 2018Date of Patent: March 10, 2020Assignee: Skeyeon, Inc.Inventors: Timothy K. Minton, Thomas E. Schwartzentruber
-
Patent number: 9828692Abstract: An apparatus for producing a single crystal of silicon comprises a plate with a top side, an outer edge, and an inner edge, a central opening adjoining the inner edge, and a tube extending from the central opening to beneath the bottom side of the plate; a device for metering granular silicon onto the plate; a first induction heating coil above the plate, provided for melting of the granular silicon deposited; a second induction heating coil positioned beneath the plate, provided for stabilization of a melt of silicon, the melt being present upon a growing single crystal of silicon. The top side of the plate consists of ceramic material and has elevations, the distance between the elevations in a radial direction being not less than 2 mm and not more than 15 mm.Type: GrantFiled: March 27, 2015Date of Patent: November 28, 2017Assignee: SILTRONIC AGInventors: Georg Brenninger, Waldemar Stein, Maik Haeberlen
-
Patent number: 9222198Abstract: A SiC single crystal wafer on which a good quality epitaxial film by suppressing defects derived from the wafer can be grown has an affected surface layer with a thickness of at most 50 nm and a SiC single crystal portion with an oxygen content of at most 1.0×1017 atoms/cm3. This SiC single crystal wafer is manufactured from a high purity SiC bulk single crystal obtained by the solution growth method using raw materials with an oxygen content of at most 100 ppm and a non-oxidizing atmosphere having an oxygen concentration of at most 100 ppm.Type: GrantFiled: February 27, 2012Date of Patent: December 29, 2015Assignee: NIPPON STEEL & SUMITOMO METAL CORPORATIONInventors: Kazuhiko Kusunoki, Kazuhito Kamei, Nobuyoshi Yashiro, Junichi Koike
-
Patent number: 9102035Abstract: A method for machining a profile into a silicon seed rod using a machine. The silicon seed rod is capable of being used in a chemical vapor deposition polysilicon reactor. The machine includes a plurality of grinding wheels. The method includes grinding a v-shaped profile into a first end of the silicon seed rod with one of the plurality of grinding wheels and grinding a conical profile in a second end of the silicon seed rod with another of the plurality of grinding wheels.Type: GrantFiled: March 12, 2012Date of Patent: August 11, 2015Assignee: MEMC Electronics Materials S.p.A.Inventors: Rodolfo Bovo, Paolo Molino
-
Patent number: 8940095Abstract: An apparatus for growth of uniform multi-component single crystals is provided. The single crystal material has at least three elements and has a diameter of at least 50 mm, a dislocation density of less than 100 cm?2 and a radial compositional variation of less than 1%.Type: GrantFiled: November 4, 2011Date of Patent: January 27, 2015Assignee: Rensselaer Polytechnic InstituteInventor: Partha Dutta
-
Publication number: 20130186325Abstract: The invention provides a process for determining surface contamination of polycrystalline silicon, including the steps of: a) providing two polycrystalline silicon rods by deposition in a Siemens reactor; b) determining contaminants in the first of the two rods immediately after the deposition; c) conducting the second rod through one or more systems in which polycrystalline silicon rods are processed further to give rod pieces or polysilicon fragments, optionally cleaned, stored or packed; d) then determining contaminants in the second rod; wherein the difference in the contaminants determined in the first and second rods gives surface contamination of polycrystalline silicon resulting from systems and the system environment.Type: ApplicationFiled: January 10, 2013Publication date: July 25, 2013Applicant: WACKER CHEMIE AGInventors: Hanns WOCHNER, Robert BAUMANN
-
Patent number: 8409348Abstract: A production method of a zinc oxide single crystal, comprising depositing a crystal of zinc oxide on a seed crystal from a mixed melt of zinc oxide and a solvent capable of melting zinc oxide and having a higher average density than zinc oxide in the melt. Preferably, a zinc oxide single crystal is continuously pulled while supplying the same amount of a zinc oxide raw material as that of the pulled zinc oxide. A single crystal excellent in the crystal quality and long in the pulling direction can be continuously produced.Type: GrantFiled: March 14, 2008Date of Patent: April 2, 2013Assignee: Ube Industries, Ltd.Inventors: Yoshizumi Tanaka, Itsuhiro Fujii
-
Patent number: 8216373Abstract: A temperature gradient is established in a crystallization crucible by means of a heat source and a cooling system. The cooling system comprises a heat exchanger and an adjustable additional heat source. The cooling system is preferably formed by an induction coil cooled by a coolant liquid circulating in the induction coil and by an electrically conductive induction susceptor positioned between the crucible and induction coil. The fabrication process comprises heating the crucible via the top and controlling heat extraction from the crucible downwards by means of the heat exchanger and by means of regulation of the adjustable additional heat source.Type: GrantFiled: December 6, 2006Date of Patent: July 10, 2012Assignees: Apollon Solar, Cyberstar, EFD Induction SAInventors: Roland Einhaus, Francois Claude Lissalde, Pascal Rivat
-
Patent number: 8197595Abstract: A method for producing thin silicon rods using a floating zone crystallization process includes supplying high frequency (HF) current to a flat induction coil having a central opening, a plurality of draw openings and a plate with a slot as a current supply of the HF current so as to provide a circumfluent current to the central opening. An upper end of a raw silicon rod is heated by induction using the flat induction coil so as to form a melt pool. A thin silicon rod is drawn upwards through each of the plurality of draw openings in the flat induction coil from the melt pool without drawing a thin silicon rod through the central opening having the circumfluent current.Type: GrantFiled: January 19, 2010Date of Patent: June 12, 2012Assignee: PV Silicon Forschungs und Produktions GmbHInventors: Helge Riemann, Friedrich-Wilhelm Schulze, Joerg Fischer, Matthias Renner
-
Publication number: 20110128610Abstract: The invention concerns Phenolic Configurationally Locked Polyene Single Crystals, which are especially suited as highly efficient nonlinear optical organic material. The invention also concerns methods for growth of crystalline thin films or bulk crystals from melt and/or solution. The compounds are suited and the methods may be used for manufacturing optical elements for several bulk and integrated applications, e.g. electro-Optics and THz-Wave applications.Type: ApplicationFiled: May 5, 2009Publication date: June 2, 2011Inventors: Peter Gunter, Mojca Jazbinsek, O-Pil Kwon, Seong-Ji Kwon, Christoph Hunziker, Harry Figi
-
Publication number: 20110126758Abstract: Techniques for the formation of silicon ingots and crystals using silicon feedstock of various grades are described. A common feature is adding a predetermined amount of germanium to the melt and performing a crystallization to incorporate germanium into the silicon lattice of respective crystalline silicon materials. Such incorporated germanium results in improvements of respective silicon material characteristics, including increased material strength and improved electrical properties. This leads to positive effects at applying such materials in solar cell manufacturing and at making modules from those solar cells.Type: ApplicationFiled: November 24, 2010Publication date: June 2, 2011Applicant: Calisolar, Inc.Inventors: Fritz G. Kirscht, Matthias Heuer, Martin Kaes, Kamel Ounadjela
-
Patent number: 7799131Abstract: The present invention provides a method for the continuous production of semiconductor ribbons by growth from a linear molten zone. The creation of the molten zone is achieved by application of an electric current, direct or alternating, parallel to the surface of the ribbon and perpendicular to the direction of growth, and intense enough to melt the said material, preferably using electrodes of the said material. The molten zone is fed by transference of the material, in the liquid state, from one or more reservoirs, where melting of the feedstock occurs. Preferably, the said electrodes and the said reservoir(s) are only constituted by the said material, thus avoiding contamination by foreign materials. The present invention is applicable, for example, in the industry of silicon ribbons production for photovoltaic application.Type: GrantFiled: April 15, 2004Date of Patent: September 21, 2010Assignee: Faculdade de Ciencias Da Universidade de LisboaInventors: António Vallêra, João Serra, Jorge Maia Alves, Miguel Brito, Roberto Gamboa, João Henriques
-
Publication number: 20090309069Abstract: A method of manufacturing a silicon monocrystal by FZ method, wherein a P-type or N-type silicon crystal having been pulled up by CZ method is used as a raw material. While impurities whose conductivity type is the same as that of the raw material are supplied by a gas doping method, the raw material is recrystallized by an induction-heating coil for obtaining a product-monocrystal.Type: ApplicationFiled: September 27, 2007Publication date: December 17, 2009Inventors: Shinji Togawa, Toshiyuki Sato
-
Patent number: 7520932Abstract: A method of analyzing carbon concentration in crystalline silicon includes providing a section from a zoned and annealed silicon core. The zoned and annealed core is extracted from a polycrystalline silicon composition and has a columnar shape. The zoned and annealed core includes a single crystalline silicon region and a freeze-out melt region. The freeze-out melt region is disposed adjacent to the single crystalline silicon region, and the regions are spaced along a length of the columnar shape. Specifically, the section is provided from the freeze-out melt region, with the entire freeze-out melt region in the section. A carbon concentration of the section is determined. By providing the section from the freeze-out melt region, as opposed to the polycrystalline silicon composition, determination of carbon concentration in the crystalline silicon is enabled with a sensitivity at less than or equal to 10 parts per billion atomic.Type: GrantFiled: March 29, 2007Date of Patent: April 21, 2009Assignee: Dow Corning CorporationInventor: Doug Kreszowski
-
Publication number: 20090048090Abstract: The invention intends to provide a single crystal material that can be used as a dielectric material for use in electronic devices, which has a high Qf value; and a process for producing the same. According to the invention, a single crystal of a composite oxide is obtained from a composition in which a slight amount of SrTiO3 is added to LaAlO3, and the (1-X)LaAlO3—XSrTiO3 single crystal material having the specific composition has such dielectric characteristics for electronic devices that the dielectric constant is 24 or more and the Qf value is 300,000 GHz or more, is considerably improved in the Qf value as a dielectric material, and can be applied to a high-temperature superconducting filter.Type: ApplicationFiled: August 11, 2005Publication date: February 19, 2009Inventor: Takeshi Shimada
-
Patent number: 7399360Abstract: Provided are a crucible which prevents polycrystal formation to easily allow growth of optical part material single crystals, and a single crystal growth method employing the crucible. The crucible has a smooth surface of about Rmax 3.2s as the surface roughness of the wall surface 1H, concave curved plane 1J, cone surface 1F and convex curved plane 1L of the starting material carrying section 1D and the wall surface 1K of the seed carrying section 1E, which constitute the inner surface of the crucible of a crucible body 1A.Type: GrantFiled: June 18, 2004Date of Patent: July 15, 2008Assignee: Hitachi Chemical Company, Ltd.Inventors: Keiji Sumiya, Nachimuthu Senguttuvan, Hiroyuki Ishibashi
-
Patent number: 7361219Abstract: The present invention are a method for producing a silicon wafer having a crystal orientation <110> from a silicon single crystal ingot grown by a Floating Zone method (FZ method), wherein, at least, an FZ silicon single crystal ingot is grown by being made to be dislocation-free by Dash Necking method using a seed crystal having its crystal axis inclined at a specified angle from a crystal orientation <110>, and the grown FZ silicon single crystal ingot is sliced at the just angle of a crystal orientation <110> to produce a silicon wafer having a crystal orientation <110>, and a silicon wafer produced by the method. Thereby, there are provided a method for producing a silicon wafer having a crystal orientation <110> from a silicon single crystal ingot made to be dislocation-free at a high success rate by using Dash Necking method by FZ method, and a silicon wafer having an crystal orientation <110>.Type: GrantFiled: July 12, 2004Date of Patent: April 22, 2008Assignee: Shin-Etsu Handotai Co., Ltd.Inventor: Ken Yoshizawa
-
Patent number: 7351283Abstract: A crystalline thin structure (104, 204, 404) is grown on a surface (108, 228) of a substrate (112, 208, 400) by depositing molecules (136, 220) from a molecular precursor to a lateral growth front (144, 224) of the structure using a crystal grower (116, 200). In one embodiment, the crystal grower comprises a solution (124) containing the molecular precursor in a solvent (140). Molecules are added to the lateral growth front by moving one or both of the free surface (120, 120?) of the solution and deposition surface relative to the other at a predetermined rate. In another embodiment, the crystal grower comprises a mask (212) that includes at least one opening (216). Precursor molecules are vacuum deposited via a molecular beam (236) at the growth front (228) of the crystalline thin structure (204) as one or both of the opening and surface are moved relative to the other at a predetermined rate.Type: GrantFiled: March 11, 2005Date of Patent: April 1, 2008Assignee: The University of Vermont and State Agricultural CollegeInventor: Randall L. Headrick
-
Patent number: 7335257Abstract: An apparatus is provided for manufacturing a single crystal rod from a poly crystal feed rod including a closed chamber at which chamber the feed rod is located. The chamber has an annular energy supply arranged around the feed rod for melting off the one end of the rod for providing single crystals. Actuators are provided, for axial movement of the feed rod and for a rotating relative movement between the feed rod and the annular energy supply The apparatus further includes components for recording and regulating the distance between the surface of the feed rod and an annular inwardly radially facing reference face associated with the energy supply The resulting apparatus and method that enable use of irregular feed rods that assume other shapes than the optimal cylindrical shape and also enable use of curved cylindrical and elliptical rods with irregular surfaces.Type: GrantFiled: February 6, 2004Date of Patent: February 26, 2008Assignee: Topsil Semiconductor Materials A/SInventors: Leif Jensen, Jan Eyving Petersen, Per Vabengard
-
Patent number: 7326297Abstract: The invention relates to a device for the production of crystal rods having a defined cross-section and a column-shaped polycrystalline structure by means of floating-zone continuous crystallization, comprising at least one crucible filled with crystalline material, provided with a central deviation for transporting the contents of the crucible to a growing crystal rod arranged below the crucible, whereby the central deviation plunges into the melt meniscus, also comprising means for continuously adjustable provision of crystalline material to the crucible, and means for simultaneously feeding the melt energy and adjusting the crystallization front.Type: GrantFiled: May 6, 2003Date of Patent: February 5, 2008Assignee: PV Silicon Forschungs- und Produktions AG.Inventors: Nikolai V. Abrosimov, Helge Riemann
-
Patent number: 7258740Abstract: The present invention relates to an apparatus for making a source material into a crystal fiber having different regions of polarization inversion. The apparatus of the present invention is similar to a laser-heated pedestal growth (LHPG) apparatus, characterized in that a first electric field generating device and a second electric field generating device are included. The first electric field generating device is used for providing a first external electric field which is used for poling the crystal fiber and inducing micro-swing of the crystal fiber. The second electric field generating device is disposed on a predetermined position above the first electric field generating device for providing a second external electric field to control and maintain the amplitude of the micro-swing. Whereby, the growth condition of the crystal fiber can be controlled precisely, and a uniformly and regularly periodic polarization inversion structure is fabricated.Type: GrantFiled: April 14, 2005Date of Patent: August 21, 2007Assignee: National Sun Yat-Sen UniversityInventors: Sheng-Lung Huang, Hsiao-Wen Lee, Chia-Chang Kuo, Sheng Bang Huang, Tsai-Shuan Chou, Li-Min Lee
-
Patent number: 7226571Abstract: A high resistivity p type silicon wafer with a resistivity of 100 ?cm or more, in the vicinity of the surface being formed denuded zone, wherein when a heat treatment in the device fabrication process is performed, a p/n type conversion layer due to thermal donor generation is located at a depth to be brought into contact with neither any device active region nor depletion layer region formed in contact therewith or at a depth more than 8 ?m from the surface, and a method for fabricating the same. The high resistivity silicon wafer can cause the influence of thermal donors to disappear without reducing the soluble oxygen concentration in the wafer, whereby even if various heat treatments are performed in the device fabrication process, devices such as CMOS that offer superior characteristics can be fabricated. The wafer has wide application as a substrate for a high-frequency integrated circuit device.Type: GrantFiled: October 15, 2004Date of Patent: June 5, 2007Assignee: Sumitomo Mitsubishi Silicon CorporationInventors: Nobumitsu Takase, Shinsuke Sadamitsu, Takayuki Kihara, Masataka Hourai
-
Patent number: 6966946Abstract: A manufacturing method of a Ga2-xFexO3 crystal is provided which can form a superior, uniform, and large crystal. By a floating zone melting method in which ends of material bars (3, 5), which are disposed at an upper and a lower position and which are composed of Ga2-xFexO3, are heated in a gas atmosphere with halogen lamps (6, 7) disposed at confocal areas so as to form a floating melting zone between the ends of the material bars (3, 5) which are disposed at the upper and the lower position and which are composed of Ga2-xFexO3, Ga2-xFexO3 a single crystal having an orthorhombic crystal structure is formed.Type: GrantFiled: October 11, 2002Date of Patent: November 22, 2005Assignee: Japan Science and Technology AgencyInventors: Yoshio Kaneko, Yoshinori Tokura, Shigeki Miyasaka
-
Patent number: 6712902Abstract: A feed rod for growing a magnetic single crystal having a composition represented by the formula (Y3-aAa)(Fe5-b-cBb)O12-&agr;, wherein A is at least one element selected from the lanthanoide series, B is at least one element selected from the group consisting of Ga, Al, In, and Sc, c is a value for decreasing the Fe content from the stoichiometric amount, &agr; is a value for decreasing the oxygen content to satisfy the chemically neutral condition, and the relationships 0≦a≧0.5; 0≦b≧1.0; 0<c≧0.15 and 0<&agr; are satisfied.Type: GrantFiled: August 15, 2002Date of Patent: March 30, 2004Assignee: Murata Manufacturing Co., Ltd.Inventor: Mikio Geho
-
Publication number: 20040016392Abstract: The invention relates to a method and a device for producing globular grains of high-purity silicon by atomising a silicon melt (6) in an ultrasonic field (10). Globular grains having a grain size of 50 &mgr;m can be produced by means of said method and device and can be used to separate high-purity silicon from silane in the fluid bed. The silicon melt (6) is fed into the ultrasonic field (10) at a distance of <50 mm in relation to a field node, and the atomised silicon leaves the ultrasonic field (10) at a temperature close to the liquidus point. The invention also relates to a use of the product produced according to the inventive method or using the inventive device, as particles for producing high-purity silicon from silane in a fluid bed.Type: ApplicationFiled: May 29, 2003Publication date: January 29, 2004Inventors: Hans-Dieter Block, Udo Krauter, Peter Schreckenberg
-
Patent number: 6663711Abstract: A process produces a crystal of a material with non-congruent melting using at least one first element and a second element. The process includes (a) placing, in a vertical alignment and maintaining under a controlled atmosphere, a bar of the first element gripped between a lower bar and an upper bar made out of the material, (b) transforming the bar of the first element into a floating zone by heating to a temperature that avoids the evaporation of the first element, the heating being obtained by heating means that provides a temperature gradient in the floating zone so that the lower face of the upper bar appears as a cold face, and (c) contra-rotating the lower and upper bars around the alignment axis and moving the whole bar assembly upwards in relation to the heating means in order to obtain the crystal on the cold face by growth in solution.Type: GrantFiled: February 20, 2002Date of Patent: December 16, 2003Assignee: Commissarat a l′Energie AtomiqueInventors: Jürgen Wollweber, Thierry Duffar, Jean-Louis Santailler, Véronique Chevrier
-
Publication number: 20030192470Abstract: A doped semiconductor wafer of float zone-pulled semiconductor material contains a dopant added to a molten material and has a radial macroscopic resistance distribution of less than 12% and striations of −10% to +10%. There is also a process for producing a doped semiconductor wafer by float zone pulling of a single crystal and dividing up the single crystal, in which process, during the float zone pulling, a molten material which is produced using an induction coil is doped with a dopant. It is exposed to at least one rotating magnetic field and is solidified. The single crystal which is formed during the solidification of the molten material is rotated. The single crystal and the magnetic field are rotated with opposite directions of rotation and the magnetic field has a frequency of 400 to 700 Hz.Type: ApplicationFiled: April 10, 2003Publication date: October 16, 2003Applicant: Wacker Siltronic AGInventors: Rolf Knobel, Wilfried Von Ammon, Janis Virbulis, Manfred Grundner
-
Publication number: 20030145781Abstract: A process for producing a single crystal of semiconductor material, in which fractions of a melt, are kept in liquid form by a pulling coil, solidify on a seed crystal to form the growing single crystal, and granules are melted in order to maintain the growth of the single crystal. The melting granules are passed to the melt after a delay. There is also an apparatus which is suitable for carrying out the process and has a device which delays mixing of the molten granules and of the melt.Type: ApplicationFiled: January 24, 2003Publication date: August 7, 2003Applicant: WACKER SILTRONIC AGInventor: Wilfried Von Ammon
-
Publication number: 20030041797Abstract: A feed rod for growing a magnetic single crystal having a composition represented by the formula (Y3-aAa)(Fe5-b-cBb)O12-&agr;, wherein A is at least one element selected from the lanthanoide series, B is at least one element selected from the group consisting of Ga, Al, In, and Sc, c is a value for decreasing the Fe content from the stoichiometric amount, &agr; is a value for decreasing the oxygen content to satisfy the chemically neutral condition, and the relationships 0≦a≧0.5; 0≦b≧1.0; 0<c≧0.15 and 0<&agr; are satisfied.Type: ApplicationFiled: August 15, 2002Publication date: March 6, 2003Inventor: Mikio Geho
-
Publication number: 20030024469Abstract: A silicon single crystal is produced by crucible-free float zone pulling, has a diameter of at least 200 mm over a length of at least 200 mm and is free of dislocations in the region of this length. A silicon wafer is separated from the silicon single crystal by a process for producing the silicon single crystal. The silicon single crystal is produced by crucible-free float zone pulling in a receptacle, in which an atmosphere of inert gas and nitrogen exerts a pressure of 1.5-2.2 bar, the atmosphere being continuously exchanged, with the volume of the receptacle being exchanged at least twice per hour. A flat coil with an external diameter of at least 220 mm is inserted in order to melt a stock ingot. The single crystal is pulled at a rate in a range from 1.4-2.2 mm/min and is periodically rotated through a sequence of rotation angles.Type: ApplicationFiled: July 23, 2002Publication date: February 6, 2003Applicant: Wacker Siltronic Gesellschaft Fur Halbleitermaterialien AGInventors: Ludwig Altmannshofer, Manfred Grundner, Janis Virbulis
-
Patent number: 6251182Abstract: The present invention is an improved susceptor for a float-zone apparatus for the float-zone processing of silicon elements. The susceptor is of a cylindrical design which allows the susceptor to be positioned around a free end of a silicon element to heat the free end of the silicon element to facilitate inductive coupling of the free end of the silicon element with an RF induction coil heater. In a preferred embodiment of the present invention, the susceptor is formed from tantalum.Type: GrantFiled: May 11, 1993Date of Patent: June 26, 2001Assignee: Hemlock Semiconductor CorporationInventors: Joaquin Enrique Luna, Scott Allen Wheelock
-
Patent number: 6165263Abstract: A method for growing a single crystal by allowing a seed crystal to contact a molten zone formed by melting a polycrystalline material, followed by moving the molten zone away from the seed, wherein the oxygen concentration in the atmosphere during growth of the single crystal is lower than about 10% by volume.Type: GrantFiled: March 5, 1999Date of Patent: December 26, 2000Assignee: Murata Manufacturing Co., Ltd.Inventors: Takenori Sekijima, Takashi Fujii, Kikuo Wakino, Masakatsu Okada
-
Patent number: 6143070Abstract: The present invention describes the growth of single crystals of non-congruently melting alloys, in particular, silicon-germanium of constant composition in a quartz ampoule by the use of CaCl.sub.2 as an encapsulant for the liquid encapsulated zone melting (LEZM) technique. The zone melting process was modified with the addition of calcium chloride which acts as a liquid encapsulant at temperatures above 660.degree. C. so that the crystal can grow without sticking to the container. The calcium chloride encapsulant creates a non-wetting buffer layer between the quartz container and the SiGe charge material allowing single crystal growth of mixed alloys. The crystal growth system consists of a vertical tube RF furnace with a water cooled split-ring concentrator. The concentrator is 5 mm. Thick by 25 mm diameter and provides a high temperature melt zone with a "spike" profile.Type: GrantFiled: May 15, 1998Date of Patent: November 7, 2000Assignee: The United States of America as represented by the Secretary of the Air ForceInventors: David F. Bliss, Brian G. Demczyk, John Bailey
-
Patent number: 6039802Abstract: There is provided a single crystal growth method which allows single crystal of an incongruent melting compound to be grown stable while controlling its growth orientation. The single crystal growth method comprises the steps of: holding polycrystal and seed crystal within a heating furnace; joining the polycrystal with the seed crystal; heating the polycrystal on the side opposite from the side where the polycrystal is joined with the seed crystal to form a melt zone; moving the melt zone to the side where the polycrystal is joined with the seed crystal so that the melt zone is in contact with the seed crystal to allow seeding; and growing single crystal by moving the melt zone which has been in contact with the seed crystal and been seeded to the opposite side from the side where the polycrystal is joined with the seed crystal.Type: GrantFiled: March 5, 1998Date of Patent: March 21, 2000Assignee: Murata Manufacturing Co., Ltd.Inventors: Takenori Sekijima, Takashi Fujii, Kikuo Wakino, Masakatsu Okada
-
Patent number: 5900060Abstract: The invention is directed to an apparatus, system and methods for growing high-purity crystals of substances that are peritectic at atmospheric pressure. The apparatus includes a pressure vessel that contains a pressurized gas. The apparatus also includes a cooling unit that is situated in the pressure vessel. The cooling unit receives a coolant flow from outside of the vessel, and has cooled surfaces that define an enclosure that receives the charge material. The apparatus further includes an inductive heating element situated in the vessel, that is coupled to receive electric power externally to the vessel. The element heats the interior portion of the charge material to form a molten interior portion contained by a relatively cool, exterior solid-phase portion of the charge material that is closer relative to the molten interior, to the cooled surfaces of the cooling unit.Type: GrantFiled: July 3, 1996Date of Patent: May 4, 1999Assignee: Cermet, Inc.Inventors: Jeffrey E. Nause, D. Norman Hill, Stephen G. Pope
-
Patent number: 5897705Abstract: A process for the production of an epitaxially coated semiconductor wafer, composed of a substrate wafer of monocrystalline silicon having a front side and a rear side, has at least one layer of semiconductor material which is epitaxially deposited on the front side of the substrate wafer and which is obtained by production of a heavily doped silicon monocrystal by crucible-free zone pulling, production of a substrate wafer having polished front side from the monocrystal and deposition of at least one epitaxial layer of semiconductor material on the front side of the substrate wafer.Type: GrantFiled: April 2, 1996Date of Patent: April 27, 1999Assignee: Wacker Siltronic Gesellschaft fur Halbeitermaterialien mbHInventors: Wolfgang Siebert, Erwin-Peter Mayer
-
Patent number: 5891828Abstract: PrBa.sub.2 Cu.sub.3 O.sub.Y exhibiting superconductivity is provided by a method including the steps of preparing a solvent consisting of a mixture of praseodymium oxide, at least one of barium oxide and barium carbonate, and copper oxide at a mixing ratio of between 1:3:5 and 1:8:20, disposing the solvent between a feed rod of PrBa.sub.2 Cu.sub.3 O.sub.7 formed to a high density and a seed crystal, heating the solvent to a temperature of 880.degree.-980.degree. C. in an atmosphere of an inert gas of at least one of argon and nitrogen mixed with 0.01-2% oxygen to form a floating solvent zone, moving the floating solvent zone toward the feed rod at 0.1-1.0 mm/hr under a temperature gradient at the solid-liquid interface of 25.degree.-35.degree. C./mm to precipitate single crystal on the seed crystal, and heat-treating the single crystal obtained in an atmosphere containing not less than 15% oxygen. Another aspect of the invention provides a superconducting device including the superconducting PrBa.sub.2 Cu.Type: GrantFiled: March 26, 1997Date of Patent: April 6, 1999Assignee: Agency of Industrial Science & Technology, Ministry of International Trade & IndustryInventors: Kunihiko Oka, Zhigang Zou, Toshimitsu Ito, Hiroshi Akoh
-
Patent number: 5863326Abstract: The invention is directed to an apparatus, system and methods for growing high-purity crystals of substances that are peritectic at atmospheric pressure using the Czochralski technique. The apparatus includes a pressure vessel that contains a pressurized gas. The apparatus also includes a cooling unit that is situated in the pressure vessel. The cooling unit receives a coolant flow from outside of the vessel, and has cooled surfaces that define an enclosure that receives the charge material. The apparatus further includes an inductive heating element situated in the vessel, that is coupled to receive electric power externally to the vessel. The element heats the interior portion of the charge material to form a molten interior portion contained by a relatively cool, exterior solid-phase portion of the charge material that is closer relative to the molten interior, to the cooled surfaces of the cooling unit.Type: GrantFiled: March 14, 1997Date of Patent: January 26, 1999Assignee: Cermet, Inc.Inventors: Jeffrey E. Nause, D. Norman Hill, Stephen G. Pope
-
Patent number: 5833748Abstract: A process and an apparatus for obtaining unfissured crystals of GaAs after the crystal has been formed by direction solidification from a melt in a quartz crucible. The quartz crucible is immersed in molten potassium hydroxide or sodium hydroxide at a temperature of 450.degree. to 600.degree. C.Type: GrantFiled: October 29, 1996Date of Patent: November 10, 1998Assignee: Forschungszentrum Julich GmbHInventors: Martin Althaus, Eckhard Kussel, Klaus Sonnenberg
-
Patent number: 5792258Abstract: A high-frequency induction heater for use in the growth of a semiconductor single crystal by the FZ method, including a plurality of high-frequency induction heating coils disposed in concentric juxtaposed relation to each other and each having a pair of power supply terminals provided for supplying a high-frequency current to the associated heating coil, with the power supply terminals of one of the heating coils being disposed in a space defined between opposite ends of an adjacent heating coil disposed outside the one heating coil, wherein a pair of electrically conductive members is attached to the pair of power supply terminals, respectively, of at least an innermost one of the heating coils so as to cover a space defined between the power supply terminals of the innermost heating coil. With the induction heater thus constructed, the so-called "pulsation", i.e.Type: GrantFiled: January 29, 1996Date of Patent: August 11, 1998Assignee: Shin-Etsu Handotai Co., Ltd.Inventors: Masanori Kimura, Ken Yoshizawa, Teruaki Fukami, Hirotoshi Yamagishi
-
Patent number: 5744380Abstract: There is provided a high quality epitaxial water on which the density of microscopic defects in the epitaxial layer is reduced to keep the GOI thereof sufficiently high and to reduce a leakage current at the P-N junction thereof when devices are incorporated, to thereby improve the yield of such devices. In an epitaxial wafer obtained by forming an epitaxial layer on a substrate, the density of IR laser scatterers is 5.times.10.sup.5 pieces/cm.sup.3 or less throughout the epitaxial layer.Type: GrantFiled: February 26, 1997Date of Patent: April 28, 1998Assignee: Komatsu Electronic Metals Co., Ltd.Inventors: Noriyuki Uemura, Hisami Motoura, Masashi Nishimura, Mitsuo Kohno
-
Patent number: 5688321Abstract: A method of producing a silicon single crystal by the floating-zone method, comprising the steps of: providing a polysilicon rod having an average grain length of 10 to 1000 .mu.m; heating a portion of the polysilicon rod to form a molten zone while applying a magnetic field of 300 to 1000 gauss to the molten zone; and passing the molten zone through the length of the polysilicon rod thereby the polysilicon rod is converted into a silicon single crystal ingot through a one-pass zoning of the floating zone method. An apparatus for reducing the method into practice is also described. The growing single crystal ingot is post-heated by a heat reflector near the molten zone.Type: GrantFiled: April 23, 1996Date of Patent: November 18, 1997Assignee: Shin-Etsu Handotai Co., Ltd.Inventors: Masanori Kimura, Hirotoshi Yamagishi
-
Patent number: 5667585Abstract: Proposed is a low-cost method for the preparation of a wire-formed crystal of silicon having a diameter of 1 mm or smaller, in which a vertically held starting rod of silicon is melted at one end portion by high-frequency induction heating, a seed crystal is brought into contact with the molten portion and then the seed crystal and the starting silicon rod are pulled apart in the vertical direction at a controlled velocity with a controlled high-frequency power input so that the melt of silicon drawn by the seed crystal is solidified and crystallized into the form of a wire.Type: GrantFiled: December 27, 1995Date of Patent: September 16, 1997Assignee: Shin-Etsu Chemical Co., Ltd.Inventors: Tsuguo Fukuda, Susumu Sakaguchi, Tadashi Kamioka, Toru Yamada, Teruhiko Hirasawa
-
Patent number: 5665664Abstract: Proposed is a grain boundary-free crystalline body of a perovskite structure having a chemical composition of the formula Pr.sub.1-x M.sub.x MnO.sub.3, in which M is calcium or strontium and the subscript x is a number of 0.3 to 0.5, which exhibits a magnetoresistance behavior with a phase transition between an insulator phase and a ferromagnetic metallic phase accompanied by the phenomenon of hysteresis. This grain boundary-free crystalline body can be obtained by subjecting a sintered body of a powder blend consisting of the oxides of praseodymium, manganese and calcium or strontium to a crystal growing treatment by the floating zone-melting method in an atmosphere of oxygen.Type: GrantFiled: November 3, 1995Date of Patent: September 9, 1997Assignees: Japan as represented by Director General of Agency of Industrial Science and Technology, Angstrom Technology PartnershipInventors: Yasuhide Tomioka, Yoshinori Tokura
-
Patent number: 5556461Abstract: A method of producing a silicon single crystal by the floating-zone method, comprising the steps of: providing a polysilicon rod having an average grain length of 10 to 1000 .mu.m; heating a portion of the polysilicon rod to form a molten zone while applying a magnetic field of 300 to 1000 gauss to the molten zone; and passing the molten zone through the length of the polysilicon rod thereby the polysilicon rod is converted into a silicon single crystal ingot through a one-pass zoning of the floating zone method. An apparatus for reducing the method into practice is also described.Type: GrantFiled: June 15, 1994Date of Patent: September 17, 1996Assignee: Shin-Etsu Handotai Co., Ltd.Inventors: Masanori Kimura, Hirotoshi Yamagishi
-
Patent number: 5499598Abstract: Silicon granules filled in a nonconductive cylinder are locally heated from outside of the cylinder using a local heating means, for example, a radio-frequency induction heating coil etc. to form a silicon granule sintering portion and a silicon melting portion, with gradually moving the local heating means in such a manner that the positions of the sintering portion and of the melting portion can be moved gradually. Concomitantly with the movement of the positions of the sintering portion and the melting portion, the melting portion in the original position is solidified to produce a silicon rod. According to this method, molten silicon is formed without contacting the inner wall surface of the cylinder and then solidified so that there can be obtained a silicon rod containing no impurities derived from the material of the cylinder.Type: GrantFiled: March 11, 1994Date of Patent: March 19, 1996Assignee: Tokuyama CorporationInventor: Hiroyuki Oda
-
Patent number: 5476063Abstract: A seed crystal is connected with a polycrystal at one end of the polycrystal, the connected crystal material is melted under a zero-gravity or microgravity environment without any container, and a single crystal is grown.Type: GrantFiled: August 4, 1994Date of Patent: December 19, 1995Assignees: National Research Institute for Metals, National Space Development Agency of JapanInventors: Isao Nakatani, Satoshi Takahashi, Isao Nishida, Kiyoshi Ozawa
-
Patent number: 5444040Abstract: A method of manufacturing a single crystal of a superconductive oxide by a travelling solvent floating zone method (TSFZ Method). In this manufacturing method, a sintered feed rod of an oxide belonging to a tetragonal system, exhibiting anisotropic properties and superconductive properties and having a stoichiometric composition of the superconductive oxide is melted into a layer of a solvent mainly consisting of a oxidized copper and arranged in an infrared heating furnace under an oxygen pressure thereby growing a large single crystal of the superconductive oxide which is 5 mm or over in diameter and 40 mm or over in length.The superconductive oxide is one selected from the group consisting of La.sub.2-x A.sub.x CuO.sub.4 (A:Sr,Ba), Nd.sub.2-x Ce.sub.x CuO.sub.4, YBa.sub.2 Cu.sub.3 O.sub.7-x, BiSrCaCu.sub.2 O.sub.x, Tl.sub.2 Ba.sub.2 Ca.sub.2 Cu.sub.3 O.sub.Type: GrantFiled: November 6, 1992Date of Patent: August 22, 1995Assignee: Seiko Epson CorporationInventors: Hironao Kojima, Isao Tanaka
-
Patent number: 5437243Abstract: Human-made diamond, as well as naturally found diamond, is a transparent, superhard, crystalline, and electrically nonconductive form of carbon. In this invention, an electrical current of supercritical density alone produces the transformation of graphite to diamond. The entire graphite-to-diamond transformation requires only a few millionths of a second. Using the principles of the invention, diamond can be produced in a variety of shapes, such as loose debris, rods, fibers, bars, dust, etc. In addition to diamond, Buckminster Fuller Balls, known also as C-60 carbon fullerines, are produced using the process and apparatus of the invention.Type: GrantFiled: July 1, 1992Date of Patent: August 1, 1995Inventor: Maciej J. Pike-Biegunski