Of Coating Material Or Applicator Patents (Class 118/667)
  • Patent number: 12134823
    Abstract: Embodiments described herein generally relate to methods for controlling a processing system. Particularly, subfab components of the processing system may be controlled based on the flow of materials into the processing system. In some embodiments, the flow of an inert gas used to dilute the effluent gases may be controlled in accordance with the flow of one or more precursor gases. Thus, the cost of running the processing system is reduced while mitigating critical EHS concerns.
    Type: Grant
    Filed: July 1, 2022
    Date of Patent: November 5, 2024
    Assignee: Applied Materials, Inc.
    Inventor: Andreas Neuber
  • Patent number: 12091749
    Abstract: Embodiments described herein include processes and apparatuses relate to epitaxial deposition. A method for epitaxially depositing a material is provided and includes positioning a substrate on a substrate support surface of a susceptor within a process volume of a chamber body, where the process volume contains upper and lower chamber regions. The method includes flowing a process gas containing one or more chemical precursors from an upper gas inlet on a first side of the chamber body, across the substrate, and to an upper gas outlet on a second side of the chamber body, flowing a purge gas from a lower gas inlet on the first side of the chamber body, across the lower surface of the susceptor, and to a lower gas outlet on the second side of the chamber body, and maintaining a pressure of the lower chamber region greater than a pressure of the upper chamber region.
    Type: Grant
    Filed: May 11, 2021
    Date of Patent: September 17, 2024
    Assignee: Applied Materials, Inc.
    Inventors: Tetsuya Ishikawa, Swaminathan T. Srinivasan, Matthias Bauer, Manjunath Subbanna, Ala Moradian, Kartik Bhupendra Shah, Errol Antonio C Sanchez, Michael R. Rice, Peter Reimer, Marc Shull
  • Patent number: 11938493
    Abstract: Provided is a substrate processing apparatus. The substrate processing apparatus includes a swing nozzle that is arranged on one side of the support module, moves in a swing manner, and sprays a chemical solution to the substrate, a sensor arranged on one side of the swing nozzle to sense movement of the swing nozzle, an electromagnet and a magnet installed on the other side of the swing nozzle so as to be able to adjust spacing relative to each other, and a controller for receiving a sensing result of the sensor and performing a damping operation to the swing nozzle by providing power to the electromagnet to generate an attractive force or repulsive force between the electromagnet and the magnet.
    Type: Grant
    Filed: August 5, 2020
    Date of Patent: March 26, 2024
    Assignee: Semes Co., Ltd.
    Inventors: Noh Hoon Myoung, Han Seon Kang, Jung Min Yoon
  • Patent number: 11840904
    Abstract: A method includes introducing a drill string including a bottom hole assembly into a wellbore, wherein the bottom hole assembly includes a mounted 3D printing sub-assembly. A wellbore is drilled with the bottom hole assembly, and at least a portion of a casing is printed with the 3D printing sub-assembly while drilling the wellbore. A related system includes a drill string having a length of drill pipe and a bottom hole assembly disposed at a distal end of the length of drill pipe. A 3D printing sub-assembly is mounted on the bottom hole assembly, wherein the printing sub-assembly includes a printer housing and a 3D printing head mounted at the printer housing. A control guides the 3D printing head to print at least a portion of a casing at a location radially away from the central longitudinal axis of the drill string.
    Type: Grant
    Filed: February 28, 2022
    Date of Patent: December 12, 2023
    Assignee: SAUDI ARABIAN OIL COMPANY
    Inventors: Adrian Cesar Cavazos Sepulveda, Abdulwahab S. Al-Johar, Amjad Shaarawi, Timothy Eric Moellendick
  • Patent number: 11518709
    Abstract: An optical fiber coating die assembly is provided. The optical fiber coating die assembly includes a housing defining a guide chamber having an inlet for receiving optical fiber and an outlet, a guide die located at the outlet of the guide chamber, and a sizing die. The optical fiber coating die assembly also includes a coating applicator disposed between the guide die and the sizing die, and a tube operatively coupled to the inlet of the guide chamber and axially aligned with the chamber to receive the optical fiber fed into the guide chamber and provide a barrier to air flow.
    Type: Grant
    Filed: April 10, 2019
    Date of Patent: December 6, 2022
    Assignee: Corning Incorporated
    Inventors: Dana Craig Bookbinder, Darren Andrew Stainer, Pushkar Tandon, Ruchi Tandon, Bryan William Wakefield
  • Patent number: 11493410
    Abstract: A slide processing apparatus controls the temperature and orientation of a microscope slide carrying one or more specimens. The apparatus heats the specimen-bearing microscope slide while the slide is oriented to both facilitate adhesion between the specimens and the slide and control movement of the specimens relative to the microscope slide. A slide dryer of the apparatus conductively heats the specimens using a conductive slide heater that physically engages the microscope slide.
    Type: Grant
    Filed: November 19, 2019
    Date of Patent: November 8, 2022
    Assignee: Ventana Medical Systems, Inc.
    Inventor: Jonathan Peter Beer
  • Patent number: 11369705
    Abstract: The present invention relates to a light control system. The light control system comprising: a plurality of light sources each configured to emit light within a predetermined spectral range, each of the plurality of light sources being configured to illuminate a corresponding sub-portion of a space, a sensor configured to within the space, detect a location of a human or an animal; and a control engine configured to control the plurality of light sources based on the detected location of the human or the animal such that a sub-portion of the space in which the human or the animal is not present is exposed to the light within the predetermined spectral range at a predetermined threshold intensity. A method for exposing a sub-portion of a space with light within a predetermined spectral range at a predetermined threshold intensity is also provided.
    Type: Grant
    Filed: September 1, 2017
    Date of Patent: June 28, 2022
    Assignee: BrainLit AB
    Inventors: Peter K Andersson, Tord Wingren
  • Patent number: 11185611
    Abstract: Methods of decellularization of tissue, such as mammalian tissue, are provided, along with methods of making an extracellular matrix (ECM) preparation. Systems and apparatus useful in performing the methods are also provided.
    Type: Grant
    Filed: May 18, 2018
    Date of Patent: November 30, 2021
    Assignee: University of Pittsburgh—Of the Commonwealth System of Higher Education
    Inventors: Thomas W. Gilbert, Christopher M. Hobson, Ethan N. Ungchusri
  • Patent number: 10960575
    Abstract: A device includes a source for at least one liquid plastic component, and a metering device. The source is configured to intermittently supply the at least one liquid plastic component for the metering device. A buffer device with a variable buffer volume is between the source and the metering device, and the buffer device is connected to the source via an inlet opening and to the metering device via an outlet opening.
    Type: Grant
    Filed: June 24, 2016
    Date of Patent: March 30, 2021
    Assignee: HENKEL AG & CO. KGAA
    Inventors: Guenther Baldauf, Mario Metzler
  • Patent number: 10407771
    Abstract: Methods and apparatus for cleaning an atomic layer deposition chamber are provided herein. In some embodiments, a chamber lid assembly includes: a housing enclosing a central channel that extends along a central axis and has an upper portion and a lower portion; a lid plate coupled to the housing and having a contoured bottom surface that extends downwardly and outwardly from a central opening coupled to the lower portion of the central channel to a peripheral portion of the lid plate; a first heating element to heat the central channel; a second heating element to heat the bottom surface of the lid plate; a remote plasma source fluidly coupled to the central channel; and an isolation collar coupled between the remote plasma source and the housing, wherein the isolation collar has an inner channel extending through the isolation collar to fluidly couple the remote plasma source and the central channel.
    Type: Grant
    Filed: October 6, 2014
    Date of Patent: September 10, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Anqing Cui, Faruk Gungor, Dien-Yeh Wu, Vikas Jangra, Muhammad M. Rasheed, Wei V. Tang, Yixiong Yang, Xiaoxiong Yuan, Kyoung-Ho Bu, Srinivas Gandikota, Yu Chang, William W. Kuang
  • Patent number: 9849475
    Abstract: A mobile spray dispenser comprises a fluid circulation system and a heating unit. The fluid circulation system has a motorized pump capable of circulating fluid from a fluid reservoir in a high-pressure spray mode and a low-pressure recirculation mode, and of providing the fluid to a sprayer. The motorized pump draws lower power in the low-pressure recirculation mode than in the high-pressure spray mode. The heating unit is disposed within the fluid circulation system to heat the fluid to a target temperature, and comprises a primary heater and a boost heater. The primary heater is configured to be active during both the high-pressure spray mode and the low-pressure recirculation mode. The boost heater is in fluid series with the primary heater, and is configured to be active only during the low-pressure recirculation mode.
    Type: Grant
    Filed: December 16, 2013
    Date of Patent: December 26, 2017
    Assignee: Graco Minnesota Inc.
    Inventors: Christopher J. Pellin, Jeffrey N. Velgersdyk, Joshua D. Roden, Bryan K. Colby
  • Patent number: 9770735
    Abstract: A seal agent coating device is disclosed, comprising: a storage cavity, a nozzle, a connecting duct and a power driven component, wherein: the nozzle comprises a nozzle cavity and a mouth, the mouth being located at the lower part of the nozzle cavity and matching with the shape of the seal agent coating area of the substrate; the connecting duct interconnects the storage cavity and the nozzle cavity; the power driven component can squeeze the seal agent in the storage cavity into the nozzle cavity via the connecting duct, thereby squeezing it out via the mouth.
    Type: Grant
    Filed: July 15, 2015
    Date of Patent: September 26, 2017
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventor: Feng Yu
  • Patent number: 9733654
    Abstract: A temperature control system for dispensing a fluid material from an applicator nozzle at a controlled temperature that includes at least one temperature control fluid conduit at least one fluid material supply conduit and at least one manifold device. The manifold device is in thermal communication with the temperature control fluid conduit and the fluid conduit and may also be in thermal communication with the fluid material supply conduit. At least one thermal adjustment device is in thermal contact with the manifold device. The thermal adjustment device includes at least one thermoelectric device such as at least one peltier circuit. The temperature control system also includes at least one sensor positioned proximate to the applicator nozzle that produces at least one signal actionable on the Peltier circuit device.
    Type: Grant
    Filed: August 4, 2010
    Date of Patent: August 15, 2017
    Inventor: William A. Cline
  • Patent number: 9464339
    Abstract: A process for the inhibition of particulate emission during friction of heat-treated iron ore pellets includes the following steps: a) removal of heat-treated iron ore pellets at a temperature of 200° C.; and b) spraying of an alcohol by-product on pellets. The use of an alcohol by-product as an inhibitor of particulate emission is further described, with the alcohol by-product being sprayed on heat-treated iron ore pellets, which can partially or completely replace water during the handling, stacking, loading, and unloading of materials such as pellets, granules, fines, and other products from iron ore and other minerals. This process significantly reduces the emission of particulates in the an operational area.
    Type: Grant
    Filed: April 20, 2010
    Date of Patent: October 11, 2016
    Assignee: Vale S.A.
    Inventors: Rodrigo Ribeiro de Araujo, Celso de Jesus Silva, Antonio Alves e Silva Reis, Leonidio Stegmiller, Aldo Gamberini Junior, Reinaldo Walmir de Jesus, Alexandre Soares Pinto
  • Patent number: 9272419
    Abstract: Various embodiments are directed to a system for managing an inventory comprising serialized products. A computer system may receive from an intake sensor a first tray identifier describing a first tray present on an intake transport system. The computer system may also associate the first tray identifier with a first serial identifier of a first product unit present on a product transport system and instructing the product transport system, by the computer system, to transport the first product unit to the first tray. Additionally, the computer system may instruct a robot to place the first tray containing the first product unit at a first bin selected from a plurality of robot-accessible bins.
    Type: Grant
    Filed: October 28, 2013
    Date of Patent: March 1, 2016
    Inventors: Mark J. Keller, Jesse J. Garcia, Matthew Stephen Kolodzej, Karsten Kell
  • Patent number: 9248466
    Abstract: Various embodiments relate to application of a fluid to a substrate. The fluid is locally heated, for example, to obtain a desired thickness profile.
    Type: Grant
    Filed: May 10, 2013
    Date of Patent: February 2, 2016
    Assignee: Infineon Technologies AG
    Inventors: Karl Pilch, Hans Leitner, Michael Kalin
  • Patent number: 8978581
    Abstract: An adhesive applying device includes a robot including a robot arm; a rotor set jig for setting thereat a rotor; a gun including a holder to which a cartridge containing the adhesive is mountable, the gun discharging the adhesive in the cartridge mounted to the holder and being mountable to an end of the robot arm; an electromagnetic valve that performs on/off switching control of supply of compressed air at a predetermined pressure into the cartridge mounted to the holder of the gun; a robot controller that controls an operation of the robot; and an upper-order controller that coordinates and controls the on/off switching control performed by the electromagnetic valve and the control of the operation of the robot performed by the robot controller.
    Type: Grant
    Filed: August 2, 2012
    Date of Patent: March 17, 2015
    Assignee: Kabushiki Kaisha Yaskawa Denki
    Inventor: Koji Yano
  • Patent number: 8961853
    Abstract: Disclosed are methods of lithography using a tip array having a plurality of pens attached to a backing layer, where the tips can comprise a metal, metalloid, and/or semi-conducting material, and the backing layer can comprise an elastomeric polymer. The tip array can be used to perform a lithography process in which the tips are coated with an ink (e.g., a patterning composition) that is deposited onto a substrate upon contact of the tip with the substrate surface. The tips can be easily leveled onto a substrate and the leveling can be monitored optically by a change in light reflection of the backing layer and/or near the vicinity of the tips upon contact of the tip to the substrate surface.
    Type: Grant
    Filed: June 4, 2010
    Date of Patent: February 24, 2015
    Assignee: Northwestern University
    Inventors: Chad A. Mirkin, Wooyoung Shim, Adam B. Braunschweig, Xing Liao, Jinan Chai, Jong Kuk Lim, Gengfeng Zheng, Zijian Zheng
  • Publication number: 20140273302
    Abstract: Disclosed are a method and a system for processing wafers in fabricating a semiconductor device where disposing chemicals and wafer heating are needed for chemical reaction. A wafer is placed above a wafer heater such that a second surface faces the wafer heater, and heated from the second surface. A chemical layer is formed on an opposing first surface. The wafer heater is sized and configured to be capable of heating the entire second surface, and adapted to produce a locally differential temperature profile if needed. During heating, an actual temperature profile on the wafer may be monitored and transmitted to a computing system, which may generate a target temperature profile and control the wafer heater to adjust local temperatures on the wafer according to the target temperature profile. A supplemental heater for heating the chemicals may be used for finer control of the wafer temperature.
    Type: Application
    Filed: January 31, 2014
    Publication date: September 18, 2014
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ying-Hsueh Chang Chien, Chi-Ming Yang
  • Patent number: 8833296
    Abstract: A dispensing apparatus includes a dispensing unit having a main body, a channel through the main body, and a plurality of nozzles connected to the main body, the plurality of nozzles being configured to dispense fluid flowing in the channel, a gap sensor unit configured to determine size of gaps between adjacent nozzles in the dispensing unit, and a thermal expansion adjusting unit configured to thermally expand or contract the main body of the dispensing unit to adjust the gap size between adjacent nozzles to a predetermined size, based on the gap size determined by the gap sensor unit.
    Type: Grant
    Filed: November 9, 2010
    Date of Patent: September 16, 2014
    Assignee: Samsung Display Co., Ltd.
    Inventors: Jae-Seok Park, Yun-Mi Lee
  • Patent number: 8807077
    Abstract: Exemplary coating devices and methods are disclosed. An exemplary coating device may include an atomizer for applying a spray jet of a coating means or material to a component, at least one directing air nozzle for outputting shaping or directing air in order to shape the spray jet, and a temperature-control device for controlling the temperature of the directing air. The coating device may further include a control unit which activates the temperature-control device as a function of at least one operating variable of the atomizer in order to set a predetermined directing air temperature.
    Type: Grant
    Filed: June 20, 2008
    Date of Patent: August 19, 2014
    Assignee: Durr Systems GmbH
    Inventors: Alexander Meissner, Frank Herre, Marcus Frey, Torsten Block, Michael Baumann
  • Patent number: 8772055
    Abstract: A method and apparatus for processing a semiconductor substrate is described. The apparatus is a process chamber having an optically transparent upper dome and lower dome. Vacuum is maintained in the process chamber during processing. The upper dome is thermally controlled by flowing a thermal control fluid along the upper dome outside the processing region. Thermal lamps are positioned proximate the lower dome, and thermal sensors are disposed among the lamps. The lamps are powered in zones, and a controller adjusts power to the lamp zones based on data received from the thermal sensors.
    Type: Grant
    Filed: March 12, 2013
    Date of Patent: July 8, 2014
    Assignee: Applied Materials, Inc.
    Inventors: Joseph M. Ranish, Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran, Swaminathan T. Srinivasan, Mehmet Tugrul Samir
  • Patent number: 8747558
    Abstract: The purpose of the invention is increasing the efficiency of utilizing an EL material and providing a deposition method and a vapor deposition apparatus which is one of the film formation systems which are excellent in throughput and uniformity in film thickness in forming an EL layer. According to the invention, evaporation is performed by moving or reciprocating an evaporation source holder in which a plurality of containers (crucible) each encapsulating an evaporation material are set only in an X direction while moving a substrate at regular intervals. Further, in the plurality of evaporation source holders, film thickness meters of adjacent evaporation sources are disposed alternately so as to sandwich the movement pathway of the substrate.
    Type: Grant
    Filed: March 21, 2007
    Date of Patent: June 10, 2014
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Junichiro Sakata, Shunpei Yamazaki
  • Patent number: 8720370
    Abstract: Coating rollers accepting liquid media provide liquid chemicals to substrates for depositing a thin coating layer on the flat substrates, such as semiconductors or panels. The liquid media is cooled to a life-preserving temperature while shielded from the thermal energy heating the substrates to prevent degrading the liquid media. Physical barrier or temperature barrier can be established in vicinities of the rollers to further limit exposing the liquid media to high temperature.
    Type: Grant
    Filed: August 16, 2011
    Date of Patent: May 13, 2014
    Assignee: Dynamic Micro System Semiconductor Equipment GmbH
    Inventor: Lutz Rebstock
  • Patent number: 8714105
    Abstract: A process for application of alcoholic derivative on heat treated pellets for inhibition of particulate emission is provided, and the process includes weighing the amount of heat treated pellets discharged from furnaces, measuring the temperature of the heat treated pellets discharged from furnaces, applying cooling fluid on the heat treated pellets until they reach temperatures below 140° C., and spraying the alcoholic derivative on the heat treated pellets. Also provided is a first device for applying cooling fluid that is capable of calculating a dosage of cooling fluid to be applied to the heat treated pellets, a second device for applying alcoholic derivative that is capable of calculating a dosage of alcoholic derivative to be applied to the heat treated pellets already cooled, and a carrier device that continuously communicates with the first device for applying cooling fluid and with the second device for applying alcoholic derivative.
    Type: Grant
    Filed: April 15, 2011
    Date of Patent: May 6, 2014
    Assignee: Vale S.A.
    Inventors: Jose Antonio Alves E. Silva Reis, Leonidio Stegmiller, Aldo Gamberini
  • Patent number: 8689732
    Abstract: A system for creating a wood like appearance on a synthetic component including a sales client device, a network, computer instructions for creating a work order, a tray with scannable tray identifier to hold a synthetic component, a production client device connected to the network with computer instructions for applying a base coat, a glaze, and a top coat to the synthetic component as it automatically moves on a conveyer system a portion of which is connected to the production client device. A scannable tray identifier with a plurality of sensors link the tray identifier to the work order for authenticating and validating the location of the tray on the conveyor system, or initiating an alerting device. The system has a plurality of temperature control environments to simultaneously control heating of the synthetic component while spraying, drying and UV curing with spray treatment device.
    Type: Grant
    Filed: August 14, 2013
    Date of Patent: April 8, 2014
    Assignee: Glasscraft Door Company
    Inventors: John B. Plummer, Matthew James O'Shea, Joseph Gene Denley
  • Patent number: 8551574
    Abstract: The present invention relates to a process of manufacturing a stretch composite, said method comprising: a) providing a first substrate in a machine direction, wherein said substrate has opposing first and second surfaces; b) providing a gravure printing roll having an exterior surface that comprises one or more cells wherein at least a portion of the surface is relatively cool; c) depositing a molten, non-adhesive, elastomeric composition onto the exterior surface of the gravure printing device which comprises a gravure printing roll, wherein said composition is characterized as having a peel force of less than about 3 N/cm; d) causing said composition to be pushed into said cells; and e) contacting said first surface of said substrate with said gravure printing roll and substantially completely transferring said elastomeric composition from said cells of said exterior surface on said gravure printing roll to said first surface; wherein said process is substantially free of tackifier.
    Type: Grant
    Filed: March 16, 2005
    Date of Patent: October 8, 2013
    Assignee: The Procter & Gamble Company
    Inventors: Fred Naval Desai, Urmish Popatlal Dalal, Mark William Hamersky, Steven Daryl Smith
  • Patent number: 8544410
    Abstract: The invention is an immobilization apparatus comprising: a container (1) having a nozzle (4) formed for exhausting a solution; a charging means (PS, 5, 4) for charging the sample solution within the container; and an airflow generating means for generating airflow (Af) crashing into the sample solution. The immobilization apparatus is configured to operate the charging means and the airflow generating means simultaneously, atomize the solution into microparticulate substances charged while maintaining its activity and functionality by the electrostatic force due to the charge of the sample solution charged by the charging means and the crash energy due to the crash of the airflow generated by the airflow generating means into the sample solution, and exhaust it from the exhaust outlet (4), and the charged microparticulate substances are deposited on a substrate (7) by the electrostatic force.
    Type: Grant
    Filed: November 6, 2008
    Date of Patent: October 1, 2013
    Assignees: Fuence Co., Ltd., Hit Co., Ltd.
    Inventors: Akihiko Tanioka, Kozo Inoue, Kazuya Nitta, Masaru Tamaru
  • Patent number: 8523331
    Abstract: A material jet system, comprising a container for molten jet material (3) to be ejected, a heater (4) for melting and/or keeping molten said jet material, and a jetting unit (5, 6, 7) which is arranged to form and eject droplets (8) of said jet material. The system, moreover, comprises supply structures (2) which are arranged for providing an uninterrupted supply of said material, which comprises a metal in solid form (1), and which preferably have the shape of a wire, bar or tape. Furthermore the system comprises a structure for sealing the material in solid form and a pressure controller to control a heat insulating fluid pressure in the container.
    Type: Grant
    Filed: December 27, 2006
    Date of Patent: September 3, 2013
    Assignee: Nederlandse Organisatie voor togegepast-natuurwetenschappelijk Onderzoek TNO
    Inventor: René Jos Houben
  • Patent number: 8518480
    Abstract: The present invention is a method of developing a resist film on a substrate using a developing solution at a predetermined temperature lower than room temperature, including a first cooling step of mounting and cooling the substrate on a cooling plate at a temperature lower than room temperature and higher than the predetermined temperature in a cooling apparatus; a second cooling step of then carrying the substrate into a developing apparatus and supplying a rinse solution at the predetermined temperature or lower onto the substrate to cool the substrate in the developing apparatus; a developing step of then supplying the developing solution onto the substrate and developing the resist film on the substrate to form a resist pattern in the resist film; and a cleaning step of then supplying a rinse solution at the predetermined temperature onto the substrate to clean a front surface of the substrate.
    Type: Grant
    Filed: January 11, 2011
    Date of Patent: August 27, 2013
    Assignee: Tokyo Electron Limited
    Inventors: Norifumi Sato, Yukio Kiba, Tetsushi Miyamoto, Kazuhisa Hasebe
  • Patent number: 8453599
    Abstract: A resist solution supply apparatus of the present invention includes: a resist solution supply source storing a resist solution therein; a supply tube for supplying the resist solution from the resist solution supply source to a coating nozzle; a filter provided in the supply tube for removing foreign matter in the resist solution; and a heating unit provided along the supply tube at a position closer to the resist solution supply source than the filter, for heating the resist solution in the supply tube to a predetermined temperature higher than room temperature to make a resist gel to aggregate to become coarse so that the coarse resist gel can be collected and removed by the filter.
    Type: Grant
    Filed: August 5, 2010
    Date of Patent: June 4, 2013
    Assignee: Tokyo Electron Limited
    Inventors: Kosuke Yoshihara, Yusuke Yamamoto
  • Patent number: 8445189
    Abstract: The temperature of a developing solution is varied depending on the type of resist or the resist pattern. The developing solution is applied while scanning a developer nozzle having a slit-shaped ejection port that has a length matching the width of the effective area of the substrate. After leaving the substrate with the developing solution being coated thereon for a predetermined period of time, a diluent is supplied while scanning a diluent nozzle, thereby substantially stopping the development reaction and causing the dissolved resist components to diffuse. A desired amount of resist can be quickly dissolved through the control of the developing solution temperature, while the development can be stopped before the dissolved resist components exhibit adverse effect through the supply of the diluent a predetermined timing, whereby achieving a pattern having a uniform line width and improved throughput.
    Type: Grant
    Filed: February 10, 2011
    Date of Patent: May 21, 2013
    Assignee: Tokyo Electron Limited
    Inventors: Taro Yamamoto, Kousuke Yoshihara, Hideharu Kyouda, Hirofumi Takeguchi, Atsushi Ookouchi
  • Patent number: 8342120
    Abstract: A system that incorporates teachings of the present disclosure may include, for example, an apparatus having a tube with an ingress opening to receive a liquid, and an egress opening to release the liquid, a conductor positioned in a conduit of the tube, the conductor and the conduit having dimensions to cause a surface tension of the liquid to prevent a constant flow of the liquid from the egress opening, and a power supply coupled to the conductor to apply a charge to the liquid to overcome the surface tension and form at the egress opening a single jet stream of the liquid applicable on a substrate to create a pattern. The single jet stream can be controllable in part by a viscosity of the liquid. Additional embodiments are disclosed.
    Type: Grant
    Filed: March 16, 2009
    Date of Patent: January 1, 2013
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: Kyekyoon Kim, Hyungsoo Choi, Philip Edward Heil, III
  • Patent number: 8337620
    Abstract: An apparatus for processing coating material includes a crucible having a receptacle for receiving coating material, a drive member having a drive shaft, a cover coupled to the drive shaft, and a monitor system including a light source and a camera module. The cover includes a flat surface, a slot defined in the flat surface, a first through hole and a second through hole respectively communicating with opposite ends of the slot. The drive shaft drives the cover to rotate between a closed position where the cover covers the receptacle, and the flat surface presses and flattens the coating material, and an open position where the cover is moved away from the receptacle. The light source is for emitting light through the first through hole to illuminate the coating material. The camera module is for capturing images of the illuminated coating material through the second through hole.
    Type: Grant
    Filed: September 23, 2010
    Date of Patent: December 25, 2012
    Assignee: Hon Hai Precision Industry Co., Ltd.
    Inventor: Shao-Kai Pei
  • Publication number: 20120315389
    Abstract: Condensation adhesives are applied via a contactless system and method to a wood substrate, such as laminate beams. The adhesive is modified and applied in particular to a finger surface of a substrate via a contactless application device. The contactless application device has at least 2 nozzles for ejecting adhesive onto the substrate without contacting the substrate. The modified adhesive includes a condensation resin selected from the group of urea formaldehyde (UF) resin, melamine formaldehyde resin (MF), modified melamine formaldehyde resin (xMF) and phenol resorcinol formaldehyde resin (PRF) or combinations thereof, and optionally a hardener. The adhesive rheology is modified by at least one of: cooling to a temperature between 5 and 15° C., including into the adhesive a viscosity increasing substance, and/or including a thixotropic increasing substance in an effective amount to prevent sagging of the adhesive on the surface.
    Type: Application
    Filed: August 21, 2012
    Publication date: December 13, 2012
    Applicant: DYNEA OY
    Inventors: Geir Ove MANNSVERK, Einar Mørland, Kristin Grøstad, Trana Bjørn
  • Patent number: 8308267
    Abstract: A droplet discharge device includes a head for discharging a functional liquid, a driving voltage generation unit for generating a driving voltage to drive the head, first and second temperature acquisition units, a temperature difference computing unit, and a driving voltage correction unit. The first and second temperature acquisition units are configured to acquire temperature of the functional liquid in the head as first and second temperatures, respectively, when the head is in a head waiting state and in a head driven state, respectively. The temperature difference computing unit is configured to compute a temperature difference between the first and second temperatures. The driving voltage correction unit is configured to correct the driving voltage based on the temperature difference. The driving voltage generation unit is configured to generate the corrected driving voltage to the head when the head is in the head driven state.
    Type: Grant
    Filed: May 28, 2009
    Date of Patent: November 13, 2012
    Assignee: Seiko Epson Corporation
    Inventors: Yuji Iwata, Tatsuya Ito, Osamu Kasuga
  • Patent number: 8302558
    Abstract: There is described an apparatus (1) for coating a cylinder (C), in particular a wiping cylinder of an intaglio printing press, with a plastic composition comprising inter alia heating means (6) for applying radiant heat to the cylinder throughout its length as the cylinder is rotated, the heating means including a plurality of discrete heating elements (60) distributed along the length of the cylinder and around at least part of the peripheral surface of the cylinder, the heating elements being arranged at least in separate columns (60a to 6Oh) disposed parallel to one another along the length of the cylinder. The apparatus further comprises a temperature sensing system (9) for measuring the surface temperature of the cylinder along the length of the cylinder and a processing unit coupled to the temperature sensing system (9) for controlling operation of the heating elements (60) as a function of the measured surface temperature and a desired temperature setting (tc).
    Type: Grant
    Filed: September 12, 2006
    Date of Patent: November 6, 2012
    Assignee: KBA-NotaSys SA
    Inventors: Maurizio Ripamonti, Didier Dupertuis, Andrea Ganini, Daniel Baertschi
  • Patent number: 8304012
    Abstract: Various embodiments of methods and devices for coating stents are described herein.
    Type: Grant
    Filed: May 4, 2006
    Date of Patent: November 6, 2012
    Assignee: Advanced Cardiovascular Systems, Inc.
    Inventors: Andrew McNiven, Scott Huter, Joycelyn J. Amick, Joseph J. Eppert, Thomas Esbeck, Jason Van Sciver
  • Patent number: 8286580
    Abstract: The present invention provides a method that can maintain the temperature of a wafer at a process temperature before a coating process is performed by supplying a photoresist. According to the present invention, a thinner which helps a diffusion of the photoresist is supplied onto the wafer before the photoresist is supplied. The thinner is supplied in a temperature-controlled state such that the wafer has the process temperature by the thinner.
    Type: Grant
    Filed: September 26, 2006
    Date of Patent: October 16, 2012
    Assignee: Semes Co., Ltd.
    Inventors: Jong-Su Choi, Young-Kweon Choi
  • Patent number: 8245662
    Abstract: A method and a configuration provide dynamic control of a liquid supply for a moisturizing storage device for sealing glued edges of a envelope flap of letter envelopes. Once a measured value has been measured for a sealing liquid which is stored in the tank of a moisturizing apparatus, the type of sealing liquid that is used is qualitatively analyzed on the basis of the measured value and of at least one material parameter as a comparison value. The amount of liquid stored in the moisturizing storage device is then measured by at least one further measurement to allow dynamic control of the liquid supply to the moisturizing storage device as a function of the material parameter and of at least one measured value, which is related to the liquid consumption, in the result of the at least one measurement of the amount of liquid stored in the moisturizing storage device.
    Type: Grant
    Filed: August 3, 2007
    Date of Patent: August 21, 2012
    Assignee: Francotyp-Postalia GmbH
    Inventors: Thomas Gerhardt, Wolfgang Muhl
  • Patent number: 8215263
    Abstract: An exemplary adhesive dispenser includes a container configured for supplying an adhesive, a plurality of nozzles configured for dispensing the adhesive, and a temperature controller connected between the container and the nozzles. The temperature controller has a chamber defined therein, and the chamber is configured for accommodating the adhesive. The container and each nozzle communicate with the chamber respectively. The temperature controller is configured for maintaining the adhesive therein in a predetermined temperature.
    Type: Grant
    Filed: November 18, 2008
    Date of Patent: July 10, 2012
    Assignee: Hon Hai Precision Industry Co., Ltd.
    Inventor: Hsin-Hung Chuang
  • Publication number: 20120118225
    Abstract: Apparatus and method for control of epitaxial growth temperatures during manufacture of light emitting diodes (LEDs). Embodiments include measurement of a substrate and/or carrier temperature during a recipe stabilization period; determination of a temperature drift based on the measurement; and modification of a growth temperature based on a temperature offset determined in response to the temperature drift exceeding a threshold criteria. In an embodiment, a statistic derived from a plurality of pyrometric measurements made during the recipe stabilization over several runs is employed to offset each of a set of growth temperatures utilized to form a multiple quantum well (MQW) structure.
    Type: Application
    Filed: September 13, 2011
    Publication date: May 17, 2012
    Applicant: Applied Materials, Inc.
    Inventors: Wei-Yung HSU, Alain DUBOUST, Hua CHUNG, Liang-Yuh CHEN, Donald J.K. OLGADO
  • Publication number: 20120114839
    Abstract: Provided is a vacuum vapor deposition system, which enables a vapor deposition rate to be measured accurately and a film thickness to be controlled with higher accuracy. The vacuum vapor deposition system includes: a vacuum chamber; a substrate holding mechanism; a vapor depositing source; a film thickness sensor for monitoring; a control system including a temperature controller and a film thickness controller; and a film thickness sensor for calibration, in which a distance from one film thickness sensor whose measurement accuracy is to be enhanced, out of the film thickness sensor for monitoring and the film thickness sensor for calibration, to a center of the opening of the vapor depositing source, is smaller than a distance from another film thickness sensor to the center of the opening of the vapor depositing source.
    Type: Application
    Filed: October 28, 2011
    Publication date: May 10, 2012
    Applicant: CANON KABUSHIKI KAISHA
    Inventors: Naoto Fukuda, Yoshiyuki Nakagawa, Shingo Nakano
  • Patent number: 8171878
    Abstract: The coating instrument is provided with a coating head which has a plurality of head members, and in which a groove-like slot is formed, an adjustment unit accommodated in a recessed groove installed on a leading end face continuing to an outer face opposite to an inner face or to the inner face in the head member to adjust the width of the slot by pressing a side wall face of the recessed groove, and a controller for controlling a pressing force to the side wall face of the recessed groove by the adjustment unit. The adjustment unit is provided with a fluid pressure chamber into which a fluid is sealed, a pressing portion for pressing the side wall face of the recessed groove by the fluid pressure of the fluid pressure chamber, and an operating portion for allowing the fluid pressure of the fluid pressure chamber to change.
    Type: Grant
    Filed: September 16, 2009
    Date of Patent: May 8, 2012
    Assignee: Mitsubishi Materials Corporation
    Inventors: Atsushi Hayashi, Tsutomu Fukuda, Katsuyuki Fujimura
  • Patent number: 8166913
    Abstract: In the present invention, a substrate is first rotated at a first rotation speed, and a resist solution is applied to the rotated substrate. Subsequently, the rotation of the substrate is decelerated to a second rotation speed lower than the first rotation speed so that the substrate is rotated at the low speed to smooth the resist solution on the substrate. The rotation of the substrate is then accelerated to a third rotation speed higher than the second rotation speed, and a solvent for the coating solution and/or a dry gas are/is supplied to the resist solution on the substrate. In this event, the solvent gas is supplied to a portion of the resist solution on the substrate thicker than a set thickness, and the dry gas is supplied to a portion of the coating solution on the substrate thinner than the set thickness. This thins the thicker portion of the resist solution and thickens the thinner portion to uniform the resist solution.
    Type: Grant
    Filed: August 30, 2007
    Date of Patent: May 1, 2012
    Assignee: Tokyo Electron Limited
    Inventor: Takashi Tanaka
  • Patent number: 8170404
    Abstract: A bubbler chamber assembly comprising one chamber or two or more chambers connected in series, all chambers being in substantially vertical orientation. A solid or liquid source of the compound is contained in the chamber or chambers. The ratio between the length of the chamber or combined length of chambers connected in series with respect to the direction of flow of the carrier gas through the chamber or chambers and the average diameter equivalent of the cross section of the chamber or chambers with respect to the direction of flow of the carrier gas through the chamber or chambers is not less than about 6:1.
    Type: Grant
    Filed: May 17, 2005
    Date of Patent: May 1, 2012
    Assignee: Akzo Nobel N.V.
    Inventors: Nam Hung Tran, Dennis L. Deavenport, Taeho Ko, Nada El-Zein
  • Publication number: 20120095588
    Abstract: A method for operating a gluing system (10) for gluing blanks for producing and/or packaging cigarettes or other smokable objects, in which the blanks are conveyed along glue valves (11) of the gluing system (10), in which case, in order to control and/or regulate the glue valves (11), a superordinate master controller (13) respectively transmits values of at least one control and/or regulation parameter to individual controllers (15) which are assigned to the glue valves (11), are subordinate to the master controller (13) and are each connected to the superordinate master controller (13) via a suitable data connection, the subordinate controller (15) using said values to control and/or regulate the glue valve (11) assigned to it.
    Type: Application
    Filed: May 26, 2010
    Publication date: April 19, 2012
    Applicant: Focke & Co. (GmbH & Co.KG)
    Inventors: Ralf Barkmann, Wolfgang Rohwedder, Marc-Daniel Stegen
  • Patent number: 8146529
    Abstract: There is provided a liquid application apparatus capable of performing stable application without providing a new mechanism, by efficiently removing an application liquid increased in viscosity and fixedly adhered to an abutting portion between an application member and a liquid supplying member. A liquid application apparatus includes an application member that applies a liquid supplied to an applied face to a printing medium by rotating an application roller and a liquid holding member that abuts against the applied face to form a liquid holding space for holding the liquid, and the amount of liquid that is held in the liquid holding space and makes contact with the application member in unit time is larger before an applying operation for applying the liquid to the printing medium than in the applying operation.
    Type: Grant
    Filed: January 22, 2009
    Date of Patent: April 3, 2012
    Assignee: Canon Kabushiki Kaisha
    Inventors: Keisei Hakamata, Tetsuyo Ohashi, Hideaki Nagahara, Hiroshi Yoshino, Takeshi Sekino
  • Patent number: 8122848
    Abstract: A film forming apparatus which forms a film on a substrate by utilizing a chemical solution, including: a correlation data creating unit which creates a correlation data that is related to the quality of a chemical solution, from data that is related to the properties of the chemical solution including at least one of data on storage temperature for the chemical solution to be loaded and data on pressure applied to the chemical solution to be loaded; and a determining unit which determines whether or not the chemical solution holds expected quality thereof on the bases of the correlation data.
    Type: Grant
    Filed: November 10, 2009
    Date of Patent: February 28, 2012
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Daisuke Kawamura
  • Publication number: 20120040514
    Abstract: A chemical vapor deposition reactor and method. Reactive gases, such as gases including a Group III metal source and a Group V metal source, are introduced into the chamber (10) of a rotating-disc reactor and directed downwardly onto a wafer carrier (32) and substrates (40) which are maintained at an elevated substrate temperature, typically above about 400° C. and normally about 700-1100° C. to deposit a compound such as a III-V semiconductor. The gases are introduced into the reactor at an inlet temperature desirably above about 75° C. and most preferably about 100°-350° C. The walls of the reactor may be at a temperature close to the inlet temperature. Use of an elevated inlet temperature allows the use of a lower rate of rotation of the wafer carrier, a higher operating pressure, lower flow rate, or some combination of these.
    Type: Application
    Filed: November 6, 2009
    Publication date: February 16, 2012
    Applicant: VEECO INSTRUMENTS INC.
    Inventors: Alex Gurary, Mikhail Belousov, Bojan Mitrovic