Endless Patents (Class 125/21)
  • Publication number: 20040084042
    Abstract: The apparatus, system and method for cutting crystal ingot provide techniques for cutting an ingot into wafers with a wire cutting apparatus utilizing wire with a diameter of less than 0.18 mm, such as 0.14 mm. The wire cutting apparatus also includes multiple rollers about which the wire is wrapped, and nozzles for applying slurry to the wire. One of the rollers is located on one side of the crystal ingot, while another roller is located on the other side of the crystal ingot. At least one nozzle is disposed proximate the first and second rollers. The nozzles collectively disperse slurry at a rate in the range of 40 to 60 liters per minute, such as 50 liters per minute, and at a viscosity of 42 to 62 centipose, such as 52 centipose.
    Type: Application
    Filed: November 6, 2002
    Publication date: May 6, 2004
    Applicant: SEH AMERICA, INC.
    Inventors: Shawn V. McAulay, Kazuhisa Takamizawa
  • Patent number: 6640796
    Abstract: A method for separating slices from a hard brittle workpiece involves subjecting the workpiece to an advancing movement and pressing it onto wires of a wire web of a wire saw, the wires being under a defined wire tension and making contact with the workpiece over a cutting depth along a cutting contour. The wires are lifted off the cutting contour an number of times while the wire tension is kept substantially unchanged, with the aid of rolls of a roll system. The roll system comprises at least one roll that is moved onto the wire web and back, the roll system comprising at least two moveable rolls which flank the workpiece. A wire saw is suitable for carrying out the method.
    Type: Grant
    Filed: July 31, 2002
    Date of Patent: November 4, 2003
    Assignee: Wacker Siltronic Gesellschaft fur Halbleitermaterialien AG
    Inventors: Karl Egglhuber, Jörg Lukschandel
  • Publication number: 20030145844
    Abstract: A wire saw and method for cutting wafers from a workpiece, in which a saw wire is guided multiple times around wire-guiding rolls. The wire-guiding rolls have a rotatable bearing arrangement and two adjacent wire-guiding rolls delimit a saw gate. The saw has ceramic sliding-contact bearings for rotatably bearing the wire-guiding rolls.
    Type: Application
    Filed: January 29, 2003
    Publication date: August 7, 2003
    Applicant: Wacker-Chemie GmbH
    Inventors: Jorg Lukschandel, Josef Kracker
  • Publication number: 20030140915
    Abstract: A diamond wire (1) is disclosed for cutting stone material comprising a support cable (2) with around it a plurality of cutting bushes (3) and a plurality of elastic means (5). The cuttting bushes (3) comprise: an hollow cylindric support (10); at least one diamond cutting sector (12) connected to an external surface of the support (10); and at least one non-diamond support/cutting sector (14) connected to the external surface of the support (10) and laterally connected to the cutting sector (12).
    Type: Application
    Filed: January 2, 2003
    Publication date: July 31, 2003
    Inventor: Giuseppe Tommasini
  • Publication number: 20030140914
    Abstract: The invention relates to a saw wire consisting essentially of a steel wire, an intermediate layer and a metallic binding phase into which diamond grains with an average diameter of 10 to 50 micrometers are inserted, characterized in that the metallic binding phase has a hardness of between 600 and 1100 HV 0.1 and consists of an inner layer and an outer layer which are arranged concentrically around the steel wire provided with the intermediate layer. The inner layer has a thickness of approximately between 10 and 25% of the average diamond grain diameter, while the thickness of the outer layer is such that the overall thickness of the metallic binding phase is 45-55% of the average diamond grain diameter and the diamond grains have an average interval of not more than 5 times their average diameter. Other fine particles with an average diameter of 1 to 6 micrometers are located between the diamond grains with an average diameter of 10 to 50 micrometers.
    Type: Application
    Filed: November 8, 2002
    Publication date: July 31, 2003
    Inventors: Jorg Lukschandel, Jurgen Meyer
  • Patent number: 6578567
    Abstract: A wafer sawing apparatus comprises an electrically conductive chuck table surrounding a suction plate and tactile sensing lines formed on the upper surface of the suction plate. At least one end of each tactile sensing line is electrically connected to the table body. A controller controls the chuck table and a scribing blade. The controller is electrically connected to both elements. The controller comprises a tactile sensing unit connected to the table body for sensing contact of the scribing blade with the tactile sensing lines or the table body and an equipment stop unit for stopping the scribing blade. The controller further comprises a zero point adjusting unit for receiving a contact signal from the tactile sensing unit and for adjusting a zero point of the scribing blade, and a switching unit connecting the tactile sensing unit to the zero point adjusting unit or the equipment stop unit.
    Type: Grant
    Filed: November 29, 2001
    Date of Patent: June 17, 2003
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Joung-Min Oh, Dong-Bin Kim, Sung-Hee Lee, Byeong-Soo Kim
  • Publication number: 20030100455
    Abstract: An aqueous grinding fluid has compositions mainly consisting of 40.0-95.0 wt. % a polyalcohol and/or a polyalcohol derivative, 5.0-50.0 wt. % water, 0.1-3.5 wt. % bentonite, 0.1-5.0 wt. % cellulose and weight %, 0.5-10.0 wt. % mica and optionally a small amount of a surfactant or polar solvent. Bentonite, cellulose and mica are preferably added with such combination to adjust a viscosity of a slurry to 150-300 mPa.second as a value measured by a rotating cylinder type viscometer. The aqueous suspension is nonflammable and stabilized in dispersiveness and settleability-proof of abrasive grits as well as a viscosity for a long time, and facilitates washing and cleaning of sliced wafers and a grinding machine without radiation of stinks.
    Type: Application
    Filed: May 12, 2000
    Publication date: May 29, 2003
    Inventors: Hiroshi Oishi, Keiichiro Asakawa, Junichi Matsuzaki
  • Patent number: 6568384
    Abstract: The present invention is a cutting and processing method for cutting semiconductor materials such as silicon ingots, or machining grooves therein, using a wire saw, a purpose whereof is to obtain a method wherewith high-precision processed products can be stably obtained. By performing cutting processing using a slurry that is either a mixture of free abrasive particles and an oil base such as a mineral oil or a mixture of free abrasive particles and an aqueous solution base such as ethylene glycol material, the effects of improving cuttability, reducing residual processing distortion, suppressing process stress, and suppressing cutting heat can be enhanced, and it is possible to carry on cutting while eliminating the process stress (residual distortion) produced by cutting, and thus to cut low-distortion wafers.
    Type: Grant
    Filed: June 6, 2000
    Date of Patent: May 27, 2003
    Assignee: Sumitomo Metal Industries, Ltd.
    Inventor: Kazunori Onizaki
  • Publication number: 20030079733
    Abstract: A device for deflecting a saw cable (13) of a cable saw and having a support (1) and at least one deflection member (2) securable to the support (1) and having two support arms (6), between which a deflection roller (3) is rotatably supported, and two guide surfaces (18) formed in the region of the deflection member (2) projecting beyond the deflection roller (3) for preventing the saw cable (13) from falling off of the deflection roller (3).
    Type: Application
    Filed: September 30, 2002
    Publication date: May 1, 2003
    Inventors: Josef Plattner, Hans-Jorg Rieger
  • Patent number: 6554686
    Abstract: A sawing wire is for the simultaneous cutting and lapping of a multiplicity of wafers from a hard brittle workpiece. The sawing wire exhibits torsion. There is also a method for cutting and lapping using the sawing wire.
    Type: Grant
    Filed: June 13, 2000
    Date of Patent: April 29, 2003
    Assignee: Wacker Siltronic Gesellschaft fur Halbleitermaterialien AG
    Inventors: Maximilian Kaeser, Christian Andrae
  • Patent number: 6550364
    Abstract: The wire sawing device includes two external wire guide cylinders (1, 2) having a diameter (D1) smaller than that (D2) of the two internal wire guide cylinders (3, 4). The external wire guide cylinders are driven in rotation by a power drive to cause the movement of the wires of a layer of wires (6), whilst the internal wire guide cylinders (3, 4) ensure only the function of guidance without driving the wires of the layer of wires. By the separation of the drive function from the guide function of the wire, substantial heating of the guiding wire guide cylinders can be avoided, which permits obtaining sawed pieces of high precision without undulations.
    Type: Grant
    Filed: November 19, 2001
    Date of Patent: April 22, 2003
    Assignee: HCT Shaping Systems SA
    Inventor: Charles Hauser
  • Patent number: 6543434
    Abstract: A device for simultaneously separating a multiplicity of wafers from a hard brittle workpiece having a longitudinal axis, with a wire web made from saw wire and with an advancing device which brings about a translational relative movement, which is perpendicular to the longitudinal axis of the workpiece, between the workpiece and the wire web of the wire saw, in the course of which movement the workpiece is passed through the wire web, wherein the wire web is formed from a multiplicity of individual wires, and wherein there is a device for holding and rotating the workpiece about the longitudinal axis.
    Type: Grant
    Filed: December 5, 2000
    Date of Patent: April 8, 2003
    Assignee: Wacker-Chemie GmbH
    Inventors: Bernhard Holzmuller, Ulrich Wiese, Jochen Greim
  • Publication number: 20030047177
    Abstract: There is provided a process for significantly reducing thickness variations and the deviations of the wafer's centerline from a reference plane in material cut with wire saws in a wire cutting apparatus by utilizing a sacrificial layer. The sacrificial layer prevents excessive kerf loss in slices or wafers at the wire entry and exit points. The process can be used to produce semiconductor wafers having greater uniformity in thickness.
    Type: Application
    Filed: September 11, 2001
    Publication date: March 13, 2003
    Inventors: Michael Christ, Irl E. Ward
  • Patent number: 6526960
    Abstract: A wire-saw constituted by a rope-like core wire and a cylindrical coil-like saw-wire body wounded around the core wire, and a large number of abrasive grains firmly fixed to the saw-wire body by metal. Problems of conventional wire-saws, such as unstable working performance, a short tool life, low safety and low reliability, and so on, are solved.
    Type: Grant
    Filed: February 13, 2001
    Date of Patent: March 4, 2003
    Assignee: Asaoka Co., Ltd.
    Inventors: Toshihiko Asada, Tadao Ishikawa
  • Publication number: 20030034022
    Abstract: A method for separating slices from a hard brittle workpiece involves subjecting the workpiece to an advancing movement and pressing it onto wires of a wire web of a wire saw, the wires being under a defined wire tension and making contact with the workpiece over a cutting depth along a cutting contour. The wires are lifted off the cutting contour an number of times while the wire tension is kept substantially unchanged, with the aid of rolls of a roll system. The roll system comprises at least one roll that is moved onto the wire web and back, the roll system comprising at least two moveable rolls which flank the workpiece. A wire saw is suitable for carrying out the method.
    Type: Application
    Filed: July 31, 2002
    Publication date: February 20, 2003
    Applicant: Wacker Siltronic Gesellschaft fur Halbleitermaterialien AG
    Inventors: Karl Egglhuber, Jorg Lukschandel
  • Patent number: 6520061
    Abstract: An apparatus for cutting green ceramic bodies, includes a traveling path for green ceramic bodies, beds for supporting green ceramic bodies at constant intervals in series along the traveling path, an arm on each side of the traveling path, two drive portions for moving respective arms perpendicularly relative to the traveling path, a drive portion for moving both arms in the same direction as the traveling path, a wire for cutting green ceramic bodies, extending between the arms, and wire supporting portions, on respective arms. Each wire supporting portion includes a servo motor with an axis of rotation, a magnet member around the axis of rotation, a bobbin having a conical surface around which wire is wound, and magnetically coupled to the axis of rotation by the magnet member, and a traversing mechanism for varying the position where the wire is wound around the length of the conical surface.
    Type: Grant
    Filed: November 3, 1999
    Date of Patent: February 18, 2003
    Assignee: NGK Insulators, Ltd.
    Inventors: Ken Fukuta, Yuji Ueda, Satoshi Sugiyama
  • Patent number: 6513514
    Abstract: A machine for cutting slabs from a block of stone-like material includes: a fixed support structure; at least two rollers mounted for rotation about their axes at opposite ends of the frame and having a means for translating them vertically, the axes of the rollers being horizontal; at least two cutting wires passing around the rollers in such a way that they lie in respective parallel planes, substantially orthogonal to the axes of the rollers; and means for adjusting the tension of each wire independently of one another.
    Type: Grant
    Filed: January 22, 2001
    Date of Patent: February 4, 2003
    Assignee: Micheletti Macchine S.r.l.
    Inventor: Bruno Micheletti
  • Patent number: 6513513
    Abstract: A saw cable guide (1) is provided with a stand (2) and at least two rotatable cable guide rollers (5, 9) mounted pivotably thereon. These are arranged with their pivot axes (8, 12) forming an angle with one another. The saw cable (19) is led around the stand (2) at a corresponding angle. A rotatable deflecting roller (13) is located on the stand (2). The rotatable deflecting roller (13) guides the cable during the deflection and may have a cable guide surface (15) with an oblique profiling (21).
    Type: Grant
    Filed: December 11, 2000
    Date of Patent: February 4, 2003
    Inventor: Andreas Steiner
  • Patent number: 6510774
    Abstract: The present invention pertains to a cable saw (1) with a frame (2), a motor drive (7) and a driven cable storage unit (6) for the sawing cable (3) moved in a circulating manner. The drive (7) has a plurality of adjacent drive wheels (11, 12), around which the sawing cable is wound and which together are driven by a motor (8). The motor (8) and optionally an interposed gear (9) are removable by means of a change-over coupling (10). In addition, the cable saw (1) can be broken down into at least three basic components, namely, a main roller head (34), a frame unit (35), and a motor unit (36).
    Type: Grant
    Filed: May 30, 2001
    Date of Patent: January 28, 2003
    Inventor: Andreas Steiner
  • Patent number: 6505394
    Abstract: A method for cutting a rare earth alloy according to the present invention includes the steps of: a) supplying slurry containing abrasive grains onto a wire; and b) machining the rare earth alloy with the abrasive grains, interposed between the wire and the rare earth alloy, by running and pressing the wire against the rare earth alloy. The slurry contains, as a main component, oil in which the abrasive grains are dispersed, and the viscosity of the slurry at 25° C. is in the range from 92 to 175 mPa·sec.
    Type: Grant
    Filed: August 1, 2001
    Date of Patent: January 14, 2003
    Assignee: Sumitomo Special Metals Co., Ltd.
    Inventors: Masanori Chikuba, Hazime Ishida
  • Publication number: 20020174861
    Abstract: A method for cutting up a workpiece which is in rod or block form by means of a saw, wherein the temperature of the workpiece is measured during the cutting, and the measurement signal is transmitted to a control unit, which generates a control signal which is used to control the temperature of the workpiece, or wherein the temperature of the workpiece is controlled during the cutting by a control signal based on a predetermined control curve.
    Type: Application
    Filed: May 3, 2002
    Publication date: November 28, 2002
    Applicant: WACKER SILTRONIC GESELLSCHAFT FUR HALBLEITERMATERIALIEN AG
    Inventors: Holger Lundt, Lothar Huber, Peter Wiesner
  • Patent number: 6463922
    Abstract: A wedge (6, 6′) intended to be inserted into a cutting slot is made in two parts (41, 42), the two parts (41, 42) comprising means (3) which allow them to slide one over the other, so as to produce a double wedge (6, 6′), the total thickness of which can vary between a maximum thickness value and a minimum thickness value.
    Type: Grant
    Filed: January 24, 2001
    Date of Patent: October 15, 2002
    Assignee: Graniterie des Ecorces
    Inventor: Jean-Paul Petitjean
  • Patent number: 6463921
    Abstract: An abrasive wire provides an efficient cutting operation with high accuracy and a longer service life. Abrasive grains are provided around a core wire. The abrasive grains are bonded to the core wire by a light curing resin or an electron beam curing resin which can be cured within a few seconds. Accordingly, the curing operation can be performed while the core wire is moved in the direction of the longitudinal axis of the core wire. Thus, a long abrasive wire can be fabricated at reduced time and cost.
    Type: Grant
    Filed: February 1, 2000
    Date of Patent: October 15, 2002
    Assignee: Ricoh Company, Ltd.
    Inventors: Yutaka Shimazaki, Toshiyuki Enomoto, Yasuhiro Tani
  • Patent number: 6446621
    Abstract: A saw wire according to the invention has two parallel wire strings having a number of saw elements evenly distributed along the wire strings. A saw element includes a platform and a cutting plate. The platform has grooves intended to receive respective parallel wire strings and a groove which is open towards the bottom to receive a driving wheel and a pulley.
    Type: Grant
    Filed: July 20, 2000
    Date of Patent: September 10, 2002
    Assignee: Hagby Asahi AB
    Inventor: Anders Svensson
  • Patent number: 6443143
    Abstract: A method for cutting a rare earth alloy of the invention using a wire having abrasive grains stuck thereon is disclosed. The method includes the step of cutting the rare earth alloy while supplying a cutting fluid having a predetermined kinematic viscosity between the wire and the rare earth alloy. The method further includes the step of varying the temperature of a supplied amount of fresh cutting fluid in order to control the kinematic viscosity of the cutting fluid.
    Type: Grant
    Filed: September 14, 2000
    Date of Patent: September 3, 2002
    Assignee: Sumitomo Special Metals Co., Ltd.
    Inventors: Hazime Ishida, Sadahiko Kondo, Akira Miyachi
  • Publication number: 20020115390
    Abstract: A method for cutting a rare earth alloy using a wire with abrasive grains fixed to a core wire, including the step of cutting the rare earth alloy with the wire traveling in a state that a portion of the rare earth alloy to be cut with the wire is immersed in a coolant containing water as the main component, the coolant having a surface tension at 25° C. in a range of 25 mN/m to 60 mN/m.
    Type: Application
    Filed: November 23, 2001
    Publication date: August 22, 2002
    Inventors: Sadahiko Kondo, Akira Miyachi, Hazime Ishida
  • Publication number: 20020100469
    Abstract: An abrasive wire provides an efficient cutting operation with high accuracy and a longer service life. Abrasive grains are provided around a core wire. The abrasive grains are bonded to the core wire by a light curing resin or an electron beam curing resin which can be cured within a few seconds. Accordingly, the curing operation can be performed while the core wire is moved in the direction of the longitudinal axis of the core wire. Thus, a long abrasive wire can be fabricated at reduced time and cost.
    Type: Application
    Filed: February 1, 2000
    Publication date: August 1, 2002
    Inventors: Yutaka Shimazaki, Toshiyuki Enomoto, Yasuhiro Tani
  • Publication number: 20020100354
    Abstract: The wire sawing device includes two external wire guide cylinders (1, 2) having a diameter (D1) smaller than that (D2) of the two internal wire guide cylinders (3, 4). The external wire guide cylinders are driven in rotation by a power drive to cause the movement of the wires of a layer of wires (6), whilst the internal wire guide cylinders (3, 4) ensure only the function of guidance without driving the wires of the layer of wires. By the separation of the drive function from the guide function of the wire, substantial heating of the guiding wire guide cylinders can be avoided, which permits obtaining sawed pieces of high precision without undulations.
    Type: Application
    Filed: November 19, 2001
    Publication date: August 1, 2002
    Applicant: HCT SHARPING SYSTEM SA
    Inventor: Charles Hauser
  • Patent number: 6422067
    Abstract: Slurry useful for wire-saw slicing has viscosity adjusted to 400-700 mPa·second at a shear speed of 2/second and of 50-300 mPa·second at a shear speed of 380/second. The viscosity of slurry is measured using a cone and plate type viscometer which can measure viscosity at different shear speeds. Since the slurry sufficiently flows into inner parts of grooves formed in an ingot and consumed for wire-saw slicing due to the viscosity controlled in response to the shear speed, the ingot can be efficiently sliced to wafers or discs.
    Type: Grant
    Filed: August 11, 2000
    Date of Patent: July 23, 2002
    Assignees: Super Silicon Crystal Research Institute Corporation, Ohtomo Chemical Industrial Corporation
    Inventors: Hiroshi Oishi, Keiichiro Asakawa, Junichi Matsuzaki, Akio Ashida
  • Patent number: 6418921
    Abstract: A cutting machine has a blade mounted for reciprocating movement. A workpiece is rotated while the blade is reciprocated, and then the workpiece is rotated through smaller angles to complete the cut. A holder is attached to partially cut slices of the workpiece.
    Type: Grant
    Filed: January 24, 2001
    Date of Patent: July 16, 2002
    Assignee: Crystal Systems, Inc.
    Inventors: Frederick Schmid, Maynard B. Smith, Chandra P. Khattak
  • Patent number: 6408840
    Abstract: A method for cutting a rare earth alloy of this invention includes cutting an object to be machined while supplying slurry containing dispersed abrasive grains between a wire and the object to be machined. The wire is driven with a drive member, at least a wire contact face of the drive member being composed of an organic polymer material. Cutting is carried out while a tension in a range between 14.7 N and 39.2 N is applied to the wire.
    Type: Grant
    Filed: December 12, 2000
    Date of Patent: June 25, 2002
    Assignee: Sumitomo Special Metals Co., Ltd.
    Inventor: Hazime Ishida
  • Patent number: 6408839
    Abstract: The invention concerns a wire sawing device comprising at least a support table (35) bearing a piece to be sawed (34) urged against the set of wires layer (26, 27) two outer wire-guide rolls (10, 11) powered by motors (14, 15) and at least two inner wire-guide rolls (16, 17). The wire (18) is wound on the wire-guide rolls so as to constitute between the inner wire-guide rolls (16, 17) two cross sets of wires (26, 27) whereof the projecting wires are parallel and at a distance from a first space (31) and so as to be returned by the outer wire-guide rolls (10, 11) whereon is provided a second space (30) twice the first space (31). Such an arrangement enables a balanced distribution of forces on the inner wire-guides (16, 17), the surfaces of the sawed slices to be perfectly parallel, the shearing forces on the piece to be sawed (34) to be reduced, a decrease in the cutting pressure, a greater cutting speed and to improve the precision of the resulting slices.
    Type: Grant
    Filed: August 14, 2000
    Date of Patent: June 25, 2002
    Assignee: HCT Shaping Systems SA
    Inventor: Charles Hauser
  • Patent number: 6390889
    Abstract: A holding strip is used to hold a semiconductor ingot during semiconductor wafer fabrication. The holding strip is formed from a semiconductor material, typically the same material used to form the ingot itself. The holding strip has a holding surface shaped to receive the ingot and at least one surface other than the holding surface, into which at least one notch is formed. The holding strip has a characteristic breaking strength that changes when a cut is formed through the holding surface and into the notch. In some embodiments, the notch has sides that are substantially parallel to each other, and in other embodiments, the notch has tapered sides. In alternative embodiments, the shape of the notch causes an abrupt change or a gradual change in the breaking strength of the holding strip as the cut penetrates into the notch. In either case, the notch can be shaped to cause a gradual change in breaking strength as the cut moves deeper into the notch.
    Type: Grant
    Filed: September 29, 1999
    Date of Patent: May 21, 2002
    Assignee: Virginia Semiconductor
    Inventors: A. Dempsey McGregor, Marshall P. Toombs, James E. Brooks, Benjamin J. Meadows
  • Patent number: 6390896
    Abstract: A method for cutting a multiplicity of disks from a hard brittle workpiece is by moving the workpiece at a defined feed rate through a wire web of a wire saw. In the method, the wire web is formed by a sawing wire which moves in a reciprocating manner and is covered with bonded abrasive grain. A cooling liquid is provided beneath the wire web, in which cooling liquid the sawing wire of the wire web is immersed when cutting off the disks. Also provided is a wire saw which is suitable for carrying out the method.
    Type: Grant
    Filed: September 1, 1999
    Date of Patent: May 21, 2002
    Assignee: Wacker Siltronic Gesellschaft für Halbleitermaterialien AG
    Inventors: Anton Huber, Joachim Junge, Jörg Moser
  • Patent number: 6381830
    Abstract: A method for cutting a rare earth alloy according to the present invention includes the steps of: a) supplying slurry containing abrasive grains onto a wire; and b) machining the rare earth alloy with the abrasive grains, interposed between the wire and the rare earth alloy, by running and pressing the wire against the rare earth alloy. The slurry contains, as a main component, oil in which the abrasive grains are dispersed, and the viscosity of the slurry at 25° C. is in the range from 92 to 175 mPa.sec.
    Type: Grant
    Filed: January 19, 1999
    Date of Patent: May 7, 2002
    Assignee: Sumitomo Special Metals Co., Ltd.
    Inventors: Masanori Chikuba, Hazime Ishida
  • Patent number: 6352072
    Abstract: An ingot support device for slicing silicon is produced by molding a molding material obtained by blending an acrylic resin or an unsaturated polyester resin and one or more inorganic fillers selected from the group consisting of aluminum hydroxide, barium sulphate, barium carbonate, calcium carbonate and silica. According to the present invention, there is provided an ingot support device for slicing silicon which can be produced easily at a low cost, which has enough strength to cope with the upsizing of the ingot block, has high adhesive properties with the ingot block, and has other further improved properties which are required of the ingot support device for slicing silicon.
    Type: Grant
    Filed: July 25, 2001
    Date of Patent: March 5, 2002
    Assignee: A&A Material Corporation
    Inventors: Hideki Honma, Katsuaki Kaneko
  • Patent number: 6328027
    Abstract: A method for precision cutting liquid soluble scintillator materials by an operator is disclosed, including the steps of providing a first run of a moving filament in operative proximity to cut the scintillator materials, concurrent with wetting at least the first run length of the moving filament with organic solvent, and engaging the wetted first run with the soluble scintillator materials for a time sufficient to create a kerf having cut surfaces with solvent thereon, with the kerf cut surfaces dissolved to reshape the kerf corners, and without the formation of surface hydrates. The wetting step is accompanied by providing a second run of the wetted filament in a reverse direction and engaging the scintillator materials. The first run and second run engaging steps are concurrent with tensioning the moving filament, producing kerfs through the scintillator materials, with organic solvent delivered onto kerf surfaces.
    Type: Grant
    Filed: November 11, 1999
    Date of Patent: December 11, 2001
    Assignee: CTI, Inc.
    Inventors: Dennis E. Persyk, Mark S. Andreaco
  • Patent number: 6311598
    Abstract: A guide for a concrete cutting chain saw. The guide has multiple paired slots which receive a post of a bracket mounted to the chain saw. The slots provide multiple pivotal mounts for the chain saw. The chain saw is mounted on the guide with the post being received in a pair of slots. The multiple slots provide sequential pivotal mounts for moving the saw to complete the cut. The post is mountable on either end of the bracket so the guide may be mounted on either side of the cut line.
    Type: Grant
    Filed: February 18, 2000
    Date of Patent: November 6, 2001
    Assignee: Blount, Inc.
    Inventor: Ian S. Osborne
  • Patent number: 6311684
    Abstract: A closed loop wire saw loop, a method for making the closed wire saw loop, and an apparatus and method for slicing a work piece, in particular, a polysilicon or single crystal silicon ingot, utilizing a closed loop of diamond impregnated wire in which the work piece (or ingot) is rotated about its longitudinal axis as the diamond wire is driven orthogonally to it and advanced from a position adjoining the outer diameter (“OD”) of the ingot towards its inner diameter (“ID”). In this manner, the diamond wire cuts through the work piece at a substantially tangential point to the circumference of the cut instead of through up to the entire diameter of the piece and single crystal silicon ingots of 300 mm to 400 mm or more may be sliced into wafers relatively quickly, with minimal ‘kerf” loss and less extensive follow-on lapping operations. The closed wire saw loop is made by squaring and welding the wire ends together and then twice heat treating the weld at about 1500 F.
    Type: Grant
    Filed: December 20, 1999
    Date of Patent: November 6, 2001
    Assignee: Laser Technology West Limited
    Inventors: John B. Hodsden, Jeffrey Burgess Hodsden
  • Publication number: 20010029939
    Abstract: The drive equipment which becomes from the drive pulley is attached to the prop supported by the base stand. The drive pulley consists of a stator which is a fixed axis and annular rotor prepared in the perimeter of stator and a pulley part of ring state prepared in the perimeter of rotor. The wire saw which has a ring part sintered diamond abrasive particle in the wire rod such as wire etc. is arranged and winded in a groove portion formed in the perimeter of pulley part. The wire saw winded to the pulley part is made to run by carrying out the rotating drive of rotor by turning on electricity to drive pulley and contact the wire saw and cut the cut material which made to winded.
    Type: Application
    Filed: January 2, 2001
    Publication date: October 18, 2001
    Applicant: Mitsubishi Materials Corporation
    Inventors: Shigeru Mazaki, Tsuyoshi Kawahara
  • Publication number: 20010023692
    Abstract: An articulated lock for a saw rope (5) and including a first articulated member (1; 21) having a sleeve-shaped region for receiving an end of the rope (5) and a connection region (6; 26) formed of two, spaced from each other cheeks (7, 8; 27, 28), a second articulated member (2; 22) having a sleeve-shaped region for receiving another end of the rope (5), and a connection region (9; 29) formed as an eye-shaped portion and extending into a space defined by the two cheeks (7, 8; 27, 28) of the connection region of the first articulated member (1; 21); and a joining bolt (10; 30) extending through the bores (11; 31) formed in the two cheeks (7, 8; 27, 28) and the through-opening (12; 32) formed in the eye-shaped portion for pivotally connecting the first and second articulated members (1, 2; 21, 22) with each other, with the through-opening (12; 32) of the eye-shaped portion having at least in a region of the opposite side surfaces (13; 33) of the eye-shaped portion, a diameter exceeding the diameter of the joini
    Type: Application
    Filed: March 21, 2001
    Publication date: September 27, 2001
    Inventors: Rolf Spangenberg, Josef Plattner
  • Publication number: 20010018913
    Abstract: A method for cutting a rare earth alloy of this invention includes cutting an object to be machined while supplying slurry containing dispersed abrasive grains between a wire and the object to be machined. The wire is driven with a drive member, at least a wire contact face of the drive member being composed of an organic polymer material. Cutting is carried out while a tension in a range between 14.7 N and 39.2 N is applied to the wire.
    Type: Application
    Filed: December 12, 2000
    Publication date: September 6, 2001
    Inventor: Hazime Ishida
  • Patent number: 6283112
    Abstract: A cutting member for cutting hard materials such as rock, concrete, etc., includes a support unit in the shape of a wire. The free ends of the wire are joined together to form an endless unit. Cutting elements are provided at regular distances from each other along the full length of the wire. Each cutting element is firmly connected to a cutting element carrier and supported on the wire and at least in the mounted condition is firmly connected to a rider for guidingly engaging a portion of a saw. Driver members are attached to the wire and the cutting element carriers are floatingly supported on the wire in functional engagement with the driver members.
    Type: Grant
    Filed: July 23, 1999
    Date of Patent: September 4, 2001
    Inventor: Björn Berglund
  • Patent number: 6283111
    Abstract: An object of the present invention is to provide a wire saw cutting method that is a method for cutting a plurality of silicon monocrystal ingots into wafers with a wire saw, wherewith high-precision cutting processing is possible, reducing wafer thickness and warping defects, etc. By shifting the positions of pieces of work in the cutting feed direction, providing time differentials to the cuts, and cutting the work sequentially, the work cut first is given the role of a wire guide, making it possible to stabilize the path of the wire. Thus cuts can be made in other ingots with the wire path stabilized, it becomes possible to reduce thickness and warping defects, and processing is made possible wherewith good wafer quality and stable yield are realized.
    Type: Grant
    Filed: June 15, 2000
    Date of Patent: September 4, 2001
    Assignee: Sumitomo Metal Industries, Ltd.
    Inventors: Kazunori Onizaki, Kenji Ogawa
  • Patent number: 6279564
    Abstract: An apparatus for cutting a substantially cylindrical work piece in a direction generally perpendicular to a longitudinal axis of the work piece includes a wire having a plurality of cutting elements affixed thereto and a wire drive mechanism for driving the wire across and through the work piece. The wire drive mechanism includes a capstan to move the wire orthogonally across a longitudinal axis of the work piece, a rotational drive to oscillate the wire around the longitudinal axis and an advancing drive to advance the wire perpendicularly through the longitudinal axis of the work piece. In a particular embodiment disclosed herein, the apparatus comprises imparts a substantially rocking motion to the wire drive mechanism about the longitudinal axis of the work piece and the cutting elements of the wire are impregnated diamonds.
    Type: Grant
    Filed: February 4, 2000
    Date of Patent: August 28, 2001
    Inventors: John B. Hodsden, Steven M. Luedders
  • Patent number: 6279565
    Abstract: An articulated lock for a saw rope (5) and including a first articulated member (1; 21) having a sleeve-shaped region for receiving an end of the rope (5) and a connection region (6; 26) formed of two, spaced from each other cheeks (7, 8; 27, 28), a second articulated member (2; 22) having a sleeve-shaped region for receiving another end of the rope (5), and a connection region (9; 29) formed as an eye-shaped portion and extending into a space defined by the two cheeks (7, 8; 27, 28) of the connection region of the first articulated member (1; 21); and a joining bolt (10; 30) extending through the bores (11; 31) formed in the two cheeks (7, 8; 27, 28) and the through-opening (12; 32) formed in the eye-shaped portion for pivotally connecting the first and second articulated members (1, 2; 21, 22) with each other, with the through-opening (12; 32) of the eye-shaped portion having at least in a region of the opposite side surfaces (13; 33) of the eye-shaped portion, a diameter exceeding the diameter of the joini
    Type: Grant
    Filed: March 21, 2001
    Date of Patent: August 28, 2001
    Assignee: Hilti Aktiengesellschaft
    Inventors: Rolf Spangenberg, Josef Plattner
  • Patent number: 6257223
    Abstract: A diamond-set wire for cutting stony materials or the like, comprises a cable (5; 25) to which a series of abrasive units (3; 23) is connected. Each abrasive unit (3; 23) includes a cutting member (7; 27) which has at least one portion made of abrasive material (9; 29) disposed radially on the outside of the cable (5; 25), the portions of the cutting members (7; 27) made of abrasive material (9; 29) being spaced apart along the cable (5; 25). Each abrasive unit (3; 23) is anchored to the cable (5; 25) by means of a plastics or elastomeric filling material (18; 38) interposed between the unit and the cable (5; 25). The adjacent abrasive units (3; 23) are arranged in contact with one another.
    Type: Grant
    Filed: October 6, 1999
    Date of Patent: July 10, 2001
    Assignee: Dulford Properties Limited
    Inventor: Giuseppe Ghio
  • Publication number: 20010004891
    Abstract: A device for simultaneously separating a multiplicity of wafers from a hard brittle workpiece having a longitudinal axis, with a wire web made from saw wire and with an advancing device which brings about a translational relative movement, which is perpendicular to the longitudinal axis of the workpiece, between the workpiece and the wire web of the wire saw, in the course of which movement the workpiece is passed through the wire web, wherein the wire web is formed from a multiplicity of individual wires, and wherein there is a device for holding and rotating the workpiece about the longitudinal axis.
    Type: Application
    Filed: December 5, 2000
    Publication date: June 28, 2001
    Applicant: Wacker Chemie GmbH
    Inventors: Bernhard Holzmuller, Ulrich Wiese, Jochen Greim
  • Patent number: 6237585
    Abstract: An ingot 9 is sliced to wafers by a wire 5 which travels around grooved rollers 1 to 3. A tension applied to the wire 5 is detected by tension sensors 21, while vertical displacement of dancer rollers 19 is detected by position sensors 20. At least one of a fluctuation gap of the tension, a fluctuating velocity of the tension, an acceleration of the fluctuation, vertical movement of the dancer rollers 19, a velocity of the vertical movement and acceleration of the vertical movement is calculated from the detection results, and compared with a threshold in a calculating circuit 23 to judge a sign predicting abnormal increase of the tension. When the predicting signal appears, a command signal is outputted from the calculating circuit 22 to a controller 23 to stop operation of a wire-sawing machine or to relax the wire 5. Since rupture of the wire 5 is prevented in bud, a wire-sawing machine is efficiently driven for slicing the ingot 9 with a high productivity.
    Type: Grant
    Filed: January 21, 2000
    Date of Patent: May 29, 2001
    Assignees: Super Silicon Crystal Research Institute Corp., Tokyo Seimitbu Co., Ltd.
    Inventors: Hiroshi Oishi, Keiichiro Asakawa, Junichi Matsuzaki
  • Patent number: 6234159
    Abstract: A wire saw for cutting shaped articles from a workpiece, having at least two wire webs made from sawing wire, which are used for cutting off the shaped articles and which lie one above the other at a distance h and are tensioned between wire-guide rollers. The wire webs are formed by one or more adjacent and parallel wire segments. In this wire saw, no wire segment covers any other wire segment congruently when the wire webs are viewed from above. The invention also relates to a process for cutting a workpiece with the wire saw.
    Type: Grant
    Filed: September 10, 1998
    Date of Patent: May 22, 2001
    Assignee: Wacker Siltronic Gesellschaft für Halbleitermaterialien AG
    Inventor: Karl Egglhuber