Hollow Work, Internal Surface Treatment Patents (Class 134/22.1)
  • Publication number: 20080078422
    Abstract: A nozzle assembly for cleaning turbines includes an offline cleaning nozzle and a pair of online cleaning nozzles. The offline cleaning nozzle directs cleaning fluid towards the inlet of turbine. The online cleaning nozzles direct a cleaning fluid in a fan-shaped pattern in a direction substantially parallel to the direction of air flow within the turbine's inlet air duct, and intersecting with each other. The longest dimension of the fan-shaped spray pattern is substantially parallel to the direction of air flow within the duct.
    Type: Application
    Filed: September 29, 2006
    Publication date: April 3, 2008
    Inventor: Thomas Wagner
  • Publication number: 20080072927
    Abstract: The present invention generally relates to a cleaning agent for a spray gun and a method and apparatus for cleaning the spray gun, and more specifically, to the agent and method of use thereof for cleaning a water-based spray gun using a novel cleaning agent comprising a solvent of n-butanol, a solvent of n-propanol, a surfactant of ethoxylated nonylphenol, and water. The cleaning agent may also be used under specific pH conditions and an emulsifier or a foam suppressor may be used. What is also contemplated is the use of a spray gun having smooth interior and exterior surfaces. The method contemplates the contacting of the cleaning agent with the spray gun, the recovering of the cleaning agent, the separating of the cleaning agent and the reuse of the cleaning agent. What is also contemplated is the use of the cleaning agent in an automatic washing apparatus and the use of the cleaning agent as part of a fluid supply to an automated spray gun to clean the spray gun access.
    Type: Application
    Filed: August 30, 2006
    Publication date: March 27, 2008
    Inventor: William S. Weiss
  • Publication number: 20080075852
    Abstract: A method of cleaning a reaction chamber having a wafer holder is provided. First, the reaction chamber is cleaned by a cleaning gas. Next, a protection film is formed on the inner surface of the reaction chamber, wherein a gap is formed between the protection wafer and the wafer holder, and a cooling gas is guided therebetween simultaneously.
    Type: Application
    Filed: September 26, 2006
    Publication date: March 27, 2008
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Chih-Jen Mao, Chun-Hung Hsia, Ta-Ching Yang, Chun-Cheng Yu, Chien-Fu Chu, Kuo-Wei Yang, Chun-Han Chuang, Hui-Shen Shih
  • Publication number: 20080066784
    Abstract: Methods are provided for increasing the temperature of a section of conduit used for the production or transmission of hydrocarbon. According to one aspect, the method includes the steps of: (a) forming a treatment fluid comprising: (i) a carrier fluid; and (ii) a first reactant and a second reactant; and (b) introducing the treatment fluid into a section of conduit used for the production or transmission of hydrocarbon. The first reactant and second reactant are selected for being capable of reacting together in an exothermic chemical reaction; and the first and second reactant are in at least sufficient concentrations in the carrier fluid to generate a theoretical heat of reaction of at least 1,000 kJ/liter of the treatment fluid. At least some of at least one of the first reactant and the second reactant is suspended in the carrier fluid in a solid form that is adapted to help control the release of the reactant into the carrier fluid.
    Type: Application
    Filed: September 14, 2006
    Publication date: March 20, 2008
    Inventors: Diptabhas Sarkar, Stephen T. Arrington, Ronald J. Powell, Ian D. Robb, Bradley L. Todd
  • Publication number: 20080060680
    Abstract: A method and apparatus for cleaning a combustion engine having, an intake and combustion chamber having a fuel injector injection device, an oil lubrication system, a catalytic converter and a fuel supply tank. Various solvents are introduced from bulk supply sources into the crank case and into the combustion chamber and into the fuel supply to clean an engine by the introduction of predetermined solvents in a predetermined sequence to clean the engine, the fuel supply tank, the oil lubrication system and the catalytic converter. As chemicals gasify and pass through the catalytic converter, clogging creosote deposits are released thus improving the flow of exhaust through the system improving efficiency and gas mileage.
    Type: Application
    Filed: September 11, 2006
    Publication date: March 13, 2008
    Inventor: Olen C. Esterline
  • Publication number: 20080060679
    Abstract: There is disclosed a drainable ostomy pouch flusher which is easily inserted into a drainable pouch without spilling any of the flush water, and, a method for cleaning a drainable ostomy pouch which is less difficult, less time consuming, and which can be achieved with a high degree of cleanliness.
    Type: Application
    Filed: September 7, 2006
    Publication date: March 13, 2008
    Inventor: Paul Rosenberg
  • Patent number: 7341067
    Abstract: A method of cleaning a heat transfer element within a boiler furnace is provided. The method includes the steps of allowing a furnace to operate and deposit ash on a heat transfer element, determining an efficiency rate for at least one cleaning element, and managing the cleaning element based on the efficiency rate.
    Type: Grant
    Filed: September 27, 2004
    Date of Patent: March 11, 2008
    Assignee: International Paper Comany
    Inventors: Andrew Jones, Tim Carlier
  • Publication number: 20080053484
    Abstract: A method and system for removing solid materials from an oil production tank containing a liquid hydrocarbon portion and a solid portion is provided. The system includes an intake for drawing off a portion of the liquid hydrocarbon and a solid portions from the tank. A rotational particle separator receives the portion of the liquid hydrocarbon and the solid portions from the intake. A collector is provided for collecting the separated solid portion, and a return returns the separated liquid hydrocarbon portion to the tank. The system and method avoid the wasteful disposal of oil with the solid material from the oil production tank.
    Type: Application
    Filed: August 31, 2006
    Publication date: March 6, 2008
    Inventor: Donald Roy Smith
  • Patent number: 7337788
    Abstract: Uncured solvent-based paint may be flushed from a paint delivery installation using a substantially non-aqueous composition containing one or more organic solvents and a polymer having acid and/or amine functional groups.
    Type: Grant
    Filed: May 6, 2004
    Date of Patent: March 4, 2008
    Assignee: Henkel Kommanditgesellschaft auf Aktien
    Inventors: Neil R. Wilson, Bruce H. Goodreau
  • Publication number: 20080047871
    Abstract: HSP crude oil is used as process stream in crude oil storage tanks to address sludge levels both by cleaning sludge accumulations and preventing any significant sludge build up when used on a regular basis. HSP crude oil is also used to optimize cleaning routines. Making HSP oil easily accessible by providing a designated HSP source will make tank maintenance more efficient and allow refineries to use the advantages of the HSP oil to the maximum extent.
    Type: Application
    Filed: August 23, 2006
    Publication date: February 28, 2008
    Applicant: ExxonMobil Research and Engineering Company
    Inventors: Glen B. Brons, Douglas S. Meyer, Mohsen N. Harandi, Randolph Perry, John W. Anthony, John S. Jackson
  • Publication number: 20080047587
    Abstract: A closed-loop system for cleaning tanks and other enclosures utilizing adjustably mounted nozzles for spraying water, other wash fluid and/or beneficial chemical additive within the tanks or other enclosures to be cleaned. Effluent wash fluid leaving a tank is directed to a separator unit for separation of liquids and solids. Solids are disposed of or otherwise removed, while recovered liquids are directed for re-use. Exposure of personnel to the inside of such tanks or other enclosures to be cleaned is minimal.
    Type: Application
    Filed: August 22, 2006
    Publication date: February 28, 2008
    Inventor: David M. Ball
  • Patent number: 7334587
    Abstract: An assembly for use in the collection and disposal of water and debris during the hydroblast cleaning of a heat exchanger including a containment shield having an end portion and an annular portion mounted adjacent one end of the heat exchanger such that the annular portion circumscribes the area between the end of the heat exchanger and the end portion of the shield and a flexible waterproof shroud disposed about the containment shield for collecting water and debris generated during the hydroblast cleaning and directing same to a collection location. Optionally, an energy absorbent element can be mounted adjacent said one end of the heat exchanger. A portable washing and back spray collection station is optionally positioned about the upstream end of the heat exchanger.
    Type: Grant
    Filed: May 31, 2005
    Date of Patent: February 26, 2008
    Assignee: Western Oilfields Supply Co.
    Inventor: John W. Lake
  • Patent number: 7335601
    Abstract: A method of manufacture includes processing an object in a chamber and subsequently generating an electrical force of attraction to float contaminants off of a region adjacent the processed object before the object is unloaded from the chamber. The object may be processed with the use of plasma. The plasma is produced by introducing a first gas into the chamber and applying a source power to the first gas. The plasma is extinguished after the object is processed with the use of the plasma. Then, a second gas is introduced into the chamber and a source power is applied to the second gas to generate the electrical force of attraction. At this time, the parameters are controlled so that particle contaminants are readily removed without any influence on the object. Also, the same electrode can be used to apply source power to both the first and second gas. Thus, the operation of removing the particle contaminants is relatively simple.
    Type: Grant
    Filed: October 24, 2005
    Date of Patent: February 26, 2008
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jae-Hyun Han, Seung-Ki Chae, Kee-Soo Park
  • Patent number: 7331354
    Abstract: In process for cleaning tray columns which are used for the purposes of rectifiying liquids comprising (meth)acrylic compounds, a basic liquid is conveyed downward through the tray column and a gas is passed through the column in countercurrent to the basic liquid at an average gas phase differential pressure over all trays of at least 0.5 mbar/tray.
    Type: Grant
    Filed: March 4, 2003
    Date of Patent: February 19, 2008
    Assignee: BASF Aktiengesellschaft
    Inventors: Juergen Schroeder, Klaus Joachim Mueller-Engel, Volker Schliephake, Ulrich Hammon, Volker Diehl, Ulrich Jaeger
  • Publication number: 20080035176
    Abstract: The present invention relates to a mobile or stationary waste container cleaning system used for residential, commercial and industrial waste, garbage, trash, storage or operations containers or receptacles. Other applications include, but are not limited to cleaning of chemical drums, grease dumpsters (e.g. behind restaurants), rain barrels and non-uniform residential, commercial or industrial dumpsters or waste containers. The container cleaning system can alternatively be used for rural areas, farms or ranches.
    Type: Application
    Filed: July 18, 2006
    Publication date: February 14, 2008
    Inventor: Ernest F. Byers
  • Publication number: 20080029128
    Abstract: A cleaning unit for cleaning a spray gun positioned in or within a direct vicinity to a spray booth includes a cleaning nozzle and a media delivering system. A valve communicates with the media delivering system and controls an outflow of cleaning media from the cleaning nozzle.
    Type: Application
    Filed: August 1, 2006
    Publication date: February 7, 2008
    Inventors: Peter Beijbom, Niklas Johansson, Christian Norman
  • Patent number: 7325330
    Abstract: Apparatus and method for eliminating wrinkles in clothes in a washing or drying machine using steam to eliminate the wrinkles in clothes, in a state in which the clothes are worn by a user or stored, as well as in a state in which washing of the clothes is terminated. The method includes determining whether or not a wrinkle-eliminating course is selected; supplying hot air to the clothes to eliminate dust from the clothes when it is determined that the wrinkle-eliminating course is selected; and supplying steam to the clothes, from which the dust was eliminated, to eliminate the wrinkles in the clothes.
    Type: Grant
    Filed: July 12, 2005
    Date of Patent: February 5, 2008
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hyun Suk Kim, Hyung Gyoon Kim, Seon Woo Park, Seong Min Oak, Jee Hun Park, Yoon Sook Lee
  • Publication number: 20080023037
    Abstract: A method for removing debris from a turbine component includes routing a cleaning composition comprising fluosilicic acid through an internal passage of the turbine component, without contacting an external surface of the turbine component, to remove the debris.
    Type: Application
    Filed: July 31, 2006
    Publication date: January 31, 2008
    Inventors: Lawrence Bernard Kool, Peter Paul Pirolla, Jane Marie Lipkin, Frederick W. Dantzler
  • Patent number: 7322368
    Abstract: A plasma cleaning gas for CVD chamber is a gas for cleaning silicon-containing deposits on the surface of a CVD chamber inner wall and the surfaces of members placed inside the CVD chamber after film forming treatment on a substrate by a plasma CVD apparatus. The cleaning gas includes 100% by volume of fluorine gas which gas can generate plasma by electric discharge. When 100% by volume of fluorine gas is plasma-generated by electric discharge and then used as a cleaning gas, an extremely excellent etching rate can be attained and further plasma can be stably generated even in the total gas flow rate of 1000 sccm and at a chamber pressure of 400 Pa. Further, the uniformity of cleaning can be also ensured in the above conditions. Additionally the fluorine gas concentration is 100% so that the apparatus is not complicated and thereby the cleaning gas has excellent practicability.
    Type: Grant
    Filed: August 26, 2002
    Date of Patent: January 29, 2008
    Inventors: Akira Sekiya, Yuki Mitsui, Yutaka Ohira, Taisuke Yonemura
  • Patent number: 7323064
    Abstract: The invention includes a method of cleaning a processing chamber by introducing supercritical fluid into the processing chamber. A residue over an internal chamber surface is contacted with the supercritical fluid to remove the residue from the surface. The invention also includes a method of removing deposited material from internal surfaces of a processing system. A cleaning agent comprising at least one of C3H8, C2H6 and CH4 is provided in supercritical phase into at least a portion of the processing system. A material deposited on an internal surface of the processing system is contacted with the cleaning agent to remove at least a portion of the deposited material.
    Type: Grant
    Filed: August 6, 2003
    Date of Patent: January 29, 2008
    Assignee: Micron Technology, Inc.
    Inventors: Cem Basceri, Gurtej S. Sandhu
  • Publication number: 20080017103
    Abstract: A supply or feed center for dry particulate material is modular in design with an application module and an exhaust module, along with optimal cabinet modules such as a pump cabinet module. The application module is partitioned into an application section and a utility section, both of which communicate with the exhaust module. An air diverter may be used to change relative air flow into the two sections, and in one embodiment is a swingable door. The exhaust module may include a self-contained exhaust system including after filters, motor, fan and final filters, or may share energy from a remote exhaust system. An inventive suction device is also provided to extract material from a hopper.
    Type: Application
    Filed: June 22, 2006
    Publication date: January 24, 2008
    Inventors: Terrence M. Fulkerson, Donald L. Urig, Dean A. Koch
  • Patent number: 7320329
    Abstract: Apparatus for remotely operated fluid pumping in work spaces, particularly suitable for the cleaning of enclosed space tanks such as those on marine vessels. The apparatus comprises one or more arm assemblies, each made up of two or more arm sections each, with the arm assembly mounted within of the tank. Hydraulic rotary actuators disposed between the arm sections provide up to 360 degree rotation of one arm section with respect to the next. A nozzle is mounted on a pair of hydraulic rotary actuators near the end of the arm assembly distal from the mount, with a hose supplying fluid from a supply pump to the nozzle. Fluids and solids from the cleaning operation can be pumped from the area being cleaned via a discharge pump to a holding vessel, such as a disposal barge. A video camera is mounted on the arm assembly, preferably at the nozzle, to permit an operator to remotely view the cleaning process and area.
    Type: Grant
    Filed: September 14, 2004
    Date of Patent: January 22, 2008
    Assignee: Baker Hughes Incorporated
    Inventors: Stephen A. Luke, Robert P. Luke, Ben T. Deslatte
  • Publication number: 20080006297
    Abstract: A cleaning device for cleaning sidewalls of a liquid container. The cleaning device includes a cover that can be removably disposed over a flotation device. The cover has a lower cleaning portion that cleans the sidewalls of the container upon contact with the sidewalls. The cover also has an upper noncleaning portion.
    Type: Application
    Filed: July 7, 2006
    Publication date: January 10, 2008
    Inventor: Russell L. Harmer
  • Patent number: 7316751
    Abstract: A swimming pool cleaner discharges water jets under the cleaner body, directed toward its center from its sides, to agitate and lift debris toward one or more vacuum intake openings, to greatly enhance the cleaning ability of the cleaner. The suspended dirt and debris become semi-buoyant under the force of the jetted water which is preferably moving in the same direction as the cleaner, so that the relative speed between the cleaner and the suspended dirt and debris is reduced, thereby enabling the cleaner to move at a relatively faster rate and still clean with equivalent or even greater efficiency than a pool cleaner that is not equipped with directional cleaning water jets. In addition, displaced front and back orientations of the intake ports allow for longer time for any dirt and debris to be picked up.
    Type: Grant
    Filed: September 22, 2005
    Date of Patent: January 8, 2008
    Assignee: Aqua Products, Inc.
    Inventors: Tibor Horvath, Giora Erlich
  • Patent number: 7311109
    Abstract: A method for cleaning a processing chamber and manufacturing a semiconductor device by removing impurities from a substrate in the processing chamber with a plasma of a first gas including hydrogen gas. After the substrate is removed from the processing chamber, the processing chamber is etched with the plasma of a non-hydrogenous second gas. Thus, the etching selectivity can be improved and the particles are prevented from depositing and/or forming on the substrate.
    Type: Grant
    Filed: June 26, 2003
    Date of Patent: December 25, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jung-wook Kim, Hyeon-Deok Lee, Jin-Gi Hong, Ji-Soon Park, Eung-Joon Lee
  • Publication number: 20070289609
    Abstract: According to an embodiment of the present invention, a method for cleaning a process chamber includes removing a TiAlN layer from an inner wall of the process chamber using a first cleaning gas containing a TiCl4 gas. According to principles of this invention, dry cleaning, without wet cleaning, is possible for cleaning the process chamber.
    Type: Application
    Filed: June 19, 2007
    Publication date: December 20, 2007
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Hyun-Seok LIM, Gyu-Hwan OH, Rak-Hwan KIM, Keon-Hoe BAE, In-Sun PARK, Ki-Jong LEE
  • Publication number: 20070283981
    Abstract: A method of removing sludge from hydrocarbon storage tanks comprising introducing a hydrocarbon diluent into the storage tank to form a diluent/sludge mixture, circulating this mixture through the tank to obtain a blend of sludge and/or diluent, removing the bulk of the blend from the storage tank to leave a residuum, creating a non-combustible atmosphere in the storage tank, introducing an aqueous wash into the storage tank, the aqueous wash being at a temperature sufficient to heat the residuum to a temperature of not less than about 40° C., circulating the aqueous wash through the storage tank, separating hydrocarbons from a stream of residuum/aqueous wash removed from the storage tank to produce an aqueous wash recycle stream and introducing the recycle stream into the storage tank.
    Type: Application
    Filed: June 8, 2006
    Publication date: December 13, 2007
    Inventor: Tracy E. Stewart
  • Patent number: 7305998
    Abstract: In one embodiment of the invention, a method of cleaning a workpiece is disclosed. The method comprises providing a mobile flushing unit and servicing the workpiece as follows: a) connecting a flexible hose of the mobile flushing unit to one end of the workpiece and connecting another flexible hose of the mobile flushing unit to a second end of the workpiece; b) flowing compressed air through each hose and the workpiece; c) pumping a cleaning fluid through each hose and the workpiece for a predetermined amount of time; d) ceasing cleaning fluid flow, followed by purging with air to remove the cleaning fluid from the workpiece; e) pumping water through each hose and the workpiece for a predetermined amount of time; f) ceasing water flow, following by another purge with air to remove the water from the workpiece; and g) disconnecting each hose from the workpiece.
    Type: Grant
    Filed: December 14, 2006
    Date of Patent: December 11, 2007
    Assignee: General Electric Company
    Inventor: John Watt
  • Publication number: 20070272276
    Abstract: A method for removing pipe tuberculation includes the initial step of preparing an access point in the existing pipe by digging to the pipe and sawing a section from the pipe or creating an access port. The section of the pipeline to have its tuberculation removed is isolated by closing valves or creating another access point and sealing the end. Then, a reaming tool is introduced to the interior of the pipe. The reaming tool is attached to a hollow rod string capable of producing moderate thrust and pullback force, and must also produce sufficient torque when rotated. A horizontal directional drilling or “HDD” machine on the surface or in a pit dug out for this purpose applies the aforementioned forces to the rod string.
    Type: Application
    Filed: May 18, 2007
    Publication date: November 29, 2007
    Inventor: Steven W. Wentworth
  • Patent number: 7300523
    Abstract: A method for cleansing used reaction cuvettes so that whenever certain assays are to be or have been performed in the reaction cuvette, the cuvette is automatically subjected to an additional cleaning operation by providing a number of washing and drying manifolds, each of which is independently selectively activated to perform or not perform a cleaning operation.
    Type: Grant
    Filed: July 18, 2003
    Date of Patent: November 27, 2007
    Assignee: Dade Behring Inc.
    Inventors: Ching-Cherng Lee, Donald Richard Phillips, Sr., Arnold Lloyd Lewis, William Jackson Devlin, Sr.
  • Patent number: 7296582
    Abstract: A connector apparatus is provided which is configured to replace a separation module in a system for dispensing a fluid. When it is desired to purge the system of a dispensed fluid, the connector apparatus, having the same configuration of an inlet and an outlet as the separation module, replaces the separation module and a purging fluid is passed through the system.
    Type: Grant
    Filed: February 10, 2005
    Date of Patent: November 20, 2007
    Assignee: Entegris, Inc.
    Inventors: Jeffrey M. Campbell, J. Karl Niermeyer
  • Patent number: 7297260
    Abstract: A system and method for washing engines and for collecting and treating the waste water from engine washing operations. The system includes a collecting device for collecting waste liquid during a washing operation of the engine and a treatment device for treating waste liquid collected during the washing operation. The system may be advantageously arranged on a mobile cart having a chassis provided with wheels. The mobile cart also includes an adjusting device for adjusting the vertical position of liquid separating and collecting components relative to the engine.
    Type: Grant
    Filed: June 14, 2004
    Date of Patent: November 20, 2007
    Assignee: Gas Turbine Efficiency AB
    Inventors: Carl-Johan Hjerpe, Peter Asplund
  • Patent number: 7293568
    Abstract: The present invention generally relates to a formulation created by reacting sodium hydroxide, water, and silicon metal which has unique properties and many uses. The instant invention is further directed to methods of producing and using such formulations.
    Type: Grant
    Filed: December 2, 2004
    Date of Patent: November 13, 2007
    Assignee: Silicon Chemistry, Inc.
    Inventors: Ben Elledge, Richard Okun, Robert Kulperger, Glen Davies
  • Patent number: 7293569
    Abstract: Compositions and methods for cleaning deposition systems utilizing alkylsilanes are described herein. In an embodiment, a method of cleaning a semiconductor fabrication system comprises flushing the system with a solvent comprising at least one alkylsilane. In another embodiment, a method of removing at least one chemical precursor from a semiconductor fabrication system comprises forcing a solvent containing at least one alkylsilane through the semiconductor fabrication system and dissolving the at least one chemical precursor in the solvent. The solvent may also contain mixtures of different alkylsilanes and other organic solvents.
    Type: Grant
    Filed: July 10, 2006
    Date of Patent: November 13, 2007
    Assignee: Air Liquide Electronics U.S. LP
    Inventors: Ravi Laxman, Ashutosh Misra, Jean-Marc Girard
  • Publication number: 20070256707
    Abstract: A concrete pump washout system which is mountable to transport vehicle(s); the system provides for the quick safe, and easy removal of all waste water and concrete used in the washout of concrete pumps and concrete truck chutes on a construction site. When applied to concrete pump washout, washout water and waste concrete are deposited into a tub, and a fluid vacuum pump is used to separate the water into a holding tank for later disposal. The waste concrete is left behind to harden in the tub, which may be disposable, for later removal to a disposal site, thereby freeing the concrete pump for the next job. When applied to concrete truck chute washout, water is removed from washout of the chute into the concrete pump hopper and pumped back into the truck hopper or into the washwater holding tank for later disposal, at which point the truck may leave and the pump is ready for the next load.
    Type: Application
    Filed: May 1, 2007
    Publication date: November 8, 2007
    Applicant: Onsite Washout Corp.
    Inventors: Ernest Kim Leonardich, Norman P. Gruczelak
  • Patent number: 7287534
    Abstract: A process for cleaning apparatus in which (meth)acrylic acid-containing organic solvents have been treated and/or generated and contain fouling and/or polymer and residues of organic solvent, in which the apparatus contents are subjected to a steam distillation in the apparatus.
    Type: Grant
    Filed: May 29, 2003
    Date of Patent: October 30, 2007
    Assignee: BASF Aktiengesellschaft
    Inventors: Volker Diehl, Ulrich Jäger, Jürgen Schröder, Joachim Thiel
  • Publication number: 20070248767
    Abstract: A method of self-cleaning a plasma reactor upon depositing a carbon-based film on a substrate a pre-selected number of times, includes: (i) exciting oxygen gas and/or nitrogen oxide gas to generate a plasma; and (ii) exposing to the plasma a carbon-based film accumulated on an upper electrode provided in the reactor and a carbon-based film accumulated on an inner wall of the reactor.
    Type: Application
    Filed: April 6, 2007
    Publication date: October 25, 2007
    Applicant: ASM JAPAN K.K.
    Inventors: Seiji Okura, Yukihiro Mori
  • Patent number: 7279050
    Abstract: A one-piece sponge cleans and removes coating material from the bottom edge, inside and outside surface of a photoreceptor drum. The one-piece sponge has an inner sponge section and an outer sponge section, both with internal channels to remove solvent and dissolved coating material.
    Type: Grant
    Filed: July 16, 2003
    Date of Patent: October 9, 2007
    Assignee: Xerox Corporation
    Inventors: Jean D. Van Epps, Jr., Michael J. Duggan, James R. Lee, Steven D. Bush
  • Patent number: 7275550
    Abstract: An apparatus and method for cleaning and pressure testing tube structures comprising a cleaning fluid supply pump and a pressurization pump alternately in fluid communication with a feed header having a feed header interface engageable to an end of at least one tube structure and a drain header having a drain header interface engageable to an opposing end of the at least one tube structure and an outlet valved so as to be selectively closed or opened depending on mode of operation of the apparatus. The apparatus and associated method cleans and pressure tests a tube by engaging a tube between the feed header interface and the drain header interface and maintaining said engagement while sequentially flowing a cleaning fluid through the inner diameter of the hollow tube, pressurizing a static fluid within the hollow tube, and releasing fluid from the tube.
    Type: Grant
    Filed: May 3, 2004
    Date of Patent: October 2, 2007
    Assignee: The Boeing Company
    Inventor: Joseph M. Nealon
  • Patent number: 7270761
    Abstract: A fluorine-free integrated process for plasma etching aluminum lines in an integrated circuit structure including an overlying anti-reflection coating (ARC) and a dielectric layer underlying the aluminum, the process being preferably performed in a single plasma reactor. The ARC open uses either BCl3/Cl2 or Cl2 and possibly a hydrocarbon passivating gas, preferably C2H4. The aluminum main etch preferably includes BCl3/Cl2 etch and C2H4 diluted with He. The dilution is particularly effective for small flow rates of C2H4. An over etch into the Ti/TiN barrier layer and part way into the underlying dielectric may use a chemistry similar to the main etch. A Cl2/O2 chamber cleaning may be performed, preferably with the wafer removed from the chamber and after every wafer cycle.
    Type: Grant
    Filed: October 18, 2002
    Date of Patent: September 18, 2007
    Assignee: Appleid Materials, Inc
    Inventors: Xikun Wang, Hui Chen, Anbei Jiang, Hong Shih, Steve S. Y. Mak
  • Patent number: 7267842
    Abstract: A process for the selective removal of a TiO2-containing substance from an article for cleaning applications is disclosed herein. In one embodiment, there is provided a process for removing a TiO2-containing substance from an article comprising: providing the article having the TiO2-containing substance deposited thereupon; reacting the substance with a reactive gas comprising at least one selected from a fluorine-containing cleaning agent, a chlorine-containing cleaning agent and mixtures thereof to form a volatile product; and removing the volatile product from the article to thereby remove the substance from the article.
    Type: Grant
    Filed: March 15, 2004
    Date of Patent: September 11, 2007
    Assignee: Air Products and Chemicals, Inc.
    Inventors: Dingjun Wu, Bing Ji, Philip Bruce Henderson, Eugene Joseph Karwacki, Jr.
  • Patent number: 7264679
    Abstract: In a method of cleaning a surface of a substrate processing chamber component to remove process deposits, the component surface is cooled to a temperature below about ?40° C. to fracture the process deposits on the surface. The surface can be cooled by immersing the surface in a low temperature fluid, such as liquid nitrogen. In another version, the component surface is heated to fracture and delaminate the deposits, and optionally, subsequently rapidly cooled to form more fractures. The component surface cleaning can also be performed by bead blasting followed by a chemical cleaning step.
    Type: Grant
    Filed: February 11, 2004
    Date of Patent: September 4, 2007
    Assignee: Applied Materials, Inc.
    Inventors: Marc O'Donnell Schweitzer, Jennifer Watia Tiller, Brian West, Karl Brueckner
  • Patent number: 7264677
    Abstract: Ruthenium, osmium and their oxides can be etched simply and rapidly by supplying an atomic oxygen-donating gas, typically ozone, to the aforementioned metals and their oxides through catalysis between the metals and their oxides, and the ozone without any damages to wafers and reactors and application of the catalysis not only to the etching but also to chamber cleaning ensures stable operation of reactors and production of high quality devices.
    Type: Grant
    Filed: October 19, 2005
    Date of Patent: September 4, 2007
    Assignee: Renesas Technology Corp.
    Inventors: Miwako Nakahara, Toshiyuki Arai, Shigeru Ohno, Takashi Yunogami, Sukeyoshi Tsunekawa, Kazuto Watanabe
  • Patent number: 7261109
    Abstract: Apparatus for remotely operated fluid pumping in work spaces, particularly suitable for the cleaning of enclosed space tanks such as those on marine vessels. The apparatus comprises one or more arm assemblies, each made up of two or more arm sections each, with the arm assembly mounted within of the tank. Hydraulic rotary actuators disposed between the arm sections provide up to 360 degree rotation of one arm section with respect to the next. A nozzle is mounted on a pair of hydraulic rotary actuators near the end of the arm assembly distal from the mount, with a hose supplying fluid from a supply pump to the nozzle. Fluids and solids from the cleaning operation can be pumped from the area being cleaned via a discharge pump to a holding vessel, such as a disposal barge. A video camera is mounted so as to permit an operator to remotely view the cleaning process and area.
    Type: Grant
    Filed: July 13, 2005
    Date of Patent: August 28, 2007
    Assignee: Baker Hughes Incorporated
    Inventors: Stephen A. Luke, Robert P. Luke, Ben T. Deslatte
  • Patent number: 7252095
    Abstract: In one embodiment of the invention, a method of cleaning a workpiece is disclosed. The method comprises providing a mobile flushing unit and servicing the workpiece as follows: a) connecting a flexible hose of the mobile flushing unit to one end of the workpiece and connecting another flexible hose of the mobile flushing unit to a second end of the workpiece; b) flowing compressed air through each hose and the workpiece; c) pumping a cleaning fluid through each hose and the workpiece for a predetermined amount of time; d) ceasing cleaning fluid flow, followed by purging with air to remove the cleaning fluid from the workpiece; e) pumping water through each hose and the workpiece for a predetermined amount of time; f) ceasing water flow, following by another purge with air to remove the water from the workpiece; and g) disconnecting each hose from the workpiece.
    Type: Grant
    Filed: April 18, 2005
    Date of Patent: August 7, 2007
    Assignee: General Electric Company
    Inventor: John Watt
  • Patent number: 7252720
    Abstract: Prion infectivity adsorbed onto substrates (for example, chromatographic columns used to fractionate blood plasma) is removed by treatment with 2M sodium chloride. Optionally, the substrate is further washed with 0.1 M sodium hydroxide.
    Type: Grant
    Filed: May 30, 2003
    Date of Patent: August 7, 2007
    Assignee: Common Services Agency
    Inventors: Peter Reynolds Foster, Brenda Doreen Griffin, Ronald Vance McIntosh
  • Patent number: 7252096
    Abstract: On-Line and Off-Line methods of simultaneously cleaning and disinfecting an industrial water system are described and claimed. The methods involve the addition to the water of the industrial water system of a Compound selected from the group consisting of the alkali salts of chlorite and chlorate and mixtures thereof; and an acid, followed by allowing the water in the industrial water system to circulate for several hours. The reaction of the alkali salts of chlorite and chlorate and acid produces chlorine dioxide in-situ in the water of the industrial water system. The chlorine dioxide kills microorganisms and the acid acts to remove deposits upon the water-contact surfaces of the equipment. An alternative method involves the use of a chelating agent and a biocide. Other possible cleaning and disinfection reagents may be added as needed including corrosion inhibitors, chelating agents, biocides, surfactants and reducing agents.
    Type: Grant
    Filed: November 30, 2004
    Date of Patent: August 7, 2007
    Assignee: Nalco Company
    Inventors: Jasbir S. Gill, Amit Gupta
  • Patent number: 7247210
    Abstract: A method for treating CIP equipment is provided according to the present invention. The CIP equipment includes process equipment. The method includes steps of treating the CIP equipment with a multiple phase treating composition comprising a treating liquid phase and a treating gaseous phase and rinsing the CIP equipment with a multiple phase rinsing composition comprising a rinsing liquid phase and a rinsing gaseous phase.
    Type: Grant
    Filed: February 23, 2004
    Date of Patent: July 24, 2007
    Assignee: Ecolab Inc.
    Inventors: Richard K. Staub, Mark R. Altier, Paul F. Schacht, Robert D. P. Hei, Gabriel M. Miller, Thomas L. Harris, Peter J. Fernholz
  • Patent number: 7241329
    Abstract: The invention concerns a method which consists in using a single-piece casing (1), without break; then for a first cleaning process, in cutting the casing (1) between the zone (4) containing the filter and the zone (6) containing the other element; then in cleaning the part containing the particle filter; and in assembling once more the two parts, so that the global dimensions of the casing (1) are substantially unchanged.
    Type: Grant
    Filed: May 28, 2001
    Date of Patent: July 10, 2007
    Assignee: Faurecia Systems d'Echappement
    Inventor: Thomas Weber
  • Patent number: RE40050
    Abstract: A composition for a cleaning-in-place system is described. The composition has a halogen dioxide and a optionally hydroxide and does not require the use of a detergent to display excellent cleaning and disinfecting properties on processing equipment such as the equipment found in breweries, dairy plants and carbonated beverage plants.
    Type: Grant
    Filed: July 22, 2004
    Date of Patent: February 12, 2008
    Assignee: JohnsonDiversey, Inc.
    Inventors: Michael Francis Coughlin, David Christopher Cole, Charles Allen Crawford