Gas Or Vapor Blasts Or Currents Patents (Class 134/37)
  • Patent number: 10622332
    Abstract: A substrate separation system configured to remove a substrate from a carrier is provided. The substrate separation system includes a stage, an upper fixing portion, a suction portion, a cutting portion and a blowing portion. The stage is configured to carry the carrier. The upper fixing portion is disposed above the stage so as to be movable up and down. The suction portion is disposed above the stage so as to be movable up and down, and has a hollow portion to accommodate the upper fixing portion. The cutting portion is disposed on one side of the stage. The blowing portion is disposed on another side of the stage, and is configured to provide a blowing force to a position between the substrate and the carrier.
    Type: Grant
    Filed: July 15, 2019
    Date of Patent: April 14, 2020
    Assignee: PRINCO CORP.
    Inventors: Chun-Hsiung Chou, Chin-Huang Huang, Chih-Kuang Yang
  • Patent number: 10310254
    Abstract: A camera module for a motor vehicle having a camera unit with a camera and a lens, wherein the camera unit is arranged in a housing, and wherein the camera unit is designed to be movable between a passive position, in which the camera unit is arranged at least partially in the housing, and an active position, in which the camera unit serves to visually detect an outer area of a motor vehicle, and with a drive unit which is coupled to the camera unit and is designed to move the camera unit between the passive position and the active position, and with a cleaning device for cleaning the lens of the camera unit with a jet of fluid, wherein the camera module has a deflection element for deflecting the jet of fluid onto the lens.
    Type: Grant
    Filed: July 21, 2016
    Date of Patent: June 4, 2019
    Assignee: Huf Hülsbeck & Fürst GmbH & Co. KG
    Inventor: Joachim Barthel
  • Patent number: 10231590
    Abstract: A cleaning system including a motor, an impeller driven by the motor, a battery receptacle, and a motor controller. The battery receptacle is configured to receive a battery pack. The battery pack includes one or more battery cells and a battery controller. The motor controller is configured to receive from the battery controller one of a first type of data and a second type of data, and operate the motor at a defined speed, the defined speed being a first speed upon receiving the first type of data, and a second speed upon receiving the second type of data.
    Type: Grant
    Filed: December 18, 2017
    Date of Patent: March 19, 2019
    Assignee: Techtronic Industries Co. Ltd.
    Inventors: Brett A. Reed, Mark Reindle, Will Sebastian
  • Patent number: 9663073
    Abstract: A cleaning apparatus for an in-vehicle optical sensor includes a cleaning liquid nozzle and an air nozzle. The cleaning liquid nozzle jets out a cleaning liquid toward a lens surface of a lens of the in-vehicle optical sensor or a translucent surface of a translucent cover covering the lens surface when the translucent cover exists. The air nozzle jets out air toward a used cleaning liquid, which was jetted out from the cleaning liquid nozzle and cleaned the lens surface or the translucent surface, to prevent the used cleaning liquid from dropping from the lens surface or the translucent surface on a predetermined position by blowing away the used cleaning liquid.
    Type: Grant
    Filed: June 20, 2013
    Date of Patent: May 30, 2017
    Assignee: DENSO CORPORATION
    Inventors: Hitoshi Tanaka, Muneaki Matsumoto
  • Patent number: 9329534
    Abstract: An image heating apparatus includes: first and second rotatable members configured to form a nip for heating a toner image on a recording material; rotatable rubbing member configured to rub the first rotatable member to substantially refresh a surface property of the first rotatable member; an air blowing mechanism, provided with a plurality of openings, configured to blow air toward different positions of the rotatable rubbing member with respect to an axial direction of the rotatable rubbing member; and a moving mechanism configured to reciprocate the air blowing mechanism with respect to the axial direction.
    Type: Grant
    Filed: March 5, 2014
    Date of Patent: May 3, 2016
    Assignee: Canon Kabushiki Kaisha
    Inventor: Kazunari Hatazaki
  • Patent number: 9217964
    Abstract: An image heating apparatus includes: first and second rotatable members configured to form a nip for heating a toner image on a recording material; a rotatable rubbing member configured to rub the first rotatable member to substantially refresh a surface property of the first rotatable member; and a pipe member provided with an opening, formed at a peripheral surface thereof, for permitting air blowing toward the rotatable rubbing member, wherein said pipe member has an end portion hermetically sealed by collapse.
    Type: Grant
    Filed: March 5, 2014
    Date of Patent: December 22, 2015
    Assignee: Canon Kabushiki Kaisha
    Inventor: Kazunari Hatazaki
  • Publication number: 20150125986
    Abstract: In a processing of immersing substrates in a chemical solution, and agitating the chemical solution by as bubbles or liquid, the gas bubbles or liquid is supplied so as to bring about alternate occurrence of a first state and a second state. The first state is a state in which an amount of the gas bubbles or the liquid supplied to first side in one direction of each substrate is greater than an amount of the gas bubbles or the liquid supplied to a second side in the one direction of the substrate. The second state is a state in which the amount of the gas bubbles or the liquid supplied to the first side in the one direction of the substrate is smaller than the amount of the gas bubbles or the liquid supplied to the second side in the one direction of the substrate.
    Type: Application
    Filed: January 7, 2015
    Publication date: May 7, 2015
    Inventors: Masaki SHIMA, Shinji KOBAYASHI
  • Publication number: 20150114435
    Abstract: Apparatus for drifting away loose items from an area, has a container with an outlet port and is rotatably supported on a base member. A top member is fixedly connected to the base member above the container. The top member has a fan that is adapted to draw air from the exterior through an inlet port and discharge the air into the interior of the container to exit from the outlet port. A motor is secured to the top member, the motor being adapted to engage with and rotate the container relative to the base member and the top member, such that the air exiting from the outlet port is driven in a circular direction.
    Type: Application
    Filed: October 30, 2013
    Publication date: April 30, 2015
    Inventor: Miguel Angel Canales
  • Patent number: 9017488
    Abstract: A process for quickly removing hydrocarbon contaminants and noxious gases in a safe and effective manner from catalytic reactors, other media packed process vessels and associated equipment in the vapor phase without using steam. The cleaning agent contains one or more solvents, such as terpenes or other organic solvents. The cleaning agent is injected into contaminated equipment, along with a carrier gas, in the form of a cleaning vapor.
    Type: Grant
    Filed: July 16, 2014
    Date of Patent: April 28, 2015
    Assignee: Refined Technologies, Inc.
    Inventors: Cody Nath, Barry Baker, Sean Sears
  • Patent number: 9005366
    Abstract: The present invention discloses a cleaning process, utilizing a gas flow to an interior of a hollow object in a fluid ambient. After capping the object to seal off the interior volume, gas is introduced to the object interior. The pressure is built up within the object interior, loosening the seal. The gas pressure is released, and the seal returns. The vibration caused by the cycling of gas pressure can be used to perform cleaning of particles adhering to the object. The cleaning process can be used in a combinatorial processing system, enabling in-situ cleaning of process reactor assemblies.
    Type: Grant
    Filed: October 6, 2011
    Date of Patent: April 14, 2015
    Assignee: Intermolecular, Inc.
    Inventor: Edwin Adhiprakasha
  • Patent number: 8999070
    Abstract: The invention provides a method and apparatus for removing a blockage from a fluid conduit. An apparatus comprises a first portion containing a fluid volume separated from the fluid conduit via a controllable valve. The valve is cyclically opened and closed such that a pressure differential between the first portion and the fluid conduit causes a series of pressure pulses in the fluid conduit. The pressure differential is regulated to control the amplitude of the pressure pulses of the series.
    Type: Grant
    Filed: September 28, 2010
    Date of Patent: April 7, 2015
    Assignee: Paradigm Flow Services Services Limited
    Inventor: Hugh MacKenzie
  • Publication number: 20150079701
    Abstract: A manufacturing apparatus includes a chuck for contacting a peripheral portion of a workpiece. The apparatus includes a nozzle to eject a process fluid (liquid or gas) toward a first surface while the workpiece is in contact with the chuck. The apparatus also includes a plate having an opening configured such that a support fluid (liquid or gas) can be ejected toward a second surface of the workpiece while the workpiece is in contact with the chuck. In an example, the support fluid can be used to counteract a displacement of the interior portion in the direction perpendicular to the plane of the workpiece due to, for example, gravity and/or hydrostatic pressure of the process fluid.
    Type: Application
    Filed: February 28, 2014
    Publication date: March 19, 2015
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventor: Daisuke YAMASHITA
  • Patent number: 8980009
    Abstract: The invention is directed to a method for at least partially removing a contamination layer (15) from an optical surface (14a) of an EUV-reflective optical element (14) by bringing a cleaning gas into contact with the contamination layer. In the method, a jet (20) of cleaning gas is directed to the contamination layer (15) for removing material from the contamination layer (15). The contamination layer (15) is monitored for generating a signal indicative of the thickness of the contamination layer (15) and the jet (20) of cleaning gas is controlled by moving the jet (20) of cleaning gas relative to the optical surface (14a) using this signal as a feedback signal. A cleaning arrangement (19 to 24) for carrying out the method is also disclosed. The invention also relates to a method for generating a jet (20) of cleaning gas and to a corresponding cleaning gas generation arrangement.
    Type: Grant
    Filed: March 7, 2013
    Date of Patent: March 17, 2015
    Assignees: Carl Zeiss SMT GmbH, ASML Netherlands B.V.
    Inventors: Dirk Heinrich Ehm, Arnold Storm, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn, Thomas Stein, Edwin te Sligte
  • Patent number: 8974605
    Abstract: A method for operating an electronic device manufacturing system is provided, including: introducing an inert gas into a process tool vacuum pump at a first flow rate while the process tool is operating in a process mode; and introducing the inert gas into the process tool vacuum pump at a second flow rate while the process tool is operating in a clean mode. Numerous other embodiments are provided.
    Type: Grant
    Filed: March 24, 2009
    Date of Patent: March 10, 2015
    Assignee: Applied Materials, Inc.
    Inventors: Daniel O. Clark, Phil Chandler, Jay J. Jung
  • Publication number: 20150047680
    Abstract: Disclosed is a dry-cleaning method for removing a metal film adhered to a film-formation apparatus by using ?-diketone, the dry-cleaning method being characterized by that a gas containing ?-diketone and NOx (representing at least one of NO and N2O) is used as a cleaning gas and that the metal film within a temperature range of 200° C. to 400° C. is reacted with the cleaning gas, thereby removing the metal film. According to this method, it is possible to make etching progress even if there occurs a temperature difference depending on the position of the adhered metal film.
    Type: Application
    Filed: February 20, 2013
    Publication date: February 19, 2015
    Inventors: Tomonori Umezaki, Yuta Takeda, Isamu Mori
  • Publication number: 20150034751
    Abstract: A combination of a disc-type yarn tensioner is proposed, comprising a pneumatic cleaning device, which is fixedly assigned thereto. The disc-type yarn tensioner comprises an axle on which two brake plates are rotatably mounted by means of one rotary bearing each. It further comprises a pressure mechanism for applying axial pressure forces to the brake plates, which pressure forces press the brake plates against each other. The pneumatic cleaning device comprises at least one nozzle whose flow axis is directed from the outside substantially towards one of the rotary bearings. The compressed air flow exiting from the nozzle cleans the disc-type yarn tensioner. It is thus ensured that the rotary bearings of the brake plates accumulate less dirt and the rotary movement of the brake plates is braked with the intended braking force.
    Type: Application
    Filed: March 1, 2013
    Publication date: February 5, 2015
    Applicant: USTER TECHNOLOGIES AG
    Inventors: Benno Grob, Martin Kuster
  • Patent number: 8945407
    Abstract: A gas bearing seal using porous materials for distribution of gas flow can provide site isolation during wet processing. In some embodiments, a flow cell comprises a porous media gas bearing surrounding a periphery of the flow cell, isolating the liquid inside the flow cell from the ambient air outside the flow cell. In some embodiments, a protective chuck comprises a porous media gas bearing disposed in a middle of the protective chuck, isolating the liquid outside the protective chuck with the gaseous ambient generated by the porous media gas bearing.
    Type: Grant
    Filed: December 27, 2011
    Date of Patent: February 3, 2015
    Assignee: Intermolecular, Inc.
    Inventor: Aaron Francis
  • Patent number: 8932406
    Abstract: The molecular etcher carbonyl fluoride (COF2) or any of its variants, are provided for, according to the present invention, to increase the efficiency of etching and/or cleaning and/or removal of materials such as the unwanted film and/or deposits on the chamber walls and other components in a process chamber or substrate (collectively referred to herein as “materials”). The methods of the present invention involve igniting and sustaining a plasma, whether it is a remote or in-situ plasma, by stepwise addition of additives, such as but not limited to, a saturated, unsaturated or partially unsaturated perfluorocarbon compound (PFC) having the general formula (CyFz) and/or an oxide of carbon (COx) to a nitrogen trifluoride (NF3) plasma into a chemical deposition chamber (CVD) chamber, thereby generating COF2. The NF3 may be excited in a plasma inside the CVD chamber or in a remote plasma region upstream from the CVD chamber.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: January 13, 2015
    Assignee: Matheson Tri-Gas, Inc.
    Inventors: Glenn Mitchell, Ramkumar Subramanian, Carrie L. Wyse, Robert Torres, Jr.
  • Patent number: 8926763
    Abstract: Interior parts of gasoline engines are readily cleaned by a method comprising the steps of connecting an a cleaning liquid supply pipe having a gas supply port thereon airtightly to a port of an intake pipe of the engine below a throttle valve-attached position of the engine; operating the engine to draw cleaning liquid in the form of liquid drop and simultaneously drawing continuously a gas having an oxygen concentration of less than 20 vol. % into the intake pipe; and exhausting the cleaning liquid having been brought into contact with the internal parts of the engine with an exhaust gas.
    Type: Grant
    Filed: May 16, 2008
    Date of Patent: January 6, 2015
    Assignee: Chevron Japan Ltd.
    Inventors: Yasuhiro Ogasawara, Toshio Anami, Yuuki Katoh
  • Publication number: 20140360537
    Abstract: A gas wiping apparatus includes a pair of wiping nozzles which are disposed so as to face each other and interpose a coated steel sheet therebetween in a thickness direction of the coated steel sheet, and each of which ejects a wiping gas along a width direction of the coated steel sheet; a gas shield plate that is disposed at a position which separates toward an outside from each end portion of the coated steel sheet so that the gas shield plate is interposed between the pair of wiping nozzles; and a side nozzle that ejects a gas to form a gas flow along each surface of the gas shield plate in a direction reverse to a direction in which the coated steel sheet is pulled upward.
    Type: Application
    Filed: September 24, 2013
    Publication date: December 11, 2014
    Inventors: Shinichi Fukuoka, Yoshihiro Suemune, Tooru Oohashi, Yoko Amano
  • Publication number: 20140332039
    Abstract: A relatively quiet pulse valve and a method of using the pulse valve are provided. The pulse valve includes a dampening mechanism to decrease mechanical stresses, decrease operating noise, decrease compressed air waste and increase operational life expectancy of the valve. Such dampening mechanism is arranged within an internal area of the pulse valve housing.
    Type: Application
    Filed: May 13, 2013
    Publication date: November 13, 2014
    Applicant: ALSTOM Technology Ltd
    Inventor: Per-Erik Albert Appelo
  • Publication number: 20140332038
    Abstract: Pulse valves and methods of using pulse valves are provided. The pulse valves include a dampening mechanism to decrease mechanical stresses, decrease operating noise, decrease compressed air waste and increase operational life expectancy. Such dampening mechanism is arranged within an internal area of the pulse valve housing. Additionally, fluid within the internal area of the pulse valve provides cushioning effects during operation of the pulse valve.
    Type: Application
    Filed: May 13, 2013
    Publication date: November 13, 2014
    Applicant: ALSTOM Technology Ltd
    Inventor: Per-Erik Albert Appelo
  • Patent number: 8876983
    Abstract: A method for in-line cleaning of ultrasonic welding tools is described. The method includes applying cleaning solution onto a work surface of a welding tool to be cleaned using an application device. Then the method involves removing residue dissolved in the cleaning solution from the work surface using a cleaning device. Next, the work surface is neutralized and rinsed using purified water and polished with a cleaning cloth. Finally, the work surface is rinsed using cleaning alcohol and blow-dried with compressed air.
    Type: Grant
    Filed: September 1, 2011
    Date of Patent: November 4, 2014
    Assignee: Ford Global Technologies, LLC
    Inventor: Humi Widhalm
  • Patent number: 8864912
    Abstract: Internal cleaning of inverted cans includes engaging a can's cylindrical wall with a wall-conforming vacuum or adhesive gripper, causing a spraying unit to travel axially in and out of the can's opening while the can is inverted on a circular conveyor, and using a supporting arm or bottom stop to subject the can to a counterforce against a flushing force from sprayed cleaning medium. This prevents the can from being pressed out of a receptacle in which it sits during cleaning.
    Type: Grant
    Filed: May 7, 2010
    Date of Patent: October 21, 2014
    Assignee: KHS GmbH
    Inventors: Timo Jakob, Steffen Kappel, Thomas Stolte
  • Patent number: 8840730
    Abstract: A machine for cleaning a head-disk assembly (HDA) of a hard disk drive (HDD) includes a nest that seals the HDA between an upper and lower portion during cleaning. An inlet port receives a gas and an exhaust port exhausts the gas and entrained particles. A shock drive delivers mechanical shocks to the nest and the HDA while the gas is flowing through the HDA. A blower may circulate the gas from the exhaust port to the inlet port. A filter may be coupled to the inlet port. The HDA nest may be movable along an axis of the mechanical shocks delivered by the shock drive. A blow tube may deliver gas to a screw hole and a coaxial vacuum tube may rest against a surface around the screw hole to encapsulate the blow tube during cleaning and remove the gas and particles from the screw hole.
    Type: Grant
    Filed: February 5, 2013
    Date of Patent: September 23, 2014
    Assignee: Western Digital Technologies, Inc.
    Inventors: Pranee Thonghara, Lie Dhani Hastama, Pattira Mokawan
  • Patent number: 8840960
    Abstract: A method of cleaning a carbon work piece includes the step of applying an acetone cleaning agent to the carbon work piece to remove debris therefrom. The removal of debris promotes adhesion between the carbon work piece and a subsequently applied coating. For example, other steps may precede the acetone cleaning step, such as submersing the carbon work piece in deionized water. In one example, a subsequent coating process deposits an alumina coating on the carbon work piece.
    Type: Grant
    Filed: November 1, 2006
    Date of Patent: September 23, 2014
    Assignee: United Technologies Corporation
    Inventor: George H. Reynolds
  • Patent number: 8834817
    Abstract: A method for using a heat processing apparatus of a batch type includes performing a preparatory process for removing aluminum present as a metal impurity from a quartz inner surface of a process container, and performing a main heat process on product substrates held on a holder member in the process container after the preparatory process. The preparatory process includes placing a plurality of dummy substrates for allowing the metal impurity to be deposited thereon inside a process container with no product substrates placed therein; then, supplying a chlorine-containing gas and water vapor into the process container and heating the quartz inner surface of the process container at a process temperature, thereby applying a baking process onto the quartz inner surface to discharge the metal impurity from the quartz inner surface and deposit the metal impurity onto the dummy substrates; and then, unloading the dummy substrates with the metal impurity deposited thereon from the reaction container.
    Type: Grant
    Filed: February 17, 2010
    Date of Patent: September 16, 2014
    Assignee: Tokyo Electron Limited
    Inventors: Masahisa Watanabe, Katsutoshi Ishii, Tetsuya Shibata
  • Patent number: 8834640
    Abstract: The invention relates to a method and to a device for treating containers relating especially to cleaning plastic bottles (1) preferably in the inverted position. Each container is thereby subjected to a treatment medium (16) applied and/or introduced thereto. Electrically charged ions introduced into the treatment medium (16) serve to balance the charge of each container. According to the invention, the treatment medium (16) is tested for the presence of ions.
    Type: Grant
    Filed: December 15, 2009
    Date of Patent: September 16, 2014
    Assignee: KHS GmbH
    Inventors: Steffen Kappel, Thomas Ludwig
  • Publication number: 20140251389
    Abstract: A cleaning mechanism includes: an airflow control chamber for receiving exhaust air from a cooling fan; a cleaning outlet for outputting the exhaust air to be used for cleaning; a flexible pipe having one end in communication with the cleaning outlet and one free end directable by a user for cleaning; and an activation component for activating a cleaning operation in which the exhaust air is directed through the flexible pipe. The activation component may include a switching mechanism for switching the direction of airflow in the airflow control chamber between the cleaning outlet and an exit out of the computer. The cleaning mechanism may include an airflow accelerator for increasing the airflow to the cleaning outlet.
    Type: Application
    Filed: January 21, 2014
    Publication date: September 11, 2014
    Applicant: International Business Machines Corporation
    Inventors: Colin G. Dumontier, Gerald Laumay, Christine O'Sullivan, Pascal Vezolle
  • Publication number: 20140230861
    Abstract: A purge ring for providing a gas to a wafer processing chamber includes an inlet ring wall defining a ring hole space. An outer perimeter of the inlet ring wall is elliptical. An outer perimeter of the ring hole space is circular. The inlet ring wall is a continuous structure surrounding the ring hole space. An inlet baffle formed within the inlet ring wall surrounds at least 180 degrees of the outer perimeter of the ring hole space. An inlet plenum arranged in a first end of the inlet ring wall provides the gas to the ring hole space through the inlet baffle. An exhaust channel is formed within the inlet ring wall in a second end of the inlet ring wall. An exhaust outlet hole arranged in the second end of the inlet ring wall exhausts the gas out of the ring hole space via the exhaust channel.
    Type: Application
    Filed: April 24, 2014
    Publication date: August 21, 2014
    Applicant: Novellus Systems, Inc.
    Inventors: Eugene SMARGIASSI, Stephen Yu-Hong LAU, George D. KAMIAN, Ming XI
  • Publication number: 20140227442
    Abstract: Provided is a thin film deposition device including a deposition-preventing unit and a method of removing deposits thereof. The method includes: separating a deposition-preventing unit including at least one deposition-preventing plate and a deformation unit coupled to an outer surface of the at feast one deposition-preventing plate from a chamber of the thin film deposition device; and removing a film formation layer from the deposition-preventing plate.
    Type: Application
    Filed: June 21, 2013
    Publication date: August 14, 2014
    Applicant: SAMSUNG DISPLAY CO., LTD.
    Inventors: Myung-Soo Huh, Sun-Ho Kim, Cheol-Rae Jo, Hyun-Woo Joo
  • Publication number: 20140224283
    Abstract: Disclosed are various embodiments for purging various hearing aid devices. An enclosure may be used to encapsulate and/or affix a hearing aid device to the enclosure. Content from a purging source may be flushed throughout the enclosure to rid the enclosure and/or the hearing aid device of any debris. Similarly, modifications of hearing aid devices may facilitate the purging of various hearing aid devices by flushing content through the hearing aid device via one or more portals.
    Type: Application
    Filed: February 8, 2013
    Publication date: August 14, 2014
    Applicant: Clearaid, Inc.
    Inventor: Mansfield Smith
  • Patent number: 8795436
    Abstract: A cleaning liquid is pressurized and superheated to a condition, in which temperature of the cleaning liquid is above an atmospheric boiling point. A product to be cleaned is interposed between a pair of liquid holding blocks, so that gaps are respectively formed between side surfaces of the product and the liquid holding blocks. The pressurized and superheated liquid is injected to the product so that layers of condensate of vapor of injected cleaning liquid are formed in the gaps. Contamination on the surface of the product is removed by the cleaning liquid and the surface is dried by latent heat of the condensate of the vapor of the cleaning liquid.
    Type: Grant
    Filed: July 18, 2011
    Date of Patent: August 5, 2014
    Assignee: Denso Corporation
    Inventor: Keita Yanagawa
  • Publication number: 20140202848
    Abstract: A method for using a vacuum apparatus that includes a vacuum chamber and a pump, the vacuum chamber housing an object, the pump reducing an internal pressure of the vacuum chamber, the method including: ventilating inside the vacuum chamber by introducing a gas into the vacuum chamber and discharging the gas from the vacuum chamber by causing the pump to reduce the internal pressure of the vacuum chamber. In the ventilating, a discharge rate at which molecules of the gas per unit volume are discharged is at least 3.3×10?5 mol/(s·L), and the temperature in the vacuum chamber is at least 15° C. and at most 80° C.
    Type: Application
    Filed: June 6, 2013
    Publication date: July 24, 2014
    Applicant: PANASONIC CORPORATION
    Inventor: Yuko Kawanami
  • Publication number: 20140202346
    Abstract: A baler for baling a fibrous material includes a cleaning system for removing debris from the baler in a plurality of locations, the cleaning system including an air blower and a conduit system including an inlet and a plurality of outlets for delivering air from the blower to the plurality of locations. An air flow control mechanism is provided for controlling delivery of air from the inlet to the plurality of outlets, the air flow control mechanism being configured to deliver the air alternately to one or more of the outlets.
    Type: Application
    Filed: September 28, 2012
    Publication date: July 24, 2014
    Applicant: Kuhn-Geldrop BV
    Inventor: Leonardus Johannes Van Den Wildenberg
  • Patent number: 8764905
    Abstract: A method and system for cleaning lithography components including contacting a substrate having residue including organic compounds and graphitic carbon deposited on a surface thereof with hydrogen peroxide vapor. The hydrogen peroxide vapor is irradiated with electromagnetic radiation having a wavelength in the range of 100 nm to 350 nm forming hydroxyl radicals. The hydroxyl radicals react with the residue to remove the residue from the surface of the substrate.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: July 1, 2014
    Assignee: Intel Corporation
    Inventors: Paul A. Zimmerman, Christof G. Krautschik
  • Patent number: 8758523
    Abstract: A method of cleaning a photolithographic mask or semiconductor wafer involves mixing a gas and water in a jetspray nozzle and discharging the gas and water jetspray stream from a nozzle onto the photolithographic mask or wafer. The water jetspray stream is made up of a cluster of micro water droplets entrained in the gas having a predetermined size sufficient to dislodge contaminant particles adhered to the surface of the mask. The step of mixing the gas and water includes radially injecting the gas from a first plurality of circumferentially spaced apart gas nozzles into a stream of the water and radially injecting the gas from a second plurality of circumferentially spaced apart gas nozzles into the stream of the water, wherein the second plurality of gas nozzles are spaced above or below the first plurality of gas nozzles and radially offset from the first plurality of gas nozzles.
    Type: Grant
    Filed: October 4, 2011
    Date of Patent: June 24, 2014
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kun-Long Hsieh, Chien-Hsing Lu
  • Publication number: 20140166048
    Abstract: The invention pertains to a method for removing ice layers and/or snow layers and/or dirt layers from the rotor blades of axial fans in cooling installations for refrigerating and/or freezing products. At least one cleaning substance jet is directed toward the rotor blades of an axial fan within certain time intervals in such a way that ice layers and/or snow layers and/or dirt layers are at least separated from the surfaces of the rotor blades and transported away, wherein the rotor blades rotate with nominal speed while cleaning jets act upon their surfaces.
    Type: Application
    Filed: February 19, 2014
    Publication date: June 19, 2014
    Inventor: Rudolf Erwin BERGHOFF
  • Patent number: 8734589
    Abstract: A heat exchanger may be cleaned by introducing compressed nitrogen and a flushing composition through an injection device.
    Type: Grant
    Filed: August 23, 2012
    Date of Patent: May 27, 2014
    Assignee: The Rectorseal Corporation
    Inventors: Eva Ackerman, Yanwei Cen, William Francis Flynn, Richard Garza
  • Publication number: 20140138353
    Abstract: A process is described to perform lift-off of a metal layer. A spray is applied to a patterned surface coated with the metal layer. An incidence angle and pressure of the spray are sufficient to separate the metal layer from a substance coated with the metal without separating the substance from an underlying substrate.
    Type: Application
    Filed: November 21, 2012
    Publication date: May 22, 2014
    Applicant: DYNALOY, LLC
    Inventors: Richard Dalton Peters, Keith Allen Cox
  • Patent number: 8728247
    Abstract: There is provided a substrate processing method capable of preventing pattern collapse when a rinse solution is removed from a substrate on which a microscopic resist pattern is formed and also capable of reducing cost for processing the substrate by decreasing an amount of usage of a hydrophobicizing agent. The substrate processing method includes a rinse solution supply process (step S12) for supplying the rinse solution onto the substrate on which the resist pattern is formed; and a rinse solution removing process (steps S14 to S16) for removing the rinse solution from the substrate in an atmosphere including vapor of a first processing solution that hydrophobicizes the resist pattern.
    Type: Grant
    Filed: December 21, 2010
    Date of Patent: May 20, 2014
    Assignee: Tokyo Electron Limited
    Inventor: Yuichiro Inatomi
  • Publication number: 20140109940
    Abstract: The present invention generally provides a processing chamber having shadow frame supports that direct cleaning gas flow to the corners of the chamber. The shadow frame supports are disposed along part of the chamber walls, thus leaving the corners unoccupied. During cleaning, the shadow frame is disposed in a way that it rests on both the substrate support and the shadow frame supports. Therefore, the cleaning gas flowing along the chamber walls is blocked by the shadow frame supports and the cleaning gas is forced to the corners since the shadow frame supports do not extend to the corners.
    Type: Application
    Filed: September 26, 2013
    Publication date: April 24, 2014
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Kengo OHASHI, Takao HASHIMOTO, Shinobu ABE
  • Publication number: 20140090670
    Abstract: A cleaning apparatus is provided that includes a first nozzle configured to direct a cleaning jet towards a contaminated surface at a pressure sufficient to remove contaminants from the surface. At least one second nozzle is configured to direct a rinsing jet towards the contaminated surface to remove cleaning fluid therefrom, wherein the rinsing jet is directed at a pressure sufficient to isolate the cleaning jet from an ambient environment.
    Type: Application
    Filed: October 3, 2012
    Publication date: April 3, 2014
    Applicant: THE BOEING COMPANY
    Inventor: THE BOEING COMPANY
  • Patent number: 8685175
    Abstract: An apparatus and process for isomerizing a hydrocarbon stream rich in a C4 hydrocarbon and/or at least one of a C5 and C6 hydrocarbon which includes a first drier and a second drier; and a reaction zone communicating with at least the first drier. The first drier operates at a first condition to dry the reactant and the second drier operates at a second condition during regeneration. The used regenerant remaining in the second drier after regeneration can (1) pass through a vent-to-flare assembly in a batch-wise manner; (2) pass through a downflow-depressure-to-low-pressure-device assembly in a batch-wise manner; (3) pass through a cross-over piping purge assembly to minimize upsets in the reaction and fractionation zones when the second drier is placed back in operation; or any combination of (1) (2) and/or (3) to minimize upsets in the reaction and fractionation zones when the second drier is placed back in operation.
    Type: Grant
    Filed: November 17, 2009
    Date of Patent: April 1, 2014
    Assignee: UOP LLC
    Inventors: Bryan S. Garney, Jocelyn C. Daguio, Kurt A. Detrick, David J. Shecterle, John M. Krupczak, Andrew D. Mezera, Douglas A. Becci
  • Patent number: 8685174
    Abstract: The present invention is in the field of household cleaning tools. The invention further relates to the use of an air-water jet for the cleaning of hardsurfaces. It is an object of the present invention to provide easier cleaning of hard surfaces. It is therefore an object of the present invention to provide a process of easier cleaning of hard surfaces, especially by means of a device that uses a relatively low water flow rate. Surprisingly it has been found that an external mix air-water jet device may be used for cleaning hard surfaces.
    Type: Grant
    Filed: August 9, 2010
    Date of Patent: April 1, 2014
    Assignee: Conopco, Inc.
    Inventors: Richa Sureshchand Goyal, Kirtan Shravan Kamkar, Amit Sah, Rudra Saurabh Shresth, Narayanan Subrahmaniam, Stephen John Singleton
  • Publication number: 20140083467
    Abstract: Steam cleaning spray nozzle systems and methods of use are described herein. The spray nozzle includes a substantially rigid conduit a support member in fluid communication with a steam source. A portion of the conduit is angled. During use, sufficient eccentric force is produced by the steam to rotate the support member such that steam is ejected from the substantially rigid conduit at an oblique angle relative to the center to of the substantially rigid conduit.
    Type: Application
    Filed: June 20, 2013
    Publication date: March 27, 2014
    Applicant: Dehn's Innovations, LLC
    Inventor: Dennis Dehn
  • Patent number: 8673087
    Abstract: A method for treating a semiconductor device includes dissolving an inert gas species in a wet chemical cleaning solution and treating a material layer of a semiconductor device with the wet chemical cleaning solution in ambient atmosphere. The inert gas species is oversaturated in the wet chemical cleaning solution in the ambient atmosphere.
    Type: Grant
    Filed: May 21, 2008
    Date of Patent: March 18, 2014
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Frank Feustel, Tobias Letz, Christin Bartsch, Andreas Ott
  • Patent number: 8657961
    Abstract: Embodiments of the invention generally provide methods for cleaning a UV processing chamber. In one embodiment, the method includes flowing an oxygen-containing gas through a plurality of passages formed in a UV transparent gas distribution showerhead and into a processing region located between the UV transparent gas distribution showerhead and a substrate support disposed within the thermal processing chamber, exposing the oxygen-containing gas to UV radiation under a pressure scheme comprising a low pressure stage and a high pressure stage to generate reactive oxygen radicals, and removing unwanted residues or deposition build-up from exposed surfaces of chamber components presented in the thermal processing chamber using the reactive oxygen radicals.
    Type: Grant
    Filed: April 4, 2013
    Date of Patent: February 25, 2014
    Assignee: Applied Materials, Inc.
    Inventors: Bo Xie, Alexandros T. Demos, Scott A. Hendrickson, Sanjeev Baluja, Juan Carlos Rocha-Alvarez
  • Publication number: 20140041692
    Abstract: An apparatus for cleaning a surface, such as the surface of a rotating disk, the apparatus comprising an articulating arm associated via a linkage to a rotating member driven by a motor. Rotation of the rotating member causes linkage to move the articulating arm in an oscillating pattern. A nozzle associated with the distal end of the articulating arm can convey pressurized air or liquid from a source to a surface in an oscillating pattern based on the construction of the arm, linkage, the rotating member and the speed of rotation.
    Type: Application
    Filed: August 7, 2012
    Publication date: February 13, 2014
    Applicant: AQUARECYCLE, LLC
    Inventor: Harold Randolph Anderson
  • Patent number: 8647446
    Abstract: A method and system for cleaning a substrate in a multi-module cleaning assembly is provided. The method begins by receiving the substrate into the cleaning module. A cleaning chemistry, at a temperature elevated from an ambient temperature, is applied onto a top surface of the substrate. Concurrent with application of the cleaning chemistry, vapors are exhausted from the cleaning chemistry through a port located below a bottom surface of the substrate with the vapor exhaustion providing a negative pressure relative to a pressure external to the cleaning module. The application of the cleaning chemistry is terminated, followed by termination of the exhausting of the vapors. The substrate is dried after the flowing of inert gas is terminated.
    Type: Grant
    Filed: December 7, 2011
    Date of Patent: February 11, 2014
    Assignee: Intermolecular, Inc.
    Inventors: Satbir Kahlon, Frank Ma