Abstract: The photovoltaic module includes at least one cell string, including multiple solar cell sheets, and adjacent solar cell sheets in the multiple solar cell sheets are connected to each other by multiple welding strips. In some embodiments, the photovoltaic module further includes multiple welding strips, where each of the multiple welding strips is in electrical contact with a corresponding bus bar, each of the multiple welding strips includes multiple bending portions arranged continuously along a second direction. In addition, along the second direction, an orthographic projection of a central line of each of the multiple welding strips on a back surface of the solar cell sheet coincides with an orthographic projection of a central line of the corresponding bus bar and/or an orthographic projection of a central line of each of the multiple bonding pads on the corresponding bus bar on the back surface of the solar cell sheet.

Abstract: Provided are a solar cell, a method for manufacturing a solar cell, and a photovoltaic module. A plurality of first pad groups and at least one second pad group are arranged along a first direction on a back surface of the solar cell. The second pad group is distributed in a region of the solar cell adjacent to a cut edge or a non-cut edge of the solar cell. The first pad groups are distributed in a region of the solar cell away from the cut edge or the non-cut edge. Along the first direction, a distance between a pad in the second pad group and a pad in the first pad group adjacent to the pad in the second pad group is greater than a distance between adjacent pads in adjacent first pad groups.

Abstract: Pharmaceutical compositions comprising a vehicle, a solubilizer, and a surfactant are disclosed to be used in conjunction with non-chemotherapeutic active pharmaceutical ingredients which are soluble in water but subject to hydrolysis to some extent. Such non-chemotherapeutic active pharmaceutical ingredients may include amitriptyline, a derivative thereof, or a combination thereof. The pharmaceutical compositions may be administered as an oral solution. Other embodiments are directed towards methods of using and methods of making such formulations.

Abstract: The present invention relates to a photovoltaic power generation system comprising: a plurality of PV modules; and a plurality of power generation efficiency optimization units, which are installed to correspond to the respective plurality of PV modules one-to-one, and include inverters to convert power produced from the plurality of PV modules into AC power, and thus supply the same to a power grid through an AC line.

Abstract: Systems and methods relating to the integration of energy storage subsystems into components for use with systems that harvest energy from PV panels and convert that energy for use with a power grid. Various configurations of converters that integrate energy storage cells and the inverters that use such converters are presented. Half-bridge and full bridge configurations for the converters are presented. The integrated energy storage cells may be battery cells, supercapacitor cells, or a combination of the two. Digital control systems for controlling the converters as well as the charge and discharge cycles for the energy storage cells are also presented.

Abstract: A photovoltaic detection assembly includes a magnetic component and a detection component. The magnetic component includes a magnetic ring and a coil winding around the magnetic ring. The magnetic ring is sleeved on the cable and comprises an opening. Two end surfaces of the magnetic ring are disposed on two sides of the opening. The two end surfaces of the magnetic ring are arranged in parallel. The detection component comprises a Hall element, a detection module, a control module, a signal module, and a power module. The Hall element is disposed at the opening. The detection module is electrically connected to the Hall element. The control module is electrically connected to the detection module, the signal module, and the power module respectively. The power module is electrically connected to the coil.

Abstract: A reconfigurable power processing unit for a spacecraft including a plurality of power modules. Each of the power modules includes a first power source and a second power source. The first power source and the second power source are configured to be in series in a first state and in parallel in a second state. A plurality of contactors connect each power module to at least one of another power module in the plurality of power modules and a power processing output and are configured to control the state of the power modules.

Abstract: Each of at least three solar cell strings has a first end and a second end in a first direction each including a connector. At the first end and the second end, a wire member is provided to which the connector of the first end of each of at least two solar cell strings out of the at least three solar cell strings and the connector of the second end thereof are connected. A first sheet member is provided to allow the wire member at the first end to be located in a specific positional relationship with the wire member at the second end, and a second sheet member is provided to allow the wire member at the second end to be located in a specific positional relationship with the wire member at the first end.

Abstract: Apparatus, systems, and methods for designing photovoltaic panels are described herein. The photovoltaic panels are composed substrings of photovoltaic cells. The substrings of photovoltaic cells may be oriented in a horizontal fashion with respect to a layout of the photovoltaic panels. In the event of snow coverage, partial shading, mutual shading, and so forth, orienting the substrings of the photovoltaic cells in this manner enables those substrings which are disposed higher up in the photovoltaic panel to resume operation even while those substrings which are disposed lower down in the photovoltaic panel remain covered, shaded or otherwise blocked or impeded from functioning. Accordingly, the overall productivity of a photovoltaic panel designed as described herein is increased. Related apparatus, systems, and methods are also described.

Abstract: A solar cell module includes an upper substrate, a lower substrate opposite the upper substrate, a solar cell panel positioned between the upper substrate and the lower substrate, the solar cell panel including a plurality of solar cells which are arranged in a matrix form and are connected to one another through a wiring member, a passivation layer configured to package the solar cell panel, a frame configured to surround an outer perimeter of the solar cell panel, a connection terminal configured to connect two adjacent strings in the solar cell panel, and a cover member configured to cover the connection terminal.

Abstract: A half-cell assembly includes an integrated junction box and multiple cell string sets connected in series sequentially. Each cell string set includes multiple cell strings connected in parallel, and each cell string includes multiple half-cells connected in series sequentially. The multiple cell string sets are arranged along a first preset direction. In each cell string set, the multiple cell strings are arranged along the first preset direction. In each cell string, the multiple half-cells are arranged along a second preset direction. One of the first preset direction and the second preset direction is the long side direction of the half-cell, and the other is the short side direction of the half-cell. The integrated junction box and the multiple cell string sets are arranged along the second preset direction. The multiple cell string sets are connected in parallel with diodes of the integrated junction box.

Abstract: According to a solar cell panel according to the present embodiment, a connection structure of a wiring unit for connecting a plurality of solar cells comprising first and second solar electrically connected to each other is improved. More particularly, the wiring unit comprises a first extension wiring and a second extension wiring, which correspond to each of the plurality of solar cells, the first extension wiring having a first outer portion extending outwards beyond a first side of a solar cell and a second extension wiring having a second outer portion extending outwards beyond a second side of the solar cell, the second side being opposite to the first side of the solar cell. A second extension wiring of the first solar cell and a first extension wiring of the second solar cell overlap each other to have a connection portion where they are connected to each other, and the connection portion includes an overlapping portion formed by the connection portion overlapping a portion of the first solar cell.

Abstract: A solar cell is provided, including a substrate having a first surface and a second surface opposite to each other, an emitter formed on the first surface of the substrate and including a textured structure on a side away from the first surface, a passivation structure formed on the textured structure, first electrodes penetrating the passivation structure and in electrical contact with the textured structure of the emitter, and conductive eutectic layers each formed between a respective first electrode and the emitter and including first conductive particles and second conductive particles. Each of the first conductive particles has a shape different from a shape of any of the second conductive particles. The first conductive particles and the second conductive particles have a first number, the first conductive particles have a second number, and a ratio of the second number to the first number in a range of 20% to 80%.

Abstract: A solar cell can include a first plurality of metal contact fingers, and a second plurality of metal contact fingers interdigitated with the first plurality of metal contact fingers, wherein at least one of the first plurality of metal contact fingers comprises a wrap-around metal finger that passes between a first edge of the solar cell and at least one contact pads. A photovoltaic (PV) string including a solar cell with a wrap-around metal contact finger. A method of coupling an electrically conductive connector to a solar cell with a wrap-around metal contact finger.

Abstract: A back contact solar cell assembly includes at least one cell string including multiple back contact solar cells and multiple electrically conducting lines. Each first electrodes includes first main grid lines and first fine grid lines. Each second electrodes includes second main grid lines and second fine grid lines. Each electrically conducting lines includes a first part conductively connecting the first main grid line of a first back contact solar cell, and a second part conductively connecting the second main grid lines of a neighboring second back contact solar cell. The first part is provided with at least one deformation cushioning component. At the shadow face of the first back contact solar cell, in the direction where the second fine grid lines are provided, the minimum distance between the projection of the deformation cushioning component and the second fine grid lines is greater than or equal to 0.3 mm.

Abstract: A system comprises a battery, a load and a power converter for converting battery power from the battery into load power for application to the load. A system controller enables selection between a continuous discharge mode and a discontinuous discharge mode of the battery. In this way, the battery can be operated in different ways according to the most appropriate battery discharge characteristics.

Abstract: Hybrid solar cell plates with integrated bypass diodes and modules thereof are described. In an embodiment, a hybrid solar cell plate includes a step surface including a floor and a step edge extending from the floor and across a thickness of a top subcell. A bypass diode is over the floor and laterally adjacent to the step edge.

Abstract: A solar power generation system includes a string, an inverter a first shut-off device, and a second shut-off device. The string includes a plurality of solar cell module groups connected in series with each other. The first shut-off device connected to a first electric path connecting between the plurality of solar cell module groups. The second shut-off device connected to a second electric path connecting between the plurality of solar cell module groups. The first shut-off device cuts off a connection between the plurality of solar cell module groups connected to the first electric path in response to a first control signal from the inverter. The second shut-off device cuts off a connection between the solar cell module groups connected to the second electric path in response to a second control signal output from the first shut-off device by a communication system different from power line communication.

Abstract: A photovoltaic module includes a first sealing member, a pad strip, a solar cell string, and a second sealing member. A cross-linking rate of a material of the second sealing member is higher than that of a material of the first sealing member. The first sealing member, the solar cell string, and the second sealing member are sequentially arranged along a thickness direction of the photovoltaic module. The pad strip is located around the solar cell string and located between the first sealing member and the second sealing member. The pad strip is made of a same material as the first sealing member. A thickness of the first sealing member, a thickness of the second sealing member, and a thickness of the pad strip all gradually decrease along a length direction of the photovoltaic module towards an edge of the photovoltaic module.

Abstract: The laminated A tandem solar cell includes a bottom cell and a top cell located on the bottom cell, wherein the bottom cell includes a first doping portion and a second doping portion, the first doping portion and the second doping portion form at least one PN junction, majority carriers in the first doping portion are a first type of carrier, and majority carriers in the second doping portion are a second type of carrier; the bottom cell is provided with a first electrode hole and a second electrode hole which penetrate the bottom cell, a first electrode is formed in the first electrode hole, and a second electrode is formed in the second electrode hole; the first electrode is in contact with the first doping portion; and the second electrode is in contact with the second doping portion.

Abstract: Strings of solar cells having laser assisted metallization conductive contact structures, and their methods of manufacture, are described. For example, a solar cell string includes a first solar cell having a front side and a back side, and one or more laser assisted metallization conductive contact structures electrically connecting a first metal foil to the back side of the first solar cell. The solar cell string also includes a second solar cell having a front side and a back side, and one or more laser assisted metallization conductive contact structures electrically connecting a second metal foil to the back side of the second solar cell. The solar cell string also includes a conductive interconnect coupling the first and second solar cells, the conductive interconnect including a strain relief feature.

Abstract: A solar power generation system includes a string, an inverter, and a plurality of shut-off devices. The string includes a plurality of solar cell module groups. The plurality of shut-off devices is configured to cut off a connection between the plurality of solar cell module groups in response to a control signal from the inverter. The plurality of solar cell module groups includes a first group, a second group connected to the first group, and a third group connected to the second group. The plurality of shut-off devices includes a first shut-off device. The first shut-off device includes a first switching unit connected to an anode-side terminal of the second group. The first switching unit includes a first open-close unit and a first semiconductor switching device connected in parallel with the first open-close unit. The first semiconductor switching device is turned ON before the first open-close unit is operated.

Abstract: A system and method for combining power from DC power sources. Each power source is coupled to a converter. Each converter converts input power to output power by monitoring and maintaining the input power at a maximum power point. Substantially all input power is converted to the output power, and the controlling is performed by allowing output voltage of the converter to vary. The converters are coupled in series. An inverter is connected in parallel with the series connection of the converters and inverts a DC input to the inverter from the converters into an AC output. The inverter maintains the voltage at the inverter input at a desirable voltage by varying the amount of the series current drawn from the converters. The series current and the output power of the converters, determine the output voltage at each converter.

Abstract: A photovoltaic assembly includes a cell unit layer, a backplate and a reflective layer. The backplate is provided on a back side of the cell unit layer, and one side of the backplate away from the cell unit layer is provided with at least one junction box. The reflective layer is disposed between the cell unit layer and the backplate. The reflective layer includes a plurality of reflective longitudinal strips. Each of the plurality of reflective longitudinal strips covers edges of cell chips within at least one cell string. At least one of the plurality of reflective longitudinal strips is broken at a location adjacent to a cell chip covered by the junction box so as to form at least one opening.

Abstract: A solar cell for a solar cell array with one or more grid on a surface thereof, wherein electrical connections are made to the grids in a plurality of locations positioned around the solar cell; and the electrical connections extend to one or more conductors located under the solar cell. The conductors located under the solar cell are buried within a substrate, and each of the conductors comprises a low resistance conducting path that distributes current from the solar cell. The conductors are loops, U-shaped, or have only up or down pathways. The solar cell comprises a full cell that has four cropped corners and the locations are in the cropped corners.

Abstract: A solar power generation system includes a string, an inverter, and a plurality of shut-off devices. The string includes a plurality of solar cell module groups. The plurality of shut-off devices is configured to cut off the connection between the plurality of solar cell module groups in response to a control signal from the inverter. The plurality of solar cell module groups includes a first group, a second group connected to the first group, and a third group connected to the second group. The plurality of shut-off devices includes a first shut-off device. The first shut-off device includes a first open-close unit connected to an anode-side terminal of the second group and a second open-close unit connected to a cathode-side terminal of the second group.

Abstract: An epitaxial wafer, a method of manufacturing the epitaxial wafer, a diode, and a current rectifier are provided. The epitaxial wafer comprises a Si substrate layer; an insulating layer formed on the Si substrate layer; and a nitride semiconductor layer formed on a surface of the insulating layer facing away from the Si substrate layer; wherein the insulating layer has a thickness configured such that under a forward bias voltage, the insulating layer may allow electrons and holes to pass from one side to the other side of the insulating layer via quantum tunneling so as to allow a forward current flow.

Abstract: A method for soldering a solar cell, includes: placing a plurality of back contact cells on a soldering platform, where back surfaces of the back contact cells face away from the soldering platform, and electrodes corresponding to two adjacent back contact cells have opposite polarities in a connection direction of a plurality of to-be-connected ribbons; placing the plurality of to-be-connected ribbons on the electrodes of the plurality of back contact cells by using a first clamping portion, a second clamping portion, and a plurality of third clamping portions, where the first clamping portion, the second clamping portion, and the plurality of third clamping portions respectively correspond to head ends, tail ends, and middle portions of the plurality of ribbons; and heating the plurality of ribbons by using a heater to connect the plurality of ribbons to the plurality of back contact cells.

Abstract: Embodiments of the disclosure provide a method for manufacturing a photovoltaic module and a photovoltaic module. The method includes the following: providing a plurality of cells; selecting at least one cell from the plurality of cells, and for each respective cell of the at least one cell, forming a corresponding solder layer on each respective solder pad of at least one solder pad of the respective cell; and performing a soldering treatment on the respective connecting member and the at least one solder pad and/or the at least one solder layer to connect the respective pair of adjacent cells, wherein the soldering treatment has a heating temperature in a range of 200° C. to 300° C.

Abstract: A solar module system includes a frame, a microinverter, and an adapter assembly for connecting the microinverter to the frame. The frame includes a body, a mounting flange extending from a bottom of the body at an edge, and a cable management flange extending from an interior surface of the body. The cable management flange and the mounting flange define a cable cavity therebetween for retaining at least one cable. The adapter assembly includes an adapter including a microinverter attachment projection coupled to the microinverter, a frame attachment extension, and a side wall extending therebetween.

Abstract: A power conversion system according to the present disclosure includes a first circuit, a second circuit, and a third circuit. The first circuit has a first external terminal thereof electrically connected to either an AC power supply or an AC load. In the power conversion system, a first internal terminal, a second internal terminal, and a third internal terminal are electrically connected to the same connection unit. The second circuit controls a current or power being input to, or output from, the second circuit itself such that the current or the power is synchronized with power ripples caused by the AC power supply or the AC load. Either the AC power supply or the AC load is electrically connected to the first circuit.

Abstract: A solar cell and a photovoltaic module. The solar cell includes: a substrate including a first surface; a tunneling oxide layer covering the first surface; a doped conductive layer covering a surface of the tunneling oxide layer away from the substrate; an intrinsic polycrystalline silicon layer formed on one side of the doped conductive layer away from the tunneling oxide layer; and a plurality of first electrodes arranged on one side of the intrinsic polycrystalline silicon layer away from the doped conductive layer and electrically connected to the doped conductive layer. At least a portion of the first electrode is located in the intrinsic polycrystalline silicon layer, and a gap is defined between a top end of the first electrode and the substrate.

Abstract: A system includes a plurality of photovoltaic modules installed on and arranged in an array on a roof deck. Each of the photovoltaic modules includes first and second ends, and a baseplate located at the first end. The baseplate of one of the photovoltaic modules is substantially aligned with the baseplate of an adjacent another one of the photovoltaic modules. The baseplate is configured to receive at least one electrical component. The substantially aligned baseplates include a longitudinal axis. The system includes at least one wire cover removably attached to at least one of the baseplates. The at least one wire cover is moveable in at least a first direction transverse relative to the longitudinal axis.

Abstract: A method for fixed connection of a solar cell string includes: stacking a back film, a first solder ribbon, a solar cell, a second solder ribbon and a front film to form a solar cell unit; placing a first press and a second press on the front film such that the first press and second press press the front film and back film, and move together with the solar cell unit; and performing a melting-solidification operation while keeping the first press and second press pressing against the front film. A press assembly and a device are also provided to perform the method.

Abstract: A solar-powered vehicle that includes a body having a front end, rear end, top and opposing sides; two or more wheels; and a first and second solar panel assembly respectively disposed on the opposing sides of the body.

Abstract: A rail for a photovoltaic module arrangement, the rail including a body having at least a top portion, a middle portion, and a bottom portion, the top portion including at least one upper edge in which at least one end of the upper edge defines an angle configured to receive a photovoltaic module on the body, the middle portion including at least one side edge, and the bottom portion including at least a bottom edge.

Abstract: The present disclosure relates to the technical field of solar street lamps, in particular to, an integrated solar street lamp. The present disclosure provides an integrated solar street lamp, including an integrated light emitting panel and a transparent cover body; the integrated light emitting panel is hermetically arranged in the transparent cover body; the integrated light emitting panel includes a first conducting plate including two separated plate bodies, a second conducting plate including two separated plate bodies, and a plurality of monocrystal silicon thin slabs coplanar with the first conducting plate; the plurality of monocrystal silicon thin slabs are connected in series through conductors; and two ends of the conductors are electrically connected to the two plate bodies of the first conducting plate respectively.

Abstract: Provided is a device and method of cleaning a solar panel of a solar boat using, as cleaning water, water externally introduced and compressed during operation of the solar boat. The device includes a water inlet port disposed on the front side of the solar boat, a filtration unit removing impurities from water introduced through the water inlet port during operation of the solar boat, a compression unit compressing impurities-removed water, and a spray nozzle spraying the compressed water to the solar panel.

Abstract: A solar cell string production equipment includes first and second conveying devices, first and second carrying devices, and a transfer device. The first conveying device has a first continuous conveyor belt, the second conveying device has a second continuous conveyor belt, and the first and second continuous conveyor belts can turn and convey in the vertical direction. Back and front films are laid on the first conveying device. The first conveying device can transport the back film on the first continuous conveyor belt to the second continuous conveyor belt. The transfer device can transport the pressing tool from the terminal of the second continuous conveyor belt to the front film on the first continuous conveyor belt. The second carrying device can transport the pressing tool and front film stacked together to the second continuous conveyor belt. A solar cell string production method is further provided.

Abstract: A solar power generation system includes a string, an inverter a first shut-off device, and a second shut-off device. The string includes a plurality of solar cell module groups connected in series with each other. The first shut-off device cuts off a connection between the plurality of solar cell module groups connected to a first electric path connecting between the plurality of solar cell module groups in response to a first control signal from the inverter. The second shut-off device is connected to the first shut-off device in a two-way communicable manner by a communication system different from power line communication and cuts off a connection between the solar cell module groups connected to a second electric path connecting between the plurality of solar cell module groups in response to a second control signal output from the first shut-off device by a communication system different from power line communication.

Abstract: A solar power generation system includes a string, an inverter a first shut-off device, and a second shut-off device. The string includes a plurality of solar cell module groups connected in series. The first shut-off device is connected to a first electric path connecting between the plurality of solar cell module groups. The second shut-off device is connected to a second electric path connecting between the plurality of solar cell module groups. The first shut-off device cuts off a connection between the plurality of solar cell module groups connected to the first electric path in response to a first control signal from the inverter. The second shut-off device is driven by an electrical power supplied from the first shut-off device and cuts off a connection between the solar cell module groups connected to the second electric path in response to a second control signal from the first shut-off device.

Abstract: A solar power generation system includes a string, an inverter a first shut-off device, and a second shut-off device. The string includes a plurality of solar cell module groups connected in series with each other. Each of the solar cell module groups includes one or a plurality of solar cell modules connected in series. The first shut-off device cuts off a connection between the plurality of solar cell module groups connected to a first electric path in response to a first control signal from the inverter. The second shut-off device is connected to the first shut-off device in a two-way communicable manner, is driven by an electrical power supplied from the first shut-off device, and cuts off a connection between the plurality of solar cell module groups connected to a second electric path in response to a second control signal from the first shut-off device.

Abstract: A solar cell and a photovoltaic module, including a substrate and a first electrode. The first electrode is arranged on a surface of the substrate and electrically connected to the substrate. Along a thickness direction of the substrate, the first electrode is provided with a first conductive layer, a second conductive layer, and a first transport layer. The first transport layer is located between the first conductive layer and the second conductive layer, and the first transport layer is made of a semiconductor material and configured to electrically connect the first conductive layer with the second conductive layer.

Abstract: Provided is a photovoltaic module, including a first intermediate busbar having a first lead-out terminal provided at an end thereof; a second intermediate busbar having a second lead-out terminal provided at an end thereof; and a first jumper wire arranged on a first isolation bar; the first lead-out terminal and the second lead-out terminal are located on two opposite sides of the first jumper wire, and the first lead-out terminal and the second lead-out terminal abut against two opposite side surfaces of the first isolation bar or overlap a top surface of the first isolation bar. Compared with the related art, the first isolation bar where the first jumper wire is located is clamped or pressed by the first lead-out terminal and the second lead-out terminal, to prevent short circuit or shielding of the cell caused by free movement of the first jumper wire, the first and second intermediate busbars.

Abstract: Improved photovoltaic (PV) assemblies for converting solar radiation to electrical energy and methods of installation thereof are disclosed herein. PV arrays comprising a plurality PV modules are also described herein. A PV assembly can comprise at least one PV module having a front side and a back side opposite the front side. A PV module can comprise a plurality of solar cells encapsulated within a PV laminate. In some embodiments, a PV module includes a frame at least partially surrounding the PV laminate. In such embodiments, frame can comprise an outer surface feature. The PV assembly can further comprise at least one spacing device positioned between adjacent PV modules. A spacing device can comprise a spacer body having a predetermined width for defining a predetermined distance or gap between adjacent PV modules.

Abstract: A high efficiency configuration for a solar cell module comprises solar cells conductively bonded to each other in a shingled manner to form super cells, which may be arranged to efficiently use the area of the solar module, reduce series resistance, and increase module efficiency.

Abstract: A solar cell can include a conductive foil having a first portion with a first yield strength coupled to a semiconductor region of the solar cell. The solar cell can be interconnected with another solar cell via an interconnect structure that includes a second portion of the conductive foil, with the interconnect structure having a second yield strength greater than the first yield strength.

Abstract: A high efficiency configuration for a solar cell module comprises solar cells arranged in an overlapping shingled manner and methods for assembling solar cells in a shingled manner. Solar cells in the module are electrically connected in series by front side ribbons and separate rear side ribbons. The front-side ribbons have a smaller cross-sectional width while the rear-side ribbons are thinner and wider.

Abstract: A solar cell module includes first and second solar cells each including a plurality of first and second electrodes formed on a back surface of a semiconductor substrate, a first conductive line connected to the first electrodes, and a second conductive line connected to the second electrodes, and an interconnector connecting the first conductive line of the first solar cell to the second conductive line of the second solar cell. At least one of an area of an overlap portion, an area of a connection portion, a connection position, and a connection shape between the interconnector and the first conductive line of the first solar cell is different from at least one of an area of an overlap portion, an area of a connection portion, a connection position, and a connection shape between the interconnector and the second conductive line of the second solar cell.

Abstract: There is provided a transparent semiconductor substrate and a method for manufacturing same includes a semiconductor substrate including a first surface and a second surface opposite to the first surface; and a through-hole penetrating the semiconductor substrate, wherein the through-hole includes an inclined portion inclined with respect to the first surface and second surface.