Abstract: A single junction sorter for a microfluidic particle sorter, the single-junction sorter comprising: an input channel, configured to receive a fluid containing particles; an output sort channel and an output waste channel, each connected to the input channel for receiving the fluid therefrom; a bubble generator, operable to selectively displace the fluid around a particle to be sorted and thereby to create a transient flow of the fluid in the input channel; and a vortex element, configured to cause a vortex in the transient flow in order to direct the particle to be sorted into the output sort channel.

Abstract: A sample treatment and molecule analysis cartridge is configured to be mounted in a treatment machine vertically. The cartridge has a sample inlet opening, a fluidic inlet, and a fluidic outlet. The cartridge houses an extraction chamber extending vertically from the sample inlet opening and connected to the fluidic inlet; a waste chamber extending vertically, alongside the extraction chamber; and a collector extending along the extraction chamber and the waste chamber and having a smaller height than the extraction chamber and the waste chamber. A fluidic circuit connects together the extraction chamber, the waste chamber, the collector, the fluidic inlet, and the fluidic outlet, and is configured to connect the fluidic outlet to vent openings of the extraction chamber, the waste chamber, and the collector, and to connect the bottom end of the extraction chamber to the fluidic inlet, the waste chamber, and the collector.

Abstract: Certain aspects and features of the disclosure relate to a valve device for use in a wellbore. In one example, the valve device includes a body containing swell fluid, a swellable elastomer, and a piston. The swell fluid can contact the swellable elastomer, causing the swellable elastomer to swell. The swellable elastomer can swell and contact the piston. The swellable elastomer can move the piston from a first position to a second position. In the second position, the piston can open, close, or restrict one or more flow paths through the valve device.

Abstract: A fluidic device is described for locally coating an inner surface of a fluidic channel. The fluidic device comprises a first, a second and a third fluidic channel intersecting at a common junction. The first fluidic channel is connectable to a coating fluid reservoir and the third fluidic channel is connectable to a sample fluid reservoir. The fluidic device further comprises a fluid control means configured for creating a fluidic flow path for a coating fluid at the common junction such that, when coating, a coating fluid propagates from the first to the second fluidic channel via the common junction without propagating into the third fluidic channel. A corresponding method for coating and for sensing also has been disclosed.

Abstract: A microfluidic chip configuration wherein injection occurs in an upwards vertical direction, and fluid vessels are located below the chip in order to minimize particle settling before and at the analysis portion of the chip's channels. The input and fluid flow up through the bottom of the chip, in one aspect using a manifold, which avoids orthogonal re-orientation of fluid dynamics. The contents of the vial are located below the chip and pumped upwards and vertically directly into the first channel of the chip. A long channel extends from the bottom of the chip to near the top of the chip. Then the channel takes a short horizontal turn that nearly negates any influence of cell settling due to gravity and zero flow velocity at the walls. The fluid is pumped up to a horizontal analysis portion that is the highest channel/fluidic point in the chip and thus close to the top of the chip, which results in clearer imaging.

Abstract: A specimen processing cartridge includes a reservoir having a fluid inlet, an elastic diaphragm, and a fluid outlet. The reservoir is operable to receive a volume of liquid from the fluid inlet, and the fluid outlet is positioned along a fluid flow path between the reservoir and a downstream reservoir. The cartridge includes a dissolvable membrane that occludes flow through the fluid outlet when the dissolvable membrane is in a first, undissolved state, and that permits flow from the reservoir to the downstream reservoir when in a second, dissolved state. The elastic diaphragm is operable to pressurize the reservoir upon receiving the volume of liquid when the dissolvable membrane is in the first, undissolved state, and is operable to contract and propel at least a portion of the volume of liquid from the reservoir to the downstream reservoir when the dissolvable membrane is in the second, dissolved state.

Abstract: A specimen processing cartridge includes a reservoir having a fluid inlet, an elastic diaphragm, and a fluid outlet. The reservoir is operable to receive a volume of liquid from the fluid inlet, and the fluid outlet is positioned along a fluid flow path between the reservoir and a downstream reservoir. The cartridge includes a dissolvable membrane that occludes flow through the fluid outlet when the dissolvable membrane is in a first, undissolved state, and that permits flow from the reservoir to the downstream reservoir when in a second, dissolved state. The elastic diaphragm is operable to pressurize the reservoir upon receiving the volume of liquid when the dissolvable membrane is in the first, undissolved state, and is operable to contract and propel at least a portion of the volume of liquid from the reservoir to the downstream reservoir when the dissolvable membrane is in the second, dissolved state.

Abstract: An autonomous valve includes a fluid-sensitive actuator operable to automatically actuate the valve in response to being exposed to a target fluid. The target fluid may be a fluid whose presence is generally undesirable in a production fluid, such as water, and the valve may be actuated to stop flow from an interval within a wellbore that is no longer expected to produce hydrocarbon-bearing fluids. The valve further includes a protective layer disposed between the fluid inlet and the fluid-sensitive actuator, the protective layer being insoluble in the target fluid. The fluid-sensitive actuator may include a swellable piston that swells to actuate the valve in the presence of the target fluid, a soluble plug that isolates a hydraulic, closing piston until the soluble plug is dissolved into the target fluid, and an electromechanical actuator that closes the valve in response to detecting the target fluid using an electronic sensor.

Abstract: A microfabricated device having at least one gas-entrapping feature formed therein in a configuration that entraps air bubbles upon wetting the feature with a solvent or solution is described. The device includes a sacrificial residue in contact with the gas-entrapping feature, the dissolution of which guides the wetting of the gas-entrapping feature.

Abstract: A variety of wearable magnetic assemblies are provided that are configured to produce magnetic fields having high field magnitudes and/or high field gradients. These wearable magnetic assemblies are configured to exert forces on magnetic particles disposed in a portion of subsurface vasculature (e.g., a portion of the ulnar artery near the wrist) proximate to the magnetic assemblies. These magnetic assemblies include a plurality of dipolar permanent magnets. The forces can act to attract, slow, speed, separate, or otherwise influence the magnetic particles in various applications. In some embodiments, the magnetic particles are configured to bind to an analyte of interest. The collection, separation, and/or concentration of the magnetic particles can enable detection of one or more properties of the analyte, modification of the analyte, and/or extraction of the analyte bound to the magnetic particles.

Abstract: The present invention relates to a liquid channel device capable of easily opening the liquid channel from the closed mode, including a base plate in which a liquid channel, through which a liquid containing at least one of a sample and a reagent, flows, and a metering chamber for holding the liquid, are formed to at least one side thereof, the metering chamber has a liquid transport section for transporting the liquid inside the chamber downstream, and this liquid transport section is operated by means of external pressing on a cover plate in the area opposite the metering chamber.

Abstract: Parallel uses of microfluidic methods and devices for focusing and/or forming discontinuous sections of similar or dissimilar size in a fluid are described. In some aspects, the present invention relates generally to flow-focusing-type technology, and also to microfluidics, and more particularly parallel use of microfluidic systems arranged to control a dispersed phase within a dispersant, and the size, and size distribution, of a dispersed phase in a multi-phase fluid system, and systems for delivery of fluid components to multiple such devices.

Abstract: A printed circuit board electrorheological fluid valve and method with spaced, bonded, epoxy printed circuit board laminates defining flow channels therebetween. Electrodes are formed on opposite surfaces of the flow channels and surface pads on a laminate are electrically connected to the electrodes for applying a voltage thereto controlling the flow of electrorheological fluid in the flow channels.

Abstract: The present invention relates to a liquid channel device capable of easily opening the liquid channel from the closed mode, including a base plate in which a liquid channel, through which a liquid containing at least one of a sample and a reagent, flows, and a metering chamber for holding the liquid, are formed to at least one side thereof, the metering chamber has a liquid transport section for transporting the liquid inside the chamber downstream, and this liquid transport section is operated by means of external pressing on a cover plate in the area opposite the metering chamber.

Abstract: A magnetic ionization device is disclosed that reduces the toxic effects of diesel emissions. The magnetic ionization device comprises a pair of brackets secured together around a fuel line, and at least two permanent rare earth magnets secured to the pair of brackets. The pair of brackets each comprises an interior surface and an exterior surface, and are generally V-grooved in shape. Furthermore, the brackets comprise a recess for receiving a portion of a fuel line. Once the permanent rare earth magnets are secured to the brackets, the brackets and magnets can be coated with plastic, powder metal, or any other suitable protective layer as is known in the art. The pair of brackets is then secured together around a fuel line via plastic ties, nuts, bolts, and/or washers, etc.

Abstract: Electronic-fluidic hybrid form dividers, constructed by a simple planer droplet generation structure, a pair of signal electrodes, and a responsive control valve, which is programmed to respond to only certain signal droplets, by a basic electronic principle: change of voltage share between impedances. Detected fluidic information is addressed in both electronic and fluidic forms, and the fluidic pathway is well-confined in a simple planar structure, although its control valve is in a second layer, thereby minimizing any fluidic disturbance. Various configurations comprise a plurality of identical structures, which can alter their cumulative function by re-assignment of required voltage share. The hybrid divider can be assembled into a fluidic universal logic gate, of a simple two inlet and one outlet signal channels structure, and switch between sixteen functions by re-assigning voltage share.

Abstract: A droplet-generating device is provided. The droplet-generating device comprises a first microchannel and a second microchannel. The first microchannel includes a first fluid inlet and a second fluid inlet. The second microchannel crossing over and communicating with the first microchannel at an intersectional region includes a third fluid inlet, a fourth fluid inlet, a fluid outlet, a three-way junction and a side wall. The intersectional region is configured between the third fluid inlet and the three-way junction, and the side wall is disposed between the fourth fluid inlet and the fluid outlet and extended downward. A method of producing a droplet is also provided.

Abstract: A device and method of laminar flow patterning of at least one sample fluid in a main channel in a microfluidic device are provided. A first input channel is provided in the microfluidic device. The first input channel has an output end communicating with the first end of the main channel and an input end communicating with a first input port. A buffer fluid is deposited in the main channel and the first input channel and a first sample fluid is deposited in the first input port. A first pressure is generated in response to the depositing of the first sample fluid in the first input port so as to cause laminar flow of the first sample fluid in the main channel.

Abstract: The present invention relates to a method and an apparatus for producing a chocolate product. The method includes delivering liquid chocolate having a viscosity through a pipe along a delivery path to a production station for producing the chocolate product. The liquid chocolate includes solid particles suspended within the liquid chocolate. The method changes the viscosity of the liquid chocolate by applying an electric field to the liquid chocolate in a direction along the delivery path of a strength and duration determined to aggregate the suspended solid particles into streamlined shapes extending along the direction of the delivery path.

Abstract: A structure and method of using the structure. The structure including an integrated circuit chip having a set of micro-channels; an electro-rheological coolant fluid filling the micro-channels; first and second parallel channel electrodes on opposite sides of at least one micro-channel, the first channel electrode connected to an output of an auto-compensating temperature control circuit, the second channel electrode connected to ground; the auto-compensating temperature control circuit comprising a temperature stable current source connected between a positive voltage rail and the output and having a temperature sensitive circuit connected between ground and the output, a leakage current of the temperature stable current source being essentially insensitive to temperature and a leakage current of the temperature sensitive circuit increasing with temperature.

Abstract: A magnetorheological fluid-based device and method may include the use of magnetorheological (MR) fluid, a primary magnetic field to control the viscosity of the fluid, and a secondary magnetic field to reduce clumping of ferromagnetic particles.

Abstract: A valve device is formed with a through-channel and a field generating device. A fluid which can be influenced by a field is provided in the through-channel and the field generating device is configured to act on the field-influenced fluid in the through-channel by way of a field. At least one adjustment device is provided with which the field that is active in the through-channel can be adjusted. A portion of the cross-sectional area of the through-channel can be adjusted, the portion being exposed to a field of a specific intensity so that the through-channel can also only partly be exposed to a field of a specific intensity. Thus, the through-channel, as seen in the direction of the flow, can be divided into regions of different flow resistance, whereby characteristic curves, which were previously attained only with difficulty, are easily obtained when using the valve device in a damper, for example.

Abstract: Provided are magneto-cryogenic valves, methods and systems that extract thermal energy from a fluid within a conduit such that the temperature of at least a portion of the fluid is reduced to a temperature below which at least a portion of the fluid becomes a solid thereby forming a frozen plug of fluid and magnetically susceptible particles that reversibly plugs the conduit, preventing flow of fluid past the plug. Also provided are methods and systems for temporarily preventing the flow of fluid in a conduit.

Abstract: An ER fluid valve includes a housing and a plurality of parallel flow passages through the housing each defined by spaced electrodes at least one of which is controllable independently of other flow passages electrodes. A controller is configured to selectively establish electrical fields for all of the independently controllable electrodes to close all of the flow passages to ER fluid flowing through the housing. By removing the fields from all of the independently controllable electrodes, all the flow passages are open to the ER fluid flowing through the housing. By establishing fields for select independently controllable electrodes to close their associated flow passages and by leaving other flow passages open, restricted flow of the ER fluid through the housing is accomplished to vary the flow rate through the housing.

Abstract: A fluidic system having a first volume, a second volume and a membrane geometrically separating the two volumes, which has an open-pore microstructure for the passage of a first medium and a second medium. There is a contact angle (?) between the interface of the media and the pore surface. A first electrical field in the region of the membrane and a first electromagnetic radiation and a first heating of the membrane define a first state (Z1), in which the membrane is not wetted or is less wetted by the first medium and is more heavily wetted by the second medium such that a first contact angle ?1>90° is formed between the pore surface and the interface. The first medium and the second medium and the pore surface have a surface energy of which at least one surface energy can be reversibly changed in such a way that a second contact angle ?2<?1 occurs between the pore surface and the interface in a second state (Z2).

Abstract: A microfluidic device for generation of monodisperse droplets and initiating a chemical reaction is provided. The microfluidic device includes a first input microchannel having a first dimension and including a first phase located therein. The device also includes a second input microchannel having a second dimension and including a second phase located therein. In accordance with the present disclosure, the second dimension is different from the first dimension and the first phase is immiscible in the second phase. A microchannel junction is also present and is in communication with the first input microchannel and the second input microchannel. The device further includes an output channel in communication with the microchannel junction and set to receive a monodisperse droplet. In the present disclosure, the difference in the first dimension and the second dimension creates an interfacial tension induced force at the microchannel junction which forms the monodisperse droplet.

Abstract: A system and method for controlling fluid flow within a microchannel includes a fluid circuit comprising a fluid outlet well and one or more fluid inlet wells, all in communication with a microchannel. A negative pressure differential is applied to the outlet well and fluid flow from an inlet well into the microchannel is controlled by opening or closing the inlet well to atmospheric pressure. To stop fluid flow from the inlet well, a negative pressure differential may be applied to the inlet well to equalize pressure between the inlet and outlet wells. By sequentially opening and closing different inlet wells to atmosphere, controlled amounts of different reagents can be serially introduced into the microchannel.

Abstract: A microchannel formed at the interface of two layers of material, at least one of the two materials being a substrate. A volume of the microchannel contains a film of polymer fixed by covalent bonding to the substrate layer. The film of polymer being formed from a hydrogel material susceptible to undergoing changes in volume under the action of an external stimulus. The hydrogel polymer is chosen from those which are sensitive to changes in temperature, light, electrical field or pH. A method for producing the microchannel.

Abstract: Methods and devices for using one or more fluidic channels for generating binary states are described. In particular, the present teachings relate to incorporating such fluidic channels into devices that use the generated binary states in various applications.

Abstract: In accordance with one embodiment, a method for automatically coordinating droplets for optically controlled microfluidic systems, comprising using light to move one or a plurality of droplets simultaneously, applying an algorithm to coordinate droplet motions and avoid droplet collisions, and moving droplets to a layout of droplets. In another embodiment, a system for automatically coordinating droplets for optically controlled microfluidic systems, comprising using a light source to move one or a plurality of droplets simultaneously, using an algorithm to coordinate droplet motions and avoid droplet collisions, and using a microfluidic device to move droplets to a layout of droplets.

Abstract: A microactuator may be configured by activating a source of electromagnetic radiation to heat and melt a selected set of phase-change plugs embedded in a substrate of the microactuator, pressurizing a common pressure chamber adjacent to each of the plugs to deform the melted plugs, and deactivating the source of electromagnetic radiation to cool and solidify the melted plugs.

Abstract: There is disclosed apparatus and processes for increasing fluidity of a flowing fluid. The apparatus may have a number of treatment chambers adapted to receive and pass the flowing fluid. In each treatment chamber a field is applied to the fluid. The fields may be parallel to the fluid's direction of flow, and may alternate in sequence. The fluidity of the fluid is increased through exposure to the fields.

Abstract: Drag experienced by a vehicle traveling through an environmental media, such as air or water, may be modified by one or more energy beams which may increase or decrease drag. A control system smay be used to actively modulate the drag of the vehicle by selectively transmitting energy beams. Energy beams may include electric pulse signals, pulsed air, piezoelectric, infrared, ultraviolet, laser, optical band, microwave, thermal other known acoustic, electric, optical, or other electromagnetic energy and any combination thereof. This could be a constant or pulsed energy beam and adjusted for the speed and/or vertical lift, frequency, density, angle, pulse and wavelengths experienced by the vehicle. Charged particles may be emitted from the vehicle itself and then utilized in front or behind the vehicle via electric current to improve the boundary layer, boundary flow.

Abstract: Disclosed embodiments include electromagnetic flow regulators for regulating flow of an electrically conductive fluid, systems for regulating flow of an electrically conductive fluid, methods of regulating flow of an electrically conductive fluid, nuclear fission reactors, systems for regulating flow of an electrically conductive reactor coolant, and methods of regulating flow of an electrically conductive reactor coolant in a nuclear fission reactor.

Abstract: The present disclosure provides a mini-scale microfluidic valve including a valve housing disposed at a fluid dispensing orifice of a mini-scale microfluidic system dispensing nozzle. The valve housing comprises a base member having a base member orifice that aligns with the fluid dispensing orifice to provide a fluid dispensing pathway through which a system-fluid is dispensed from the system dispensing nozzle to an external ambient environment. The housing additionally comprises an open valve channel exposed to the external ambient environment and intersecting the fluid dispensing pathway. The valve further includes a liquid-film movably disposed within the open valve channel such that the liquid-film is exposed to the external ambient environment. The liquid-film comprises a substantially non-volatile, immiscible liquid, and a valve control subsystem structured and operable to control movement of the liquid-film within the open valve channel to selectively cover and uncover the base member orifice.

Abstract: A fluidic actuator includes a basic arrangement having at least one cavity formed therein, an activatable substance within the cavity, and a deformable seal arrangement. The activatable substance, exemplarily an electrolyte, may be converted, at least partly, by suitable activation and thus cause a change in pressure in the cavity. The deformable seal arrangement serves for sealing the cavity. The seal arrangement includes an element containing paraffin and may be deformed when activating the activatable substance due to the change in pressure of the activatable substance. A corresponding method of manufacturing includes the following steps: providing the basic arrangement; forming a cavity, which is open on at least one side, in the basic arrangement; introducing the activatable substance into the cavity; and sealing the cavity using the deformable seal arrangement which includes an element containing paraffin.

Abstract: Embodiments include electromagnetic flow regulators for regulating flow of an electrically conductive fluid, systems for regulating flow of an electrically conductive fluid, methods of regulating flow of an electrically conductive fluid, nuclear fission reactors, systems for regulating flow of an electrically conductive reactor coolant, methods of regulating flow of an electrically conductive reactor coolant in a nuclear fission reactor, and methods of fabricating an electromagnetic flow regulator for regulating flow of an electrically conductive fluid.

Abstract: Disclosed embodiments include electromagnetic flow regulators for regulating flow of an electrically conductive fluid, systems for regulating flow of an electrically conductive fluid, methods of regulating flow of an electrically conductive fluid, nuclear fission reactors, systems for regulating flow of an electrically conductive reactor coolant, and methods of regulating flow of an electrically conductive reactor coolant in a nuclear fission reactor.

Abstract: The invention relates to a fluidic system that includes a body structure having a chamber disposed therein. The fluidic system includes at least one fluid input at a first end of the chamber and at least one fluid output at a second end of the chamber. The fluidic system also includes a sensor device (e.g., an acoustic device) having a surface defining a portion of a surface of the chamber. The fluidic system also includes a first surface at the first end of the chamber oriented at an oblique or arcuate (e.g., curved) angle relative to the surface of the sensor device to direct fluid through the chamber.

Abstract: Disclosed embodiments include electromagnetic flow regulators for regulating flow of an electrically conductive fluid, systems for regulating flow of an electrically conductive fluid, methods of regulating flow of an electrically conductive fluid, nuclear fission reactors, systems for regulating flow of an electrically conductive reactor coolant, and methods of regulating flow of an electrically conductive reactor coolant in a nuclear fission reactor.

Abstract: A fluid transport device transports fluid containing electrolytes within a flow channel. At least a portion of the inner walls of the flow channels are hydrophilic from the inlet to the outlet thereof except at at least one valve portion. The device also includes: the valve portions, which are hydrophobic and function to block transport of at least one fluid; electrodes, which are provided at the at least one valve portion and function to reduce the surface tension of the fluid; and air vents, which are provided at the at least one valve portion and function to introduce air in order to block the fluid.

Abstract: An airflow control device 10 in an embodiment includes: a vortex shedding structure portion 20 discharging an airflow flowing on a surface in a flow direction as a vortex flow; and a first electrode 40 and a second electrode 41 disposed on a downstream side of the vortex shedding structure portion 20 via a dielectric. By applying a voltage between the first electrode 40 and the second electrode 41, flow of the airflow on the downstream side of the vortex shedding structure portion 20 is controlled.

Abstract: A valve 25 includes: a passage 33 having a first passage 31 which communicates an atmosphere-communicating passage 24 and outside of a cartridge body 10, and a second passage 32 which branches from the first passage; an electrode 35 provided on a wall surface forming the second passage 32; an electrode 37 provided on a wall surface of a bottom wall lid forming the first passage 31; a driver IC 44 which applies a predetermined voltage selectively to one of these two kinds of electrodes 35, 37; an insulating film 36 provided on a surface of the electrode 35; and an insulating film 38 provided on a surface of the electrode 37. Accordingly, there is provided a valve which is capable of opening and closing a passage communicating two spaces separated from each other, which has no movable part, and which has a simple construction.

Abstract: The invention relates to a method for treating drops in a microfluid circuit, comprising at least one microchannel (12) through which the drops flow, characterized in that a laser (26) is brought to bear on the interface of said drops in the transport liquid (F3), or on the interface of drops in contact, in order to carry out a sorting of the drops, to form nanodrops from a larger drop or to fuse drops (60, 64) in contact and initiate reactions between the fluids contained in said drops.

Abstract: A plasma actuator (1) includes four electrodes (11) and three dielectrics (10) and is disposed on the side of an object surface (B). When a high voltage is applied to the electrodes (11), a plasma (15) is generated at an end (10a) of each dielectric (10) exposed so as to be accessible to a gas. In the plasma actuator (1), the electrodes (11) and dielectrics (10) are alternately stacked one on another. The plasma actuator (1) includes a stepped exposed portion (X). The plasma actuator (1) in which the electrodes (11) and dielectrics (10) are arranged such that the ends (10a) of the dielectrics (10) are exposed in the normal line direction of the object surface (B) in the stacked order in the stepped exposed portion (X) can suppress the flow of the generated plasma even when the plasma actuator is exposed to a high-speed airflow under high pressure. This stabilizes the plasma.

Abstract: Disclosed embodiments include electromagnetic flow regulators for regulating flow of an electrically conductive fluid, systems for regulating flow of an electrically conductive fluid, methods of regulating flow of an electrically conductive fluid, nuclear fission reactors, systems for regulating flow of an electrically conductive reactor coolant, and methods of regulating flow of an electrically conductive reactor coolant in a nuclear fission reactor.

Abstract: A microfluidic structure with an electrically controlled pressure source is shown. The pressure source is an electrolyte connected with electrodes. Dissociation of the electrolyte generates the pressure, which is used to obtain a valve-like or pump-like behavior inside the microfluidic structure. A process for manufacturing the microfluidic structure and a method to circulate fluids in a microfluidic channel are also described.

Abstract: A method for inducing a controllable jet in a transparent liquid is disclosed. The method comprises providing a gas-liquid interface, providing a laser source and generating a beam comprising a sequence of laser pulses, and focusing the beam to a target location within the liquid at a predetermined distance from the gas-liquid interface and creating a plurality of cavitation bubbles, yielding a jet directed away from the gas-liquid interface. Other methods and apparatus are also described and claimed.

Abstract: Novel fluid logic devices are disclosed. Certain examples of the fluid logic devices include two or more fluid logic gates that are each operative to select and/or direct analytes in a sample into one or more fluid flow channels in communication with the fluid logic gates. The fluid logic device can be part of a larger system, such as a chromatography system, or can be stand-alone device.

Abstract: A process for fabricating multiple microfluidic device chips. The process includes fabricating multiple micromachined tubes in a semiconductor device wafer. The tubes are fabricated so that each tube has an internal fluidic passage and an inlet and outlet thereto defined in a surface of the device wafer. The device wafer is then bonded to a glass wafer to form a device wafer stack, and so that through-holes in the glass wafer are individually fluidically coupled with the inlets and outlets of the tubes. The glass wafer is then bonded to a metallic wafer to form a package wafer stack, so that through-holes in the metallic wafer are individually fluidically coupled with the through-holes of the glass wafer. Multiple microfluidic device chips are then singulated from the package wafer stack. Each device chip has a continuous flow path for a fluid therethrough that is preferably free of organic materials.