Abstract: The invention relates to an arc evaporator which comprises at least one anode (4), a cathode (3) and a system for generating a magnetic field comprising a first subsystem consisting of a set of permanent magnets (8, 9) which produces a converging magnetic field component and a second subsystem comprising at least one coil (10) and configured to operate in at least a first operating mode in which it generates a second diverging magnetic field component.

Abstract: A coating includes a bonding layer comprised of TiNbN, a transition layer comprised of TiSiNbN formed on the bonding layer, and an outmost layer comprised of TiSiNbN formed on the transition layer. The percentage of atomics Ti and Nb in the outmost layer are respectively lower than the percentage of atomics Ti and Nb in the transition layer, and the percentage of atomic Si in the outmost layer are higher than the percentage of atomic Si in the transition layer.

Abstract: The invention relates to a cutting tool having a substrate base body and a single or multi-layered coating attached thereupon, wherein at least one layer of the coating is a metal oxide layer produced in the PVD process or in the CVD process and the metal oxide layer has a grain structure wherein there is structural disorder within a plurality of the existing grains that are characterized in that in electron diffraction images of the grains, point-shaped reflections occur up to a maximum lattice spacing dGRENZ and for lattice spacing greater than dGRENZ no point-shaped reflections occur, but rather a diffuse intensity distribution typical for amorphous structures.

Abstract: Disclosed is a hard coating excellent in wear resistance, insusceptible to seizure, and excellent sliding property even after use over the long term, and a method capable of forming the hard coating excellent in sliding property in a short time. The hard coating is a hard coating expressed by chemical formula MxBaCbNc, wherein M is at least one kind of metallic element selected from the group consisting of elements in the groups 4A, 5A, and 6A of the periodic table, and Si, Al, the hard coating having chemical composition satisfying respective formulas expressed by 0?a?0.2, 0?c?0.2, 0<x?a?c, x?a?c<b?0.9, 0.05?x<0.5, and x+a+b+c=1, where x, a, b, and c denote respective atomic ratios of M, B, C, and N.

Abstract: Coated cemented carbide inserts are particularly useful in general turning of superalloys. The inserts are formed from a cemented carbide of WC about 5.0-7.0 wt-% Co, and about 0.22-0.43 wt-% Cr, where the substrate has a coercivity (Hc) of about 19-28 kA/m. The coating contains a single layer of (TixAl1-x)N-layer, where x is 0.25-0.50, with a crystal structure of NaCl type, a total thickness of about 3.0-5.0 ?m, (200)-texture, and a compressive residual strain of about 2.5×10?3-5.0×10?3, optionally containing an outermost TiN-layer.

Abstract: A cutting tool insert, particularly useful for machining of cast iron, comprising a body of a hard alloy of cemented carbide, cermet, ceramics, cubic boron nitride based material or high speed steel a hard and wear resistant coating; and at least (Al,Cr)2O3 layer applied to said body is disclosed. Methods of making a cutting tool insert are also disclosed. In addition, methods for machining of cast iron using the cutting tool inserts are disclosed.

Abstract: A wear resistant multilayer nitride hard coating for substrates. The hard coating includes a first layer of titanium aluminum nitride and a second layer comprising a plurality of sublayer groups. Each sublayer group includes a first sublayer of titanium silicon nitride and a second sublayer of titanium aluminum nitride. The composition of the titanium aluminum nitride, both in the first layer and in the sublayer groups, is (TixAl1-x)N, wherein 0.4?x?0.6. The composition of the titanium silicon nitride sublayers is (TiySi1-y)N, wherein 0.85?y?0.98, and all of the silicon is in solid solution in the titanium silicon nitride such that no silicon phase or silicon nitride phase exists in this sublayer. The combined amount of aluminum and silicon present in the sublayer groups being narrowly controlled such that the sum of x and y is in the range of 1.38 to 1.46.

Abstract: A cutting tool insert is formed from a substrate selected from cemented carbide, cermet, ceramics, cubic boron nitride based material or high speed steel. The insert includes a hard and wear-resistant coating formed from laminar polycrystalline metal nitrides layers. The laminar polycrystalline metal nitrides layers have a repetitive form . . . A/B/A/C/A/B/A/C/ . . . with a total thickness of about 0.5 ?m to about 5 ?m.

Abstract: The invention is directed to efficient methods for depositing highly adherent anti-microbial materials onto a wide range of surfaces. A controlled cathodic arc process is described, which results in enhanced adhesion of silver oxide to polymers and other surfaces, such as surfaces of medical devices. Deposition of anti-microbial materials directly onto the substrates is possible in a cost-effective manner that maintains high anti-microbial activity over several weeks when the coated devices are employed in vivo.

Abstract: The invention relates to a method for surface treatment of work pieces in a vacuum treatment system having a first electrode embodied as a target, which is part of an arc vaporization source; by means of the first electrode, an arc is operated with an arc current and vaporizes material from the target that is deposited at least partially and intermittently onto the work pieces and having a second electrode that is embodied as a work piece holder and, together with the work pieces, constitutes a bias electrode; by means of a voltage supply, a bias voltage is applied to the bias electrode, with the bias voltage applied so that it is matched to the arc current such that essentially, no net material buildup on the surface occurs.

Abstract: A cutting tool insert, particularly useful for machining of steel and stainless steel, comprising a body of a hard alloy of cemented carbide, cermet, ceramics, cubic boron nitride based material or high speed steel a hard and wear resistant coating; and at least (Al,Cr)2O3 layer applied to said body is disclosed. Methods of making a cutting tool insert are also disclosed. In addition, methods for machining of cast iron using the cutting tool inserts are disclosed.

Abstract: In a vacuum arc evaporation apparatus, to stably maintain vacuum arc discharge at an arc source when depositing a cathode material on a substrate, namely a magnetic recording medium, an ungrounded anode of a coil-type tube is placed inside an arc source discharge vacuum chamber. A DC arc power supply is connected between the cathode and the anode to cause an arc current to flow in the anode to generate a first magnetic field in one direction, from the cathode toward the anode. A second magnetic field is generated in the opposite direction, from the anode to the cathode by feeding a specified current to an external coil positioned around the discharge chamber. The external coil includes an around-cathode coil and an around-anode coil. The arc discharge can be started by operating a striker to carry out the deposition.

Abstract: A cutting tool insert, particularly useful for machining of cast iron, comprising a body of a hard alloy of cemented carbide, cermet, ceramics, cubic boron nitride based material or high speed steel a hard and wear resistant coating; and at least (Al,Cr)2O3 layer applied to said body is disclosed. Methods of making a cutting tool insert are also disclosed. In addition, methods for machining of cast iron using the cutting tool inserts are disclosed.

Abstract: An arc discharge detection device is used for detecting arc discharges in a plasma process. The arc discharge detection device includes a comparator to which an instantaneous signal and a reference value are supplied. The reference value is formed by a setting means from an extreme value of the signal. The extreme value is determined by an extreme value detection device within a predetermined time period, and the comparator changes the state of an arc discharge detection signal when the comparison between the reference value and an instantaneous value of the signal shows that an arc discharge has occurred.

Abstract: In a mesoporous silica film formed on a non-single-crystalline carbon film having structural anisotropy on a substrate in-plane arrangement of the pores is controlled in one direction, which is defined by the structural anisotropy of the carbon film.

Abstract: A process of depositing a coating on a substrate, the method comprising the steps of: (a) depositing material on a substrate by performing a cathodic Vacuum arc (CVA) deposition step; and (b) depositing material on a substrate by performing at least one of a chemical vapour deposition (CVD) step and a physical Vapour deposition (PVD) step that excludes CVA deposition, Wherein the thickness of the material deposited in step (b) is greater than the thickness of the material deposited in step (a).

Abstract: The present invention is directed to a process for producing an image on a substrate and a substrate having an image deposited thereon using the aforementioned processes.

Abstract: A method of depositing a coating on a substrate, the method comprising the steps of: (a) depositing material on a substrate by performing a cathodic vacuum arc (CVA) deposition step; and (b) depositing material on a substrate by performing a physical vapor deposition (PVD) step that excludes CVA deposition wherein the thickness of the material deposited in step (a) is greater than the thickness of material deposited in step (b).

Abstract: This invention relates to a method and apparatus for deposition of a diffused thin film, useful in the fabrication of semiconductors and for the surface DC-Bias coating of various tools. In order to coat the surface of a treatment object, such as semiconductors, various molded products, or various tools, with a thin film, one or more process factors selected from among a bias voltage, a gas quantity, an arc power, and a sputtering power are continuously and variably adjusted, whereby the composition ratio of the thin film which is formed on the surface of the treatment object not through a chemical reaction but through a physical method is continuously varied, thus manufacturing a thin film having high hardness. The composition ratio of the thin film to be deposited is selected depending on the end use thereof, thereby depositing the thin film having superior wear resistance, impact resistance, and heat resistance.

Abstract: A vacuum process system for surface-treating work pieces uses an arc evaporation source. The system has a first electrode connected to a DC power source and a second electrode, disposed separately from the arc evaporation source. The two electrodes are operated while being connected to a single pulsed power supply.

Abstract: The coating system comprises: at least one layer of type A, a layer of type A substantially consisting of (AlyCr1-y)X, wherein X depicts one of the group consisting of N, CN, BN, NO, CNO, CBN, BNO and CNBO, y describing the stoichiometric composition of the metallic phase fraction; and at least one layer of type B, a layer of type B substantially consisting of (AluCr1-u-v-wSivMew)X, wherein X depicts one of the group consisting of N, CN, BN, NO, CNO, CBN, BNO or CNBO, and wherein Me depicts one of the group consisting of W, Nb, Mo and Ta or a mixture of two or more of the constituents of that group, u, v and w describing the stoichiometric composition of the metallic phase fraction. A thickness ratio of said layer of type A to said layer of type B is higher than 1. The workpiece comprises such a coating system. Through this, an excellent wear-protection is provided, and the coating system and workpieces can be used for a broad range of different applications.

Abstract: A cutting tool includes a body of a hard alloy of cemented carbide, cermet, ceramics, cubic boron nitride based material or high speed steel and on which at least one of the functioning parts of the surface thereof, a hard and wear resistant coating is applied. The coating includes a polycrystalline laminar, multilayered structure of metal nitride compounds, in a repetitive form . . . MeN/(Ti1-xAlx)N/MeN/(Ti1-xAlx)N/MeN/(Ti1-xAlx)N/MeN/(Ti1-xAlx)N . . . of cubic structured (Ti1-xAlx)N layers where 0.3<x<0.95 and cubic structured MeN layers where Me is one or more of the metal element Ti, Zr, Hf, V, Nb, Ta, Mo and Al. The laminated structure has a repeat period, ?, of 5 nm??<20 nm, a layer thickness relation of 1/10<(dMeN/d(Ti,Al)N)<1/3 and a thickness dMeN?1 nm that is essentially constant throughout its total thickness up to 20 ?m.

Abstract: The invention relates to a layer arrangement (1) for the formation of a coating on a surface (2) of a substrate (3), in particular on the surface (2) of a tool (3), wherein the layer arrangement comprises at least one hard layer (4, 5, 6, 7, 8) having the composition SiaBbMecNuCvOw with a,b>0 and 33 at %>c ?0, preferably 25 at %>c?0, in particular 10 at %>c?0 and u,v,w?0, and Me being a metal. Furthermore, the invention relates to a coating method for depositing a layer arrangement (1), as well as to a substrate (3), in particular a tool (3) or a wearing part (3) having a layer arrangement (1) according to the invention.

Abstract: A method of integrating a fluorine-based dielectric with a metallization scheme is described. The method includes forming a fluorine-based dielectric layer on a substrate, forming a metal-containing layer on the substrate, and adding a buffer layer or modifying a composition of the fluorine-based dielectric layer proximate an interface between the fluorine-based dielectric layer and the metal-containing layer.

Abstract: A vacuum treatment system (1) for treating workpieces has a treatment chamber (10) that can be evacuated and in which a low-volt arc-discharge device is placed, with at least one locking loading/unloading aperture and at least one coating source placed on one side wall of the treatment chamber. It also has a device for producing a magnetic field to create a remote magnetic field and at least one workpiece holder to hold workpieces. A target-shutter arrangement (8, 8?) is designed so that when uncovered, the distance between the shutter (8) and the target (12) is less than 35 mm, thus allowing ignition and operation of a magnetron or cathode spark discharge behind the target, but preventing ignition of auxiliary plasma when the target (8) is turned off.

Abstract: A slider for an information storage system. The slider comprising a single overcoat layer, wherein the layer is deposited onto an ABS of the slider by a filtered cathodic arc process, the layer having a Si/C ratio less than about 10% and a thickness of less than about 15 ?.

Abstract: The present invention relates to a cutting tool insert comprising a body of a hard alloy of cemented carbide, cermet, ceramics, cubic boron nitride based material or high speed steel a hard and wear resistant coating, comprising one or several layers, at least one of which an (Al,Cr)2O3 layer is applied. This invention is particularly useful for machining of steel and stainless steel. The coating with a total thickness of 2-20 ?m comprises one or several layers, at least one of which is an (Al,Cr)2O3 layer with a thickness of 1-5 ?m having a corundum phase crystalline structure and a composition (Al1-yCry)2O3 with 0.4?y?0.6. The (Al,Cr)2O3 layer is further characterized having a fiber texture with rotational symmetry in the direction of the coated surface normal with an inclination angle, ?, of the basal planes relative to the coated surface normal or the inclination angle, ?, for the highest peak in the pole plot with 70°<?<90° as determined by, e.g.

Abstract: A cutting tool insert includes a body of a hard alloy of cemented carbide, cermet, ceramics, cubic boron nitride based material or high speed steel a hard and wear resistant coating, including one or several layers, at least one of which is an (Al,Cr)2O3 layer. The tool is particularly useful for machining steel and stainless steel. The coating, with a total thickness of 2-20 ?m includes one or several layers, at least one of which is an (Al,Cr)2O3 layer with a thickness of 1-5 ?m having a corundum phase crystalline structure and a composition (Al1-yCry)2O3 with 0.5?y?0.7. The (Al,Cr)2O3 layer has a fiber texture with rotational symmetry in the direction of the coated surface normal with an inclination angle, ?, of the basal planes relative to the coated surface normal or the inclination angle, ?, for the highest peak in the pole plot with 20°<?<55°.

Abstract: A method and apparatus for depositing a coating material on a surface of a substrate by an ion plasma deposition process using a hollow cathode is disclosed. The cathode may be a substantially cylindrical hollow cathode. A plasma arc is formed on the outer circumference of the cathode to remove coating material from the cathode, which is then deposited on a surface of a substrate. An internal arc drive magnet is contained within the hollow bore of the cathode and cooling is provided to the magnet during operation.

Abstract: The invention relates to a coating comprising a getter metal alloy and to an arrangement and method for the production thereof. The coating therein consists of a non-vaporizing getter metal alloy (2) for an inner wall (3) of a high-vacuum vessel (4). The arrangement basically consists of a metal plasma generator (7), which in turn comprises an insulator member (8), which carries an ignition electrode (9) and a cathode wire (10) comprising a getter metal alloy (2). Those three components are surrounded by a cage-like anode member (13), which together with the insulation member (8) projects into the high vacuum vessel (5) to be coated and is supplied with cathode potential (12), high-voltage ignition pulse (19) and anode potential (14) by a voltage supply device (16), the anode member (13) together with the high-vacuum vessel (4) being held at ground potential.

Abstract: An apparatus for the deposition of a variable thickness coating onto the inside of a cylindrical tube comprises a variable pressure gas, an cathode coaxially positioned within the cylinder, and a voltage source applied between the cathode and cylindrical tube, which functions as an anode. A radial plasma arc is generated between the anode and cathode at a starting point on the cylinder, and the plasma arc travels down the central axis of the cylinder, providing a helical deposition region on the inside of the cylinder. Selection of the combination of cathode material and gas enable the plasma to generate ionic material which is deposited on the anodic cylinder in the region of the plasma. By varying the pressure of variable pressure gas for each helical path, it is possible to vary the composition of this deposition film.

Abstract: Method for producing poorly conductive and in particular nonconductive layers on at least one work piece by means of a vacuum-coating process in which an electric arc discharge is activated between at least one anode and the cathode of an arc source in a reactive-gas atmosphere, whereby on the surface of a target that is electrically connected to the cathode either none or only a small outer magnetic field is generated that extends essentially perpendicular to the target surface for assisting the evaporation process, the degree of recoating of the target surface by other coating sources is less than 10%, and the magnetic field is generated with a magnet system that encompasses at least one axially polarized coil with a geometry similar to the circumference of the target.

Abstract: The invention relates to a layer arrangement (1) for the formation of a coating on a surface (2) of a substrate (3), in a particular on the surface (2) of a tool (3), wherein the layer arrangement comprises at least one hard layer (4,5,6,7,8) having the composition SiaBbMecNuCvOw with a,b>0 and 33 at%>c?0, preferably 25 at%>c?0, in particular 10 at%>c?0 and u,v,w?0, and Me being a metal. Futhermore, the invention relates to a coating method for depositing a layer arrangement (1), as well as to a substrate (3), in particular a tool (3) or a wearing part (3) having a layer arrangement (1) according to the invention.

Abstract: A process for manufacturing electrodes for electrolysis, including steps of forming an arc ion plating (AIP) undercoating layer including valve metal or valve metal alloy containing a crystalline tantalum component and a crystalline titanium component on a surface of the electrode substrate comprising valve metal or valve metal alloy, by an arc ion plating method; heat sintering, including the steps of coating a metal compound solution, which includes valve metal as a chief element, onto the surface of the AIP undercoating layer, followed by heat sintering to transform only the tantalum component of the AIP undercoating layer into an amorphous substance, and to form an oxide interlayer, which includes a valve metal oxides component as a chief element, on the surface of the AIP undercoating layer containing the transformed amorphous tantalum component and the crystalline titanium component; and forming an electrode catalyst layer on the surface of the oxide interlayer.

Abstract: A magnetic guide is presented that controls an electric arc between an anode and a cathode, which may be a target, over the whole cathode surface. The magnetic guide may be included in an arc evaporator and may include a first magnetic system having a group of permanent magnets located on the periphery of the evaporator or target, so that magnetization is perpendicular to the surface of the target. The magnetic guide may also include a second magnetic system that includes an electromagnet located at the rear of the target housed in an electrically insulating body at a distance from the target, with at least one of its magnetic poles parallel to the surface of the target, so that the combined action of the two magnetic systems provides uniform use or consumption of the target.

Abstract: The invention relates to a device for the plasma activated vapor coating of large-surface moved substrates, comprising at least one vacuum recipient, one pump system, one evaporator, one device for holding and transporting the substrates to be coated and at least one arc discharge plasma source, whereby at least one device for generating a magnetic field is included, which device can generate a magnetic field between the evaporator and the substrate, the field lines of which magnetic field are aligned approximately perpendicular to the movement direction and parallel to the transport plane of the substrate, and at least one arc discharge plasma source is arranged such that the axis of the arc discharge plasma source is aligned approximately perpendicular to the field lines of the magnetic field.

Abstract: A vacuum-arc device including: a consumable cathode including a first material having a defined active surface, a refractory anode including a second material, an inter-electrode volume, bounded partially by at least a portion of an inner wall of the cathode and by at least a portion of an inner wall of the anode, wherein at least a portion of the inner walls form a first chamber surrounding the inter-electrode volume, the chamber having at least one opening fluidly communicating between the inter-electrode volume and an a volume outside the chamber; a vacuum chamber, disposed around and communicating with the first chamber; an evacuation mechanism for evacuating the vacuum chamber; wherein the cathode is adapted, and the cathode and the anode are disposed, such that upon evacuating the vacuum chamber using the evacuation mechanism, ignition of an arc discharge between the cathode and the anode, and activation of a high-current power supply, a portion of the first material is liberated from the cathode, trans

Abstract: A vacuum coating apparatus is disclosed. The apparatus includes a cathode target, a plurality of anodes, a transiting device, a pulsed arc discharge device, and a pulsed laser device. The plurality of anodes is placed on the transiting device and successively passes though a working position by the transiting device. The pulsed arc discharge device is electrically connected to the cathode target and the anode at the operable position to form plasma in a vacuum chamber for film coating. The pulsed laser device is located outside of the vacuum chamber and provides a pulsed laser beam onto the surface of the cathode surface to serve as a plasma trigger. A coating method for the vacuum coating apparatus is also disclosed.

Abstract: The present invention relates to a coated cemented carbide milling insert for either wet or dry machining of cast iron such as nodular cast iron (NCI), grey cast iron (GCI), austempered ductile iron (ADI) and compacted graphite iron (CGI) where a high wear resistance and an excellent resistance against thermo cracks are required comprising: a substrate comprising from about 5 to about 7 wt-% Co, from about 140 to about 250 ppm Ti+Ta and balance WC with a weight ratio Ti/Ta of from about 0.8 to about 1.3 and a PVD-layer consisting of AlxTi1?xN, with x=from about 0.50 to about 0.70 and with a thickness of from about 1 to about 10 ?m. The invention also relates to a method for making cutting tool inserts and their use.

Abstract: Disclosed is a piston ring comprising a supporting material and a wear-resistant coating. The wear-resistant coating is composed of a ternary system A-B—N which is applied using a PVD process and in which A and B each represent an element form the group encompassing Ti, Zr, Hf, V, Nb, Ta, Cr, Mo W, Al, Si and C, wherein A ?B and N represents nitrogen. The thickness of the wear-resistant coating amounts to ?3 ?m.

Abstract: The present invention allows the relatively easy production of binary and ternary compounds of metals, including noble metals. Embodiments of the invention allow, for the first time, the production of novel compositions of metal compounds, such as thick, stress-free single-phase binary and ternary compositions of metals, and porous compositions of such compounds. As such, the present invention allows for the production of metal compounds and/or compositions of matter thereof that have not before been possible, thereby providing for important new materials that find use in a multitude of different applications, including medical device and non-medical device applications.

Abstract: The present invention relates to a cutting tool, e.g. carbide insert, solid carbide drill or mill or carbide tip, particularly for milling of steels, stainless steel, HRSA, titanium or any alloyed material from any of these groups, comprising a cemented carbide substrate and an aperiodic multilayer coating with: a substrate of cemented carbide having a composition of from about 8 to about 11 wt-% Co, from about 0.1 to about 0.5 wt-% Cr and balance essentially tungsten carbide and a coating which is essentially an aperiodic multilayer consisting of layers A+B+A+B+A . . . where the sublayers A and B consist of AlxTi1-xN and TiyAl1-yN respectively. The typical average thickness of each A+B sequence is in the range from about 30 to about 300 nm and the total thickness of the coating in the range from about 0.5 to about 20 ?m. The total chemical composition averaged over the whole coating consists of TizAl1-zN where z lies in the range from about 0.40 to about 0.70.

Abstract: A multilayer hard coating for tools for machining applications with a multilayer structure for improving the wear resistance of workpieces includes at least one (AlyCr1-y)X layer (0.2?y?0.7), wherein X is one of the following elements N, C, B, CN, BN, CBN, NO, CO, BO, CNO, BNO, CBNO, but preferably N or CN, and/or a (TizSi1-z) layer (0.99?z?0.7). The hard coating also includes at least one layer stack with one (AlCrTiSi) X mixed layer, followed by another (TizSi1-z)X layer, followed by another (AlCrTiSi) X mixed layer, followed by another (AlyCr1-y)X layer.

Abstract: The invention relates to a cell culture system comprising a three-dimensional, biocompatible frame structure and biocompatible nanoparticles, a method for the cultivation of cells, and the preparation of cells or cell products and tissues per se by means of such a cell culture system.

Abstract: A tool for use in fabricating an electronic component includes a plurality of processing modules and a transfer chamber in communication with each of the plurality of processing modules. The transfer chamber includes a component for transferring a structure to each of the plurality of processing modules. The plurality of processing modules and the transfer chamber are sealed from the surrounding environment and are under a vacuum. The plurality of processing modules includes a first module configured to perform a first process on the structure and a second module configured to perform a second process on the structure. The first process includes performing at least one shaping operation on the structure.

Abstract: The invention discloses differing embodiments of thermal control coatings, spacecraft components having coatings, and methods for controlling the temperature of a component. In one embodiment, a thermal control coating under the invention may include one or more thermochromic multi-layer coatings and one or more solar rejection multi-layer coatings. The thermal control coating may have one or more transition temperatures at which the solar absorptance of the solar rejection coating substantially stays the same, while a thermal emittance of the thermochromic coating substantially changes.

Abstract: The invention relates to a physical vapour deposition coating device (1), comprising a process chamber (2) with an anode (3) and a consumable cathode (4) to be consumed by an electrical discharge for coating a substrate located within the process chamber (2). The coating device (1) further includes a first electrical energy source (5) being connected with its negative pole to said consumable cathode (4), and a second electrical energy source (6) being connected with its positive pole to said anode (3). According to the invention, a third electrical energy source (7) is provided being connected with its negative pole to a source cathode (8) which is different from the consumable cathode (4). In addition, the invention relates to a physical vapour deposition method for coating a substrate.

Abstract: A method is described for producing a micro-gripper, which comprises a base body and a gripping body connected integrally to the base body, which projects beyond the base body and provides a receptacle slot on a free end area in such a way that a micrometer-scale or sub-micrometer-scale object may be clamped in the receptacle slot for gripping and holding, as well as a micro-gripper according to the species.

Abstract: A plasma film forming apparatus having a plasma gun which emits a plasma beam and a magnet which applies a magnetic field to the plasma beam emitted from the plasma gun to deform the beam section of the plasma beam into an almost rectangular or elliptic shape includes a plurality of magnet units which deflect the plasma beam the beam section of which is deformed, to irradiate an irradiation target with the deflected plasma beam. A first magnet to be arranged on a lower backside to a surface of the irradiation target and a second magnet having magnetic poles which are the same as those of the first magnet are arranged in each magnet unit. The first magnet and the second magnet line up to be spaced apart from each other.

Abstract: A multilayer hard coating for tools for machining applications with a multilayer structure for improving the wear resistance of workpieces includes at least one (AlyCr1-y)X layer (0.2?y?0.7), wherein X is one of the following elements N, C, B, CN, BN, CBN, NO, CO, BO, CNO, BNO, CBNO, but preferably N or CN, and/or a (TizSi1-z) layer (0.99?z?0.7). The hard coating also includes at least one layer stack with one (AlCrTiSi) X mixed layer, followed by another (TizSi1-z)X layer, followed by another (AlCrTiSi) X mixed layer, followed by another (AlyCr1-y)X layer.