Rotary Patents (Class 204/199)
  • Patent number: 11908698
    Abstract: The invention relates to a method for plating a recess in a substrate, a device for plating a recess in a substrate and a system for plating a recess in a substrate comprising the device. The method for plating a recess in a substrate comprises the following steps: Providing a substrate with a substrate surface comprising at least one recess, applying a replacement gas to the recess to replace an amount of ambient gas in the recess to at least partially clear the recess from the ambient gas, applying a processing fluid to the recess, wherein the replacement gas dissolves in the processing fluid to at least partially clear the recess from the replacement gas, and plating the recess.
    Type: Grant
    Filed: October 1, 2021
    Date of Patent: February 20, 2024
    Assignee: SEMSYSCO GMBH
    Inventors: Franz Markut, Thomas Wirnsberger, Oliver Knoll, Andreas Gleissner, Harald Okorn-Schmidt, Philipp Engesser
  • Patent number: 10538856
    Abstract: An apparatus for electro-polishing an object that has a complex shape that defines a cavity. The apparatus includes an electrode that is configured to closely engage a predetermined location of the object. The electrode is configured to be electrically connected to a power supply.
    Type: Grant
    Filed: May 2, 2017
    Date of Patent: January 21, 2020
    Assignee: General Electric Company
    Inventors: Manuel Acosta, James J. O'Shea
  • Patent number: 10414103
    Abstract: A cover plate, a method of manufacturing the cover plate, and an electronic device having the cover plate are provided. The cover plate includes a substrate, at least one slot defined in the substrate and penetrating through the substrate, and a filling layer received in the slot including an insulating layer and a gel layer located on the insulating layer.
    Type: Grant
    Filed: August 3, 2017
    Date of Patent: September 17, 2019
    Assignee: Guangdong Oppo Mobile Telecommunications Corp., Ltd.
    Inventors: Jing Li, Guangming Yang, Qingguo Gong
  • Patent number: 10238187
    Abstract: A fastener stringer includes a row of elements on which cured coating film is formed at sites where it is difficult to be coated by a roll coating method, preferably over the entire exposed surface, without incorporating any conductive wire in a fastener tape. A fastener stringer includes a row of elements and a fastener tape, at least one side edge of the fastener tape having insulation properties, the row of the elements being attached to the one side edge of the fastener tape, wherein each element includes a pair of leg portions and a head portion, the head portion having an engaging region for engaging with an opposing element when constructing a fastener chain, and wherein cured coating film is formed at least at a center portion in a front and back direction of the fastener tape on an end surface of the head portions.
    Type: Grant
    Filed: December 25, 2014
    Date of Patent: March 26, 2019
    Assignee: YKK Corporation
    Inventors: Syoso Yamamoto, Hiroshi Goto, Tatsuo Mizuno
  • Patent number: 10023970
    Abstract: Methods, systems, and apparatus for plating a metal onto a work piece are described. In one aspect, an apparatus includes a plating chamber, a substrate holder, an anode chamber housing an anode, an ionically resistive ionically permeable element positioned between a substrate and the anode chamber during electroplating, an auxiliary cathode located between the anode and the ionically resistive ionically permeable element, and an insulating shield with an opening in its central region. The insulating shield may be movable with respect to the ionically resistive ionically permeable element to vary a distance between the shield and the ionically resistive ionically permeable element during electroplating.
    Type: Grant
    Filed: October 18, 2017
    Date of Patent: July 17, 2018
    Assignee: Novellus Systems, Inc.
    Inventors: Zhian He, David W. Porter, Jonathan D. Reid, Frederick D. Wilmot
  • Patent number: 9822461
    Abstract: Methods, systems, and apparatus for plating a metal onto a work piece are described. In one aspect, an apparatus includes a plating chamber, a substrate holder, an anode chamber housing an anode, an ionically resistive ionically permeable element positioned between a substrate and the anode chamber during electroplating, an auxiliary cathode located between the anode and the ionically resistive ionically permeable element, and an insulating shield with an opening in its central region. The insulating shield may be movable with respect to the ionically resistive ionically permeable element to vary a distance between the shield and the ionically resistive ionically permeable element during electroplating.
    Type: Grant
    Filed: November 28, 2012
    Date of Patent: November 21, 2017
    Assignee: Novellus Systems, Inc.
    Inventors: Zhian He, David W. Porter, Jonathan D. Reid, Frederick D. Wilmot
  • Patent number: 9315916
    Abstract: An electrode structure of the present invention includes: an aluminum electrode which is to be in contact with a surface of an aluminum base; a fixing member for fixing the aluminum electrode on the surface of the aluminum base; an elastic member provided between the fixing member and the aluminum base; a lead wire which is electrically connected to the aluminum electrode at least under a certain condition; and a cover member which is tightly closed with the lead wire penetrating through an opening.
    Type: Grant
    Filed: November 25, 2011
    Date of Patent: April 19, 2016
    Assignee: SHARP KABUSHIKI KAISHA
    Inventors: Hidekazu Hayashi, Kiyoshi Minoura, Akinobu Isurugi
  • Patent number: 8871065
    Abstract: The invention relates to an equipment for the surface treatment of parts (4), that comprises a plurality of treatment vats arranged in series and comprising rotating drums (2) provided with means for temporarily attaching the parts to be processed and having their axes (XX?) rotatingly mounted horizontally so that the major portion of each drum (2) is submerged in the processing liquid contained in the corresponding vat, and a conveyor line (14) for supplying each drum (2) with parts to be processed and for removing from said drum the parts already processed, characterized in that the conveying process is carried out along a general axis (ZZ?), and in that the axes (XX?) of the drums are parallel relative to each other and parallel to the general axis (ZZ?) of the conveyor line.
    Type: Grant
    Filed: September 24, 2007
    Date of Patent: October 28, 2014
    Assignee: Tornos Management Holding SA
    Inventor: Frédéric Vacheron
  • Publication number: 20140076720
    Abstract: An electropolishing system that includes electropolishing fixtures. The electropolishing fixtures include pendulum assemblies configured to establish electrical contact between a device being electropolished and an anode and to reposition the device during the electropolishing process.
    Type: Application
    Filed: September 14, 2012
    Publication date: March 20, 2014
    Applicant: ABBOTT CARDIOVASCULAR SYSTEMS, INC.
    Inventors: Anthony S. Andreacchi, Randolf von Oepen, William E. Webler, Rodney Charles Ow
  • Publication number: 20140076719
    Abstract: Systems and methods for electropolishing devices are disclosed. The electropolishing system includes electropolishing fixtures configured to reposition the devices during the electropolishing process.
    Type: Application
    Filed: September 14, 2012
    Publication date: March 20, 2014
    Applicant: ABBOTT CARDIOVASCULAR SYSTEMS, INC.
    Inventors: Anthony S. Andreacchi, Randolph von Oepen, Sophia L. Wong, William E. Webler, Christoph Diederichs, Kevin J. Ehrenreich, Denis Tauz
  • Patent number: 8658006
    Abstract: A system and method is described for electropolishing tubular metallic prostheses. In one aspect, the system provides a continuously changing set of points of contact between anode and prosthesis. In another aspect, the cathode is given a conical shape to correct for current concentrations that would otherwise exist and unevenly affect the amount of electropolishing over the length of the prosthesis.
    Type: Grant
    Filed: April 12, 2010
    Date of Patent: February 25, 2014
    Assignee: Abbott Cardiovascular Systems Inc.
    Inventors: Michael R. Bialas, David P. Strauss, Robert Barbier, Duane M. DeMore, Alan Gene Tahran, Zhicheng Lin, Sophia Wong
  • Publication number: 20140008241
    Abstract: The invention refers to a method for the electrochemical machining of work pieces, such as, for example, nozzles, in particular nozzles with a blind hole. The invention also refers to a device for the electrochemical machining of work pieces. The invention is characterized by a relative movement, in particular a rotary movement during the machining between work piece and cathode. The device is characterized in that cathode and/or work piece are supported rotatably on bearings for a relative movement.
    Type: Application
    Filed: March 12, 2012
    Publication date: January 9, 2014
    Applicant: STOBA SONDERMASCHINEN GMBH
    Inventors: Oliver Gunther, Thomas Hog, Hans-Joachim Konietzni
  • Patent number: 8444832
    Abstract: The invention relates to the electrical contacting of planar goods 1 in the form of segments in in-line plants for the electrolytic and/or wet chemical treatment of the treatment side 10 of the good by applying electrical external current while keeping the upper contacting side 9 dry and dipping the treatment side 10 into the treatment liquid 11. By use of the known transport systems having upper and lower transport and/or contact means, treatment liquid 11 is transferred from the lower means to the upper ones so that the top side of the good is often inadmissibly wetted and the upper contacts are electroplated, therefore needing to be continuously de-metallized, thus requiring a larger effort. According to the invention, the level is lowered in the region of upper contacts 6. Therefore, the same cannot be wetted, even when no good is present in the region of the contacts 6. This is achieved by means of down pipes 5 which are assigned to each contact 6.
    Type: Grant
    Filed: May 8, 2009
    Date of Patent: May 21, 2013
    Assignee: Rena GmbH
    Inventor: Mathias Gutekunst
  • Patent number: 8431007
    Abstract: An electro-thinning apparatus for removing excess metal from the surface metal layer of the substrate is provided. The apparatus includes an electrolysis bath, a transportation system, an anode roller, a cathode roller, and at least one shielding plate. The electrolysis bath contains an electrolysis liquid. The transportation system is disposed in the electrolysis bath for moving a substrate from an upstream end to a downstream end. The anode roller is disposed relative to the electrolysis bath and located upstream to the transportation system. The cathode roller is located above the transportation system and located downstream to the anode roller. The at least one shielding plate is located downstream to the cathode roller. During electrolysis, the anode roller contacts a surface metal layer of the substrate while the cathode roller is partly immersed in the electrolysis liquid and away from the surface metal layer of the substrate during electrolysis.
    Type: Grant
    Filed: November 25, 2009
    Date of Patent: April 30, 2013
    Assignee: Advanced Semiconductor Engineering Inc.
    Inventors: Shin-Luh Tarng, Chao-Fu Weng
  • Publication number: 20130061920
    Abstract: A photovoltaic cell (100) is proposed. The photovoltaic cell includes a substrate (105; 105?) of semiconductor material, and a plurality of contact terminals (Tf,Tb) each one arranged on a corresponding contact area (122) of the substrate for collecting electric charges being generated in the substrate by the light. For at least one of the contact areas, the substrate includes at least one porous semiconductor region (125) extending from the contact area into the substrate for anchoring the whole corresponding contact terminal on the substrate. In the solution according to an embodiment of the invention, each porous semiconductor region has a porosity decreasing moving away from the contact area inwards the substrate. An etching module (400) and an electrolytic module (700;700?;800;800?) for processing photovoltaic cells, a production line (900) for producing photovoltaic cells, and a process for producing photovoltaic cells are also proposed.
    Type: Application
    Filed: March 12, 2011
    Publication date: March 14, 2013
    Applicant: RISE TECHNOLOGY S.R.L.
    Inventor: Marco Balucani
  • Publication number: 20130026043
    Abstract: Arrangements for plating a single surface of a thin foil are described. In one aspect, a metal foil is wrapped tightly at least partially around a plating solution drum. The drum is partially immersed in a plating solution such that the waterline of the metal plating solution is below a break point where the metallic foil strip begins to unwind from the plating solution drum. With this arrangement, one side of the metallic foil strip is exposed to the metal plating solution, while the opposing back side of the metallic foil strip does not come in substantial contact with the metal plating solution. In this manner, the exposed side of the foil is plated while the back surface of the foil is not plated. The drum may be rotated to convey the foil through the plating solution.
    Type: Application
    Filed: September 26, 2012
    Publication date: January 31, 2013
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventor: Texas Instruments Incorporated
  • Publication number: 20130008780
    Abstract: An electropolishing system including an anode, a cathode, a rolling block and a motion controller. The anode is configured to removably retain a metal device to be electropolished, and may be formed as a bar made from a solid cylindrical piece of metal or other configurations, such as wires with hooks. The anode transfers the electricity to the metal device while grooming the surface of the metal device as it contacts the rolling block. The cathode may be configured as a mesh and completes the electrical circuit. The rolling block is formed from a relatively smooth, solid material and positioned so as to allow the metal device to roll against the surface of the block. The motion controller is configured to provide vertical and horizontal movement of the anode and metal device, using force transducers to control the compression of the metal device against the rolling block.
    Type: Application
    Filed: September 13, 2012
    Publication date: January 10, 2013
    Applicant: ABBOTT CARDIOVASCULAR SYSTEMS, INC,
    Inventors: Anthony S. Andreacchi, Andreina P. Gomez, Han Juanta, Jessie Madriaga, Dan Joel Dirilo
  • Patent number: 8323459
    Abstract: An electropolishing system including an anode, a cathode, a rolling block and a motion controller. The anode is configured to removably retain a metal device to be electropolished, and may be formed as a bar made from a solid cylindrical piece of metal or other configurations, such as wires with hooks. The anode transfers the electricity to the metal device while grooming the surface of the metal device as it contacts the rolling block. The cathode may be configured as a mesh and completes the electrical circuit. The rolling block is formed from a relatively smooth, solid material and positioned so as to allow the metal device to roll against the surface of the block. The motion controller is configured to provide vertical and horizontal movement of the anode and metal device, using force transducers to control the compression of the metal device against the rolling block.
    Type: Grant
    Filed: April 10, 2008
    Date of Patent: December 4, 2012
    Assignee: Abbott Cardiovascular Systems Inc.
    Inventors: Anthony S. Andreacchi, Andreina P. Gomez, Han Juanta, Jessie Madriaga, Dan Joel Dirilo
  • Publication number: 20120261268
    Abstract: Two rotating members placed to face each other and nipping a web such that only an end of the web provided with conductivity is pressed are provided, at least one of the rotating members serves as a feeding electrode, and these rotating members are rotated about the same velocity to a transportation velocity of the web.
    Type: Application
    Filed: June 25, 2012
    Publication date: October 18, 2012
    Applicants: TORAY ADVANCED FILM CO., LTD., TORAY INDUSTRIES, INC.
    Inventors: Mamoru Kawashita, Fumiyasu Nomura, Shintaro Kuge, Toru Miyake
  • Patent number: 8206559
    Abstract: The apparatus for electrophoretic repainting of metal objects, in particular lids for containers for food use, comprises a tank (30) containing an electrophoretic bath; an electrode, immersed in the electrophoretic bath, a conveyor line (10), provided with elements for supporting lids (20), the conveyor line (10) being arranged such as to transit internally of the tank (30) in order to immerse the lids (20) in the electrophoretic bath; and a unit (40) for establishing an electrical contact with the lids (20) transiting immersed in the bath, having an opposite polarity with respect to a polarity of the electrode immersed in the bath. The contact unit (40) includes a rotation element (4) which rotates about a longitudinal axis thereof, an external lateral surface (42) thereof affording a groove (5) having a helical progression destined to receive conductive electrical means such as to contact at least an end portion (21) of the lids (20).
    Type: Grant
    Filed: February 6, 2008
    Date of Patent: June 26, 2012
    Assignee: Corima International S.r.l.
    Inventor: Gianfranco Baldassari
  • Patent number: 8057644
    Abstract: A process and apparatus utilizing at least one conformable anode (40) in a plating process to apply a plating to an article (10). A wire or other material suitable for an anode is shaped to conform to the approximate shape of a region of the article to be coated. The anode is powered by an electrical power source (44), and the article serves as the cathode. The anode and article are both immersed in a plating bath (38). The article and anode are rotated relative to one another about a central axis (22) of the article. The relative movement between the anode and the article causes a uniform plating (46) to be applied to selected regions of the article that pass the anode. Another anode (50) can be arranged in fixed relation with the article to cause plating to a separate selected region of the article concurrently with the other anode.
    Type: Grant
    Filed: July 26, 2006
    Date of Patent: November 15, 2011
    Assignee: Federal-Mogul World Wide, Inc.
    Inventors: James R. Toth, Miguel Azevedo
  • Publication number: 20110259734
    Abstract: An electroplating apparatus for depositing a conductive material on a semiconductor wafer includes a vessel for holding an electroplating bath, a support for holding a semiconductor wafer within the vessel and beneath a surface of the bath; first and second electrodes within the vessel, between which an electrical current may flow causing conductive material to be electrolytically deposited onto the wafer, a third electrode disposed outside of the bath for applying a static electric charge to the wafer, and an electrical power supply coupled with the third electrode.
    Type: Application
    Filed: July 6, 2011
    Publication date: October 27, 2011
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chung-Liang Chang, Shau-Lin Shue
  • Patent number: 7988843
    Abstract: A method of electroplating conductive material on semiconductor wafers controls undesirable surface defects by reducing the electroplating current as the wafer is being initially immersed in a plating bath. Further defect reduction and improved bottom up plating of vias is achieved by applying a static charge on the wafer before it is immersed in the bath, in order to enhance bath accelerators used to control the plating rate. The static charge is applied to the wafer using a supplemental electrode disposed outside the plating bath.
    Type: Grant
    Filed: February 15, 2010
    Date of Patent: August 2, 2011
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chung-Liang Chang, Shau-Lin Shue
  • Publication number: 20110147230
    Abstract: A method of removing coating from a substrate may include contacting a portion of coating on a surface of a substrate to an acid.
    Type: Application
    Filed: December 13, 2010
    Publication date: June 23, 2011
    Applicant: First Solar, Inc.
    Inventors: James D. Reed, Wenming Wang
  • Patent number: 7935231
    Abstract: Embodiments of a closed-contact electroplating cup assembly that may be rapidly cleaned while an electroplating system is on-line are disclosed. One disclosed embodiment comprises a cup assembly and a cone assembly, wherein the cup assembly comprises a cup bottom comprising an opening, a seal surrounding the opening, an electrical contact structure comprising a plurality of electrical contacts disposed around the opening, and an interior cup side that is tapered inwardly in along an axial direction of the cup from a cup top toward the cup bottom.
    Type: Grant
    Filed: October 31, 2007
    Date of Patent: May 3, 2011
    Assignee: Novellus Systems, Inc.
    Inventors: Shantinath Ghongadi, Robert Rash, Jeff Hawkins, Seshasayee Varadarajan, Tariq Majid, Kousik Ganesan, Bryan Buckalew, Brian Evans
  • Patent number: 7854830
    Abstract: A system and a method for electroplating a plurality of turbine blades, comprising providing a rotatable gear for each blade, operatively connecting a mount assembly for each gear, slidably placing an electric charge on the blades.
    Type: Grant
    Filed: April 20, 2007
    Date of Patent: December 21, 2010
    Assignee: United Technologies Corporation
    Inventors: Garimella Balaji Rao, Maarten Gerard Pieter Rijs
  • Patent number: 7850830
    Abstract: A process employing a rack having an article carrier that is movably supported on a frame and mechanically coupled for translating movement from a motor to the article carrier to effect movement of an article during processing to provide more uniform surface treatment, reducing or eliminating the need for shielding.
    Type: Grant
    Filed: May 11, 2007
    Date of Patent: December 14, 2010
    Assignee: Lacks Enterprises, Inc.
    Inventors: Trevor W. Richardson, John A. Piselli
  • Patent number: 7811422
    Abstract: A wafer plating apparatus has a rotor in a head including wafer retainers which properly hold a wafer on the rotor in position. A seal on the head seals plating bath liquid away from the edges of the wafer. After plating is completed and the wafer is moved away from the seal, the wafer retainers prevent the wafer from sticking to the seal. The rotor may include a backing plate adapted to support a wafer during processing, with the wafer retainers pivotally attached to the backing plate. Movement of the backing plate relative to a seal may move the wafer retainers between open and closed or engaged positions.
    Type: Grant
    Filed: February 14, 2007
    Date of Patent: October 12, 2010
    Assignee: Semitool, Inc.
    Inventor: Nolan L. Zimmerman
  • Patent number: 7797855
    Abstract: A heating apparatus 2 comprises a housing 20; a flat heating chamber 4 which is provided in the housing 2 and adapted to heat a wafer W used as a substrate, with one side of the heating chamber 4 opening for carrying in and carrying out the wafer; and a heating plates 44, 45 provided in the heating chamber 4 such that the wafer W can be heated from both above and below. A cooling plate 3 is provided in the housing 20 located in the vicinity of the opening of the heating chamber 4, for cooling the wafer W after being heated by the heating plates 44, 45. Additionally, a carrying means is provided in the housing 20 for carrying the wafer W between an upper position of the cooling plate 3 and the interior of the heating chamber 4 such that a heat treatment for the wafer W can be performed with the wafer W being held in the heating chamber 4.
    Type: Grant
    Filed: August 18, 2006
    Date of Patent: September 21, 2010
    Assignee: Tokyo Electron Limited
    Inventors: Tetsuo Fukuoka, Masami Akimoto, Takahiro Kitano, Yoshio Kimura, Shinichi Hayashi, Hikaru Ito
  • Patent number: 7776189
    Abstract: An apparatus and method are provided for simultaneously electropolishing a plurality of metallic stents. A plurality of elongated members on the apparatus are movably engaged with a plate such that movement of the plate relative to the elongated members causes each of the elongated members to rotate on its respective longitudinal axis when immersed in an electrolytic solution. A continuous cathode is located in close proximity to each of the elongated members when they are immersed in the electrolytic solution.
    Type: Grant
    Filed: March 7, 2006
    Date of Patent: August 17, 2010
    Assignees: Abbott Laboratories, Accelent Inc.
    Inventors: Sanjay Shrivastava, Frank Moloney, Travis Yribarren, Jeffrey Farina, John Thomas, James Young
  • Patent number: 7758732
    Abstract: A method for applying a strike voltage to one or more substrates during plating. During this method, the substrates are moved in a planetary manner while being held at their exterior edges by a set of parallel mandrels. (The substrates are held in a mutually parallel orientation, typically vertically, during plating.) A voltage is applied to the substrates via a contact pin, a contact plate, a set of ball bearings, a rack end-plate, and the mandrels.
    Type: Grant
    Filed: February 13, 2009
    Date of Patent: July 20, 2010
    Assignee: WD Media, Inc.
    Inventors: Anthony Calcaterra, David Knox
  • Publication number: 20100078330
    Abstract: A conductive surface 5 of a film 4 is plated with copper by allowing the film 4 to pass through a plating solution 7 in a plating bath 6 while conveying the film in a direction indicated by the arrow. Air knife devices 20A and 20B are disposed between the plating solution 7 and a next cathode roller 1B so as to face a conductive surface 5 of the film 4. The air knife devices 20A and 20B remove liquid and moisture on the conductive surface 5 by jetting heated air to the conductive surface 5 drawn out of the plating solution 7. Accordingly, even when the conductive surface 5 comes in contact with the next cathode roller 1B, developed silver is not dissolved, thereby preventing the silver contamination of the cathode rollers 1B and 1C.
    Type: Application
    Filed: June 20, 2006
    Publication date: April 1, 2010
    Applicant: FUJIFILM CORPORATION
    Inventor: Tomoyoshi Hyodo
  • Patent number: 7686927
    Abstract: The orientation of a wafer with respect to the surface of an electrolyte is controlled during an electroplating process. The wafer is delivered to an electrolyte bath along a trajectory normal to the surface of the electrolyte. Along this trajectory, the wafer is angled before entry into the electrolyte for angled immersion. A wafer can be plated in an angled orientation or not, depending on what is optimal for a given situation. Also, in some designs, the wafer's orientation can be adjusted actively during immersion or during electroplating, providing flexibility in various electroplating scenarios.
    Type: Grant
    Filed: August 25, 2006
    Date of Patent: March 30, 2010
    Assignee: Novellus Systems, Inc.
    Inventors: Jonathan D. Reid, Steven T. Mayer, Seshasayee Varadarajan, David C. Smith, Evan E. Patton, Dinesh S. Kalakkad, Gary Lind, Richard S. Hill
  • Publication number: 20100074834
    Abstract: In an apparatus for surface-treating a carbon fiber, wherein the carbon fiber is heated by resistive heating, a carbon-containing gas is disposed on the carbon fiber, and carbon nanotubes are grown on a surface of the carbon fiber.
    Type: Application
    Filed: February 6, 2009
    Publication date: March 25, 2010
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: Ha-jin KIM
  • Patent number: 7682498
    Abstract: A work piece is electroplated or electroplanarized using an azimuthally asymmetric electrode. The azimuthally asymmetric electrode is rotated with respect to the work piece (i.e., either or both of the work piece and the electrode may be rotating). The azimuthal asymmetry provides a time-of-exposure correction to the current distribution reaching the work piece. In some embodiments, the total current is distributed among a plurality of electrodes in a reaction cell in order to tailor the current distribution in the electrolyte over time. Focusing elements may be used to create “virtual electrode” in proximity to the surface of the work piece to further control the current distribution in the electrolyte during plating or planarization.
    Type: Grant
    Filed: July 11, 2005
    Date of Patent: March 23, 2010
    Assignee: Novellus Systems, Inc.
    Inventors: Steven T. Mayer, John S. Drewery
  • Publication number: 20100059390
    Abstract: The present invention relates to an apparatus and a method of electrochemical mechanical polishing (ECMP) for microelectronics applications. The apparatus and method of electrochemical mechanical polishing can be used planarize NiP substrate for a magnetic storage medium and for a process which allows polishing with a controlled surface finish, and a set of corresponding polishing electrolytes and slurry.
    Type: Application
    Filed: November 7, 2007
    Publication date: March 11, 2010
    Inventor: Yuzhuo Li
  • Publication number: 20090288955
    Abstract: A partial plating method capable of applying fine hard gold plating, a laser plating device capable of applying partial plating to a minute region with high positional precision, and a plated member. The partial plating method comprising plating a region to be plated by projecting a laser beam having a wavelength of 330 nm or more and 450 nm or less. A laser plating device comprises a plating tank, a laser oscillator for emitting a laser beam, a conveying device for conveying a member to be plated, a photoelectronic sensor for detecting the position of a positioning hole of the member to be plated, and a galvanometer scanner having a galvanometer mirror capable of scanning the laser beam. The plated member is applied with fine spot plating by the laser plating.
    Type: Application
    Filed: August 7, 2007
    Publication date: November 26, 2009
    Applicants: Autonetworks Technologies, Ltd., Sumitomo Wiring Systems, Ltd., Sumitomo Electric Industries, Ltd.
    Inventor: Koukichi Haga
  • Patent number: 7622029
    Abstract: An electropolishing device for polishing a cylindrical medical device such as a stent includes anodes in the form of rollers arranged to contact an exterior surface of the device. A drive mechanism rotates the anodes periodically during the electropolishing process to change a contact point between the anodes and the medical device. A tilting mechanism can also be used for periodically tilting the anodes during the electropolishing process to allow bubbles to escape from one end of the stent.
    Type: Grant
    Filed: August 11, 2006
    Date of Patent: November 24, 2009
    Assignee: Innovational Holdings, LLC.
    Inventors: Stephen Hunter Diaz, Jeffrey Bruce Anderson
  • Patent number: 7618528
    Abstract: Methods and apparatuses for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate. An apparatus in accordance with one embodiment includes a support member configured to releasably carry a microelectronic substrate and first and second electrodes spaced apart from each other and from the microelectronic substrate. A polishing medium is positioned between the electrodes and the support member and has a polishing surface positioned to contact the microelectronic substrate. At least a portion of the first and second electrodes can be recessed from the polishing surface. A liquid, such as an electrolytic liquid, can be provided in the recess, for example, through flow passages in the electrodes and/or the polishing medium. A variable electrical signal is passed from at least one of the electrodes, through the electrolyte and to the microelectronic substrate to remove material from the substrate.
    Type: Grant
    Filed: December 27, 2006
    Date of Patent: November 17, 2009
    Assignee: Micron Technology, Inc.
    Inventors: Whonchee Lee, Scott E. Moore, Scott G. Meikle
  • Patent number: 7550070
    Abstract: An electrode assembly includes a distribution plate having a plurality of grooves that communicate with openings in an overlying polishing pad layer. The grooves include end openings that allow for draining of process solution, both during processing and subsequent cleaning/rinsing of the pad. Drainage occurs continually during processing, cleaning and rinsing, and so is constricted through the end openings relative to the grooves, to prevent wastage. The end openings are sufficiently large, however, to substantially completely drain fluids from the grooves between steps without delaying robotic motions.
    Type: Grant
    Filed: February 3, 2006
    Date of Patent: June 23, 2009
    Assignee: Novellus Systems, Inc.
    Inventors: Bulent M. Basol, Jeffrey Bogart
  • Patent number: 7544283
    Abstract: A system for removing a thin metal film is disclosed. The system comprises an inclined metal plate electrode for guiding a downward electrolyte flow, an auxiliary electrode placed on either the upstream or downstream side of the metal plate electrode such that a part of the auxiliary electrode is immersed into the electrolyte, and a power supply for applying a DC voltage to the both electrodes. The system is used to remove a metal thin film on the surface of an insulator by making the electrolyte flowing down the metal plate electrode strike against the metal thin film while the DC voltage is applied to the metal plate electrode and auxiliary electrode.
    Type: Grant
    Filed: April 11, 2005
    Date of Patent: June 9, 2009
    Assignee: Hitachi Zosen Corporation
    Inventors: Hiroyuki Daiku, Hidehiko Maehata, Masanori Tsukahara, Shogo Hamada, Tetsuya Inoue, Hiroshi Hamasaki
  • Patent number: 7520966
    Abstract: An electropolishing device for polishing a cylindrical medical device such as a stent includes anodes in the form of rollers arranged to contact an exterior surface of the device. A drive mechanism rotates the anodes periodically during the electropolishing process to change a contact point between the anodes and the medical device. A tilting mechanism can also be used for periodically tilting the anodes during the electropolishing process to allow bubbles to escape from one end of the stent.
    Type: Grant
    Filed: August 11, 2006
    Date of Patent: April 21, 2009
    Assignee: Innovational Holdings, LLC
    Inventors: Stephen Hunter Diaz, Jeffrey Bruce Anderson
  • Publication number: 20090090633
    Abstract: A processing system, electroplating cell, transport system, cathode contact subsystem and method of providing a cathode contact to the articles being transported within an electroplating cell. The processing system may include a loading station, pre-processing station, electroplating station, post-processing station, unloading station, and a transport system that transports the articles to the various stations. The electroplating cell comprises a container to support a plating fluid bath, and an anode electrode. In one embodiment, the cathode contact system provides a cathode contact to the articles by way of the transport system's electrically-conductive, conveyor structure. In another embodiment, the cathode contact system comprises an electrically-conductive moving conveyor structure adapted to make cathode contact to said articles and move substantially in synchronous with the articles.
    Type: Application
    Filed: October 6, 2008
    Publication date: April 9, 2009
    Applicant: Technic Inc.
    Inventor: Daniel James Gramarossa
  • Patent number: 7501049
    Abstract: ECM machine for electrochemically machining metallic workpieces by anodic dissolution of the workpiece by means of an electrolyte and an applied dc voltage, comprising at least one revolving table for mounting the workpiece or a workpiece carrier, as well as a portal with a transverse girder, at which one or two cathodes are provided, the at least one revolving table being rotatable about a vertical axis and being movable along horizontal guides linearly with respect to the revolving table. The transverse girder is movable vertically at vertical guides of the portal, transverse girder being rotatable about a horizontal axis of rotation. The cathode or cathodes are clampable each at one or at a common clamping device at the transverse girder and/or movable linearly along the transverse girder at least at one horizontal guide.
    Type: Grant
    Filed: August 17, 2005
    Date of Patent: March 10, 2009
    Assignee: Leistritz Aktiengesellschaft
    Inventor: Georg Schmidt
  • Patent number: 7501048
    Abstract: The invention provides a method for electrolytically increasing the thickness of an electrically conductive pattern on a dielectric substrate, comprising the steps of immersing the substrate with the pattern present thereon in an electrolytic bath, electrically contacting in the electrolytic bath a negatively charged electrode with the pattern during immersion of the substrate, and effecting contacting movement in the electrolytic bath of the electrode and the pattern with respect to each other during immersion of the substrate. The invention furthermore provides a device for electrolytically increasing the thickness of an electrically conductive pattern on a dielectric substrate.
    Type: Grant
    Filed: February 8, 2005
    Date of Patent: March 10, 2009
    Assignee: Meco Equipment Engineers B.V.
    Inventors: Peter Jacobus Gerardus Loermans, Augustinus Cornelis Maria Van De Ven
  • Patent number: 7485258
    Abstract: A method and device for sterilizing containers in which a plasma treatment is executed through excitation of an electromagnetic oscillation so that the plasma is excited in a vacuum in the vicinity of the container regions to be sterilized. Between arrival and discharge, the container regions to be sterilized are moved closer to the oscillation-generating device in the chamber, with continuous movement of the container and/or of the oscillation-generating device for one or more predetermined time intervals in such a way that a plasma is excited in these regions inside and/or outside the container. The chamber is provided with a transport apparatus inside it, which produces an essentially rotating motion of the container during the transport from the arrival to the discharge in the chamber.
    Type: Grant
    Filed: July 9, 2002
    Date of Patent: February 3, 2009
    Assignee: Robert Bosch GmbH
    Inventors: Kurt Burger, Guenter Schneider, Thomas Beck, Wolfgang Szczerba, Bernd Wilke, Johannes Rauschnabel, Sascha Henke, Bernd Goetzelmann, Heinrich Van De Loecht, Wolfgang Schmitt
  • Publication number: 20090026068
    Abstract: A revolution member supporting apparatus holds and rotates a disc-shaped object (object to be rotated) such as a semiconductor wafer. The revolution member supporting apparatus includes a rotatable member which rotates about an axis of rotation, and a plurality of holding members which are disposed along a circle having a center corresponding to the axis of rotation of the rotatable member. The holding members revolve around the axis of rotation when the rotatable member rotates and are allowed to swing about their own central axes.
    Type: Application
    Filed: September 16, 2008
    Publication date: January 29, 2009
    Inventors: Akihisa Hongo, Ichiro Katakabe, Shinya Morisawa
  • Publication number: 20080156639
    Abstract: An electrochemical discharge machining device includes a base, a sensor disposed on the base, a shaft rotatably disposed on the base, an electrode disposed at one end of the shaft and contacting with a work piece, an isolating element disposed between the sensor and the shaft, and a control module connected to the sensor. Current flows to the electrode via the shaft to machine the work piece, and the force exerted on the electrode by the work piece is transmitted via the shaft and the isolating element to the sensor converting the force into a signal sent to the control module for raising or lowering the base to maintain contact between the electrode and the work piece. The sensor serves as a detecting mechanism to ensure appropriate contact between the electrode and the work piece.
    Type: Application
    Filed: April 2, 2007
    Publication date: July 3, 2008
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Chao-Chuang Mai, Chin-Hui Chen, Ming-Ji Chen, Der-Shuen Chen
  • Patent number: 7341649
    Abstract: The present invention deposits a conductive material from an electrolyte solution to a predetermined area of a wafer. The steps that are used when making this application include applying the conductive material to the predetermined area of the wafer using an electrolyte solution disposed on a surface of the wafer, when the wafer is disposed between a cathode and an anode, and preventing accumulation of the conductive material to areas other than the predetermine area by mechanically polishing the other areas while the conductive material is being applied.
    Type: Grant
    Filed: November 12, 2002
    Date of Patent: March 11, 2008
    Assignee: Novellus Systems, Inc.
    Inventor: Homayoun Talieh
  • Patent number: 7285191
    Abstract: A phosphate coating apparatus for depositing a phosphate coating on a metal material by electrolyzing the metal material in a predetermined electrolysis solution includes a positive electrode and a negative electrode, of which one electrode being disposed in contact with the metal material and the other electrode being disposed away from the metal material with a predetermined distance, and the other electrode being formed into a tubular shape so as to cover the entire length of the metal material.
    Type: Grant
    Filed: March 26, 2002
    Date of Patent: October 23, 2007
    Assignee: Fujisyoji Co.Ltd.
    Inventors: Hiroshi Asakawa, Tetsuo Imatomi, Naoyuki Kobayashi, Shigemasa Takagi, Yoshihiro Fujita, Tokujiro Moriyama