Rotary Patents (Class 204/199)
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Patent number: 11908698Abstract: The invention relates to a method for plating a recess in a substrate, a device for plating a recess in a substrate and a system for plating a recess in a substrate comprising the device. The method for plating a recess in a substrate comprises the following steps: Providing a substrate with a substrate surface comprising at least one recess, applying a replacement gas to the recess to replace an amount of ambient gas in the recess to at least partially clear the recess from the ambient gas, applying a processing fluid to the recess, wherein the replacement gas dissolves in the processing fluid to at least partially clear the recess from the replacement gas, and plating the recess.Type: GrantFiled: October 1, 2021Date of Patent: February 20, 2024Assignee: SEMSYSCO GMBHInventors: Franz Markut, Thomas Wirnsberger, Oliver Knoll, Andreas Gleissner, Harald Okorn-Schmidt, Philipp Engesser
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Patent number: 10538856Abstract: An apparatus for electro-polishing an object that has a complex shape that defines a cavity. The apparatus includes an electrode that is configured to closely engage a predetermined location of the object. The electrode is configured to be electrically connected to a power supply.Type: GrantFiled: May 2, 2017Date of Patent: January 21, 2020Assignee: General Electric CompanyInventors: Manuel Acosta, James J. O'Shea
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Patent number: 10414103Abstract: A cover plate, a method of manufacturing the cover plate, and an electronic device having the cover plate are provided. The cover plate includes a substrate, at least one slot defined in the substrate and penetrating through the substrate, and a filling layer received in the slot including an insulating layer and a gel layer located on the insulating layer.Type: GrantFiled: August 3, 2017Date of Patent: September 17, 2019Assignee: Guangdong Oppo Mobile Telecommunications Corp., Ltd.Inventors: Jing Li, Guangming Yang, Qingguo Gong
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Patent number: 10238187Abstract: A fastener stringer includes a row of elements on which cured coating film is formed at sites where it is difficult to be coated by a roll coating method, preferably over the entire exposed surface, without incorporating any conductive wire in a fastener tape. A fastener stringer includes a row of elements and a fastener tape, at least one side edge of the fastener tape having insulation properties, the row of the elements being attached to the one side edge of the fastener tape, wherein each element includes a pair of leg portions and a head portion, the head portion having an engaging region for engaging with an opposing element when constructing a fastener chain, and wherein cured coating film is formed at least at a center portion in a front and back direction of the fastener tape on an end surface of the head portions.Type: GrantFiled: December 25, 2014Date of Patent: March 26, 2019Assignee: YKK CorporationInventors: Syoso Yamamoto, Hiroshi Goto, Tatsuo Mizuno
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Patent number: 10023970Abstract: Methods, systems, and apparatus for plating a metal onto a work piece are described. In one aspect, an apparatus includes a plating chamber, a substrate holder, an anode chamber housing an anode, an ionically resistive ionically permeable element positioned between a substrate and the anode chamber during electroplating, an auxiliary cathode located between the anode and the ionically resistive ionically permeable element, and an insulating shield with an opening in its central region. The insulating shield may be movable with respect to the ionically resistive ionically permeable element to vary a distance between the shield and the ionically resistive ionically permeable element during electroplating.Type: GrantFiled: October 18, 2017Date of Patent: July 17, 2018Assignee: Novellus Systems, Inc.Inventors: Zhian He, David W. Porter, Jonathan D. Reid, Frederick D. Wilmot
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Patent number: 9822461Abstract: Methods, systems, and apparatus for plating a metal onto a work piece are described. In one aspect, an apparatus includes a plating chamber, a substrate holder, an anode chamber housing an anode, an ionically resistive ionically permeable element positioned between a substrate and the anode chamber during electroplating, an auxiliary cathode located between the anode and the ionically resistive ionically permeable element, and an insulating shield with an opening in its central region. The insulating shield may be movable with respect to the ionically resistive ionically permeable element to vary a distance between the shield and the ionically resistive ionically permeable element during electroplating.Type: GrantFiled: November 28, 2012Date of Patent: November 21, 2017Assignee: Novellus Systems, Inc.Inventors: Zhian He, David W. Porter, Jonathan D. Reid, Frederick D. Wilmot
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Patent number: 9315916Abstract: An electrode structure of the present invention includes: an aluminum electrode which is to be in contact with a surface of an aluminum base; a fixing member for fixing the aluminum electrode on the surface of the aluminum base; an elastic member provided between the fixing member and the aluminum base; a lead wire which is electrically connected to the aluminum electrode at least under a certain condition; and a cover member which is tightly closed with the lead wire penetrating through an opening.Type: GrantFiled: November 25, 2011Date of Patent: April 19, 2016Assignee: SHARP KABUSHIKI KAISHAInventors: Hidekazu Hayashi, Kiyoshi Minoura, Akinobu Isurugi
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Patent number: 8871065Abstract: The invention relates to an equipment for the surface treatment of parts (4), that comprises a plurality of treatment vats arranged in series and comprising rotating drums (2) provided with means for temporarily attaching the parts to be processed and having their axes (XX?) rotatingly mounted horizontally so that the major portion of each drum (2) is submerged in the processing liquid contained in the corresponding vat, and a conveyor line (14) for supplying each drum (2) with parts to be processed and for removing from said drum the parts already processed, characterized in that the conveying process is carried out along a general axis (ZZ?), and in that the axes (XX?) of the drums are parallel relative to each other and parallel to the general axis (ZZ?) of the conveyor line.Type: GrantFiled: September 24, 2007Date of Patent: October 28, 2014Assignee: Tornos Management Holding SAInventor: Frédéric Vacheron
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Publication number: 20140076720Abstract: An electropolishing system that includes electropolishing fixtures. The electropolishing fixtures include pendulum assemblies configured to establish electrical contact between a device being electropolished and an anode and to reposition the device during the electropolishing process.Type: ApplicationFiled: September 14, 2012Publication date: March 20, 2014Applicant: ABBOTT CARDIOVASCULAR SYSTEMS, INC.Inventors: Anthony S. Andreacchi, Randolf von Oepen, William E. Webler, Rodney Charles Ow
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Publication number: 20140076719Abstract: Systems and methods for electropolishing devices are disclosed. The electropolishing system includes electropolishing fixtures configured to reposition the devices during the electropolishing process.Type: ApplicationFiled: September 14, 2012Publication date: March 20, 2014Applicant: ABBOTT CARDIOVASCULAR SYSTEMS, INC.Inventors: Anthony S. Andreacchi, Randolph von Oepen, Sophia L. Wong, William E. Webler, Christoph Diederichs, Kevin J. Ehrenreich, Denis Tauz
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Patent number: 8658006Abstract: A system and method is described for electropolishing tubular metallic prostheses. In one aspect, the system provides a continuously changing set of points of contact between anode and prosthesis. In another aspect, the cathode is given a conical shape to correct for current concentrations that would otherwise exist and unevenly affect the amount of electropolishing over the length of the prosthesis.Type: GrantFiled: April 12, 2010Date of Patent: February 25, 2014Assignee: Abbott Cardiovascular Systems Inc.Inventors: Michael R. Bialas, David P. Strauss, Robert Barbier, Duane M. DeMore, Alan Gene Tahran, Zhicheng Lin, Sophia Wong
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Publication number: 20140008241Abstract: The invention refers to a method for the electrochemical machining of work pieces, such as, for example, nozzles, in particular nozzles with a blind hole. The invention also refers to a device for the electrochemical machining of work pieces. The invention is characterized by a relative movement, in particular a rotary movement during the machining between work piece and cathode. The device is characterized in that cathode and/or work piece are supported rotatably on bearings for a relative movement.Type: ApplicationFiled: March 12, 2012Publication date: January 9, 2014Applicant: STOBA SONDERMASCHINEN GMBHInventors: Oliver Gunther, Thomas Hog, Hans-Joachim Konietzni
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Patent number: 8444832Abstract: The invention relates to the electrical contacting of planar goods 1 in the form of segments in in-line plants for the electrolytic and/or wet chemical treatment of the treatment side 10 of the good by applying electrical external current while keeping the upper contacting side 9 dry and dipping the treatment side 10 into the treatment liquid 11. By use of the known transport systems having upper and lower transport and/or contact means, treatment liquid 11 is transferred from the lower means to the upper ones so that the top side of the good is often inadmissibly wetted and the upper contacts are electroplated, therefore needing to be continuously de-metallized, thus requiring a larger effort. According to the invention, the level is lowered in the region of upper contacts 6. Therefore, the same cannot be wetted, even when no good is present in the region of the contacts 6. This is achieved by means of down pipes 5 which are assigned to each contact 6.Type: GrantFiled: May 8, 2009Date of Patent: May 21, 2013Assignee: Rena GmbHInventor: Mathias Gutekunst
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Patent number: 8431007Abstract: An electro-thinning apparatus for removing excess metal from the surface metal layer of the substrate is provided. The apparatus includes an electrolysis bath, a transportation system, an anode roller, a cathode roller, and at least one shielding plate. The electrolysis bath contains an electrolysis liquid. The transportation system is disposed in the electrolysis bath for moving a substrate from an upstream end to a downstream end. The anode roller is disposed relative to the electrolysis bath and located upstream to the transportation system. The cathode roller is located above the transportation system and located downstream to the anode roller. The at least one shielding plate is located downstream to the cathode roller. During electrolysis, the anode roller contacts a surface metal layer of the substrate while the cathode roller is partly immersed in the electrolysis liquid and away from the surface metal layer of the substrate during electrolysis.Type: GrantFiled: November 25, 2009Date of Patent: April 30, 2013Assignee: Advanced Semiconductor Engineering Inc.Inventors: Shin-Luh Tarng, Chao-Fu Weng
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Publication number: 20130061920Abstract: A photovoltaic cell (100) is proposed. The photovoltaic cell includes a substrate (105; 105?) of semiconductor material, and a plurality of contact terminals (Tf,Tb) each one arranged on a corresponding contact area (122) of the substrate for collecting electric charges being generated in the substrate by the light. For at least one of the contact areas, the substrate includes at least one porous semiconductor region (125) extending from the contact area into the substrate for anchoring the whole corresponding contact terminal on the substrate. In the solution according to an embodiment of the invention, each porous semiconductor region has a porosity decreasing moving away from the contact area inwards the substrate. An etching module (400) and an electrolytic module (700;700?;800;800?) for processing photovoltaic cells, a production line (900) for producing photovoltaic cells, and a process for producing photovoltaic cells are also proposed.Type: ApplicationFiled: March 12, 2011Publication date: March 14, 2013Applicant: RISE TECHNOLOGY S.R.L.Inventor: Marco Balucani
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Publication number: 20130026043Abstract: Arrangements for plating a single surface of a thin foil are described. In one aspect, a metal foil is wrapped tightly at least partially around a plating solution drum. The drum is partially immersed in a plating solution such that the waterline of the metal plating solution is below a break point where the metallic foil strip begins to unwind from the plating solution drum. With this arrangement, one side of the metallic foil strip is exposed to the metal plating solution, while the opposing back side of the metallic foil strip does not come in substantial contact with the metal plating solution. In this manner, the exposed side of the foil is plated while the back surface of the foil is not plated. The drum may be rotated to convey the foil through the plating solution.Type: ApplicationFiled: September 26, 2012Publication date: January 31, 2013Applicant: TEXAS INSTRUMENTS INCORPORATEDInventor: Texas Instruments Incorporated
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Publication number: 20130008780Abstract: An electropolishing system including an anode, a cathode, a rolling block and a motion controller. The anode is configured to removably retain a metal device to be electropolished, and may be formed as a bar made from a solid cylindrical piece of metal or other configurations, such as wires with hooks. The anode transfers the electricity to the metal device while grooming the surface of the metal device as it contacts the rolling block. The cathode may be configured as a mesh and completes the electrical circuit. The rolling block is formed from a relatively smooth, solid material and positioned so as to allow the metal device to roll against the surface of the block. The motion controller is configured to provide vertical and horizontal movement of the anode and metal device, using force transducers to control the compression of the metal device against the rolling block.Type: ApplicationFiled: September 13, 2012Publication date: January 10, 2013Applicant: ABBOTT CARDIOVASCULAR SYSTEMS, INC,Inventors: Anthony S. Andreacchi, Andreina P. Gomez, Han Juanta, Jessie Madriaga, Dan Joel Dirilo
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Patent number: 8323459Abstract: An electropolishing system including an anode, a cathode, a rolling block and a motion controller. The anode is configured to removably retain a metal device to be electropolished, and may be formed as a bar made from a solid cylindrical piece of metal or other configurations, such as wires with hooks. The anode transfers the electricity to the metal device while grooming the surface of the metal device as it contacts the rolling block. The cathode may be configured as a mesh and completes the electrical circuit. The rolling block is formed from a relatively smooth, solid material and positioned so as to allow the metal device to roll against the surface of the block. The motion controller is configured to provide vertical and horizontal movement of the anode and metal device, using force transducers to control the compression of the metal device against the rolling block.Type: GrantFiled: April 10, 2008Date of Patent: December 4, 2012Assignee: Abbott Cardiovascular Systems Inc.Inventors: Anthony S. Andreacchi, Andreina P. Gomez, Han Juanta, Jessie Madriaga, Dan Joel Dirilo
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Publication number: 20120261268Abstract: Two rotating members placed to face each other and nipping a web such that only an end of the web provided with conductivity is pressed are provided, at least one of the rotating members serves as a feeding electrode, and these rotating members are rotated about the same velocity to a transportation velocity of the web.Type: ApplicationFiled: June 25, 2012Publication date: October 18, 2012Applicants: TORAY ADVANCED FILM CO., LTD., TORAY INDUSTRIES, INC.Inventors: Mamoru Kawashita, Fumiyasu Nomura, Shintaro Kuge, Toru Miyake
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Patent number: 8206559Abstract: The apparatus for electrophoretic repainting of metal objects, in particular lids for containers for food use, comprises a tank (30) containing an electrophoretic bath; an electrode, immersed in the electrophoretic bath, a conveyor line (10), provided with elements for supporting lids (20), the conveyor line (10) being arranged such as to transit internally of the tank (30) in order to immerse the lids (20) in the electrophoretic bath; and a unit (40) for establishing an electrical contact with the lids (20) transiting immersed in the bath, having an opposite polarity with respect to a polarity of the electrode immersed in the bath. The contact unit (40) includes a rotation element (4) which rotates about a longitudinal axis thereof, an external lateral surface (42) thereof affording a groove (5) having a helical progression destined to receive conductive electrical means such as to contact at least an end portion (21) of the lids (20).Type: GrantFiled: February 6, 2008Date of Patent: June 26, 2012Assignee: Corima International S.r.l.Inventor: Gianfranco Baldassari
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Patent number: 8057644Abstract: A process and apparatus utilizing at least one conformable anode (40) in a plating process to apply a plating to an article (10). A wire or other material suitable for an anode is shaped to conform to the approximate shape of a region of the article to be coated. The anode is powered by an electrical power source (44), and the article serves as the cathode. The anode and article are both immersed in a plating bath (38). The article and anode are rotated relative to one another about a central axis (22) of the article. The relative movement between the anode and the article causes a uniform plating (46) to be applied to selected regions of the article that pass the anode. Another anode (50) can be arranged in fixed relation with the article to cause plating to a separate selected region of the article concurrently with the other anode.Type: GrantFiled: July 26, 2006Date of Patent: November 15, 2011Assignee: Federal-Mogul World Wide, Inc.Inventors: James R. Toth, Miguel Azevedo
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Publication number: 20110259734Abstract: An electroplating apparatus for depositing a conductive material on a semiconductor wafer includes a vessel for holding an electroplating bath, a support for holding a semiconductor wafer within the vessel and beneath a surface of the bath; first and second electrodes within the vessel, between which an electrical current may flow causing conductive material to be electrolytically deposited onto the wafer, a third electrode disposed outside of the bath for applying a static electric charge to the wafer, and an electrical power supply coupled with the third electrode.Type: ApplicationFiled: July 6, 2011Publication date: October 27, 2011Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chung-Liang Chang, Shau-Lin Shue
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Patent number: 7988843Abstract: A method of electroplating conductive material on semiconductor wafers controls undesirable surface defects by reducing the electroplating current as the wafer is being initially immersed in a plating bath. Further defect reduction and improved bottom up plating of vias is achieved by applying a static charge on the wafer before it is immersed in the bath, in order to enhance bath accelerators used to control the plating rate. The static charge is applied to the wafer using a supplemental electrode disposed outside the plating bath.Type: GrantFiled: February 15, 2010Date of Patent: August 2, 2011Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chung-Liang Chang, Shau-Lin Shue
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Publication number: 20110147230Abstract: A method of removing coating from a substrate may include contacting a portion of coating on a surface of a substrate to an acid.Type: ApplicationFiled: December 13, 2010Publication date: June 23, 2011Applicant: First Solar, Inc.Inventors: James D. Reed, Wenming Wang
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Patent number: 7935231Abstract: Embodiments of a closed-contact electroplating cup assembly that may be rapidly cleaned while an electroplating system is on-line are disclosed. One disclosed embodiment comprises a cup assembly and a cone assembly, wherein the cup assembly comprises a cup bottom comprising an opening, a seal surrounding the opening, an electrical contact structure comprising a plurality of electrical contacts disposed around the opening, and an interior cup side that is tapered inwardly in along an axial direction of the cup from a cup top toward the cup bottom.Type: GrantFiled: October 31, 2007Date of Patent: May 3, 2011Assignee: Novellus Systems, Inc.Inventors: Shantinath Ghongadi, Robert Rash, Jeff Hawkins, Seshasayee Varadarajan, Tariq Majid, Kousik Ganesan, Bryan Buckalew, Brian Evans
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Patent number: 7854830Abstract: A system and a method for electroplating a plurality of turbine blades, comprising providing a rotatable gear for each blade, operatively connecting a mount assembly for each gear, slidably placing an electric charge on the blades.Type: GrantFiled: April 20, 2007Date of Patent: December 21, 2010Assignee: United Technologies CorporationInventors: Garimella Balaji Rao, Maarten Gerard Pieter Rijs
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Patent number: 7850830Abstract: A process employing a rack having an article carrier that is movably supported on a frame and mechanically coupled for translating movement from a motor to the article carrier to effect movement of an article during processing to provide more uniform surface treatment, reducing or eliminating the need for shielding.Type: GrantFiled: May 11, 2007Date of Patent: December 14, 2010Assignee: Lacks Enterprises, Inc.Inventors: Trevor W. Richardson, John A. Piselli
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Patent number: 7811422Abstract: A wafer plating apparatus has a rotor in a head including wafer retainers which properly hold a wafer on the rotor in position. A seal on the head seals plating bath liquid away from the edges of the wafer. After plating is completed and the wafer is moved away from the seal, the wafer retainers prevent the wafer from sticking to the seal. The rotor may include a backing plate adapted to support a wafer during processing, with the wafer retainers pivotally attached to the backing plate. Movement of the backing plate relative to a seal may move the wafer retainers between open and closed or engaged positions.Type: GrantFiled: February 14, 2007Date of Patent: October 12, 2010Assignee: Semitool, Inc.Inventor: Nolan L. Zimmerman
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Patent number: 7797855Abstract: A heating apparatus 2 comprises a housing 20; a flat heating chamber 4 which is provided in the housing 2 and adapted to heat a wafer W used as a substrate, with one side of the heating chamber 4 opening for carrying in and carrying out the wafer; and a heating plates 44, 45 provided in the heating chamber 4 such that the wafer W can be heated from both above and below. A cooling plate 3 is provided in the housing 20 located in the vicinity of the opening of the heating chamber 4, for cooling the wafer W after being heated by the heating plates 44, 45. Additionally, a carrying means is provided in the housing 20 for carrying the wafer W between an upper position of the cooling plate 3 and the interior of the heating chamber 4 such that a heat treatment for the wafer W can be performed with the wafer W being held in the heating chamber 4.Type: GrantFiled: August 18, 2006Date of Patent: September 21, 2010Assignee: Tokyo Electron LimitedInventors: Tetsuo Fukuoka, Masami Akimoto, Takahiro Kitano, Yoshio Kimura, Shinichi Hayashi, Hikaru Ito
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Patent number: 7776189Abstract: An apparatus and method are provided for simultaneously electropolishing a plurality of metallic stents. A plurality of elongated members on the apparatus are movably engaged with a plate such that movement of the plate relative to the elongated members causes each of the elongated members to rotate on its respective longitudinal axis when immersed in an electrolytic solution. A continuous cathode is located in close proximity to each of the elongated members when they are immersed in the electrolytic solution.Type: GrantFiled: March 7, 2006Date of Patent: August 17, 2010Assignees: Abbott Laboratories, Accelent Inc.Inventors: Sanjay Shrivastava, Frank Moloney, Travis Yribarren, Jeffrey Farina, John Thomas, James Young
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Patent number: 7758732Abstract: A method for applying a strike voltage to one or more substrates during plating. During this method, the substrates are moved in a planetary manner while being held at their exterior edges by a set of parallel mandrels. (The substrates are held in a mutually parallel orientation, typically vertically, during plating.) A voltage is applied to the substrates via a contact pin, a contact plate, a set of ball bearings, a rack end-plate, and the mandrels.Type: GrantFiled: February 13, 2009Date of Patent: July 20, 2010Assignee: WD Media, Inc.Inventors: Anthony Calcaterra, David Knox
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Publication number: 20100078330Abstract: A conductive surface 5 of a film 4 is plated with copper by allowing the film 4 to pass through a plating solution 7 in a plating bath 6 while conveying the film in a direction indicated by the arrow. Air knife devices 20A and 20B are disposed between the plating solution 7 and a next cathode roller 1B so as to face a conductive surface 5 of the film 4. The air knife devices 20A and 20B remove liquid and moisture on the conductive surface 5 by jetting heated air to the conductive surface 5 drawn out of the plating solution 7. Accordingly, even when the conductive surface 5 comes in contact with the next cathode roller 1B, developed silver is not dissolved, thereby preventing the silver contamination of the cathode rollers 1B and 1C.Type: ApplicationFiled: June 20, 2006Publication date: April 1, 2010Applicant: FUJIFILM CORPORATIONInventor: Tomoyoshi Hyodo
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Patent number: 7686927Abstract: The orientation of a wafer with respect to the surface of an electrolyte is controlled during an electroplating process. The wafer is delivered to an electrolyte bath along a trajectory normal to the surface of the electrolyte. Along this trajectory, the wafer is angled before entry into the electrolyte for angled immersion. A wafer can be plated in an angled orientation or not, depending on what is optimal for a given situation. Also, in some designs, the wafer's orientation can be adjusted actively during immersion or during electroplating, providing flexibility in various electroplating scenarios.Type: GrantFiled: August 25, 2006Date of Patent: March 30, 2010Assignee: Novellus Systems, Inc.Inventors: Jonathan D. Reid, Steven T. Mayer, Seshasayee Varadarajan, David C. Smith, Evan E. Patton, Dinesh S. Kalakkad, Gary Lind, Richard S. Hill
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Publication number: 20100074834Abstract: In an apparatus for surface-treating a carbon fiber, wherein the carbon fiber is heated by resistive heating, a carbon-containing gas is disposed on the carbon fiber, and carbon nanotubes are grown on a surface of the carbon fiber.Type: ApplicationFiled: February 6, 2009Publication date: March 25, 2010Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventor: Ha-jin KIM
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Patent number: 7682498Abstract: A work piece is electroplated or electroplanarized using an azimuthally asymmetric electrode. The azimuthally asymmetric electrode is rotated with respect to the work piece (i.e., either or both of the work piece and the electrode may be rotating). The azimuthal asymmetry provides a time-of-exposure correction to the current distribution reaching the work piece. In some embodiments, the total current is distributed among a plurality of electrodes in a reaction cell in order to tailor the current distribution in the electrolyte over time. Focusing elements may be used to create “virtual electrode” in proximity to the surface of the work piece to further control the current distribution in the electrolyte during plating or planarization.Type: GrantFiled: July 11, 2005Date of Patent: March 23, 2010Assignee: Novellus Systems, Inc.Inventors: Steven T. Mayer, John S. Drewery
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Publication number: 20100059390Abstract: The present invention relates to an apparatus and a method of electrochemical mechanical polishing (ECMP) for microelectronics applications. The apparatus and method of electrochemical mechanical polishing can be used planarize NiP substrate for a magnetic storage medium and for a process which allows polishing with a controlled surface finish, and a set of corresponding polishing electrolytes and slurry.Type: ApplicationFiled: November 7, 2007Publication date: March 11, 2010Inventor: Yuzhuo Li
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Publication number: 20090288955Abstract: A partial plating method capable of applying fine hard gold plating, a laser plating device capable of applying partial plating to a minute region with high positional precision, and a plated member. The partial plating method comprising plating a region to be plated by projecting a laser beam having a wavelength of 330 nm or more and 450 nm or less. A laser plating device comprises a plating tank, a laser oscillator for emitting a laser beam, a conveying device for conveying a member to be plated, a photoelectronic sensor for detecting the position of a positioning hole of the member to be plated, and a galvanometer scanner having a galvanometer mirror capable of scanning the laser beam. The plated member is applied with fine spot plating by the laser plating.Type: ApplicationFiled: August 7, 2007Publication date: November 26, 2009Applicants: Autonetworks Technologies, Ltd., Sumitomo Wiring Systems, Ltd., Sumitomo Electric Industries, Ltd.Inventor: Koukichi Haga
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Patent number: 7622029Abstract: An electropolishing device for polishing a cylindrical medical device such as a stent includes anodes in the form of rollers arranged to contact an exterior surface of the device. A drive mechanism rotates the anodes periodically during the electropolishing process to change a contact point between the anodes and the medical device. A tilting mechanism can also be used for periodically tilting the anodes during the electropolishing process to allow bubbles to escape from one end of the stent.Type: GrantFiled: August 11, 2006Date of Patent: November 24, 2009Assignee: Innovational Holdings, LLC.Inventors: Stephen Hunter Diaz, Jeffrey Bruce Anderson
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Patent number: 7618528Abstract: Methods and apparatuses for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate. An apparatus in accordance with one embodiment includes a support member configured to releasably carry a microelectronic substrate and first and second electrodes spaced apart from each other and from the microelectronic substrate. A polishing medium is positioned between the electrodes and the support member and has a polishing surface positioned to contact the microelectronic substrate. At least a portion of the first and second electrodes can be recessed from the polishing surface. A liquid, such as an electrolytic liquid, can be provided in the recess, for example, through flow passages in the electrodes and/or the polishing medium. A variable electrical signal is passed from at least one of the electrodes, through the electrolyte and to the microelectronic substrate to remove material from the substrate.Type: GrantFiled: December 27, 2006Date of Patent: November 17, 2009Assignee: Micron Technology, Inc.Inventors: Whonchee Lee, Scott E. Moore, Scott G. Meikle
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Patent number: 7550070Abstract: An electrode assembly includes a distribution plate having a plurality of grooves that communicate with openings in an overlying polishing pad layer. The grooves include end openings that allow for draining of process solution, both during processing and subsequent cleaning/rinsing of the pad. Drainage occurs continually during processing, cleaning and rinsing, and so is constricted through the end openings relative to the grooves, to prevent wastage. The end openings are sufficiently large, however, to substantially completely drain fluids from the grooves between steps without delaying robotic motions.Type: GrantFiled: February 3, 2006Date of Patent: June 23, 2009Assignee: Novellus Systems, Inc.Inventors: Bulent M. Basol, Jeffrey Bogart
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Patent number: 7544283Abstract: A system for removing a thin metal film is disclosed. The system comprises an inclined metal plate electrode for guiding a downward electrolyte flow, an auxiliary electrode placed on either the upstream or downstream side of the metal plate electrode such that a part of the auxiliary electrode is immersed into the electrolyte, and a power supply for applying a DC voltage to the both electrodes. The system is used to remove a metal thin film on the surface of an insulator by making the electrolyte flowing down the metal plate electrode strike against the metal thin film while the DC voltage is applied to the metal plate electrode and auxiliary electrode.Type: GrantFiled: April 11, 2005Date of Patent: June 9, 2009Assignee: Hitachi Zosen CorporationInventors: Hiroyuki Daiku, Hidehiko Maehata, Masanori Tsukahara, Shogo Hamada, Tetsuya Inoue, Hiroshi Hamasaki
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Patent number: 7520966Abstract: An electropolishing device for polishing a cylindrical medical device such as a stent includes anodes in the form of rollers arranged to contact an exterior surface of the device. A drive mechanism rotates the anodes periodically during the electropolishing process to change a contact point between the anodes and the medical device. A tilting mechanism can also be used for periodically tilting the anodes during the electropolishing process to allow bubbles to escape from one end of the stent.Type: GrantFiled: August 11, 2006Date of Patent: April 21, 2009Assignee: Innovational Holdings, LLCInventors: Stephen Hunter Diaz, Jeffrey Bruce Anderson
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Publication number: 20090090633Abstract: A processing system, electroplating cell, transport system, cathode contact subsystem and method of providing a cathode contact to the articles being transported within an electroplating cell. The processing system may include a loading station, pre-processing station, electroplating station, post-processing station, unloading station, and a transport system that transports the articles to the various stations. The electroplating cell comprises a container to support a plating fluid bath, and an anode electrode. In one embodiment, the cathode contact system provides a cathode contact to the articles by way of the transport system's electrically-conductive, conveyor structure. In another embodiment, the cathode contact system comprises an electrically-conductive moving conveyor structure adapted to make cathode contact to said articles and move substantially in synchronous with the articles.Type: ApplicationFiled: October 6, 2008Publication date: April 9, 2009Applicant: Technic Inc.Inventor: Daniel James Gramarossa
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Patent number: 7501049Abstract: ECM machine for electrochemically machining metallic workpieces by anodic dissolution of the workpiece by means of an electrolyte and an applied dc voltage, comprising at least one revolving table for mounting the workpiece or a workpiece carrier, as well as a portal with a transverse girder, at which one or two cathodes are provided, the at least one revolving table being rotatable about a vertical axis and being movable along horizontal guides linearly with respect to the revolving table. The transverse girder is movable vertically at vertical guides of the portal, transverse girder being rotatable about a horizontal axis of rotation. The cathode or cathodes are clampable each at one or at a common clamping device at the transverse girder and/or movable linearly along the transverse girder at least at one horizontal guide.Type: GrantFiled: August 17, 2005Date of Patent: March 10, 2009Assignee: Leistritz AktiengesellschaftInventor: Georg Schmidt
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Patent number: 7501048Abstract: The invention provides a method for electrolytically increasing the thickness of an electrically conductive pattern on a dielectric substrate, comprising the steps of immersing the substrate with the pattern present thereon in an electrolytic bath, electrically contacting in the electrolytic bath a negatively charged electrode with the pattern during immersion of the substrate, and effecting contacting movement in the electrolytic bath of the electrode and the pattern with respect to each other during immersion of the substrate. The invention furthermore provides a device for electrolytically increasing the thickness of an electrically conductive pattern on a dielectric substrate.Type: GrantFiled: February 8, 2005Date of Patent: March 10, 2009Assignee: Meco Equipment Engineers B.V.Inventors: Peter Jacobus Gerardus Loermans, Augustinus Cornelis Maria Van De Ven
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Patent number: 7485258Abstract: A method and device for sterilizing containers in which a plasma treatment is executed through excitation of an electromagnetic oscillation so that the plasma is excited in a vacuum in the vicinity of the container regions to be sterilized. Between arrival and discharge, the container regions to be sterilized are moved closer to the oscillation-generating device in the chamber, with continuous movement of the container and/or of the oscillation-generating device for one or more predetermined time intervals in such a way that a plasma is excited in these regions inside and/or outside the container. The chamber is provided with a transport apparatus inside it, which produces an essentially rotating motion of the container during the transport from the arrival to the discharge in the chamber.Type: GrantFiled: July 9, 2002Date of Patent: February 3, 2009Assignee: Robert Bosch GmbHInventors: Kurt Burger, Guenter Schneider, Thomas Beck, Wolfgang Szczerba, Bernd Wilke, Johannes Rauschnabel, Sascha Henke, Bernd Goetzelmann, Heinrich Van De Loecht, Wolfgang Schmitt
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Publication number: 20090026068Abstract: A revolution member supporting apparatus holds and rotates a disc-shaped object (object to be rotated) such as a semiconductor wafer. The revolution member supporting apparatus includes a rotatable member which rotates about an axis of rotation, and a plurality of holding members which are disposed along a circle having a center corresponding to the axis of rotation of the rotatable member. The holding members revolve around the axis of rotation when the rotatable member rotates and are allowed to swing about their own central axes.Type: ApplicationFiled: September 16, 2008Publication date: January 29, 2009Inventors: Akihisa Hongo, Ichiro Katakabe, Shinya Morisawa
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Publication number: 20080156639Abstract: An electrochemical discharge machining device includes a base, a sensor disposed on the base, a shaft rotatably disposed on the base, an electrode disposed at one end of the shaft and contacting with a work piece, an isolating element disposed between the sensor and the shaft, and a control module connected to the sensor. Current flows to the electrode via the shaft to machine the work piece, and the force exerted on the electrode by the work piece is transmitted via the shaft and the isolating element to the sensor converting the force into a signal sent to the control module for raising or lowering the base to maintain contact between the electrode and the work piece. The sensor serves as a detecting mechanism to ensure appropriate contact between the electrode and the work piece.Type: ApplicationFiled: April 2, 2007Publication date: July 3, 2008Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Chao-Chuang Mai, Chin-Hui Chen, Ming-Ji Chen, Der-Shuen Chen
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Patent number: 7341649Abstract: The present invention deposits a conductive material from an electrolyte solution to a predetermined area of a wafer. The steps that are used when making this application include applying the conductive material to the predetermined area of the wafer using an electrolyte solution disposed on a surface of the wafer, when the wafer is disposed between a cathode and an anode, and preventing accumulation of the conductive material to areas other than the predetermine area by mechanically polishing the other areas while the conductive material is being applied.Type: GrantFiled: November 12, 2002Date of Patent: March 11, 2008Assignee: Novellus Systems, Inc.Inventor: Homayoun Talieh
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Patent number: 7285191Abstract: A phosphate coating apparatus for depositing a phosphate coating on a metal material by electrolyzing the metal material in a predetermined electrolysis solution includes a positive electrode and a negative electrode, of which one electrode being disposed in contact with the metal material and the other electrode being disposed away from the metal material with a predetermined distance, and the other electrode being formed into a tubular shape so as to cover the entire length of the metal material.Type: GrantFiled: March 26, 2002Date of Patent: October 23, 2007Assignee: Fujisyoji Co.Ltd.Inventors: Hiroshi Asakawa, Tetsuo Imatomi, Naoyuki Kobayashi, Shigemasa Takagi, Yoshihiro Fujita, Tokujiro Moriyama