Rotary Patents (Class 204/212)
  • Patent number: 10428438
    Abstract: A substrate processing method of performing a predetermined processing by supplying a processing liquid to a processing region of a substrate and using processing target ions in the processing liquid, includes: arranging a template to face the substrate, the template including a passage configured to distribute the processing liquid, a direct electrode, and an indirect electrode, and the substrate including a counter electrode, which matches with the direct electrode, installed in the processing region; supplying the processing liquid to the processing region through the passage; and performing the predetermined processing on the substrate by applying a voltage to the indirect electrode to cause the processing target ions to migrate to the counter electrode side while applying a voltage between the direct electrode and the counter electrode to oxidize or reduce the processing target ions that have migrated to the counter electrode side.
    Type: Grant
    Filed: May 12, 2014
    Date of Patent: October 1, 2019
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Haruo Iwatsu, Tomohisa Hoshino, Toshiyuki Matsumoto
  • Patent number: 10399168
    Abstract: A method for producing cavities in a turbomachine disk, the cavities extending between first and second lateral surfaces of the disk, the method including positioning a ring facing the first surface, the ring including an inner periphery including protrusions complementary in shape to the cavities that are to be produced; circulating an electrolyte close to the protrusions on the ring; activating a first translational movement of the ring towards the second surface; activating a rotation of the disk; generating an electric current pulse in the electrolyte when the ring is substantially at the first surface, the pulse resulting in the ionic dissolution of the disk at the protrusions; reducing the speed of rotation to a first reduced speed, when the ring is substantially at the first surface, for a first period of time; and stopping the first translation of the ring when the ring is beyond the second surface.
    Type: Grant
    Filed: June 6, 2014
    Date of Patent: September 3, 2019
    Assignee: SAFRAN AIRCRAFT ENGINES
    Inventors: Janvier Lecomte, Jean-Michel Buelyha, Juri Kraft, Andreas Grützmacher
  • Patent number: 10396469
    Abstract: An electronic circuit is made by selectively depositing an electrically conductive material seed layer conformally upon a three-dimensional substrate via the plurality of apertures of a three-dimensional mask. The substrate is then plated with more of the same electrically conductive material, or a different electrically conductive material, on the seed layer. In the case of electroplating, a nonconductive support structure is incorporated into a conductive clamp for making electrical connection to the seed layer. An environmentally protective layer may be deposited upon the electrically conductive material to such an extent that the electronic circuit remains solderable. The three-dimensional mask may be fabricated by an additive manufacturing technique.
    Type: Grant
    Filed: June 10, 2016
    Date of Patent: August 27, 2019
    Assignee: The Charles Stark Draper Laboratory, Inc.
    Inventors: Gregory M. Fritz, Kenneth P. Vandevoordt, Rebecca A. DeFronzo
  • Patent number: 10369646
    Abstract: Provided is an electrode capable of increasing a degree of freedom in machining shape with a simple structure, an electrochemical machining apparatus using the electrode, an electrochemical machining method, and a product machined by the method. An electrode 4 has a core tube 41 formed of a material by which a second hole 101b having a direction or a curvature different from that of a first hole 101a having a predetermined curvature can be formed continuously from the first hole 101a and a coating 42 fixed to an outer periphery of the core tube 41.
    Type: Grant
    Filed: October 31, 2013
    Date of Patent: August 6, 2019
    Assignee: HODEN SEIMITSU KAKO KENKYUSHO CO., LTD.
    Inventors: Takayuki Mori, Hiroyuki Sunada, Hirotaro Hosoe
  • Patent number: 10316420
    Abstract: Lead is recycled from lead paste of lead acid batteries in a process that employs alkaline desulfurization followed by formation of plumbite that is then electrolytically converted to pure lead. Remaining insoluble lead dioxide is removed from the lead plumbite solution and reduced to produce lead oxide that can be fed back to the recovery system. Sulfate is recovered as sodium sulfate, while the so produced lead oxide can be added to lead paste for recovery.
    Type: Grant
    Filed: December 2, 2015
    Date of Patent: June 11, 2019
    Assignee: Aqua Metals Inc.
    Inventors: Robert Lewis Clarke, Samaresh Mohanta
  • Patent number: 10240248
    Abstract: In electroplating apparatus, a paddle or agitator agitates electrolyte in a vessel to provide high velocity fluid flow at the surface of a wafer. The agitator is designed and/or moved to also selectively shield part of the wafer, for example the edge of the wafer, from the electric field in the vessel. Selectively shielding may be achieved by temporally shifting the average position of the agitator towards one side of the wafer, by omitting or shortening slots in the agitator, and/or by synchronizing movement of the agitator with rotation of the wafer.
    Type: Grant
    Filed: August 10, 2016
    Date of Patent: March 26, 2019
    Assignee: Applied Materials, Inc.
    Inventors: Paul Van Valkenburg, Robert Mikkola, John L. Klocke, Paul R. McHugh, Gregory J. Wilson, Kyle Moran Hanson, Eric J. Bergman
  • Patent number: 10214831
    Abstract: The invention relates to a one-piece metal component including an electroformed metal body, the external surface of the body including, only over or to a predetermined depth, less trapped hydrogen than the rest of the electroformed metal body causing a hardening relative to the rest of the body in order to improve the wear resistance of the one-piece component while preserving a relative magnetic permeability of less than 10 and the ability to be driven or pressed fit.
    Type: Grant
    Filed: October 12, 2015
    Date of Patent: February 26, 2019
    Assignee: Nivarox-FAR S.A.
    Inventors: Philippe Dubois, Christian Charbon
  • Patent number: 10201660
    Abstract: A method and apparatus for plasma modifying a workpiece such as a medical barrel, medical barrel, vial, or blood tube is described. Plasma is provided within the lumen of the workpiece. The plasma is provided under conditions effective for plasma modification of a surface of the workpiece. A magnetic field is provided in at least a portion of the lumen. The magnetic field has an orientation and field strength effective to improve the uniformity of plasma modification of the generally cylindrical interior surface 16 of the generally cylindrical interior surface 16.
    Type: Grant
    Filed: November 25, 2013
    Date of Patent: February 12, 2019
    Assignee: SiO2 Medical Products, Inc.
    Inventors: Christopher Weikart, Becky L. Clark, Adam Stevenson, Robert S. Abrams, John Belfance, Joseph A. Jones, Thomas E. Fisk
  • Patent number: 10190232
    Abstract: Disclosed herein are electroplating systems for electroplating nickel onto a semiconductor substrate having an electroplating cell for holding an electrolyte solution during electroplating which includes a cathode chamber and an anode chamber configured to hold a nickel anode, and having an oxygen removal device arranged to reduce oxygen concentration in the electrolyte solution as it is flowed to the anode chamber during electroplating and during idle times when the system is not electroplating. Also disclosed herein are methods of electroplating nickel onto a substrate in an electroplating cell having anode and cathode chambers, which include reducing the oxygen concentration in an electrolyte solution, flowing the electrolyte solution into the anode chamber and contacting a nickel anode therein, and electroplating nickel from the electrolyte solution onto a substrate in the cathode chamber, wherein the electrolyte solution in the cathode chamber is maintained at a pH of between about 3.5 and 4.5.
    Type: Grant
    Filed: August 6, 2013
    Date of Patent: January 29, 2019
    Assignee: Lam Research Corporation
    Inventors: Bryan L. Buckalew, Thomas A. Ponnuswamy, Ben Foley, Steven T. Mayer
  • Patent number: 10174437
    Abstract: A wafer is placed into a chuck assembly within an electroplating system. The chuck assembly includes a backing plate assembly engageable with a ring. A hub may be provided on one side of the backing plate assembly for attaching the chuck assembly to a rotor of a processor for electroplating a wafer. A wafer plate may be provided on the other side of the backing plate assembly. The ring has contact fingers electrically connected to a ring bus bar, and with the ring bus bar electrically connected to a power source in the processor via the backing plate assembly when the ring is engaged to the backing plate assembly. A wafer seal on the ring overlies the contact fingers. A chuck seal may be provided around a perimeter. Maintenance of the electrical contacts and the seal is performed remotely from the processors.
    Type: Grant
    Filed: June 30, 2016
    Date of Patent: January 8, 2019
    Assignee: Applied Materials, Inc.
    Inventors: Randy A. Harris, Michael Windham
  • Patent number: 10167565
    Abstract: A method and device for electrodeposition in cylindrical geometry. A method for electrochemically depositing a thin layer on a flexible substrate, comprising: providing, in an electrolysis bath, a first closed cylinder in a second hollow cylinder, applying the flexible substrate to one of the surfaces chosen from the outer surface of the first cylinder and the inner surface of the second, the flexible substrate forming a first electrode, providing, in the electrolysis bath, a second electrode, and applying a potential difference between the first electrode and the second electrode in order to electrodeposit the thin layer on the flexible substrate.
    Type: Grant
    Filed: March 25, 2014
    Date of Patent: January 1, 2019
    Assignees: ELECTRICITE DE FRANCE, CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE-CNRS-
    Inventors: Gregory Savidand, Nicolas Loones, Daniel Lincot, Elisabeth Chassaing
  • Patent number: 10145673
    Abstract: A method for obtaining distance measurements for a plating ring assembly and related device are provided. Embodiments include attaching a measurement device to a plating ring assembly, the plating ring assembly including: an outer ring, wherein the measurement device is attached to the outer ring and configured to rotate along the outer ring, a seal extending from a bottom surface of the outer ring along a circumference of the plating ring assembly, contact fingers located along the circumference of the plating ring assembly, between the outer ring and the seal, rotating the measurement device along the circumference of the outer ring by rotating the measurement device or the plating ring assembly; and obtaining critical dimensions of and between the seal and contact fingers with the measurement device.
    Type: Grant
    Filed: December 29, 2017
    Date of Patent: December 4, 2018
    Assignee: GLOBALFOUNDRIES INC.
    Inventor: Sven Heiko Grünzig
  • Patent number: 10094034
    Abstract: The embodiments herein relate to methods and apparatus for electroplating one or more materials onto a substrate. In many cases the material is a metal and the substrate is a semiconductor wafer, though the embodiments are no so limited. Typically, the embodiments herein utilize a channeled plate positioned near the substrate, creating a cross flow manifold defined on the bottom by the channeled plate, on the top by the substrate, and on the sides by a cross flow confinement ring. Also typically present is an edge flow element configured to direct electrolyte into a corner formed between the substrate and substrate holder. During plating, fluid enters the cross flow manifold both upward through the channels in the channeled plate, and laterally through a cross flow side inlet positioned on one side of the cross flow confinement ring. The flow paths combine in the cross flow manifold and exit at the cross flow exit, which is positioned opposite the cross flow inlet.
    Type: Grant
    Filed: October 27, 2015
    Date of Patent: October 9, 2018
    Assignee: Lam Research Corporation
    Inventors: Gabriel Hay Graham, Bryan L. Buckalew, Steven T. Mayer, Robert Rash, James Isaac Fortner, Lee Peng Chua
  • Patent number: 10041185
    Abstract: Provided are a cylinder plating apparatus and a cylinder plating method, in which the distance between an insoluble electrode and a cylinder to be processed can be kept constant regardless of the diameter of the cylinder to be processed, and the surface area of the insoluble electrode is increased to reduce the current density of the insoluble electrode, thereby being capable of reducing burden on the insoluble electrode. The cylinder plating apparatus is configured to plate an outer peripheral surface of the cylinder to be processed in such a manner that a pair of the insoluble electrodes each having a shape in which at least a lower part thereof is curved inward and being constructed such that at least the lower part has a comb-like portion are brought close to both side surfaces of the cylinder to be processed with predetermined intervals.
    Type: Grant
    Filed: February 26, 2015
    Date of Patent: August 7, 2018
    Assignee: THINK LABORATORY CO., LTD.
    Inventor: Kazuhiro Sukenari
  • Patent number: 10011917
    Abstract: Various embodiments herein relate to methods and apparatus for electroplating metal onto substrates. In various cases, a reference electrode may be modified to promote improved electroplating results. The modifications may relate to one or more of the reference electrode's shape, position, relative conductivity compared to the electrolyte, or other design feature. In some particular examples the reference electrode may be dynamically changeable, for example having a changeable shape and/or position. In a particular example the reference electrode may be made of multiple segments. The techniques described herein may be combined as desired for individual applications.
    Type: Grant
    Filed: March 20, 2015
    Date of Patent: July 3, 2018
    Assignee: Lam Research Corporation
    Inventors: Zhian He, Ashwin Ramesh, Shantinath Ghongadi
  • Patent number: 9909226
    Abstract: A solid electrolyte membrane (13) is arranged on a surface of an anode (11) between the anode (11) and a substrate (B) that serves as a cathode. The solid electrolyte membrane (13) is brought into contact with the substrate (B). At the same time, a metal film (F) is formed on the surface of the substrate (B) by causing metal to precipitate onto the surface of the substrate (B) from metal ions through application of voltage between the anode (11) and the substrate (B) in a first contact state where the solid electrolyte membrane (13) contacts the substrate (B). The metal ions are contained inside the solid electrolyte membrane (13).
    Type: Grant
    Filed: August 20, 2014
    Date of Patent: March 6, 2018
    Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventors: Motoki Hiraoka, Hiroshi Yanagimoto, Yuki Sato
  • Patent number: 9891039
    Abstract: A method for obtaining distance measurements for a plating ring assembly and related device are provided. Embodiments include attaching a measurement device to a plating ring assembly, the plating ring assembly including: an outer ring, wherein the measurement device is attached to the outer ring and configured to rotate along the outer ring, a seal extending from a bottom surface of the outer ring along a circumference of the plating ring assembly, contact fingers located along the circumference of the plating ring assembly, between the outer ring and the seal, rotating the measurement device along the circumference of the outer ring by rotating the measurement device or the plating ring assembly; and obtaining critical dimensions of and between the seal and contact fingers with the measurement device.
    Type: Grant
    Filed: March 14, 2017
    Date of Patent: February 13, 2018
    Assignee: GLOBALFOUNDRIES INC.
    Inventor: Sven Heiko Grünzig
  • Patent number: 9822460
    Abstract: Disclosed herein are methods and apparatuses for electroplating which employ seed layer detection. Such methods and related apparatuses may operate by selecting a wafer for processing, measuring from its surface one or more in-process color signals having one or more color components, calculating one or more metrics, each metric indicative of the difference between one of the in-process color signals and a corresponding set of reference color signals, determining whether an acceptable seed layer is present on the wafer surface based on whether a predetermined number of the one or more metrics are within an associated predetermined range which individually corresponds to that metric, and either electroplating the wafer when an acceptable seed layer is present or otherwise designating the wafer unacceptable for electroplating. The foregoing may then be repeated for one or more additional wafers to electroplate multiple wafers from a set of wafers.
    Type: Grant
    Filed: January 21, 2014
    Date of Patent: November 21, 2017
    Assignee: Lam Research Corporation
    Inventors: Daniel Mark Dinneen, Steven T. Mayer
  • Patent number: 9721800
    Abstract: Disclosed are pre-wetting apparatus designs and methods. These apparatus designs and methods are used to pre-wet a wafer prior to plating a metal on the surface of the wafer. Disclosed compositions of the pre-wetting fluid prevent corrosion of a seed layer on the wafer and also improve the filling rates of features on the wafer.
    Type: Grant
    Filed: July 9, 2014
    Date of Patent: August 1, 2017
    Assignee: Novellus Systems, Inc.
    Inventors: Steven T. Mayer, David W. Porter, Mark J. Willey, Robert Rash
  • Patent number: 9689073
    Abstract: A roll-to-roll electroless plating system, including a plating tank containing plating solution, and a web advance system for advancing a web of media along a web-transport path that passes through the plating tank. One or more fluid guides are positioned within the plating tank to redirect plating fluid containing gas bubbles introduced by a gas bubble source away from the web of media as it is advanced through the plating solution in the plating tank.
    Type: Grant
    Filed: July 29, 2015
    Date of Patent: June 27, 2017
    Assignee: EASTMAN KODAK COMPANY
    Inventors: Kelvin P. Hill, Robert R. Bettin, James Douglas Shifley, Timothy John Young, Gary P. Wainwright
  • Patent number: 9617651
    Abstract: An anodizing apparatus configured to perform an anodization on a metallic material to be processed provided with a projecting portion on a surface thereof, includes: an electrolysis tank configured to store electrolytic solution for anodization; a first electrode portion formed of a metal and electrically connected to the material in an immersed state immersed in the electrolytic solution in the electrolysis tank; a second electrode portion formed of a metal and opposing the material in the immersed state; an electrode apparatus configured to apply a predetermined voltage between the first and second electrode portions; a retaining device configured to retain and rotate the material in the immersed state; and a first injection device configured to inject the electrolytic solution toward a predetermined area deviated from the material in a storage space in the electrolysis tank so that the material is deviated from a line in the direction of injection.
    Type: Grant
    Filed: December 3, 2013
    Date of Patent: April 11, 2017
    Assignee: AISIN SEIKI KABUSHIKI KAISHA
    Inventors: Daishi Kobayashi, Megumi Hirose, Masaki Kato
  • Patent number: 9589757
    Abstract: A method for providing a superconducting surface on a laser-driven niobium cathode in order to increase the effective quantum efficiency. The enhanced surface increases the effective quantum efficiency by improving the laser absorption of the surface and enhancing the local electric field. The surface preparation method makes feasible the construction of superconducting radio frequency injectors with niobium as the photocathode. An array of nano-structures are provided on a flat surface of niobium. The nano-structures are dimensionally tailored to interact with a laser of specific wavelength to thereby increase the electron yield of the surface.
    Type: Grant
    Filed: September 23, 2015
    Date of Patent: March 7, 2017
    Assignee: JEFFERSON SCIENCE ASSOCIATES, LLC
    Inventors: Fay Hannon, Pietro Musumeci
  • Patent number: 9481942
    Abstract: Various embodiments herein relate to methods and apparatus for electroplating metal onto substrates. The apparatus used to practice electroplating may be designed to have a geometric configuration that makes it difficult for air to travel and become trapped under the substrate. By using such apparatus, electroplating can occur at higher rates of substrate rotation than would otherwise be acceptable. The higher rate of substrate rotation allows electroplating to occur at higher limiting currents, which in turn increases throughput. The disclosed embodiments are particularly useful in the context of electrolytes that otherwise exhibit a relatively low limiting current (e.g., electrolytes having a low concentration of metal ions), though the embodiments are not so limited.
    Type: Grant
    Filed: February 3, 2015
    Date of Patent: November 1, 2016
    Assignee: Lam Research Corporation
    Inventors: Jian Zhou, Cian Sweeney, Zhian He, Jonathan David Reid
  • Patent number: 9322109
    Abstract: A method includes rotating a first motor part around a first structure substantially similar to a second motor part. The method also includes applying a first current to the first structure to electro-chemically machine the first motor part.
    Type: Grant
    Filed: August 1, 2013
    Date of Patent: April 26, 2016
    Assignee: Seagate Technology LLC
    Inventors: Timothy Edward Langlais, Chris M. Woldemar, Troy M. Herndon
  • Patent number: 9283655
    Abstract: The liquid diffuser adapter is intended to be attached to the arbor wheel of a center fed, wet stone fabrication machine to facilitate dust elimination. The adapter contains a fastener, a plurality of diffusing channels, and a protective coating. The fastener includes a main body, a flange, and a receptive cavity. The flange is concentrically and adjacently connected to the main body. The receptive cavity traverses through the flange and partially into the main body. The receptive cavity contains an opening, a threaded portion, and a hub portion. The threaded portion is used to attach the adapter to the arbor wheel through the opening; the hub portion allows for water to flow into the device and be redirected into the plurality of diffusing channels; the plurality of diffusing channels is radially positioned about the receptive cavity, connecting the hub portion to the exterior environment and thus the cutting disk.
    Type: Grant
    Filed: September 25, 2014
    Date of Patent: March 15, 2016
    Inventor: Mike Olari
  • Patent number: 9272388
    Abstract: Described herein are polishing apparatus, polishing formulations, and polymeric substrates for use in polishing surfaces, and related methods. The apparatus, formulations, substrates, and methods may each be used in applications involving the polishing of metal and/or metal-containing surfaces such as semiconductor wafers. The apparatus, formulations, polymeric substrates, and related methods described herein may be used without abrasives, and in some instances, without mechanical friction of a pad surface against the surface to be polished. Therefore, defects on a polished surface due to such mechanical polishing processes may be reduced.
    Type: Grant
    Filed: February 1, 2013
    Date of Patent: March 1, 2016
    Assignee: NexPlanar Corporation
    Inventor: Sudhanshu Misra
  • Patent number: 9133561
    Abstract: Provided are a plating method and a plating apparatus for a cylinder, which are capable of forming a plating layer having a uniform thickness in a technology of plating a cylinder, effectively preventing current concentration in cylinder end portions when being combined with a plating technology using divided insoluble electrodes, and performing plating with a more uniform thickness over the full length of a cylinder without generating defects such as rashes and pits irrespective of the size of the cylinder. The insoluble electrode has a shape in which a lower part thereof is curved inward, and is capable of rotating about an upper end thereof. Further, a thickness of a plating layer on an outer peripheral surface of the cylinder is adjusted by controlling an interval of closeness to the cylinder.
    Type: Grant
    Filed: September 27, 2011
    Date of Patent: September 15, 2015
    Assignee: THINK LABORATORY CO., LTD.
    Inventor: Tatsuo Shigeta
  • Publication number: 20150014175
    Abstract: An electroplating apparatus for plating a metal onto a surface of a wafer is disclosed. The apparatus comprises a wafer support configured to support a wafer and a processing base. The processing base has a scroll pump oriented to pump a plating solution in a substantially perpendicular direction with respect to the surface of the wafer. Further, the scroll pump includes a first scroll and a second scroll, at least one of which is configured as an anode. In one embodiment, the processing base includes an anolyte chamber including the scroll pump, a catholyte chamber, and a membrane separating the anolyte chamber from the catholyte chamber.
    Type: Application
    Filed: July 9, 2013
    Publication date: January 15, 2015
    Inventor: Raymon F. Thompson
  • Publication number: 20150001087
    Abstract: Disclosed herein are electroplating systems for forming a layer of metal on a wafer which include an electroplating module and a wafer edge imaging system. The electroplating module may include a cell for containing an anode and an electroplating solution during electroplating, and a wafer holder for holding the wafer in the electroplating solution and rotating the wafer during electroplating. The wafer edge imaging system may include a wafer holder for holding and rotating the wafer through different azimuthal orientations, a camera oriented for obtaining multiple azimuthally separated images of a process edge of the wafer while it is held and rotated (the process edge corresponding to the outer edge of the layer of metal formed on the wafer), and image analysis logic for determining an edge exclusion distance, wherein the edge exclusion distance is a distance between the wafer's edge and the process edge.
    Type: Application
    Filed: June 26, 2013
    Publication date: January 1, 2015
    Inventors: Daniel Mark Dinneen, James E. Duncan
  • Patent number: 8871065
    Abstract: The invention relates to an equipment for the surface treatment of parts (4), that comprises a plurality of treatment vats arranged in series and comprising rotating drums (2) provided with means for temporarily attaching the parts to be processed and having their axes (XX?) rotatingly mounted horizontally so that the major portion of each drum (2) is submerged in the processing liquid contained in the corresponding vat, and a conveyor line (14) for supplying each drum (2) with parts to be processed and for removing from said drum the parts already processed, characterized in that the conveying process is carried out along a general axis (ZZ?), and in that the axes (XX?) of the drums are parallel relative to each other and parallel to the general axis (ZZ?) of the conveyor line.
    Type: Grant
    Filed: September 24, 2007
    Date of Patent: October 28, 2014
    Assignee: Tornos Management Holding SA
    Inventor: Frédéric Vacheron
  • Publication number: 20140262803
    Abstract: An electroplating apparatus includes an anode configured to electrically communicate with an electrical voltage and an electrolyte solution. A cathode module includes a cathode that is configured to electrically communicate with a ground potential and the electrolyte solution. The cathode module further includes a wafer in electrical communication with the cathode. The wafer is configured to receive metal ions from the anode in response to current flowing through the anode via electrodeposition. The electroplating apparatus further includes at least one agitating device interposed between the wafer and the anode. The agitating device is configured to apply a force to gas bubbles adhering to a surface of the wafer facing the agitating device.
    Type: Application
    Filed: March 13, 2013
    Publication date: September 18, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Shafaat Ahmed, Michael P. Chudzik, Lubomyr T. Romankiw
  • Patent number: 8795480
    Abstract: Described are apparatus and methods for electroplating one or more metals onto a substrate. Embodiments include electroplating apparatus configured for, and methods including, efficient mass transfer during plating so that highly uniform plating layers are obtained. In specific embodiments, the mass transfer is achieved using a combination of impinging flow and shear flow at the wafer surface.
    Type: Grant
    Filed: June 29, 2011
    Date of Patent: August 5, 2014
    Assignee: Novellus Systems, Inc.
    Inventors: Steven T. Mayer, David W. Porter
  • Publication number: 20140138238
    Abstract: An apparatus and method for removing contaminant species from water by electrocoagulation are described. Alternating grounded, rotating, planar circular electrodes and stationary planar electrodes function as a Tesla fluid pump when placed in contact with the contaminated water, causing the water to flow between the rotating and stationary electrodes. An insoluble abrasive material introduced into the water removes scale from the electrodes while the water is pumped thereby. A direct electric current is caused to flow between each pair of rotating and stationary electrodes, thereby producing electrocoagulation of the contaminants in the water flowing therebetween. The electrocoagulated materials may be separated from the treated water by filtration or by permitting the treated water to stand for a chosen period.
    Type: Application
    Filed: August 6, 2013
    Publication date: May 22, 2014
    Applicant: Avivid Water Technology, LLC
    Inventors: Lockett E. Wood, William R. Lowstuter
  • Patent number: 8715469
    Abstract: An improved galvanic processing device includes disk shaped electrodes made from a metal which have circumferential segments aligned at an angle ? relative to the plane of the circumference of the electrode. The circumferential segments may have portions aligned at a different angle ? relative to the plane of the circumference of the electrode.
    Type: Grant
    Filed: August 11, 2011
    Date of Patent: May 6, 2014
    Inventors: Franti{hacek over (s)}ek Pancurák, Ladislav Jurec
  • Patent number: 8702953
    Abstract: It is an object of the present invention to derive the optimum operating condition parameters for plating operation accurately and efficiently. At first, a preliminary test operation is carried out under the energized condition (S12), then in light of such result, a sequential operations such as a first test operation (step S14) in which no energization is carried out for plurality of operating pattern candidates and a second test operation (step S16) under the energized condition are carried out, and then the optimum operating conditions are registered (step S18).
    Type: Grant
    Filed: December 28, 2006
    Date of Patent: April 22, 2014
    Assignee: C. Uyemura & Co., Ltd.
    Inventors: Yutaka Sugiura, Masanobu Morita
  • Patent number: 8658006
    Abstract: A system and method is described for electropolishing tubular metallic prostheses. In one aspect, the system provides a continuously changing set of points of contact between anode and prosthesis. In another aspect, the cathode is given a conical shape to correct for current concentrations that would otherwise exist and unevenly affect the amount of electropolishing over the length of the prosthesis.
    Type: Grant
    Filed: April 12, 2010
    Date of Patent: February 25, 2014
    Assignee: Abbott Cardiovascular Systems Inc.
    Inventors: Michael R. Bialas, David P. Strauss, Robert Barbier, Duane M. DeMore, Alan Gene Tahran, Zhicheng Lin, Sophia Wong
  • Publication number: 20140014034
    Abstract: An apparatus for treating a workpiece with a liquid has a vessel holding a body of the liquid, a mount provided with a holder for carrying the workpiece, and a lifter for shifting the mount with the holder and the workpiece from an upper position above the body of liquid into a lower position with the workpiece immersed in the body of liquid. An inverting mechanism is coupled with the lifter for rotating the mount, holder, and workpiece through about 180° above the body of liquid on movement from the upper position toward the lower position and from the lower position into the upper position.
    Type: Application
    Filed: July 10, 2013
    Publication date: January 16, 2014
    Inventor: Josep Valls BALAGUE
  • Patent number: 8500968
    Abstract: An electroplating apparatus having improved contact deplating features includes a bowl assembly having a bowl for holding an electroplating solution. A head having a rotor including a contact ring and a head motor for rotating the rotor cooperates with the bowl assembly during plating operations. A lift/rotate actuator may be used to move the head to position a sector of the contact ring in a ring slot or opening of a deplating module. Since the deplating is performed within the deplating module, and not within the bowl assembly, the electroplating solution in the bowl assembly is not affected by the deplating process.
    Type: Grant
    Filed: August 13, 2010
    Date of Patent: August 6, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Daniel J. Woodruff, Nolan L. Zimmerman, John L. Klocke, Klaus H. Pfeifer, Kyle M. Hanson, Matthew Herset
  • Publication number: 20130193000
    Abstract: Disclosed is an electrode arrangement for the defined rounding or deburring of edges of electrically conductive components, in particular turbine components, by means of electrochemical machining with at least one working electrode (5), which has a tubular electrode carrier, through which an electrolyte inflow line (10) is provided, the electrode carrier having on the front end a closure (13, 18), which is arranged such that the electrolyte inflow line in the axial direction of the electrode carrier is closed, and at least one outlet opening (19) being arranged in the radial direction. Also disclosed is a self-centering electrode arrangement and an installation for the defined rounding or deburring of edges of electrically conductive components by means of electrochemical machining with at least one corresponding electrode arrangement and also a method using the electrode arrangements and the described installation.
    Type: Application
    Filed: January 30, 2013
    Publication date: August 1, 2013
    Applicant: MTU Aero Engines GmbH
    Inventor: MTU Aero Engines GmbH
  • Patent number: 8491709
    Abstract: To provide a small active oxygen generating device capable of efficiently continuously generating active oxygen while supplying oxygen in the air. In the active oxygen generating device in which water is made to exist between an anode and a cathode composed of a base material containing a conductive polymer and by turning on electricity between the anode and the cathode, the conductive polymer deoxidizes the oxygen dissolved in the water to generate active oxygen, the cathode is rotatably installed about a conductive horizontal axis with part of the surface being projected over the surface of the water.
    Type: Grant
    Filed: March 3, 2009
    Date of Patent: July 23, 2013
    Assignee: Mitsubishi Electric Corporation
    Inventors: Shiro Takeuchi, Akira Shiga, Takuya Furuhashi
  • Publication number: 20130161196
    Abstract: Provided are a plating method and a plating apparatus for a cylinder, which are capable of forming a plating layer having a uniform thickness in a technology of plating a cylinder, effectively preventing current concentration in cylinder end portions when being combined with a plating technology using divided insoluble electrodes, and performing plating with a more uniform thickness over the full length of a cylinder without generating defects such as rashes and pits irrespective of the size of the cylinder. The insoluble electrode has a shape in which a lower part thereof is curved inward, and is capable of rotating about an upper end thereof. Further, a thickness of a plating layer on an outer peripheral surface of the cylinder is adjusted by controlling an interval of closeness to the cylinder.
    Type: Application
    Filed: September 27, 2011
    Publication date: June 27, 2013
    Inventor: Tatsuo Shigeta
  • Patent number: 8465642
    Abstract: A method and apparatus for separating impurities from a liquid stream includes a feed tank for containing an untreated liquid, a mixer for generating and mixing bubbles throughout the wastewater, and a settling tank for allowing the wastewater to settle for removal of impurities through dissolved gas floatation. The mixer includes a housing and a rotor rotatably mounted within the housing. The rotor is electrically isolated and the peripheral wall of the housing is electrically isolated and the rotor preferably has bores formed in its peripheral surface to produce cavitation to aid in mixing of fluid within the mixer. A power supply is coupled to establish a relatively positive electrical charge on the rotor and a relatively negative electrical charge on the wall of the housing. The charge causes electrolysis to occur within the fluid, which forms small low surface tension gas bubbles on the rotor and housing wall.
    Type: Grant
    Filed: May 1, 2008
    Date of Patent: June 18, 2013
    Assignee: Hydro Dynamics, Inc.
    Inventor: Bijan Kazem
  • Publication number: 20130134051
    Abstract: To provide a flexible substrate processing apparatus which allows the stable reduction of an oxide contained in a film-like structure body formed on a flexible substrate. The apparatus has a substrate carrying-out portion where a flexible substrate on which a film-like structure body is formed is unwound; a reduction treatment portion where an oxide contained in the film-like structure body formed on the flexible substrate is electrochemically reduced; a washing portion where the flexible substrate and the film-like structure body are washed; a drying portion where the flexible substrate and the film-like structure body are dried; and a substrate carrying-in portion where the flexible substrate on which the film-like structure body is formed is taken up.
    Type: Application
    Filed: November 19, 2012
    Publication date: May 30, 2013
    Applicant: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Semiconductor Energy Laboratory Co., Ltd.
  • Publication number: 20130056359
    Abstract: An apparatus and method for the synthesis and treatment of electrocatalyst particles in batch or continuous fashion is provided. In one embodiment, the apparatus is comprised of a three-electrode cell which includes a reference electrode, a counter electrode, and a working electrode. The working electrode is preferably a cylindrical vessel having an electrically conductive region. The electrode assembly is introduced into a slurry containing metal ions and a plurality of particles. During operation an electrical potential is applied and the working electrode is rotated at a predetermined speed. When particles in the slurry collide with the electrically conductive region the transferred charge facilitates deposition of an ad-layer of the desired metal. In this manner film growth can commence on a large number of particles simultaneously. This process is especially suitable as a commercial thin film deposition process for forming catalytically active layers on nanoparticles for use in energy conversion devices.
    Type: Application
    Filed: March 24, 2011
    Publication date: March 7, 2013
    Applicant: BROOKHAVEN SCIENCE ASSOCIATES LLC
    Inventors: Radoslav Adzic, Miomir Vukmirovic
  • Patent number: 8329005
    Abstract: Disclosed herein is a barrel plating apparatus. The barrel plating apparatus includes a barrel plating tank filled with an electrolytic solution, a barrel container immersed in the electrolytic solution of the barrel plating tank and filled with chip parts and media, a power supply unit for supplying current to an anode part and a cathode part which transfer the current to the barrel container and the electrolytic solution of the barrel plating tank, a driving motor for rotating the barrel container, and a hall current sensor formed in at least one cathode rod of the cathode part, coming into direct contact with the chip parts, the hall current sensor measuring the current. Accordingly, in the barrel plating apparatus, the currents of respective cathode rods are measured by hall current sensors, and thus variations in plating thickness can be reduced.
    Type: Grant
    Filed: March 4, 2010
    Date of Patent: December 11, 2012
    Assignee: Samsung Electro-Mechanics Co., Ltd.
    Inventor: Jae Chan Lee
  • Patent number: 8323459
    Abstract: An electropolishing system including an anode, a cathode, a rolling block and a motion controller. The anode is configured to removably retain a metal device to be electropolished, and may be formed as a bar made from a solid cylindrical piece of metal or other configurations, such as wires with hooks. The anode transfers the electricity to the metal device while grooming the surface of the metal device as it contacts the rolling block. The cathode may be configured as a mesh and completes the electrical circuit. The rolling block is formed from a relatively smooth, solid material and positioned so as to allow the metal device to roll against the surface of the block. The motion controller is configured to provide vertical and horizontal movement of the anode and metal device, using force transducers to control the compression of the metal device against the rolling block.
    Type: Grant
    Filed: April 10, 2008
    Date of Patent: December 4, 2012
    Assignee: Abbott Cardiovascular Systems Inc.
    Inventors: Anthony S. Andreacchi, Andreina P. Gomez, Han Juanta, Jessie Madriaga, Dan Joel Dirilo
  • Publication number: 20120273345
    Abstract: An air/water advanced oxidation purification device includes a draft tube, a motor and at least one spiral partition plate. The spiral partition plate is fixed on an output shaft of the motor. The motor is supported in the draft tube and used for driving the spiral partition plate to rotate at uniform speed around the central axis of the draft tube and for driving air or water to enter into the draft tube. The spiral partition plate includes a plurality of miniature blades arranged along a radial direction of the spiral partition plate, each of the miniature blades includes a plurality of first and second protrusions continuously and staggered arranged along the radial direction and protruding towards two sides of the spiral partition plate, respectively. Air or water is purified through photo-catalytic advanced oxidation reaction or electro-catalytic oxidation-reduction reaction taken place on the surfaces of the spiral partition plate.
    Type: Application
    Filed: June 13, 2011
    Publication date: November 1, 2012
    Inventors: Meng Lin, Bin Lin, Xiaoduo Yu
  • Patent number: 8268136
    Abstract: Axially fed fluid is sheared during long residence time in a radial workspace between counter-rotating coaxial disk-shaped centrifugal impellers. Gases evolve in the fractal turbulence of a shear layer, which is forced between laminar boundary layers, and an axial suction pump axially extracts evolved noncondensables and volatiles through cores of radial vortices in the shear layer. Cavitation due to shear between the impellers kills pathogens by shock waves, microjets, OH radicals, and nearby UV light pulses. Oppositely charged electrodes bounding the workspace cause electroporesis and electrohydraulic cavitation. The electrodes are counter-rotating ridged armatures of disk dynamos, forming a dynamic capacitor having audio frequency pulsed electric fields. Electrode erosion by arcing is prevented by shear between the electrodes.
    Type: Grant
    Filed: September 19, 2008
    Date of Patent: September 18, 2012
    Assignee: McCutchen, Co.
    Inventors: Wilmot H. McCutchen, David J. McCutchen
  • Patent number: 8268135
    Abstract: An electrochemical planarization apparatus for planarizing a metallized surface on a workpiece includes a polishing pad and a platen. The platen is formed of conductive material, is disposed proximate to the polishing pad and is configured to have a negative charge during at least a portion of a planarization process. At least one electrical conductor is positioned within the platen. The electrical conductor has a first end connected to a power source. A workpiece carrier is configured to carry a workpiece and press the workpiece against the polishing pad. The power source applies a positive charge to the workpiece via the electrical conductor so that an electric potential difference between the metallized surface of the workpiece and the platen is created to remove at least a portion of the metallized surface from the workpiece.
    Type: Grant
    Filed: November 16, 2005
    Date of Patent: September 18, 2012
    Assignee: Novellus Systems, Inc.
    Inventors: Ismail Emesh, Saket Chadda, Nikolay N Korovin, Brian L Mueller
  • Publication number: 20120091009
    Abstract: Provided is a method and apparatus for producing silver nanoparticles in uniform shape and size using an electrolysis eco-friendly and in a simple way.
    Type: Application
    Filed: June 14, 2010
    Publication date: April 19, 2012
    Applicant: AMOGREENTECH CO., LTD.
    Inventors: Min Young Choi, Byung Sun Han, Tae Gyun Kim, Yong Sul Song