Abstract: An apparatus for electrochemical treatment of a substrate, in particular for electroplating an integrated circuit wafer. An apparatus preferably includes dynamically operable concentric anodes and dielectric shields in an electrochemical bath. Preferably, the bath height of an electrochemical bath, the substrate height, and the shape and positions of an insert shield and a diffuser shield are dynamically variable during electrochemical treatment operations. Step include varying anode current, bath height and substrate height, shield shape, and shield position.

Abstract: An electroplating system (30) and process makes electrical current density across a semiconductor device substrate (20) surface more uniform during plating to allow for a more uniform or tailored deposition of a conductive material. The electrical current density modifiers (364 and 37) reduce the electrical current density near the edge of the substrate (20). By reducing the current density near the edge of the substrate (20), the plating becomes more uniform or can be tailored so that slightly more material is plated near the center of the substrate (20). The system can also be modified so that the material that electrical current density modifier portions (364) on structures (36) can be removed without having to disassemble any portion of the head (35) or otherwise remove the structures (36) from the system. This in-situ cleaning reduces the amount of equipment downtime, increases equipment lifetime, and reduces particle counts.

Abstract: Acidity in water leaching from a mass of sulphide tailings is prevented by de-oxygenating the water prior to entering the mass. A cover comprising an electrolytic cell, either galvanic or impressed-current, gives rise to a cathode reaction in which the redox voltage of the water drops to 003 volts or less. The cover can be thinner, and much less expensive, than an equally-effective non-reactive cover. The electrolyte is water contained in water-retaining soil, or a depth of water, lying over the cathode. The cathode is steel mesh, or a layer of graphite, spread over the whole mass of tailings.

Abstract: A system and method is disclosed for treating water to remove suspended solids, disinfect for bacteria and viruses and remove color, taste and odor to produce a potable water. A bactericide is introduced which is relatively stable and long term. The system and method introduces the bactericide to the water in an amount sufficient to kill the bacteria and inactivate viruses, The bactericide is maintained in the water at least for a time period sufficient to kill the bacteria in the water, and, until the water is desired to be consumed at which time the water may be passed through an ion exchange. In this way, there is a decreased likelihood that the water will become recontaminated with the same bacteria and/or viruses before the water is desired to be used. In one embodiment, the bactericide comprises metal ions, such as silver ions and/or copper and zinc ions.

Abstract: A particular anode assembly can be used to supply a solution for any of a plating operation, a planarization operation, and a plating and planarization operation to be performed on a semiconductor wafer. The anode assembly includes a rotatable shaft disposed within a chamber in which the operation is performed, an anode housing connected to the shaft, and a porous pad support plate attached to the anode housing. The support plate has a top surface adapted to support a pad which is to face the wafer, and, together with the anode housing, defines an anode cavity. A consumable anode may be provided in the anode cavity to provide plating material to the solution. A solution delivery structure by which the solution can be delivered to said anode cavity is also provided. The solution delivery structure may be contained within the chamber in which the operation is performed. A shield can also be mounted between the shaft and an associated spindle to prevent leakage of the solution from the chamber.

Abstract: The present invention provides methods and apparatus for analysis and monitoring of electrolyte bath composition. Based on analysis results, the invention controls electrolyte bath composition and plating hardware. Thus, the invention provides control of electroplating processes based on plating bath composition data. The invention accomplishes this by incorporating accurate bath component analysis data into a feedback control mechanism for electroplating. Bath electrolyte is treated and analyzed in a flow-through system in order to identify plating bath component concentrations and based on the results, the plating bath formulation and plating process are controlled.

Abstract: This invention provides a technique capable of solving a problem of an ununiform plating on an annular edge portion of a surface to be plated of a wafer, which ununiform plating is usually caused due to an ununiform flow of a plating solution in a conventional cup-type plating apparatus, thereby ensuring a uniform plating treatment on an entire surface to be plated of a wafer. In detail, the present invention is directed to a cup-type plating apparatus comprising a wafer support section 2 provided along an upper opening of a plating tank 1, a plurality of solution-outlet passages 7 provided below the wafer support section 2 and extending from the inside of and to the outside of the plating tank 1, at least one solution-supply pipe 6 provided through the bottom of the plating tank 1.

Abstract: An electrochemical deposition and testing system consisting of individually addressable electrode arrays, a fully automated deposition head, and a parallel screening apparatus is described. The system is capable of synthesizing and screening millions of new compositions at an unprecedented rate.

Abstract: A plating apparatus is disclosed that is particularly useful in improving the plating rate, improving the plating of via holes, improving the uniformity of the plating deposition across the surface of the wafer, and minimizing damage to the wafer. With regard to improving the plating rate and the plating of via holes, the plating apparatus immerses a wafer in a plating fluid bath and continuously directs plating fluid towards the surface of the wafer. Immersing the wafer in a plating fluid bath reduces the occurrence of trapped gas pockets within via holes which makes it easier to plate them. With regard to improving the uniformity of the plating deposition, the plating apparatus and method effectuate random horizontal fluid flow within the bath to reduce the occurrence of relatively long horizontal fluid flow that causes non-uniform plating deposition across the surface of the wafer.

Abstract: A method and an apparatus are described for regulating the concentration of metal ions in an electrolytic fluid, which is used for the deposition of metal with insoluble anodes and additionally contains compounds of an electrochemically reversible redox system. With the oxidized form of said system, metal is dissolved in an ion generator 1, traversed by the fluid, so that these compounds are thereby reduced. For the deposition of metal, the dissolved metal ions on the item to be treated are reduced. The compounds of the redox system in the reduced form are oxidized again on the insoluble anodes in the electroplating system 13. In order to keep the concentration of the metal ions in the electrolytic fluid constant, at least a portion of the electrolytic fluid, contained in the electroplating system, is conducted through one or a plurality of electrolytic auxiliary cells 6.

Abstract: For eliminating dioxins from soot containing dioxins adhering to incineration ash by decomposing them, in an easy and simple manner and at low cost, into a harmless and useful oil and water and recovering the oil and water, a mixed gas 3 composed of smoke and dioxin-entraining ash is passed through a particulate matter separator 6, where the mixed gas passes through a curtain of water 5 to cause the dioxin-entraining ash to be taken up in water. The ash-water mixture is separated into ash and water on a centrifuge 12. The ash is washed with washing water 22 to elute the oleaginous dioxins entrained by the ash to give an emulsion-like oil-water mixture and the resulting mixture is separated, by means of a centrifuge 23, into ash and the emulsion-like oil-water mixture in which dioxins are dissolved. This ash is washed first with acidified water 26, then with alkaline washing water 28 and further with neutral water 29, followed by separation into moist ash and aqueous washings.

Abstract: A small plating solution reservoir of about 250-cc or less volume is used to provide plating of one wafer at a time with a precisely controlled, repeatable, plating solution. The reservoir is connected to basic plating solution and additives which are provided in desired concentrations by a valving and control system for single wafers and drained after the single wafer is plated.

Abstract: The present invention provides an electro-chemical deposition system that is designed with a flexible architecture that is expandable to accommodate future designs and gap fill requirements and provides satisfactory throughput to meet the demands of other processing systems. The electro-chemical deposition system generally comprises a mainframe having a mainframe wafer transfer robot, a loading station disposed in connection with the mainframe, one or more processing cells disposed in connection with the mainframe, and an electrolyte supply fluidly connected to the one or more electrical processing cells.

Abstract: A portable oxidant generator for generating a chlorine or chloro-oxygen solution suitable for sterilizing contaminated drinking water, thereby providing potable water. The oxidant generators include an electrolytic chamber and a power supply or source. The chamber holds a salt brine solution such that the solution is in contact with an anode and cathode included in the chamber. The power supply provides electrical charge which is passed between the anode and cathode through the salt brine solution. In the preferred embodiment of the present invention, the power supply includes an energy storage device that is charged to predetermined voltage. The energy storage device is preferably charged by a generator that converts mechanical energy into electrical energy. The present invention includes a brine storage compartment in the cap.

Abstract: The present invention generally provides an electro-chemical deposition system that is designed with a flexible architecture that is expandable to accommodate future designs rules and gap fill requirements and provides satisfactory throughput to meet the demands of other processing systems. The electro-chemical deposition system generally comprises a front-end loading station, a mainframe including one or more processing cells, and an electrolyte replenishing system fluidly connected to the one or more electrical processing cells. The electrolyte replenishing system comprises a main electrolyte supply tank and an analyzer module and dosing module coupled thereto. The analyzer module includes one or more chemical analyzers to monitor the concentrations of various chemicals in the main electrolyte supply tank. Information provided by the analyzer module is transmitted via a central control system to the dosing module.

Abstract: A method for pickling products in a metal alloy containing iron, and products in titanium and alloys thereof, in the absence of nitric acid as an oxidizing agent, and for the recovery of the exhausted solutions, characterized in that the recovery of the exhausted solutions deriving from pickling comprises the following steps: sending of the pickling solution, both as catholyte and as anolyte, in an electro-chemical cell optionally of the membrane type to separate the Fe2+ (or Ti2+) ions to be disposed of, from the Fe3+ (or of the Ti3+ and Ti4+) ions to be recovered, obtained by reduction at the cathode of the Fe3+ ions which are in the catholyte to Fe2+ (or of the Ti3+ and Ti4+ ions to Ti2+) and of oxidation at the anode Fe2+ (or Ti2+) ions which are in the anolyte to Fe3+ (to Ti3+ and Ti4+); treating the catholytic solution coming out of the cell and enriched in Fe2+ (or Ti2+) ions as to allow the separation in two phases, a

Abstract: A method and an apparatus for the continuous chromium-plating of elongated members such as bars and the like: the bar to be plated is fed and rotated through at least one tubular shaped chromium-plating anode into which an electrolytic solution suitable for depositing a layer of chromium on the bar, as the latter advances through the said anode, is supplied. The electrolytic solution is supplied into the anode from the bottom upwards, through sets of holes over the bottom and the upper surfaces of the anode; the bottom holes communicate with a pressure balancing and flow distribution chamber for the electrolytic solution. This results in an electrolytic flow upwardly directed in a perpendicular direction to the longitudinal axis of the bar, the temperature of which may be controlled by changing the flow rate of the electrolytic solution circulating inside the anode.

Abstract: Anti-corrosive apparatus cover with an improved detachable wall-covering for new or used covers of electrolytic cells.

Abstract: Anti-corrosive detachable wall-covering for side walls for new and used electrolytic cells holding chlorine-containing process gases.

Abstract: An apparatus for promoting reactions between particles suspended in a liquid is provided. The apparatus includes a treatment cell having an electrode array. The suspension of the particles is fed to the treatment cell by feeding means. The liquid is removed from the treatment cell by removing means. The feeding means is connected to the electrode array in the cell and adapted to generate a first non-uniform electrical field, at a first frequency, within the cell. The removing means is connected to the electrode array in the cell and adapted to generate, within the cell, a second non-uniform electrical field, at a second frequency which is different from the first frequency. The apparatus further includes means for simultaneously applying at least the first non-uniform electrical field, at the first frequency, and the second non-uniform electrical field, at the second frequency.

Abstract: Copper is extracted from a heap of low-grade ore by transforming the heap into an electrolytic cell, and imposing a voltage thereon. Anodic conditions of redox and pH cause the sulphide to break down, and the copper to pass into solution. The copper can be recovered elsewhere if the electrolyte is drawn off, or in-situ if allowed to plate onto the cathode. Electrodes are formed as grids of conductors, or as layers of e.g. graphite.

Abstract: The invention relates to a method and a device for regenerating exhausted tin-plating solutions which contain tin and copper ions, free complexing agent and complexing agent bound to the copper ions, as well as expended and unexpended reducing agent. By means of a suitable rinsing technique, the rinse water of the tin-plating process is concentrated to a 10 to 15 percent dilution of the process solution. The regenerating solution thus produced is fed to an electrolytic cell. The electrolytic cell comprises a cathode chamber, a middle chamber and an anode chamber. The cathode chamber is separated from the middle chamber by an anion-exchange membrane and the anode chamber is separated from the middle chamber by a cation-exchange membrane. The regenerating solution is initially provided in the cathode chamber. Here, the interfering copper component is cathodically deposited.

Abstract: Water cleaning device with at least one reactor device (4) for electrolytic cleaning of polluted water, assembled of one or more anodes (1a) and cathodes (2a), one flotation device (14, 15) and one device for handling sludge (23, 24, 18). The water flow inside and just outside (downstream) of the electrochemical reactor (4) is turbulent. The turbulence is created by one or more mechanical devices which affect the flow pattern.

Abstract: A flock separating apparatus, has an electrolytic cell (2) fitted with iron electrodes and a separating tank (3), wherein the flock is carried upwards by a hydrogen gas produced in electrolysis. The separating tank (3) has a substantially vertical pipe having a length which is at least 10 times, preferably at least 15-20 times more than its diameter.

Abstract: A plating system and method is provided for electroplating silicon wafers with copper using an insoluble anode wherein the electrolyte is agitated or preferably circulated through an electroplating tank of the system and a portion of the electrolyte is removed from the system when a predetermined operating parameter is met. A copper containing solution having a copper concentration greater than the copper concentration of the removed portion is added to the copper plating system simultaneously or after electrolyte removal, in a substantially equal amount to the electrolyte removed from the system and balances the amount of copper plated and removed in the removal stream. In a preferred method and system, an electrolyte holding tank is provided which serves as a reservoir for circulating electrolyte. The addition of the copper containing solution and removal of working electrolyte is also preferably made from the holding tank.

Abstract: A fully automated computer controlled system and method to simultaneously measure in a dynamic mode the streaming potential, impedance and permeability resulting from a flow of various liquids through a sample, particularly a compressed mass of human hair. The system includes four air-pressurized reservoirs and three test cells, each test cell containing a sample to be tested. An impedance measurement is made by impressing a signal wave train across each sample over a selected range of frequencies, preferably in the 10-10,000 Hz range, rather than at a single frequency. The air pressure is controlled within 2% of a selected pressure and the outlet flow of liquid from the test cells is continually measured to provide an accurate and reproducible set of measurements.

Abstract: A process and apparatus for electrolytically depositing a uniform metal layer onto a workpiece is provided. The workpiece, for example a circuit board, serves as a cathode. The anode is insoluble and dimensionally stable. Both anode and cathode are immersed in a plating solution contained in an electrolytic container. The solution includes (a) ions of the metal to be deposited on the workpiece, (b) an additive substance for controlling physical-mechanical properties of the metal to be deposited, such as brightness, and (c) an electro-chemically reversible redox couple forming oxidizing compounds when contacting the anode. A metal-ion generator is provided, supplying metal parts of the metal to be deposited onto the workpiece; The plating solution is circulated between the container and the ion generator for maintaining a reaction between the oxidizing compounds and the metal parts for forming metal ions.

Abstract: A flock separating apparatus, has an electrolytic cell (2) fitted with iron electrode and a separating tank (3), wherein the flock is carried upwards by a hydrogen gas produced in electrolysis. The separating tank (3) has a substantially vertical pipe having a length which is at least 10 times, preferably at least 15-20 times more than its diameter.

Abstract: An electrochemical apparatus and system for extracting and recovering metals from their compounds using electrochemical cells where the anolyte 10 is connected electrically to the catholyte 11 through an independent set of electrodes 13, 14 immersed in each electrolyte and connected to each other by a conductor 16. The specification details the application of this principle to commercial size cells and systems to extract metals from solutions, from ores in-situ, from ores in heaps and fixed beds, from fine metal concentrates dissolved either at the anode cell or in a separate leaching vessel. Alkaline electrolytes are also given for the extraction and recovery of nickel and copper from their oxide ores. A method for extracting gold from ores or residues is also included.

Abstract: A method and an apparatus for stripping ionic species from a porous material, such as concrete or soil, are presented. The ionic species include metals and complexes, and may include radioactive species. The contaminated medium can be in bulk or in particulate form and can be treated according to the invention in situ or in a batch container. In the method, a dc potential difference is established across the contaminated material over which an alternating current may be superimposed. Ionic species migrate within the contaminated material under the influence of the potential difference and dissolve in the electrolyte. The electrolyte can be protected from radiation degradation by use of a radioactive-resistant ion exchange material. Ionic species can be desorbed electrochemically from the electrolyte, allowing the electrolyte to be recycled for additional stripping of contaminated media. The recovered ionic species can be used as feedstock for other processes.

Abstract: A process and apparatus for electrolytically surface-coating special metal workpieces in which the electrolyte is conveyed in a controlled circuit in and around the electrolysis region in that most of it is conveyed at a high flow rate, at a higher inlet pressure, through the space between a cathodically connected workpiece and an anode and a smaller proportion of it is conveyed at a lower flow rate upwards to the rear of the anode away from the cathode. After leaving the electrolysis region the electrolyte is taken into a separate overflow tank and/or in the feed back system.

Abstract: The present invention relates to an electrode preferably an insoluble electrode for an electrolytic cell. The electrode is located within an enclosure defining a chamber, a wall of said enclosure being formed by a membrane allowing ions to pass therethrough. The enclosure has an opening for feeding electrolyte, an opening for evacuating electrolyte and means conducting the upward current of electrolyte with a velocity in the vicinity of the electrode of at least 0.01 m/s. The invention relates also to plants and processes using such electrode for the plating or deplating of metal strips.

Abstract: A water purifier removes harmful materials from tap water by electrochemical oxidation-reduction and distillation without using any filters. The water purifier has an electrochemical oxidation-reduction unit which removes heavy metals and organic materials from tap water by an electrochemical oxidation-reduction reaction, thus providing pre-purified water. A distillation unit heats the pre-purified water in order to vaporize the water while distilling off harmful materials. The vapor is discharged from the distillation unit and is condensed by a condenser while flowing in a vapor guide pipe, thus providing finally-purified water.

Abstract: This invention relates to a separator device for the separation of fine particles from a contaminated liquid. The device utilizes the process of electrolysis to produce small gas bubbles which attach themselves to the fine particles and move the particles to the top of the liquid surface where they can be easily removed. The separation is facilitated by the use of baffles which prevent the formation of convection currents in the body of the separator device, and by inclined plates which direct the rising particles towards the removal point.

Abstract: An electrolytic solution prepared by dissolving an electrolyte such as KOH in pure water is fed into a membrane electrolytic cell of a membrane electrolyzer membrane electrolysis, made while the membrane electrolytic cell is provided intermittently or continuously with pure water. Oxygen generated at the anode and hydrogen generated at the cathode are purified individually by purifiers to produce oxygen and hydrogen of high purity. Also disclosed are methods of producing oxygen and hydrogen of high purity and their corresponding apparatuses in which a membrane degassing module is employed in conjunction with a solid polymer electrolyte electrolytic cell for effecting membrane electrolysis of the pure water, and in conjunction with a molecular sieve for individually dehumidifying oxygen generated at the anode and hydrogen at the cathode of the electrolytic cell.

Abstract: In a process of chlor-alkali electrolysis carried out in a diaphragm cells comprising pairs of interleaved anodes and cathodes, the cathodes being provided with openings and coated with a porous diaphragm resistant to corrosion, at least part of the said anodes being provided with hydrodynamic circular to produce circulation of the anodic brine, the cell having inlets for feeding the fresh brine, and outlets for the removal of produced chlorine, hydrogen and caustic, the improvement comprising controlling the oxygen content in the chlorine and chlorate concentration in the caustic independently from the the fresh brine introduced and the concentration of the the brine by adding an aqueous solution of hydrochloric acid to the brine in the anodic compartment of the cell through a distributor positioned over the hydrodynamic circulator.

Abstract: The invention relates to an improved process and apparatus for electroplating an object and removing the excess electroplating solution from the electroplating object. The improvement comprises performing the electroplating process utilizing an apparatus and in a manner which eliminates all waste rinse solution and which provides substantially complete recovery of the chemicals utilized, but not used up, in the plating process.

Abstract: The present invention is directed to an expert control system for controlling plating bath parameters. The system uses both feed-forward and feed-backward control to determine the amount and timing of replenisher additions of bath constituents to maintain optimum bath efficiency.

Abstract: An electrochemical cell for electrolytic treatment of aqueous solutions, particularly for cyanide detoxification or oxidation, has a solution container with a cell housing mounted on it, in which an electrode stack is located. Solution is delivered to the cell housing in the region of its housing bottom by a circulation device, and after passing through the electrode stack by an overflow over the side walls of the cell housing, is delivered to a cascadelike drain container with its own overflow for the sake of degassing; after passing through the second overflow, the now largely degassed solution is returned to the solution container and recirculated. The invention provides a compact structural form with a pressure-free recirculation system and simple maintenance of the electrode stack or individual electrodes.

Abstract: A system is provided for regenerating reducing agents used in ancillary chemical or electrochemical processes such as restoring solderability of electronic components. The system includes a cathode, an anode, and an electrolyte system that is separated by a semipermeable ionic barrier into a catholyte and an anolyte. The catholyte includes the reduced member of a redox couple, which can be regenerated electrochemically. The redox couple of the electrolyte system is charged like a battery and discharged during the ancillary process. Regeneration of the reduced member of the redox couple is accomplished at the cathode. The cathode comprises an electrode having a high hydrogen overvoltage so that sufficiently negative potentials can be attained while minimizing hydrogen evolution. Chemical balance is maintained by the semipermeable ionic barrier, which permits proton migration from the anolyte to the catholyte but acts as a barrier against diffusion and migration of cations from the catholyte to the anolyte.

Abstract: A method, and apparatus therefor, for the electrolytic treatment of an acidic solution which comprises: (a) providing an electrolytic cell, the cell comprising: (i) an anode chamber and an anode therein; (ii) a cathode chamber and a cathode therein; (iii) a diaphragm of a non-isotropic fibrous mat comprising 5-70 weight percent organic halocarbon polymer fiber in adherent combination with about 30-95 weight percent of finely divided inorganic particulate impacted into said fiber during fiber formation, the diaphragm having a weight per unit of surface area of about 3-12 kilograms per square meter; (b) introducing the acidic solution into the cell; (c) applying a DC voltage between the anode and the cathode causing the migration of ions through the diaphragm; and (d) recovering a product of the electrolytic treatment from the anode chamber, or the cathode chamber, or from both chambers.

Abstract: A device and method for using the device for applyng and/or removing coating on workpieces are disclosed. The device comprises a medium conveying device and a container adapted to receive the workpieces. The container has an inlet line connected to a medium source, an outlet line connecting the container to a medium source, the medium source being positioned below the conveying device, and a control device which connects the inlet and outlet lines to the medium source. The conveying device is a vacuum pump incorporated in the outlet line of the container.

Abstract: A device for separating and compressing carbon dioxide from a carbonate salt comprises an anion membrane and a cation membrane. The anion and cation membranes define a fluid feed compartment. The anion membrane has an anode disposed on it. The cation membrane has a cathode disposed on it. An enclosed carbon dioxide collection compartment, in which carbon dioxide pressure can be regulated, is located adjacent to the anode. The device also has an enclosed scrubbing fluid collection compartment adjacent to the cathode and means for inducing an electrical potential across the anode and cathode. The device is capable of supplying carbon dioxide at high pressures when a carbonate salt is fed to the fluid feed compartment and an electrical potential is induced across the anode and cathode.

Abstract: An electrolytic silver recovery system for recovering silver from photographic fixing solutions, by means of an electrolytic cell (28) having an anode (52) and a cathode (53), and circulation pumps (29a, 29b) for removing solution from the cell and returning it to the cell, which device comprises a hydrocyclone (56) located in the liquid path (55) from the cell to the suction side of the pumps and connected at its outlet directly to the suction side of the pumps. The suction pressure of the circulating pump maintains a low pressure differential of less than about 0.6 bar between the inlet and outlet of the hydrocyclone which establishes the liquid flow through the hydrocyclone.

Abstract: An apparatus for electrochemical machining has a bath for machining workpieces capable of providing in the zone of treatment an ascending laminar flow of electrolyte occupying the bath. A bath for cleaning the electrolyte communicates with the bath for machining the workpieces by way of a pipe for feeding the electrolyte having a pump and pipe for discharging the electrolyte. The workpieces are conveyed to the bath by workpiece gripping mechanisms.

Abstract: The process for the electrochemical separation of metal mixtures and metal alloys comprises the steps of dissolving the starting material in an elecrolyte, substituting the metals dissolved in the electrolytic solution in succession in accordance with their electrochemical potential by electrochemically less noble metals in each case and depositing them. The electrolytic solution containing the dissolved metals is passed continuously through several cells, connected to each other, in which the electrolytic solution is brought into contact with said less noble metals. Several of the metals dissolved can be substituted simultaneously by one or more electrochemically less noble metals. Metals that are deposited simultaneously together are separated electrolytically from each other, and metals which have again gone into solution are again substituted outside the electrolysis cells by said less noble metals and deposited.

Abstract: A stamper cleaning apparatus comprises an electrocleaning tank for performing electrodegreasing, a washing room adjacent to this cleaning tank, a shower, disposed in the upper section of the washing room, for water-washing a stamper by spraying washing water onto the stamper while the stamper is positioned inside the washing room and is wet with an electrocleaning solution, a water drain tank, disposed in the lower section of the washing room, for collecting water after the stamper is washed with water and for draining the water, and a small drying room disposed in the upper section of the washing room for operating to heat and dry the stamper after the shower has operated during the predetermined time the stamper is held in the washing room.

Abstract: An electrolytic treatment method and a unit in which such a method is practiced are provided wherein heavy metal hydrous oxides are precipitated and recovered from a dilute waste stream to render the waste stream suitable for discharge. The waste stream is passed into the cathode chamber of an anion exchange membrane delineated electrolytic cell and subjected to high current density electrolysis to promote the formation of regular, noncompressible metal hydrous oxide crystals. Fluoride ion is added to the precipitate-containing waste stream, the precipitate is filtered and the clarified liquid waste stream is split so that a portion is discharged and a portion is recycled into the metal ion-containing waste stream for further treatment.

Abstract: A chemical process control system includes a plurality of sensors for sensing various parameters of several baths employed in a chemical process. A microprocessor is employed to interrogate each sensor, to determine bath characteristics from one or more of the parameters, and for comparing the parameters to established limits. The microprocessor initiates corrective responses whenever a characteristic falls outside its specific limits in an attempt to restore the characteristic to a specified operating target value.A hierarchy of authorization keys limits access to the apparatus depending upon the level of authority of the person seeking access. Different degrees of authority may be delegated for an apparatus operator, a supervisor and servicing personnel. The apparatus includes a local and remote communication capacity for sending messages concerning malfunctions in the apparatus and for receiving instructions from a remote location for correcting malfunctions.

Abstract: An electroplating system with improved water use efficiency and unique waste water treatment which enables operation without access to public sewers thereby permitting compliance with governmental regulations regarding disposal of waste water. Water use efficiency is achieved by means of limited use of overhead water sprays, multiple rinse tank backflow to the prior process tank and water evaporation from said process tanks. In addition, all waste water not returned to the prior process tank locally at each plating subassembly is transferred to an inplant sump for common evaporative treatment.