Abstract: A substrate plating apparatus forms an interconnection layer on an interconnection region composed of a fine groove and/or a fine hole defined in a substrate. The substrate plating apparatus includes a plating unit for forming a plated layer on a surface of the substrate including the interconnection region, a chemical mechanical polishing unit for chemically mechanically polishing the substrate to remove the plated layer from the surface of the substrate leaving a portion of the plated layer in the interconnection region, a cleaning unit for cleaning the substrate after the plated layer is formed or the substrate is chemically mechanically polished, a drying unit for drying the substrate after the substrate is cleaned, and a substrate transfer unit for transferring the substrate to and from each of the first plating unit, the first chemical mechanical polishing unit, the cleaning unit, and the drying unit.

Abstract: Contaminated water, particularly, ballast water, blackwater, galley water, accommodation water, laundry water, fresh water and seawater, is disinfected by admixture of a highly reactive gas stream containing ions of oxygen and nitrogen, formed by exposure of air to short-wavelength ultraviolet radiation, and of chlorine, formed in situ by electrolysis of salt in the water. Solids removal can be accomplished by electrophoresis in the same unit employed for electrolysis to release chlorine, or in a separate unit. Heavy metals maybe removed by plating or sacrificing electrodes.

Abstract: An apparatus for delivering at least two liquid media to consumers of a fuel cell system, with a feed pump is made less complicated than known apparatuses in that at least one pressure transmission unit between the at least two media is provided with at least one pressure transmission element, which has at least two pressure faces for pressure imposition that communicate with the liquid media.

Abstract: A process and apparatus for recovering a metal from a feedstock containing a compound of the metal. The process includes an electrowinning step in which a leachate comprising a salt of the metal, dissolved in an aqueous acid solution, is subjected to electrowinning in an electrolytic cell, wherein elemental metal is deposited on the cathodes of the cell and oxygen is generated at the anodes. The oxygen generated at the anodes is collected and is then at least partially consumed in an oxygen-consuming step of the process. Preferably, the oxygen-consuming step comprises an atmospheric or pressure leaching step in which the metal compounds in the feedstock become dissolved in a leachate in the form of metal salts, preferably sulfates. The recovery and use of anode oxygen in a leaching process encourages the use of mist-reducing technology in existing and new electrowinning facilities.

Abstract: A plating tool cell anode for venting unwanted gases from a fluid plating solution. In a first embodiment, the solution is introduced into a chamber, defined by the plating tool cell (10), by fluid inlet (12) and contacts the anode (50). The fluid encounters a hydrophobic membrane (14) and a hydrophilic membrane (15) spaced from the hydrophobic membrane. A driving force, such as a vacuum, is applied to the gap (16) between the membranes to remove unwanted gases therein. In a second embodiment, a single membrane is used that is both hydrophobic and hydrophilic. Preferably, the hydrophobic portion of the membrane is located at or near the perimeter of the chamber and gas to be vented is directed toward the hydrophobic portion(s).

Abstract: A gas/liquid phase separator includes a fluid inlet, a vapor outlet, a liquid outlet, and first and second valves disposed in fluid communication with the liquid outlet. Both valves are controllable in response to a system pressure and a fluid level in the gas/liquid phase separator. Both valves are further disposed in parallel fluid communication with each other. A method of controlling a liquid level in the phase separator includes sensing an amount of liquid in the phase separator, sensing a system pressure, and selectively opening a valve disposed in fluid communication with the phase separator to drain the liquid.

Abstract: There is provided a hydrogen storage system having one or more hydrogen storage containers disposed in a confined area with a vent line extending from the one or more storage containers to a location outside of the confined area. One or more sensors are disposed in the confined area for detecting one or more pre-determined unsafe conditions relating to the storage of hydrogen in the contained area and at least one actuator is provided for actuating an operable valve of the vent line to release the hydrogen from the hydrogen storage container to a location outside the confined area at a pre-determined release rate in response to a signal from the sensor indicating an unsafe condition. A power system incorporating a hydrogen storage system as described above is also provided.

Abstract: A hydrogen-fueled motor vehicle including at least one hydrogen-fueled locomotion subsystem and at least one refuelable hydrogen generator operative to supply hydrogen fuel to the hydrogen-fueled locomotion subsystem on demand. The refuelable hydrogen generator includes at least one electrochemical reactor operative to generate the hydrogen fuel from water on demand and a refueling subsystem providing at least one of water, electrolyte, hydrogen, a metal containing material and electrical power to the electrochemical reactor. A refueling method is also provided.

Abstract: A fuel cell or electrolyser assembly comprising a fuel cell or electrolyser stack housed in a chamber containing reactant gas, adapted such that in use the reactant gas applies a compensating force to an end face of the stack in opposition to the outwards force of gases within the stack.

Abstract: A process and apparatus for the electrolytic separation of fluorine from a mixture of gases is disclosed. Also described is the process and apparatus for the generation of fluorine from fluorine/fluoride containing solids, liquids or gases.

Abstract: A mixed hydrogen-oxygen fuel generator system uses an electrolytic solution to generate gaseous hydrogen-oxygen fuel through the electrolysis of water. This generator system includes: at least one electrolytic cell with multiple metallic plates used as an internal isolation system in which two of the plates separately connect to both the positive and negative terminal of a DC circuit. These plates are used for the electrolysis of the electrolytic solution in the cell(s) to produce, under pressure, mixed hydrogen-oxygen fuel. The apparatus also includes a cooling system containing a water cooling tank in which there are two zones: one is the electrolytic solution circulation coil and the another is a water circulation zone.

Abstract: An electrolysis system (10) has a head portion (18) to a well casing (30). The head portion (18) has a hydrogen discharge (12), an oxygen discharge (12) and a water feed path (20) which is in fluid communication with an electrolyte reservoir (36) which is defined by the well casing (30). The oxygen discharge (14) is fluidly coupled to the oxygen conduit (38) and the hydrogen discharge (12) is fluidly coupled to the hydrogen conduit (40). An electrolyzer with the oxygen conduit 38) and hydrogen conduit (40). The electrolyzer is electronically coupled to an AC/DC converter (52) and may be fluidly coupled to an atomizer (50) and chemical collector (48).

Abstract: Disclosed are methods and systems for generating hydrogen gas at pressures high enough to fill a hydrogen storage cylinder for stationary and transportation applications. The hydrogen output of an electrochemical hydrogen gas generating device is integrated with an electrochemical hydrogen compressor operating in a high-differential-pressure mode. The compressor brings the hydrogen produced by the gas generating device to the high pressure required to fill the storage cylinder.

Abstract: A method of operating a cell for electrowinning of copper, the cell including a plurality of anodes and cathodes therein, the method including the steps of introducing fresh electrolyte and sparging gas to a manifold system in the cell, controlling flow of fresh electrolyte and sparging gas in the manifold system and providing outlet openings in the manifold system such that streams of fresh electrolyte and sparging gas from the outlet openings are directed relatively uniformly across the cathodes in the cell.

Abstract: The invention relates to an apparatus for purifying fluids comprising at least one electrochemical cell having a cathode (3), an anode (5) and an electrolyte (7), said cathode (3) comprising a metal complex, ML, where M represents a metal and L represents an organic or inorganic ligand, said complex being capable of forming the hydroxyl radical by a reaction wherein the metal in the complex is oxidised and acquires an additional positive charge, said anode (5) creating positive ions and electrons, said electrolyte (7) allowing the transfer of a positive charges, said cathode being arranged such that the fluid to be purified can come into contact with the metal complex on the cathode. The invention also provides a related electrode and a related electrochemical cell as well as a corresponding method for purifying fluids.

Abstract: An arrangement for cleaning the bottom of an electrolytic tank of solids settled on the bottom of the tank, said arrangement comprising elements to be moved along the bottom or at least in the vicinity thereof in order to detach solids from the bottom. The arrangement comprises at least one moveable suction element, whereby at least part of the solids accumulated on the bottom is conducted out of the tank.

Abstract: An ultra fast photodissociation system includes a water acidifier, a water vaporizer, and a photolysis cell. The water acidifier is connected in fluid communication with a water supply, and is operable to acidify the supplied water to produce acidic water. The water vaporizer is connected in fluid communication with the water acidifier to receive the acidic water, and is configured to convert the received acidic water into acidic water vapor. The photolysis cell is connected in steam communication with the water vaporizer to receive the acidic water vapor, and is operable to dissociate the acidic water vapor into H2 and O2 gas.

Abstract: A hydrogen and oxygen gas generator (100) is provided that uses electrodes (160) made of carbon graphite and disposed in a vessel (110) containing a conductive solution of water and salt (165). The carbon graphite electrodes may be made of graphite baked with a binder to form rods, and may include a conductive cladding over a portion of the rods. An electric potential is applied between the electrodes, causing a current through the saline solution that results in dissociation of water into hydrogen and oxygen, which is expelled through a gas discharge port (156) in the vessel. The generator may be used as a stand-alone combustible gas generator, or in a vehicle (90), powered by an alternator (96) driven by the vehicle engine (98), and providing hydrogen and oxygen to the engine to improve the efficiency of the engine.

Abstract: The present invention provides an electro-chemical deposition system that is designed with a flexible architecture that is expandable to accommodate future designs and gap fill requirements and provides satisfactory throughput to meet the demands of other processing systems. The electro-chemical deposition system generally comprises a mainframe having a mainframe wafer transfer robot, a loading station disposed in connection with the mainframe, one or more processing cells disposed in connection with the mainframe, and an electrolyte supply fluidly connected to the one or more electrical processing cells. Preferably, the electro-chemical deposition system includes a spin-rinse-dry (SRD) station disposed between the loading station and the mainframe, a rapid thermal anneal chamber attached to the loading station, and a system controller for controlling the electro-chemical deposition process and the components of the electro-chemical deposition system.

Abstract: A redox bipolar cell fabric washing system and method is disclosed that provides for washing fabrics without the use of any added detergents, fabric softeners, or bleaches, or other chemical al additives. The system includes a conventional fabric washing machine with a redox bipolar cell that through a circulation pump continuously treats the wash water by using mixed oxidants or charged wash water to remove contaminants from the fabric. The redox cell includes a housing, a plurality of cathode plates, a plurality of membranes, and a plurality of anodes proximately positioned in an alternate manner with a plurality of flow channels in the housing. The cell produces charged wash water by an electrochemical reaction utilizing electrically charged anodes and cathodes with semi permeable membranes, wherein the oxidation reduction potential of the charged wash water is continuously controlled with a sensor to determine when the fabrics are clean.

Abstract: An apparatus for generating a mixture of oxygen gas and hydrogen gas is provided with an electrolytic cell in which electrolysis of electrolyte therein is performed to generate the mixture of the oxygen and the hydrogen gas by electricity being applied from an electrical conversion device and having a plurality of electrode plates arranged with separation, a insulating materials attached to inner wall surfaces of the electrolytic cell and having at least one surface grooves formed thereon into which the electrode plates are inserted, a water supply device for supplementing the water into the electrolytic cell, the water supply device connected to the electrolytic cell, a gas reservoir for restoring the mixture generated in the electrolytic cell, the gas reservoir connected to the electrolytic cell, and a cooling unit for maintaining temperature inside the electrolytic cell constant connected to the electrolytic cell.

Abstract: A stream of process liquid is treated while flowing through in a horizontally elongated chamber having an open top. Longitudinally elongated electrode blades are aligned with the longitudinal dimension of the chamber. An overhead disbursement chamber supplies a sweeping air stream over the open top of the chamber for removing foam and gas reaction by-products. The electrode blades are separated and held at a desired spacing by small portable guides located below and above the blades.

Abstract: A water treatment tank for treating waste water using an electrochemical treatment process. The electrochemical process removes both suspended and dissolved solids in the water and allows the treated water to be removed from the tank for reuse or discharge. The tank includes a tank housing with first and second waste water receiving compartments. The two compartments are identical and are used alternately when treating the waste water. A waste water inlet line is attached to the top of the first compartment for filling the compartment with waste water. A side of the first compartment includes an annular opening for receiving an electrode assembly with a plurality of electrodes extending inside the compartment for treating the waste water electrochemically. The electrodes are attached to the power supply via electrode cables with the polarity of a current cycle reversed periodically depending on the types of water contaminates being treated.

Abstract: This invention is directed to an integrated onboard hydrogen (H2) production and utilization system for all watercraft, which yields environmentally benign vessel power production without new infrastructure requirements. Water (H2O) is supplied to a vessel, whether ashore, docked or underway, and is systematically converted into hydrogen and oxygen. The energy required for this process may be provided by any renewable or non-renewable source. The H2 produced is either utilized at once or stored. Energy is released from the H2 by one or more power plants.

Abstract: An apparatus for electroplating a wafer surface includes a cup having a central aperture defined by an inner perimeter, a compliant seal adjacent the inner perimeter, contacts adjacent the compliant seal and a cone attached to a rotatable spindle. The compliant seal forms a seal with the perimeter region of the wafer surface preventing plating solution from contaminating the wafer edge, wafer backside and the contacts. As a further measure to prevent contamination, the region behind the compliant seal is pressurized. By rotating the wafer during electroplating, bubble entrapment on the wafer surface is prevented. Further, the contacts can be arranged into banks of contacts and the resistivity between banks can be tested to detect poor electrical connections between the contacts and the wafer surface.

Abstract: A system having a fluid source and a pasteurizer coupled with a disinfectant unit in flow communication with the fluid source for use in disinfecting dental or other water lines. The combination of pasteurizer and disinfectant unit is adapted to receive water from the fluid source. A fluid delivery unit is provided in flow communication with the pasteurizer and disinfectant unit combination. The disinfectant unit has a means for supplying hydrogen and oxygen and a means for generating hydrogen peroxide in flow communication with the means for supplying hydrogen and oxygen.

Abstract: A high pressure electrolyzer as represented in the figure, having a number of electrolysis chambers being held in frame (1), being separated by membrane (2) to which the electrodes (3) are pressed. The electrodes are electrically connected to the bipolar plate (4) with a metal woven sheet (5). The frame has the larger conduit openings (7) on the top side and (8) on the bottom side. Conduit openings (7) evacuate the gas that is generated and openings (8) form a supply channel of electrolyte. Opening (7) is connected to the electrolyzer module's inner space with the small connecting conduit (9) and similarly opening (8) is connected to the inner space via small connecting conduit (10). A ring shaped frame having conduit openings for the supply of electrolyte and the removal of the gasses that are generated and further having a connecting surface with concentric elevations and depressions.

Abstract: The present invention is directed to an electrochemical apparatus comprising of an electrode assembly, an internal reservoir and an internal dryer. The internal dryer consists of a chamber filled with a multitude of balls to create mechanical obstacles removing moisture from gasses present inside, reducing the volume of accumulated gasses and acting as anti-splash for the electrolyte. The invention is also directed to an electrode assembly of monopolar electrodes for use in electrical apparatus. The bipolar electrode assembly comprises a pair of electrodes (12, 14), each of the electrodes having a plurality of electrode plates (16, 18) connected in series together. The electrode plates of each of the electrodes are connected to the next electrode plate in the series by a bridging member (20) contiguous with each of the interconnected electrode plates. The invention is also directed to an electrode for use in an electrode assembly.

Abstract: An electrolysis apparatus for producing halogen gases from aqueous alkali halide solution, having a number of plate-like electrolysis cells which are arranged beside one another in a stack and are in electrical contact and which each have a housing comprising two half-shells of electrically conductive material with external contact strips on at least one housing rear wall, and in each case having two essentially flat electrodes (anode and cathode) and the anode and cathode being provided with apertures like venetian blinds for the electrolysis starting materials and the electrolysis products to flow through, being separated from one another by a dividing wall and arranged parallel to one another and being electrically conductively connected to the respective associated rear wall of the housing by means of metal reinforcements, is intended to provide a solution with which, even at current densities above 4 kA/m2 and correspondingly increased production of gas in the boundary layer, it is possible to operate wh

Abstract: A portable electronic device incorporates PEM fuel cells and is designed to operate by the reaction of hydrogen from a hydride-containing fuel container and oxygen from the air, while efficiently removing the product water by a novel water transportation system. Temperature is effectively controlled by placing a plurality of fuel cell subunits as a generally planar array in the lid of the PC adjacent a heat transfer plate. A particularly efficient resupply system is provided where an electrolyzer that supplies H2 at a pressure sufficient to continue to power the PC and simultaneously recharge an operatively-connected container and a second spare container in the electrolyzer.

Abstract: An apparatus for electroplating a wafer surface includes a cup having a central aperture defined by an inner perimeter, a compliant seal adjacent the inner perimeter, contacts adjacent the compliant seal and a cone attached to a rotatable spindle. The compliant seal forms a seal with the perimeter region of the wafer surface preventing plating solution from contaminating the wafer edge, wafer backside and the contacts. As a further measure to prevent contamination, the region behind the compliant seal is pressurized. By rotating the wafer during electroplating, bubble entrapment on the wafer surface is prevented. Further, the contacts can be arranged into banks of contacts and the resistivity between banks can be tested to detect poor electrical connections between the contacts and the wafer surface.

Abstract: A porous layer is formed on an Si substrate using an anodizing apparatus having a conductive partition inserted between a cathode and an anode. First, the cathode and Si substrate are brought into electrical contact through a first electrolyte, and the conductive partition and Si substrate are brought into electrical contact through a second electrolyte. A current is flowed between the cathode and the anode to form a porous layer on the Si substrate. As the first electrolyte, an electrolyte capable of forming a porous structure on the Si substrate is used. As the second electrolyte, an electrolyte substantially incapable of forming a porous structure on the conductive partition is used.

Abstract: A water electrolysis system includes a water electrolysis cell stack having an anode and a cathode. A water storage tank having an outlet is disposed above the cell stack and communicates with an inlet of one of the anode and the cathode of the cell stack for gravity feeding water from the water storage tank to the cell stack. A phase separator is disposed below and in communication with the water storage tank. The phase separator has an inlet for receiving a two phase stream including water and product gas exiting an outlet of the one of the anode and cathode of the cell stack, and includes a conduit having a lower end disposed within the phase separator for receiving water recovered in the phase separator. The conduit has an upper end extending into the water storage tank.

Abstract: A rich oxygen gas generator includes an electrolytic tank for electrolyzing water to hydrogen and oxygen gases, a mixing tank containing a carbon hydrogen compound solvent and hydrogen and oxygen gases from the electrolytic tank, a pump for pumping air to the mixing tank to speed up evaporation of the carbon hydrogen compound solvent and a burner to receive mixing hydrogen and oxygen gas from the electrolytic tank and compound solvent gas from the mixing tank to produce flame. Flame temperature and heat may be changed and adjusted through controlling flow rate and volume of the pumping air.

Abstract: A system and method for the storage of electrical energy or of hydrogen, the method includes the steps of (a) electrolysis of water to yield hydrogen, (b) reaction of the hydrogen from step (a) with carbon dioxide to from at least one storage compound; (c) storage of the storage compound; and (d) subsequent conversion of the storage compound back to hydrogen or use of the storage compound to fuel an engine, such as an internal combustion engine, or to generate electricity directly or indirectly. One storage compound is methanol.

Abstract: An improved method of separating hydrogen gas entrained with a first aqueous electrolytic solution of a water electrolyser for producing said hydrogen and said oxygen gas entrained with a second aqueous electrolyte solution, said method comprising producing a first two-phase flow discharge of said hydrogen gas in said first solution; producing a second two-phase flow discharge of said oxygen gas in said second solution; feeding said first discharge to a first separation chamber having a portion defining a hydrogen chamber to effect separation of said hydrogen gas from said first discharge; feeding said second discharge to a second separation chamber having a portion defining an oxygen chamber to effect separation of said oxygen gas from said second discharge; collecting said hydrogen gas from said hydrogen chamber; collecting said oxygen gas from said oxygen chamber; collecting said first discharge; collecting said second discharge; the improvement wherein at least one of said first discharge is discharged in

Abstract: Electropurification of contaminated aqueous media, such as ground water and wastewater from industrial manufacturing facilities like paper mills, food processing plants and textile mills, is readily purified, decolorized and sterilized by improved, more economic open configuration electrolysis cell designs, which may be divided or undivided, allowing connection as monopolar or bipolar cells. When coupled with very narrow capillary gap electrodes more economic operation particular when treating solutions of relatively low conductivity is assured. The novel cell design is also useful in the electrosynthesis of chemicals, such as hypochlorite bleaches and other oxygenated species.

Abstract: An apparatus for generating a mixture of oxygen gas and hydrogen gas is provided with an electrolytic cell in which electrolysis of electrolyte therein is performed to generate the mixture of the oxygen and the hydrogen gas by electricity being applied from an electrical conversion device and having a plurality of electrode plates arranged with separation, a insulating materials attached to inner wall surfaces of the electrolytic cell and having at least one surface grooves formed thereon into which the electrode plates are inserted, a water supply device for supplementing the water into the electrolytic cell, the water supply device connected to the electrolytic cell, a gas reservoir for restoring the mixture generated in the electrolytic cell, the gas reservoir connected to the electrolytic cell, and a cooling unit for maintaining temperature inside the electrolytic cell constant connected to the electrolytic cell.

Abstract: The present invention provides an electro-chemical deposition system that is designed with a flexible architecture that is expandable to accommodate future designs and gap fill requirements and provides satisfactory throughput to meet the demands of other processing systems. The electro-chemical deposition system generally comprises a mainframe having a mainframe wafer transfer robot, a loading station disposed in connection with the mainframe, one or more processing cells disposed in connection with the mainframe, and an electrolyte supply fluidly connected to the one or more electrical processing cells. Preferably, the electro-chemical deposition system includes a spin-rinse-dry (SRD) station disposed between the loading station and the mainframe, a rapid thermal anneal chamber attached to the loading station, and a system controller for controlling the electro-chemical deposition process and the components of the electro-chemical deposition system.

Abstract: A water treatment tank for treating waste water using an electrochemical treatment process. The electrochemical process removes both suspended and dissolved solids and allows the treated water to be decanted from the treatment for reuse or discharge. The tank includes a tank housing with a first and second waste water receiving compartments. A waste water inlet line is attached to the top of the first compartment for filling the compartment with waste water. A side of the first compartment includes an opening for receiving an electrode assembly with a plurality of electrodes extending inside the compartment. The electrodes are attached to the power supply via electrode cables with the polarity of a current cycle reversed periodically depending on the types of water contaminates being treated. A filtrate sump is mounted in the bottom of the tank housing.

Abstract: An apparatus (200) for the treatment of effluent including a chamber (210) having an inlet (212) and an outlet (252), a plurality of plate-type electrodes (211) extending vertically in the chamber (210), and an electrical supply connected to the plurality of plate-type electrodes (211). The plurality of plate-type electrodes (211) define a plurality of channels extending within the chamber (210). Each of the plurality of channels occurs between adjacent electrodes (211). The plurality of electrodes (211) are positioned between the inlet (212) and the outlet (252). The electrical supply delivers electricity of a first polarity to a first set of a plurality of electrodes (211). The electrical supply delivers electricity of an opposite polarity to the second set of electrodes (211).

Abstract: The present invention provides an electrolyzer, which comprises vertical type electrolyzer units with irregular surfaces formed on partition walls on anode side and on partition walls on cathode side, said irregular surfaces being overlapped on each other and integrated, and electrode plates being connected to convex portions of the partition walls, whereby said irregular surfaces are formed as troughs and ridges extending in vertical direction of the electrolyzer units, said irregular surfaces are divided into a plurality of sectors in height direction, said trough in each sector extends along the same straight line as the ridge of another sector, a liquid junction is provided to connect adjacent troughs in the same sector in the connecting portion of the adjacent sector and to connect the troughs in adjacent sectors, and an internal circulation member is provided between the partition wall and the electrode surface, using inclined surfaces of the trough on the partition wall or a member parallel to the incl

Abstract: A bipolar metal electrode for the electrolysis of hydrochloric acid, comprising a nickel alloy cathode plate and a titanium anode mesh coupled together by a hydrogen barrier, where the hydrogen barrier is an aluminum plate, where the titanium anode mesh is connected to a titanium backplate by a plurality of titanium supports and where the titanium backplate is spaced apart from the nickel alloy cathode plate by the aluminum plate. An electrolyser comprising one or more bipolar electrodes according to present invention. A method of producing chlorine from hydrochloric acid comprising providing one or more bipolar metal electrodes according to the present invention or an electrolyser according to the present invention, and contacting the one or more bipolar electrodes or the electrolyser with hydrochloric acid.

Abstract: An apparatus for electroplating a wafer surface includes a cup having a central aperture defined by an inner perimeter, a compliant seal adjacent the inner perimeter, contacts adjacent the compliant seal and a cone attached to a rotatable spindle. The compliant seal forms a seal with the perimeter region of the wafer surface preventing plating solution from contaminating the wafer edge, wafer backside and the contacts. As a further measure to prevent contamination, the region behind the compliant seal is pressurized. By rotating the wafer during electroplating, bubble entrapment on the wafer surface is prevented. Further, the contacts can be arranged into banks of contacts and the resistivity between banks can be tested to detect poor electrical connections between the contacts and the wafer surface.

Abstract: The invention relates to an electrolyzer for the electrolysis of water in hydrogen and oxygen with a number of electrolytic cells, each containing an anode and a cathode, connected in series in a cell block surrounded by a pressure vessel. At one end of the cell block is a first electrode, and at the opposite end of the cell block is a second electrode. Both are connected with leading-in cables, which run through the pressure vessel and conduct the electric current to the cell block, the interior of the pressure vessel being filled with pressurized water surrounding the cell block. In accordance with the invention, it is envisaged that the first electrode is placed inside the cell block so as to be electrically isolated, by encapsulation, with respect to the pressurized water, and that there is a channel, sealed against the pressurized water, that leads from the cell block through the pressurized vessel to the outside.

Abstract: The present invention generally provides an electro-chemical deposition system that is designed with a flexible architecture that is expandable to accommodate future designs rules and gap fill requirements and provides satisfactory throughput to meet the demands of other processing systems. The electro-chemical deposition system generally comprises a mainframe having a mainframe wafer transfer robot, a loading station disposed in connection with the mainframe, a rapid thermal anneal chamber disposed adjacent the loading station, one or more processing cells disposed in connection with the mainframe, and an electrolyte supply fluidly connected to the one or more electrical processing cells. One aspect of the invention provides a post electrochemical deposition treatment, such as a rapid thermal anneal treatment, for enhancing deposition results.

Abstract: An apparatus for producing orthohydrogen and/or parahydrogen. The apparatus includes a container holding water and at least one pair of closely-spaced electrodes arranged within the container and submerged in the water. A first power supply provides a particular first pulsed signal to the electrodes. A coil may also be arranged within the container and submerged in the water if the production of parahydrogen is also required. A second power supply provides a second pulsed signal to the coil through a switch to apply energy to the water. When the second power supply is disconnected from the coil by the to switch and only the electrodes receive a pulsed signal, then orthohydrogen can be produced. When the second power supply is connected to the coil and both the electrodes and coil receive pulsed signals, then the first and second pulsed signals can be controlled to produce parahydrogen.

Abstract: A gas generator includes a housing for receiving an electrolyte and has an outlet duct for collecting the gas. A number of cells are disposed in the housing for forming a number of spaces between the cells. A tube and a pipe are coupled together by a conduit and are engaged through the cells and each has a number of holes communicating with the spaces for allowing the electrolyte to be drawn out of the housing to a cool device and for allowing the electrolyte to be circulate into the housing via the pipe. An indicator is used for indicating the level of the electrolyte.

Abstract: A device for gasifying water conducted in a subsystem of a technical installation with hydrogen includes an electrolysis unit connected in the subsystem for decomposing some of the water conducted therein into hydrogen and oxygen, and a dissipation system connected to the electrolysis unit for dissipating oxygen received therefrom.

Abstract: A filtering mechanism for especially well suited for corrosive mists which are generated from electro-refining systems. A layer of bristles forming a brush is secured to an electrode within the electro-refining system. As the electro-refining system produces a mist of corrosive chemicals above the slurry, the mist rises through the bristles. As the mist passes through the bristles, the corrosive chemical adheres to the bristles; hence, the corrosive chemical does not pass into the surrounding environment. Periodically, the bristles are washed to remove the corrosive chemicals. In one embodiment of the invention, the edge between the electrodes and the wall of the slurry bath are partially sealed with a pliable member which assists in directing the mist through the bristles.