Selected Area Patents (Class 205/221)
  • Patent number: 9637835
    Abstract: A method of preparing a metal composite, comprising the steps of: forming an anodic oxidation layer on a surface of a metal substrate; forming a dye layer comprising a dye and a water soluble ink on the anodic oxidation layer, wherein the dye layer has a graduated thickness; and removing the water soluble ink.
    Type: Grant
    Filed: July 9, 2013
    Date of Patent: May 2, 2017
    Assignee: BYD COMPANY LIMITED
    Inventors: Chunnan Gao, Liang Chen
  • Patent number: 9375946
    Abstract: Disclosed is a method for creating a mark desired properties on an anodized specimen and the mark itself. The method includes providing a laser marking system having a controllable laser pulse parameters, determining the laser pulse parameters associated with the desired properties and directing the laser marking system to mark the article using the selected laser pulse parameters. Laser marks so made have optical density that ranges from transparent to opaque, white color, texture indistinguishable from the surrounding article and durable, substantially intact anodization. The anodization may also be dyed and optionally bleached to create other colors.
    Type: Grant
    Filed: May 23, 2013
    Date of Patent: June 28, 2016
    Assignee: Electro Scientific Industries, Inc.
    Inventor: Haibin Zhang
  • Patent number: 9337002
    Abstract: Components of semiconductor material processing chambers are disclosed, which may include a substrate and at least one corrosion-resistant coating formed on a surface thereof. The at least one corrosion-resistant coating is a high purity metal coating formed by a cold-spray technique. An anodized layer can be formed on the high purity metal coating. The anodized layer comprises a process-exposed surface of the component. Semiconductor material processing apparatuses including one or more of the components are also disclosed, the components being selected from the group consisting of a chamber liner, an electrostatic chuck, a focus ring, a chamber wall, an edge ring, a plasma confinement ring, a substrate support, a baffle, a gas distribution plate, a gas distribution ring, a gas nozzle, a heating element, a plasma screen, a transport mechanism, a gas supply system, a lift mechanism, a load lock, a door mechanism, a robotic arm and a fastener.
    Type: Grant
    Filed: March 12, 2013
    Date of Patent: May 10, 2016
    Assignee: LAM RESEARCH CORPORATION
    Inventors: John Daugherty, Hong Shih, Lin Xu, Anthony Amadio, Robert G. O'Neill, Peter Holland, Sivakami Ramanathan, Tae Won Kim, Duane Outka, John Michael Kerns, Sonia Castillo
  • Publication number: 20150136731
    Abstract: The present disclosure generally relates to durable solar mirror films, methods of making durable solar mirror films, and constructions including durable solar mirror films. Some embodiments of the present disclosure relate to methods of making solar mirror films that do not include a reflective layer material across the entire weatherable layer. Some embodiments relate to a method of making a solar mirror film involving providing a weatherable layer having a first major surface and a second major surface; depositing a reflective material on the first major surface of the weatherable layer; and removing a portion of the reflective material (e.g., ultrasonically, mechanically, or thermally).
    Type: Application
    Filed: April 22, 2013
    Publication date: May 21, 2015
    Inventors: Attila Molnar, Andrew J. Henderson, Joseph H. Eaton, Ralph Gielissen, Daniel T. Chen, Mark B. O'Neill
  • Patent number: 8968548
    Abstract: A method of producing a multicolor surface is described herein. The method includes the following steps: providing an aluminum-based substrate having an outer and inner surfaces; performing a mechanical process on the substrate; forming at least one fixing portion on the inner surface of the substrate; forming at least one conductive hole on the fixing portion; performing a first anodization on the substrate to form a first oxide layer that can be dyed with a first color on the outer surface of the substrate; removing at least some of the first oxide layer from the fixing portion and the outer surface of the substrate; performing a second anodization on the substrate to form a second oxide layer that can be dyed with a second color on the exposed outer surface of the substrate stripped of the first oxide layer; and removing the fixing portion.
    Type: Grant
    Filed: May 12, 2012
    Date of Patent: March 3, 2015
    Assignee: Catcher Technology Co., Ltd.
    Inventors: Feng-Ju Lai, Shao-Kang Hu
  • Publication number: 20140355931
    Abstract: An optical interposer that includes a glass substrate having one or more optical vias extending through the glass substrate. A first optical polymer may be bonded to the substrate and to interior surfaces of the one or more optical vias. Implementations include one or more optical via cores comprising a second optical polymer that has a greater refractive index than the first optical polymer. The one or more optical via cores may be at least partially surrounded by the first optical polymer. Embodiments include encapsulated optical waveguides in communication with the optical vias and/or via cores. Example implementations include layers of electrical insulation, electrical traces, and electrical vias. A method of manufacture includes forming the optical vias by laser ablation. Certain embodiments may include chemically etching the inside of the vias to improve surface roughness.
    Type: Application
    Filed: May 28, 2014
    Publication date: December 4, 2014
    Applicant: Georgia Tech Research Corporation
    Inventors: Rao R. Tummala, Chia-Te Chou, Venkatesh Sundaram
  • Publication number: 20140300436
    Abstract: A method for plating magnets with metal is disclosed. In one embodiment, the metal is aluminum and the aluminum plating provides a number of aesthetic and structural advantages, over brittle magnetic materials, which are only plated with a thin, anti-corrosive metallic layer. More specifically, methods for creating multi-pole bar magnets and structural elements primarily with aluminum coated magnetic material are disclosed.
    Type: Application
    Filed: April 10, 2014
    Publication date: October 9, 2014
    Applicant: Apple Inc.
    Inventor: Simon Regis Louis Lancaster-Larocque
  • Publication number: 20140216211
    Abstract: A ratchet includes multiple ratchet teeth defined in the outer periphery thereof and a coated layer is coated along the outer periphery of the ratchet. A sand blasting device is used to blast sands to remove a part of the coated layer to define a circular endless opening on the coated layer, and the ratchet teeth protrude the coated layer from the openings.
    Type: Application
    Filed: February 5, 2013
    Publication date: August 7, 2014
    Inventor: Cheng-Pu Yang
  • Patent number: 8721864
    Abstract: A metal covered polyimide composite comprising a tie-coat layer and a metal seed layer formed on a surface of a polyimide film by electroless plating or a drying method is provided. A copper layer or a copper alloy layer is formed thereon by electroplating. The copper plated layer or copper alloy plated layer includes three layers to one layer of the copper layer or copper alloy layer. The metal covered polyimide composite effectively prevents peeling in a non-adhesive flexible laminate (especially a two-layer flexible laminate), and more particularly, effectively inhibits peeling from the interface of a copper layer and tin plating. A method of producing the composite and apparatus for producing the composite are also provided.
    Type: Grant
    Filed: February 3, 2012
    Date of Patent: May 13, 2014
    Assignee: JX Nippon Mining & Metals Corporation
    Inventors: Michiya Kohiki, Naonori Michishita, Nobuhito Makino
  • Publication number: 20140124374
    Abstract: A position locator for use in dental restorative procedure is described. The position locator is inserted into a replica of a dental implant or into a replica of an abutment. The position and orientation of the implant replica is determined by scanning the model with the implant replica and the position locator. Alternatively, the position locator can be inserted into the dental implant and scanning is carried out in the mouth of the patient. The position locator is made of an optically opaque material, such as titanium, and has an outer surface detectable by an optical scanner, e.g. with a layer of porous titanium oxide applied through anodic oxidation.
    Type: Application
    Filed: October 31, 2013
    Publication date: May 8, 2014
    Applicant: Nobel Biocare Services AG
    Inventors: Thomas Eriksson, Magnus Ottsjö
  • Publication number: 20140083862
    Abstract: An electroplating apparatus has a rotor in a head, with a contact ring on the rotor. A lift/rotate actuator may move the head to position a sector of the contact ring into a deplate channel of a deplating station. Electrical current and a deplate liquid are applied directly onto the contacts of the contact ring, from a position radially inward of the contacts. Electrical current and a deplate liquid may also be separately applied onto the back side of the ring contact, from a position radially to the outside of the contact ring. A seal on the deplating station makes sliding contact with the contact ring as the contact ring rotates through the deplate channel, with the seal associated with an exhaust or vacuum opening that pulls deplating and rinse liquid through openings in the contact ring.
    Type: Application
    Filed: September 25, 2013
    Publication date: March 27, 2014
    Inventors: Randy A. Harris, Bryan J. Puch
  • Publication number: 20140011014
    Abstract: A method of making a three-dimensional porous device entails providing a substrate having a conductive pattern on a surface thereof, and depositing a colloidal solution comprising a plurality of microparticles onto the surface, where the microparticles assemble into a lattice structure. Interstices of the lattice structure are infiltrated with a conductive material, which propagates through the interstices in a direction away from the substrate to reach a predetermined thickness. The conductive material spans an area of the surface overlaid by the conductive pattern. The microparticles are removed to form voids in the conductive material, thereby forming a conductive porous structure having the predetermined thickness and a lateral size and shape defined by the conductive pattern.
    Type: Application
    Filed: January 6, 2011
    Publication date: January 9, 2014
    Applicant: The Board of Trustees of the University of Illinois
    Inventors: William P. King, Paul V. Braun, Zhenting Dai, Xindi Yu, Hui Gang Zhang
  • Publication number: 20130299357
    Abstract: A method of producing a multicolor surface is described herein. The method includes the following steps: providing an aluminum-based substrate having an outer and inner surfaces; performing a mechanical process on the substrate; forming at least one fixing portion on the inner surface of the substrate; forming at least one conductive hole on the fixing portion; performing a first anodization on the substrate to form a first oxide layer that can be dyed with a first color on the outer surface of the substrate; removing at least some of the first oxide layer from the fixing portion and the outer surface of the substrate; performing a second anodization on the substrate to form a second oxide layer that can be dyed with a second color on the exposed outer surface of the substrate stripped of the first oxide layer; and removing the fixing portion.
    Type: Application
    Filed: May 12, 2012
    Publication date: November 14, 2013
    Applicant: CATCHER TECHNOLOGY CO., LTD.
    Inventors: FENG-JU LAI, SHAO-KANG HU
  • Publication number: 20130201604
    Abstract: One object is to provide a porous capacitor having an improved mechanical strength and a method of manufacturing the porous capacitor. In accordance with one aspect, the porous capacitor has a first conductor layer a second conductor layer opposed to each other at a certain distance, a dielectric layer made of an oxidized valve metal and disposed between the first conductor layer and the second conductor layer, a large number of holes in the dielectric layer substantially orthogonal to the first conductor layer and the second conductor layer, first and second electrodes made of a conductive material filled in the holes, insulators for electrically insulating the first electrodes from the second conductor layer and the second electrodes from the first conductor layer, wherein the levels of the ends of the first and/or second electrodes electrically insulated from the second and/or first conductor layers are uneven with each other.
    Type: Application
    Filed: January 29, 2013
    Publication date: August 8, 2013
    Applicant: TAIYO YUDEN CO., LTD.
    Inventor: TAIYO YUDEN CO., LTD.
  • Publication number: 20120267337
    Abstract: A process for forming a porous nanoscale membrane is described. The process involves applying a nanoscale film to one side of a substrate, where the nanoscale film includes a semiconductor material; masking an opposite side of the substrate; etching the substrate, beginning from the masked opposite side of the substrate and continuing until a passage is formed through the substrate, thereby exposing the film on both sides thereof to form a membrane; and then simultaneously forming a plurality of randomly spaced pores in the membrane. The resulting porous nanoscale membranes, characterized by substantially smooth surfaces, high pore densities, and high aspect ratio dimensions, can be used in filtration devices, microfluidic devices, fuel cell membranes, and as electron microscopy substrates.
    Type: Application
    Filed: April 20, 2012
    Publication date: October 25, 2012
    Applicant: UNIVERSITY OF ROCHESTER
    Inventors: Christopher C. STRIEMER, Philippe M. FAUCHET, Thomas R. GABORSKI, James L. MCGRATH
  • Publication number: 20120168198
    Abstract: A method for producing electrical components for electrical contacts, and such a component are provided. To achieve simpler production of a partial surface treatment, which likewise exhibits optimal current carrying capacity, with minimum material use of noble metals, the entirety of the components are provided with an electrically insulating passivation layer, and the passivation is then removed chemically or mechanically at the contact points of the components. The entire components are put into an electrolytic bath, and a noble metal is deposited only on the parts of the components from which the passivation layer has been removed.
    Type: Application
    Filed: September 6, 2011
    Publication date: July 5, 2012
    Applicant: ABB Technology AG
    Inventor: Dietmar GENTSCH
  • Patent number: 8197659
    Abstract: A method for manufacturing a multilayer printed circuit board including providing a core substrate having a penetrating-hole, forming an electroless plated film on a surface of the substrate and an inner wall surface of the penetrating-hole, electrolytically plating the substrate while moving with respect to the surface of the substrate an insulating member in contact with the surface of the substrate such that an electrolytic plated film is formed on the electroless plated film, an opening space inside the penetrating-hole is filled with an electrolytic material, and a through-hole conductor structure is formed in the penetrating-hole, forming an etching resist having an opening pattern on the electrolytic plated film, and removing an exposed pattern of the electrolytic plated film exposed by the opening pattern and a pattern of the electroless plated film under the exposed pattern such that a conductor circuit is formed on the surface of the substrate.
    Type: Grant
    Filed: September 22, 2011
    Date of Patent: June 12, 2012
    Assignee: IBIDEN Co., Ltd.
    Inventors: Toru Nakai, Satoru Kawai, Hiroshi Niwa, Yoshiyuki Iwata
  • Publication number: 20110315558
    Abstract: In a through hole closing process, a metal plate is attached to one surface of a conductive base member having a plurality of through holes by the use of a magnet, in a copper plating process, a copper plating layer is formed on the conductive base member and the metal plate exposed within the through holes, from the side of the conductive base member where the metal plate is not attached, thereby to fill up the through holes, in a film forming process, a Pd alloy film is formed by plating on the surface of the conductive base member after removal of the metal plate, and in a removal process, the copper plating layer is removed by selective etching, thereby to produce a hydrogen production filter that is used in a reformer a fuel cell so as to be capable of stably producing high purity hydrogen gas.
    Type: Application
    Filed: September 9, 2011
    Publication date: December 29, 2011
    Applicant: DAI NIPPON INSATSU KABUSHIKI KAISHA
    Inventors: Hiroshi YAGI, Takanori Maeda, Yoshinori Oota, Yasuhiro Uchida
  • Publication number: 20110308958
    Abstract: A layer arrangement for a gravure cylinder including nickel in at least a first region through the entire thickness (d) thereof, with a mass fraction of at least 0.80, the arrangement being designed to permit an imaging by means of a laser in the first region and to serve as the outermost layer of the gravure cylinder for intaglio printing. A method for producing a layer arrangement for a printing form wherein the layer arrangement includes nickel in at least a first region through the entire thickness (d) thereof, with a mass fraction of at least 0.80 and at least in the radially external region has a solid lubricant component (X) has the following steps: the layer arrangement is produced on a cylinder core by galvanic coating and a printing image is generated on the layer arrangement for intaglio printing.
    Type: Application
    Filed: September 1, 2011
    Publication date: December 22, 2011
    Applicant: IPT International Plating Technologies GmbH
    Inventor: Matthias Kurrle
  • Publication number: 20110297319
    Abstract: A method for creating an oxide layer having a reduced copper concentration over a surface of an object comprising aluminum and copper for use in a semiconductor processing system. The oxide layer produced using a plasma electrolytic oxidation process has a reduced copper peak concentration, which decreases a risk of copper contamination, and includes magnesium oxides that can be converted to magnesium halide upon exposure to an excited halogen-comprising gas or halogen-comprising plasma to increase the erosion/corrosion resistance of the oxide layer.
    Type: Application
    Filed: June 4, 2010
    Publication date: December 8, 2011
    Applicant: MKS Instruments, Inc.
    Inventors: Xing Chen, Chengxiang Ji, Chiu-Ying Tai
  • Publication number: 20110171425
    Abstract: A method is disclosed for defining discrete magnetic and non-magnetic regions on the magnetic film layer of a storage media substrate. The method applies anodic oxidation of a cobalt-containing magnetic film layer to remove cobalt, followed by controlled deposition of a non-magnetic matrix into the regions where the cobalt has been removed. Deposition may either be electrodeposition, collimated vacuum deposition, or other methods depending upon the composition of the non-magnetic matrix being deposited. The method may be performed in a single electrochemical cell.
    Type: Application
    Filed: January 11, 2010
    Publication date: July 14, 2011
    Applicant: SEAGATE TECHNOLOGY LLC
    Inventors: Ibro Tabakovic, Mark Thomas Kief, Steve Riemer, Jie Gong, Ming Sun
  • Publication number: 20110123737
    Abstract: Techniques or processes for providing markings on products are disclosed. In one embodiment, the products have housings and the markings are to be provided on the housings. For example, a housing for a particular product can include an outer housing surface and the markings can be provided in the outer housing surface so as to be visible from the outside of the housing.
    Type: Application
    Filed: February 4, 2011
    Publication date: May 26, 2011
    Inventor: Michael Nashner
  • Publication number: 20110089039
    Abstract: Techniques or processes for providing markings on products are disclosed. In one embodiment, the products have housings and the markings are to be provided on sub-surfaces of the housings. For example, a housing for a particular product can include an outer housing surface and the markings can be provided on a sub-surface the outer housing surface yet still be visible from the outside of the housing. Since the markings are beneath the surface of the housing, the markings are durable.
    Type: Application
    Filed: September 30, 2010
    Publication date: April 21, 2011
    Inventor: Michael Nashner
  • Publication number: 20100301010
    Abstract: The present invention provides an etchant composition suitable for etching metals Cu/Mo, wherein the composition comprises 1 to 25 wt % of hydrogen peroxide on the basis of the total weight of the composition; 0.1 to 15 wt % of amino acid on the basis of the total weight of the composition; 0.1 to 15 wt % of a pH stabilizer on the basis of the total weight of the composition; 0.01 to 2 wt % of fluorine-containing acid on the basis of the total weight of the composition; 0.01 to 3 wt % of an acidic pH adjuster on the basis of the total weight of the composition; and an aqueous medium. The present invention also provides a process for etching metals Cu/Mo with the etchant composition of the present invention.
    Type: Application
    Filed: October 2, 2008
    Publication date: December 2, 2010
    Applicant: BASF SE
    Inventors: Cheng Wei Lin, Mo Hsun Tsai
  • Patent number: 7838105
    Abstract: Disclosed is a microstructure comprising an aluminum anodized film bearing through micropores, wherein a surface of the microstructure is covered with a protective film for preventing hydration of the aluminum anodized film. The microstructure may be used as a porous alumina membrane filter excellent in filtration rate and its stability with time.
    Type: Grant
    Filed: September 17, 2007
    Date of Patent: November 23, 2010
    Assignee: FUJIFILM Corporation
    Inventors: Yusuke Hatanaka, Tadabumi Tomita, Yoshinori Hotta, Akio Uesugi
  • Publication number: 20100282613
    Abstract: Electrochemical etching tailors topography of a nanocrystalline or amorphous metal or alloy, which may be produced by any method including, by electrochemical deposition. Common etching methods can be used. Topography can be controlled by varying parameters that produce the item or the etching parameters or both. The nanocrystalline article has a surface comprising at least two elements, at least one of which is metal, and one of which is more electrochemically active than the others. The active element has a definite spatial distribution in the workpiece, which bears a predecessor spatial relationship to the specified topography. Etching removes a portion of the active element preferentially, to achieve the specified topography. Control is possible regarding: roughness, color, particularly along a spectrum from silver through grey to black, reflectivity and the presence, distribution and number density of pits and channels, as well as their depth, width, size.
    Type: Application
    Filed: November 15, 2007
    Publication date: November 11, 2010
    Applicant: Massachusetts Institute of Technology
    Inventors: Christopher A. Schuh, Shiyun Ruan
  • Patent number: 7828952
    Abstract: Multi-layer structures are electrochemically fabricated by depositing a first material, selectively etching the first material (e.g. via a mask), depositing a second material to fill in the voids created by the etching, and then planarizing the depositions so as to bound the layer being created and thereafter adding additional layers to previously formed layers. The first and second depositions may be of the blanket or selective type. The repetition of the formation process for forming successive layers may be repeated with or without variations (e.g. variations in: patterns; numbers or existence of or parameters associated with depositions, etchings, and or planarization operations; the order of operations, or the materials deposited). Other embodiments form multi-layer structures using operations that interlace material deposited in association with some layers with material deposited in association with other layers.
    Type: Grant
    Filed: October 6, 2006
    Date of Patent: November 9, 2010
    Assignee: Microfabrica Inc.
    Inventor: Dennis R. Smalley
  • Patent number: 7824535
    Abstract: A microstructure includes an anodized aluminum layer that has on a surface thereof micropores, at least some of which contain a catalyst, in a micropore array with a degree of ordering of at least 40%. A method of manufacturing the microstructure includes anodizing an aluminum member to form on its surface an anodized layer having micropores, removing the aluminum member, and supporting a catalyst on at least part of the anodized layer. The microstructure is excellent in heat resistance.
    Type: Grant
    Filed: January 30, 2007
    Date of Patent: November 2, 2010
    Assignee: FUJIFILM Corporation
    Inventors: Yusuke Hatanaka, Tadabumi Tomita, Yoshinori Hotta, Akio Uesugi
  • Publication number: 20100264036
    Abstract: Disclosed is a microfine structure which can be used as an anisotropic conductive member. Also disclosed is a method for producing such a microfine structure. Specifically disclosed is a microfine structure which is composed of a base having penetrating micropores at a density of not less than 10,000,000 micropores/mm2. In this microfine structure, some penetrating micropores are filled with a substance other than the material of the base.
    Type: Application
    Filed: August 21, 2008
    Publication date: October 21, 2010
    Applicant: FUJIFILM Corporation
    Inventors: Yusuke Hatanaka, Yoshinori Hotta, Akio Uesugi
  • Publication number: 20100137171
    Abstract: The invention is a microporous layer to be used in metal forming processes providing lower friction and improved resistance against galling. The layer is a thin, porous metallic film, which is electrochemically deposited on a metallic substrate, whereafter one of the metals of the deposited film is selectively removed by chemical etching, thereby leaving a micro- or even nanoporous layer on the surface of the substrate, which enhances lubricant entrapment leading to improved lubrication during metal forming processes.
    Type: Application
    Filed: June 20, 2008
    Publication date: June 3, 2010
    Applicant: Danmarks Tekniske Universitet
    Inventors: Peter Torben Tang, Mogens Arentoft, Niels Bay, Morten Jerne Borrild, Io Mizushima, Jørgen Dai Jensen, Nikolas Aulin Paldan
  • Patent number: 7722754
    Abstract: A method of manufacturing a microstructure wherein an aluminum member having an aluminum substrate and a micropore-bearing anodized film present on a surface of the aluminum substrate is subjected at least to, in order, a pore-ordering treatment which involves performing one or more cycles of a step that includes a first film dissolution treatment for dissolving the anodized film until a barrier layer has a thickness of 3 to 50 nm, and an anodizing treatment which follows the first film dissolution treatment; and a second film dissolution treatment for dissolving the anodized film so that a ratio of a diameter of a micropore opening “a” to a micropore diameter at a height “a/2” from a micropore bottom “b” (a/b) is in a range of 0.9 to 1.1, whereby the microstructure having micropores formed on a surface thereof is obtained. The manufacturing method enables microstructures having an ordered array of pits to be obtained in a short period of time.
    Type: Grant
    Filed: June 11, 2007
    Date of Patent: May 25, 2010
    Assignee: FUJIFILM Corporation
    Inventors: Yusuke Hatanaka, Tadabumi Tomita, Yoshinori Hotta, Akio Uesugi
  • Patent number: 7699971
    Abstract: Disclosed is a method of manufacturing a microstructure, wherein an aluminum substrate is subjected to, in order, (1) a step of subjecting a surface of the aluminum substrate to a first anodizing treatment to form an anodized film having micropores on the surface of the aluminum substrate; (2) a step of partially dissolving the anodized film using an acid or alkali; (3) a step of performing a second anodizing treatment to grow the micropores in their depth direction; and (4) a step of removing a part of the anodized film above inflection points in cross section of the micropores, whereby the microstructure having the micropores formed at a surface of the anodized film is obtained and a microstructure manufactured by the method. The method is capable of obtaining in a short period of time a microstructure having an ordered array of pits without using highly toxic chromic (VI) acid.
    Type: Grant
    Filed: December 21, 2007
    Date of Patent: April 20, 2010
    Assignee: FUJIFILM Corporation
    Inventors: Yusuke Hatanaka, Yoshinori Hotta
  • Patent number: 7655127
    Abstract: Method of fabricating electronic devices is disclosed. The method includes the steps of forming an anodized layer that has a thickness greater than a desired thickness, and forming an electrically conductive layer on the anodized layer. The method further includes the steps of removing the conductive layer in a selected area to expose the anodized layer, and removing the exposed anodized layer until the anodized layer in the exposed area has the desired thickness.
    Type: Grant
    Filed: November 27, 2006
    Date of Patent: February 2, 2010
    Assignee: 3M Innovative Properties Company
    Inventors: Michael W. Bench, Steven D. Theiss, Grace L. Ho
  • Patent number: 7648760
    Abstract: In a method of manufacturing a microstructure, an aluminum member having an aluminum substrate and a micropore-bearing anodized layer present on a surface of the aluminum substrate is subjected at least to, in order, a pore-ordering treatment which involves performing one or more cycles of a step that includes a first film dissolution treatment for dissolving 0.001 to 20 wt % of a material constituting the anodized layer and an anodizing treatment which follows the first film dissolution treatment; and a second film dissolution treatment for dissolving the anodized layer, thereby obtaining the microstructure having micropores formed on a surface thereof. This method enables a microstructure having an ordered array of pits to be obtained in a short period of time.
    Type: Grant
    Filed: February 5, 2007
    Date of Patent: January 19, 2010
    Assignee: FUJIFILM Corporation
    Inventors: Yusuke Hatanaka, Tadabumi Tomita, Yoshinori Hotta, Akio Uesugi
  • Patent number: 7517444
    Abstract: The present invention relates to methods and apparatus for plating a conductive material on a workpiece surface in a highly desirable manner. Using a workpiece-surface-influencing device, such as a mask or sweeper, that preferentially contacts the top surface of the workpiece, relative movement between the workpiece and the workpiece-surface-influencing device is established so that an additive in the electrolyte solution disposed on the workpiece and which is adsorbed onto the top surface is removed or otherwise its amount or concentration changed with respect to the additive on the cavity surface of the workpiece. Plating of the conductive material can place prior to, during and after usage of the workpiece-surface-influencing device, particularly after the workpiece surface influencing device no longer contacts any portion of the top surface of the workpiece, to achieve desirable semiconductor structures.
    Type: Grant
    Filed: July 26, 2005
    Date of Patent: April 14, 2009
    Assignee: Novellus Systems, Inc.
    Inventor: Bulent M. Basol
  • Patent number: 7449098
    Abstract: A disclosed form of mechanically assisted electroplating leads to a flat, thin, overburden. In one example, an accelerator is deposited on a copper surface and mechanically removed in a simplified CMP-like apparatus. The wafer is then plated in an electrolyte containing little or no accelerating additives.
    Type: Grant
    Filed: December 17, 2003
    Date of Patent: November 11, 2008
    Assignee: Novellus Systems, Inc.
    Inventors: Steven T. Mayer, Jonathan D. Reid, Mark L. Rea, Ismail T. Emesh, Henner W. Meinhold, John S. Drewery
  • Publication number: 20080173548
    Abstract: A process for applying patterning across the surface of a chrome plated article. The process uses electroplated layers of nickel and chromium in combination with controlled and selectively applied dimpling treatment of coated layers to impart patterns of predefined differential reflectivity across the final surface while nonetheless retaining corrosion resistance.
    Type: Application
    Filed: January 23, 2008
    Publication date: July 24, 2008
    Inventor: Richard Lee Macary
  • Publication number: 20080142367
    Abstract: Systems and methods for plating and/or etching of hard-to-plate metals are provided. The systems and methods are designed to overcome the deleterious effect of superficial coating or oxide layers that interfere with the plating or etching of certain metal substrates. The systems and methods involve in situ removal of coating materials from the surfaces of the metal substrates while the substrates are either submerged in plating or etching solutions, or are positioned in a proximate enclosure just prior to submersion in the plating or etching solutions. Further, the substrates can be in contact with a suitable patterning mask to obtain patterned oxide-free regions for plating or etching. This in situ removal of coating layers may be achieved by pulse heating or photoablation of the substrate and the inhibiting coating layers. Electrical energy or laser light energy may be used for this purpose. Additionally or alternatively, the coating materials may be removed by mechanical means.
    Type: Application
    Filed: June 22, 2007
    Publication date: June 19, 2008
    Inventors: Robert J. Von Gutfeld, Alan C. West
  • Patent number: 7351321
    Abstract: An electroplating method that includes: a) contacting a first substrate with a first article, which includes a substrate and a conformable mask disposed in a pattern on the substrate; b) electroplating a first metal from a source of metal ions onto the first substrate in a first pattern, the first pattern corresponding to the complement of the conformable mask pattern; and c) removing the first article from the first substrate, is disclosed. Electroplating articles and electroplating apparatus are also disclosed.
    Type: Grant
    Filed: October 1, 2003
    Date of Patent: April 1, 2008
    Assignee: Microfabrica, Inc.
    Inventor: Adam L. Cohen
  • Publication number: 20080073114
    Abstract: An electroplating process is performed using a substrate that includes a thickness of voltage switchable dielectric (VSD) material having photoactive components that are dispersed, mixed or dissolved in a binder of the VSD material. A pattern of conductive elements may be formed on the substrate by switching the VSD material from a dielectric state to a conductive state using, in part, voltage generated by directing light onto the thickness and VSD material.
    Type: Application
    Filed: September 24, 2007
    Publication date: March 27, 2008
    Inventors: Lex Kosowsky, Robert Fleming
  • Patent number: 7303663
    Abstract: Multilayer structures are electrochemically fabricated from at least one structural material (e.g. nickel), that is configured to define a desired structure and which may be attached to a substrate, and from at least one sacrificial material (e.g. copper) that surrounds the desired structure. After structure formation, the sacrificial material is removed by a multi-stage etching Operation. In some embodiments sacrificial material to be removed may be located within passages or the like on a substrate or within an add-on component. The multi-stage etching Operations may be separated by intermediate post processing activities, they may be separated by cleaning Operations, or barrier material removal Operations, or the like. Barriers may be fixed in position by contact with structural material or with a substrate or they may be solely fixed in position by sacrificial material and are thus free to be removed after all retaining sacrificial material is etched.
    Type: Grant
    Filed: May 7, 2003
    Date of Patent: December 4, 2007
    Assignee: Microfabrica, Inc.
    Inventors: Adam L. Cohen, Michael S. Lockard, Dale S. McPherson
  • Patent number: 7254503
    Abstract: A wavelength correction function provides corrected reflectance values from actual reflectance values taken in a reflectance-base instrument. The correction is provided as a function of measured reflectance values and a predefined set of high resolution reflectance values established for the reflectance-based instrument implementing the wavelength correction function.
    Type: Grant
    Filed: June 3, 2004
    Date of Patent: August 7, 2007
    Assignee: Siemens Medical Solutions Diagnostics
    Inventor: Willis E. Howard, III
  • Patent number: 7252861
    Abstract: Multi-layer structures are electrochemically fabricated by depositing a first material, selectively etching the first material (e.g. via a mask), depositing a second material to fill in the voids created by the etching, and then planarizing the depositions so as to bound the layer being created and thereafter adding additional layers to previously formed layers. The first and second depositions may be of the blanket or selective type. The repetition of the formation process for forming successive layers may be repeated with or without variations (e.g. variations in: patterns; numbers or existence of or parameters associated with depositions, etchings, and or planarization operations; the order of operations, or the materials deposited). Other embodiments form multi-layer structures using operations that interlace material deposited in association with some layers with material deposited in association with other layers.
    Type: Grant
    Filed: May 7, 2003
    Date of Patent: August 7, 2007
    Assignee: Microfabrica Inc.
    Inventor: Dennis R. Smalley
  • Patent number: 7250101
    Abstract: Multilayer structures are electrochemically fabricated on a temporary (e.g. conductive) substrate and are thereafter bonded to a permanent (e.g. dielectric, patterned, multi-material, or otherwise functional) substrate and removed from the temporary substrate. In some embodiments, the structures are formed from top layer to bottom layer, such that the bottom layer of the structure becomes adhered to the permanent substrate, while in other embodiments the structures are form from bottom layer to top layer and then a double substrate swap occurs. The permanent substrate may be a solid that is bonded (e.g. by an adhesive) to the layered structure or it may start out as a flowable material that is solidified adjacent to or partially surrounding a portion of the structure with bonding occurs during solidification. The multilayer structure may be released from a sacrificial material prior to attaching the permanent substrate or it may be released after attachment.
    Type: Grant
    Filed: May 7, 2003
    Date of Patent: July 31, 2007
    Assignee: Microfabrica Inc.
    Inventors: Jeffrey A. Thompson, Adam L. Cohen, Michael S. Lockard, Dennis R. Smalley
  • Patent number: 7147766
    Abstract: The present invention relates to a method for fabricating high performance chip interconnects and packages by providing methods for depositing a conductive material in cavities of a substrate in a more efficient and time saving manner. This is accomplished by selectively removing portions of a seed layer from a top surface of a substrate and then depositing a conductive material in the cavities of the substrate, where portions of the seed layer remains in the cavities. Another method includes forming an oxide layer on the top surface of the substrate such that the conductive material can be deposited in the cavities without the material being formed on the top surface of the substrate. The present invention also discloses methods for forming multi-level interconnects and the corresponding structures.
    Type: Grant
    Filed: April 4, 2003
    Date of Patent: December 12, 2006
    Assignee: ASM NuTool, Inc.
    Inventors: Cyprian Emeka Uzoh, Homayoun Talieh, Bulent Basol
  • Patent number: 7074314
    Abstract: The present invention provides a liquid repellent member applied to ink jet, comprising a carbon substrate, and a liquid repellent film formed on a surface of the carbon substrate and formed by bonding between carbon and fluorine.
    Type: Grant
    Filed: August 28, 2003
    Date of Patent: July 11, 2006
    Assignee: Canon Kabushiki Kaisha
    Inventors: Masataka Eida, Kazuo Iwata, Toshinori Hasegawa
  • Patent number: 7048841
    Abstract: Contact assemblies, electroplating machines with contact assemblies, and methods for making contact assemblies that are used in the fabrication of microelectronic workpieces. The contact assemblies can be wet-contact assemblies or dry-contact assemblies. A contact assembly for use in an electroplating system can comprise a support member and a contact system coupled to the support member. The support member, for example, can be a ring or another structure that has an inner wall defining an opening configured to allow the workpiece to move through the support member along an access path. In one embodiment, the support member is a conductive ring having a plurality of posts depending from the ring that are spaced apart from one another by gaps. The contact system can be coupled to the posts of the support member. The contact system can have a plurality of contact members projecting inwardly into the opening relative to the support member and transversely with respect to the access path.
    Type: Grant
    Filed: January 28, 2003
    Date of Patent: May 23, 2006
    Assignee: Semitool, Inc.
    Inventors: Robert W. Batz, Jr., John M. Pedersen, John L. Klocke, LinLin Chen
  • Patent number: 6986838
    Abstract: A nanomachined and micromachined electrode (10) is disclosed that is produced by providing a layer of aluminum (11) positioned upon a conductive substrate (12), anodizing the layer of aluminum to produce a layer of aluminum oxide (13) having an array of pores (14), depositing a sacrificial metal (17) within the pores of the aluminum oxide layer, etching the aluminum oxide layer so as to leave an array of sacrificial metal rods (18), depositing a layer of electrode material (19) between the array of sacrificial metal rods, and etching the sacrificial metal rods so that a layer of copper remains having an array of pores (20) where the sacrificial metal rods had existed. The layer of copper is the electrode (10).
    Type: Grant
    Filed: August 13, 2004
    Date of Patent: January 17, 2006
    Assignee: Johnson Research & Development Co., Inc.
    Inventors: Davorin Babic, John M. Baxley, Paul D. Browne
  • Patent number: 6967164
    Abstract: A method and apparatus is disclosed for sequential processing of integrated circuits, particularly for conductively passivating a contact pad with a material which resists formation of resistive oxides. In particular, a tank is divided into three compartments, each holding a different solution: a lower compartment and two upper compartments divided by a barrier, which extends across and partway down the tank. The solutions have different densities and therefore separate into different layers. In the illustrated embodiment, integrated circuits with patterned contact pads are passed through one of the upper compartments, in which oxide is removed from the contact pads. Continuing downward into the lower compartment and laterally beneath the barrier, a protective layer is selectively formed on the insulating layer surrounding the contact pads. As the integrated circuits are moved upwardly into the second upper compartment, a conducting monomer selectively forms on the contact pads prior to any exposure to air.
    Type: Grant
    Filed: August 4, 2003
    Date of Patent: November 22, 2005
    Assignee: Micron Technology, Inc.
    Inventors: Tongbi Jiang, Li Li
  • Patent number: 6932896
    Abstract: Systems and methods to remove or lessen the size of metal particles that have formed on, and to limit the rate at which metal particles form or grow on, workpiece surface influencing devices used during electrodeposition are presented. According to an exemplary method, the workpiece surface influencing device is occasionally placed in contact with a conditioning substrate coated with an inert material, and the bias applied to the electrodeposition system is reversed. According to another exemplary method, the workpiece surface influencing device is conditioned using mechanical contact members, such as brushes, and conditioning of the workpiece surface influencing device occurs, for example, through physical brushing of the workpiece surface influencing device with the brushes. According to a further exemplary method, the workpiece surface influencing device is rotated in different direction during electrodeposition.
    Type: Grant
    Filed: October 17, 2001
    Date of Patent: August 23, 2005
    Assignee: Nutool, Inc.
    Inventors: Bulent M. Basol, Cyprian Uzoh, Homayoun Talieh