Control Systems Patents (Class 219/121.54)
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Patent number: 8779324Abstract: A welding line can be rapidly extracted using three-dimensional CAD data constituted of a large number of line sections containing welding line candidates. The method of choosing a welding line includes: a step (S110) of specifying one face (first face constituting a reference face) from two faces of a member where a welding line is to be formed; a step (S120) of specifying the other face (second face constituting a groove face) from the two faces of the number where a welding line is to be formed; a step (S130) of extracting an edge line; a step (S140) of selecting an edge line zone where welding is possible; a step (S150) of creating welding line information by unifying edge lines where welding is possible; and a step (S160) of correcting welding line information in accordance with the groove shape.Type: GrantFiled: February 12, 2010Date of Patent: July 15, 2014Assignee: Kobe Steel, Ltd.Inventor: Masatoshi Hida
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Patent number: 8773019Abstract: A RF power supply system for delivering periodic RF power to a load. A power amplifier outputs a RF signal to the load. A sensor measures the RF signal provided to the load and outputs signals that vary in accordance with the RF signal. A first feedback loop enables control the RF signal based upon power determined in accordance with output from the sensor. A second feedback loop enables control the RF signal based upon energy measured in accordance with signals output from the sensor. Energy amplitude and duration provide control values for varying the RF signal. The control system and techniques are applicable to both pulsed RF power supplies and in various instances to continuous wave power supplies.Type: GrantFiled: February 23, 2012Date of Patent: July 8, 2014Assignee: MKS Instruments, Inc.Inventors: David J. Coumou, Richard Pham
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Patent number: 8766134Abstract: A connector assembly for coupling a plasma torch to a receptacle including a connector body configured to receive a mating connector body. The connector body is attachable to a power supply or a plasma arc torch. One or more circumferentially shaped blades extend axially from a surface of the connector body and form a blade ring. One or more gaps can be disposed relative to the surface of the connector body. The plurality of gaps are defined by and between the circumferentially shaped blades. A distance of the gaps between the circumferentially shaped blades extends along a portion of the circumference of the blade ring. The plurality of gaps can be asymmetrically distributed about the blade ring to facilitate proper rotational alignment, and are shaped to align with corresponding circumferentially shaped blades of the mating connector body.Type: GrantFiled: February 18, 2011Date of Patent: July 1, 2014Assignee: Hypertherm, Inc.Inventors: Jonathan Mather, Adam Fitzpatrick
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Patent number: 8748774Abstract: A controller (10) for controlling a process nozzle (20) and a laser oscillator (22) includes: an analyzer (12); a calculator (13) for calculating angle of a virtual corner part formed by two main process paths; a determining unit (14) for determining whether distance between the two main process paths corresponding to the circular-arc process path(s) is smaller than a first predetermined value, and determining whether the calculated angle is smaller than a second predetermined value; and a changing unit (15) for changing a laser process condition in the circular-arc process path(s) from a laser process condition in the main process paths when it is determined that the linear distance is smaller than the first predetermined value and the angle is smaller than the second predetermined value.Type: GrantFiled: August 17, 2012Date of Patent: June 10, 2014Assignee: Fanuc CorporationInventors: Kazuhiro Suzuki, Hiroaki Tokito, Takeshi Mochida
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Patent number: 8735767Abstract: For responding to an arc discharge in a plasma process (PP), a parameter of the plasma process is monitored to detect arc discharges occurring in the plasma. After detection of an arc discharge, a first countermeasure for the suppression of arc discharges is executed. After completion of the first countermeasure, a delay time period is allowed to elapse before the parameter is rechecked. In the event that after conclusion of the variable delay time period an arc discharge is detected, a second countermeasure for the suppression of arc discharges is executed.Type: GrantFiled: December 14, 2007Date of Patent: May 27, 2014Assignee: TRUMPF Huettinger GmbH + Co. KGInventors: Moritz Nitschke, Gerhard Zaehringer
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Publication number: 20140131324Abstract: A method is provided for operating a plasma arc torch system having a power supply and a plasma arc torch. The method includes supplying power to the power supply from a battery. The battery provides at least a portion of the power to generate a plasma arc by the plasma arc torch. The method also includes communicating a first signal, indicating at least one parameter of the battery, between the battery and a control unit of the power supply, generating a second signal, by the control unit, based on the at least one parameter of the battery, and controlling, using the control circuit, operation of the plasma arc torch based on the second signal.Type: ApplicationFiled: November 9, 2012Publication date: May 15, 2014Applicant: HYPERTHERM, INC.Inventors: E. Michael Shipulski, Michael Hoffa
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Publication number: 20140131325Abstract: This invention is to plasma arc weld using a keyhole mode to build a partially-penetrated keyhole and then a melt-in mode to finally reach the full penetration before switching to the base period. The full penetration is thus established during the peak period in two stages: keyhole stage and then melt-in stage. While the keyhole stage helps reduce the heat inputs and weld puddles, the melt-in stage finishes the full penetration at reduced impacts from the plasma jets producing the desired weld bead geometry and regularity. The duration of the melt-in stage is automatically determined using arc signals to assure the full penetration. In comparison with keyhole PAW, bead geometry and regularity are significantly improved with slightly increased net heat inputs. In comparison with melt-in PAW and GTAW, the net heat input is reduced approximately forty percent.Type: ApplicationFiled: November 13, 2012Publication date: May 15, 2014Inventors: YuMing Zhang, Xiangrong Li, Zeng Shao
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Patent number: 8723072Abstract: In a main circuit 11 of the plasma cutter power supply device 6, a plurality of DC power units 14-1, . . . 14-n of low capacity are connected in parallel on their DC output sides, and are connected to a plasma torch 20. Each power unit 14-1, . . . 14-n can operate asynchronously and independently from each other. The power supply control device 6 controls the number of power units to be operated, and the intensity of output electrical current at which each of them is to be operated, according to the cutting conditions (the nature of the material to be cut, its thickness, and the cutting speed) and according to the number of power units which can be operated. If some of the power units are faulty, the power supply control device 6 controls the cutting conditions which can be accepted, according to the number of normal power units.Type: GrantFiled: October 18, 2007Date of Patent: May 13, 2014Assignee: Komatsu Industries CorporationInventors: Yoshihiro Yamaguchi, Takahiro Iriyama
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Patent number: 8710395Abstract: An automated method for cutting a plurality of hole features using a plasma arc torch system can be implemented on a computer numerical controller. The automated method can include the steps of: a) cutting a lead-in for a hole feature using a lead-in command speed based on a diameter of that hole feature and b) cutting a perimeter for the hole feature using a perimeter command speed greater than the corresponding lead-in command speed for the hole feature. The automated method can also include the step c) of repeating steps a) and b) for each additional hole feature having a same diameter or a different diameter.Type: GrantFiled: December 18, 2012Date of Patent: April 29, 2014Assignee: Hypertherm, Inc.Inventors: Jon W. Lindsay, Guy T. Best, Peter V. Brahan, Gregory S. Wilson
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Patent number: 8698037Abstract: A sensor apparatus for measuring a plasma process parameter for processing a workpiece. The sensor apparatus includes a base, an information processor supported on or in the base, and at least one sensor supported on or in the base. The at least one sensor includes at least one sensing element configured for measuring an electrical property of a plasma and may include a transducer coupled to the at least one sensing element. The transducer can be configured to receive a signal from the sensing element and convert the signal into a second signal for input to the information processor.Type: GrantFiled: June 13, 2011Date of Patent: April 15, 2014Assignee: KLA-Tencor CorporationInventors: Randall S. Mundt, Paul Douglas MacDonald, Andrew Beers, Mason L. Freed, Costas J. Spanos
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Patent number: 8683841Abstract: Apparatus and method for cutting HVAC round duct and spiral duct and all attendant-attaching structures comprising a computer controlled machine able to cut round and spiral HVAC ducts and also the ability to send attendant-attaching structures that are then cut on a flat X and Y cutting machine.Type: GrantFiled: January 13, 2010Date of Patent: April 1, 2014Assignee: Walsh Atkinson Co., Inc.Inventor: Matthew J. Walsh
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Publication number: 20140061170Abstract: In some aspects, a method for identifying a consumable of a thermal processing torch comprising can include directing a gas flow through a flow-restriction element associated with the consumable disposed within the thermal processing torch; determining a first pressure of the gas flow at a location upstream relative to the flow-restriction element; determining a second pressure of the gas flow at a location downstream from the flow-restriction element; determining a flow rate of the gas flow passing through the flow-restriction element; and using the first pressure, the second pressure, and the flow rate to identify the consumable.Type: ApplicationFiled: November 8, 2013Publication date: March 6, 2014Inventors: Jon W. Lindsay, John Peters
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Publication number: 20140048517Abstract: A controller for a welding system adapted to determine a value of a weld secondary parameter across a weld secondary component based on a sensed parameter is provided. The controller may also be adapted to compare the determined value to a reference value range and to alert a user to a presence and location of a weld secondary error when the determined value is outside the referenced value range.Type: ApplicationFiled: October 28, 2013Publication date: February 20, 2014Applicant: Illinois Tool Works Inc.Inventors: Robert R. Davidson, Richard Schuh, Anthony J. Kowaleski, Thomas A. Bunker, Nicholas James Dessart, Bruce A. Casner
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Patent number: 8637786Abstract: A system and method for providing a high power density plasma cutting/welding-type system is disclosed. The plasma cutting system includes a housing and a power source disposed within the housing constructed to generate plasma cutting power. The plasma cutting system also includes a plasma torch actuated by a trigger and connected to the power source to produce a cutting arc. The plasma cutting system is constructed such that it has a power-to-weight ratio of at least 550 Watts per kilogram (W/kg).Type: GrantFiled: September 29, 2008Date of Patent: January 28, 2014Assignee: Illinois Tool Works Inc.Inventors: Anthony V. Salsich, David P. Marcusen, Nathan G. Leiteritz, Nick William Buettner
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Patent number: 8629370Abstract: A triaxial rod assembly for providing both RF power and DC voltage to a chuck assembly that supports a workpiece in a processing chamber during a manufacturing operation. In embodiments, a rod assembly includes a center conductor to be coupled to a chuck electrode for providing DC voltage to clamp a workpiece. Concentrically surrounding the center conductor is an annular RF transmission line to be coupled to an RF powered base to provide RF power to the chuck assembly. An insulator is disposed between the center conductor and RF transmission line. Concentrically surrounding the RF transmission line is a ground plane conductor coupled to a grounded base of the chuck to provide a reference voltage relative to the DC voltage. An insulator is disposed between the RF transmission line and the ground plane conductor.Type: GrantFiled: April 12, 2011Date of Patent: January 14, 2014Assignee: Applied Materials, Inc.Inventors: Hamid Tavassoli, Surajit Kumar, Shane C. Nevil, Douglas A. Buchberger, Jr.
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Patent number: 8624148Abstract: An anti-collision device for a plasma vertical cutting gun including a lifting frame of a plasma cutting machine; a connection mechanism; a fixing plate of a cutting gun fixed on the connection mechanism; a concave support plate connected with the lifting frame of the plasma cutting machine; and a proximity switch mounted on the concave support plate. The connection mechanism is mounted between the lifting frame of the plasma cutting machine and the fixing plate of the cutting gun. A contact surface between the connection mechanism and the concave support plate matches. One side of a joint plane between the connection mechanism and the concave support plate is of ferromagnetic materials and the other side is provided with a magnet, thereby attracting each other to realize a magnetic connection. The anti-collision device has comprehensive functions, convenient installation, reasonable structure, and short response time in case of impact.Type: GrantFiled: December 15, 2011Date of Patent: January 7, 2014Assignee: Wuhan Farley Plasma Cutting Sys. Co., Ltd.Inventors: Yanjun Xiong, Wei Gao, Songping Ye, Jie Dong, Lin Wang
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Patent number: 8618435Abstract: An ablative plasma gun is presented. The ablative plasma gun includes a first gun electrode and a second gun electrode arranged between a dielectric layer to form a longitudinal slot. An opening at a distal end of the longitudinal slot is provided to spread generated plasma.Type: GrantFiled: May 26, 2009Date of Patent: December 31, 2013Assignee: General Electric CompanyInventors: Adnan Kutubuddin Bohori, Thangavelu Asokan
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Patent number: 8586892Abstract: Systems and methods relating to securing a torch assembly and a work lead assembly to a plasma cutting power supply are provided. The present disclosure relates to a system and method that allows the torch assembly and the work lead assembly to be readily replaced by the user since the power supply unit need not be opened or disassembled for removal. The present disclosure provides methods and systems for removably securing both the torch assembly and the work lead assembly to the plasma cutting power supply. In one embodiment, the torch assembly and the work lead assembly may be communicatively coupled to the plasma cutting power supply unit via a single cable and a single connector. The connection between the first connector and the first port may be of the quick disconnectable type. The connection between the second connector and the second port may be of the twist lock type, such as a dinse style connector.Type: GrantFiled: April 16, 2009Date of Patent: November 19, 2013Assignee: Illinois Tool Works Inc.Inventors: Brian James Bornemann, Nathan Gerald Leiteritz
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Patent number: 8569647Abstract: Provided is a heat treatment apparatus in which a heat treatment apparatus in which the thermal efficiency is high, the maintenance expense is low, the throughput is high, the surface roughness of a sample can be reduced, and the discharge uniformity is excellent, although the heat treatment is performed at 1200 ° C. or more. A heat treatment apparatus includes: parallel planar electrodes; a radio-frequency power supply generating plasma by applying radio-frequency power between the parallel planar electrodes; a temperature measuring section measuring the temperature of a heated sample; and a control unit controlling an output of the radio-frequency power supply, wherein at least one of the parallel planar electrodes has a space where the heated sample is installed, therein, and heats the sample in the electrode by the plasma generated between the parallel planar electrodes.Type: GrantFiled: July 19, 2011Date of Patent: October 29, 2013Assignee: Hitachi High-Technologies CorporationInventors: Masatoshi Miyake, Ken'etsu Yokogawa
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Publication number: 20130264317Abstract: In some aspects, a replaceable consumable component for performing a cutting or welding operation can include a body and a readable data storage device coupled to the body or integrated within the body, wherein the data storage device contains an operation instruction for a cutting or welding device.Type: ApplicationFiled: March 15, 2013Publication date: October 10, 2013Applicant: Hypertherm, Inc.Inventors: Michael Hoffa, Michael Shipulski, Brett A. Hansen
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Patent number: 8552333Abstract: A circuit protection device includes a plasma gun configured to generate a plasma plume, at least one capacitor configured to store electrical energy, and a trigger circuit communicatively coupled to the plasma gun and the capacitor. The trigger circuit is configured to transmit a first signal to the capacitor to cause the capacitor to transmit a first portion of the electrical energy to the plasma gun. The trigger circuit is also configured to transmit a second signal to the plasma gun to cause the plasma gun to generate the plasma plume using the first portion of the electrical energy.Type: GrantFiled: December 30, 2010Date of Patent: October 8, 2013Assignee: General Electric CompanyInventors: John Kenneth Hooker, Hardik Upadhyay, Gitika Tantuwaya
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Patent number: 8541712Abstract: An electrode for a contact start plasma arc torch includes an elongated electrode body formed of an electrically conductive material. The electrode body is movable relative to the torch. The electrode and torch can include a contact element having a first surface in electrical communication with the power contact and a second surface characterized by (i) physical contact with the electrode body during transferred arc mode and (ii) absence of physical contact with the electrode body during initiation of a pilot arc.Type: GrantFiled: December 20, 2011Date of Patent: September 24, 2013Assignee: Hypertherm, Inc.Inventors: Jonathan P. Mather, Stephen T. Eickhoff, Jesse Roberts
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Publication number: 20130233834Abstract: Rapid thermal processing systems and associated methods are disclosed herein. In one embodiment, a method for heating a microelectronic substrate include generating a plasma, applying the generated plasma to a surface of the microelectronic substrate, and raising a temperature of the microelectronic substrate with the generated plasma applied to the surface of the microelectronic substrate. The method further includes continuing to apply the generated plasma until the microelectronic substrate reaches a desired temperature.Type: ApplicationFiled: April 23, 2013Publication date: September 12, 2013Applicant: MICRON TECHNOLOGY, INC.Inventor: Shu Qin
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Patent number: 8525067Abstract: A process for the jet cutting of arcuate openings in a metal workpiece such as steel, by means of creating a jet along a predetermined axis, applying the jet to the workpiece, with the axis of the jet offset from the perpendicular, and rotating the jet around to describe the arc desired while maintaining the non perpendicular axis and terminating the cutting path just prior to completion of the opening.Type: GrantFiled: May 20, 2011Date of Patent: September 3, 2013Inventors: Robin Muscat-Tyler, Paul J. Kwiatkowski
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Patent number: 8525418Abstract: An electrostatic chuck including a metal base having a through hole; a ceramic body covering the through hole; a suction electrode provided in the ceramic body; and a heating element provided in the ceramic body. A projection region defined by projecting the through hole toward the ceramic body is differentiated from an outer region which is determined by magnifying the projection region at a similarity ratio of three while setting an areal center of gravity of the projection region as a center of similarity, but excluding an interior of the projection region. Furthermore, the heating element is arranged such that a heating value per unit area in the projection region is 50% or less of a heating value per unit area in the outer region.Type: GrantFiled: March 30, 2006Date of Patent: September 3, 2013Assignee: NGK Spark Plug Co., Ltd.Inventors: Naotoshi Morita, Ryosuke Kameyama
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Publication number: 20130206735Abstract: A plasma cutting or welding system includes a power input. The power input is configured to be coupled to a plurality of multipronged input plugs. Each of the multipronged input plugs corresponds to an input voltage. The power supply also includes a user input device for selecting an operating current. The user input device is subdivided into a plurality of current ranges. Each of the current ranges includes an iconic representation of at least one multipronged input plug.Type: ApplicationFiled: February 14, 2012Publication date: August 15, 2013Applicant: Illinois Tool Works Inc.Inventors: Alan A. Manthe, David P. Marcusen, Steven D. Hidden, Ashok Darisipudi, Brian Mitchell Brown, John M. Huhn
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Patent number: 8502109Abstract: Method of controlling the wear of at least one of the electrodes of a plasma torch including two electrodes having the same main axis, and being separated by a chamber designed to receive a plasma-generating gas, and at least one element for generating a magnetic field placed locally to the at least one electrode for which the control of wear is sought, in which the arc root is made to sweep longitudinally over a portion of the surface of this electrode from an initial position until the arc root reaches a defined final position of the portion, the longitudinal progression of the arc root being defined by a function dependent on at least the time, f(t), which is fixed.Type: GrantFiled: December 17, 2009Date of Patent: August 6, 2013Assignee: EuroplasmaInventors: Ulysse Michon, Amelie Hacala
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Publication number: 20130180963Abstract: Methods and apparatus for regulating the temperature of a component in a plasma-enhanced process chamber are provided herein. In some embodiments, an apparatus for processing a substrate includes a process chamber and an RF source to provide RF energy to form a plasma in the process chamber. A component is disposed in the process chamber so as to be heated by the plasma when formed. A heater is configured to heat the component and a heat exchanger is configured to remove heat from the component. A chiller is coupled to the heat exchanger via a first flow conduit having an on/off flow control valve disposed therein and a bypass loop to bypass the flow control valve, wherein the bypass loop has a flow ratio valve disposed therein.Type: ApplicationFiled: January 2, 2013Publication date: July 18, 2013Applicant: APPLIED MATERIALS, INC.Inventor: APPLIED MATERIALS, INC.
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Publication number: 20130180964Abstract: A system and method for managing power delivered to a processing chamber is described. In one embodiment current is drawn away from the plasma processing chamber while initiating an application of power to the plasma processing chamber during an initial period of time, the amount of current being drawn away decreasing during the initial period of time so as to increase the amount of power applied to the plasma processing chamber during the initial period of time.Type: ApplicationFiled: March 5, 2013Publication date: July 18, 2013Applicant: ADVANCED ENERGY INDUSTRIES, INC.Inventor: Advanced Energy Industries, Inc.
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Publication number: 20130175245Abstract: A system and method for generating a plasma. An embodiment of the system for generating a plasma may include a first electrode; a second electrode disposed adjacent the first electrode; a first power supply for supplying power at the second electrode; a second power supply for generating a magnetic field; and a sequencer for coordinating a discharge of power from the first power supply and a discharge of power from the second power supply. The first power supply may be configured such that the discharge of power from the first power supply generates a plasma between the first electrode and the second electrode. The second power supply may be configured such that the magnetic field generated by the discharge of power from the second power supply rotates the plasma.Type: ApplicationFiled: August 27, 2012Publication date: July 11, 2013Inventor: Jack Hunt
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Patent number: 8461476Abstract: In connection with plasma tap hole welding, in which a plasma jet (7) directed towards a workpiece (8) to be welded is generated by means of a welding current applied onto an electrode (2) and a plasma gas, the plasma jet at least partly penetrating through the workpiece (9), wherein at least one electrical conductor (10, 50, 60, 61) is arranged at the exit side (8?) of the plasma jet (7), a penetration current (I2?) being measured via the electrical conductor (10, 50, 60, 61), it is suggested that the penetration current (I2) is actively modified during the welding process.Type: GrantFiled: November 30, 2009Date of Patent: June 11, 2013Assignee: Linde AktiengesellschaftInventors: Gerald Wilhelm, Erwan Slewert
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Patent number: 8455785Abstract: The invention relates to a water-vapor plasma torch (7) for cutting a workpiece (21), comprising a feed line (8) for a liquid (9), a heating device (22), and an evaporator (23) for forming a gas (20) from the liquid (9), a cathode (24) detachably connected to a movably mounted piston rod (25), and a nozzle (26) with an outlet opening (27) for the gas (20), as well as to a wear-detection and process-control method to be used with such a water-vapor plasma torch (7). To create such a water-vapor plasma torch (7) including wearing-part detection, at least one temperature sensor (28) is arranged within the piston rod (25), said temperature sensor being connected to a control unit (4), so that a wear of the cathode (24) and the nozzle (26) can be concluded from the temperature values detected, and that the control of the water-vapor plasma cutting process is influenceable.Type: GrantFiled: September 14, 2007Date of Patent: June 4, 2013Assignee: Fronius International GmbHInventors: Walter Mitterhumer, Heribert Pauser
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Patent number: 8450643Abstract: A welding or cutting device for welding or cutting electrically conductive work pieces has a pipe that accommodates feed lines, a nozzle for exit of a welding or cutting jet, such as a flame, for example, disposed at an end of the pipe, forming a device tip with its free end, and an inductive sensor device for measuring the distance between the device tip and the work piece. The sensor device has at least one magnetic coil, the windings of which run about a longitudinal device axis. The sensor device is a separate module, which is pushed onto the pipe and/or the nozzle, and releasably connected with the pipe and/or the nozzle.Type: GrantFiled: March 23, 2011Date of Patent: May 28, 2013Assignee: IHT Automation GmbH & Co. KGInventor: Kurt Nachbargauer
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Patent number: 8450637Abstract: A system and method for the automated or “robotic” application of hardfacing to a surface of a drill bit.Type: GrantFiled: October 23, 2008Date of Patent: May 28, 2013Assignee: Baker Hughes IncorporatedInventors: David K. Luce, Alan J. Massey, Kenneth E. Gilmore, Timothy P. Uno, Keith L. Nehring
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Patent number: 8450635Abstract: A method for processing a substrate is disclosed. The method includes supporting the substrate in the plasma-processing chamber configured with a first electrode and a second electrode. The method also includes coupling a passive radio frequency (RF) circuit to the second electrode, the passive RF circuit being configured to adjust one or more of an RF impedance, an RF voltage potential, and a DC bias potential on the second electrode.Type: GrantFiled: March 13, 2008Date of Patent: May 28, 2013Assignee: Lam Research CorporationInventors: Rajinder Dhindsa, Alexei Marakhtanov, Eric Hudson, Andreas Fischer
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Publication number: 20130098884Abstract: A portable plasma arc torch system can be used for processing materials. The system includes a replaceable or rechargeable power source and replaceable or rechargeable gas source. A controller communicates with at least one of the power source or the gas source. A plasma delivery device received via the controller current from the power source and gas from the gas source to generate a plasma arc at an output of the plasma delivery device. The plasma arc can be used to process materials such as metallic workpieces. The plasma arc torch can include a wearable portable assembly which includes the replaceable or rechargeable power and gas source. A plasma delivery device receives current from the power source in the assembly and gas from the gas source in the assembly to generate a plasma arc.Type: ApplicationFiled: December 6, 2012Publication date: April 25, 2013Applicant: HYPERTHERM INCORPORATEDInventor: Hypertherm Incorporated
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Patent number: 8426763Abstract: Rapid thermal processing systems and associated methods are disclosed herein. In one embodiment, a method for heating a microelectronic substrate include generating a plasma, applying the generated plasma to a surface of the microelectronic substrate, and raising a temperature of the microelectronic substrate with the generated plasma applied to the surface of the microelectronic substrate. The method further includes continuing to apply the generated plasma until the microelectronic substrate reaches a desired temperature.Type: GrantFiled: April 23, 2009Date of Patent: April 23, 2013Assignee: Micron Technology, Inc.Inventor: Shu Qin
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Publication number: 20130087536Abstract: A controller (10) for controlling a process nozzle (20) and a laser oscillator (22) includes: an analyzer (12); a calculator (13) for calculating angle of a virtual corner part formed by two main process paths; a determining unit (14) for determining whether distance between the two main process paths corresponding to the circular-arc process path(s) is smaller than a first predetermined value, and determining whether the calculated angle is smaller than a second predetermined value; and a changing unit (15) for changing a laser process condition in the circular-arc process path(s) from a laser process condition in the main process paths when it is determined that the linear distance is smaller than the first predetermined value and the angle is smaller than the second predetermined value.Type: ApplicationFiled: August 17, 2012Publication date: April 11, 2013Applicant: FANUC CorporationInventors: Kazuhiro SUZUKI, Hiroaki TOKITO, Takeshi MOCHIDA
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Patent number: 8410393Abstract: A recirculation system of a substrate support on which a semiconductor substrate is subjected to a multistep process in a vacuum chamber, the system comprising a substrate support having at least one liquid flow passage in a base plate thereof, an inlet and an outlet in fluid communication with the flow passage, a supply line in fluid communication with the inlet, and a return line in fluid communication with the outlet; a first recirculator providing liquid at temperature T1 in fluid communication with the supply line and the return line; a second recirculator providing liquid at temperature T2 in fluid communication with the supply line and the return line, temperature T2 being at least 10° C. above temperature T1; a pre-cooling unit providing liquid at temperature Tpc connected to the inlet and the outlet, temperature Tpc being at least 10° C. below T1; a pre-heating unit providing liquid at temperature Tph connected to the inlet and the outlet, temperature Tph being at least 10° C.Type: GrantFiled: May 24, 2010Date of Patent: April 2, 2013Assignee: Lam Research CorporationInventors: Anthony Ricci, Saurabh Ullal, Michael Kang, Matthew Busche
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Patent number: 8404993Abstract: The invention relates to a device for machining, particularly for cutting, of electrically conductive workpieces using a machining tool (10), which can be displaced back and forth toward and away from a workpiece by means of a drive unit and which comprises an electrically insulated, metallic tool head (12) forming a first capacitance (C1) with the workpiece, and comprising an analysis unit (14) for analyzing a characteristic value dependent on the first capacitance (C1). The invention provides that a metallic connecting element (18) is attached to the tool head (12), the element being connected to the analysis unit (14) and forming a second capacitance (C2) with the tool head (12).Type: GrantFiled: October 17, 2007Date of Patent: March 26, 2013Assignee: IHT Automation GmbH & Co. KGInventor: Bruno Heck
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Patent number: 8399797Abstract: A system is provided that includes a torch power unit that includes a compressor and a controller configured to adjust output of the compressor in response to feedback comprising compressor output, or altitude, or atmospheric pressure, or a combination thereof. A method is provided that includes adjusting operational parameters of a torch power unit to account for environmental conditions affecting performance of the torch power unit. A method of manufacturing a portable cutting torch system is also provided. Another system is provided that includes a plasma cutting circuit, a compressor, a motor coupled to the compressor, an interface, and an environmental feedback controller.Type: GrantFiled: May 7, 2008Date of Patent: March 19, 2013Assignee: Illinois Tool Works Inc.Inventors: Troy A. Sommerfeld, Nathan Gerald Leiteritz
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Patent number: 8395074Abstract: A plasma arc system includes a single-gas, gas-cooled plasma arc torch and a torch control unit. The torch control unit includes a housing and a user input device on the housing for receiving an indication of a desired cutting or marking function and for providing a responsive signal. A single gas supply both to the housing, and from the housing to the torch, is provided for cutting or marking. A current control device is located within the housing for controlling current output to the torch for either cutting or marking. A gas control device is located within the housing for controlling gas output to the torch for either cutting or marking. A controller is located within the housing for receiving the signal from the user input device indicating the desired cutting or marking function, and for sending a responsive signal to the current control and gas control devices depending on the desired cutting or marking function so that the torch operates accordingly. A related control until is disclosed.Type: GrantFiled: December 3, 2010Date of Patent: March 12, 2013Assignee: Kaliburn, Inc.Inventors: Jackie L. Winn, Jesse M. Wilson, Charles T. Boyd
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Patent number: 8373425Abstract: A method for determining a distance between a first piece and a second piece includes measuring, at the first or second piece, an AC signal, and determining the distance based on the measured AC signal. A system for determining a distance between a first piece and a second piece includes a measuring device adapted to measure, at one or both of the first and second piece, an AC signal, and a signal processing device adapted to determine the distance based on the measured AC signal. The AC signal includes a DC offset.Type: GrantFiled: April 4, 2008Date of Patent: February 12, 2013Assignee: Hypertherm, Inc.Inventors: Sanjay Garg, William J. Connally
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Patent number: 8362388Abstract: A multi-gas mixer for supplying a gas mixture that can uniformly mix a plurality of gases according to the proportional percentages determined by the mass flow rate of each gas is disclosed. The multi-gas mixer comprises a mixer chamber, a plurality of gas inlets, a gas mixture outlet, and at least one gas rotating and mixing unit. The present invention also provides a method for controlling the percentage of each gas to be mixed by use of a plurality of mass flow rate controllers to control the gas flow to produce a gas mixture according to a predetermined proportionality. When the multi-gas mixer delivers a gas mixture to a high-speed plasma torch, the torch can be stably operated under a high voltage (>85V) and a medium current (<650 A) so that a long-arc, high-temperature and high-speed plasma flame can be generated.Type: GrantFiled: October 29, 2009Date of Patent: January 29, 2013Assignee: Institute of Nuclear Energy Research Atomic Energy Council, Executive YuanInventors: Chang-Sing Hwang, Chun-Huang Tsai, Nian-Tzu Suen, Jen-Feng Yu
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Patent number: 8357874Abstract: A plasma supply device includes a full bridge circuit that is connected to a DC power supply and that has two half bridges each with two series connected switching elements. The plasma supply device further includes a primary winding of a power transformer connected to centers of the half bridges between the switching elements. The primary winding includes a tapping connectable to an alternating current center between the potentials of the DC power supply.Type: GrantFiled: July 23, 2008Date of Patent: January 22, 2013Assignee: Huettinger Elektronik GmbH + Co. KGInventors: Thomas Kirchmeier, Hans-Juergen Windisch, Hanns-Joachim Knaus, Michael Glueck
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Patent number: 8338739Abstract: An automated method for cutting a plurality of hole features using a plasma arc torch system can be implemented on a computer numerical controller. The automated method can include the steps of: a) cutting a lead-in for a hole feature using a lead-in command speed based on a diameter of that hole feature and b) cutting a perimeter for the hole feature using a perimeter command speed greater than the corresponding lead-in command speed for the hole feature. The automated method can also include the step c) of repeating steps a) and b) for each additional hole feature having a same diameter or a different diameter.Type: GrantFiled: September 11, 2009Date of Patent: December 25, 2012Assignee: Hypertherm, Inc.Inventors: Jon W. Lindsay, Guy T. Best, Peter V. Brahan, Gregory S. Wilson
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Patent number: 8324525Abstract: A method processing a workpiece in a plasma reactor chamber in which a first one of plural applied RF plasma powers is modulated in accordance with a time-varying modulation control signal corresponding to a desired process transient cycle. The method achieves a reduction in reflected power by modulating a second one of the plural plasma powers in response to the time-varying modulation control signal.Type: GrantFiled: May 29, 2008Date of Patent: December 4, 2012Assignee: Applied Materials, Inc.Inventors: Steven C. Shannon, Kartik Ramaswamy, Daniel J. Hoffman, Matthew L. Miller, Kenneth S. Collins
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Publication number: 20120285935Abstract: Provided is a heat treatment apparatus in which a heat treatment apparatus in which the thermal efficiency is high, the maintenance expense is low, the throughput is high, the surface roughness of a sample can be reduced, and the discharge uniformity is excellent, although the heat treatment is performed at 1200° C. or more. A heat treatment apparatus includes: parallel planar electrodes; a radio-frequency power supply generating plasma by applying radio-frequency power between the parallel planar electrodes; a temperature measuring section measuring the temperature of a heated sample; and a control unit controlling an output of the radio-frequency power supply, wherein at least one of the parallel planar electrodes has a space where the heated sample is installed, therein, and heats the sample in the electrode by the plasma generated between the parallel planar electrodes.Type: ApplicationFiled: July 19, 2011Publication date: November 15, 2012Inventors: Masatoshi MIYAKE, Ken'etsu YOKOGAWA
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Patent number: 8309878Abstract: A universal power supply for use in a plasma arc system is disclosed. The power supply can include a plurality of power modules for providing a DC output from an AC input. Each of the power modules can include a rectifier, a converter, an inverter, an isolation transformer and an output rectifier. The power modules can include a power module controller configured to control at least one of the rectifier, the converter, or the inverter such that a DC output can be obtained from a wide variety of AC inputs. The power modules can be connected in parallel to provide a wide range of DC output currents for the power supply. The universal power supply can include a master controller coupled to each of the individual power module controllers to regulate the DC output current of the power supply by controlling the individual power module controllers.Type: GrantFiled: December 30, 2009Date of Patent: November 13, 2012Assignee: ITT Manufacturing Enterprises, Inc.Inventor: Jackie Winn
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Patent number: 8304685Abstract: The present invention includes a plasma cutter having an input configured to receive welding power and a converter arranged according to a ?uk topology and configured to automatically convert the welding power to plasma-cutting power.Type: GrantFiled: April 14, 2005Date of Patent: November 6, 2012Assignee: Illinois Tool Works Inc.Inventors: Thomas A. Bunker, Joseph C. Schneider, James F. Ulrich