Using Plasma Patents (Class 219/121.36)
  • Patent number: 12261020
    Abstract: A plasma processing apparatus includes: a chamber; first and second matching circuits; a first RF generator that generates a first RF pulsed signal including pulse cycles in which each cycle includes first, second, and third periods, the first RF pulsed signal has first, second, and third power levels in the first, second, and third periods, respectively; a second RF generator that generates a second RF pulsed signal including the pulse cycles in which the second RF pulsed signal has fourth and fifth power levels in the first period and one of the second and third periods, respectively; and a third RF generator that generates a third RF pulsed signal including the pulse cycles in which the third RF pulsed signal has sixth and seventh power levels in the second period and one of the first and third periods, respectively.
    Type: Grant
    Filed: September 14, 2021
    Date of Patent: March 25, 2025
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Takahiro Takeuchi, Ken Kobayashi
  • Patent number: 12230499
    Abstract: A method of post-treating a silicon nitride (SiN)-based dielectric film formed on a surface of a substrate includes positioning a substrate having a silicon nitride (SiN)-based dielectric film formed thereon in a processing chamber, and exposing the silicon nitride (SiN)-based dielectric film to helium-containing high-energy low-dose plasma in the processing chamber. Energy of helium ions in the helium-containing high-energy low-dose plasma is between 1 eV and 3.01 eV, and flux density of the helium ions in the helium-containing high-energy low-dose plasma is between 5×1015 ions/cm2·sec and 1.37×1016 ions/cm2·sec.
    Type: Grant
    Filed: June 4, 2020
    Date of Patent: February 18, 2025
    Assignee: Applied Materials, Inc.
    Inventors: Yong Sun, Jung Chan Lee, Shuchi Sunil Ojha, Praket Prakash Jha, Jingmei Liang
  • Patent number: 12224162
    Abstract: Various examples are provided related to catalytic nanofiber membrane assemblies or structures which can be used in plasma reactors. In one example, a three-dimensional (3D) catalytic structure includes nanofiber-based elements (NFBEs) and electrodes placed about the NFBEs with the NFBEs stacked between the electrodes. In another example, a plasma reactor includes a vessel containing the 3D catalytic structure where gas pressure in the vessel is less than 1 atmosphere.
    Type: Grant
    Filed: October 18, 2023
    Date of Patent: February 11, 2025
    Assignee: THE UAB RESEARCH FOUNDATION
    Inventors: Andrei V. Stanishevsky, Riley Yager
  • Patent number: 12214222
    Abstract: An ultrasonic surgical instrument including a blade that treats tissue and a fluid control system to cool the blade by pumping cooling fluid through the blade. The blade defines a blade lumen in fluid contact with an inflow and return conduit of the fluid control system. The fluid control system may further include a fluid reservoir holding the cooling fluid and a pump. The pump is configured to deliver the fluid from the fluid reservoir, through the inflow conduit and the blade lumen, and into return conduit.
    Type: Grant
    Filed: April 17, 2023
    Date of Patent: February 4, 2025
    Assignee: Covidien LP
    Inventors: Robert B. Stoddard, Eric R. Larson
  • Patent number: 12198899
    Abstract: A magnetized plasmoid injection device including a cylindrical external electrode, a cylindrical internal electrode coaxially disposed inside the external electrode, a plasma generating gas supply unit that supplies plasma generating gas in a pulse shape between the external electrode and the internal electrode, a magnetic field generation unit that applies a magnetic field that generates magnetized plasmoid between the external electrode and the internal electrode, a power supply control unit that applies a discharge voltage between the external electrode and the internal electrode, and an impurity generation unit that contains an impurity in the magnetized plasmoid, the impurity generation unit having a cover electrode that opens to the external electrode, a thin-rod electrode that is located inside the cover electrode and is formed of an impurity, and an impurity generation power supply that applies a voltage to the cover electrode and the thin-rod electrode.
    Type: Grant
    Filed: October 30, 2019
    Date of Patent: January 14, 2025
    Assignee: Nihon University
    Inventors: Tomohiko Asai, Daichi Kobayashi, Taichi Seki
  • Patent number: 12156687
    Abstract: An instrument for electrosurgical treatment including an instrument head which forms a conveying body with a gas-fillable lumen. The lumen is connected to at least one first opening and at least one second opening in the instrument head. A primary stream of gas leaves through the first opening. The second opening is arranged such that a secondary stream exits the second opening next to the primary stream and/or with additional secondary streams out of additional second openings—away from the instrument head, at least partially peripherally surrounding the primary stream. An electrode is located in the flow of gas exiting out of the first opening for igniting a plasma between the first opening and the tissue to be treated. Due to the secondary stream accompanying the primary stream, an ignition of the plasma is successful even if the instrument is at a relatively large distance from the tissue.
    Type: Grant
    Filed: June 6, 2018
    Date of Patent: December 3, 2024
    Assignee: ERBE ELEKTROMEDIZIN GMBH
    Inventors: Achim Brodbeck, Charlotte Herrberg, Thomas Staebler
  • Patent number: 12145225
    Abstract: In a method in which a welding process is carried out on a workpiece with a welding torch and to a welding device for carrying out the method, a welding current source is supplied in order to provide a welding voltage, and an electrical voltage is applied, at least temporarily, during the welding process to an external element of the welding torch, in particular to an outer wall of a gas nozzle, and a possibly occurring electrical contact between the external element and a further element, in particular the workpiece or a contact tube, is detected by the electrical voltage applied. The welding current source is electrically connected via at least one first resistor to the external element of the welding torch and the external element of the welding torch is connected to the electrical potential of the workpiece via at least one second resistor.
    Type: Grant
    Filed: December 1, 2021
    Date of Patent: November 19, 2024
    Assignee: Fronius International GmbH
    Inventors: Josef Artelsmair, Dominik Söllinger, Andreas Waldhör, Manuel Binder
  • Patent number: 12144098
    Abstract: A plasma torch includes an electrode, a center pipe, and a coolant passage. The electrode includes an internal passage, a tip portion, a convex portion, and an electrode insert. The center pipe is at least partially arranged in the internal passage of the electrode. The center pipe includes first and second pipe ends. The coolant passage first, second, third, and fourth passages. A coolant flows from the first passage through the second passage and the third passage to the fourth passage. At least a part of the convex portion is arranged in the center pipe. The inner surface of the center pipe includes a first inclined surface having a diameter that decreases toward a distal direction. The distal direction is a direction extending from the second pipe end to the first pipe end. The first inclined surface extends toward the root portion of the convex portion.
    Type: Grant
    Filed: August 6, 2021
    Date of Patent: November 12, 2024
    Assignee: KOMATSU INDUSTRIES CORPORATION
    Inventors: Yoshihiro Yamaguchi, Nobuhiro Takata
  • Patent number: 12119216
    Abstract: Apparatus, systems, and methods for processing workpieces are provided. An arc lamp can include a tube. The arc lamp can include one or more inlets configured to receive water to be circulated through the arc lamp during operation as a water wall, the water wall configured to cool the arc lamp. The arc lamp can include a plurality of electrodes configured to generate a plasma in a forming gas introduced into the arc lamp via the one or more inlets. The forming gas can be or can include a mixture of a hydrogen gas and an inert gas, the hydrogen gas in the mixture having a concentration less than 4% by volume. The hydrogen gas can be introduced into the arc lamp prior to generating the plasma. The arc lamp may be used for processing workpieces.
    Type: Grant
    Filed: June 16, 2023
    Date of Patent: October 15, 2024
    Assignees: Beijing E-Town Semiconductor Technology Co., Ltd., Mattson Technology, Inc.
    Inventors: Michael X. Yang, Rolf Bremensdorfer, Dave Camm, Joseph Cibere, Dieter Hezler, Shawming Ma, Yun Yang
  • Patent number: 12083742
    Abstract: A three-dimensional print head apparatus comprising a hopper, a nozzle, a barrel, a heating system, a fume extraction system, a dry air purge system, and an agitator. The hopper may having a cavity and may have a lower aperture. The nozzle may have an upper aperture and may have a lower aperture. The heating system may be positioned along at least a portion of the barrel, which may defined a heated zone of the barrel. The dry air purge system may be in fluid communication with the hopper. The agitator may have at least one paddle.
    Type: Grant
    Filed: September 26, 2023
    Date of Patent: September 10, 2024
    Assignee: SIDUS SPACE, INC.
    Inventors: Ivan Townsend, Robert Mueller, Nathan Gelino, Jonathan Smith, Matthew Nugent, Andrew Nick, Jason Schuler, Bradley Buckles
  • Patent number: 12023862
    Abstract: A three-dimensional print head apparatus including a hopper, a nozzle, a barrel, and a heating system. The apparatus may further include a fume extraction system and a dry air purge system. The hopper may have a cavity and a lower aperture. The nozzle may have an upper aperture and a lower aperture. The heating system may be positioned along the barrel, and the dry air purge system may be in fluid communication with the hopper.
    Type: Grant
    Filed: July 24, 2023
    Date of Patent: July 2, 2024
    Assignee: SIDUS SPACE, INC.
    Inventors: Ivan Townsend, Robert Mueller, Nathan Gelino, Jonathan Smith, Matthew Nugent, Andrew Nick, Jason Schuler, Bradley Buckles
  • Patent number: 12022601
    Abstract: The adapter shaping an electromagnetic field heats toroidal plasma discharge. It is intended for use in plasma torches dedicated for excitation/ionization sources in spectrometers. The adapter includes at least two electromagnetic field shaping elements, which are stretched between the bushing of the upper microwave connection and the bushing of the lower microwave connection. An element shaping electromagnetic field is positioned to the surface pitch of the bushings at an angle ranging from 0 to 90 degrees.
    Type: Grant
    Filed: March 28, 2017
    Date of Patent: June 25, 2024
    Assignee: APAN INSTRUMENTS sp. Z o.o.
    Inventors: Edward Reszke, Krzysztof Jankowski, Andrzej Ramsza
  • Patent number: 11993011
    Abstract: Plasma micro nozzle adapters having various configurations and operating principles are disclosed. The plasma micro nozzle adapter is employed with a commercial plasma jet printer to produce smaller printed features than those possible with the original plasma jet printer. In a first class of embodiments, the plasma micro nozzle adapter narrows a plasma jet using electrostatic or magnetostatic lensing, permitting the printing of ceramic, metallic, dielectric, or plastic features with line widths of 10 ?m or less. In a second class of embodiments, the plasma micro nozzle adapter narrows the plasma jet using a gas sheath. By adjusting the flow rate or pressure of the gas used to form the gas sheath, the cross-sectional shape of the plasma jet may form, for example, an ellipse, thereby controlling the width of the printed feature. A third class of embodiments employs both electrostatic (or magnetostatic) lensing along with the gas sheath.
    Type: Grant
    Filed: January 20, 2021
    Date of Patent: May 28, 2024
    Assignee: National Technology & Engineering Solutions of Sandia, LLC
    Inventors: Eric Langlois, Judith Maria Lavin
  • Patent number: 11997779
    Abstract: A plasma arc torch includes a cathode extending along an axis of the torch, a pilot arc conductor, and a nozzle body. A first fluid conduit and second fluid conduit extend parallel to the axis of the torch. A first offset fitting includes a first duct coupled to and in fluid communication with the first fluid conduit, and a second duct in fluid communication with the first duct and outwardly radially offset from the first duct and extending away from the first duct in a proximal direction. A second offset fitting includes a third duct coupled to and in fluid communication with the second fluid conduit, and a fourth duct in fluid communication with the third duct and outwardly radially offset from the third duct and extending away from the third duct in the proximal direction. A spring compression plug electrically connects the pilot arc conductor to the nozzle body.
    Type: Grant
    Filed: October 1, 2020
    Date of Patent: May 28, 2024
    Assignee: LINCOLN GLOBAL, INC.
    Inventors: Praveen K. Namburu, Wayne S. Severance, Jr., Matthew E. Train
  • Patent number: 11986867
    Abstract: A liquid film of a processing liquid containing at least one of sulfuric acid, a sulfate, peroxosulfuric acid, and a peroxosulfate, or a processing liquid containing hydrogen peroxide is formed on a substrate. A plasma is radiated to the liquid film. Thereby, a substrate processing method in which substrate processing using an oxidizing power of the processing liquid can be efficiently performed is provided.
    Type: Grant
    Filed: September 10, 2020
    Date of Patent: May 21, 2024
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Akira Horikoshi, Shohei Nakamura, Shigeru Takatsuji, Motohiro Kono, Takahiro Kimura, Kenji Kobayashi
  • Patent number: 11979974
    Abstract: Plasmatron includes an anode having a cylindrical proximal portion and a cylindrical distal portion, the distal portion having a smaller diameter than the proximal portion; a connecting portion connecting the proximal and distal portions and having walls oriented at 40-60 degrees to a center axis of the anode; a cathode having a generally cylindrical shape in its proximal portion and a tapering at a 30-45 degree angle to the center axis of the anode in its distal portion, with a cylindrical rod on its tip. Gap between the connecting portion of the anode and the distal portion of the cathode is double the gap between the proximal portion of the anode and the proximal portion of the cathode. High voltage power supply provides an operating voltage of 800-2500 volts and a current of 0.3-0.7 A. Length of the rod is approximately 1.5 times its diameter.
    Type: Grant
    Filed: June 4, 2020
    Date of Patent: May 7, 2024
    Assignee: INNO-HALE LTD
    Inventor: Dmitry Medvedev
  • Patent number: 11919071
    Abstract: Disclosed herein are embodiments of systems and method for processing feedstock materials using microwave plasma processing. Specifically, the feedstock materials disclosed herein pertain to metal powders. Microwave plasma processing can be used to spheroidize the metal powders and form metal nitride or metal carbide powders. The stoichiometry of the metal nitride or metal carbide powders can be controlled by changing the composition of the plasma gas and the residence time of the feedstock materials during plasma processing.
    Type: Grant
    Filed: October 21, 2021
    Date of Patent: March 5, 2024
    Assignee: 6K Inc.
    Inventors: Sunil Bhalchandra Badwe, Scott Joseph Turchetti, Sudip Bhattacharya, Makhlouf Redjdal
  • Patent number: 11883896
    Abstract: Recognizing interchangeable torch components, such as consumables, for welding and cutting torches includes determining that one or more interchangeable torch components installed in an operative end of a torch are genuine. Operational parameters for the one or more interchangeable torch components can also be determined. When the one or more interchangeable torch components are determined to be genuine, an indicator assembly can be activated to provide a first indication. When the operational parameters are implemented at a power supply connected to the torch, the indicator assembly can be activated to provide a second indication.
    Type: Grant
    Filed: February 28, 2022
    Date of Patent: January 30, 2024
    Assignee: THE ESAB GROUP, INC.
    Inventors: Michael Nadler, Maximilian Dougherty, Frederic Ewing, James Tantillo, Ryan T. Lynaugh, Kevin Horner-Richardson, Nicholas Courtney
  • Patent number: 11849992
    Abstract: Embodiments include a system comprising a non-thermal plasma (NTP) device and at least one container including supersaturated gas emulsion (SSGE). A method is described involving configuring a supersaturated gas emulsion (SSGE) for application to a treatment site and configuring a device to generate a non-thermal plasma (NTP) at the treatment site.
    Type: Grant
    Filed: January 14, 2021
    Date of Patent: December 26, 2023
    Inventor: Mark G. Fontenot
  • Patent number: 11776801
    Abstract: Inductively coupled plasma (ICP) analyzers use an ICP torch to generate a plasma in which a sample is atomized an ionized. Analysis of the atomic ions can be performed by atomic analysis, such as mass spectrometry (MS) or atomic emission spectrometry (AES). Particle based ICP analysis includes analysis of particles such as cells, beads, or laser ablation plumes, by atomizing and ionizing particles in an ICP torch followed by atomic analysis. In mass cytometry, mass tags of particles are analyzed by mass spectrometry, such as by ICP-MS. Systems and methods of the subject application include one or more of: a demountable ICP torch holder assembly, an external ignition device; an ICP load coil comprising an annular fin, particle suspension sample introduction fluidics, and ICP analyzers thereof.
    Type: Grant
    Filed: September 9, 2021
    Date of Patent: October 3, 2023
    Assignee: STANDARD BIOTOOLS CANADA INC.
    Inventors: Alexander Loboda, Raymond Jong, Michael Sullivan, Serguei Vorobiev, Robert Rotenberg, Emil D. Stratulativ, Maxim Voronov, Mark Armstrong
  • Patent number: 11731812
    Abstract: An easy-tear-open and tamper-evident container including: a container body having a first convex loop on a periphery of an opening thereof; a lid having a second convex loop for engaging with the first convex loop, where a loop of tear line is provided on a topmost surface of the second convex loop, and the loop of tear line is divided into a section of breakable line and a section of broken line; and a spacer part being disposed below a local area of the topmost surface of the second convex loop that bears the section of broken line to make the local area bent up to form an force application part.
    Type: Grant
    Filed: September 21, 2022
    Date of Patent: August 22, 2023
    Inventor: Meng-Yun Hsu
  • Patent number: 11721539
    Abstract: Apparatus, systems, and methods for processing workpieces are provided. An arc lamp can include a tube. The arc lamp can include one or more inlets configured to receive water to be circulated through the arc lamp during operation as a water wall, the water wall configured to cool the arc lamp. The arc lamp can include a plurality of electrodes configured to generate a plasma in a forming gas introduced into the arc lamp via the one or more inlets. The forming gas can be or can include a mixture of a hydrogen gas and an inert gas, the hydrogen gas in the mixture having a concentration less than 4% by volume. The hydrogen gas can be introduced into the arc lamp prior to generating the plasma. The arc lamp may be used for processing workpieces.
    Type: Grant
    Filed: November 23, 2021
    Date of Patent: August 8, 2023
    Assignees: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD., MATTSON TECHNOLOGY, INC
    Inventors: Michael X. Yang, Rolf Bremensdorfer, Dave Camm, Joseph Cibere, Dieter Hezler, Shawming Ma, Yun Yang
  • Patent number: 11712282
    Abstract: Cartilage and other tissues are treated by generating a plasma in an interior space of a probe and exposing the tissue to the plasma. The plasma is released through a gap in a working end of the probe.
    Type: Grant
    Filed: January 26, 2021
    Date of Patent: August 1, 2023
    Assignee: Relign Corporation
    Inventors: Aaron Germain, Balazs Lesko, Benedek Orczy-Timko
  • Patent number: 11696792
    Abstract: An electrosurgical apparatus for generating a plasma discharge beam is provided. In one aspect, the electrosurgical apparatus includes a first fluid flow housing, a second fluid flow housing, and an electrode. A first gas is provided to the distal end of the first fluid flow housing, where the electrode is energized to ionize the first gas and generate a plasma discharge beam. A second gas is provided to the distal end of the second fluid flow housing, where the distal end of the second fluid flow housing injects the second gas into the plasma discharge beam. In another aspect, the electrosurgical apparatus includes a single fluid flow housing having an external electrode and an internal electrode. In another aspect, the electrosurgical apparatus includes a transformer assembly having a plurality of serially-connected transformers.
    Type: Grant
    Filed: February 13, 2021
    Date of Patent: July 11, 2023
    Assignee: Apyx Medical Corporation
    Inventors: Gregory A. Konesky, Claes Fredrik Jonsson
  • Patent number: 11700682
    Abstract: A plasma torch that includes an electrode having an exterior surface and a tip having an interior surface spaced apart from and facing the exterior surface of the electrode. A process gas flow channel located being located between the exterior surface of the electrode and the interior surface of the tip. A thermoelectric cooler having a cold plate and a hot plate is disposed between the exterior surface of the electrode and the interior surface of the tip with the cold plate being thermally connected to the exterior surface of the electrode. According to some implementations, electrical power is deliverable to the thermoelectric cooler only up electrical power being supplied to the electrode.
    Type: Grant
    Filed: July 16, 2019
    Date of Patent: July 11, 2023
    Assignee: THE ESAB GROUP, INC.
    Inventor: Andrew Raymond
  • Patent number: 11692267
    Abstract: Methods for modifying a susceptor having a silicon carbide (SiC) surface comprising exposing the silicon carbide surface (SiC) to an atmospheric plasma are described. The method increases the atomic oxygen content of the silicon carbide (SiC) surface.
    Type: Grant
    Filed: December 31, 2020
    Date of Patent: July 4, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Francis Kanyiri Mungai, Vijayabhaskara Venkatagiriyappa, Yung-Cheng Hsu, Keiichi Tanaka, Mario D. Silvetti, Mihaela A. Balseanu
  • Patent number: 11654483
    Abstract: A powder treatment assembly and method for treating a feedstock powder of feedstock particles includes directing the feedstock powder into a plasma chamber within a reactor, exposing the feedstock powder to a plasma field generated by a plasma source to form a treated powder having treated particles with an increased average sphericity relative to the feedstock particles, and supplying a hot gas sheath flow downstream of the plasma chamber, the hot gas sheath flow substantially surrounding the treated powder.
    Type: Grant
    Filed: April 7, 2020
    Date of Patent: May 23, 2023
    Assignee: General Electric Company
    Inventors: Frederic Larouche, Matthieu Balmayer, Gabriel Dickson
  • Patent number: 11622425
    Abstract: A system (10) and method for transferring energy utilises an evacuated recirculation duct (11), with a pump (20) to circulate gas and a control nozzle (22) to form a jet of gas. Hydrogen gas is provided into the duct to be circulated, and an electrical device (30, 32) provides energy into the jet of gas so as to form hydrogen atoms. A heat exchanger (44) is arranged downstream of the electrical device (30, 32), onto which the flowing jet of gas impacts. Means (40) are also provided to generate an electric or magnetic field in the region of the jet of gas between the electrical device (30, 32) and the heat exchanger (44), and is connected to a source (42) of electricity. For example an electromagnet coil (40) and may generate a magnetic field (B) transverse to the direction of travel of the jet of gas, or an electromagnet coil (40A, 40B) may generate a magnetic field parallel to the jet of gas.
    Type: Grant
    Filed: July 26, 2017
    Date of Patent: April 4, 2023
    Assignee: HYDROGEN UNIVERSE LTD
    Inventor: Tanya Clarke
  • Patent number: 11583814
    Abstract: Devices and methods for reducing the specific energy required to reform or pyrolyze reactants in plasmas operating at high flow rates and high pressures are presented. These systems and methods include 1) introducing electrons and/or easily ionized materials to a plasma reactor, 2) increasing turbulence and swirl velocity of the flows of feed gases to have improved mixing in a plasma reactor, and 3) reducing slippage from a plasma reactor system. Such plasma systems may allow plasma reactors to operate at lower temperatures, higher pressure, with improved plasma ignition, increased throughput and improved energy efficiency. In preferred embodiments, the plasma reactors are used to produce hydrogen and carbon monoxide, hydrogen and carbon, or carbon monoxide through reforming and pyrolysis reactions. Preferred feedstocks include methane, carbon dioxide, and other hydrocarbons.
    Type: Grant
    Filed: February 25, 2020
    Date of Patent: February 21, 2023
    Assignee: MAAT Energy Company
    Inventors: Leslie Bromberg, Kim-Chinh Tran, Jorj Ian Owen, Jonathan Whitlow
  • Patent number: 11538667
    Abstract: A stage includes a stage body having a placement surface and a radio-frequency electrode embedded in the stage body. The stage body is made of ceramics, and the radio-frequency electrode extends in a thickness direction of the stage body in a region below an outer periphery of the placement surface.
    Type: Grant
    Filed: February 15, 2021
    Date of Patent: December 27, 2022
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Taro Ikeda, Satoru Kawakami, Sumi Tanaka
  • Patent number: 11517639
    Abstract: A cold plasma system and method for treating a region of a biological surface is presented. In one embodiment, the system includes: a housing; an air conduit within the housing; a first electrode configured proximately along the air conduit; a second electrode configured proximately along the air conduit and opposite from the first electrode; and a source of alternating current (AC) electrically connected with the first electrode. The source of alternating current is configured to generate cold plasma in the air conduit.
    Type: Grant
    Filed: July 30, 2019
    Date of Patent: December 6, 2022
    Assignee: L'Oreal
    Inventors: Ozgur Emek Yildirim, Thi Hong Lien Planard-Luong, Matthieu Jacob, Geoffrey Deane
  • Patent number: 11473199
    Abstract: A patterned backside stress compensation film having different stress in different sectors is formed on a backside of a substrate to reduce combination warpage of the substrate. The film can be formed by employing a radio frequency electrode assembly including plurality of conductive plates that are biased with different RF power and cause local variations in the plasma employed to deposit the backside film. Alternatively, the film may be deposited with uniform stress, and some of its sectors are irradiated with ultraviolet radiation to change the stress of these irradiated sectors. Yet alternatively, multiple backside deposition processes may be sequentially employed to deposit different backside films to provide a composite backside film having different stresses in different sectors.
    Type: Grant
    Filed: June 10, 2020
    Date of Patent: October 18, 2022
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Seiji Shimabukuro, Makoto Tsutsue
  • Patent number: 11430638
    Abstract: A plasma generating apparatus may include a cathode assembly including a cathode, an anode assembly including an anode having therein a plasma generation space, and one or more magnetic force generators configured to generate a magnetic force. The anode assembly has one end portion in which a gas supply path is provided and the other end portion having an opening, the gas supply path configured to supply a plasma generating gas to the plasma generation space. The gas supply path is configured to generate a vortex of the plasma generating gas in the plasma generation space and said one or more magnetic force generators are arranged such that the magnetic force is generated in a direction opposite to a rotational direction of the vortex of the plasma generating gas.
    Type: Grant
    Filed: December 28, 2017
    Date of Patent: August 30, 2022
    Assignee: Edwards Limited
    Inventors: Yun Soo Choi, Chan Kyoo Ko, Simone Magni
  • Patent number: 11353008
    Abstract: An energy storage system includes a plasma battery and a reconverter to convert energy stored in the plasma battery to electricity. The plasma battery and the reconverter are coupled by a non-neutral plasma duct. The plasma battery includes a plasma battery supercell. The plasma battery supercell includes a plasma battery cell which includes a plasma containment fiber. The plasma containment fiber includes one or more concentric shells to store non-neutral plasma ions for energy storage. The plasma battery may include additional plasma battery supercells, which may be separated by a separator. The plasma battery includes an enclosure to provide electromagnetic shielding. The reconverter includes a power outlet to power an electric load.
    Type: Grant
    Filed: April 23, 2021
    Date of Patent: June 7, 2022
    Assignee: SPAR ENERGY LLC
    Inventor: Gaurav Bazaz
  • Patent number: 11209211
    Abstract: A DC plasma arc furnace, a method of co-processing waste and metal, a method of producing energy by processing material using the furnace, and the products produced by the furnace are provided. Metal may be efficiently processed by the furnace via an increased organic content in other feedstock fed into the furnace.
    Type: Grant
    Filed: July 23, 2020
    Date of Patent: December 28, 2021
    Inventor: Alain Palmieri
  • Patent number: 11155756
    Abstract: The invention relates weldments useful as heat transfer tubes in pyrolysis furnaces. The invention relates to tubes that are useful in pyrolysis furnaces. The weldments include a tubular member and at least one mixing element. The tubular member comprises an aluminum-containing alloy. The mixing element comprises an aluminum-containing alloy. The mixing element's aluminum-containing alloy can be the same as or different from the tubular member's aluminum-containing alloy. Other aspects of the invention relate to pyrolysis furnaces which include such weldments, and the use of such pyrolysis furnaces for hydrocarbon conversion processes such as steam cracking.
    Type: Grant
    Filed: April 10, 2020
    Date of Patent: October 26, 2021
    Assignee: ExxonMobil Chemical Patents Inc.
    Inventors: David B. Spicer, Changmin Chun
  • Patent number: 11152476
    Abstract: Described herein is a technique capable of improving electrical characteristics of a polysilicon film while suppressing damage to an underlying silicon oxide film. According to the technique described herein, there is provided a there is provided a method of manufacturing a semiconductor device, including: (a) preparing a substrate including a silicon oxide film and a polysilicon film formed on the silicon oxide film, wherein the polysilicon film includes a contact surface contacting the silicon oxide film and an exposed surface facing the contact surface; and (b) supplying a reactive species generated by plasma excitation of a gas containing hydrogen and oxygen to the exposed surface of the polysilicon film.
    Type: Grant
    Filed: September 7, 2018
    Date of Patent: October 19, 2021
    Assignee: Kokusai Electric Corporation
    Inventors: Masanori Nakayama, Yuichiro Takeshima, Hiroto Igawa, Katsunori Funaki
  • Patent number: 11079669
    Abstract: An extreme ultraviolet (EUV) mask is received. The EUV mask has an EUV pellicle disposed thereover. The EUV pellicle is coupled to the EUV mask at least in part via glue that is disposed on the EUV mask. The EUV pellicle is removed, thereby exposing the glue. A localized glue-removal process is performed by targeting a region of the EUV mask on which the glue is disposed. The localized glue-removal process is performed without affecting other regions of the EUV mask that do not have the glue disposed thereon. The localized glue-removal process may include injecting a cleaning chemical onto the glue and removing a waste chemical produced by the cleaning chemical and the glue. The localized glue-removal process may also include a plasma process that applies plasma to the glue. The localized glue-removal process may further include a laser process that shoots a focused laser beam at the glue.
    Type: Grant
    Filed: December 27, 2019
    Date of Patent: August 3, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Tzu-Ting Chou, Chung-Hsuan Liu, Kuan-Wen Lin, Chi-Lun Lu, Ting-Hao Hsu, Sheng-Chi Chin
  • Patent number: 11006995
    Abstract: The disclosure relates to a device for treatment of skin, mucous membranes or body parts with a cold atmospheric pressure plasma by generating a dielectric barrier surface discharge, including a flexible insulating material, a flexible high-voltage electrode, a flexible dielectric, a flexible grounded electrode, a gas supply, wherein the flexible high-voltage electrode is embedded between the flexible insulating material and the flexible dielectric, wherein the grounded electrode is applied on a surface of the flexible dielectric that is configured to face a curved surface of a body part to be treated, wherein the flexible high-voltage electrode, the flexible dielectric and the flexible grounded electrode of the device form a flexible layered arrangement for providing the cold atmospheric pressure plasma, wherein the arrangement forms a hollow spherical body with a closed volume and wherein a plasma can be ignited for treating the curved surface with the cold atmospheric pressure plasma.
    Type: Grant
    Filed: February 26, 2019
    Date of Patent: May 18, 2021
    Assignee: LEIBNIZ-INSTITUT FUER PLASMAFORSCHUNG UND TECHNOLOGIE E.V.
    Inventors: Manfred Stieber, Klaus-Dieter Weltmann, Stefan Horn, Ronny Brandenburg, Thomas Von Woedtke
  • Patent number: 10998144
    Abstract: A power contact electrode plasma therapy circuit includes a pair of terminals adapted to be connected to a set of switchable contact electrodes of a power contact. A plasma ignition detector is configured to detect an electrical parameter over the switchable contact electrodes indicative of the formation of plasma between the switchable contact electrodes and output a plasma ignition signal based on the electrical parameter as detected. A plasma burn memory is configured to receive and store the plasma ignition signal. A controller circuit is configured to receive from the plasma burn memory the plasma ignition signal, start a time based on receipt of the plasma ignition signal, and upon the timer meeting a time requirement, output a plasma extinguish command. A plasma extinguishing circuit, configured to bypass the pair of terminals upon receiving the trigger signal to extinguish the plasma between the switchable contact electrodes.
    Type: Grant
    Filed: September 11, 2020
    Date of Patent: May 4, 2021
    Assignee: Arc Suppression Technologies
    Inventors: Reinhold Henke, Robert Thorbus
  • Patent number: 10960485
    Abstract: The invention features a replaceable cartridge for a plasma arc torch. The cartridge includes a cartridge body having a first section and a second section. The first and second sections are joined at an interface to form a substantially hollow chamber. The interface provides a coupling force that secures the first and second sections together. The cartridge also includes an arc constricting member located in the second section; an electrode included within the substantially hollow chamber; and a contact start spring element affixed to the electrode. The spring element imparts a separating force that biases the electrode toward at least one of the first section or the second section of the body. The separating force has a magnitude that is less than a magnitude of the coupling force.
    Type: Grant
    Filed: May 4, 2018
    Date of Patent: March 30, 2021
    Assignee: Hypertherm, Inc.
    Inventors: Nicholas A. Sanders, Peter J. Twarog, E. Michael Shipulski, Yu Zhang
  • Patent number: 10935620
    Abstract: A system may include a resistive-inductive-capacitive sensor, a driver configured to drive the resistive-inductive-capacitive sensor with a driving signal at a driving frequency, and a measurement circuit communicatively coupled to the resistive-inductive-capacitive sensor and configured to, during a calibration phase of the measurement circuit, measure phase and amplitude information associated with the resistive-inductive-capacitive sensor and based on the phase and amplitude information, determine at least one of a resonant frequency of the resistive-inductive-capacitive sensor and a transfer function of the resistive-inductive-capacitive sensor.
    Type: Grant
    Filed: June 27, 2019
    Date of Patent: March 2, 2021
    Assignee: Cirrus Logic, Inc.
    Inventors: Tejasvi Das, Siddharth Maru, Matthew Beardsworth, Bruce E. Duewer, Michael A. Kost
  • Patent number: 10919238
    Abstract: A method of controlling an inductive heating circuit, having a varying load, to seal a packaging material is provided. The method comprises generating AC power of at least two frequencies on at least one inductor in the inductive heating circuit; determining of the resulting phase shift in the inductive heating circuit from the current generated at the at least two frequencies; determining the impedance of the inductive heating circuit for each of the at least two frequencies; determining a load characteristics of the inductive heating circuit based on the relationship between the determined impedance and the determined phase shift; determining an impedance operating range; and selecting an AC output frequency for an induction power generator based on the load characteristics which results in the least amount of phase shift from a set ideal value and which is associated with an impedance that is within the impedance operating range.
    Type: Grant
    Filed: December 19, 2017
    Date of Patent: February 16, 2021
    Assignee: Tetra Laval Holdings & Finance S.A.
    Inventors: Mirco Lancellotti, Rossano Guerri, Alessandro Boschi
  • Patent number: 10917961
    Abstract: Embodiments of arc plasma cutting torches are disclosed. In one embodiment, a plasma cutting torch includes an insert component located substantially between a cathode body and an insulator body. The insert component is able to withstand high temperatures and can be made of a metal material or a non-metal material. The insert component can be permanent within the torch or can be replaceable, in accordance with various embodiments.
    Type: Grant
    Filed: April 26, 2018
    Date of Patent: February 9, 2021
    Assignee: LINCOLN GLOBAL, INC.
    Inventors: Praveen K. Namburu, Wayne S. Severance
  • Patent number: 10893600
    Abstract: An induction plasma torch comprises a tubular torch body, a plasma confinement tube disposed in the tubular torch body coaxial therewith, a gas distributor head disposed at one end of the plasma confinement tube and structured to supply at least one gaseous substance into the plasma confinement tube; an inductive coupling member embedded within the tubular torch body for applying energy to the gaseous substance to produce and sustain plasma in the plasma confinement tube, and an electrically conductive capacitive shield on an inner surface of the tubular torch body. The capacitive shield is segmented into axial strips interconnected at one end. Axial grooves are machined in the inner surface of the tubular torch body, the axial grooves being interposed between the axial strips.
    Type: Grant
    Filed: June 9, 2016
    Date of Patent: January 12, 2021
    Inventors: Maher I. Boulos, Nicolas Dignard, Alexandre Auger, Jerzy Jurewicz, Sebastien Thellend
  • Patent number: 10852265
    Abstract: A system for voltage measurement of dielectric material in plasma includes a vacuum chamber. The system also includes an electrostatic receiver located outside of the vacuum chamber. The system also includes a conductive probe having a first terminus in contact with the dielectric material in the vacuum chamber and a second terminus in electrical communication with the electrostatic receiver. The system also includes a non-contact electrostatic voltmeter configured to measure a floating potential of the electrostatic receiver that corresponds to a dielectric potential of the dielectric material at a location in contact with the first terminus of the conductive probe.
    Type: Grant
    Filed: June 21, 2018
    Date of Patent: December 1, 2020
    Assignee: UNIVERSITY OF SOUTHERN CALIFORNIA
    Inventors: Kevin Chou, Joseph Wang
  • Patent number: 10827600
    Abstract: In some aspects, electrodes can include a front portion shaped to matingly engage a nozzle of the plasma cutting system, the front portion having a first end comprising a plasma arc emitter disposed therein; and a rear portion thermally connected to a second end of the front portion, the rear portion shaped to slidingly engage with a complementary swirl ring of the plasma cutting system and including: an annular mating feature extending radially from a proximal end of the rear portion of the electrode to define a first annular width to interface with the swirl ring, the annular mating feature comprising a sealing member configured to form a dynamic seal with the swirl ring to inhibit a flow of a gas from a forward side of the annular mating feature to a rearward side of the annular mating feature.
    Type: Grant
    Filed: April 13, 2018
    Date of Patent: November 3, 2020
    Assignee: Hypertherm, Inc.
    Inventors: Sung Je Kim, Jesse A. Roberts, Shreyansh Patel
  • Patent number: 10798810
    Abstract: The invention concerns a plasma source including a quarter wave antenna (204) located in a cylindrical enclosure (202) provided with an opening (208) opposite the end of the antenna (204). The diameter (d) of the antenna (204) is in the range from one third to one quarter of the inner diameter (d1) of the enclosure (202). The distance (l) between the end of the antenna (204) and the opening (208) is in the range from ? to 5/3 of the diameter (d) of the antenna (204).
    Type: Grant
    Filed: December 21, 2017
    Date of Patent: October 6, 2020
    Assignee: Polygon Physics
    Inventor: Pascal Sortais
  • Patent number: 10793447
    Abstract: A system for generating a plasma discharge in liquid utilizes first and second electrodes spaced apart in an interior space of a vessel holding the liquid. A channel can be defined in certain embodiments at least partially by at least one of the first and second electrodes, and an inlet in fluid communication with the interior space is configured to generate a vortical fluid flow in the vessel. A method for generating a plasma discharge in liquid is also provided.
    Type: Grant
    Filed: September 15, 2015
    Date of Patent: October 6, 2020
    Assignee: Energy Onvector, LLC
    Inventor: Jun Kang
  • Patent number: 10798809
    Abstract: A conductive rod body is embedded in an insulative torch adapter into which a plasma torch is fitted so that a leading end protrudes from its outer circumferential surface. Further, a metal plate member electrically connected to a cable line to which a voltage for plasma ignition is applied is attached to a lower holder, and a conductive leaf spring member having a V-shaped cross section is attached to an upper holder. When the torch adapter is placed on the lower holder so that the protruding part of the rod body faces upward and the upper holder is closed to tighten a draw latch, the rod body and the metal plate member are electrically connected via the leaf spring member, and a high voltage for ignition can be applied to the plasma torch.
    Type: Grant
    Filed: July 13, 2018
    Date of Patent: October 6, 2020
    Assignee: Shimadzu Coporation
    Inventor: Hidemiki Hayashi