Methods Patents (Class 219/121.59)
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Patent number: 8258423Abstract: An improved plasma torch and method of starting the torch are provided. The torch may comprise a main torch body with an electrode assembly coupled to a piston therein. The piston and electrode assembly are moveable between a starting position whereby the electrode assembly contacts a nozzle, and an operating position whereby the electrode assembly does not contact the nozzle. The piston is moveable by directing fluid, which may comprise coolant, through the plasma torch either in a first direction which biases the piston to the starting position, or in an opposite second direction which biases the piston so as to retract the electrode assembly to the operating position. A reversing valve or reversible pump may be used to control the direction of the flow of the fluid. Thereby, the coolant supply may be used to both cool the torch and control the starting and operation of the torch.Type: GrantFiled: August 10, 2009Date of Patent: September 4, 2012Assignee: The ESAB Group, Inc.Inventors: Wayne Stanley Severance, Jr., Ruben A. Chico
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Patent number: 8258424Abstract: A plasma arc torch is provided that includes a wear stop designed to detect wear of an electrode and prevent the use of the electrode once the electrode has experienced a certain amount of wear. Either the electrode or the nozzle is movable with respect to the main torch body, and the movable component defines a projection. The wear stop is positioned a predetermined distance from a nozzle of the torch, such that prior to experiencing an excessive amount of wear, the electrode is able to contact the nozzle and initiate a pilot arc for starting a torch operation. Once the length of the electrode becomes shorter than a predetermined length due to wear, the projection of the electrode engages the wear stop, and the wear stop prevents the electrode from contacting the nozzle. In this way, an electrode that is excessively worn cannot be used in subsequent torch operations.Type: GrantFiled: August 20, 2009Date of Patent: September 4, 2012Assignee: The ESAB Group, Inc.Inventor: David C. Griffin
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Publication number: 20120211473Abstract: Plasma is generated using elemental hydrogen, a weak oxidizing agent, and a fluorine containing gas. An inert gas is introduced to the plasma downstream of the plasma source and upstream of a showerhead that directs gas mixture into the reaction chamber where the mixture reacts with the high-dose implant resist. The process removes both the crust and bulk resist layers at a high strip rate, and leaves the work piece surface substantially residue free with low silicon loss.Type: ApplicationFiled: May 2, 2012Publication date: August 23, 2012Inventors: Haruhiro Harry Goto, David Cheung
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Publication number: 20120199563Abstract: A method of operating a plasma arc torch is provided that includes directing a first portion of gas into a plasma chamber, directing a second portion of the gas to initiate a pilot arc in the plasma chamber, and redirecting the second portion of the gas to form a shield gas flow rather than venting the second portion to atmosphere. A plasma arc torch for this method includes a start cartridge disposed between an electrode and a tip for initiating the pilot arc. The start cartridge defines at least one redirect gas passageway in fluid communication with a shield gas passageway. The second portion of gas is redirected through the at least one redirect gas passageway and into the shield gas passageway.Type: ApplicationFiled: February 9, 2011Publication date: August 9, 2012Applicant: Thermal Dynamics CorporationInventors: Brandon Hebert, Chris Conway
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Patent number: 8232501Abstract: A plasma arc power supply with a simple structure and its control method enable shifting from a pilot arc to a main arc. A plasma arc power supply used in a plasma arc apparatus that processes a workpiece by forming a pilot arc between a main electrode and a nozzle electrode and subsequently forming a main arc between the main electrode and the workpiece includes N direct current power supply units (N?2) having negative terminals connected to the main electrode and positive terminals to the workpiece, and a switch between the fourth power supply unit and the workpiece. The fourth power supply unit is connected to cause the nozzle electrode to have an opposite polarity to the main electrode. When the switch is open, the fourth power supply unit supplies a small current between the main electrode and the nozzle electrode while forming a pilot arc between them.Type: GrantFiled: January 18, 2008Date of Patent: July 31, 2012Assignee: Sansha Manufacturing Co., Ltd.Inventors: Masahiro Ohashi, Takayuki Nishisako, Tetsuro Ikeda
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Publication number: 20120181257Abstract: A component for a contact start plasma arc torch is provided. The component includes a hollow body defining a channel with a longitudinal axis. The channel is capable of slideably receiving an electrode body along the longitudinal axis. The component includes a contact element disposed in the hollow body and includes a first surface and a second surface. The first surface is adapted to facilitate electrical communication with a power supply and the second surface is adapted to physically contact a surface of the electrode body when the plasma arc torch is operated in a transferred arc mode. In addition, the second surface is characterized by the absence of physical contact with the surface of the electrode body when the torch is operated in a pilot arc mode.Type: ApplicationFiled: January 6, 2012Publication date: July 19, 2012Applicant: Hypertherm, Inc.Inventors: Jonathan P. Mather, Nicholas A. Sanders, Jon W. Lindsay, Peter Twarog, E. Michael Shipulski, Zheng Duan, David Jonathan Cook
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Patent number: 8222561Abstract: A drag tip for use in a plasma cutting torch is provided that includes an inner tip portion defining a distal end face, an inner cavity through which a plasma gas flows, and an orifice disposed between the distal end face and the inner cavity. An outer tip portion surrounds the inner tip portion and defines an inner chamber to accommodate a flow of secondary gas and also a distal end portion. The distal end face of the inner tip portion is adapted for contact with a workpiece and extends distally beyond the distal end portion of the outer tip portion, and the flow of secondary gas exits the outer tip portion proximate the distal end portion. Variations of the drag tip and methods of operation are also provided.Type: GrantFiled: September 4, 2007Date of Patent: July 17, 2012Assignee: Thermal Dynamics CorporationInventors: Thierry R. Renault, Nakhleh A. Hussary, Christopher J. Conway, Darrin H. MacKenzie
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Patent number: 8203096Abstract: A portable plasma arc torch system can be used for processing materials. The system includes a replaceable or rechargeable power source and replaceable or rechargeable gas source. A controller communicates with at least one of the power source or the gas source. A plasma delivery device received via the controller current from the power source and gas from the gas source to generate a plasma arc at an output of the plasma delivery device. The plasma arc can be used to process materials such as metallic workpieces. The plasma arc torch can include a wearable portable assembly which includes the replaceable or rechargeable power and gas source. A plasma delivery device receives current from the power source in the assembly and gas from the gas source in the assembly to generate a plasma arc.Type: GrantFiled: September 10, 2007Date of Patent: June 19, 2012Assignee: Hypertherm, Inc.Inventors: Nicholas A. Sanders, E. Michael Shipulski, Mike Hoffa, Jay L. Jason
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Patent number: 8203095Abstract: A method of material treatment in which the surface of a metal substrate is converted to a composite structure of the metal and its nitride or carbide utilizing a high temperature chemically active thermal plasma stream, and the product obtained from that method. The complex thermal plasma contains controllable additions of active gas, liquid or solid substances. The surface layer obtained is functionally graded to the substrate resulting in an excellent bond that resists delamination and spalling, and provides a significant increase in hardness, wear and erosion resistance, and corrosion resistance, and a decrease in coefficient of friction.Type: GrantFiled: April 16, 2007Date of Patent: June 19, 2012Assignee: Materials & Electrochemical Research Corp.Inventors: Roger S. Storm, Vladimir Shapovalov, James C. Withers, Raouf Loutfy
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Patent number: 8183495Abstract: A cascade source provided with a cathode housing, a number of cascade plates insulated from each other and stacked on top of each other which together bound at least one plasma channel, and an anode plate provided with an outflow opening connecting to the plasma channel, wherein one cathode is provided per plasma channel, which cathode comprises an electrode which is adjustable relative to the cathode housing in the direction of the plasma channel, wherein the clamping provision is preferably of the collet chuck type. Also described is method for controlling the cascade source in use.Type: GrantFiled: December 14, 2010Date of Patent: May 22, 2012Assignee: OTB Solar B.V.Inventors: Martin Dinant Bijker, Leonardus Peterus Maria Clijsen, Franciscus Cornelius Dings, Remco Leonardus J. Robertus Pennings
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Patent number: 8183494Abstract: In the method according to the invention for connecting a sheet metal component (3) to a component (5) consisting of cast metal, the sheet metal component (3) and the component (5) are welded to one another by means of a pulse-welding method. In particular, a sheet metal pipe (3) can thereby be welded to the port (12) of a housing (13) consisting of cast metal. This advantage may be utilized for an exhaust system with an exhaust manifold (3) and an exhaust assembly, such as a turbocharger (5).Type: GrantFiled: February 23, 2005Date of Patent: May 22, 2012Assignee: BorgWarner Inc.Inventors: Wilfried Bien, Jan Peter Elfeldt, Michael Halves, Thomas Huelsberg, Uwe Klussmann, Hildwin Kuzi, Holger Nuhn, Ralf Puenjer, Olav Reinhardt, Dirk Riewert, Alfred Riggers, Thorsten Sternal
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Publication number: 20120118862Abstract: A method and apparatus for oxidizing a combustible material. The method includes introducing a volume of the combustible material into a plasma zone of a gliding electric arc oxidation system. The method also includes introducing a volume of oxidizer into the plasma zone of the gliding electric arc oxidation system. The volume of oxidizer includes a stoichiometrically excessive amount of oxygen. The method also includes generating an electrical discharge between electrodes within the plasma zone of the gliding electric arc oxidation system to oxidize the combustible material.Type: ApplicationFiled: July 12, 2007Publication date: May 17, 2012Inventors: Joseph J. Hartvigsen, S. Elangovan
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Patent number: 8168916Abstract: In general, the present invention provides a method of piercing a workpiece with a plasma arc torch of the type having a plasma gas flow path for directing a plasma gas through the torch and a secondary gas flow path for directing a secondary gas through the torch. The method comprises directing a flow of shield gas along a distal end portion of the plasma arc torch to deflect metal spatter generated from the piercing, and ramping a current provided to the plasma arc torch along a profile during piercing and controlling current ramp parameters as a function of a thickness of the workpiece and an operating current level, wherein the current ramp parameters comprise a length of time, a ramp rate, a shape factor, and a modulation.Type: GrantFiled: July 28, 2008Date of Patent: May 1, 2012Assignee: Thermal Dynamics CorporationInventors: Nakhleh Hussary, Thierry Renault, Christopher Conway
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Patent number: 8137341Abstract: A method with apparatus for performing surgery using plasma is described. In one exemplary embodiment, the apparatus includes a radiofrequency signal generator, a conditioning network coupled to the radiofrequency signal generator, and a catheter coupled to the conditioning network, the catheter including at least one electrode, such that the conditioning network conditions radiofrequency energy produced by the radiofrequency signal generator to create plasma at the at least one electrode of the catheter. Such novel plasma ablation system provides the capability to create high precision ablation with minimal damage to adjacent structures in numerous types of matter while employing multiple operation platforms including catheter based plasma application.Type: GrantFiled: October 19, 2011Date of Patent: March 20, 2012Inventor: Richard J Fugo
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Patent number: 8129656Abstract: The invention relates to a method for producing thermal energy, wherein, by means of a plasma arc which is located between a cathode and an anode, light initial material that is suitable for fusion processes is put into the plasma state by supplying electric energy. Use is made of a cathode made of a metal that is suitable for allowing the particles which are produced in the plasma to be diffused and for allowing a fusion process to take place in the metal grid. The invention has a high degree of efficiency in corresponding systems such that said methods can be used anywhere where fossil and/or renewable and/or chemical fuels are used, in order to use the thermal energy directly or by conversion.Type: GrantFiled: August 9, 2006Date of Patent: March 6, 2012Assignee: Purratio AGInventors: Richard Reichmann, Karl-Ludwig Barth
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Patent number: 8115135Abstract: An atomic oxygen generator/sprayer is invented. An array of three magnetized torches running at 60 Hz is used to generate non-thermal plasma; thus, the plasma effluent has relatively low temperature (touchable) and yet contains high energy electrons (>5 eV) capable to dissociate oxygen molecules to atomic oxygen. The emission spectroscopy of the torch indicates that the plasma effluent carries an abundance of reactive atomic oxygen (RAO), which can effectively kill all kind microbes. A cap holding three pairs of rectangular permanent magnets is used to spread torches laterally into fan shape, which extends to a width exceeding 100 mm. The flux of RAO exceeds 2×106 cm?2 sec?1; its flow speed exceeds 20 m/s and it reaches out more than 20 mm. This invention is suitable for applications such as sterilizing carpets, clothes, and bed sheets.Type: GrantFiled: February 14, 2008Date of Patent: February 14, 2012Assignee: Adventix Technologies Inc.Inventor: Spencer P Kuo
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Publication number: 20110284505Abstract: A recirculation system of a substrate support on which a semiconductor substrate is subjected to a multistep process in a vacuum chamber, the system comprising a substrate support having at least one liquid flow passage in a base plate thereof, an inlet and an outlet in fluid communication with the flow passage, a supply line in fluid communication with the inlet, and a return line in fluid communication with the outlet; a first recirculator providing liquid at temperature T1 in fluid communication with the supply line and the return line; a second recirculator providing liquid at temperature T2 in fluid communication with the supply line and the return line, temperature T2 being at least 10° C. above temperature T1; a pre-cooling unit providing liquid at temperature Tpc connected to the inlet and the outlet, temperature Tpc being at least 10° C. below T1; a pre-heating unit providing liquid at temperature Tph connected to the inlet and the outlet, temperature Tph being at least 10° C.Type: ApplicationFiled: May 24, 2010Publication date: November 24, 2011Applicant: Lam Research CorporationInventors: Anthony Ricci, Saurabh Ullal, Michael Kang, Matthew Busche
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Patent number: 8063337Abstract: An apparatus for use in mass spectrometry comprising an injector body, an injection tube coupled to the injector body, and a shielding assembly disposed between the injector body and the injection tube. The shielding apparatus is suitable for shielding the injector body from heat generated by a plasma source.Type: GrantFiled: March 23, 2007Date of Patent: November 22, 2011Assignee: Elemental Scientific, Inc.Inventor: Daniel R. Wiederin
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Patent number: 8058585Abstract: A plasma processing method includes the steps of: loading a substrate on a lower electrode, the substrate having a resist mask formed on a transcription film; supplying a processing gas into a processing chamber; forming a magnetic field, which is oriented toward one direction and perpendicular to a line connecting an upper and the lower electrode; supplying a high frequency power to the lower electrode in the processing chamber to thereby form an electric field; converting the processing gas into a plasma by a magnetron discharge caused by a presence of an orthogonal electromagnetic field; and forming lenses on the transcription film by using the plasma. The high frequency power is supplied to the lower electrode while controlling the magnitude of the electric power divided by a surface area of the substrate to be in a range from about 1200 W/31415.9 mm2 to 2000 W/31415.9 mm2.Type: GrantFiled: March 12, 2007Date of Patent: November 15, 2011Assignee: Tokyo Electron LimitedInventors: Hiroki Amemiya, Akihito Toda, Hiroshi Nagahata
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Patent number: 8049144Abstract: A system for coating a substrate includes a heater that heats the substrate. The heater includes a two-dimensional array of a plurality of heat sources which supply heat to the substrate when the substrate is in the presence of the array of heat sources. The heater further includes a controller that controls the operation of each heat source to heat a localized area of the surface of the substrate according to a predetermined temperature profile for the substrate.Type: GrantFiled: March 18, 2009Date of Patent: November 1, 2011Assignee: Exatec LLCInventor: Steven M. Gasworth
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Patent number: 8013994Abstract: A method of measuring parameters of a particle includes providing a particle, wherein the particle has a first portion and a second portion. The process includes providing a column of photo-detectors including a first photo-detector and a second photo-detector, wherein the first photo-detector and the second photo-detector are sensitive to the same range of light frequencies. Light is projected from the particle onto the column of photo-detectors wherein the column of photo-detectors is oriented so the light from the first portion is projected onto the first photo-detector and light from the second portion is projected onto the second photo-detector. Light measured by the first photo-detector differs from light measured by the second photo-detector. The process further includes using the different first and the second photo-detector measurements to determine at least one from the group consisting of particle temperature and particle diameter.Type: GrantFiled: January 14, 2008Date of Patent: September 6, 2011Assignee: Cyber Materials LLCInventors: Brian Louis Vattiat, Donald Edward Wroblewsky, Michael Alan Gevelber
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Patent number: 8013269Abstract: A process and apparatus for synthesizing a nanopowder is presented. In particular, a process for the synthesis of nanopowders of various materials such as metals, alloys, ceramics and composites by induction plasma technology, using organometallic compounds, chlorides, bromides, fluorides, iodides, nitrites, nitrates, oxalates and carbonates as precursors is disclosed. The process comprises feeding a reactant material into a plasma torch in which is generated a plasma flow having a temperature sufficiently high to yield a superheated vapor of the material; transporting said vapor by means of the plasma flow into a quenching zone; injecting a cold quench gas into the plasma flow in the quenching zone to form a renewable gaseous cold front; and forming a nanopowder at the interface between the renewable gaseous cold front and the plasma flow.Type: GrantFiled: January 27, 2006Date of Patent: September 6, 2011Assignee: Tekna Plasma Systems Inc.Inventors: Maher I. Boulos, Jerzy Jurewicz, Jiayin Guo
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Publication number: 20110210101Abstract: A process for using a plasma arc torch is provided that includes operating a power source of the plasma arc torch to initiate an electric arc between an electrode of the plasma arc torch and a nozzle of the plasma arc torch at a starting arc current. A flow of argon-containing gas can be provided through the nozzle while the arc exists between the electrode and the nozzle, and the power source operated to cause the arc to extend out from the nozzle to a coating of insulation on a workpiece. The arc may ionize at least part of the argon-containing gas so as to burn through the insulation of the workpiece and attach the arc to metal of the workpiece. Thereafter, the flow of argon-containing gas can be halted and a flow of a different gas can be provided while increasing the arc current above the starting arc current.Type: ApplicationFiled: March 1, 2010Publication date: September 1, 2011Inventors: Robert L. Smallwood, Joseph V. Warren, JR.
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Patent number: 7977599Abstract: An erosion resistant torch for use in a solid free form fabrication system for manufacturing a component from successive layers of metal feedstock material. The erosion resistant torch includes a torch structure defining a torch nozzle formed of a highly conductive bulk material. The erosion resistant torch further includes a gas flow channel and an orifice defined therein. An arc electrode is disposed within the gas flow channel. An erosion resistant material is disposed between the torch nozzle and the arc electrode in the form of a coating layer or an erosion resistant insert. The erosion resistant material is formed of one of a refractory material or a ceramic material.Type: GrantFiled: November 29, 2007Date of Patent: July 12, 2011Assignee: Honeywell International Inc.Inventor: Robbie J. Adams
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Patent number: 7973262Abstract: A powerplant and method for production and use of synthesis gas from a hydrocarbon fuel is disclosed in a combination of a triple helical flow vortex reactor (100) and a power producer (510). The triple helical flow vortex reactor (100) steam-reforms a hydrocarbon fuel in a rich combustion environment and produces a gas stream with synthesis gas. The triple helical flow vortex reactor (100) has a plasma torch to introduce a central vortex and two swirlers to introduce counterposing vortexes, or circumferential flows, at the periphery of a reaction chamber in the triple helical flow vortex reactor. The synthesis gas fuels the power producer (510).Type: GrantFiled: April 5, 2007Date of Patent: July 5, 2011Inventor: Igor Matveev
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Publication number: 20110155703Abstract: A universal power supply for use in a plasma arc system is disclosed. The power supply can include a plurality of power modules for providing a DC output from an AC input. Each of the power modules can include a rectifier, a converter, an inverter, an isolation transformer and an output rectifier. The power modules can include a power module controller configured to control at least one of the rectifier, the converter, or the inverter such that a DC output can be obtained from a wide variety of AC inputs. The power modules can be connected in parallel to provide a wide range of DC output currents for the power supply. The universal power supply can include a master controller coupled to each of the individual power module controllers to regulate the DC output current of the power supply by controlling the individual power module controllers.Type: ApplicationFiled: December 30, 2009Publication date: June 30, 2011Inventor: Jackie Winn
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Patent number: 7964818Abstract: A method of fabricating yttria parts is provided herein. In one embodiment, the method includes sintering a yttria sample, machining the sintered sample to form a part, and annealing the part in a three-stage process that includes heating the part at a predetermined heating rate, maintaining the part at a constant annealing temperature, and cooling the part at a predetermined cooling rate.Type: GrantFiled: October 30, 2006Date of Patent: June 21, 2011Assignee: Applied Materials, Inc.Inventors: Elmira Ryabova, Richard Lewington, Madhavi R. Chandrachood, Amitabh Sabharwal, Darin Bivens
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Patent number: 7960670Abstract: A sensor apparatus for measuring a plasma process parameter for processing a workpiece. The sensor apparatus includes a base, an information processor supported on or in the base, and at least one sensor supported on or in the base. The at least one sensor includes at least one sensing element configured for measuring an electrical property of a plasma and at least one transducer coupled to the at least one sensing element. The transducer is configured so as to receive a signal from the sensing element and converting the signal into a second signal for input to the information processor.Type: GrantFiled: November 16, 2005Date of Patent: June 14, 2011Assignee: KLA-TENCOR CorporationInventors: Randall S. Mundt, Paul D. MacDonald, Andrew Beers, Mason L. Freed, Costas J. Spanos
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Patent number: 7952047Abstract: An improved automatic feedback control scheme enhances plasma spraying of powdered material through reduction of process variability and providing better ability to engineer coating structure. The present inventors discovered that controlling centroid position of the spatial distribution along with other output parameters, such as particle temperature, particle velocity, and molten mass flux rate, vastly increases control over the sprayed coating structure, including vertical and horizontal cracks, voids, and porosity. It also allows improved control over graded layers or compositionally varying layers of material, reduces variations, including variation in coating thickness, and allows increasing deposition rate. Various measurement and system control schemes are provided.Type: GrantFiled: August 8, 2005Date of Patent: May 31, 2011Assignee: Cyber Materials LLCInventors: Michael Alan Gevelber, Donald Edward Wroblewski
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Publication number: 20110120980Abstract: A vortex generator system comprises one or more plasma streamwise vortex generators (PSVGs) or plasma wedge vortex generators (PWVGs). The PSVGs and PWVGs each comprises a first electrode and a second electrode separated by a dielectric layer. The first electrode extends in a longitudinal direction. The PSVGs and PWVGs can be installed on a surface arranged to receive airflow in a certain flow direction. The PSVGs have a rectangular first electrode is exposed and extends at least somewhat parallel to the expected flow direction, whereas the first electrode of the PWVGs is more triangular in shape. When an AC voltage is applied to the first and second electrodes, a plasma forms along edges of the first electrode. The plasma imposes a body force in a cross-flow direction, which induces a cross-flow velocity that, in combination with the mean flow, produces streamwise-oriented counter-rotating vortices.Type: ApplicationFiled: July 31, 2009Publication date: May 26, 2011Inventors: Thomas Corke, Flint Thomas, David Shatzman, Tommie Wood
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Patent number: 7935909Abstract: Methods and devices for controlling the flow of gases through a plasma arc torch are provided. A flow of plasma gas is directed to a plasma chamber, a first flow of auxiliary gas is directed around a plasma stream that exits a tip in one of a swirling manner and a radial manner, and a second flow of auxiliary gas is directed around the first flow of auxiliary gas and the plasma stream in one of a coaxial manner, an angled manner, and a radial manner. The first flow of auxiliary gas functions to constrict and shape the plasma stream to improve cut quality and cut speed, and the second flow of auxiliary gas functions to protect the plasma arc torch during piercing and cutting and to cool components of the plasma arc torch such that thicker workpieces may be processed with a highly shaped plasma stream.Type: GrantFiled: September 4, 2007Date of Patent: May 3, 2011Assignee: Thermal Dynamics CorporationInventors: Nakhleh A. Hussary, Christopher J. Conway, Thierry R. Renault, Darrin H. MacKenzie
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Publication number: 20110088739Abstract: A composite includes a matrix having a plurality of matrix nanoparticles and a plurality of hetero-nanoparticles dispersed in the matrix. The hetero-nanoparticles include an atom having an atomic weight larger than the atoms in the matrix nanoparticles. A thermoelectric converter includes one or more first legs, each including an n-doped composite, and one or more second legs, each including a p-doped composite. The n-doped and p-doped composites include a matrix having a plurality of matrix nanoparticles and a plurality of hetero-nanoparticles dispersed in the matrix. The matrix nanoparticles and hetero-nanoparticles in each of the n-doped and p-doped composites can be the same or different. A method of making a composite for thermoelectric converter applications includes providing a mixture a plurality of matrix nanoparticles and a plurality of hetero-nanoparticles and applying current activated pressure assisted densification to form the composite.Type: ApplicationFiled: October 20, 2010Publication date: April 21, 2011Applicant: LOCKHEED MARTIN CORPORATIONInventors: Alfred A. ZINN, Roux M. Heyns
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Patent number: 7910854Abstract: The invention proposes a method of locally colouring a part made of ceramic material of the metallic oxide type mainly including the following steps of taking a support for the part and a laser, able to move relative to each other in an XY plane, performing a plasma treatment of the part using a gas containing one element selected from among nitrogen an carbon, so as to convert a surface layer of metallic oxide, into a substantially stoichiometric ceramic chosen from among metal nitrides and carloides, locally illuminating the part with the laser beam so as to provide sufficient energy to cause a local change in colour by altering the stoichiometry of the surface layer, and scanning the surface of the part using the laser beam so as to form a determined pattern.Type: GrantFiled: March 23, 2007Date of Patent: March 22, 2011Assignee: Comadur S.A.Inventors: François Besson, Sylvain Boucard
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Publication number: 20110031224Abstract: An improved plasma torch and method of starting the torch are provided. The torch may comprise a main torch body with an electrode assembly coupled to a piston therein. The piston and electrode assembly are moveable between a starting position whereby the electrode assembly contacts a nozzle, and an operating position whereby the electrode assembly does not contact the nozzle. The piston is moveable by directing fluid, which may comprise coolant, through the plasma torch either in a first direction which biases the piston to the starting position, or in an opposite second direction which biases the piston so as to retract the electrode assembly to the operating position. A reversing valve or reversible pump may be used to control the direction of the flow of the fluid. Thereby, the coolant supply may be used to both cool the torch and control the starting and operation of the torch.Type: ApplicationFiled: August 10, 2009Publication date: February 10, 2011Applicant: The Esab Group, Inc.Inventors: Wayne Stanley Severance, JR., Ruben A. Chico
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Patent number: 7875824Abstract: An electrode assembly and method of centering an outer ring around an electrode assembly in a plasma reaction chamber used in semiconductor substrate processing. The method includes positioning the outer ring around an outer surface of a backing member of the electrode assembly, and inserting at least one centering element between the outer ring and the backing member. The centering element can be a plurality of spring-loaded centering elements received in a cavity on the outer surface of the backing member, the centering elements having a first end adapted to contact the outer ring and a second end adapted to receive a spring. The outer ring surrounds an outer surface of the backing member, such that the plurality of spring-loaded centering elements are positioned between the outer surface of the backing member and an inner surface of the outer ring.Type: GrantFiled: February 2, 2007Date of Patent: January 25, 2011Assignee: Lam Research CorporationInventors: Dean J. Larson, Daniel Brown, Keith Comendant, Victor Wang
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Patent number: 7872207Abstract: A cascade source includes a cathode housing, a number of cascade plates insulated from each other and stacked on top of each other which together bound at least one plasma channel, and an anode plate provided with an outflow opening connecting to the plasma channel. One cathode is provided per plasma channel, which cathode includes an electrode which is adjustable relative to the cathode housing in the direction of the plasma channel. The clamp may be of the collet chuck type. At least a part of the housing of the source may be substantially transparent. A method for controlling the cascade source in use includes monitoring the electromagnetic radiation of the plasma through the substantially transparent housing part, and, dependent on the monitored radiation, controlling the plasma forming process in the source by variation of the gas supply, or variation of the potential difference between the cathode and the anode or a combination thereof.Type: GrantFiled: May 19, 2004Date of Patent: January 18, 2011Assignee: OTB Solar B.V.Inventors: Martin D. Bijker, Leonardus P. M. Clijsen, Franciscus C. Dings, Remco L. J. R. Pennings
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Publication number: 20110000896Abstract: A method is disclosed for adjusting the composition of plasmas used in plasma doping, plasma deposition and plasma etching techniques. The disclosed method enables the plasma composition to be controlled by modifying the energy distribution of the electrons present in the plasma. Energetic electrons are produced in the plasma by accelerating electrons in the plasma using very fast voltage pulses. The pulses are long enough to influence the electrons, but too fast to affect the ions significantly. Collisions between the energetic electrons and the constituents of the plasma result in changes in the plasma composition. The plasma composition can then be optimized to meet the requirements of the specific process being used. This can entail changing the ratio of ion species in the plasma, changing the ratio of ionization to dissociation, or changing the excited state population of the plasma.Type: ApplicationFiled: July 1, 2009Publication date: January 6, 2011Applicant: Varian Semiconductor Equipment Associates, Inc.Inventors: Kamal Hadidi, Rajesh Dorai, Bernard G. Lindsay, Vikram Singh, George D. Papasouliotis
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Publication number: 20100308021Abstract: A device and method are provided for determining whether sufficient ground exists to perform processes such requiring the establishment of an electrical arc such arc welding or plasma cutting. The device is capable of fastening to at least one object placed in between a first contact surface and a second contact surface. The contact surfaces are composed of conductive material but separated by non-conductive material. The device further includes at least one light bulb coupled with an electrical circuit such that the electrical circuit coupled to the light bulb, broken only by non-conductive material separating the first contact surface and the second contact surface. A method of determining whether such sufficient ground exists by connecting an electrical circuit, coupled with a light bulb and broken only by the object, is also provided.Type: ApplicationFiled: June 9, 2009Publication date: December 9, 2010Inventor: Adam Ray Lunn
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Publication number: 20100308022Abstract: The invention relates to a method and a device for the plasma treatment of metal substrates or insulating substrates (3) running substantially continuously through a vacuum chamber having a treatment zone (2), the plasma being sustained by radiofrequency inductive coupling in the treatment zone (2) by means of an inductor (4) connected to a radiofrequency generator, in which the inductor (4) is protected from any contamination by the material emitted by the surface of the substrates (3) by means of a Faraday cage (7), which is positioned between the plasma and the inductor (4), and in which the Faraday cage (7) is on average electrically biassed positively with respect to the substrates (3) or with respect to a counter-electrode present in the plasma.Type: ApplicationFiled: October 6, 2008Publication date: December 9, 2010Inventor: Pierre Vandenbrande
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Publication number: 20100294744Abstract: A dual mode plasma arc torch and methods of operation thereof are provided, wherein the plasma arc torch is operable with both a high frequency power supply and a contact start power supply.Type: ApplicationFiled: August 3, 2010Publication date: November 25, 2010Applicant: Thermal Dynamics CorporationInventors: Roger W. Hewett, Kevin D. Homer-Richardson, Joseph P. Jones, Shiyu Chen, Fred Rogers
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Patent number: 7807937Abstract: A system for conserving a consumable component of a plasma torch is disclosed. The system includes a controller of a plasma torch that is connected to a power source. The controller is configured to, during a single trigger actuation, delay generation of an arc after a prior arc collapses. Such a control allows the consumable components of the plasma torch to cool prior to subsequent operation.Type: GrantFiled: January 3, 2005Date of Patent: October 5, 2010Assignee: Illinois Tool Works Inc.Inventor: Joseph C Schneider
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Patent number: 7767926Abstract: A method and system for the dry development of a multi-layer mask is described. A first passivation gas comprises as an incipient ingredient a hydrocarbon gas, while a second passivation gas comprises as an incipient ingredient an oxygen-containing gas.Type: GrantFiled: March 29, 2006Date of Patent: August 3, 2010Assignee: Tokyo Electron LimitedInventor: Vaidyanathan Balasubramaniam
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Patent number: 7763825Abstract: An axle beam for an industrial vehicle has a beam and a boss. The beam is supported on a vehicle body. The boss is provided at opposite ends of the beam for supporting a kingpin. The beam includes at a longitudinally middle thereof a portion having a closed cross-section perpendicular to a longitudinal direction of the beam and is shaped at the portion to form a space which is surrounded by a front and rear and a top and bottom of the beam. The portion is formed by welding two members or by one tube member.Type: GrantFiled: February 14, 2008Date of Patent: July 27, 2010Assignee: Kabushiki Kaisha Toyota JidoshokkiInventor: Kenichi Katae
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Patent number: 7754997Abstract: An apparatus configured to confine a plasma within a processing region in a plasma processing chamber. In one embodiment, the apparatus includes a ring that has a baffle having a plurality of slots and a plurality of fingers. Each slot is configured to have a width less than the thickness of a plasma sheath contained in the processing region.Type: GrantFiled: October 25, 2007Date of Patent: July 13, 2010Assignee: Applied Materials, Inc.Inventors: Kallol Bera, Yan Ye, James D. Carducci, Daniel J. Hoffman, Steven C. Shannon, Douglas A. Buchberger, Jr.
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Patent number: 7754995Abstract: A plasma processing apparatus comprising at least a plasma processing chamber for plasma-processing an object; object-holding means for disposing the object in the plasma processing chamber; and plasma-generating means for generating a plasma in the plasma processing chamber. The inner wall of the plasma processing chamber is at least partially covered with an oxide film based on a pre-treating plasma. A plasma processing apparatus and a plasma processing method effectively prevent the spluttering and the etching of the inner wall of the plasma processing chamber while suppressing contamination to the object.Type: GrantFiled: November 20, 2003Date of Patent: July 13, 2010Assignee: Tokyo Electron LimitedInventors: Toshihisa Nozawa, Masaru Sasaki, Masaji Inoue
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Publication number: 20100163534Abstract: A plasma treatment method for processing a material includes a step of subjecting the material to a substantially atmospheric-pressure plasma, thereby obviating the need of providing expensive vacuum apparatus and pumping assemblies, while facilitating a continuous and quick treatment even in a controlled working environment. Depending on the materials to be processed, several processing methods can be used.Type: ApplicationFiled: February 21, 2008Publication date: July 1, 2010Inventors: Claudia Riccardi, Paola Esena, Ruggero Alfredo Barni, Riccardo Siliprandi, Stefano Zanini
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Patent number: 7741577Abstract: A device, method and system for generating a plasma is disclosed wherein an electrical arc is established and the movement of the electrical arc is selectively controlled. In one example, modular units are coupled to one another to collectively define a chamber. Each modular unit may include an electrode and a cathode spaced apart and configured to generate an arc therebetween. A device, such as a magnetic or electromagnetic device, may be used to selectively control the movement of the arc about a longitudinal axis of the chamber. The arcs of individual modules may be individually controlled so as to exhibit similar or dissimilar motions about the longitudinal axis of the chamber. In another embodiment, an inlet structure may be used to selectively define the flow path of matter introduced into the chamber such that it travels in a substantially circular or helical path within the chamber.Type: GrantFiled: March 28, 2006Date of Patent: June 22, 2010Assignee: Battelle Energy Alliance, LLCInventors: Peter C. Kong, Jon D. Grandy, Brent A. Detering
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Patent number: 7728253Abstract: A system and method employing a microplasma to electrically charge nano- or micro-particles in a gas phase and, subsequently, trap the charged particles within the microplasma using the microplasma's built-in electric fields are disclosed. Confinement of the particles allows their density to be increased over time such that very low concentrations of particles can be detected, e.g., by methods such as laser scattering and/or detection of the plasma-induced charge on the particles. Preferably, charge detection methods are employed when nano-particles are to be trapped and detected.Type: GrantFiled: June 29, 2006Date of Patent: June 1, 2010Assignee: Northeastern UniversityInventor: Jeffrey A. Hopwood
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Patent number: 7709765Abstract: A thermal processing system includes a thermal torch for processing a workpiece, a power supply for providing power to the thermal torch, a positioning system for relatively moving the thermal torch and the workpiece, a controller for controlling the thermal processing system, and a deterministic-based communication network, such as, for example, a network which operates using SERCOS. The deterministic-based communications network connects at least the controller, the power supply, and the positioning system of the thermal processing system together.Type: GrantFiled: December 28, 2005Date of Patent: May 4, 2010Assignee: Hypertherm, Inc.Inventors: Tate S. Picard, Gregory S. Wilson, Jeffery L. Peterson
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Publication number: 20100065535Abstract: A method and associated apparatus for generating a plasma field, including: arranging the points of discharge of a plurality of electrodes into a plane, applying voltage to each electrode, providing at least one grounded electrode, and controlling the path between the electrodes and corresponding temperature of the plasma formed between the electrodes by controlling the signal and phase to the high voltage generators.Type: ApplicationFiled: July 18, 2008Publication date: March 18, 2010Applicant: AFL Telecommunications LLCInventors: Wenxin Zheng, Douglas Duke, William R. Klimowych, Toshiki Kubo