Abstract: A cleaning device and method utilizes an electric circuit including a power supply electrically attached through a first lead to the alloy structure and a second lead connected to a probe. A protective atmosphere is provided over the surface of the alloy that is to be cleaned. Electric energy supplied by the power source generates an electric arc between the probe and the surface of the structure within the protective atmosphere. The electric interaction created by the electric arc and the surface of the alloy removes built up undesired material.

Abstract: The invention is related to an apparatus made of microwave plasma burner for a large-volume elimination of toxic airborne chemical and biological warfare agents. The apparatus can purify the interior air of large volume in an isolated space such as buildings, public transportation systems, and military vehicles contaminated with chemical and biological warfare agents. The apparatus consists of a microwave plasma torch connected in series to a fuel injector and a reaction chamber for elimination and burnout of toxic airborne warfare agents in large quantities. Hydrocarbon fuel in gaseous or liquid state injected into the microwave plasma torch evaporates instantaneously, generating a large volume of plasma flame in the reaction chamber where the oxidation mechanism eliminates the chemical and biological warfare agents that pass through the reaction chamber. The apparatus can also purify air contaminated with volatile organic compounds and eliminate soot from diesel engines.

Abstract: A plasma arc torch that includes a torch body having a nozzle mounted relative to a composite electrode in the body to define a plasma chamber. The torch body includes a plasma flow path for directing a plasma gas to the plasma chamber in which a plasma arc is formed. The nozzle includes a hollow, body portion and a substantially solid, head portion defining an exit orifice. The composite electrode can be made of a metallic material (e.g., silver) with high thermal conductivity in the forward portion electrode body adjacent the emitting surface, and the aft portion of the electrode body is made of a second low cost, metallic material with good thermal and electrical conductivity. This composite electrode configuration produces an electrode with reduced electrode wear or pitting comparable to a silver electrode, for a price comparable to that of a copper electrode.

Abstract: Embodiments of field enhanced inductively coupled plasma reactors and methods of use of same are provided herein. In some embodiments, a field enhanced inductively coupled plasma processing system may include a process chamber having a dielectric lid and a plasma source assembly disposed above the dielectric lid. The plasma source assembly includes one or more coils configured to inductively couple RF energy into the process chamber to form and maintain a plasma therein, one or more electrodes configured to capacitively couple RF energy into the process chamber to form the plasma therein, wherein the one or more electrodes are electrically coupled to one of the one or more coils, and an RF generator coupled to the one or more inductive coils and the one or more electrodes. In some embodiments, a heater element may be disposed between the dielectric lid and the plasma source assembly.

Abstract: Nozzles for plasma torches are essentially formed from a metal or a metal alloy. To increase the life of such nozzles wear-resistant microparticles of a hard material, preferably a hard ceramic material, are embedded in the metal or the metal alloy, at least in certain regions. The nozzles can be advantageously manufactured by extrusion.

Abstract: Methods and apparatus for plasma-assisted heat treatments are provided. The method can include initiating a heat treating plasma within a cavity (14) by subjecting a gas to electromagnetic radiation in the presence of a plasma catalyst (70), heating the object by exposing the object to the plasma, and maintaining exposure of the object to the plasma for a sufficient period to alter at least one material property of the object.

Abstract: There is disclosed a process for producing metal oxide nanoparticles. The process includes the steps of: a) providing at least two precursor metal salt materials, b) passing the at least two precursor metal salt materials through a plasma torch forming a vaporized material, and then c) condensing the vaporized material forming a metal oxide nanoparticle.

Abstract: A method processing a workpiece in a plasma reactor chamber in which a first one of plural applied RF plasma powers is modulated in accordance with a time-varying modulation control signal corresponding to a desired process transient cycle. The method achieves a reduction in reflected power by modulating a second one of the plural plasma powers in response to the time-varying modulation control signal.

Abstract: The present invention provides means for controlling the temperature of a semiconductor wafer rapidly and uniformly in plane during etching processing by a large quantity of input heat by use of a refrigerating system by the heat of evaporation. A ring-shaped refrigerant passage is formed in a sample stand. Since the heat transfer rate and pressure loss of a refrigerant increase from a refrigerant supply port to a refrigerant ejection port as dryness degrees increase, these must be restricted. Therefore, constructionally, a supply refrigerant quantity is controlled to prevent the refrigerant from completely evaporating within the refrigerant passage, and the sectional areas of the refrigerant passage increase successively from a first passage to a third passage.

Abstract: A contact start plasma system is provided that includes a passive pilot arc circuit that decreases the size and cost of the system. The plasma arc system includes a torch body, an electrode having a longitudinally disposed axis and mounted in the body, a nozzle having a longitudinally disposed axis, the nozzle axis being disposed substantially collinearly with the electrode axis, a power supply coupled to the electrode, the nozzle and a workpiece, the power supply providing a current for operating the torch in a pilot arc mode and a transferred arc mode, a gas source coupled to the plasma chamber, the gas source providing gas for operating in a pilot arc mode and a transferred arc mode, and a passive pilot arc circuit coupled between the power supply and the nozzle, the passive pilot arc circuit controlling the operation of the torch in the pilot arc mode. Either the electrode or the nozzle can be translatable for blow-forward or blow-back mode of operation.

Abstract: The invention relates to a method for operation of a steam plasma burner (6), comprising a cathode (22) and an anode (24) in the form of a nozzle (23) for machining a workpiece (20), wherein during the operation a current is applied between the cathode (22) and the anode (24) and/or the workpiece (20) by means of a power supply (2). After starting a pilot arc between the cathode (22) and the anode (24) by approaching the steam plasma burner (6) to the workpiece (20), a working arc is formed between the cathode (22) and the workpiece (20) and the pilot arc is extinguished by switching off the power supply (2) to the anode (24) and the current increased to a given working current. In order to achieve an optimal operation of a steam plasma burner, the voltage (UUE) between the cathode (22) and the workpiece (20) is monitored during working operation and the power supply (2) reconnected to the anode (24) to reform the pilot arc when the voltage (UUE) exceeds a threshold (IUEs).

Abstract: Methods and apparatus are provided for igniting, modulating, and sustaining a plasma for various plasma processes and treatments. In one embodiment, a plasma is ignited by subjecting a gas in a multi-mode processing cavity to electromagnetic radiation having a frequency between about 1 MHz and about 333 GHz in the presence of a plasma catalyst, which may be passive or active. A passive plasma catalyst may include, for example, any object capable of inducing a plasma by deforming a local electric field. An active plasma catalyst can include any particle or high energy wave packet capable of transferring a sufficient amount of energy to a gaseous atom or molecule to remove at least one electron from the gaseous atom or molecule, in the presence of electromagnetic radiation.

Abstract: A plasma processing is performed by using a plasma processing apparatus which includes a first electrode and a second electrode disposed relatively movable to the first electrode between which an object to be processed is disposed, and a solid dielectric material disposed to be continuously connected to at least processing starting and final end sides of the object. A process gas is introduced between the first and second electrodes under a state in which the first electrode abuts on entire surfaces of the object and the solid dielectric material, and a voltage is applied between the first and second electrodes to thereby process the object by plasma discharge generated between the first and second electrodes while moving the second electrode relatively to the first electrode and the object.

Abstract: The invention relates to a method for producing thermal energy, wherein, by means of a plasma arc which is located between a cathode and an anode, light initial material that is suitable for fusion processes is put into the plasma state by supplying electric energy. Use is made of a cathode made of a metal that is suitable for allowing the particles which are produced in the plasma to be diffused and for allowing a fusion process to take place in the metal grid. The invention has a high degree of efficiency in corresponding systems such that said methods can be used anywhere where fossil and/or renewable and/or chemical fuels are used, in order to use the thermal energy directly or by conversion.

Abstract: A bonding apparatus including a capillary 40 having a high-frequency coil 50 on its tip end portion and allowing a bonding wire 2 to pass therethrough, a position changing unit for changing the position of the tip of the bonding wire, a gas supply unit for supplying gas into the capillary, and a high-frequency power supply unit for supplying high-frequency power to the high-frequency coil. When the bonding wire is outside a plasma region 52 in the capillary, a microplasma generated in the plasma region is ejected out of the capillary and removes foreign matter or contaminants on the surface of a bonding subject. When the bonding wire is inside the plasma region, the material of the bonding wire is turned into fine particles, and a microplasma 303 containing sputtered fine particles is ejected from the capillary, allowing the material the same as the bonding wire to be deposited on the bonding subject.

Abstract: An ignition circuit and a method of operating an igniter (preferably a traveling spark igniter) in an internal combustion engine, including a high pressure engine. A high voltage is applied to electrodes of the igniter, sufficient to cause breakdown to occur between the electrodes, resulting in a high current electrical discharge in the igniter, over a surface of an isolator between the electrodes, and formation of a plasma kernel in a fuel-air mixture adjacent said surface. Following breakdown, a sequence of one or more lower voltage and lower current pulses is applied to said electrodes, with a low “simmer” current being sustained through the plasma between pulses, preventing total plasma recombination and allowing the plasma kernel to move toward a free end of the electrodes with each pulse.

Abstract: A method and apparatus for processing metal bearing gases involves generating a toroidal plasma in a plasma chamber. A metal bearing gas is introduced into the plasma chamber to react with the toroidal plasma. The interaction between the toroidal plasma and the metal bearing gas produces at least one of a metallic material, a metal oxide material or a metal nitride material.

Abstract: Electrode assemblies for plasma reactors include a structure or device for constraining an arc endpoint to a selected area or region on an electrode. In some embodiments, the structure or device may comprise one or more insulating members covering a portion of an electrode. In additional embodiments, the structure or device may provide a magnetic field configured to control a location of an arc endpoint on the electrode. Plasma generating modules, apparatus, and systems include such electrode assemblies. Methods for generating a plasma include covering at least a portion of a surface of an electrode with an electrically insulating member to constrain a location of an arc endpoint on the electrode. Additional methods for generating a plasma include generating a magnetic field to constrain a location of an arc endpoint on an electrode.

Abstract: A method for multi-step temperature control of a substrate includes selecting a first set-point temperature and a second set-point temperature for the substrate, and selecting a first PID parameter set including a first proportional constant KP1, a first integral constant KI1 and a first derivative constant KD1, and selecting a second PID parameter set including a second proportional constant KP2, a second integral constant KI2 and a second derivative constant KD2. The substrate is placed on a substrate holder, the temperature of the substrate is adjusted to the first set-point temperature and the substrate is processed for a first period of time at the first set-point temperature.

Abstract: A cooling block for coupling a remote plasma source to a resistor is disclosed. As processed substrates become larger for solar panels, organic light emitting diodes, and flat panel displays, a greater amount of cleaning gas and hence, plasma from a remote plasma source, may be necessary. When large amounts of cleaning gas such as fluorine containing gas is ignited into a plasma, the temperature of the remote plasma source that ignites the plasma may become very hot. The hot plasma may transfer heat to adjacent components and to any components through which the plasma flows. By cooling the block connecting the remote plasma source to the resistor, the plasma may be cooled prior to reaching the resistor and hence, prior to reaching the processing chamber.

Abstract: A starting circuit for use with a plasma torch is provided including circuitry for initiating a pilot arc using a unipolar voltage impulse. A transformer is selectively coupled to a DC source so that an impulse is introduced using the same DC source used to maintain an established pilot arc. A method is provided wherein an arc can be initiated while at the same time the DC source is pre-loaded so that surge injection circuitry is not needed to sustain the arc while ramping to the full pilot arc current level.

Abstract: The present invention relates to a waste disposing apparatus that, rather than using incineration, uses a system wherein heat is applied to a magnetic field generated by compounded granulated ores to promote the occurrence and activation of plasma, resulting in the maintenance of a high temperature in the disposing apparatus that is sufficient to subject to a high heat consumption disposing the waste placed therein.

Abstract: The invention relates to a thermal destruction process for at least one organic or halogenated organic product in liquid, gaseous or powder form.

Abstract: A device is provided for adiabatically compressing a plasma stream and maintaining the plasma stream in the compressed state. The device has a plasma compression region; a first plurality of electromagnets positioned around the plasma compression region for compressing the plasma stream; a reaction region positioned down stream from the plasma compression region; and a second plurality of electromagnets positioned around the reaction region for maintaining the plasma stream in its compressed state.

Abstract: A method of creating a simplified equivalent circuit model of a plasma processing system, including an electrical measuring device, a lower electrode, an upper electrode, and a signal generator device is described. The method includes creating a simplified equivalent circuit equation, including a set of variables, of the plasma processing system, wherein the electrical measuring device comprises a first subset of variables, the lower electrode comprises a second subset of variables, the upper electrode comprises a third subset of variables, and the signal generator device comprises a forth subset of variables. The method also includes generating a set of signals, each of the set of signals being generated at a different frequency, wherein the signal generator device is coupled to the electrical measuring device, the lower electrode, and the upper electrode.

Abstract: Methods and apparatus are provided for igniting, modulating, and sustaining a plasma for various plasma processes and treatments. Such treatments include cleaning and sterilizing parts. In some embodiments, a plasma is ignited by subjecting a gas in a multi-mode processing cavity to electromagnetic radiation having a frequency between about 1 MHz and about 333 GHz in the presence of a plasma catalyst. A part can be cleaned by, for example, inserting hydrogen into the plasma and exposing the part to the hydrogen-enriched plasma. A part can be sterilized by heating the part with the plasma.

Abstract: An electrode for a plasma arc cutting torch which minimizes the deposition of high emissivity material on the nozzle, reduces electrode wear, and improves cut quality. The electrode has a body having a first end, a second end in a spaced relationship relative to the first end, and an outer surface extending from the first end to the second end. The body has an end face disposed at the second end. The electrode also includes at least one passage extending from a first opening in the body to a second opening in the end face. A controller can control the electrode gas flow through the passages as a function of a plasma arc torch parameter. Methods for operating the plasma arc cutting torch with the electrode are disclosed.

Abstract: A threaded connection for an electrode holder and an electrode in a plasma arc torch is provided. The threaded connection has relatively low height, and the engaged portion of a male threaded portion of the electrode and a female threaded portion of the electrode holder are positioned at least partially within a nozzle chamber. In one inventive aspect, the nominal pitch diameter of the electrode is less than the minor diameter of the electrode. In another, the width of the root area of the electrode thread is wider than the width of the root area of the electrode holder thread by at least about 35%. The width of the root area of the electrode is at least about 15% wider than the width of the crest portion of the electrode. As such, the less consumable of the two parts, the electrode holder, is provided with a thread that is less likely to be worn and damaged. In one particular embodiment, the crest profile of the electrode is that of a Stub Acme thread separated by a larger root profile.

Abstract: A process for increasing the surface tension (“wettability”) of a silicone element crosslinked by polyaddition from a liquid composition containing one or more ?,?-dimethylvinylpolydimethylsiloxanes (PDMS), one or more poly(dimethyl)(methylhydrogenosiloxy)-?,?-dimethylhydrogenosiloxanes, and a platinum crosslinking catalyst. The silicone surface is treated with a homogeneous atmospheric plasma using a plasma spraying apparatus having a rotating head with one or more plasma nozzles that are offset relative to the axis of rotation, each one being capable of generating a plasma jet whose axis is parallel to said axis of rotation. The articles to which the invention relate include composites of flexible substrate (e.g. textile)/silicone coating. Application: adhesive bonding of silicone surfaces crosslinked by ?Si—H/?Si-vinyl polyaddition.

Abstract: A method and apparatus for controlling a gas supply to a plasma arc torch uses a proportional control solenoid valve positioned adjacent the torch to manipulate the gas flow to the torch, thereby extending electrode life during arc transfer and shutdown. Swirl ring design can be simplified and gas supply and distribution systems become less complicated. The invention also allows manipulation of shield gas flow to reduce divot formation when making interior cuts. The system can be controlled with a digital signal processor utilizing a feedback loop from a sensor.

Abstract: An atomic oxygen generator/sprayer is invented. An array of three magnetized torches running at 60 Hz is used to generate non-thermal plasma; thus, the plasma effluent has relatively low temperature (touchable) and yet contains high energy electrons (>5 eV) capable to dissociate oxygen molecules to atomic oxygen. The emission spectroscopy of the torch indicates that the plasma effluent carries an abundance of reactive atomic oxygen (RAO), which can effectively kill all kind microbes. A cap holding three pairs of rectangular permanent magnets is used to spread torches laterally into fan shape, which extends to a width exceeding 100 mm. The flux of RAO exceeds 2×106 cm?2 sec?1; its flow speed exceeds 20 m/s and it reaches out more than 20 mm. This invention is suitable for applications such as sterilizing carpets, clothes, and bed sheets.

Abstract: A method and apparatus for controlling a gas supply to a plasma arc torch uses a proportional control solenoid valve positioned adjacent the torch to manipulate the gas flow to the torch, thereby extending electrode life during arc transfer and shutdown. Swirl ring design can be simplified and gas supply and distribution systems become less complicated. The invention also allows manipulation of shield gas flow to reduce divot formation when making interior cuts. The system can be controlled with a digital signal processor utilizing a feedback loop from a sensor.

Abstract: To detect arc discharges occurring in a plasma, a parameter of the plasma process is determined, and after a first period of time following the detection of an arc discharge the parameter is again determined. In the event that after the first period of time no arc discharge is detected, a first arc suppression countermeasure for suppression of arc discharges is executed.

Abstract: An electrode for a plasma arc cutting torch which minimizes the deposition of high emissivity material on the nozzle, reduces electrode wear, and improves cut quality. The electrode has a body having a first end, a second end in a spaced relationship relative to the first end, and an outer surface extending from the first end to the second end. The body has an end face disposed at the second end. The electrode also includes at least one passage extending from a first opening in the body to a second opening in the end face.

Abstract: An electrode for a plasma arc cutting torch which minimizes the deposition of high emissivity material on the nozzle, reduces electrode wear, and improves cut quality. The electrode has a body having a first end, a second end in a spaced relationship relative to the first end, and an outer surface extending from the first end to the second end. The body has an end face disposed at the second end. The electrode also includes at least one passage extending from a first opening in the body to a second opening in the end face. A controller can control the electrode gas flow through the passages as a function of a plasma arc torch parameter. Methods for operating the plasma arc cutting torch with the electrode are disclosed.

Abstract: A flame torch can be used to clean the surface of a contact-sensitive object, such as a glass optic, extremely thin workpiece, or semiconductor wafer by providing a reactive precursor gas to the feed gases of the torch. Reactive atom plasma processing can be used to clean the surface of a contaminant that chemically combines with the atomic radicals of the precursor without affecting the surface. The torch can also be used to modify the surface after cleaning, without transferring the object or engaging in any intermediate processing, by supplying a second reactive precursor that reacts with the surface itself. The flame torch can be used to shape, polish, etch, planarize, deposit, chemically modify and/or redistribute material on the surface of the object. This description is not intended to be a complete description of, or limit the scope of, the invention. Other features, aspects, and objects of the invention can be obtained from a review of the specification, the figures, and the claims.

Abstract: An apparatus configured to confine a plasma within a processing region in a plasma processing chamber. In one embodiment, the apparatus includes a ring that has a baffle having a plurality of slots and a plurality of fingers. Each slot is configured to have a width less than the thickness of a plasma sheath contained in the processing region.

Abstract: Making it possible to execute the detection of the particles floating inside a processing chamber with the use of an optical system including one observing window and one unit (An object of the present invention is, by using an optical system including one observing window and one unit, to make it possible to execute the detection of the particles floating inside a processing chamber.) Also, in order to be able to detect exceedingly feeble particle scattered-lights with a high-accuracy, when performing a desired thin-film forming or thin-film processing treatment toward a to-be-processed target inside the processing chamber, the following method is employed: First, the irradiation with a beam is executed into the processing chamber through the observing window.

Abstract: A method of forming a composite overlay compound on a substrate includes forming a mixture including at least one component from a first group of component materials including titanium, chrome, tungsten, vanadium, niobium, and molybdenum. The mixture also includes at least one component from a second group of component materials including carbon and boron, and the mixture further includes at least one component from a third group of component materials including silicon, nickel, and manganese. The mixture of selected component materials is then applied to a substrate material to form an overlay compound on the substrate material. The overlay compound is fused to the substrate to form a metallurgical bond between the substrate material and the overlay compound.

Abstract: A customizable ion fusion formation system and method is used to repair a targeted repair region of a workpiece with successive layers of feedstock material. The system includes a moveable positioning platform and a control platform positioned separate and apart from the moveable positioning platform. A positioning arm is mounted to the moveable positioning platform and has a deposition head, including a plasma torch and a feedstock feeder mounted thereto. The deposition head is positioned relative to the targeted repair region by positioning and repositioning the moveable positioning platform, and thus the positioning arm, thereby providing customizable repair.

Abstract: A method of generating an electrical arc includes steps of providing a first electrode and a second electrode, determining a dielectric strength of a gap region between the electrodes, determining a desired dielectric strength change based on the determined dielectric strength, injecting an amount of ions into the gap region, wherein the amount of ions is controlled based on the desired dielectric strength change, and providing a voltage to the first electrode, the voltage causing the electrical arc to be formed between the first electrode and the second electrode. Preferably, the amount of ions injected into the gap region causes the dielectric strength of the gap region to be changed by an amount substantially equal to the desired dieletric strength change. The method may be implemented in an apparatus employing an electrician arc, such as, without limitation, a fusion splicer or an apparatus for preparing an optical fiber.

Abstract: To protect the collimator of a transferred plasma arc torch from premature failure due to corrosion, an anti-corrosive covering is applied on the exposed face surface and a portion of the inner exit bore of the collimator. The specification describes several methods for producing the collimator for a plasma torch having an anti-corrosive coating or cladding on the exposed surfaces thereof, including electroplating, electroless plating, flame spraying, plasma spraying, plasma transferred arc, hot isostatic pressing and explosive cladding.

Abstract: The invention relates to a plasma spraying apparatus (1) including a plasma torch (2) for heating up a spray powder (3) in a heating zone (4) and a metering unit (5) for metering the spray powder (3), the metering unit (5) for conveying the spray powder (3) into an injection unit (6) by means of a conveyor gas (7) under a predetermined pressure being connected with a conveyor gas unit (9) via a conveyor gas line (8). The injection unit (6) has an inlet (61) and an outlet (62) designed as a powder injector (62) so that the spray powder (3) can be supplied from the metering unit (5) to the injector unit (6) through the inlet (61) by means of the conveyor gas (7) via an injector line (10) to the injector unit (6).

Abstract: In a plasma processing system, a method for detecting an arc event on a substrate in a plasma chamber having a chuck is disclosed. The method includes positioning a substrate on the chuck. The method also includes providing a vibration-sensing arrangement in the plasma chamber, the vibration-sensing arrangement being configured for measuring arc-induced vibrations on the substrate, the arc-induced vibrations being generated when an arc strikes the substrate during plasma processing of the substrate in the plasma processing chamber.

Abstract: The invention relates to a method for inert gas welding or inert gas soldering of workpieces (A) made of steel, aluminum, magnesium, copper, or the alloys thereof with workpieces (B) made of steel, aluminum, magnesium, copper, or the alloys thereof by using an additional molten metal alloy, workpieces (A) and (B) being made of identical or different metals or metal alloys. The inventive method is characterized by the following steps: a) the workpieces that are to be connected are contacted edge to edge or in an overlapping manner; b) the additional metal alloy containing a Zn/Al alloy is fused; c) the additional molten metal alloy is applied to the contact points or partial areas of the contact points of the contacted workpieces; d) the connected workpieces are cooled. Steps b) and c) are carried out immediately after one another while at least steps b) and c) are carried out by using an inert gas. The invention further relates to a wire that is used in said method.

Abstract: A method of supplying a plasma torch with a gas, mixed gas or gas mixture, in which the volume flow of the gas, mixed gas or gas mixture is controlled, characterised in that the volume flow control is effected in combination with a pressure control of the gas, mixed gas or gas mixture in such a way that the pressure control is used to adjust the level of the total volume flow through the nozzle of the plasma torch, and the volume flow control is used to adjust the volume flow portions producing the total volume flow, taking the desired gas composition into account, and an arrangement for carrying out said method.

Abstract: Vented shield systems for plasma arc torches are provided that comprise a shield cup body defining a distal end portion, a vented retainer secured to the distal end portion of the shield cup body, and a shield cap secured to the vented retainer. The vented retainer defines at least one vent passageway that directs a flow of secondary gas inward toward the shield cap, and the vented shield system blocks at least a portion of molten metal from contacting components, such as a tip or nozzle, of the plasma arc torch. The shield cap may comprise a mechanized cap, a drag cap, a gouging cap, or a deflector cap, among others. Accordingly, various shield caps may be employed without removal or replacement of the vented retainer. The same vented retainer may be used throughout a variety of plasma arc torch applications.

Abstract: A method and apparatus for reducing the gap resistance between two electrodes, such as the electrodes used fusion splicing one optical fiber to another, by injecting negative ions into the gas or gasses that are located between the electrodes. As a result, the voltage that is required to cause dielectric breakdown and initiation of the electrical arc is drastically reduced.

Abstract: A monolithic microplasma source includes a dielectric substrate having an outer surface that is exposed to a time varying electric field. A gap layer is positioned on an inner surface of the dielectric substrate. A shield including a slit is positioned on the gap layer. A relief structure is formed in at least one of the gap layer and the dielectric substrate. The dimensions of the gap layer, the slit in the shield, and the relief structure are chosen so as to prevent a formation of a continuous film across the relief structure. A chamber containing a gas is positioned adjacent to the shield so that the gas is ionized to form a microplasma when an electric field is induced in the chamber by the incident time varying electric field.

Abstract: Methods and apparatus for plasma-assisted joining of one or more parts together are provided. The joining process may include, for example, placing at least first and second joining areas in proximity to one another in a cavity, forming a plasma in the cavity by subjecting a gas to electromagnetic radiation in the presence of a plasma catalyst, and sustaining the plasma at least until the first and second joining areas are joined. Plasma catalysts, and methods and apparatus for igniting, modulating, and sustaining a joining plasma, are provided. Additional cavity shapes, and methods and apparatus for selective plasma-joining, are also provided.