Methods Patents (Class 219/121.59)
  • Patent number: 6815633
    Abstract: Apparatus for dissociating gases includes a plasma chamber comprising a gas. A first transformer having a first magnetic core surrounds a first portion of the plasma chamber and has a first primary winding. A second transformer having a second magnetic core surrounds a second portion of the plasma chamber and has a second primary winding. A first solid state AC switching power supply including one or more switching semiconductor devices is coupled to a first voltage supply and has a first output that is coupled to the first primary winding. A second solid state AC switching power supply including one or more switching semiconductor devices is coupled to a second voltage supply and has a second output that is coupled to the second primary winding. The first solid state AC switching power supply drives a first AC current in the first primary winding. The second solid state AC switching power supply drives a second AC current in the second primary winding.
    Type: Grant
    Filed: March 12, 2001
    Date of Patent: November 9, 2004
    Assignee: Applied Science & Technology, Inc.
    Inventors: Xing Chen, William M. Holber, Andrew Barnett Cowe, Eric Georgelis, Ilya M. Bystyak, Andrzej Bortkiewicz
  • Patent number: 6806439
    Abstract: The invention is directed to an apparatus made of atmospheric-pressure microwave plasma torches for elimination of toxic airborne chemical and biological warfare agents. The apparatus can purify the interior air of large volume in an isolated space such as buildings, public transportation systems, and military vehicles contaminated with chemical and biological warfare agents. The apparatus consists of several microwave plasma torches connected in series for elimination and burnout of toxic airborne warfare agents. Microwave radiation generates an atmospheric plasma torch in certain conditions. Oxidation mechanism in the torch flames eliminates the chemical and biological warfare agents.
    Type: Grant
    Filed: January 13, 2003
    Date of Patent: October 19, 2004
    Inventors: Han Sup Uhm, Yong C. Hong
  • Publication number: 20040200811
    Abstract: A method for the removing NO and N2O from a gas stream is provided. The method comprises providing flue gases having NO and/or N2O, introducing the flue gas stream into a pulsed corona reactor, and reacting the raw feed gases within the pulsed corona reactor with the following reactions: e+H2O→H+OH,N2O+H→N2+OH, and N2O+OH→N2+HO2. An apparatus for removing NO and N2O is also provided.
    Type: Application
    Filed: May 21, 2004
    Publication date: October 14, 2004
    Inventors: Temi M Linjewile, Paolo DeFilippis, Pradeep K Agarwal, Rehke Agarwal
  • Patent number: 6800830
    Abstract: A method of fabricating a semiconductor device includes providing a semiconductor substrate, forming an oxide layer in the substrate, and adding nitrogen atoms on top of the exposed surface of the oxide film to form a diffusion barrier.
    Type: Grant
    Filed: August 16, 2001
    Date of Patent: October 5, 2004
    Assignee: Hitachi Kokusai Electric, Inc.
    Inventor: Imad Mahawili
  • Patent number: 6787730
    Abstract: A device to place an incision into matter with a harmonious plasma cloud. A radiofrequency generator system produces pulsed or continuous electromagnetic waveform which is transmitted by an active transmitter incising electrode tip. This generated electromagnetic wave is utilized to initiate a plasma cloud with processes such as thermal ionization and a photoelectric effect which then trigger an Avalanche Effect for charged atomic particles at the surface of the active transmitter incising electrode tip. This electromagnetic wave is impedance matched, frequency matched, power matched and tuned to the plasma cloud in order to sustain and control a harmonious plasma cloud with reduced atomic particle turbulence and chaos. This harmonious plasma cloud forms a coating over the surface of the active transmitter electrode tip as well as acts to reduce the energy needed from the power amplifier of our plasma cutting device.
    Type: Grant
    Filed: October 31, 2001
    Date of Patent: September 7, 2004
    Inventors: Damian Coccio, Richard J. Fugo
  • Patent number: 6787731
    Abstract: The invention relates to apparatus for oxygen cutting pieces of steel. The cutter and trimmer members (5, 10) are positioned in such a manner that the cutting jet (6) is applied to the top face (1.1) of the piece (1) in a substantially vertical direction, while the trimming jet (12) is applied to the bottom face (1.2) of said piece in an oblique direction that remains pointed towards the outlet point (14) of the cutting jet (6), simultaneous cutting and trimming being performed by moving the cutter and trimmer members (5, 10) horizontally in synchronous manner. A sprayer member (11) is also provided for spraying fluid during the cutting process towards molten particles in order to reduce fume emissions.
    Type: Grant
    Filed: April 18, 2002
    Date of Patent: September 7, 2004
    Inventors: Guy Prioretti, Véronique Prioretti, Françoise Prioretti-Hacking, Jean-Michel Prioretti
  • Patent number: 6781086
    Abstract: A method of removing photoresist from a wafer or other substrate consists of ashing the photoresist only once the wafer is spaced a predetermined distance above a wafer stage in a process chamber, so that the photoresist is removed at once from all of the surfaces of the wafer. The wafer is heated to a temperature of 210° C. to 230° C. after it is positioned on the upper surface of the wafer stage. The heated wafer is then raised a distance of 9 mm to 11 mm above the upper surface of the wafer stage. At this time, process gas is introduced into the process chamber, and the process gas is converted into plasma. Thus, the plasma efficiently removes the photoresist all at once from the surfaces of the wafer.
    Type: Grant
    Filed: July 24, 2003
    Date of Patent: August 24, 2004
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Doo-Whan Choi
  • Patent number: 6777639
    Abstract: A system and method for synthesizing nanopowder which provides for precursor material ablation from two opposing electrodes that are substantially axially aligned and spaced apart within a gaseous atmosphere, where a plasma is created by a high power pulsed electrical discharge between the electrodes, such pulse being of short duration to inertially confine the plasma, thereby creating a high temperature and high density plasma having high quench and/or reaction rates with the gaseous atmosphere for improved nanopowder synthesis.
    Type: Grant
    Filed: June 5, 2003
    Date of Patent: August 17, 2004
    Assignee: Nanotechnologies, Inc.
    Inventors: Kurt A. Schroder, Doug K. Jackson
  • Patent number: 6774336
    Abstract: A tip gas distributor is provided that preferably comprises a plurality of swirl holes and a plurality of secondary gas holes, wherein the swirl holes direct a plasma gas to generate a plasma stream, and the secondary gas holes direct a secondary gas to stabilize the plasma stream. Additionally, a tip gas distributor is provided that comprises swirl passages and secondary gas passages formed between the tip gas distributor and an adjacent component to generate and stabilize the plasma stream. Further, methods of generating and stabilizing the plasma stream are provided through the use of the swirl holes and passages, along with the secondary gas holes and passages.
    Type: Grant
    Filed: February 26, 2002
    Date of Patent: August 10, 2004
    Assignee: Thermal Dynamics Corporation
    Inventors: Kevin D. Horner-Richardson, Joseph P. Jones, Roger W. Hewett, Shiyu Chen
  • Publication number: 20040149700
    Abstract: The invention relates to a plasma welding process by means of a free microwave-induced plasma jet, which is generated by means of the following process steps:
    Type: Application
    Filed: February 13, 2004
    Publication date: August 5, 2004
    Inventors: Erwin Bayer, Philip Betz, Joerg Hoeschele, Friedrich Oeffinger, Juergen Steinwandel
  • Publication number: 20040134890
    Abstract: The invention is directed to an apparatus made of atmospheric-pressure microwave plasma torches for elimination of toxic airborne chemical and biological warfare agents. The apparatus can purify the interior air of large volume in an isolated space such as buildings, public transportation systems, and military vehicles contaminated with chemical and biological warfare agents. The apparatus consists of several microwave plasma torches connected in series for elimination and burnout of toxic airborne warfare agents. Microwave radiation generates an atmospheric plasma torch in certain conditions. Oxidation mechanism in the torch flames eliminates the chemical and biological warfare agents.
    Type: Application
    Filed: January 13, 2003
    Publication date: July 15, 2004
    Inventors: Han Sup Uhm, Yong C. Hong
  • Publication number: 20040118816
    Abstract: Methods and apparatus are provided for igniting, modulating, and sustaining a plasma for various plasma processes and treatments. In one embodiment, a plasma is ignited by subjecting a gas in a multi-mode processing cavity to electromagnetic radiation having a frequency between about 1 MHz and about 333 GHz in the presence of a plasma catalyst, which may be passive or active. A passive plasma catalyst may include, for example, any object capable of inducing a plasma by deforming a local electric field. An active plasma catalyst can include any particle or high energy wave packet capable of transferring a sufficient amount of energy to a gaseous atom or molecule to remove at least one electron from the gaseous atom or molecule, in the presence of electromagnetic radiation.
    Type: Application
    Filed: May 7, 2003
    Publication date: June 24, 2004
    Inventors: Satyendra Kumar, Devendra Kumar
  • Patent number: 6753499
    Abstract: An anomalous arc discharge detection apparatus, including multiplicity of ultrasonic detectors placed at different sections of a plasma processing chamber such that an ultrasonic wave accompanying an anomalous discharge is detected by the ultrasonic detectors at different propagation times or with different delay times. The detected signals are compared with each other on the same time axis to obtain the maximum range of variation of the detected waveforms and the differences in delay time of the respective ultrasonic detectors. From the comparison of the maximum range of variation and the delay times of the ultrasonic detectors, the position of the source point, and the level as well, of the anomalous arc discharge are determined, which can be displayed on a monitor and utilized to issue an alarm if necessary.
    Type: Grant
    Filed: November 28, 2001
    Date of Patent: June 22, 2004
    Assignees: Japan Science and Technology Corporation, Kumamoto Technopolice Foundation
    Inventors: Mitsuo Yasaka, Masayoshi Takeshita
  • Patent number: 6740843
    Abstract: An apparatus and method are disclosed whereby if the arc in a DC or long-pulse AC vacuum arc plasma process (eg in vacuum deposition) starts to extinguish, this is automatically detected and a re-ignition process is activated. Detection of a tendency for the arc to extinguish is detected by monitoring the main power supply voltage, which will increase if the arc is extinguished.
    Type: Grant
    Filed: September 12, 2002
    Date of Patent: May 25, 2004
    Assignee: City University of Hong Kong
    Inventors: Paul K. Chu, Liuhe Li
  • Patent number: 6740844
    Abstract: A tool-holder head for machines using radiant energy beams, that is suitable in particular for plasma beam cutting machines, includes a vertical sliding saddle to which at least an energy beam source is constrained through an articulated support that secures the position of normal use of the source and allows the source to move according to the vertical axis or to translate according to the working position when transversal or axial forces are applied to the source's terminal part. The tool-holder bead is also equipped with a sensing system of the above-said movings and translations so to be able to operate on the control of the machine with the more suitable proceedings according to the operating condition consequent to the senses.
    Type: Grant
    Filed: February 14, 2001
    Date of Patent: May 25, 2004
    Assignee: CR Electronic S.R.L.
    Inventor: Marcello Rossi
  • Patent number: 6734386
    Abstract: A microporous PVDF membrane is rendered hydrophilic without making it brittle or lowering its heat resistance by exposing the membrane to a plasma under controlled conditions. Specifically, a microporous PVDF membrane is first coated with an appropriate monomer. After the monomer dries, the membrane is exposed to the plasma. Any remaining uncured monomer on the membrane is removed. Thereafter, the membrane is pleated and incorporated in a filter cartridge.
    Type: Grant
    Filed: February 5, 2002
    Date of Patent: May 11, 2004
    Assignee: Meissner Filtration Products, Inc.
    Inventors: Siegfried Lauterbach, Christopher A. Meissner
  • Patent number: 6723946
    Abstract: An electrolytic reactor system for producing non-joule heat has a plurality of small cells arranged in an interconnected array, wherein each cell is characterized by having a relatively small cathode separated from a relatively large anode by a small gap, with the cells immersed in an electrolytic bath.
    Type: Grant
    Filed: June 20, 2000
    Date of Patent: April 20, 2004
    Inventors: Rod F. Gimpel, Dennis J. Cravens, John S. Frick, Vince F. Golubic, Dennis G. Letts
  • Patent number: 6713711
    Abstract: A quick disconnect for use in a plasma arc torch is provided that comprises a plug housing and a mating socket housing, a locking ring disposed around the plug housing secures the plug housing to the socket housing. A negative lead gas carrying pin is disposed within the plug housing, and a mating main power socket is disposed within the socket housing for the purpose of conducting both gas and electricity from a power supply to a plasma arc torch. Further, the negative lead gas carrying pin and mating main power socket are positioned off-center in order to provide additional volume for a plurality of signal conductors disposed within each housing, along with a pilot return conductor. Additionally, both the plug housing and the socket housing define a D-configuration in order to properly align the housings and conductors disposed therein, among other novel features of the present invention.
    Type: Grant
    Filed: November 9, 2001
    Date of Patent: March 30, 2004
    Assignee: Thermal Dynamics Corporation
    Inventors: Christopher J. Conway, Fred Rogers, Darrin H. MacKenzie, Douglass A. Demers, Stewart Trent Adams, Joseph P. Jones
  • Patent number: 6706992
    Abstract: A welding apparatus spot welds two or more overlapping sheets having a coating, such as zinc coated steel or aluminum alloy with an oxide coating. A hole is formed in the upper sheet at the desired point of spot welding. A clamping cup of a plasma arc passes surrounds the hole and contacts the upper surface of the upper sheet. The torch heats the sheet, allowing entrapped vapors in the coating on the lower sheet to vent freely. Filler wire is added to fill the hole and to secure the overlapping sheets together. If the overlapping sheets are zinc coated steel, preferably the filler wire is copper based.
    Type: Grant
    Filed: July 12, 2002
    Date of Patent: March 16, 2004
    Assignee: International Aluminum Holdings Limited
    Inventor: Russell Vernon Hughes
  • Patent number: 6703581
    Abstract: A contact start plasma torch and method of starting the torch includes a negatively charged cathode body and a positively charged anode body. A conductive element in the torch is constructed of an electrically conductive material and is free from fixed connection with the cathode body and the anode body. The torch is operable between an idle mode wherein the conductive element provides an electrically conductive path between the cathode body and the anode body and an pilot mode wherein a pilot arc is formed between the conductive element and at least one of the cathode body and the anode body. The pilot arc is blown by working gas flowing through the torch toward an exit orifice of the torch whereby the working gas is exhausted from the torch in the form of an ionized plasma.
    Type: Grant
    Filed: February 27, 2001
    Date of Patent: March 9, 2004
    Assignee: Thermal Dynamics Corporation
    Inventors: Joseph P. Jones, Roger W. Hewett, Kevin D. Horner-Richardson, David A. Small
  • Patent number: 6700091
    Abstract: A trigger system for operating a plasma arc torch is provided that comprises a selector that operates between at least a first operating position and a second operating position, wherein the first operating position operates the plasma arc torch in a first mode to deliver gas to the plasma arc torch, and the second operating position operates the plasma arc torch in a second mode to deliver the gas and electric power to the plasma arc torch. Further, the selector comprises a neutral position that selects a neutral mode in which delivery of gas and electric power to the plasma arc torch is inhibited. The selector is preferably disposed within a housing of the plasma arc torch and is slidably operable between the first operating position, the second operating position, and the neutral position.
    Type: Grant
    Filed: February 26, 2002
    Date of Patent: March 2, 2004
    Assignee: Thermal Dynamics Corporation
    Inventors: Joseph P. Jones, Kevin D. Horner-Richardson, Kevin J. Kinnerson
  • Patent number: 6696661
    Abstract: A method and apparatus for sealing a package over/around a circuit is presented. A pressurized directional flow of plasma is applied between metal bonding edges of the package and a metal surface surrounding circuitry to be enclosed in the package. During the application of plasma between the bonding surfaces, a bonding devices direct contact fusion/diffusion bonds the metal bonding edges of the package to the metal bonding surface surrounding the circuitry to be enclosed.
    Type: Grant
    Filed: November 19, 2001
    Date of Patent: February 24, 2004
    Assignee: GeoMat Insights, LLC
    Inventor: Ronald J. Barnett
  • Patent number: 6693253
    Abstract: An induction plasma torch comprises a tubular torch body, a gas distributor head located at the proximal end of the torch body for supplying at least one gaseous substance into the chamber within the torch body, a higher frequency power supply connected to a first induction coil mounted coaxial to the tubular torch body, a lower frequency solid state power supply connected to a plurality of second induction coils mounted coaxial to the tubular torch body between the first induction coil and the distal end of this torch body. The first induction coil provides the inductive energy necessary to ignite the gaseous substance to form a plasma. The second induction coils provide the working energy necessary to operate the plasma torch. The second induction coils can be connected to the solid state power supply in series and/or in parallel to match the impedance of this solid state power supply.
    Type: Grant
    Filed: October 8, 2002
    Date of Patent: February 17, 2004
    Assignee: Universite de Sherbrooke
    Inventors: Maher Boulos, Jerzy Jurewicz
  • Patent number: 6686556
    Abstract: A solid-waste conversion plant produces useful products and electrical energy in a closed system with zero emission of pollutants into the atmosphere. The plant is characterized by catalytic ionic-impact chambers having a pair of electrodes that establish an electric arc. The electric arc breaks down solid waste molecules into a plasma of atomic constituents which exothermically recombine into simple molecules upon leaving the plasma. A primary chamber converts carbon-based waste into solidifiable metal, sulfur and glassy slag extractable from the bottom of the chamber, and into gas containing CO, H2, and CH4. A second chamber contains high carbon waste input that is converted by the arc into incandescent coke, which converts CO2 and H2O in the gas from the first chamber into more CO, H2 and CH4, thereby forming a fuel gas. The fuel gas is combusted in gas turbine generators to produce electricity for operating the electric arcs, plus a sellable surplus.
    Type: Grant
    Filed: April 4, 2002
    Date of Patent: February 3, 2004
    Inventor: C. Kenneth Mitchell
  • Patent number: 6686557
    Abstract: The present invention provides a nonflammable ternary gas mixture to be used in a plasma machining operation. The ternary gas mixture of the present invention comprises from about 4% to about 6.2% hydrogen, 30% to 50% argon, and the balance nitrogen. In another embodiment of the present invention, a method of generating a high pressure plasma is provided. The method of this embodiment comprises introducing the ternary gas mixture of the present invention into a plasma torch apparatus, initiating a plasma in the plasma torch apparatus, and sustaining the plasma with a high voltage between a cathode and an anode.
    Type: Grant
    Filed: December 19, 2002
    Date of Patent: February 3, 2004
    Assignee: Ford Motor Company
    Inventors: John Edward Chancey, Lawrence Edward Ellis, Larry G Gargol, Srikanth C. Reddy
  • Patent number: 6686559
    Abstract: An electrode for supporting an arc in a plasma arc torch. The electrode includes a metallic holder having a front end and a rear end. An emissive insert cavity is formed in the front end. An emissive insert is mounted in the cavity and is a metallic material having a relatively low work function. The front end is a casting made of a metal which is selected from silver, gold, platinum, rhodium, indium, palladium, nickel and alloys thereof. The rear end is a metal selected from copper and copper alloys. A cylindrical post extends inwardly from the front end of the metallic holder. The cylindrical post has an inner-rear tip portion which is a metal selected from copper and copper alloys.
    Type: Grant
    Filed: April 2, 2002
    Date of Patent: February 3, 2004
    Assignee: The American Torch Tip Company
    Inventor: Jeffrey K. Walters
  • Patent number: 6686558
    Abstract: An inductive plasma torch operating at atmospheric pressure is used for wafer or glass substrate processing. Said torch employs a linear type of plasma confinement. This linear torch is particularly suitable for photoresist etching and processes in which it has the advantages of high chemical isotropic etch rate and low plasma damage.
    Type: Grant
    Filed: January 23, 2001
    Date of Patent: February 3, 2004
    Assignee: TimeDomain CVD, Inc.
    Inventor: Simon I. Selitser
  • Patent number: 6670572
    Abstract: A solenoid control and safety circuit suitable for use in connection with contact start, plasma-arc torches. The system monitors a voltage to determine when to open an air control solenoid as part of a contact starting process. If a proper voltage is sensed, a gas solenoid is opened to allow airflow to separate the contact starting elements. The system also includes a circuit that monitors a gas pressure switch to determine whether sufficient pressure exists to separate the contact start elements after a contact start process has been initiated. The circuit removes power if it senses insufficient pressure. Also disclosed is a circuit that monitors a differential voltage between the electrode and the tip to determine if the elements remain in contact after airflow has been provided to the torch head.
    Type: Grant
    Filed: March 4, 2002
    Date of Patent: December 30, 2003
    Assignee: Thermal Dynamics Corporation
    Inventors: Stephen W. Norris, David A. Tatham, Roger W. Hewett
  • Publication number: 20030230554
    Abstract: A system and method for synthesizing nanopowder which provides for precursor material ablation from two opposing electrodes that are substantially axially aligned and spaced apart within a gaseous atmosphere, where a plasma is created by a high power pulsed electrical discharge between the electrodes, such pulse being of short duration to inertially confine the plasma, thereby creating a high temperature and high density plasma having high quench and/or reaction rates with the gaseous atmosphere for improved nanopowder synthesis.
    Type: Application
    Filed: June 5, 2003
    Publication date: December 18, 2003
    Applicant: Nanotechnologies, Inc.
    Inventors: Kurt A. Schroder, Doug K. Jackson
  • Patent number: 6664497
    Abstract: An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.
    Type: Grant
    Filed: May 10, 2002
    Date of Patent: December 16, 2003
    Assignee: Applied Science and Technology, Inc.
    Inventors: Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
  • Patent number: 6657153
    Abstract: An electrode for a plasma arc torch and method of fabricating the same are disclosed, and wherein the electrode comprises a copper holder defining a cavity in a forward end. An emissive element and separator assembly is positioned in the cavity, and no brazing materials are used to secure the components of the electrode. The emissive element, separator, and metallic holder are heated to accelerate diffusion bonding between the emissive element and separator, and between the separator and metallic holder. A crimping process is also disclosed for further strengthening the electrode and increasing the operational life span thereof.
    Type: Grant
    Filed: January 31, 2001
    Date of Patent: December 2, 2003
    Assignee: The ESAB Group, Inc.
    Inventors: Michael C. McBennett, Rue Allen Lynch, Tommie Zack Turner
  • Publication number: 20030209526
    Abstract: The present invention relates to novel heaters and methods of heating a vacuum chamber, such as a semiconductor wafer plasma processing chamber, using a ceramic igniter array consisting of a plurality of ceramic igniters positioned in a substrate.
    Type: Application
    Filed: May 7, 2002
    Publication date: November 13, 2003
    Applicant: Applied Materials, Inc.
    Inventors: Ananda H. Kumar, Tetsuya Ishikawa, Kwok Manus Wong, Farahmand E. Askarinam
  • Patent number: 6624380
    Abstract: A device and method for producing sodium (Na) from a feed material such as a mixture of methane (CH4) and sodium hydroxide (NaOH) includes a plasma torch configured to heat the feed material to a temperature sufficient to reduce and ionize sodium (Na). As such, a plasma jet is created by the plasma torch that contains ionized sodium (Na) and non-ionized neutrals such as hydrogen (H) and carbon monoxide (CO). From the plasma torch, the plasma jet is introduced into a chamber where a magnetic field has been established. Once inside the chamber the heated mixture of ions and neutrals interacts with the magnetic field in the chamber to cause the sodium ions to travel substantially along the magnetic field lines while the neutrals travel on paths that are essentially unaffected by the magnetic field. A collector is positioned to receive and accumulate sodium (Na).
    Type: Grant
    Filed: July 10, 2001
    Date of Patent: September 23, 2003
    Assignee: Archimedes Technology Group, Inc.
    Inventors: Stephen F. Agnew, Sergei Putvinski
  • Patent number: 6617538
    Abstract: An apparatus for chemical synthesis or chemical abatement is disclosed which includes a processing chamber and a secondary chamber which is in communication with the processing chamber. The processing chamber is configured to generate an arc in the processing chamber. A magnetic field generator, such as an energized coil or permanent magnet, generates a magnetic field in the processing chamber, which induces the arc generated in the processing chamber to rotate. The apparatus further includes at least one injection port for introducing at least one waste medium into the processing chamber and into the rotating arc whereby the rotating arc transforms the waste medium into a plasma resulting in a disassociation of the chemical constituents comprising the waste medium which thereafter flow into the secondary chamber.
    Type: Grant
    Filed: May 24, 2002
    Date of Patent: September 9, 2003
    Inventor: Imad Mahawili
  • Patent number: 6614001
    Abstract: An output structure for material processing apparatus facilitates field replacement of consumable components, while maintaining important alignments. Contoured surfaces within the output structure mate with corresponding contoured surfaces on the consumable components, thereby facilitating alignment of the consumable components with an axis of the output structure. Material processing apparatus employing such surfaces include lasers and plasma arc torches and, with proper alignment, apparatus performance is improved. Typical consumable components include electrodes, swirl rings, nozzles, and shields. The consumable components can be axially translatable with respect to each other, thereby promoting contact starting of a plasma arc torch. An installation tool for consumable components also serves to align the components with an axis of the output structure.
    Type: Grant
    Filed: May 21, 2002
    Date of Patent: September 2, 2003
    Assignee: Hypertherm, Inc.
    Inventors: Charles M. Hackett, Yutaka Nakano, Zhipeng Lu, Aaron D. Brandt, Brian J. Currier, Kenneth J. Woods
  • Patent number: 6600127
    Abstract: A process for synthesizing nanosized powders utilizes a hybrid exploding wire device containing a solid metal wire fuse in the bore of a tube that is open at each end. The ends of the fuse are connected to electrodes on the ends of the tube. The electrodes are designed to erode to maintain a heavy metal plasma. The bore may comprise a corresponding ceramic to be produced, and a microcrystalline powder of a corresponding ceramic may be retained within the bore. An electrical discharge vaporizes and ionizes the fuse. The tube confines the radial expansion of the plasma such that the plasma exits from both ends of the tube where it reacts with a suitable gas to form nanoscale particles. In addition, the plasma gas ablates and vaporizes a portion of the bore wall to contribute to the nanoceramic synthesis. Other alternatives include replacing the fuse with a thin conductive sheath or a consumable metal insert.
    Type: Grant
    Filed: September 13, 2000
    Date of Patent: July 29, 2003
    Assignee: Nanotechnologies, Inc.
    Inventors: Dennis Roger Peterson, Dennis Eugene Wilson, Darrin Lee Willauer
  • Patent number: 6590179
    Abstract: A plasma processing apparatus having a process chamber to process specimens, a status detecting means for detecting the internal processing status of said process chamber and outputting a plurality of signals, and signal converting means for extracting an arbitrary number of signal processing filters from a signal filter database using a signal filter selecting means and creating an arbitrary number of device status signals. The signal converting means creates fewer effective device status signals of a time series from said output signals.
    Type: Grant
    Filed: February 26, 2001
    Date of Patent: July 8, 2003
    Assignee: Hitachi, Ltd.
    Inventors: Junichi Tanaka, Hiroyuki Kitsunai, Ryoji Nishio, Seiichiro Kanno, Hideyuki Yamamoto
  • Patent number: 6580051
    Abstract: A process for synthesizing nanosized powders utilizes a hybrid exploding wire device containing a solid metal wire fuse in the bore of a tube that is open at each end. The ends of the fuse are connected to electrodes on the ends of the tube. The electrodes are designed to erode to maintain a heavy metal plasma. The bore may comprise a corresponding ceramic to be produced, and a microcrystalline powder of a corresponding ceramic may be retained within the bore. An electrical discharge vaporizes and ionizes the fuse. The tube confines the radial expansion of the plasma such that the plasma exits from both ends of the tube where it reacts with a suitable gas to form nanoscale particles. In addition, the plasma gas ablates and vaporizes a portion of the bore wall to contribute to the nanoceramic synthesis. Other alternatives include replacing the fuse with a thin conductive sheath or a consumable metal insert.
    Type: Grant
    Filed: December 18, 2001
    Date of Patent: June 17, 2003
    Assignee: Nanotechnologies, Inc.
    Inventors: Dennis Roger Peterson, Dennis Eugene Wilson, Darrin Lee Willauer
  • Patent number: 6576861
    Abstract: A system for fine feature spray deposition includes a substrate platform for supporting a substrate on which the features are to be deposited. A spray assembly is provided which includes a spray source for providing a stream of material to be deposited on a substrate, a collimator which is positioned in a path of the stream from said spray source and an aperture assembly, which is positioned downstream of the collimator with respect to the spray source and above the substrate platform. The aperture assembly defines at least one opening to pass a portion of the stream of material onto a surface of the substrate. A drive mechanism is provided which is coupled to at least one of the spray assembly and the substrate platform for inducing relative motion there between. A controller is coupled to the spray assembly and the drive mechanism to control the relative motion and the stream of material. The system allows fine features to be printed directly on a substrate with requiring a predefined mask.
    Type: Grant
    Filed: May 23, 2001
    Date of Patent: June 10, 2003
    Assignee: The Research Foundation of State University of New York
    Inventors: Sanjay Sampath, Herbert Herman, Robert Greenlaw
  • Publication number: 20030094443
    Abstract: A method and apparatus for sealing a package over/around a circuit is presented. A pressurized directional flow of plasma is applied between metal bonding edges of the package and a metal surface surrounding circuitry to be enclosed in the package. During the application of plasma between the bonding surfaces, a bonding devices direct contact fusion/diffusion bonds the metal bonding edges of the package to the metal bonding surface surrounding the circuitry to be enclosed.
    Type: Application
    Filed: November 19, 2001
    Publication date: May 22, 2003
    Inventor: Ronald J. Barnett
  • Patent number: 6566625
    Abstract: The invention provides a plasma welding or brazing process in which a direct current pilot arc is maintained throughout the process. The process comprises the steps of setting a pilot arc power supply (6) to a relatively high level, generating a high voltage spark discharge between a non-consumable electrode (14) of a plasma welding or brazing torch (2) and a nozzle (18) of said torch in order to start the flow of a pilot arc current, detecting the pilot arc current and reducing the pilot arc current to a relatively low level. The invention further provides apparatus for carrying out plasma arc welding, comprising a plasma welding torch, a controller and a power supply. The controller further comprises means for detecting the flow of a pilot arc current and or a main arc current and means for reducing this current on detection.
    Type: Grant
    Filed: July 16, 2001
    Date of Patent: May 20, 2003
    Assignee: ARC Kinetics Limited
    Inventor: Russell Vernon Hughes
  • Patent number: 6563075
    Abstract: A method of fabricating an electrode is disclosed, wherein the electrode comprises a copper holder defining a cavity in a forward end. An emissive element and separator assembly is positioned in the cavity. An intermetallic compound is formed between the emissive element and the separator by heating a relatively non-emissive material until it melts and dipping the emissive element therein before cooling the assembly. As a result, the intermetallic compound is formed significantly faster than by conventional methods.
    Type: Grant
    Filed: December 20, 2001
    Date of Patent: May 13, 2003
    Assignee: The ESAB Group, Inc.
    Inventors: Wayne Stanley Severance, Jr., Valerian Nemchinsky, Gregory William Diehl
  • Publication number: 20030079757
    Abstract: A cleaning method for CVD apparatus wherein by-products such as SiO2 and Si3N4 adhered to and deposited on surfaces of the inner wall, electrodes and other parts of a reaction chamber at the stage of film formation can be removed efficiently. Furthermore, the amount of cleaning gas discharged is so small that the influence on environment such as global warming is little and cost reduction can be also attained. After the film formation on a base material surface by the use of CVD apparatus, a fluorinated cleaning gas containing a fluorcompound is converted to plasma by means of a remote plasma generator, and the cleaning gas having been converted to plasma is introduced into a reaction chamber so that any by-products adhered to inner parts of the reaction chamber is removed.
    Type: Application
    Filed: November 22, 2002
    Publication date: May 1, 2003
    Inventors: Koji Shibata, Naoto Tsuji, Hitoshi Murata, Etsuo Wani, Yoshihide Kosano
  • Patent number: 6555778
    Abstract: A method and apparatus for bonding solid sheets together is presented. A modulated directional flow of plasma is applied at and between the bonding surfaces of the sheets to be bonded prior to and during the application of pressure to compress the bonding surfaces together to form a direct contact or diffusion bond.
    Type: Grant
    Filed: November 19, 2001
    Date of Patent: April 29, 2003
    Assignee: GeoMat Insights, LLC
    Inventor: Ronald J. Barnett
  • Patent number: 6552295
    Abstract: A method and apparatus for plasma waste disposal of hazardous waste material, where the hazardous material is volatilized under vacuum inside a containment chamber to produce a pre-processed gas as input to a plasma furnace including a plasma-forming region in which a plasma-forming magnetic field is produced. The pre-processed gas is passed at low pressure and without circumvention through the plasma-forming region and is directly energized to an inductively coupled plasma state such that hazardous waste reactants included in the pre-processed gas are completely dissociated in transit through the plasma-forming region. Preferably, the plasma-forming region is shaped as a vacuum annulus and is dimensioned such that there is no bypass by which hazardous waste reactants in the pre-processed gas can circumvent the plasma-forming region. The plasma furnace is powered by a high frequency power supply outputting power at a fundamental frequency.
    Type: Grant
    Filed: December 20, 2000
    Date of Patent: April 22, 2003
    Assignee: Research Triangle Institute
    Inventors: Robert J. Markunas, John B. Posthill, Robert C. Hendry, Raymond Thomas
  • Patent number: 6547978
    Abstract: Copper can be pattern etched in a manner which provides the desired feature dimension and integrity, at acceptable rates, and with selectivity over adjacent materials. To provide for feature integrity, the portion of the copper feature surface which has been etched to the desired dimensions and shape must be protected during the etching of adjacent feature surfaces. This is particularly important for feature sizes less than about 0.5 &mgr;m, where presence of even a limited amount of a corrosive agent can eat away a large portion of the feature.
    Type: Grant
    Filed: December 13, 2001
    Date of Patent: April 15, 2003
    Assignee: Applied Materials Inc.
    Inventors: Yan Ye, Allen Zhao, Xiancan Deng, Diana Xiaobing Ma, Chang-Lin Hsieh
  • Patent number: 6534739
    Abstract: The invention involves a process for the oxygen cutting of slabs—using one or more oxygen cutting torches—and a device for implementing the process. The process includes the steps of hanging the slab (16) using one or more electromagnets (14) separated from the slab (16) by a non-magnetic device or medium (such as air); causing a relative motion between the cutting torches (18) and the slab (16); using a carrying device (15) acting on the slab on the same side of the slab (16) as the electromagnet (14); and activating the cutting torch (18) in order to cut the slab (16) when it is transported past the cutting torch (18).
    Type: Grant
    Filed: August 3, 2001
    Date of Patent: March 18, 2003
    Assignee: Eon Holding S.A.
    Inventors: Valérie Donze, Pascal Donze, Bertrand Donze, Thierry Rozot
  • Patent number: 6528753
    Abstract: An electrode for a plasma arc torch and method of fabricating the same are disclosed, wherein the electrode comprises a metallic holder defining a cavity in a forward end. An emissive element and separator assembly is positioned in the cavity. The emissive element has a layer of relatively non-emissive material on the outer surface thereof, which is preferably applied by heating the emissive element to a high temperature such that the emissive element becomes reactive, and spraying the relatively non-emissive material on the emissive element. The coated emissive element is positioned in the separator and the assembly is heated such that the relatively non-emissive material forms a strong bond between with the separator. The superior bonds between the emissive element and separator formed according to the present invention extend the life span of the electrode.
    Type: Grant
    Filed: May 31, 2001
    Date of Patent: March 4, 2003
    Assignee: The ESAB Group, Inc.
    Inventor: Michael C. McBennett
  • Patent number: 6525293
    Abstract: A method for closing and/or joining a connecting joint or joining seam between two pieces of galvanized sheet metal, in which zinc or a zinc alloy whose melting point is similar to that of zinc is heated to melting temperature and is continuously introduced into the connecting joint, with the heating being performed by a plasma jet without reaching the melting temperature of the steel sheet. The use of a plasma jet allows processing zinc or, a zinc alloy without producing any disturbing zinc spatter. The zinc can be supplied as a wire, powder or granulate, whereby it is introduced under an inert-gas bell. This method can also be employed for post-galvanizing weld seams, with a second plasma jet welding set following a first one, it being mechanically coupled with the same and performing the galvanizing of the weld seam by the supply of zinc in wire form without melting the steel sheet anew. Tin foils are used in a special embodiment which are applied in the joining zone of a flanged edge.
    Type: Grant
    Filed: September 5, 2001
    Date of Patent: February 25, 2003
    Assignee: Inocon Technologie Ges.m.b.H.
    Inventor: Gerhard Schwankhart
  • Patent number: 6521859
    Abstract: A system and method for preserving stored foods. The system and method utilizes an apparatus for generating ozone and other atoms and molecules resulting from the bombardment of a feed gas with electrons having, preferably, a first electrode positioned within a channel in a second electrode. The first electrode is a substantially sealed tube made of dielectric material, having at least one electron gun positioned proximate an end for firing electrons into the first electrode. In electrical communication with the electron gun is a rod, maintained in a tube also made of dielectric material, which acts to maintain a constant energy level through the length of the rod and thus the length of the electrode. Within the first electrode is an inert gas which, upon the firing of the electron gun, is formed into a plasma.
    Type: Grant
    Filed: December 12, 2000
    Date of Patent: February 18, 2003
    Assignee: Nytrox 1, Inc.
    Inventor: Lonald H. Jensen