Abstract: A high-voltage pulse generation device configured to apply a pulsed high voltage to the space between a pair of discharge electrodes disposed in a laser chamber of a gas laser apparatus includes n transformer cores that form a transformer, where n is a natural number greater than or equal to two, n primary electric circuits of the transformer, the n primary electric circuits each having a first terminal connected to a reference potential and a second terminal connected to a charger, the n primary electric circuits each including one or more primary coils, one or more diodes connected in parallel to the one or more primary coils, and one or more pulse generators connected in parallel to the one or more primary coils, and a secondary electric circuit of the transformer, the secondary electric circuit including a secondary coil and connected to the pair of discharge electrodes.

Abstract: A window manufacturing method includes providing a mother substrate on a moving stage, the mother substrate including a cutting line; irradiating substantially simultaneously a first beam and a second beam to the mother substrate to cut the mother substrate and to form a target substrate; separating the target substrate from the mother substrate; and providing an etchant to the target substrate to chamfer the target substrate. The first beam is irradiated to the cutting line of the mother substrate, the second beam is irradiated to a point spaced apart from the cutting line of the mother substrate by a distance, and a pulse energy of the first beam is different from a pulse energy of the second beam.

Abstract: A laser processing apparatus includes: a laser oscillator configured to oscillate a laser pulse; a first laser deflection unit configured to deflect the laser pulse emitted from the laser oscillator in a two-dimensional direction; a second laser deflection unit having a slower operation speed and configured to deflect the laser pulse emitted from the first laser deflection unit in a two-dimensional direction on a same plane; a laser oscillation control unit configured to control the laser oscillator; and first and second laser deflection control units respectively configured to control operations of the first and second laser deflection units. The first laser deflection control unit controls the first laser deflection unit to successively irradiate the laser pulse to multiple sites along a predetermined track in each of the processing positions in turn, and to change energy of the laser pulse emitted therefrom in a middle of repeated irradiation.

Abstract: A detector for determining a position of at least one object, the detector including: at least one projector for illuminating the object with at least one illumination pattern; at least one sensor element having a matrix of optical sensors; and at least one evaluation device configured for determining initial distance information of reflection features by analysis of their respective beam profiles, where the evaluation device is configured for performing a calibration method.

Abstract: The inventive concept provides a method for treating a substrate. The method includes removing a film on the substrate by applying a pulsed laser to the rotating substrate, in which thickness of the film to be removed is measured and pulse energy of the pulsed laser is selected based on the measured thickness of the film.

Abstract: A beam irradiation unit (a collimator unit, a processing head, and a nozzle) includes a plurality of optical components, and is configured to convert a laser beam, which is divergent light, to collimated light and then to condense the light to irradiate a sheet metal. A photodetection element (a photodiode) detects intensity of reflected light reflected by an inspected optical component that is one of the plurality of optical components. A control device (an NC device) controls irradiation of a pierced hole with the laser beam as inspection light, subsequently to piercing the portion of the sheet metal to be cut to manufacture a product, and compares, with a threshold, the intensity of the reflected light detected by the photodetection element during the irradiation with the inspection light, to detect whether the inspected optical component is deteriorated, or a degree of the deterioration.

Abstract: An adjustment of the amount of energy in at least one specific applying unit is executed when energy is applied to a cylindrical member pair in which another cylindrical member is inserted inside a cylindrical member to melt and weld the cylindrical member pair in a circumferential direction. The adjustment is executed in association with a rotation angle to satisfy a relationship of Pd+Pw>?, wherein Pd is an output decease rotation angle that decreases the energy amount from a steady energy amount HP applied from the specific applying unit in a welding end process, Pw is an overlap rotation angle at which the irradiation parts around the cylindrical member pair overlap with the steady energy amount HP, and ? is a separation angle between the specific applying unit and another applying unit adjacent to each other in a rotation direction around the axis.

Abstract: In various embodiments, laser delivery systems feature variable polarizers and beam shapers for altering the polarization and/or shape of the output beam for processing of various materials. The polarization and/or shape of the beam may be varied based on one or more characteristics of the workpiece.

Abstract: Systems and methods for laser beam welding in a vacuum and for controlling laser beam welding processes, such as for use in manufacturing aerospace parts, are described herein. In some embodiments, a laser beam welding system can include an optical head movably positioned within a vacuum chamber. The optical head can be configured to direct a laser beam toward a part positioned within the vacuum chamber to melt and fuse the part.

Abstract: An annular hollow offset-focus laser cladding device, including a housing, a conical reflector arranged in the housing, an annular off-axis parabolic focusing mirror opposite to and arranged coaxially with the conical reflector, a nozzle installed below the conical reflector and a powder-spraying tube connected to a lower end of the nozzle. A top of the housing is provided with a light entrance; the conical reflector faces the light entrance; The powder-spraying tube is coaxial with the annular hollow offset-focusing light reflected by the annular off-axis parabolic focusing mirror; a collimating protective gas jacket is arranged on a periphery of the powder-spraying tube, and the collimating protective gas jacket is located between the annular hollow offset-focused light and the powder-spraying tube; the annular off-axis parabolic focusing mirror is configured to create a horizontally offset of parent parabola focus.

Abstract: A system to be used inside a dialysis unit for dilating obstructed blood vessel, comprises a catheter, a device, a remote-control box, supportive components and connection cables. A catheter comprises an elongated portion, a proximal end and a distal end, extended longitudinally. A distal end of a catheter has a convectively heating tip with a heat generating element and an inflatable balloon. A device has a radiofrequency current generator to supply and control a heating process of a heat generating element of a catheter tip. A remote-control box comprises a valve assembly, a heat activation switch and a balloon inflation switch to facilitate a treatment process.

Abstract: Disclosed is a method for an all-laser hybrid additive manufacturing. After a matrix is obtained by means of selective laser melting forming, a subtractive forming is carried out on the matrix by means of a pulse laser to form a cavity, and the cavity is then packaged to obtain a forming material with an internal cavity structure. A laser precision packaging method is used in the method based on the melting of the laser selective region. Also disclosed is the apparatus, comprising a laser unit (2), a control unit (4) and a forming unit (6). The laser unit is in light path connection with the forming unit, and the control unit is electrically connected with the laser unit and the forming unit respectively. The laser unit comprises a first laser light source to and a second laser light source. The forming unit comprises a welding unit (68), and the welding unit is controlled by the control unit and is matched with the laser unit for the additive manufacturing.

Abstract: A display apparatus includes a display panel having a front area and a side area, a main body supporting the display panel, an auxiliary member arranged inside the main body, and a semi-transmissive mirror arranged between the auxiliary member and the front area, wherein the side area of the display panel may be arranged inside the main body to face the semi-transmissive mirror. Since an image partially emitted from the display panel may be reflected toward the front area, auxiliary members such as a camera, an illumination sensor, and a proximity sensor may be arranged inside the main body (or below a display) to embody a full screen display, whereby a user's satisfaction may be enhanced and a manufacturing process may be simplified.

Abstract: A method according to one aspect of the present disclosure is a laser marking method for a powder compact containing metal powder, which includes: a first step of scanning with laser light of first power which is weaker over a predetermined area in a surface of the powder compact, to melt and smooth inside of the predetermined area; and a second step of scanning with laser light of second power which is greater, to form a dot formed of a recess of a predetermined depth at a predetermined location in the predetermined area.

Abstract: A double fibre laser cutting system for laser cutting sheet metal that comprises: a cutting machine with a mobile gantry and fixed metal sheets, multiple heads both for straight cutting and bevel cutting, multiple cutting sources in each head, automated means for changing the cutting source in each head, means for controlling all the elements, wherein the multiple cutting sources in each head is carried out by means of two fibres sent from corresponding generator outlets to each head. The simultaneous cutting of one or more metal sheets with different thicknesses is achieved and, consequently, maximum laser cutting capacity in useful length, and in useful width, the use of a single generator, and the automatic adjustment of cutting conditions in accordance with the thicknesses, straight and bevel cutting simultaneously in multiple heads.

Abstract: Methods and systems for measuring the asymmetrical image quality or image features of an intraocular lens (IOL), design, refractive and diffractive designs, such as IOLs with Extended tolerance of astigmatic effects are provided by through-focus and meridian response. Measurements are taken at various focal plane and meridian positions to allow for determination of areas of better performance away from 0 meridian or the start position and meridian.

Abstract: A method and laser surgical devices for surgical incising and ablating living tissues using laser beam and effecting enhanced surgical haemostasis concurrently with incising and ablating are disclosed. The method requires a surgical laser beam that is pulsed and is highly absorbed in living tissues and enhanced haemostatic action is achieved using along with the surgical laser beam energy, delivered in pulses, another separately controlled energy effecting haemostasis, by applying the second energy in any and every given spot of incising and ablating in a preemptive and focused manner, which minimizes haemostasis-related damage to surrounding tissues. In one embodiment a heated gas jet from a hollow core optical fiber transmitting the surgical laser beam is used. In other embodiments an ancillary laser radiation at a wavelength chosen specifically to minimize haemostasis-related damage to tissue is utilized for preemptive and controlled haemostatic effect.

Abstract: A laser-based manufacturing system is disclosed for fabricating non-planar three-dimensional layers. The system may have a laser for producing a laser beam with a plurality of optical wavelengths. An optically dispersive element may be used for receiving the laser beam and splitting the beam into a plurality of distinct beam components, wherein each beam component has spatially separated optical spectral components. A phase mask may be used which is configured to receive at least one of the beam components emerging from the dispersive element and to create a modified beam. One or more focusing elements may then be used to receive the modified beam emerging from the phase mask and to focus the modified beam into a non-planar light sheet for use in fabricating a part.

Abstract: Various embodiments of the present invention relate to a method of using of a focus lens in additive manufacturing for forming a three-dimensional article through successive fusion, with a high energy beam, of parts of at least one layer of a powder bed provided on a work table, which parts correspond to successive cross sections of the three dimensional article, said method comprising the step of: using said focus lens for varying a spot size of said high energy beam on said powder bed as a function of an already fused thickness of said three-dimensional article below said powder which is to be fused. The invention is also related to a method for forming a three dimensional article.

Abstract: A method is described for measuring a moving property of a target. The method includes: forming a remaining plasma that at least partially coincides with an extended target region, the remaining plasma being a plasma formed from an interaction between a prior target and a prior radiation pulse in a target space; releasing a current target along a trajectory toward the target space that is at least partly overlapping the extended target region; determining one or more moving properties of the current target when the current target is within the extended target region and after a prior and adjacent target has interacted with a prior radiation pulse in the target space; and if any of the determined one or more moving properties of the current target are outside an acceptable range, then adjusting one or more characteristics of a radiation pulse directed toward the target space.

Abstract: A real time inspection and correction system and method for additive manufacturing process is described. The method may include operating a direct writing device configured to deposit material on a substrate through a tip to provide a portion of a product according to initial parameter values, receiving a hyperspectral image frame including a plurality of spectral images of the deposited material, processing the received hyperspectral image frame to determine a characteristic of the deposited material comparing the determined characteristic with a target characteristic determining at least one corrective parameter value to conform the determined characteristic to the target characteristic updating at least one of the initial parameter values with the corrective parameter values, and operating the direct writing device to deposit additional material on the substrate according to the corrective parameter value.

Abstract: An apparatus for producing a three-dimensional work piece comprises a carrier to receive a layer of raw material powder, a control unit, an irradiation system adapted to selectively irradiate electromagnetic or particle radiation onto the layer of raw material powder applied onto the carrier, wherein the control unit controls the operation of the irradiation system in such a manner that the raw material powder is heated to a first temperature which allows sintering and/or melting of the raw material powder in order to generate a layer of the three-dimensional work piece, and a heating system adapted to selectively irradiate electromagnetic or particle radiation onto the layer of raw material powder applied onto the carrier, wherein the control unit is adapted to control the operation of the heating system in such a manner that the raw material powder is heated to a second temperature that is lower than the first temperature.

Abstract: Methods, systems, devices and apparatus for laser processing of transparent or partially transparent materials by focusing laser radiation on a surface of a material workpiece or inside the material workpiece and creating elongated processed regions with variable and controlled depth using focusing optical system with air-spaced optical components, forming three or more multiple focuses along the optical axis and compensating aberrations induced while light focusing inside the material workpiece. The focusing optical system can have an aplanatic design, with lenses made from birefringent materials combined with lenses from isotropic materials, or objectives, or zoom optical system, or waveplates.

Abstract: Systems and methods here may be used to support a laser eye surgery device, including a base assembly mounted to an optical scanning assembly via, a horizontal x axis bearing, a horizontal y axis bearing, and a vertical z axis bearing, mounted on the base assembly, configured to limit movement of the optical scanning assembly in an x axis, y axis and z axis respectively, relative to the base assembly, a vertical z axis spring, configured to counteract the forces of gravity on the optical scanning assembly in the z axis, and, mirrors mounted on the base assembly and positioned to reflect an energy beam into the optical scanning assembly no matter where the optical scanning assembly is located on the x axis bearing, the y axis bearing and the z axis bearing.

Abstract: A multiple cavity laser system includes: a controller configured to operate the system as well as a plurality of laser cavities, each of the laser cavities having an output end wherein, when activated by the controller, an output laser beam is emitted from the output end of each of the laser cavities. The output laser beams when activated are directed, either directly or indirectly, to a rotating mirror. The rotating mirror is operatively connected to the controller and a servo motor. The servo motor, under direction of the controller, redirects the output laser beams along a common optical axis and the output laser beams of the plurality of laser cavities are combined along the common optical axis.

Abstract: A laser welding apparatus according to the present invention includes a diffractive optical element, an incident-point changing unit, and a controller. The diffractive optical element includes a first region where there is formed a diffraction grating that radiates a radiated beam having a first distribution profile of a power density that is different from a distribution profile of a power density of the incident beam. The diffractive optical element further includes a second region that has a surface profile different from a surface profile of the first region, and radiates a radiated beam having a second distribution profile of the power density that is different from the first distribution profile of the power density. The controller carries out a joining control to move at least one point in the incident point across a boundary between the first region and the second region during the emission of the laser beam.

Abstract: A bonded structure contains a substrate containing at least one feature, the substrate having a top surface; a first release layer overlying the top surface of the substrate, the first release layer being absorptive of light having a first wavelength for being decomposed by the light; an adhesive layer overlying the first release layer, and a second release layer overlying the adhesive layer. The second release layer is absorptive of light having a second wavelength for being decomposed by the light having the second wavelength. The bonded structure further contains a handle substrate that overlies the second release layer, where the handle substrate is substantially transparent to the light having the first wavelength and the second wavelength. Also disclosed is a debonding method to process the bonded structure to remove and reclaim the adhesive layer for re-use. In another embodiment a multi-step method optically cuts and debonds a bonded structure.

Abstract: A communication method includes combining first and second optical signals into a third optical signal, processing the third optical signal, and separating the third optical signal back into the first and second optical signals. The method includes sending the first optical signal out a first system port, sending the second optical signal out a second system port, receiving a fourth optical signal in the first system port, and receiving a fifth optical signal in the second system port. The method also includes combining the fourth and fifth optical signals into a sixth optical signal, processing the sixth optical signal, and separating the sixth optical signal back into the fourth and fifth optical signals.

Abstract: Disclosed is a method for generatively producing or for repairing at least one area of a component, wherein a zone arranged downstream of a molten bath is post-heated to a post-heating temperature and the component is set to a base temperature, and also a device for carrying out such a method.

Abstract: A substrate includes a plurality of semiconductor chips arranged in a grid pattern and laterally spaced from one another by channel regions. The substrate includes a vertical stack of a semiconductor layer and at least one dielectric material layer embedding metal interconnect structures. The at least one dielectric material layer are removed along the channel regions and around vertices of the grid pattern so that each semiconductor chip includes corner surfaces that are not parallel to lines of the grid pattern. The corner surfaces can include straight surfaces or convex surfaces. The semiconductor chips are diced and subsequently bonded to a packaging substrate employing an underfill material. The corner surfaces reduce mechanical stress applied to the metal interconnect layer during the bonding process and subsequent thermal cycling processes.

Abstract: A ring amplifier amplifies one or more spot-beams that scan a circular pattern in a two-dimensional FOV to extend the range of range steerable laser transmitter or an active situational sensor. Mechanical, solid-state or optical phase array techniques may be used to scan the spot-beam(s) in the circular pattern. Mirrors are preferably positioned to redirect the spot-beams to enter and exit the ring amplifier through sidewalls to amplify the spot-beam and return it along a path to scan the circular pattern. For efficiency, the pumps and thermal control may be synchronized to the circular scan pattern to only pump and cool the section of gain medium in which the spot-beam is currently scanned and the next section of gain medium in the circular scan pattern.

Abstract: A three dimensional [3D] video signal (41) is provided for transferring to a 3D destination device (50). Depth metadata is determined indicative of depths occurring in the 3D video data, which depth metadata includes a near value indicative of depths of video data nearest to a user. The 3D video signal, which comprises the 3D video data, now also includes the depth metadata. The 3D destination device (50) is enabled to retrieve the depth metadata, to provide auxiliary data, and to position the auxiliary data at an auxiliary depth in dependence of the retrieved metadata for displaying the auxiliary data in combination with the 3D video data such that obscuring the auxiliary data by said nearest video data, and/or disturbing effects at the boundary of the auxiliary data, is avoided.

Abstract: The laser system may include first and second laser apparatuses and a beam delivery device. The first laser apparatus may be provided so as to emit a first laser beam to the beam delivery device in a first direction. The second laser apparatus may be provided so as to emit a second laser beam to the beam delivery device in a direction substantially parallel to the first direction. The beam delivery device may be configured to bundle the first and second laser beams and to emit the first and second laser beams from the beam delivery device to a beam delivery direction different from the first direction.

Abstract: When opaque films are deposited on semi-conductor wafers, underlying features may be concealed. In accordance with one implementation, such concealed features may be re-exposed via an ablation recovery process. One ablation recovery process entails aligning an energy source with a target position on a first surface of a semiconductor wafer based on position information retrieved from a second opposite surface of the semiconductor wafer, and firing a beam of the energy source to ablate opaque material at the target position and to expose a recovery feature underlying the opaque material.

Abstract: The present invention relates to a device for laser-based generative component production. The device comprises a processing head (1), using which a plurality of mutually separate laser beams are directed adjacently and/or overlapping to some extent onto the processing plane, The processing head (1) is moved across the processing plane using a movement apparatus (9), while the mutually separate laser beams are modulated independently of one another in terms of intensity, in order to obtain the desired exposure geometry. The laser power and the dimensional size can be scaled cost effectively during the generative production using the suggested device and the associated method.

Abstract: An endoscopic illumination system for illuminating a subject for stereoscopic image capture, includes a light source which outputs light; a first complementary multiband bandpass filter (CMBF) and a second CMBF, the first and second CMBFs being situated in first and second light paths, respectively, where the first CMBF and the second CMBF filter the light incident thereupon to output filtered light; and a camera which captures video images of the subject and generates corresponding video information, the camera receiving light reflected from the subject and passing through a pupil CMBF pair and a detection lens. The pupil CMBF includes a first pupil CMBF and a second pupil CMBF, the first pupil CMBF being identical to the first CMBF and the second pupil CMBF being identical to the second CMBF, and the detection lens includes one unpartitioned section that covers both the first pupil CMBF and the second pupil CMBF.

Abstract: A communication method includes combining first and second optical signals into a third optical signal, processing the third optical signal, and separating the third optical signal back into the first and second optical signals. The method includes sending the first optical signal out a first system port, sending the second optical signal out a second system port, receiving a fourth optical signal in the first system port, and receiving a fifth optical signal in the second system port. The method also includes combining the fourth and fifth optical signals into a sixth optical signal, processing the sixth optical signal, and separating the sixth optical signal back into the fourth and fifth optical signals.

Abstract: The invention discloses a device for laser material machining, with at least two laser beam sources (2a-2c) which emit laser beams (5a-5c) of different wavelengths, with associated beam imaging means (3a-3c), to configure appropriately the beam paths of each associated laser beam (5a-5c), a beam superposition device (6), to overlay the laser beams (5a-5c) on each other, and imaging optics (8), to image the overlaid laser beams (5a-5c) onto a workpiece (12) so that respective focal points are associated with the laser beams (5a-5c) in the focus of the imaging optics (8) on the workpiece (12), wherein the beam imaging means image the laser beams (5a-5c) onto the respective focal points in a predefined arrangement which can be varied by means of the beam imaging means (3a-3c).

Abstract: Embodiments of the present invention provide a laser stripping apparatus, comprising: a frame; a laser located above the frame and a carrier stage located below the frame; a support mechanism provided on the carrier stage for carrying a flexible display substrate stripping plate; wherein the support mechanism is removably fixed to the carrier stage; the flexible display substrate stripping plate comprises a bearing substrate and a flexible display substrate provided on the bearing substrate; and when the flexible display substrate stripping plate is provided on the laser stripping apparatus, the flexible display substrate comes into contact with the support mechanism.

Abstract: An optical irradiation device is provided which includes a multimode optical fiber suitable for the central wavelength of a beam of light having a first beam profile which enters through an input connection for multimode guidance; a switching device, which can be switched between a first and second light conducting state and is configured to conduct the beam of light entering through the input connection in the first light conducting state to an output connection, such that the beam of light has the first beam profile on emerging from the output connection, and guides the beam of light entering the input connection to the output connection by the multimode optical fiber in the second light conducting state, so that the beam of light has a second beam profile different from the first beam profile on emerging from the output connection by the multimode guidance in the multimode optical fiber.

Abstract: Apparatus, techniques and systems are provided for interfacing with an eye in laser surgery.

Abstract: A laser micro/nano processing system (100, 200, 300, 400) comprises: a laser light source used to provide a first laser beam having a first wavelength and a second laser beam having a second wavelength different from the first wavelength, with the pulse width of the first laser beam being in the range from a nanosecond to a femtosecond; an optical focusing assembly used to focus the first laser beam and the second laser beam to the same focal point; and a micro mobile platform (21) controlled by a computer. Also disclosed are a method for micro/nano-processing photosensitive materials with a laser and a method for fabricating a device with a micro/nano structure using laser two-photon direct writing technology. In the system and methods, spatial and temporal overlapping of two laser beams is utilized, so as to obtain a micro/nano structure with a processing resolution higher than that of a single laser beam, using an average power lower than that of a single laser beam.

Abstract: A polysilicon thin film and a manufacturing method thereof, an array substrate and a display device are disclosed. The manufacturing method of the polysilicon thin film comprises the following steps: forming a graphene layer and an amorphous silicon layer which are adjacent; forming polysilicon by way of crystallizing amorphous silicon so as to obtain the polysilicon thin film. The polysilicon thin film manufactured by the method possesses good characteristics.

Abstract: A beam combiner for combining laser-beams of different colors along a common path includes a directing-prism for each of the laser-beams and one combining-prism. The directing-prisms are arranged to transmit the laser-beams to the combining-prism. The directing-prisms and the combining-prism are configured and arranged with respect to each other such that the directing-prism transmits the beams along the common path.

Abstract: A multi-beam laser processing system comprising a plurality of laser beams and a plurality of pairs of selectively rotatable mirrors for laser beam steering where each laser beam is independently steered by one pair of selectively rotatable mirrors. The plurality of pairs of mirrors are positioned adjacent to one another within a single main body. The main body is positioned directly opposing the beams, the mirrors directing each laser beam simultaneously to a selected location on a substrate. The main body comprises a plurality of vents; a plurality of passages; a plurality of openings; and a plurality of galvos nested densely within the main body. The galvos direct multiple laser beams to a substrate wherein the fields of view overlap and the laser beam focal point remains small and precise.

Abstract: A laser irradiation apparatus for irradiating a laser beam to a semiconductor layer including a plurality of pixel areas, the apparatus includes a laser generator generating the laser beam, and an optical switching unit time-dividing the laser beam generated from the laser generator and transmitting a plurality of time-divided laser beams to a plurality of optical systems. The apparatus includes a first optical system of the plurality of optical systems that receives a first time-divided laser beam and irradiates a first laser slit beam along a first irradiation direction, and a second optical system of the plurality of optical systems that receives a second time-divided laser beam and irradiates a second laser slit beam along a second irradiation direction that is parallel with the first irradiation direction. The first laser slit beam and the second laser slit beam crystallize partial areas at a same location in the respective pixel areas.

Abstract: Methods for cleaning a side edge of a thin film photovoltaic substrate utilizing a laser are provided. The method can include transporting the substrate in a machine direction to move the substrate past a first laser source, and focusing a first laser beam generated by the first laser source onto the side edge of the substrate such that the laser beam removes the thin film present on the side edge of the substrate. An apparatus is also generally provided for cleaning a first side edge and a second side edge of a thin film photovoltaic substrate.

Abstract: A laser material processing system and method are provided. A further aspect of the present invention employs a laser for micromachining. In another aspect of the present invention, the system uses a hollow waveguide. In another aspect of the present invention, a laser beam pulse is given broad bandwidth for workpiece modification.

Abstract: The present invention provides a laser processing method comprising the steps of attaching a protective tape 25 to a front face 3 of a wafer 1a, irradiating a substrate 15 with laser light L while employing a rear face of the wafer 1a as a laser light entrance surface and locating a light-converging point P within the substrate 15 so as to form a molten processed region 13 due to multiphoton absorption, causing the molten processed region 13 to form a cutting start region 8 inside by a predetermined distance from the laser light entrance surface along a line 5 along which the object is intended to be cut in the wafer 1a, attaching an expandable tape 23 to the rear face 21 of the wafer 1a, and expanding the expandable tape 23 so as to separate a plurality of chip parts 24 produced upon cutting the wafer 1a from the cutting start region 8 acting as a start point from each other.

Abstract: The thermal processing device includes a stage, a continuous wave electromagnetic radiation source, a series of lenses, a translation mechanism, a detection module, a three-dimensional auto-focus, and a computer system. The stage is configured to receive a substrate thereon. The continuous wave electromagnetic radiation source is disposed adjacent the stage, and is configured to emit continuous wave electromagnetic radiation along a path towards the substrate. The series of lenses is disposed between the continuous wave electromagnetic radiation source and the stage, and are configured to condense the continuous wave electromagnetic radiation into a line of continuous wave electromagnetic radiation on a surface of the substrate. The translation mechanism is configured to translate the stage and the line of continuous wave electromagnetic radiation relative to one another. The detection module is positioned within the path, and is configured to detect continuous wave electromagnetic radiation.