Abstract: The present invention provides a process for removal of material from a substrate with a plurality of laser beams without substantially destroying or altering the chemical or physical characteristics of the remaining substrate.

Abstract: A method and apparatus for forming an array of microcavities in the surface of a metal film uses an excimer laser or an ultrashort laser which to produce a beam of laser light pulses. An optical mask divides the beam into multiple beams and a lens system focuses the multiple beams onto the metal film. The device operates by generating multiple beams of laser pulses of a first diameter and then magnifying the pulses by a magnification factor less than 1 to produce multiple beams of pulses having a second diameter, less than the first diameter, which are applied to the metal film. The magnification factor and the intensity of the laser is such that the fluence of the laser on the optical mask is not sufficient to cause ablation while the fluence on the metal film is sufficient to cause ablation. A diffractive optical element may be used in the device in place of the optical mask. The apparatus includes a quarter wave plate that converts the beam of laser light pulses into a beam of circularly polarized pulses.

Abstract: A method for physically separating non-metallic substrates by forming a microcrack in the substrate and controllingly propagating the microcrack. An initial mechanical or pulsed laser scribing device forms a microcrack in the substrate. If a pulsed laser is used, it forms a crack in the substrate between its top and bottom surfaces. A scribe beam is applied onto the substrate on a separation line. A helium coolant stream intersects with, or is adjacent to, the trailing edge of the scribe beam. The temperature differential between the heat affected zone of the substrate and the coolant stream propagates the microcrack. Two breaking beams on opposing sides of the separation line follow the coolant stream. The breaking beams create controlled tensile forces that extend the crack to the bottom surface of the substrate for full separation. The scribe and break beams and coolant stream are simultaneously moved relative to the substrate. A preheat beam preheats the heat affected area on the substrate.

Abstract: Method and plant for cutting or welding by a laser beam with dual-flow and double-focus cutting head. The plant includes a laser generator to generate at least one main laser beam (10), a first optical element (1) enabling the main laser beam (10) to be divided into at least two subsidiary laser beams (11, 12), a first outlet nozzle (4) through which one (11) of the subsidiary laser beams passes, and a second outlet nozzle (3) through which the other (12) of the subsidiary laser beams passes, the first and second outlet nozzles (4, 3) being approximately coaxial one with the other. In this way, it is possible to focus the central beam (11) onto a focusing point (PF) by a first focusing element (1), such as a lens, and the other beam (12) onto an annular focusing zone (ZAF).

Abstract: A method of correcting laser beam intensity, a laser beam intensity correction mechanism and a multi-branched laser oscillation device having the correction mechanism to adjust the laser beam intensity easily and smoothly, are provided.

Abstract: A laser beam machining head includes a dividing optical system for dividing laser light into two separate laser beams, and providing spacing therebetween; a condensing optical system for condensing the separate laser beams into condensed laser light, and projecting it onto a cutting site of an object to be cut; and an inner assist gas nozzle placed between the separate laser beams, a width of an opening of a tip portion of the inner assist gas nozzle being nearly equal to a cutting width. Or the tip opening of the inner assist gas nozzle is slender; or its tip side is inclined, and the angle of inclination is variable; or the relative positions of the inner assist gas nozzle and a workpiece, or the relative positions of the focal position of the condensing optical system and the workpiece are variable independently; or an outer assist gas nozzle surrounding the separate laser beams is provided.

Abstract: A method and apparatus for manufacturing patterns on a reticle blank comprising a substrate made from material transparent to UV irradiation and having a first surface and a second opposite surface, the first surface coated with a chrome layer. The method comprises providing ultra-short pulsed laser beams, focusing means, relative displacement facilitator for facilitating relative displacement of the reticle blank relative to said at least one of a plurality of target locations, and a controller for controlling the synchronization and operation of the laser beam source, the focusing means and the relative displacement facilitator. Ultra-short pulsed laser beam is irradiated in a predetermined pattern directed at the second surface and passing through the substrate, focused on the chrome layer or on its proximity.

Abstract: A processing method for a ceramic green sheet and a laser beam machine used therefor, which can efficiently form a plurality of penetration holes having a desired shape and dimension at predetermined locations of the ceramic green sheet, are provided. By performing the steps of dividing a shaped laser beam into a plurality of laser beams by passing through a diffraction grating in order that an energy of the individual zero order diffracted beam becomes equivalent to, or less than, the threshold value for processing the ceramic green sheet, reflecting the divided laser beams with a galvanomirror, converging the reflected laser beams with an converging lens and radiating the laser beams to the ceramic green sheet, the ceramic green sheet is prevented from being processed by the zero order diffracted beam and the higher order diffracted beam so as to simultaneously form a plurality of penetration holes having a desired shape and dimension.

Abstract: A method of forming a nozzle in a nozzle element for an ink jet print head, wherein material is removed from the nozzle element by means of a laser to form the nozzle. A mask is irradiated with a laser beam in such manner that at least one sub-beam is passed through the mask, whereafter the material is removed by means of the sub-beam. Inhomogeneity of the laser beam is compensated for by using, for each nozzle laser, radiation originating from different parts of the laser beam, whereby the nozzle is formed with an “average” laser beam.

Abstract: In a laser processing apparatus, laser beams are respectively focused and irradiated by focusing devices onto a work being processed, thereby performing laser processing in processing areas B within predetermined ranges on the work. An adjustment member is provided for automatically adjusting an interval C between the center points of the focusing devices in correspondence with the size of an entire processing area A on the work being processed.

Abstract: A laser machining apparatus for performing high-precision machining on a thin film deposited on a substrate, such as a liquid crystal panel. The apparatus includes a pulse laser generator for emitting a laser beam, a driver for driving the pulse laser generator, a phase grating for dividing the laser beam; a rotary stage for rotating the phase grating to control the direction of the beams illuminating an object, and a spatial filter (element 2101).

Abstract: The invention concerns a perforating apparatus for producing openings in a peripheral surface of a substantially elongate, cylindrical object, in particular a cigarette, comprising a light source for producing at least one high-energy light beam, by means of which the openings can be produced in the object, an operative zone which can be produced by a guidance tracking means for guided tracking of the light beam and within which the light beam acts on an object moving through the operative zone, to produce the openings, rolling means for producing a rotary movement of the objects about their longitudinal axis while the objects are moving through the operative zone in order to expose the peripheral surface to the light beam, and transport means for conveying the object through the operative zone.

Abstract: A coaxial laser beam machining head, and a laser beam machining apparatus having it are provided. The head is small in size, free from the risk of damaging optical instruments, and inexpensive.

Abstract: An optical device includes a substrate 60 and three prisms 10, 20 and 30. The first prism 10 is disposed adjacent to an upper surface of the substrate 60. An incoming beam aperture 65 is positioned adjacent a first surface 12 of the first prism 10, the first surface 12 extending away from the upper surface of the substrate 60. The second prism 30 is disposed adjacent to the upper surface of the substrate 60 and is spaced from the first prism 10 by a first distance. The third prism 20 is also disposed adjacent to the upper surface of the substrate 60. The third prism 20 may be spaced from the second prism 30 by the same first distance. An outgoing beam aperture 66 is positioned adjacent a first surface 22 of the third prism 20. The substrate 60 has phase changing reflective surfaces 40 and 50 along the upper surface between the first prism 10 and the second prism 30 and between the second prism 30 and the third prism 20.

Abstract: A Q-switched, diode-pumped, solid-state (DPSS) laser (54) employs harmonic generation through nonlinear crystals (72) to generate UV light (74) for both link processing and target alignment. The type and geometry of the nonlinear crystals (72) are selected, and their temperatures are precisely controlled, to produce focused spot sizes with excellent beam quality for severing of IC fuses. A fraction of the laser output (56) can be utilized in a secondary target alignment system (50). An imaging optics module (52) may be employed to further enhance the shape quality of either or both of the secondary and primary beams. Each beam passes through a detection module (100) that measures the incident and reflected light. The two beams pass through a common combiner to facilitate calibration and alignment of the beams and subsequent link processing.

Abstract: A laser welding apparatus for use in industrial processing, which is operable to emit laser energy to weld blanks and the like together along a seamline. The emitted laser energy comprises a multiple beam of two or more coherent light sources. The apparatus is adapted to selectively reposition the orientation of the multiple beam relative to the seamline to compensate for gaps between the abutting portions of the workpieces to be joined.

Abstract: The present invention relates to a laser annealing apparatus having a plurality of optical systems to generate a plurality of laser beams. A process time is reduced because a laser scanning operation on a large substrate is completed in a shorter time. The present invention includes a laser oscillator generating and supplying a laser, at least one beam splitter separating the laser from the laser oscillator into at least one or more laser beam, a plurality of optical systems processing a laser beam to produce laser having energy and profile sufficient to use directly for sample irradiation. The optical systems arrange each processed laser beam to a length direction.

Abstract: A laser machining device is capable of simultaneously machining two- or three dimentional patterns on the surface of a workpiece. A micromirror array positioned within a laser cavity generates a patterned plurality of laser beamlets which can be homogenized and deflected by a second micromirror array onto the surface of a workpiece to create a two-dimensional pattern. Alternatively, the second micromirror array can deflect laser beamlets of unequal energy density to produce a three-dimensional pattern.

Abstract: A multiple laser peening cell apparatus for receiving pulses of energy from a laser shock peening device is comprised of a first cell for receiving a first pulse of energy, a second cell for receiving a second pulse of energy, and a beam distribution means, for directing the first pulse of energy and the second pulse of energy. Also, a method of directing pulses of energy originating from a single source to multiple workpieces comprises the steps of creating a first pulse of energy, directing the first pulse of energy to a first workpiece located in a first laser peening cell, creating a second pulse of energy, and directing the second pulse of energy to a second workpiece located in a second laser peening cell.

Abstract: The substrate of a magnetic recording medium is laser textured employing a fiber-optic laser delivery system. Fiber optic cables are optically linked at one end to a laser light beam source, and at the other lens to a microfocusing lens. The use of a fiber optic cable delivery system facilitates alignment and reduces maintenance.

Abstract: The substrate of a magnetic recording medium is laser textured employing a dual fiber-optic laser delivery system which enables separate control of nucleation and crystallization. An embodiment of the invention includes laser texturing glass, ceramic and glass-ceramic substrates without microcracking to form a texture comprising uniform protrusions.

Abstract: A laser-optical wave mixing technique is provided for forming a high density textured data zone in an efficient and accurate manner. A single coherent laser beam of wavelength &lgr; is split into two beams with roughly the same intensity. These two beams are then overlapped with a cross angle of 2&thgr; and focused at the disk surface, resulting in an intensity grating thereon. The intensity grating creates a wave-form pattern consisting of a series of high-energy laser beam lines that will heat the target surface and make surface topographical changes accordingly.

Abstract: In a laser beam machine head, when a filler wire and an optical axis of a laser beam are arranged coaxially, a convex roof mirror and a concave roof mirror are combined to divide the laser beam into two separate laser beams to that no laser beam is projected onto a filler wire feed pipe. Furthermore, the filler wire is fed from outside the laser beams to a condensing position via a filler wire guide in the spacing between the separate laser beams, or an electrode supported by a water flow pipe or an electrode holding pipe is brought close to the condensing position.

Abstract: In general, the present invention pertains to an apparatus and control system for working sheet material employs a tilting mechanism which automatically tilts a head about a theoretical point disposed upon the sheet material. In another aspect of the present invention, the head is defined as a laser head and the pivot point corresponds with the laser beam focal point. A further aspect of the present invention provides a seam tracking device and control system which automatically adjust a welding head height relative to the sheet material as a datum rather than relative to a gantry or other structure supporting the welding head. In yet another aspect of the present invention, an optical seam tracking device is employed to automatically tilt the welding head along differing rotational planes. In still another aspect of the present invention, various axial slides are employed in combination with a gantry.

Abstract: An apparatus for physically separating non-metallic substrates by forming a microcrack in the substrate and controlling propagating the microcrack. An initial mechanical or pulsed laser scribing device forms a microcrack in the substrate. If a pulsed laser is used, it forms a crack in the substrate between its top and bottom surf. A scribe beam is applied onto the substrate on a separation line. A helium coolant stream intersets with, or is adjacent to, the trailing edge of the scribe beam. The temperature differential between the heat affected zone of the substrate and the coolant stream propagates the microcrack. Two breaking beams on opposing sides of the separation line follow the coolant stream. The breaking beams create controlled tensile forces that extend the crack to the bottom surface of the substrate for full separation. The scribe and break beams and coolant stream are simultaneously moved relative to the substrate. A preheat beam preheats the heat affected area on the substrate.

Abstract: A lens assembly is provided for causing a laser beam to form a focal spot in a recording region of an optical recording medium including a substrate. The lens assembly includes a plurality of focusing lenses each including an incidence surface for receiving the laser beam and an emitting surface for emitting the laser beam. Each focusing lens is arranged so that the emitted laser beam is caused to converge at a first focus located in contact with the substrate of the optical recording medium. The focusing lens is also arranged so that light sent from the first focus is caused to converge at a second focus located in the recording region of the optical recording medium to form the focal spot.

Abstract: An ink jet printer comprises a nozzle member manufactured by a method including the step of splitting light from a light source by amplitude splitting to form a plurality of illumination beams, and the step of illuminating a plurality of mask patterns formed on a mask with corresponding split illumination beams so as to expose a workpiece via the mask patterns.

Abstract: A laser welding apparatus for use in industrial processing, which is operable to emit laser energy to weld blanks and the like together along a seamline. The emitted laser energy comprises a multiple beam of two or more coherent light sources. The apparatus is adapted to selectively reposition the orientation of the multiple beam relative to the seamline to compensate for gaps between the abutting portions of the workpieces to be joined.

Abstract: The substrate of a magnetic recording medium is laser textured with uniformity and precision employing a fiber optic laser delivery system with a microfocusing lens. Surface variations, such as surface runout, are detected with an optical probe and a laser texturing parameter adjusted via a feedback control system in response to a detected surface variation. Embodiments include adjusting the pulse power, pulse duration, repetition rate and/or distance between the microfocusing lens and substrate surface in response to a detected surface variation.

Abstract: This invention involves a method and apparatus for welding and/or cutting flexible packaging material (1) using lasers. The invention is specifically directed towards the use of lasers for cutting and/or welding plastics material (1) in motion, such as in association with high speed packaging machinery. The method and apparatus of the invention enables the cutting and/or welding of adjacent webs of plastics material (1) by scanning one or more processing laser beams (4), or sub-beams (5, 6) of the or each processing laser beam (4), across said moving layers (1) at a rate controlled in relation to the rate of motion of the layers (1) of substrate. The method and apparatus may produce straight or shaped cuts and/or welds.

Abstract: The substrate of a magnetic recording medium is laser textured with uniformity and precision employing a fiber optic laser delivery system to form a laser textured landing zone and a laser textured decoupled data zone. A continuous wave laser light beam is split into first and second continuous wave laser light sub-beams. The first continuous laser light sub-beam is impinged on a rotating substrate surface through a microfocusing lens system to laser texture a data zone. The second continuous wave laser light sub-beam is converted into a pulsed laser light beam and passed through a microfocusing lens to impinge on the substrate surface to laser texture a data zone.

Abstract: A material irradiation apparatus with a beam source produces a processing beam. The apparatus has a beam splitting device following the beam source, by which the processing beam is divided into several partial beams. Each partial beam can be deflected by a deflecting device discretely associated with it to different places on at least one workpiece to be processed, independently of the other partial beams. The workpiece to be processed is situated on a workpiece movement device that is movable in at least one axis. The machining beam is successively incident on a plurality of beam splitter devices that are movably arranged in the axis of the machining beam that is incident on them. The partial beams emerging from the beam splitter devices are simultaneously incident on the workpiece movement device. The workpiece movement device is arranged to be movable in at least one coordinate direction that deviates from the movement axis of the beam splitter devices.

Abstract: The substrate of a magnetic recording medium is laser textured using a continuous wave laser light beam and microfocusing lens system to form a laser textured data zone comprising a plurality of substantially uniform concentric microgrooves. A suitable microfocusing lens system includes an array of horizontally and vertically spaced apart microfocusing lenses, each optically linked to a fiber optic cable.

Abstract: A multi-head laser engraving machine with two exposure heads (15, 16) contains a beam splitter (3) belonging to the first exposure head (15), and a tilted mirror belonging to the second exposure head (16). Each exposure head (6, 7) has associated therewith a fast optical switch, the switches being drivable independently of each other by a control unit (9). This permits simultaneous and independent inscription of the working areas (F1, F2) associated with the respective exposure heads (15, 16). The fast optical switches have the form of a deflection prism which is swiveled into the focused partial beam in order to interrupt the beam.

Abstract: An apparatus for metal line deposition and a method for metal line deposition using the apparatus. A donor plate has a donor substrate transparent to a focused coherent light beam. The donor plate has a donor surface coated with a metallic material. The donor plate is positioned so the coated donor surface is adjacent a deposition substrate. A focused coherent light beam is diffracted to form a plurality of coherent light beams. The plurality of beams are directed through the donor substrate and arranged along a line on the metallic material coating the donor surface. The plurality of beams cause the metallic material to ablate from the donor surface by discharging ions of the metallic material away from the donor plate and onto the deposition substrate to form the metal line. Either the plurality of beams or the donor plate and deposition plate are actuated so the metallic material is ablated from the donor plate in a direction parallel to the metal line to be deposited.

Abstract: A disk texturing tool is used, for example, to provide textured spots in an annular portion of both sides of a hardfile disk. Disks are moved into and out of the texturing process in cassettes, through two disk-handling stations. In each disk-handling station, a lifter raises each individual disk from the cassette. The individual disk is then transferred to a pick-and-place mechanism, which moves it to a spindle. The spindle spins and translates the disk, so that both sides of the disk are exposed to beams derived from a pulsed laser. The pick-and-place mechanism then returns the disk to the lifter, which lowers it into the cassette pocket from which it was taken. The pick-and-place mechanism simultaneously moves one disk from the lifter to the spindle and another from the spindle to the lifter. While disks are moved by the pick-and-place mechanism of one disk-handling station, a disk in the spindle of the other disk-handling station is exposed to the laser beams.