Abstract: Heating device having a substantially flat heating element with specifically selected physical parameters is provided for heating an object to a required temperature. The physical parameters are selected such as to, at a given power and at a selected voltage supply to the heating element, provide as low as desired temperature gradient between the temperature of the outer surface of the heating element through which beat is dissipated and the required temperature of the object. Heating devices of the invention may be implemented in domestic heaters, in food cooking devices, in medical devices, etc. Also provided is a method for designing heating elements for use in such devices.

Abstract: The present invention provides a carbon heating element having an arbitrary specific resistance and an arbitrary shape which are arbitrary necessary as a heating element, and a method of producing the same. The carbon heating element is obtained by uniformly dispersing one or at least two metal or metalloid compounds into a composition having shapability and showing a high yield of a carbon residue after firing, shaping the dispersed material-containing mixture thus obtained, and firing the shaped material under a nonoxidizing atmosphere.

Abstract: A heating mat electrically connectable to a power source provided with a conductive prong connected to an electrical polarity defines a mat peripheral edge. The heating mat includes a conductor mounted therein and extending towards a connecting section located adjacent the mat peripheral edge. A resistive element electrically coupled to the conductor transforms the electrical energy into thermal energy. A connecting recess extends into the heating mat adjacent the connecting section and defines a prong receiving section to receive the conductive prong so that when the conductive prong is inserted into the prong receiving section the conductive prong is electrically coupled to the conductor. The prong receiving section defines a prong section base wall.

Abstract: A radiator system includes a high temperature body being a thermal source, a receiver with the high-temperature body boarded thereon, and a thermal buffer. The receiver receives heat from the high-temperature body. The thermal buffer is interposed at least between the high-temperature body and the receiver to buffer thermal transmission from the high-temperature body to the receiver, includes a high thermal conductor and a low expander disposed at a position facing the high-temperature body and buried in the high thermal conductor, and has a first bonding area with respect to the high-temperature body and a second bonding area with respect to the receiver. The second bonding area is enlarged greater than the first bonding area. The heat from the high-temperature body is radiated by the receiver or is radiated by way of the receiver. Thus, the thermal expansion difference can be minimized between the high-temperature body and receiver.

Abstract: A heater assembly for mounting around a fluid flow channel in an injection molding apparatus, the heater assembly comprising: an inner tube comprising a first heat conductive material having a first coefficient of thermal expansion, the inner tube having a selected longitudinal length, an inner surface, an outer surface; a first ring having an inner surface engaged around the outer surface of the inner tube along short selected length of the longitudinal length of the inner tube, the first ring comprising a second material having a second coefficient of thermal expansion that is less than the first coefficient of thermal expansion; a heater mechanism that heats the inner tube to a selected elevated temperature.

Abstract: A mineral insulated heating cable comprising two electrical conductors extending along the lengths of the cable and an array of heating elements distributed along the length of the cable and connected in parallel between the conductors. The heating cable is encased in a metal jacket which waterproofs the overall assembly, the jacket being electrically insulated from both the conductors and the heating elements by for example mica or glass fiber tape sheaths. The metal jacket is extruded directly onto the heating cable, or is extruded around and then drawn down onto the heating cable. Thus the structure can withstand high temperatures and yet is waterproof given the provision of the metal jacket.

Abstract: There is disclosed a heating apparatus with electrostatic attraction function 1, comprising at least a supporting base 2, an electrode for electrostatic attraction 4 and a heating layer 5 that are formed on the supporting base, and an insulating layer 6 that is formed on the electrode for electrostatic attraction and the heating layer, wherein the electrode for electrostatic attraction and/or the heating layer are/is composed of pyrolytic graphite containing boron and/or boron carbide of 0.001-30% by weight in terms of boron concentration, and the insulating layer has an electric resistivity of 106-1015 &OHgr;cm. There is provided a heating apparatus with electrostatic attraction function, which has a high thermal shock resistance, no problem of delamination, a proper resistance value, and a sufficient electrostatic attraction force even in a medium and high temperature range of 500-800° C.

Abstract: The invention pertains to the electrothermal field and in particular to the resistive heating elements on the basis of the glass-fibre textile with the pyrocarbon coating and may be used for the production of the heating elements in heaters for both industrial and domestic applications. For obtaining the electrically conducting textile with the wide range of resistance and for broadening its sphere of application, as well as lowering the deposition temperature and retaining low scattering of the resistance along the whole field of the textile, the said textile contains 0.2-15% weight of pyrocarbon of turbostrate structure with hydrogen content up to 2% weight and with density of 0.8-1.5 g/cm3, and 86.0-99.8% weight of glass-fibre textile with the softening temperature at least 650° C. The raw hydrocarbon materials used for pyrocarbon production are hydrocarbon oils with the viscosity of 8 to 23 sSt, which are preliminarily heated to 350-450° C.

Abstract: A resistive heating element having high generation efficiency for far infrared rays and a comparatively high specific resistance while maintaining the strength required as a resistive heating element, is obtained by shaping a mixture of graphite powder, boron nitride and silicone rubber to a desired shape followed by firing by heating to 380° C. in an oxidizing atmosphere and then further firing by heating to 1100° C. in a nitrogen atmosphere.

Abstract: This invention relates to novel chemical compositions and manufacturing methods for producing electro-conductive, metal-ceramic materials having improved structural stability to operate at high temperatures in oxidizing atmospheres.

Abstract: Carbonization is achieved and impurity elements are removed by combination of a metal or metalloid compound with a composition exhibiting a carbon residual yield that is substantially not zero after firing, followed by firing at a pressure of no higher than 1×10−2 Pa and a temperature of from 1500° C. to 2200° C.

Abstract: A thermoconductive rubber patch includes a thermoconductive rubber piece which is encased by an insulating casing and is made of rubber, carbon black granules and metal granules. The thermoconductive rubber piece is provided with an electric circuit and is capable of generating heat at the time when an electric current flows over the electric circuit. The thermoconductive rubber piece has a resistance, with the magnitude of the resistance being dependent on a ratio by which the carbon black granules and the metal granules are contained in the thermoconductive rubber piece.

Abstract: This invention provides a firing jig for an electronic element comprising a spray coating layer made of a material less reactive to a material to be fired on a substrate made of a ceramic, wherein two or more spray coating layers are formed on the surface of the substrate, and at least a spray coating layer adjacent to the substrate and a spray coating layer adjacent to the material to be fired are made of different materials. When it is a firing jig for an electronic element comprising a ceramic substrate, a surface adjacent to the substrate is a spray coating layer and the surface of the spray coating layer is a flame coating layer. The firing jig for an electronic element has a longer life and can be produced with a lower cost.

Abstract: A CHTS reactor plate has wells that can be individually heated. The reactor plate includes a substrate with an array of reaction wells and a ferromagnetic material included with the substrate. A CHTS method provides a reactor plate having a substrate with an array of reaction wells and a ferromagnetic material responsive to the application of an electric field included with the substrate. The electric field is energized to control temperature in the proximity of at least one of the reaction wells. Another method comprises providing a reactor plate comprising an array of reaction wells and depositing a ferromagnetic object within at least one of the wells. The object is responsive to the application of an electric field. An electric field is then energized to control temperature in the reaction well.

Abstract: A method of lengthening the useful life of heating elements that are essentially comprised of molybdenum silicide and molybdenum tungsten silicide and different alloys of these basic materials, when the elements are operated at a relatively low temperature, such as a temperature in the range of 400-800° C., The invention is characterised in that the atmosphere surrounding the elements as they operate is caused to have a water content that is less than about one percent by volume.

Abstract: A heating element for heating liquids, comprising a heating coil coiled about a central axis. The coil has a first end and a second end lying in a plane substantially parallel to the central axis. The coil is covered with insulation which is covered with a protective sheath. The protective sheath is covered with an aluminum housing provided with a central aperture to increase the surface area of the heating element in contact with the liquid to improve start-up time. The aluminum housing is also provided with an aperture to receive a thermostat. A pressure die having a first portion and a second portion is adapted to receive a spacer between the first and second portions to vary the distance between the first and second portion and allow for the manufacture of heating elements of varying diameters.

Abstract: The purpose is to provide a heating unit of a carbon fiber-mixed sheet with a low price in which sheet carbon fibers are equally dispersed and a member on the surface of which sheet is not subjected to such change of properties as discoloration and the like. The constitution is characterized in that a sizing agent covers a part of the carbon fiber-mixed sheet which sheet is made by the mixed fiber-making of 5˜10 wt. % of a carbon fiber having a length of 5˜10 mm and 95˜90 wt. % of a pulp containing a bast fiber and in that the sheet has a thickness of 150 &mgr;m or less, a basis weight of 50 g/m2 or less and a degree of beating of 30˜70° SR.

Abstract: The invention relates to an infrared radiator with a heating element containing carbon fibers disposed in a quartz glass tube, with its ends connected to contact elements running through the wall of the quartz glass tube. The known radiators are improved by the fact that the heating element is spaced away from the wall of the quartz glass tube and it is centered on the axis of the quartz glass tube by means of spacers. The invention furthermore relates to a method by which the infrared radiator is operated at heating element temperatures greater than 1000° C.

Abstract: A semi-rigid heated element assembly and method of manufacturing semi-rigid heated element assemblies is provided. A heated element assembly includes a first thermoplastic sheet, a second thermoplastic sheet, and a resistance heating element laminated between the first and second thermoplastic sheets. The resistance heating element includes a supporting substrate having a first surface thereon and an electrical resistance heating material forming a predetermined circuit path having a pair of terminal end portions. The circuit path continues onto at least one flap portion that is capable of rotating about a first axis of rotation. The reformable continuous element structure may be formed into a final element assembly configuration whereby at least the flap portion is rotated along its axis of rotation to provide resistance heating in at least two planes. Semi-rigid heating elements may be formed into heated containers, heated bags, and other objects with complex heat planes.

Abstract: A ceramic pin heating element having exterior heating conductors and integrated electrical connection surfaces, and method for making same. A first body is injection molded from a first injection-moldable ceramic composite compound having a first electrical resistance, and a second body is injection-molded from a second injection-moldable ceramic composite compound having a second electrical resistance about the first body so as to form a compound body. The compound body is then sintered. The resulting ceramic pin heating element is directly formed without additional steps for protecting (insulating) the element so as to prevent the exterior, complementary heating conductors from contacting the housing and/or terminal bolts. The danger of breakage of the pins at the mounting location and/or at the seal seat through variations in the thickness of contact and/or insulation coatings is minimized.

Abstract: Provided for heating cultured cells is a controlled heater device comprising a cell culture apparatus, a transparent heater in thermal contact with the cell culture apparatus, and may further comprise one or more of a transparent filter provided to prevent a predetermined spectral range of light from passing through the transparent filter, and a power source for controlling the amount of heat generated by the transparent heater of the controlled heater device.

Abstract: A heating element, including a sensor conductor, two resistive conductors, with one resistive conductor arranged on one side of the sensor conductor and an other resistive conductor arranged on an other side of the sensor conductor such that the sensor conductor and the two resistive conductors are substantially parallel and plastic electrical insulation surrounding the sensor conductor and each resistive conductor.

Abstract: A method of producing semi-conductive, electrical resistive heating elements comprising metal oxides, preferably binary metal oxides whereby the two metals are of different valencies and the conductivity of the binary oxide system is determined by the compositioned ratio of the two metals having different valencies and the degree of oxidation, and electrically resistive heating elements so produced.

Abstract: A radiant electric heater is disclosed having an auxiliary reflector in front of a halogen lamp. The heater includes a ceramic base defined with clampling grooves for directly clamping terminals of the halogen lamp. The auxiliary reflector has a concave surface outline which faces a curved front end of the halogen lamp. The heater also includes a fastening member having one end which is affixed to the auxiliary reflector and the other end which is affixed to a center portion of the safety grill.

Abstract: There is disclosed a stove, with a smooth-top cooktop, for cooking food, the stove comprising: a stove body; a smooth-top cooktop to cook food thereon; and at least one heat source disposed adjacent to a cooking surface of said cooktop. The cooktop comprises glass ceramic with an upper layer and an inner layer, with the upper layer comprising a different glass ceramic material than the inner layer. The upper layer is configured to minimize surface defects such as fissures, cracks, pits, and pores. The inner layer is configured to provide resistance to impact to the upper layer from cooking utensils being dropped onto the upper layer of the smooth-top cooktop, and at least the inner layer of the glass ceramic being configured to obscure visibility of the at least one heat source, through the upper layer of the glass ceramic.

Abstract: The invention constitutes a device for heating a component (3) in a vehicle environment comprising a heating element (2) and means for feeding current (I) through the heating element (2). The invention is characterized in that the heating element (2) is constructed in the form of a heating wire which in turn comprises a number of strands (16) arranged together, of which a predetermined number of strands (16) comprises an individual electrical insulation (17). Using the invention an enhanced device for beating of a vehicle seat is acquired, with which help the risk of the so called “hot-spot” problem may be eliminated.

Abstract: A heater for fusing toner images onto recording paper is provided. The heater includes a supporting base that has an upper surface and a lower surface. The base has a relatively low thermal conductivity. The heater also includes a heating element formed on the upper surface of the base. A heat conductor is provided on the upper or lower side of the base. The heat conductor has a thermal conductivity greater than the thermal conductivity of the base.

Abstract: A thermo-sensitive heater and heater driving circuit are disclosed. The thermo-sensitive heater comprises a cord-shaped nylon thermistor that surrounds a heating element, such that the thermistor detects the temperature of the heating element and controls the driving current for a heating coil. Also, the present invention includes electromagnetic shielding material, which is formed by winding an electric conductor around the outer surface of the nylon thermistor, or formed as a wire mesh. This shielding material is advantageous for discharging the electric field radiated from inside of the heater to an external electric field, thus safely eliminating harmful electric fields. Also, the present invention further provides a driving circuit for safely driving the heater, which includes a temperature controller or an overheating prevention circuit.

Abstract: The present invention provides an inexpensive heater exhibiting good gas-tightness, as well as a method for manufacturing the same. The heater includes a cylindrical metallic shell having a through-hole with a heating element disposed in the through-hole such that a portion projects from one end of the shell. The heater is adapted to generate heat upon application of electricity thereto. A rod-like axial member has a coil lead for electrically connecting a portion of the axial member and the heating element. A gas-tight seal member formed of an insulating polymeric material is interposed between the axial member and the inner surface of the through-hole in such a manner to surround the outer circumferential surface of the axial member. A crimped portion of the metallic shell brings the gas-tight seal member into close contact with the outer circumferential surface of the axial member and the inner wall surface of the through-hole form a gas tight seal.

Abstract: A cooking apparatus including a housing having an interior which contains a heating device. The cooking apparatus includes a liner which is preferably made of metallic material with a bowl which may be removably placed therein to cook food. The heating device is a heating band which has downwardly extending foot members to prevent the heating element from contacting the floor of the housing to prevent hot spots and inadvertent burning of a users hand.

Abstract: A ceramic heater having an alumina rod, an alumina based ribbon sintered to the rod, and a platinum resistor element bonded to the ribbon. Additionally, a method of making a ceramic heater having the steps of making a ceramic slurry; combining the ceramic slurry with a binder component to form a slip; depositing the slip onto a carrier film at a controlled thickness such that a deposited slip is formed; heat curing the deposited slip to form a cured slip ribbon; applying a platinum paste onto the ribbon in a specific pattern, the paste forming a platinum resistor element on the ribbon; applying the ribbon with the platinum resistor element onto an alumina rod; and, heating the rod with the ribbon and the platinum resistor element thereon, whereby the ribbon is sintered to the rod and the platinum resistor element is sintered and bonded to the ribbon.

Abstract: An electrical heater having a plurality electrodes disposed adjacently on a substrate in spaced apart relation and interconnected by a thermistor material, for example a positive temperature coefficient material. The electrodes each have at least one end portion and preferably two opposite end portions coupled to corresponding electrical terminal located at a common termination zone on the substrate. A spacing between adjacent electrodes may vary and adjacent electrodes may include interdigitated portions to vary the heat produced on select portions of the substrate.

Abstract: A snow-melting apparatus prevents ice dams on an outside surface of a roof of a building. An outer edge section of the roof extends over and beyond an outside wall of the building in an outward direction. A heat conduction device includes a substantially planar body portion formed of a substantially thermally conductive material and having a first side and a second side. The second side is opposite the first side. The first side has a coating with a high emissivity. The first side transfers heat to an inside surface of at least the outer edge section of the roof. A heat source is attached to the body portion of the heat conduction device.

Abstract: In order to eliminate the drawback of an electric heating element formed on an insulating ceramic substrate so that the element is brittle and becomes soft at a high temperature, an electrically heat-generating material film having a microstructure composed of a silicide alone, a mixture of silicide and Si, or Si alone is fused to the surface of a nitride or carbide ceramic insulating substrate. In order to provide an electrostatic chuck by which the temperature of an electrostatically chucked object to be treated, such as a semiconductor substrate, is quickly and precisely controlled, a heating mechanism is coupled with the bottom face of an electrostatically chucking mechanism provided with a dielectric ceramic and electrodes formed on the bottom face of the ceramic, and a cooling mechanism is coupled with the bottom face of the heating mechanism.

Abstract: Heating device having a substantially flat heating element with specifically selected physical parameters is provided for heating an object to a required temperature. The physical parameters are selected such as to, at a given power and at a selected voltage supply to the heating element, provide as low as desired temperature gradient between the temperature of the outer surface of the heating element through which heat is dissipated and the required temperature of the object. Heating devices of the invention may be implemented in domestic heaters, in food cooking devices, in medical devices, etc. Also provided is a method for designing heating elements for use in such devices.

Abstract: A thermally controlled circuit board is provided. The circuit board includes a substrate, which carries a thermally controlled circuit. The thermally controlled circuit includes a heater, a logic unit and a thermostat. The heater includes planar resistive elements, which are embedded into the substrate. A power source is selectively coupled to the heater via control of the logic unit. The thermostat is programmed with a temperature set point, and outputs a control signal based on a measured temperature level relative to the temperature set point. The logic unit selectively couples the power source to the heater, based on the control signal output from the thermostat and selectively couples power to on-board components to control the temperature of the board and the components thereon to protect the components and insure reliable operation.

Abstract: An electrical heater having a plurality electrodes disposed adjacently on a substrate in spaced apart relation and interconnected by a thermistor material, for example a positive temperature coefficient material. The electrodes each have at least one end portion and preferably two opposite end portions coupled to corresponding electrical terminal located at a common termination zone on the substrate. A spacing between adjacent electrodes may vary and adjacent electrodes may include interdigitated portions to vary the heat produced on select portions of the substrate.

Abstract: An electric heating element formed on an insulating ceramic substance includes and electrically heat-generating material film having a microstructure composed of a silicide alone, a mixture of silicide and Si, or Si along fused to the surface of sintered nitride or carbide ceramic insulating substrate. A heating mechanism is coupled with the bottom face of an electrostatically chucking mechanism provided with a dielectric ceramic and electrodes formed on the bottom face of face of the heating mechanism. The heating mechanism has a fusable electric-heating material film between two ceramic insulting substrates having the same or nearly the same coefficients of thermal expansion. The films is fused to the substrates.

Abstract: A heating assembly is provided which includes a metal stair tread member having an upper horizontal surface and a bottom surface for mounting on a stair tread of a staircase. A strip heating element is attached to the bottom surface of the stair tread member. A first covering of synthetic material encapsulates the horizontal surface of the metal stair tread member and the strip heating element on bottom surface of the stair tread member. The strip heating element is contiguous with the bottom surface and is attached thereto by a gasket extending around the peripheral edge of the strip heating element. A thermostat is electrically connected to the strip heater and to a power source for selectively supplying electric current to the strip heater in response to changes ambient temperatures. A temperature sensing element is in electrical communication with the thermostat wherein the thermostat selectively supplies the current to the strip heating element.

Abstract: A heated element assembly and method of manufacturing heated element assemblies is provided. The heated element assembly including a first and second molded sections shaped to mate with each other is provided. A resistance heating element is secured between the first and second molded sections by an interference fit. The resistance heating element includes a piercable supporting substrate and a resistance wire sewn thereon. The resistance wire is disposed in a predetermined circuit path which is substantially encompassed by the first and second molded sections. The resistance heating element is easily fixed in a position between the first and second molded sections and is capable of providing heat on vertical, horizontal and contoured surfaces.

Abstract: A heater for a lighted signal mirror assembly is disclosed. The heater delivers a diffused lighted signal to the mirror assembly. The heater also provides heating capabilities to substantially an entire reflective surface of the mirror assembly, including that portion on the reflective surface of the mirror assembly surrounding that area through which the diffused lighted signal is emitted.

Abstract: An electric heating element (11) in which electrically conductive tape (23) is wound on a non-electrically conductive former (12) and the tape is completely covered by covers (30) of electrically non-conductive but heat conductive material secured to the former. Preferably the covers and former are of Mica or Micanite. The covers are each made from several pieces and are secured to the former and each other by fastening eyelets (26) or staples extending through the covers and former intermediate the edges and at spaced positions along two opposite edges. For use in an upright toaster the tape is wound continuously round the former with each run thereof extending between the grooves in the opposite side edges of the former, the grooves in the upper portion being spaced from one another by 4.6 to 7 mm while the grooves in the lower portion of the former are spaced by a smaller distance in the range 3.6 to 5 mm.

Abstract: Heating elements, electrical devices and processes for manufacturing these components are provided. The heating elements and electrical components employ a resistance heating material, such as Ni-Cr wire, sewn with a thread to a supporting substrate, such as a non-woven glass mat. The sewn thread supports the relatively thin cross-section of the resistance material when a fusible layer is applied, such as by molding a polymer under pressure.

Abstract: An electrical heater having a plurality electrodes disposed adjacently on a substrate in spaced apart relation and interconnected by a thermistor material, for example a positive temperature coefficient material. The electrodes each have at least one end portion and preferably two opposite end portions coupled to corresponding electrical terminal located at a common termination zone on the substrate. A spacing between adjacent electrodes may vary and adjacent electrodes may include interdigitated portions to vary the heat produced on select portions of the substrate.

Abstract: An electrical resistive heating system having a Nitinol heater element in the form of wire, rod strip or tube, is flexible, ductile, tough aid chemically non-reactive. The element has connectors at each end for leads from a controller that controls the flow of current through the heater element from a source of electrical power. The Nitinol heater element is treated to have an electrically insulating surface that is also hard and chemically non-reactive, so the heater element can be put in intimate contact with the materials or substrate to be heated without shorting or electrical shock to people or equipment. The controller uses temperature data feedback from a separate temperature sensor such as a thermocouple, or uses the resistance of heater element itself as a temperature sensor, since the resistance of the Nitinol changes with temperature in a predictable way.

Abstract: A mineral insulated heating cable comprising two electrical conductors extending along the lengths of the cable and an array of heating elements distributed along the length of the cable and connected in parallel between the conductors. The heating cable is encased in a metal jacket which waterproofs the overall assembly, the jacket being electrically insulated from both the conductors and the heating elements by for example mica or glass fiber tape sheaths. The metal jacket is extruded directly onto the heating cable, or is extruded around and then drawn down onto the heating cable. Thus the structure can withstand high temperatures and yet is waterproof given the provision of the metal jacket.

Abstract: Methods of manufacturing electrical resistance heating elements are provided which include mating a pair of polymeric components around an electrical resistance heating material prior to fusing the polymeric components together, preferably by heat or pressure or both. Methods of stress relieving these polymeric components before, during or after fusing them together, are disclosed. Additionally, thermally conductive, non-electrically conductive additives can be added to improve the service life of the elements. In a further embodiment of this invention, a heating element and method of construction are provided in which first and second polymeric components are joined together with a resistance heating material therebetween. The polymeric components include retention means including a plurality of male connectors located on the first polymeric component, and a plurality of female receiving recesses located on the second polymeric component for mating with the male connectors of the first polymeric component.

Abstract: A heating element for a soleplate of an iron, composed of: a substrate constituted by a plate containing aluminum; an insulator covering one surface of the plate; and a heating circuit carried by the insulator, wherein the insulator includes an anodized oxide layer having a thickness between 10 and 200 microns and resistant to abrupt temperature variations of the plate.

Abstract: There is disclosed a ceramic heating jig consisting of a susceptor 2 on which a work to be heated is placed, a ceramic heater 3 for heating the susceptor and at least one heat shielding plate 4 for shielding heat of the ceramic heater wherein the susceptor and the heat shielding plate are located so that each of them is located across the ceramic heater each leaving a certain space therefrom, a thickness of the susceptor is 0.5 m to 5 mm, a thickness of the ceramic heater is 0.5 mm to 3 mm, a thickness of the heat shielding plate is 0.5 mm to 3 mm. Preferably, an interval between the members is 0.5 mm to 10 mm, and the members are elastically held as an integration by the elastic means 6 and the restraint means 7. There can be provided a ceramic heating jig wherein defects such as thermal deformation, breakage or the like of the susceptor or the like are hardly caused, temperature can be raised or lowered rapidly, and flatness of a susceptor can be kept even at high temperature.

Abstract: To provide a ceramic heater which is excellent in the temperature uniformity by using a ceramic material having a high heat-conductivity as a heater substrate.