Using Optical Viewing Means (e.g., Microscope) Patents (Class 228/105)
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Patent number: 11026313Abstract: An illumination system includes a measurement stage, a light-providing part, a light-receiving part, and a processing part. The light-providing part includes light sources arranged in a dome shape, which irradiate incident lights to a measurement target on the measurement stage. The light-receiving part acquires reflection lights. The processing part controls the light sources to be turned on/off according to a dome-shaped sine wave pattern. The processing part controls the light sources to be sequentially turned on/off by shifting N times according to the dome-shaped sine wave pattern for a specific measurement position of the measurement target, and calculates a phase at the specific measurement position, an average of intensities of N reflection lights, and a visibility of N reflection lights, from intensities of N reflection lights. Thus, material of the measurement target may be easily determined.Type: GrantFiled: August 17, 2020Date of Patent: June 1, 2021Assignee: DEEDIIM SENSOR INC.Inventor: Jang-Il Ser
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Patent number: 10985044Abstract: A machine vision system for substrate alignment includes first and second illumination sources (11, 12), first and second reflectors (21, 22), first and second objective lenses (31, 32) and first and second detectors (41, 42), each of which pair is symmetric with respect to an X-axis. Light beams emitted from the first and second illumination sources are irradiated on and reflected by respective substrates (1, 2), amplified by the respective objective lenses and received and detected by the respective detectors. An alignment apparatus is also disclosed. Disposing each of the pair of the first and second illumination sources, the first and second reflectors, the first and second objective lenses and the first and second detectors in symmetry with respect to the X-axis results in a significantly reduced footprint of the machine vision system along the orientation of lens barrels of the objective lenses and hence an expanded detection range thereof and improved alignment efficiency and accuracy.Type: GrantFiled: July 27, 2017Date of Patent: April 20, 2021Assignee: Shanghai Micro Electronics Equipment (Group) Co., Ltd.Inventors: Zhi Zhu, Zhijun Huo
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Patent number: 10861819Abstract: After a die is picked up with a bond head, a first optical system views and determines a position and orientation of the die relative to the bond head. Separately, a second optical system views and determines a position and orientation of the bonding location when the second optical system has its focal plane configured at a first distance from the second optical system. After the bond head is moved adjacent to the second optical system, the second optical system views and determines a position and orientation of the bond head when the second optical system has its focal plane configured at a second distance from the second optical system. The position and orientation of the die may then be adjusted to correct a relative offset between the die and the bonding location prior to depositing the die onto the bonding location.Type: GrantFiled: July 5, 2019Date of Patent: December 8, 2020Assignee: ASM TECHNOLOGY SINGAPORE PTE LTDInventors: Jiangwen Deng, Chung Sheung Yung, Wui Fung Sze
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Patent number: 10690533Abstract: A system and method for illuminating a volume with an illumination system generating an illumination intensity pattern that maintains irradiance at sufficient on and off axis irradiance levels to allow for accurate identification and measure of objects within a volume, such as within a vehicle trailer or shipping container, is provided.Type: GrantFiled: December 29, 2017Date of Patent: June 23, 2020Assignee: Symbol Technologies, LLCInventors: Vladimir Gurevich, David T. Shi
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Patent number: 10489900Abstract: To facilitate setting of a parameter at the time of generating an inspection image from an image acquired by using a photometric stereo principle. A photometric processing part generates an inspection image based on a plurality of luminance images acquired by a camera. A display control part and a display part switch and display the luminance image and the inspection image, or simultaneously display these images. An inspection tool setting part adjusts a control parameter of the camera and a control parameter of an illumination apparatus. Further, when the control parameter is adjusted, the display control part updates the image being displayed on the display part to an image where the control parameter after the change has been reflected.Type: GrantFiled: May 4, 2017Date of Patent: November 26, 2019Assignee: Keyence CorporationInventor: Daisuke Ando
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Patent number: 10414104Abstract: A method for arranging a functional layer on a plastic component of a lighting device and a composite made of the plastic component and the functional layer, in particular a frame, an outer rim, a support frame, an inner lens, a retaining element, or the like is provided. The method includes that a film-like laminar composite is provided that has the functional layer and a substrate. The laminar composite is placed in a holding fixture. A vacuum is turned on in the holding fixture and suctioning of the laminar composite by means of a suction area of the holding fixture is performed. The plastic component is arranged on the laminar composite, and at least areas of the laminar composite are welded or bonded to the plastic component by means of a welding method or by means of an adhesive method.Type: GrantFiled: March 5, 2018Date of Patent: September 17, 2019Assignee: HELLA GmbH & Co. KGaAInventors: Jennifer Dressel, Matthias Hahn, Sven Kinkel, Martin Mügge
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Patent number: 10297276Abstract: Systems and devices for achieving high throughput attachment of sub-micron alignment of components are provided. One such device can include a fixture for holding a chuck, the fixture including a plurality of alignment features for adjusting a position of the chuck, the chuck includes a top layer including a vacuum aperture for holding a first component and a bottom layer made from a translucent material, wherein the bottom layer is directly attached to the top layer.Type: GrantFiled: January 17, 2018Date of Patent: May 21, 2019Assignee: WESTERN DIGITAL (FREMONT), LLCInventors: Wachira Puttichaem, Sarawut Waiyawong
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Patent number: 10271436Abstract: A component mounting method is provided for mounting a light emitting component on a board by picking up the light emitting component from a pocket formed in a carrier tape by a mount head. The method includes recognizing a reference part formed in the board, recognizing a light emitting part of the light emitting component by imaging the light emitting component from above in a state where the light emitting component is held within the pocket by a holder from below, picking up the light emitting component by the mount head in the state where the light emitting component is held within the pocket by the holder from below, and mounting the picked up light emitting component on the board based on a recognition result of the reference part and a recognition result of the light emitting part.Type: GrantFiled: December 29, 2015Date of Patent: April 23, 2019Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.Inventors: Ryota Inoue, Naoki Azuma
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Patent number: 10262907Abstract: Embodiments of the invention include a dye and pry process for removing quad flat no-lead (QFN) packages and bottom termination components (BTC) from card assemblies. Aspects of the invention include immersing a semiconductor package assembly in a solution comprising dye and placing the immersed semiconductor package assembly under vacuum pressure. Vacuum conditions ensure that the dye solution is pulled into any cracks in the solder formed between the semiconductor package assembly and the QFN package or BTC. The package assembly is dried and a hole is drilled to expose a bottom surface of the QFN package or BTC. The QFN package or BTC is then removed by applying a force to the exposed bottom surface. The semiconductor package assembly can then be inspected for the dye to locate cracks.Type: GrantFiled: November 21, 2017Date of Patent: April 16, 2019Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Tim A. Bartsch, Jennifer Bennett, James D. Bielick, David J. Braun, John R. Dangler, Stephen M. Hugo, Theron L. Lewis, Timothy P. Younger
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Patent number: 10181451Abstract: A mounting apparatus includes: a mounting tool; a supporting mechanism; a first pressurizing mechanism having a Z axis motor as a drive source for moving the mounting tool in the vertical direction together with the supporting mechanism so as to apply a first load to the electronic component; a second pressurizing mechanism having a VCM as a drive source provided between the supporting mechanism and the mounting tool, and for moving the mounting tool in the vertical direction with respect to the supporting mechanism so as to apply a second load to the electronic component; a load cell; and a control unit configured to control driving of the first pressurizing mechanism and the second pressurizing mechanism, the control unit previously driving the second pressurizing mechanism to bring the load cell into contact with the supporting mechanism and generate precompression when the first load is applied by the first pressurizing mechanism.Type: GrantFiled: February 13, 2017Date of Patent: January 15, 2019Assignee: SHINKAWA LTD.Inventors: Akira Sato, Kohei Seyama
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Patent number: 10161865Abstract: An illumination system for recognizing material includes a measurement stage, a light-providing part, a light-receiving part, and a processing part. The measurement stage is upwardly open and the measurement target is located on the measurement stage. The light-providing part includes a plurality of illumination sections providing incident lights to the measurement target, and provides multi-directional incident lights to the measurement target from multiple upper directions at which the measurement stage is open. The light-receiving part receives single-directional reflection lights reflected by the measurement target according to the multi-directional incident lights provided by the light-providing part.Type: GrantFiled: February 13, 2017Date of Patent: December 25, 2018Assignee: DEEDIIM SENSORS INC.Inventor: Jang-Il Ser
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Patent number: 9925624Abstract: A method of aligning a subject tooling element of a material handling system of an ultrasonic bonding system is provided. The method includes the steps of: a) providing an overlay defining a relative position of at least a portion of a reference tooling element; b) viewing an image of at least a portion of the subject tooling element combined with a corresponding portion of the overlay; and c) adjusting a position of at least a portion of the subject tooling element by referring to the overlay in the image.Type: GrantFiled: June 16, 2016Date of Patent: March 27, 2018Assignee: Orthodyne Electronics CorporationInventors: Jonathan Michael Byars, Garrett Leigh Wong
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Patent number: 9784576Abstract: A calibration method for merging object coordinates and a calibration board device using the same are provided. The calibration board device has a plurality of characteristic points and a central reflection element. A center of the central reflection element has a central characteristic point. A distance sensor emits a distance sensing signal to the central reflection element, so as to obtain a central real coordinate. Intrinsic and extrinsic parameters of a camera is used to establish a transformation equation which transforms the central real coordinate into a central image coordinate. Finally, a calibration image of the calibration board device is retrieved, and the central characteristic point is searched, and the central image coordinate is projected on the calibration image whereby the central image coordinate is calibrated to aim at the central characteristic point on the calibration image, thereby generating extrinsic and intrinsic parameter parameters calibrated.Type: GrantFiled: December 28, 2015Date of Patent: October 10, 2017Assignee: Automotive Research & Test CenterInventors: Kuo-Ching Chang, Hsuan-Yu Huang
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Patent number: 9769186Abstract: Particular embodiments described herein provide for an electronic device that can be configured to monitor network traffic to and from a device, compare the monitored network traffic to characteristics of the device to determine if the monitored traffic is outside the characteristics of the device, and take remedial action if the monitored traffic is outside the characteristics of the device.Type: GrantFiled: December 23, 2014Date of Patent: September 19, 2017Assignee: McAfee, Inc.Inventors: John D. Teddy, Ramnath Venugopalan, Cedric Cochin, Joel R. Spurlock
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Patent number: 9621777Abstract: A component imaging device has: a head unit that has a first head row and a second head row; an imaging unit that images components held by heads; a moving device for moving the head unit; and an imaging control device. The imaging unit includes an image sensor and an optical system. The optical system includes a first light-guiding portion that guides light from a component of the first head row to the image sensor, and a second light-guiding portion that guides light from a component of the second head row to the image sensor. An optical path length of the first light-guiding portion is set so as to obtain a focused image, and an optical path length of the second light-guiding portion is set so as to obtain a focused image. The imaging control device controls the positions of the heads and the exposure timing.Type: GrantFiled: November 26, 2012Date of Patent: April 11, 2017Assignee: YAMAHA HATSUDOKI KABUSHIKI KAISHAInventor: Tadashi Onishi
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Patent number: 9572293Abstract: A placement apparatus for an optical component includes: a suction nozzle that includes a nozzle main body having a suction surface having a suction port, an optical component being sucked to the suction port, a plurality of nozzle electrodes disposed on the suction surface, each of the nozzle electrodes being brought into contact with a corresponding one of a plurality of component electrodes provided on the optical component so as to establish electrical conduction between each of the plurality of nozzle electrodes and a corresponding one of the plurality of component electrodes.Type: GrantFiled: January 29, 2014Date of Patent: February 14, 2017Assignee: FUJITSU LIMITEDInventors: Yoshiyuki Hiroshima, Naoki Nakamura, Akiko Matsui, Tetsuro Yamada, Takahiro Ooi, Kohei Choraku
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Patent number: 9470752Abstract: An inspection method includes photographing a measurement target to acquire image data for each pixel of the measurement target, acquiring height data for each pixel of the measurement target, acquiring visibility data for each pixel of the measurement target, multiplying the acquired image data by at least one of the height data and the visibility data for each pixel to produce a result value, and setting a terminal area by using the produced result value. Thus, the terminal area may be accurately determined.Type: GrantFiled: March 29, 2013Date of Patent: October 18, 2016Assignee: KOH YOUNG TECHNOLOGY INC.Inventors: Joong-Ki Jeong, Yu-Jin Lee, Seung-Jun Lee, Bong-Ha Hwang
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Patent number: 9466538Abstract: A method of improving chip-to-chip alignment accuracy for circuitry-including wafer-to-wafer bonding. The method comprises providing separate stages for holding first and second circuitry-including wafers, each stage including a plurality of adjacent thermal actuators arranged in an array integrated with the stage; determining planar distortions of a bonding surface of the first and second circuitry-including wafers; mapping the planar distortions for each wafer based on the relative planar distortions thereon; deducing necessary local thermal expansion measurements for each wafer to compensate for the relative distortions based on the mapping; translating the thermal expansion measurements into a non-uniform wafer temperature profile model and a local heat flux profile model for each wafer; aligning the first and second wafers; and bonding the first and second wafers together.Type: GrantFiled: November 25, 2015Date of Patent: October 11, 2016Assignee: GLOBALFOUNDRIES INC.Inventors: Spyridon Skordas, Subramanian S Iyer, Donald Francis Canaperi, Shidong Li, Wei Lin
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Patent number: 9431365Abstract: A semiconductor chip bonding apparatus includes a bonding head to adsorptively pick up a semiconductor chip, a bonding stage supporting a substrate, the semiconductor chip to be bonded to the substrate on the bonding stage, a first camera to capture an image of the semiconductor chip and to obtain positional information regarding the semiconductor chip, a second camera to capture an image of the substrate and to obtain positional information regarding the substrate, a correction device structure at a first side surface of the bonding stage, the correction device structure including a correction substrate and at least one correction chip, and a bonding controller to control pick up of the at least one correction chip by the bonding head, mounting of the at least one correction chip on the correction substrate, and correcting of a bonding position.Type: GrantFiled: April 30, 2015Date of Patent: August 30, 2016Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Seung-dae Seok, Sang-yoon Kim, Hui-jae Kim, Jae-bong Shin
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Patent number: 9162320Abstract: A chip attraction passage 23 is provided extending through a housing 5A, a tool base 13, and a bonding tool 14. When the chip attraction passage 23 is attracted by the vacuum source 32, a semiconductor chip 3 can be attracted to and held on the lower surface of the bonding tool 14. The tool base 13 is configured by laminating transmitting members 11 and 12. A connection passage 29, which is a main part of the chip attraction passage 23, is configured by a groove 12B formed on the upper surface of the transmitting member 12 and a through-hole 12A in the center of the transmitting member 12. When the semiconductor chip 3 is heated by laser beams L and bonded to a substrate 2, even if flux or the like adhering to bumps 35 transpires and adheres in the connection passage 29.Type: GrantFiled: June 6, 2013Date of Patent: October 20, 2015Assignee: SHIBUYA KOGYO CO., LTD.Inventors: Eiji Tanaka, Hiroyuki Yasuyoshi
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Publication number: 20150102087Abstract: A method and a device for improving the quality of the weld seam in friction stir welding is provided. The process of friction stir welding is effected by means of a friction welding tip, in which a spiral conveyor screw is provided in the spindle bearing. The longitudinal axis of the spindle bearing is inclined at an angle to the vertical. The sliding surface of the rotating spindle consists of a flat sliding surface and, for the welding of curved seams, in each case of a sliding surface inclined at an acute angle to the sliding surface, the friction welding tip is designed in the shape of a truncated cone. The lateral surface of the truncated cone is formed by six trapezoidal planar parts, of which three planar parts each uniformly distributed at the circumference lie at an angle of 120 degrees with respect to one another and account for a proportion greater than ? at the circumference.Type: ApplicationFiled: May 29, 2013Publication date: April 16, 2015Applicant: Grenzebach Maschinenbau GmbHInventors: Johann Foerg, Martin Demharter, Andreas Reitenauer
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Patent number: 8777086Abstract: A bonding tool is adjusted to a desired operational position by viewing the bonding tool with an image-capturing device and displaying an image of the bonding tool as viewed by the image-capturing device onto a display screen. A corresponding image of a reference bonding tool showing the desired operational position of the bonding tool is superimposed onto the display screen and the position of the bonding tool is adjusted with an adjustment mechanism until the bonding tool as viewed by the image-capturing device is aligned with the superimposed image of the reference bonding tool.Type: GrantFiled: April 20, 2012Date of Patent: July 15, 2014Assignee: ASM Technology Singapore Pte. Ltd.Inventors: Jiang Wen Deng, Hei Lam Chang, Tim Wai Mak
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Patent number: 8657605Abstract: Arc welding simulations that provide simulation of virtual destructive and non-destructive testing and inspection of virtual weldments for training purposes. The virtual testing simulations may be performed on virtual weldments created using a virtual reality welding simulator system (e.g., a virtual reality arc welding (VRAW) system). The virtual inspection simulations may be performed on “pre-canned” (i.e. pre-defined) virtual weldments or using virtual weldments created using a virtual reality welding simulator system. In general, virtual testing may be performed using a virtual reality welding simulator system (e.g., a virtual reality arc welding (VRAW) system), and virtual inspection may be performed using a standalone virtual weldment inspection (VWI) system or using a virtual reality welding simulator system (e.g., a virtual reality arc welding (VRAW) system).Type: GrantFiled: April 7, 2011Date of Patent: February 25, 2014Assignee: Lincoln Global, Inc.Inventors: Matthew Wayne Wallace, Carl Peters
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Patent number: 8657181Abstract: Disclosed is a wedge bonder, comprising a wedge for bonding a wire to surfaces to form an electrical interconnection therebetween, a cleaning device for cleaning the wedge, and a positioning device to which the wedge is mounted. In particular, the positioning device is operative to move the wedge to the cleaning device for cleaning. A method of cleaning a wedge of a wedge bonder is also disclosed.Type: GrantFiled: June 26, 2012Date of Patent: February 25, 2014Assignee: ASM Technology Singapore Pte LtdInventors: Chi Wah Cheng, Man Kit Mui
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Publication number: 20130248583Abstract: Disclosed herein is a reflow inspection system. The reflow inspection system according to an embodiment of the present invention includes an oven, a stage on which a reflow inspection target is placed inside the oven, and which includes a temperature detecting sensor for detecting a temperature of the reflow inspection target formed on one side thereof; a light source unit formed on one side of the oven and irradiating the reflow inspection target with light, an imaging unit sucking smoke generated in the reflow inspection target, and obtaining image information of the reflow inspection target to thereby transmit the obtained image information to the outside, an image processing unit processing the image information obtained in the imaging unit, and a control unit connected to the stage, the temperature detecting sensor, and the image processing unit to perform control of a reflow inspection process.Type: ApplicationFiled: June 25, 2012Publication date: September 26, 2013Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.Inventors: Yun Bog Kim, Young Ju Lee, Seon Young Myoung, Suk Jin Ham, Seong Chan Park, Hyun Jung Lee
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Patent number: 8496158Abstract: A method for monitoring free air ball (FAB) formation during a wire bonding process includes attaching a dummy bond wire to an unused location on a first surface of a semiconductor chip carrier, extending the dummy bond wire a predetermined distance from the first surface such that a tip of the dummy bond wire is spaced from the first surface, and forming a dummy FAB at the tip of the bond wire. A profile of the dummy FAB is inspected with an imaging unit to identify any defects in the dummy FAB. An alarm is triggered and the wire bonding process is halted if the dummy FAB is defective so that bonding parameters may be adjusted. The wire bonding process is restarted after the bonding parameters have been adjusted.Type: GrantFiled: September 6, 2012Date of Patent: July 30, 2013Assignee: Freescale Semiconductor, Inc.Inventors: Fei Zong, Guoliang Gong, Meiquan Huang, Hejin Liu
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Patent number: 8426769Abstract: The invention relates to a method of displaying and monitoring the profile of a weld bead (4), in which, placed inside the groove, there is an assembly (10) comprising, facing one another, an image acquisition means (11), a light source (12), the beam of which is directed towards said image acquisition means, and, between the image acquisition means and the light source, a mask (13); the optical axis of the image acquisition means (11) is oriented so as to be approximately parallel to the sidewalls (5, 6) of the groove (3); a light beam produced by the light source (12) is directed towards the mask (13) and the image acquisition means (11); a central shadow zone and a peripheral halo are formed by means of the light beam and the mask (13), said halo illuminating, approximately perpendicularly, the weld bead (4) and the sidewalls (5, 6); the profile of the weld bead (4) and the sidewalls (5, 6) are displayed on a display/monitoring means; and said assembly (10) is moved inside the groove (3) longitudinally andType: GrantFiled: November 4, 2008Date of Patent: April 23, 2013Assignee: Areva NPInventors: Jean-Claude Ferlay, Jean-Mathieu Mestre-Bresson
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Patent number: 8371027Abstract: In an electronic components mounting process fabricating a mount circuit board due to an electronic components mounting system formed of a plurality of electronic components mounting apparatuses by connecting them to each other, data of solder paste position which is printed on the circuit board is transmitted as feedforward data to an electronic components placement apparatus and a placement state inspecting apparatus. A control parameter which controls a placing position in a components placement operation due to the electronic components placement apparatus and an inspection parameter which indicates a standard position of the components in a placement state inspection are updated on the basis of the soldering position data. Therefore, it is possible to achieve a precise mounting by effectively and properly using inspection information obtained from each process.Type: GrantFiled: April 12, 2007Date of Patent: February 12, 2013Assignee: Panasonic CorporationInventors: Masafumi Inoue, Mitsuhaya Tsukamoto, Masahiro Kihara, Syoichi Nishi
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Patent number: 8322591Abstract: A system for automated assembly and welding is disclosed. The system includes a pallet for receiving incoming workpieces; a workpiece holder having a plurality of electromagnets; a handling robot configured to transport incoming workpieces from the pallet to the workpiece holder; and a controller in communication with the workpiece holder and the handling robot. The controller is configured to determine an orientation of a workpiece positioned on the workpiece holder, and to selectively adjust an activation state of one or more electromagnets of the workpiece holder based upon the orientation of the workpiece. A method of assembling and welding workpieces is also disclosed.Type: GrantFiled: February 27, 2012Date of Patent: December 4, 2012Assignee: Caterpillar Inc.Inventors: Fernando Martinez Diez, Keith Alan Herman, Huijun Wang, Howard W. Ludewig, Mathew Mark Robinson
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Publication number: 20120273554Abstract: An ultrasonic solar substrate bonding system is provided. The system includes a bond head assembly including a bonding tool for bonding a ribbon material to a plurality of solar substrates. The system also includes a ribbon feeding system successively supplying portions of a continuous length of the ribbon material to the bonding tool such that the bonding tool forms ultrasonic bonds between the portions of the continuous length of the ribbon material and a plurality of solar substrates.Type: ApplicationFiled: July 2, 2012Publication date: November 1, 2012Applicant: ORTHODYNE ELECTRONICS CORPORATIONInventors: Christoph B. Luechinger, Orlando L. Valentin
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Publication number: 20120228364Abstract: The present invention relates to a method for printing a substrate, in particular a printed circuit board, with a printing paste, in particular a solder paste, comprising the following steps: —applying a printing screen to the substrate, —printing the substrate using screen printing technology through openings in the printing screen so as to achieve at least one printed structure consisting of printing paste, —separating the printing screen and the substrate by lifting these parts off from one another, —inserting an optical inspection unit between the printing screen and the substrate, —checking the printed structure in terms of the printing paste thickness thereof by means of the inspection unit, —ending the printing when the result of the printing corresponds to at least one preset value. The invention furthermore relates to an inspection unit (1) and a printing device (2).Type: ApplicationFiled: October 12, 2010Publication date: September 13, 2012Inventor: Torsten Vegelahn
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Patent number: 8240543Abstract: Regarding electronic component mounting in which an electronic component having plural solder bumps for external connection on its lower surface is mounted on a board, in an electronic component mounting operation of previously measuring the height position of solder paste on the board on which the solder paste has been printed, and mounting the electronic component on the board on which the solder paste has been printed by a loading head, whether the transfer of the solder paste to the solder bumps is necessary or not is judged on the basis of the measurement result of the height of the solder paste. In case that it is judged that the transfer is necessary, the transfer of the solder paste is executed, and thereafter the electronic component is mounted on the board. Hereby, it is possible to prevent the poor joint in case that a thin-sized semiconductor package which causes easily warp deformation is mounted on the board by soldering.Type: GrantFiled: March 26, 2007Date of Patent: August 14, 2012Assignee: Panasonic CorporationInventors: Syoichi Nishi, Mitsuhaya Tsukamoto, Masahiro Kihara, Masafumi Inoue
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Patent number: 8113412Abstract: A method includes electrically grounding a first plurality of metal bumps on a first surface of an interconnection component to a common ground plate. A voltage contrast (VC) image of a second plurality of metal bumps of the interconnection component is generated. Grey levels of the second plurality of metal bumps in the VC image are analyzed to find defect connections between the second plurality of metal bumps and respective ones of the first plurality of metal bumps.Type: GrantFiled: May 13, 2011Date of Patent: February 14, 2012Assignee: Taiwan Semiconductor Manufacturing Company, LtdInventors: Nan-Hsin Tseng, Yun-Han Lee, Chin-Chou Liu, Ji-Jan Chen, Wei-Pin Changchien, Chien-Hui Chen
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Patent number: 8091762Abstract: A wire is bonded to a target surface using a rotary bond head by positioning a wedge bonding tool of the bond head over the target surface. A camera system is tilted at an oblique angle relative to an arrangement of the bond head to conduct pattern recognition of bonding points on the target surface for determining actual positions of the bonding points and an orientation between the actual positions of first and second bonding points. The bond head is moved to the actual position of the first bonding point and rotated to the determined orientation. Thereafter, the wire is bonded to the target surface at the first bonding point with the bond head.Type: GrantFiled: December 8, 2010Date of Patent: January 10, 2012Assignee: ASM Assembly Automation LtdInventors: Chi Wah Cheng, Man Kit Mui, Hon Kam Ng, Hei Lam Chang
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Patent number: 8091761Abstract: A bonding apparatus provided with a control unit capable of controlling the position of the central axis of a bonding tool in the X direction and the Y direction based on an image of a pad acquired with a camera and an offset amount, the apparatus including: an outline obtaining unit for obtaining each of the sides of the pad and an outline of a pressure-bonded ball by processing the image acquired with the camera; a gap length obtaining unit for obtaining gap lengths between the respective sides of the pad and the outline of the pressure-bonded ball; and an offset correcting unit for correcting the offset amount based on the gap lengths obtained by the gap obtaining unit.Type: GrantFiled: September 30, 2010Date of Patent: January 10, 2012Assignee: Shinkawa Ltd.Inventors: Kenji Sugawara, Yong Ghen
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Publication number: 20110226840Abstract: A simple technique to solder submicron sized, ohmic contacts to nanostructures has been disclosed. The technique has several advantages over standard electron beam lithography methods, which are complex, costly, and can contaminate samples. To demonstrate the soldering technique graphene, a single atomic layer of carbon, has been contacted, and low- and high-field electronic transport properties have been measured.Type: ApplicationFiled: November 13, 2008Publication date: September 22, 2011Applicant: The Regents of the University of CaliforniaInventors: Caglar O. Girit, Alexander K. Zettl
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Patent number: 8002165Abstract: The invention relates to a method for connecting material webs disposed with overlapping edges, wherein an automatic welding machine having a driven chassis and a drive unit disposed thereon and a welding unit is guided along the overlap zone of the material webs to be connected, such that the carried welding unit connects the edges to be connected to one another. The invention further relates to an automatic welding machine for performing the method.Type: GrantFiled: September 11, 2008Date of Patent: August 23, 2011Assignee: LEISTER Process TechnologiesInventors: Reto Zurbuchen, Ulrich Gubler
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Patent number: 7899239Abstract: An inspection method of determining the bonded status of a wire ball bonded to a pad of a semiconductor chip is provided. An image of the bonding position between the pad and the ball is taken by an image-taking unit for detection of an in focus height of the pad, in focus height of an upper surface of the bonded ball, an external diameter of the bonded ball, and a ball bonded point respectively while switching a color of a coaxial illuminating light depending on the specific position for the inspection. Blue light can be used in the detection of the pad and an external diameter of the bonded ball while red or yellow light is used for detecting an upper surface of the bonded ball and the ball bonded point.Type: GrantFiled: September 28, 2005Date of Patent: March 1, 2011Assignee: Kaijo CorporationInventors: Kimiji Nishimaki, Noritaka Horiuchi
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Patent number: 7886956Abstract: A bonding apparatus includes: a reference plane; a bonding arm configured to be rotated about a rotation center that is arranged separately from the reference plane and to move a capillary attached at a tip end thereof obliquely toward and away from the reference plane; and an imaging device for optically detecting bonding positions on a semiconductor chip and/or a lead frame, in which an angle between an optical axis being heading for the imaging device from the reference plane and the reference plane is approximately equal to an angle between a motion trajectory of a tip end of the capillary and the reference plane, and thereby the bonding apparatus can have a wide bonding area with a simple mechanism as well as perform high-speed and high-accuracy bonding.Type: GrantFiled: July 22, 2010Date of Patent: February 15, 2011Assignee: Shinkawa Ltd.Inventors: Kohei Seyama, Yutaka Kondo, Osamu Kakutani, Shigeru Hayata
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Patent number: 7857190Abstract: A wire bonding apparatus including a bonding control section provided with an electrical non-bonding detector, an optical non-bonding detector, and an optical shape detector, which are for detecting non-bonding between a first bonding point and a bonding wire; and when non-bonding is detected by the electrical non-bonding detector and non-bonding is also detected by the optical non-bonding detector, then the tip end of the bonding wire is reformed by, based on the shape of the tip end of the bonding wire detected by the optical shape detector, a ball formation device into a ball of a prescribed shape, and rebonding is performed at the first bonding point.Type: GrantFiled: January 29, 2010Date of Patent: December 28, 2010Assignee: Kabushiki Kaisha ShinkawaInventors: Kuniyuki Takahashi, Shinsuke Tei, Noriko Suzuki, Noriko Mori, Shinji Maki
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Publication number: 20100301101Abstract: A bonding apparatus includes: a reference plane; a bonding arm configured to be rotated about a rotation center that is arranged separately from the reference plane and to move a capillary attached at a tip end thereof obliquely toward and away from the reference plane; and an imaging device for optically detecting bonding positions on a semiconductor chip and/or a lead frame, in which an angle between an optical axis being heading for the imaging device from the reference plane and the reference plane is approximately equal to an angle between a motion trajectory of a tip end of the capillary and the reference plane, and thereby the bonding apparatus can have a wide bonding area with a simple mechanism as well as perform high-speed and high-accuracy bonding.Type: ApplicationFiled: July 22, 2010Publication date: December 2, 2010Applicant: SHINKAWA LTDInventors: Kohei Seyama, Yutaka Kondo, Osamu Kakutani, Shigeru Hayata
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Patent number: 7810698Abstract: An apparatus for correcting a positional offset of a bonding tool during bonding operations comprises a first fiducial mark and a second fiducial mark spaced from the first fiducial mark located on the bonding tool. A first imaging path emanates from the first fiducial mark and a second imaging path emanates from the second fiducial mark when the first and second fiducial marks are illuminated at a reference position. An optical system is positioned along the first and second imaging paths to view images of the first and second fiducial marks. A processor is operative to calculate a current position of the bonding tool and to compare it to a desired position so that the bonding tool's positional offset may be corrected by moving it to the desired position.Type: GrantFiled: November 20, 2008Date of Patent: October 12, 2010Assignee: ASM Assembly Automation Ltd.Inventors: Kwok Kee Chung, Wing Hong Leung, Ka Fai Fung, Chi Leung Vincent Mok, Shun Ming Kenneth Fung
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Publication number: 20100143658Abstract: A soldering flux composition comprising: (i) a carrier vehicle comprising a solvent; (ii) an activator component for activating a metal surface for soldering; (iii) a colour-imparting component with an appropriate colour to facilitate optical detection of flux on the fluxed component; and optionally (iv) a gelling component to control flux rheology. The colour-imparting component is utilised to indicate the presence of desired amounts of flux. A component with inadequate flux for reliable soldering can be rejected.Type: ApplicationFiled: January 22, 2010Publication date: June 10, 2010Applicant: Henkel LimitedInventor: Frank Timothy Lawrence
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Publication number: 20100132873Abstract: Disclosed are an apparatus for monitoring a process of joining components and for retracing quality, at least sections of an image which has been recorded by a camera and has been reproduced by a screen being able to be stored together with an identity number in a memory device, and a method for using such an apparatus.Type: ApplicationFiled: September 14, 2006Publication date: June 3, 2010Applicant: ASSA ABLOY IDENTIFICATION TECHNOLOGIES GMBHInventor: Ulrich Lang
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Patent number: 7709294Abstract: A method and apparatus for bonding integrated circuits uniquely suited to high volume tag production is described, where conductive material of a substrate at the die-attach-area is cut before an IC chip or transponder is placed on the conductive material over the cut and bonded. The apparatus performs the method of placing a first chip on a substrate having a conductive layer, measuring the location of the first chip on the substrate, cutting the conductive layer at a location of an expected subsequently placed chip to form a cut based on the measured location of the first chip, and placing the subsequently placed chip on the substrate over the cut.Type: GrantFiled: June 24, 2005Date of Patent: May 4, 2010Assignee: Checkpoint Systems, Inc.Inventors: Thomas J. Clare, Andre Cote, Eric Eckstein
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Patent number: 7699209Abstract: A bonding method involving detection of non-bonding of a bonding wire to a first bonding point, the method including an electrical non-bonding detection step and an optical non-bonding detection step, wherein data on whether the respective first bonding points are predetermined bonding points where an electrical non-bonding detection is not applicable are acquired from a memory unit; and when it is determined that a first bonding point is the predetermined bonding point, a non-bonding verification on the first bonding point is executed in the optical non-bonding detection step, and when the first bonding point is not the predetermined bonding point, then non-bonding detection on the first bonding point is executed in the electrical non-bonding detection step.Type: GrantFiled: December 28, 2006Date of Patent: April 20, 2010Assignee: Kabushiki Kaisha ShinkawaInventor: Shinsuke Tei
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Patent number: 7686204Abstract: A wire bonding apparatus including a bonding control section provided with an electrical non-bonding detector, an optical non-bonding detector, and an optical shape detector, which are for detecting non-bonding between a first bonding point and a bonding wire; and when non-bonding is detected by the electrical non-bonding detector and non-bonding is also detected by the optical non-bonding detector, then the tip end of the bonding wire is reformed by, based on the shape of the tip end of the bonding wire detected by the optical shape detector, a ball formation device into a ball of a prescribed shape, and rebonding is performed at the first bonding point.Type: GrantFiled: December 27, 2006Date of Patent: March 30, 2010Assignee: Kabushiki Kaisha ShinkawaInventors: Kuniyuki Takahashi, Shinsuke Tei, Noriko Suzuki, Noriko Mori, Shinji Maki
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Patent number: 7654436Abstract: A wire bonding apparatus and method in which separate first and second positioning tables are provided for mounting electronic devices to be wire bonded, and a bonding tool is provided at a bonding position for bonding the electronic devices. First and second loading/unloading positions are provided for loading electronic devices to or unloading electronic devices from the positioning tables. The first and second positioning tables are operative to move independently of each other, such that the first positioning table is movable between the first loading/unloading position and the bonding position and the second positioning table is movable between the second loading/unloading position and the bonding position.Type: GrantFiled: September 20, 2007Date of Patent: February 2, 2010Assignee: ASM Assembly Automation Ltd.Inventors: Wing Cheung James Ho, Hon Shing Eddie Law, Kam Hong Kenneth Lam, Wai Lok Ben To
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Patent number: 7624904Abstract: A wire bonding machine including a bondhead assembly having a transducer and a bonding tool is provided. The bondhead assembly is configured for substantially vertical movement with respect to a bonding surface of the wire bonding machine during a wire bonding operation. The wire bonding machine further includes a camera configured to receive images of a portion of the bondhead assembly, the images being used to determine a position where a length of the transducer is substantially parallel to the bonding surface.Type: GrantFiled: September 29, 2008Date of Patent: December 1, 2009Assignee: Kulicke and Soffa Industries, Inc.Inventor: John J. Smith
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Patent number: 7597234Abstract: The invention concerns a method for mounting a semiconductor chip with bumps on one surface onto a substrate location of a substrate, whereby the bumps are brought into contact with corresponding pads on the substrate location. Reference marks are attached to the bondhead that enable measurement of the actual position of the semiconductor chip as well as measurement of the actual position of the substrate location in relation to a system of coordinates defined by the reference marks. Positional displacement of the individual components of the assembly machine caused by thermal influences can be compensated without perpetual calibration procedures having to be carried out.Type: GrantFiled: December 22, 2006Date of Patent: October 6, 2009Assignee: Oerlikon Assembly Equipment AG, SteinhausenInventors: Patrick Blessing, Ruedi Grueter, Dominik Werne